CN103033919B - System capable of automatically compensating and focusing in process of automatic scanning and method and application thereof - Google Patents
System capable of automatically compensating and focusing in process of automatic scanning and method and application thereof Download PDFInfo
- Publication number
- CN103033919B CN103033919B CN201210464805.2A CN201210464805A CN103033919B CN 103033919 B CN103033919 B CN 103033919B CN 201210464805 A CN201210464805 A CN 201210464805A CN 103033919 B CN103033919 B CN 103033919B
- Authority
- CN
- China
- Prior art keywords
- target platform
- displacement
- focusing
- objective table
- adjusting mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Microscoopes, Condenser (AREA)
- Automatic Focus Adjustment (AREA)
Abstract
The invention relates to a system capable of automatically compensating and focusing in a process of automatic scanning, an implementation method thereof and an application thereof on a microscope, and is used for compensating and revising tiny errors caused by factors such as mechanical motions, machining work and installations, and expansions caused by heat and contractions caused by cold, so that the microscope is guaranteed to gain a clear image on each view field in the process of scanning. The system capable of automatically compensating and focusing comprises a target platform and an imaging device. The target platform moves in a plane. The imaging device moves in a direction perpendicular to the target platform. The system capable of automatically compensating and focusing further comprises a focusing and compensating system which comprises at least two displacement measuring devices. The first displacement measuring device is installed on the target platform and is used for detecting displacement errors in the vertical direction in the movement process of the target platform. The second displacement measuring device is installed on the imaging device and is used for detecting a relative distance between a lens of the imaging device and the target platform.
Description
Technical field
The present invention relates to a kind of compensation focusing system, more particularly, relate to a kind of system of auto-compensation focusing in autoscan process, and implementation method, and be used on microscope, for the slight error produced due to mechanical motion, machining and installation, the factor such as to expand with heat and contract with cold, compensate and correct, thus ensureing that microscope is in scanning process, each visual field can both obtain image clearly.
Background technology
Full microscope scanning system is the high precision scanner occurred in recent years, is widely used in the fields such as medical research, clinical practice, biological study and commercial Application.As shown in Figure 1, during focusing, object lens 102 keep static to traditional microscope scanning system, and objective table 101 drives testee to move up and down.Also have and adopt sensor to detect microscope Z axis position, sensor is fixed on microscope frame, it is popped one's head in and contacts, when objective table moves up and down focusing, follow objective table synchronously to move up and down, and drive sensor probe to move, the displacement making sensor can obtain objective table to move up and down, in conjunction with software focus model, complete focusing compensation process.
The micro objective depth of field is generally less than 2um, and trickle change all can cause image blurring, and prior art mainly exists tripartite's planar defect, easily produces the problems referred to above.
One, objective table is except X, Y-direction motion, also have Z-direction motion, when X, Y move, the center of gravity of objective table can change, and objective table is not fixed in z-direction, the change of center of gravity can cause objective table to tilt to some directions, causes change in z-direction thus, although this change may be very trickle, but have very large probability to exceed object lens depth of field 2um, thus effect diagram image sharpness.
Its two, objective table X, Y-axis adopt screw mandrel to add the kind of drive of linear guides usually, and whether linear guides enough smooth, and whether screw mandrel can be accomplished completely parallel with the assembling of guide rail, and these only just may reach in the ideal situation.During actual objective table X, Y motion, because machining can produce error, add and the error that assembling produces make stage surface that micron-sized upper and lower fluctuating error can occur, as long as this fluctuation exceedes the object lens depth of field, will effect diagram image sharpness.
Its three, when use sensor detect the displacement of objective table Z axis time, all only have detected the lifting displacement of objective table, often have ignored above-mentioned first, second point impact, cause its actual effect unsatisfactory.
Summary of the invention
The object of the invention is to overcome the deficiencies in the prior art, a kind of slight error that can detect between target and camera lens is provided, and the system and method that the auto-compensation of correction is focused is provided, and applied to microscope, realize microscope in scanning process, each visual field can both obtain image clearly.
