CN213956267U - Precise gantry machine for measuring thickness of white-light confocal film - Google Patents
Precise gantry machine for measuring thickness of white-light confocal film Download PDFInfo
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- CN213956267U CN213956267U CN202023089925.8U CN202023089925U CN213956267U CN 213956267 U CN213956267 U CN 213956267U CN 202023089925 U CN202023089925 U CN 202023089925U CN 213956267 U CN213956267 U CN 213956267U
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- axle
- lead screw
- guide rail
- marble
- slide
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- 239000004579 marble Substances 0.000 claims abstract description 48
- 238000006073 displacement reaction Methods 0.000 claims abstract description 18
- 238000009434 installation Methods 0.000 claims abstract description 4
- 239000002184 metal Substances 0.000 claims description 6
- 230000008878 coupling Effects 0.000 claims description 3
- 238000010168 coupling process Methods 0.000 claims description 3
- 238000005859 coupling reaction Methods 0.000 claims description 3
- 239000012528 membrane Substances 0.000 claims description 3
- 238000001514 detection method Methods 0.000 abstract description 5
- 238000000034 method Methods 0.000 abstract description 2
- 230000005540 biological transmission Effects 0.000 description 6
- 238000005259 measurement Methods 0.000 description 5
- 238000007334 copolymerization reaction Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000010009 beating Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
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- Length Measuring Devices By Optical Means (AREA)
Abstract
The utility model provides a thick accurate longmen board of measurationing of white light confocal film, including marble platform and marble crossbeam, install Y axle lead screw drive assembly on the marble platform, the double-phase opposite side of marble platform sets up Y axle guide rail, the bottom of marble crossbeam is equipped with the stand that overlaps in the outside connecting plate of Y axle lead screw and can move on Y axle guide rail, X axle lead screw drive assembly is installed to the marble crossbeam, the image measuring instrument still includes Z axle subassembly, X axle lead screw drive assembly can drive Z axle subassembly and move in X axial direction, Z axle subassembly includes the cross guide rail, the slide, Z axle lead screw drive assembly, cross guide rail connects the slide, Z axle lead screw drive assembly can drive the slide and reciprocate along the Z axle on the cross guide rail, installation monocular camera lens and white light focus displacement sensor on the slide. The utility model has simple and convenient operation, low cost and simple process, and ensures the accuracy of the detection data; the single-tube microscope and the white light focusing displacement sensor are combined and operate simultaneously, and time is saved.
Description
Technical Field
The utility model relates to an image detection equipment technical field, concretely relates to accurate gantry board of thick measurationing of white light copolymerization focal film.
Background
The single-tube microscope can only detect the plane of a product when performing image measurement, cannot independently use the thickness of the product, and can be combined with a white light focusing displacement sensor to be used when aiming at products such as opaque products, multi-layer product thickness, laminated adhesive thickness or hollow layer gaps, and the like, and the white light focusing displacement sensor can stably measure the thickness of a transparent body at high precision and can simultaneously measure position values of different layers. But the known small-stroke single-drive screw transmission detection equipment on the market in the technical field of measurement combined with a white light focusing displacement sensor at present has the following model strokes: 600 times 800 active stroke, external dimension: 1440mm 1640mm 1600mm, it is therefore necessary to design a smaller device for image measurement.
Disclosure of Invention
The utility model discloses aim at providing the image check out test set that the size is littleer.
The utility model adopts the following technical scheme.
The utility model provides a white light copolymerization burnt accurate longmen board of membrane thickness measurement, includes marble platform and marble crossbeam: the installation includes the Y axle lead screw drive assembly of Y axle lead screw on the marble platform, the two opposite sides of marble platform set up Y axle guide rail, Y axle guide rail with Y axle lead screw is parallel, the bottom of marble crossbeam is equipped with the outside connecting plate of cover in Y axle lead screw and can move the stand on Y axle guide rail, Y axle lead screw drive assembly can drive marble crossbeam with the stand moves in Y axle direction, X axle lead screw drive assembly is installed to the marble crossbeam, the image measuring apparatu still includes Z axle subassembly, X axle lead screw drive assembly can drive Z axle subassembly and move in X axle direction, Z axle subassembly includes cross guide rail, slide, Z axle lead screw drive assembly, cross guide rail connects the slide, Z axle lead screw drive assembly can drive the slide reciprocates along the Z axle on cross guide rail, the utility model discloses a marble machine, including slide, X axle lead screw, marble crossbeam, X axle guide rail, X axle lead screw, marble crossbeam, white light focus displacement sensor, set up single-cylinder camera lens and white light focus displacement sensor on the slide, X axle lead screw drive assembly includes X axle motor, X axle lead screw and the shaft coupling of X axle motor and X axle lead screw, the linear guide rail of X axle is still installed to the marble crossbeam, the linear guide rail of X axle with the X axle lead screw is parallel, the slide cover is on X axle lead screw, both ends with the cooperation of X axle linear guide rail.
