CN104729404B - High speed 3D industrial digital microscopes - Google Patents
High speed 3D industrial digital microscopes Download PDFInfo
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- CN104729404B CN104729404B CN201510141284.0A CN201510141284A CN104729404B CN 104729404 B CN104729404 B CN 104729404B CN 201510141284 A CN201510141284 A CN 201510141284A CN 104729404 B CN104729404 B CN 104729404B
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Abstract
A kind of high speed 3D industrial digital microscopes, belong to detection device technical field.Including pedestal, holder, eyepiece, object lens, objective table and motor, holder is mounted on the base, eyepiece is fixed on the nearly top in support height direction, object lens are arranged in the underface of eyepiece lens barrel, objective table is fixed on the nearly lower part in support height direction and the lower section positioned at object lens, motor is drivingly connected by an object lens locating support and object lens, and object lens are operated with motor and moved up and down along holder.Advantage：The function that microcosmic 3D is measured and microcosmic high-definition data obtains is had both, position control only is carried out to object lens, rather than motion control is carried out to entire optical system, it is easy to use, it focuses accurate；Individual object lens can be driven by small linear motor and be moved up and down, movement velocity is fast due to lighter weight；The digital camera of high shutter exposed frame is also arranged simultaneously to match the quick movement of object lens, thus, it is possible to improve the data acquisition speed of entire imaging system, realizes fast imaging.
Description
Technical field
The invention belongs to detection device technical fields, and in particular to a kind of high speed 3D industrial digital microscopes.
Background technology
Currently, 3D measurements are widely used in on-line checking and the measurement of industrial products, such as a mobile phone was assembling
Nearly 30 times 3D sizes are often needed to confirm in journey.In general, in order to ensure that production efficiency and On-line funchon, producing line often take sampling observation
Mode, 3D on-line checkings only are set in very crucial station.Other than 3D data, also needed to sometimes in industrial processes
The measurement for carrying out body surface microdefect detection and 2D sizes obtains clear, accurate image data with this.
Existing industry 3D on-line measurement means mainly have：One, the surface based on line laser structured light and triangulation technique
The advantage of 3D DATA REASONINGs, the technology is that realization is convenient, and cost is relatively low, and can be detected on a large scale, but the disadvantage is that speed
Degree is slower, often needs that telecontrol equipment is in addition arranged, and precision is relatively low, the 3D repeatable accuracys of the universal product in 0.015mm or so,
In addition, the technology can only measure 3D information and can not obtain microcosmic image data simultaneously；Two, the 3D based on dot laser is measured, should
Technology obtains 3D information by calculating optical path length after laser reflection, and measurement accuracy is very high, can usually reach 0.0005mm, but
The technology is only used for measuring depth information of certain point position, cannot achieve measurement, and can only also measure 3D information and can not
Obtain microcosmic image data simultaneously；Three, the classical 3D microscopes of depth from focus (focusing ranging) technology, energy are based on
Enough to obtain clearly microcosmic image data while obtaining 3D data, classical 3D microscopes are realized not by changing object distance
It is focused with depth focal plane, and indirect gain 3D information, and the acquisition of 3D information needs to be adapted dynamically the whole of camera and camera lens
Body height, or change testee to the distance of camera lens, but due to the restriction of weight load, sport efficiency is not high, therefore
Application on site in actual industrial detection is seldom, and is chiefly used in laboratory sampling Detection, in addition, classics 3D microscopes can not
Carry out effectively large-range measuring；Four, the 3D based on structure fringe technology is measured, which is rebuild by the variation of fringe phase
Go out 3D information, speed is fast and can realize large-range measuring, but precision is relatively low when being directed to microscopic measurement, therefore application scenario is limited；
Five, (full name in English is by light-field camera and TOF：time of fly；Chinese is：Time leap method) camera, light-field camera by
It is not achieved the requirement of industrial precision in 3D measurement accuracy and spatial resolution, therefore so far there are no the case in commercial Application,
And TOF camera is unable to measure since spatial resolution is limited simultaneously for transparent substance, therefore also only it is confined to video at present
The fields such as analysis, human-computer interaction.
In view of above-mentioned prior art, it is necessary to be improved existing 3D measuring techniques, for this purpose, the applicant has
The design of benefit, technical solution described below generate in this background.