Technical scheme of the present invention is as follows:
A kind of system of auto-compensation focusing in autoscan process, comprise target platform, imaging device, described target platform is in place plane motion, described imaging device moves upward in the side perpendicular to target platform, also comprise focusing bucking-out system, described focusing bucking-out system comprises at least two displacement measuring devices, and the first displacement measuring device is installed on target platform, for detecting the error displacement of the vertical direction existed in target platform motion process; Second measuring system is arranged on imaging device, for the relative distance of the camera lens and target platform that detect imaging device.
As preferably, described displacement measuring device comprises displacement transducer, probe, and the first probe of the first displacement measuring device and target platform surface contact, for the fluctuating displacement of the vertical direction that measurement target platform produces in motion process; Second probe of second measuring system contacts with the focus adjusting mechanism of imaging device, for the relative distance of the camera lens and target platform of measuring imaging device.
As preferably, be provided with trimmer between the first probe and target platform surface, described tab surface is smooth, and trimmer is fixed on the surface of target platform, and the first probe contacts with trimmer.
One auto-compensation focusing method in autoscan process, step is as follows:
1) the error displacement of the vertical direction produced in measurement target Platform movement process, and the displacement of the focus adjusting mechanism of imaging device;
2) calculate position of focal plane by focus adjusting mechanism changing coordinates, calculated the deviation of target platform and position of focal plane by error displacement;
3) according to the deviation of gained, corresponding adjustment focus adjusting mechanism compensates and corrects, make the distance of the focus adjusting mechanism after compensating approach and target platform equal step 2) calculate gained position of focal plane and do not compensate and correct before the distance of focus adjusting mechanism, ensure that imaging device is in position of focal plane all the time and obtains image clearly.
Based on a microscope for the system of the focusing of auto-compensation in autoscan process, comprise microscopic system, digital camera head; This described microscopic system, comprises frame, object lens, objective table, focus adjusting mechanism, imaging optical system, light-source illuminating system; , described objective table is fixed in frame, objective table move in the horizontal plane and vertical direction keep static, object lens move up and down in the direction perpendicular to objective table place plane; Also comprise focusing bucking-out system, described focusing bucking-out system comprises at least two displacement measuring devices, and the first displacement measuring device is arranged on above objective table, for detecting the error displacement of the vertical direction existed in target platform motion process; Second measuring system is arranged on object lens, for the moving displacement of objective lens.
As preferably, described displacement measuring device comprises displacement transducer, probe, and the first probe of the first displacement measuring device contacts with stage surface, for measuring the fluctuating displacement of the vertical direction that objective table produces in motion process; Second probe of second measuring system contacts with the focus adjusting mechanism of object lens, for the relative distance of objective lens with observation sample.
As preferably, be provided with trimmer between the first probe and stage surface, described tab surface is smooth, and trimmer is fixed on the surface of objective table, and the first probe contacts with trimmer.
As preferably, the area of trimmer is not less than the sweep limit of object lens to objective table.
As preferably, described focusing bucking-out system is connected with computer system, computer system obtains the distance of error displacement and object lens and observation sample, position of focal plane is calculated by focus adjusting mechanism changing coordinates, the deviation of objective table and position of focal plane is calculated by error displacement, again according to the deviation of gained, corresponding adjustment focus adjusting mechanism compensates and corrects, the distance of the focus adjusting mechanism before making the distance of the focus adjusting mechanism after compensating approach and objective table equal position of focal plane and not compensate and correct, ensures that object lens are in position of focal plane all the time and obtain image clearly.
As preferably, described objective table, object lens are driven by motor, and described motor is connected with electronic control system, control by electronic control system, electronic control system is connected with computer system, obtains the result of calculation of computer system, carries out automatic compensating correction.
As preferably, described digital camera head is more than one, comprises scanning imagery camera, assisted focused camera.