As the preferred technical scheme, the slide still includes the upper sliding surface, the upper sliding surface edge sets up the card limit set up the spout track on the marble crossbeam, the spout track with the X axle track is parallel, the upper sliding surface can slide in the spout track through the card limit.
As a preferable technical scheme, a shell and a cover plate are further arranged outside the sliding plate, the monocular lens and the white light focusing displacement sensor can be exposed below the shell, and the clamping edge can be exposed on the back surface of the shell, so that the clamping edge can slide in a sliding groove track on the marble beam.
As the preferred technical scheme, a lower light source guide rail along the X axis is arranged on the connecting plate, and a lower light source fixture is fixed on the lower light source guide rail.
As a preferable technical scheme, a pulley is fixed on the X-axis linear guide rail and used for driving the lower light source to run along the lower light source guide rail.
As the preferred technical scheme, the marble platform is fixed on the sheet metal base.
As the preferred technical scheme, a platform shell is further arranged on the periphery of the upper surface of the marble platform. Preferably, fixed start button and scram button on the preceding panel beating of platform casing the utility model discloses the beneficial technological effect who gains: (1) the utility model has simple and convenient operation, low cost and simple process, and ensures the accuracy of the detection data; (2) the utility model discloses in, the simultaneous operation, save time that monocular microscope and white light focus displacement sensor combine together.
Drawings
Fig. 1 is an overall structural view of a white light confocal precision gantry for measuring film thickness according to an embodiment of the present invention;
fig. 2 is a schematic view of a partial structure of a precise gantry for measuring a thickness of a white confocal film according to an embodiment of the present invention;
fig. 3 is a front view of a precision gantry machine for measuring the thickness of a white confocal film according to an embodiment of the present invention;
fig. 4 is a top view of a precise gantry for measuring the thickness of a white confocal film according to an embodiment of the present invention;
fig. 5 is a left view of a precise gantry for measuring a thickness of a white confocal film according to an embodiment of the present invention;
fig. 6 is an isometric view of an overall structure of a white confocal precision gantry for measuring film thickness according to an embodiment of the present invention;
wherein the figures are labeled: 1-Z axis motor; 2-Z axis screw rod transmission components; 3, a sliding plate; 4-X axis motor; 5-X axis screw drive assembly; a 6-Z shaft assembly; 7-Y axis screw rod transmission component; 8-connecting plates; 9-single-barrel lens; 10-white light focus displacement sensor; 11-cross guide rails; 12-a marble beam; 13-X axis linear guide; 14-a pulley; 15-upright post; 16-lower light source; 17-emergency stop button; 18-start button; 19-marble platform; 20-a sheet metal base; 21-single-cylinder lens fixing part; 22-sensor mounting hoop; 23-Y-axis guide rails; 24-upper sliding surface; 25, a cover plate; 26-a housing; 27-a chute track; 28-platform housing.
Detailed Description
The invention is further described below with reference to the accompanying drawings. The following examples are only for illustrating the technical solutions of the present invention more clearly, and the protection scope of the present invention is not limited thereby. It should be noted that in the description of the present invention, the terms "front", "rear", "left", "right", "upper", "lower", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of describing the present invention but do not require that the present invention must be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention.