Invention content
The purpose of the present invention is to provide a kind of high speed 3D industrial digital microscopes, can carry out microcosmic 3D measurements, imaging
Clarity is high, and processing speed is fast.
The purpose of the present invention is in this way to reach, a kind of high speed 3D industrial digital microscopes, including pedestal, holder, mesh
Mirror, object lens and objective table, the holder are mounted on the base, the eyepiece be fixed on support height direction it is close on
Portion, the object lens are arranged in the underface of eyepiece lens barrel, the objective table be fixed on the nearly lower part in support height direction and
Positioned at the lower section of object lens, it is characterised in that：Further include motor, the motor is connected by an object lens locating support and object lens driving
It connects, object lens are operated with motor and moved up and down along holder.
In the specific embodiment of the present invention, the microscope further includes camera, and the camera is fixed on
The top in support height direction, and be electrically connected with display and imaging system.
In another specific embodiment of the present invention, the camera is the digital camera of high shutter exposed frame.
In another specific embodiment of the present invention, the motor is linear motor.
In another specific embodiment of the present invention, the motor is connect with upper control computer.
In the present invention there are one in specific embodiment, the objective table is in the center away from one side surface of object lens
Position is equipped with condenser, and in the light source that is arranged right below of the condenser, the light source is fixed on the base.
The present invention compared with prior art, has an advantageous effect in that due to the above structure,：Microcosmic 3D is had both to survey
The function that amount and microcosmic high-definition data obtain；Object lens are independently arranged, and only carry out position control to object lens, rather than to entire optics
System carries out motion control, easy to use, focuses accurate；Individual object lens can be driven due to lighter weight by small linear motor
Action moves up and down, and movement velocity is fast；The digital camera of high shutter exposed frame is also arranged simultaneously to match the quick movement of object lens,
Thus, it is possible to improve the data acquisition speed of entire imaging system, fast imaging is realized.
Description of the drawings
Fig. 1 is the structural diagram of the present invention.
Fig. 2 is the principle schematic that data 3D is rebuild.
Fig. 3 is the principle schematic that nonlinear mapping function model f (g) is established.
In figure：1. pedestal；2. holder；3. eyepiece；4. object lens；5. objective table, 51. condensers；6. motor；7. object lens position
Holder；8. camera；9. light source.
Specific implementation mode
In order to enable the public to fully understand the technical spirit and advantageous effect of the present invention, applicant will be below in conjunction with attached drawing
The specific implementation mode of the present invention is described in detail, but applicant appoints the limitation that the description of embodiment is not to technical solution
What conceives to change in the form rather than substance according to the present invention all should be considered as protection scope of the present invention.
Referring to Fig. 1, the present invention relates to a kind of high speed 3D industrial digital microscopes, including pedestal 1, holder 2, eyepiece 3, object
Mirror 4 and objective table 5.The holder 2 be mounted on pedestal 1 on, the eyepiece 3 be fixed on 2 short transverse of holder it is close on
Portion, the object lens 4 are arranged in the underface of 3 lens barrel of eyepiece.The objective table 5 be fixed on 2 short transverse of holder it is close under
Portion and the lower section for being located at object lens 4, objective table 5 is equipped with condenser 51 in the middle position away from 4 one side surface of object lens, in the optically focused
Mirror 51 is arranged right below light source 9, and the light source 9 is fixed on pedestal 1.The microscope further includes motor 6, described
Motor 6 is drivingly connected by an object lens locating support 7 with object lens 4, and object lens 4 are operated with motor 6 and moved up and down along holder 2.
Due to only driving the object lens 4 of lighter weight to move, motor 6 uses small linear motor, it is ensured that object lens 4 are with quickly
Speed complete to move up and down, sport efficiency is high.Motor 6 is connect with upper control computer, the upper control computer
For calculating image data.Holder 2 is additionally provided with camera 8 at the top of short transverse, and the camera 8 is high shutter frame
The digital camera of exposure is electrically connected with display and imaging system.Camera 8 match object lens 4 quick movement, it is ensured that entirely at
As system has good data reading speed, realization fast imaging.The microscope has both microcosmic 3D and measures and microcosmic high definition number
According to the function of acquisition, object lens 4 are detached with eyepiece 3, are only carried out position control to object lens 4, rather than are carried out to entire optical system
Motion control is focused accurate using simple.