Beneficial effect of the present invention is as follows:
High-precision sensor measurement microscopic system Z axis position and objective table X, the kinetic Z-direction of Y-direction is utilized to change displacement, and the slight error to produce due to mechanical motion, machining and installation, the factor such as to expand with heat and contract with cold, COMPREHENSIVE CALCULATING is carried out by the measurement data of control system and software Real-time Obtaining scrambler, draw the correct offset arriving testee focal plane, and control microscope Z axis is revised in real time, thus ensureing that microscope is in scanning process, each visual field can both obtain image clearly.
The mode controlling object lens focusing has more significant advantage:
One, object lens are relative to objective table, and volume is little, lightweight, more easily controls, and are not easy because deadweight is glided;
Its two, objective table eliminates the motion of Z-direction, objective table firmly can be fixed in frame, and the impact of Z-direction that objective table gravity center shift is caused variation drops to minimum.
Accompanying drawing explanation
Fig. 1 is the structural representation of early stage autoscan microscopic system;
Fig. 2 is focusing bucking-out system schematic diagram of the present invention;
Fig. 3 is structural representation of the present invention;
Fig. 4 is front schematic view of the present invention;
Fig. 5 is side schematic view of the present invention;
Fig. 6 is the partial schematic diagram of the present invention first displacement measuring device;
Fig. 7 is the partial schematic diagram of second measuring system of the present invention;
In figure: 101 is microscopical objective tables of prior art, 102 is microscopical object lens of prior art, and 1 is frame, 2 is target platforms, 3 is trimmers, and 4 is first displacement measuring devices, and 41 is first probes, 42 is first supports, 5 is second measuring system, and 51 is second probes, and 52 is second supports, 53 is second probe brackets, 6 is camera lenses, and 7 is first motors, and 8 is second motors, 9 is Z axis motors, 10 is imaging optical systems, and 11 is digital camera heads, and 12 is light-source illuminating systems, 13 is gears, and 14 is Z axis screw mandrels.
Embodiment
Below in conjunction with drawings and Examples, the present invention is described in further detail.
As shown in Figure 2, a kind of system of auto-compensation focusing in autoscan process, comprise target platform 2, imaging device, described target platform 2 is in place plane motion, described imaging device moves upward in the side perpendicular to target platform 2, also comprises focusing bucking-out system, and described focusing bucking-out system comprises at least two displacement measuring devices, first displacement measuring device 4 is installed on target platform 2, for detecting the error displacement of the vertical direction existed in target platform 2 motion process; Second measuring system 5 is arranged on imaging device, for the relative distance of the camera lens 6 with target platform 2 that detect imaging device.
Described displacement measuring device comprises displacement transducer, probe, and the first probe 41 of the first displacement measuring device 4 and target platform 2 surface contact, for the fluctuating displacement of the vertical direction that measurement target platform 2 produces in motion process; Second probe of second measuring system 5 51 contacts with the focus adjusting mechanism of imaging device, for the relative distance of the camera lens 6 and target platform 2 of measuring imaging device.
Be provided with trimmer 3, described trimmer 3 surfacing between the first probe 41 and target platform 2 surface, trimmer 3 is fixed on the surface of target platform 2, and the first probe 41 contacts with trimmer 3.
One auto-compensation focusing method in autoscan process, step is as follows:
1) the error displacement of the vertical direction produced in measurement target platform 2 motion process, and the displacement of the focus adjusting mechanism of imaging device;
2) calculate position of focal plane by focus adjusting mechanism changing coordinates, calculated the deviation of target platform 2 and position of focal plane by error displacement;
3) according to the deviation of gained, corresponding adjustment focus adjusting mechanism compensates and corrects, make the distance of the focus adjusting mechanism after compensating approach and target platform 2 equal step 2) calculate gained position of focal plane and do not compensate and correct before the distance of focus adjusting mechanism, ensure that imaging device is in position of focal plane all the time and obtains image clearly.