As shown in fig. 1, fig. 2, fig. 4 and fig. 5, a white light confocal film thickness measurement precision gantry machine includes: marble platform 19 and marble crossbeam 12, the installation includes the Y axle lead screw drive assembly 7 of Y axle lead screw on the marble platform 19, the two opposite sides of marble platform 19 set up Y axle guide rail 23, Y axle guide rail 23 with the Y axle lead screw is parallel, the bottom of marble crossbeam 12 is equipped with the cover in the outside connecting plate 8 of Y axle lead screw and can be on the stand 15 that the Y axle guide rail 23 moved, Y axle lead screw drive assembly 7 can drive marble crossbeam 12 and stand 15 move on Y axle direction, X axle lead screw drive assembly 5 is installed to marble crossbeam 12, the image measuring apparatu still includes Z axle subassembly 6, X axle lead screw drive assembly 5 can drive Z axle subassembly 6 and move on X axle direction, Z axle subassembly 6 includes cross guide 11, slide 3, Z axle lead screw drive assembly 2, cross guide 11 connects slide 3, z axle lead screw drive assembly 2 can drive slide 3 reciprocates along the Z axle on cross guide 11, install monocular camera lens 9 and white light focus displacement sensor 10 on slide 3, X axle lead screw drive assembly 5 includes the shaft coupling of X axle motor 4, X axle lead screw and X axle motor 4 and X axle lead screw, marble crossbeam 12 still installs X axle nature guide 13, X axle nature guide 13 with the X axle lead screw is parallel, slide 3 covers on X axle lead screw, both ends with X axle nature guide 13 cooperation.
Example 2: on the basis of embodiment 1, referring to fig. 1, as a preferred solution, in a specific embodiment, the sliding plate 3 further includes an upper sliding surface 24, a clamping edge (not shown in the figure) is disposed at an edge of the upper sliding surface 24, a sliding groove track 27 is disposed on the marble cross beam 12, the sliding groove track 27 is parallel to the X-axis track, and the upper sliding surface 24 can slide in the sliding groove track 27 through the clamping edge. The sliding assembly can be more firmly fixed on the marble cross beam 12, and the service life is prolonged.
Example 3: on the basis of embodiment 2, referring to fig. 6, in this embodiment, the exterior of the skateboard 3 further includes a housing 26 and a cover plate 25, the monocular lens 9 and the white light focus displacement sensor 10 can be exposed below the housing 26, and the clamping edge (not shown in the figure) can be exposed on the back surface of the housing 26, so that the clamping edge can slide in the chute track 27 on the marble beam 12.
On the basis of the above embodiment, as shown in fig. 3, in another specific embodiment, as a preferable technical solution, a platform shell 28 is further disposed around the upper surface of the marble platform 19. Preferably, the front sheet metal of the platform shell 28 is fixedly provided with a start button 18 and an emergency stop button 17.
Optionally, a pulley 14 is fixed on the X-axis linear guide 13, and the pulley 14 is used for driving the lower light source 16 to move on the X-axis, so as to ensure that the lower light source 16 is coaxial with the monocular lens 9.
Optionally, the marble platform 19 is fixed on a sheet metal base 20.
As shown in fig. 2, the sled 3 optionally mounts the monocular lens 9 via a monocular lens 9 mount 21. The sensor hoop 22 is arranged on the sliding plate 3, and the white light focusing displacement sensor 10 is installed on the sliding plate 3 through the sensor hoop 22.
The utility model discloses the principle: the device is firstly opened, the starting button 18 is pressed, the device is controlled through software after being powered on, the Y-axis lead screw transmission component 7 drives the marble beam 12 to move back and forth, the Z-axis lead screw transmission component 5 drives the Z-axis component 6 to move transversely, and the Z-axis lead screw transmission component 2 drives the monocular lens 9 and the white light focusing displacement sensor 10 to move up and down to detect the product. This equipment operation triaxial moves simultaneously, and equipment detection range: 800 × 600 × 200, unit: mm. Detecting the precision; less than or equal to 3+ L/200 um.
The Z shaft assembly 6 principle: the Z-axis motor 1 drives the Z-axis screw rod to move up and down, and the Z-axis screw rod drives the sliding plate 3 (09 single-cylinder lens 9 and the white light focusing displacement sensor 10 to move up and down, wherein the effective movement stroke is 200 mm.
The above description is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, several modifications and variations can be made without departing from the technical principle of the present invention, and these modifications and variations should also be regarded as the protection scope of the present invention.