As is known in the industry, what 3D microscopes acquired is a series of image data under different focal planes, different focal planes pair
Answer different object distances.The precision that 3D is rebuild depends primarily on motor 6 in the kinematic accuracy i.e. present invention of object lens 4 in addition to software algorithm
Performance, obtain to rebuild by software algorithm again after data and high-definition image and extract 3D data informations.Usually, in above-mentioned two step
Also need to carry out the correction of device parameter, the i.e. nonlinear mapping function of the Z axis coordinate and actual grade coordinate of object lens 4 before rapid
Estimation.
Hereinafter, the image-forming principle of the present invention is described in detail.
First, it is to carry out data acquisition.Object lens 4 are completed once to move up and down by motor 6, and max die travel distance determines
The dynamic range that 3D is measured, pays close attention to N number of discrete point in the trip.Assuming that motor 6 do not move before motor position counterpart
The least unit of the origin of 4 camera lens of mirror, coordinate is a motion impulse, that is, theoretic system full accuracy.When camera lens becomes
Its corresponding optimal focal plane can also change when change, therefore depth coordinate where camera lens (uses liIt indicates, i indicates different cokes
Planar sequence) difference can all correspond to a different depth and (use hiIndicate, i indicates different focal planes sequences) it is optimal burnt flat
Face, the 3D information put on the object under test on the focal plane is hi。liAbsolute figure may only be fed back from motor 6
Data in directly obtain, and h at this timeiValue be unknown, but each hiIt will a corresponding li.The estimation of systematic parameter
Journey is to obtain the process of a nonlinear mapping function model f (g), nonlinear mapping function f (l hereini)=hi.For
N number of discrete point i=0,1 ... N-1 in stroke, can expose a frame image by external trigger mode, and discrete point number N's is big
Small aperture time depending on camera 8 and the considerations of subsequently to processing data computation burden.Between any two discrete point
Time interval should be greater than the time needed for single-frame images single exposure, since follow-up 3D reconstructions need N images to participate in calculating, from
The numerical value of scatterplot number N is smaller, and calculation amount also can be smaller, but precision can also decline therewith simultaneously, therefore the choosing of discrete point number N
Select is that a speed considers the problems of with performance balance.Above-mentioned data acquisition is not traditional to be handled in acquisition, is led to
It crosses external trigger and the mode for the linkage that cooperates with motion disposably acquires N single-frame images data.The acquisition of 3D data is
The focal plane serial number at each position is first calculated, depth information is then calculated, is finally synthesizing a 3D datagram.
Secondly, it is to carry out 3D reconstructions.The 2D images of some row different focal planes, 2D figures will be obtained after the completion of data acquisition
As corresponding function can be expressed as lmi(x, y) acquires 3D data 3D (x, y) to all space coordinates (x, y).Assuming that known
The optimal focal plane serial number j of current location (x, y), then have 3D (x, y)=hj=f (lj), i.e., problem, which is converted into, solves j, can pass through
Following fast solvers, which calculate, to be obtained：
Referring to Fig. 2, illustrating the principle that data 3D is rebuild, the depth data of 3 points of A, B, C calculates in figure, needs first
Estimate corresponding sequence number, wherein f (lA)=hA；f(lB)=hB；f(lC=hC).One is had by Fig. 3 3D data obtained
A little noises, this is mainly due to the data that only considered under N number of discrete time, generally can eliminate one by the method for filtering
Divide noise.3D data can regard the 2D scalar datas field of a Larger Dynamic range as, utilize the bilateral of relative maturity
Filter (bilateral filtering) technology can be filtered it.The bilateral filter technologies, are inhibiting due to having
Its detailed information such advantage can be retained while noise, therefore obtain the approval of people and be widely used in image filtering
In, but it is the disadvantage is that arithmetic speed is slow, computationally intensive, in the present embodiment again using the technology of multigrid (multi grid)
It is accelerated.While 3D data reconstructions, the clear image data that a width combines N image informations can also be obtained,
The image data does not come from a certain focal plane, but one reconstructed from multiple image focal plane information newly schemes.