Based on a microscope for the system of the focusing of auto-compensation in autoscan process, comprise microscopic system, digital camera head; This described microscopic system, comprises frame 1, object lens (i.e. the camera lens 6 of imaging device), objective table (i.e. target platform 2), focus adjusting mechanism, imaging optical system, light-source illuminating system; , described objective table is fixed in frame 1, objective table move in the horizontal plane and vertical direction keep static, object lens move up and down in the direction perpendicular to objective table place plane; Also comprise focusing bucking-out system, described focusing bucking-out system comprises at least two displacement measuring devices, and the first displacement measuring device 4 is arranged on above objective table, for detecting the error displacement of the vertical direction existed in target platform 2 motion process; Second measuring system 5 is arranged on object lens, for the relative distance of objective lens with observation sample.
Described displacement measuring device comprises displacement transducer, probe, and the first probe 41 of the first displacement measuring device 4 contacts with stage surface, for measuring the fluctuating displacement of the vertical direction that objective table produces in motion process; Second probe 51 of second measuring system 5 contacts with the focus adjusting mechanism of object lens, for measuring object lens and the relative distance observing sample.
Be provided with trimmer 3, described trimmer 3 surfacing between the first probe 41 and stage surface, trimmer 3 is fixed on the surface of objective table, and the first probe 41 contacts with trimmer 3.In order to reach optimum effect, the area of trimmer 3 is not less than the sweep limit of object lens to objective table.
Described focusing bucking-out system is connected with computer system, computer system obtains the distance of error displacement and object lens and observation sample, position of focal plane is calculated by focus adjusting mechanism changing coordinates, the deviation of objective table and position of focal plane is calculated by error displacement, again according to the deviation of gained, corresponding adjustment focus adjusting mechanism compensates and corrects, the distance of the focus adjusting mechanism before making the distance of the focus adjusting mechanism after compensating approach and objective table equal position of focal plane and not compensate and correct, ensures that object lens are in position of focal plane all the time and obtain image clearly.
Described objective table, object lens are driven by motor, and described motor is connected with electronic control system, controls by electronic control system, and electronic control system is connected with computer system, obtain the result of calculation of computer system, carry out automatic compensating correction.
Described digital camera head is more than one, comprises scanning imagery camera, assisted focused camera.
Embodiment
The microscope of a kind of system based on the focusing of auto-compensation in autoscan process as shown in Fig. 3, Fig. 4, Fig. 5, comprising: frame 1, object lens, motor-driven objective table, motor-driven focusing (Z axis) mechanism, imaging optical system 10, digital camera head 11, light-source illuminating system 12.
Its mid frame 1 is gantry frame structure, and objective table is fixed on portal frame, and objective table can in X, Y-direction motion, and keep static in z-direction, is fixed on portal frame all the time.Portal frame has enough rigidity, supports the corner of objective table, guarantees that objective table gravity center shift caused in objective table X, Y-direction motion process can not have an impact in z-direction.
Objective table is driven by motor, and the first motor 7 driving objective table X is to motion, and the second motor 8 driving objective table Y-direction is moved.
Focus adjusting mechanism is fixed on portal frame, comprises object lens, object lens lifting (Z-direction) gearing.
Focusing bucking-out system mainly comprises the first displacement measuring device 4, second measuring system 5.
As shown in Figure 6, object lens are driven by Z axis motor 9 driven gear 13 and Z axis screw mandrel 14.Different from conventional microscope mode of focusing, the present invention moves up and down realize focusing by controlling object lens, instead of controls objective table and move up and down focusing.Contrast with traditional approach, the mode controlling object lens focusing has more significant advantage, one, and object lens are relative to objective table, and volume is little, lightweight, more easily controls, and is not easy because deadweight is glided.Its two, objective table eliminates the motion of Z-direction, objective table 2 firmly can be fixed on portal frame, and the impact of Z-direction that objective table gravity center shift is caused variation drops to minimum.