Claims (10)
1. The utility model provides a precision longmen board is surveyed to white light confocal membrane thickness which characterized in that includes: marble platform and marble crossbeam, the installation includes the Y axle lead screw drive assembly of Y axle lead screw on the marble platform, the two opposite sides of marble platform set up Y axle guide rail, Y axle guide rail with Y axle lead screw is parallel, the bottom of marble crossbeam is equipped with the cover in the outside connecting plate of Y axle lead screw and can be at the stand that the Y axle guide rail moved, X axle lead screw drive assembly is installed to the marble crossbeam, the thick accurate gantry board of measurationing of white light confocal membrane still includes Z axle subassembly, X axle lead screw drive assembly can drive Z axle subassembly and move in the X axle direction, Z axle subassembly includes cross guide, slide, Z axle lead screw drive assembly, cross guide connects the slide, Z axle lead screw drive assembly can drive the slide reciprocates along the Z axle on cross guide, install monocular camera lens and white light focusing displacement sensor on the slide, x axle lead screw drive assembly includes the shaft coupling of X axle motor, X axle lead screw and X axle motor and X axle lead screw, the linear guide rail of X axle is still installed to the marble crossbeam, the linear guide rail of X axle with the X axle lead screw is parallel, the slide cover is on X axle lead screw, both ends with the cooperation of X axle linear guide rail.
2. The precise gantry machine for measuring the thickness of a confocal white light film according to claim 1, wherein the slide plate further comprises an upper slide surface, a clamping edge is arranged on the edge of the upper slide surface, a chute rail is arranged on the marble beam, the chute rail is parallel to the X-axis rail, and the upper slide surface can slide in the chute rail through the clamping edge.
3. The precise gantry machine for measuring the thickness of a white confocal film according to claim 2, wherein a housing and a cover plate are further disposed outside the sliding plate, the monocular lens and the white focus displacement sensor can be exposed below the housing, and the clamping edge can be exposed on the back of the housing, so that the clamping edge can slide in the sliding groove track on the marble beam.
4. The precise gantry machine for measuring the thickness of a white light confocal film according to claim 1, wherein the connecting plate has a lower light source guide rail along the X-axis, and the lower light source guide rail has a lower light source fixture fixed thereon.
5. The precise gantry machine for measuring the thickness of a confocal white light film according to claim 4, wherein a pulley is fixed on the X-axis linear guide rail and used for driving the lower light source to move along the lower light source guide rail.
6. The precise gantry machine for measuring the thickness of a white confocal film according to claim 1, wherein the marble platform is fixed on a sheet metal base.
7. The precise gantry machine for measuring the thickness of a confocal white light film as claimed in claim 1, wherein a platform shell is further disposed around the top surface of the marble platform.
8. The precise gantry machine for measuring the thickness of a confocal white light film according to claim 7, wherein a start button and an emergency stop button are fixed on a front metal plate of the platform shell.
9. The precise gantry machine for measuring the thickness of a white light confocal film as claimed in claim 1, wherein the slide plate is mounted with a monocular lens through a monocular lens holder.
10. The precise gantry machine for measuring the thickness of a white-light confocal film according to claim 1, wherein a sensor hoop is disposed on the sliding plate, and the white-light focus displacement sensor is mounted on the sliding plate through the sensor hoop.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN202023089925.8U CN213956267U (en) | 2020-12-21 | 2020-12-21 | Precise gantry machine for measuring thickness of white-light confocal film |
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CN202023089925.8U CN213956267U (en) | 2020-12-21 | 2020-12-21 | Precise gantry machine for measuring thickness of white-light confocal film |
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CN213956267U true CN213956267U (en) | 2021-08-13 |
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CN202023089925.8U Active CN213956267U (en) | 2020-12-21 | 2020-12-21 | Precise gantry machine for measuring thickness of white-light confocal film |
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Address after: No. 128 Yinhe Road, Southeast Street, Changshu City, Suzhou City, Jiangsu Province, 215500 Patentee after: JIANGSU CAIDAO PRECISION INSTRUMENT CO.,LTD. Address before: 215300 No.33 Yuanfeng Road, high tech Zone, Yushan Town, Kunshan City, Suzhou City, Jiangsu Province Patentee before: JIANGSU CAIDAO PRECISION INSTRUMENT CO.,LTD. |