Finally, it is to be corrected to systematic parameter.Numerical computations twice, respectively focal plane sequence are needed in 3D calculating process
Number estimation and nonlinear mapping function f (li)=hiIt calculates, the latter, which needs to first pass through training sample, to learn nonlinear mapping function
Model f (g) obtains the nonlinear mapping function using the technology being fitted based on L0 norm non-linear piecewises in the present embodiment
Model f (g).Fig. 3 illustrate nonlinear mapping function model f (g) foundation principle, why using segmentation method be because
For that locally as f (g) can regarded to relatively simple analytical function such as multinomial etc..If f (g) is expressed as multinomial three times
Formula f (x)=ax3+bx2+ cx+d, the then estimation of f (g) are converted into parameter a, b, c, the estimation of d, can specifically pass through following public affairs
Formula calculates：
Wherein, factor alpha, β, γ by manually giving in advance.
Claims (4)
1. a kind of high speed 3D industrial digital microscopes, including pedestal (1), holder (2), eyepiece (3), object lens (4) and objective table
(5), the holder (2) is mounted on pedestal (1), and the eyepiece (3) is fixed on the nearly top of holder (2) short transverse,
The object lens (4) are arranged in the underface of eyepiece (3) lens barrel, and the objective table (5) is fixed on holder (2) short transverse
Nearly lower part and the lower section positioned at object lens (4), it is characterised in that：Further include motor (6), the motor (6) is fixed by an object lens
Position holder (7) is drivingly connected with object lens (4), the object lens（4）With the eyepiece（3）Separately positioned, object lens (4) are with motor (6)
It operates and moves up and down along holder (2), the holder（2）Camera is provided at the top of short transverse（8）, the camera（8）
For the digital camera of high shutter exposed frame, the camera（8）It is electrically connected with display and imaging system.
2. high speed 3D industrial digital microscopes according to claim 1, it is characterised in that the motor (6) is straight-line electric
Machine.
3. high speed 3D industrial digital microscopes according to claim 2, it is characterised in that the motor (6) and upper control
Computer connection processed.
4. high speed 3D industrial digital microscopes according to claim 1, it is characterised in that the objective table (5) away from
The middle position of (4) one side surface of object lens is equipped with condenser (51), and light source (9), institute are arranged right below in the condenser (51)
The light source (9) stated is fixed on pedestal (1).
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| Application Number | Priority Date | Filing Date | Title |
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| CN201510141284.0A CN104729404B (en) | 2015-03-27 | 2015-03-27 | High speed 3D industrial digital microscopes |
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| CN201510141284.0A CN104729404B (en) | 2015-03-27 | 2015-03-27 | High speed 3D industrial digital microscopes |
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| CN104729404A CN104729404A (en) | 2015-06-24 |
| CN104729404B true CN104729404B (en) | 2018-08-07 |
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| CN109031329B (en) * | 2018-07-02 | 2024-01-16 | 昆山丘钛微电子科技有限公司 | Flight time ranging module and electronic equipment |
| CN111288925B (en) * | 2020-01-18 | 2022-05-06 | 武汉烽火凯卓科技有限公司 | Three-dimensional reconstruction method and device based on digital focusing structure illumination light field |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202710836U (en) * | 2012-07-31 | 2013-01-30 | 广州市道真生物科技有限公司 | Microscopic image automatic acquisition apparatus |
| CN103033919A (en) * | 2012-11-16 | 2013-04-10 | 麦克奥迪实业集团有限公司 | System capable of automatically compensating and focusing in process of automatic scanning and method and application thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JPH0990233A (en) * | 1995-09-26 | 1997-04-04 | Sony Corp | Microscope |
| CN2632705Y (en) * | 2003-06-05 | 2004-08-11 | 北京普利生仪器有限公司 | Automatic optical microscope |
| CN1243270C (en) * | 2003-10-14 | 2006-02-22 | 南开大学 | Microscope automatic operation system |
| CN2741064Y (en) * | 2004-10-15 | 2005-11-16 | 汪家道 | Three-dimensional driver of microscope |
| KR20110082384A (en) * | 2010-01-11 | 2011-07-19 | 한국과학기술연구원 | Device for detecting weld defect of a bellows |
| US9389408B2 (en) * | 2010-07-23 | 2016-07-12 | Zeta Instruments, Inc. | 3D microscope and methods of measuring patterned substrates |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202710836U (en) * | 2012-07-31 | 2013-01-30 | 广州市道真生物科技有限公司 | Microscopic image automatic acquisition apparatus |
| CN103033919A (en) * | 2012-11-16 | 2013-04-10 | 麦克奥迪实业集团有限公司 | System capable of automatically compensating and focusing in process of automatic scanning and method and application thereof |
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