Second measuring system 5 is fixed on portal frame by the second support 52, near the position of focus adjusting mechanism, focus adjusting mechanism devises second probe bracket 53 especially, second probe 51 contacts with the second probe bracket 53, in focus adjusting mechanism Z axis stroke range, second probe 51 of second measuring system 5 can be followed the second probe bracket 53 and be moved, and makes second measuring system 5 can check the moving displacement of object lens.
As shown in Figure 7, first displacement measuring device 4 is fixed on portal frame by the first probe 41 first supports 42, be positioned at above objective table, first probe 41 contacts with stage surface, to pop one's head in 41 positions contacted at objective table and first, have one block of trimmer 3, the trimmer 3 in the present embodiment is minute surface thin slice.Minute surface sheet surface is smooth, area needed for its area, size and microscan, measure-alike or slightly large, to guarantee that the first probe 41 moves all the time within the scope of minute surface thin slice in scanning process, the Z-direction change caused in objective table X, Y motion process can be detected by the first displacement measuring device 4.
The data input electronic control system that in focusing bucking-out system, the first displacement measuring device 4 and second measuring system 5 obtain and computer system, consider the error displacement of object lens position, objective table, obtain the physical location of current object lens, and compared in the position of current object lens and correct position of focal plane, control system drives Z axis motor 9 to make object lens arrive correct position of focal plane subsequently, obtains image clearly.In whole scanning process, focusing bucking-out system controls object lens according to the method described above in real time and is in correct position of focal plane, thus makes each visual field in scanning process can obtain image clearly.
Optical imaging system has multiple light splitting optical path, and the splitting ratio of each light path can be different, can connect the camera of different model and classification, reach the objects such as imaging, identification, auxiliary focusing.
Above-described embodiment is only used to the present invention is described, and is not used as limitation of the invention.As long as according to technical spirit of the present invention, change above-described embodiment, modification etc. all will be dropped in the scope of claim of the present invention.
Claims (10)
1. the system of an auto-compensation focusing in autoscan process, comprise target platform, imaging device, described target platform is in place plane motion, described imaging device moves upward in the side perpendicular to target platform, it is characterized in that, also comprise focusing bucking-out system, described focusing bucking-out system comprises at least two displacement measuring devices, first displacement measuring device is installed on target platform, for detecting the error displacement of the vertical direction existed in target platform motion process; Second measuring system is arranged on imaging device, for the relative distance of the camera lens and target platform that detect imaging device.
2. the system of auto-compensation focusing in autoscan process according to claim 1, it is characterized in that, described displacement measuring device comprises displacement transducer, probe, first probe of the first displacement measuring device and target platform surface contact, for the fluctuating displacement of the vertical direction that measurement target platform produces in motion process; Second probe of second measuring system contacts with the focus adjusting mechanism of imaging device, for the relative distance of the camera lens and target platform of measuring imaging device.
3. the system of auto-compensation focusing in autoscan process according to claim 2, it is characterized in that, be provided with trimmer between the first probe and target platform surface, described tab surface is smooth, trimmer is fixed on the surface of target platform, and the first probe contacts with trimmer.
4. an auto-compensation focusing method in autoscan process, it is characterized in that, step is as follows:
1) the error displacement of the vertical direction produced in measurement target Platform movement process, and the displacement of the focus adjusting mechanism of imaging device;
2) calculate position of focal plane by focus adjusting mechanism changing coordinates, calculated the deviation of target platform and position of focal plane by error displacement;
3) according to the deviation of gained, corresponding adjustment focus adjusting mechanism compensates and corrects, make the distance of the focus adjusting mechanism after compensating approach and target platform equal step 2) calculate gained position of focal plane and do not compensate and correct before the distance of focus adjusting mechanism, ensure that imaging device is in position of focal plane all the time and obtains image clearly.
5., based on a microscope for the system of the focusing of auto-compensation in autoscan process, comprise microscopic system, digital camera head; Described microscopic system, comprises frame, object lens, objective table, focus adjusting mechanism, imaging optical system, light-source illuminating system; Described objective table is fixed in frame, objective table move in the horizontal plane and vertical direction keep static, object lens move up and down in the direction perpendicular to objective table place plane; It is characterized in that, also comprise focusing bucking-out system, described focusing bucking-out system comprises at least two displacement measuring devices, and the first displacement measuring device is arranged on above objective table, for detecting the error displacement of the vertical direction existed in target platform motion process; Second measuring system is arranged on object lens, for the relative distance of objective lens with observation sample;
Described focusing bucking-out system is connected with computer system, computer system obtains the distance of error displacement and object lens and observation sample, position of focal plane is calculated by focus adjusting mechanism changing coordinates, the deviation of objective table and position of focal plane is calculated by error displacement, again according to the deviation of gained, corresponding adjustment focus adjusting mechanism compensates and corrects, the distance of the focus adjusting mechanism before making the distance of the focus adjusting mechanism after compensating approach and objective table equal position of focal plane and not compensate and correct, ensures that object lens are in position of focal plane all the time and obtain image clearly.
6. microscope according to claim 5, it is characterized in that, described displacement measuring device comprises displacement transducer, probe, and the first probe of the first displacement measuring device contacts with stage surface, for measuring the fluctuating displacement of the vertical direction that objective table produces in motion process; Second probe of second measuring system contacts with the focus adjusting mechanism of object lens, for measuring object lens and the relative distance observing sample.
7. microscope according to claim 6, is characterized in that, be provided with trimmer between the first probe and stage surface, described tab surface is smooth, and trimmer is fixed on the surface of objective table, and the first probe contacts with trimmer.
8. microscope according to claim 7, is characterized in that, the area of trimmer is not less than the sweep limit of object lens to objective table.
9. microscope according to claim 5, it is characterized in that, described objective table, object lens are driven by motor, described motor is connected with electronic control system, control by electronic control system, electronic control system is connected with computer system, obtains the result of calculation of computer system, carries out automatic compensating correction.
10. microscope according to claim 5, is characterized in that, described digital camera head is more than one, comprises scanning imagery camera, assisted focused camera.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210464805.2A CN103033919B (en) | 2012-11-16 | 2012-11-16 | System capable of automatically compensating and focusing in process of automatic scanning and method and application thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210464805.2A CN103033919B (en) | 2012-11-16 | 2012-11-16 | System capable of automatically compensating and focusing in process of automatic scanning and method and application thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103033919A CN103033919A (en) | 2013-04-10 |
| CN103033919B true CN103033919B (en) | 2015-04-29 |
Family
ID=48020968
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210464805.2A Active CN103033919B (en) | 2012-11-16 | 2012-11-16 | System capable of automatically compensating and focusing in process of automatic scanning and method and application thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103033919B (en) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104729404B (en) * | 2015-03-27 | 2018-08-07 | 苏州汉基视测控设备有限公司 | High speed 3D industrial digital microscopes |
| CN105372439A (en) * | 2015-12-01 | 2016-03-02 | 江苏硕世生物科技有限公司 | Female reproductive tract microecology evaluation and detection system |
| CN106997093A (en) * | 2017-05-06 | 2017-08-01 | 南京东利来光电实业有限责任公司 | Micro- scanning auto-focusing compensation system and compensation method |
| CN109752832A (en) * | 2019-03-25 | 2019-05-14 | 南京泰立瑞信息科技有限公司 | The motion control method and micrometron of a kind of microscope lens barrel on Z axis |
| US11822067B2 (en) * | 2019-06-27 | 2023-11-21 | Medipan Gmbh | XYZ microscope stage with a vertically translatable carriage |
| CN110930380B (en) * | 2019-11-19 | 2023-09-19 | 上海华力微电子有限公司 | Defect observation machine and image analysis compensation method thereof |
| CN112748564A (en) * | 2021-01-29 | 2021-05-04 | 上海睿钰生物科技有限公司 | Microscope device and focusing method thereof |
| CN112986201A (en) * | 2021-02-23 | 2021-06-18 | 苏州图墨医疗科技有限公司 | Automatic fluorescence scanning detection equipment and method thereof |
| CN113038003B (en) * | 2021-02-26 | 2023-11-14 | 上海精测半导体技术有限公司 | Automatic focusing device and method, and detection device and method |
| CN113176273B (en) * | 2021-03-19 | 2023-08-15 | 哈工大机器人(中山)无人装备与人工智能研究院 | Automatic focusing device, method and panel defect detection system |
| CN117078662A (en) * | 2023-10-11 | 2023-11-17 | 杭州睿影科技有限公司 | Detection method and device for laminated battery, image processing equipment and medium |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004029069A (en) * | 2002-06-21 | 2004-01-29 | Mitsutoyo Corp | Autofocus device |
| US7301133B2 (en) * | 2005-01-21 | 2007-11-27 | Photon Dynamics, Inc. | Tracking auto focus system |
| CN101034240A (en) * | 2006-03-10 | 2007-09-12 | 鸿富锦精密工业（深圳）有限公司 | Automatic focusing method used for testing camera module group |
| EP2593773A2 (en) * | 2010-07-16 | 2013-05-22 | 3M Innovative Properties Company | High resolution autofocus inspection system |
-
2012
- 2012-11-16 CN CN201210464805.2A patent/CN103033919B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN103033919A (en) | 2013-04-10 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103033919B (en) | System capable of automatically compensating and focusing in process of automatic scanning and method and application thereof | |
| WO2018224015A1 (en) | Fully-automatic microscopic scanner | |
| CN101856773B (en) | Focusing positioning method based on initial laser processing position and laser processing device | |
| CN103674977B (en) | Optical elements of large caliber element surface damage detection device and corresponding detection method | |
| CN1215543C (en) | Apparatus used for evaluating polycrystalline silicon film | |
| CN103984199B (en) | Adjustment and application method for tilting compensation control of lens of automatic focusing camera module | |
| CN103728315B (en) | Heavy-calibre element surface detection apparatus and damage accordingly method for rapidly positioning | |
| CN112752021B (en) | Automatic focusing method of camera system and automatic focusing camera system | |
| CN108344693B (en) | Automatic welding-oriented visual measurement method for misalignment of sheet welding seam | |
| CN108267291B (en) | Accurate positioning device for schlieren knife edge based on image | |
| CN113176274A (en) | Automatic focusing method, device and system for detecting defects of display panel | |
| CN110836641A (en) | Detection method and detection equipment for three-dimensional size of part special-shaped surface microstructure | |
| CN111855578A (en) | Pathological section scanner | |
| CN101408660B (en) | Automatic multiple-focus focusing device and method thereof | |
| CN202453578U (en) | Oil immersion lens-based automatic microscopic image scanning acquisition device | |
| CN110006921B (en) | Automatic pose adjusting method and device for large-curvature-radius spherical optical element | |
| CN116593395A (en) | Motion control system for plate surface defect image acquisition | |
| CN116149037A (en) | Ultrafast large-size scanning system and method | |
| CN105744166B (en) | Autofocus and its auto focusing method when image scanning | |
| CN209727783U (en) | Accurate focusing mechanism for digital slices scanner | |
| CN209560192U (en) | A kind of micrometron | |
| CN210268524U (en) | Automatic change microscope detection device | |
| CN112935576A (en) | Laser processing focusing system and focusing method thereof | |
| JP2010264461A (en) | Laser beam machining method, laser beam machining apparatus and method for manufacturing solar panel | |
| CN109752832A (en) | The motion control method and micrometron of a kind of microscope lens barrel on Z axis |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |