CN217384146U - Object stage for image measuring instrument - Google Patents

Abstract

The utility model discloses an objective table for an image measuring instrument, which comprises a bottom layer module, a middle layer module, an upper layer module and a supporting flat plate, wherein the bottom layer module, the middle layer module and the upper layer module are arranged in sequence, and the supporting flat plate is used for bearing a workpiece to be measured; the middle layer module comprises fixing seats arranged on two sides of the first flat plate, a second flat plate arranged between the fixing seats, a flexible supporting piece for connecting the fixing seats and the second flat plate, a dust cover which is provided with a plurality of through holes and is arranged on the flexible supporting piece in a mode that the flexible supporting piece penetrates through the through holes, a first direction driving unit which is matched with the first linear guide rail assembly to drive the supporting flat plate to move towards a first direction, and a second direction driving unit which is matched with the second linear guide rail assembly to drive the supporting flat plate to move towards a second direction. In this case, the stage having the flexible support can assist in measuring the workpiece to be measured quickly and accurately and can reduce noise generated by the movement of the stage.

Description

Object stage for image measuring instrument

Technical Field

The utility model relates to image measurement technical field specifically relates to an objective table for image measuring instrument.

Background

The optical image measuring instrument is a non-contact measuring instrument which acquires images through a shooting device, processes the images through software, displays the images on a computer screen, and performs geometric operation by using measuring software to obtain a final result. The measuring software extracts the coordinate points of the workpiece surface by the digital image processing technology, and then converts the coordinate points into various geometric elements in a coordinate measuring space by utilizing the coordinate transformation and data processing technology, thereby obtaining the parameters of geometric dimensions such as the outline or surface shape, angle, position and the like of the measured workpiece, form and position tolerance and the like.

The existing optical image measuring instrument moves along the X direction or the Y direction in a linear motion mode through a screw rod, a guide rail, a motor, a coupler and the like. And the servo motor with the encoder is connected with the screw rod through a coupler. The screw shaft and the screw nut circularly reciprocate in the screw groove through the ball to drive the supporting block to reciprocate. However, the conventional optical image measuring instrument lead screw driving motor is prone to generate large noise in the process of converting the rotary motion into the linear motion. The screw rod driving motor is under the action of centrifugal force, so that the movement speed in the circumferential direction is limited. The operator also usually needs several minutes to perform a distance measurement, and when a plurality of size measurements are performed, the measurement time is generally long, and the work efficiency of the operator is not high.

Disclosure of Invention

The present invention has been made in view of the above-mentioned prior art, and an object of the present invention is to provide an image measuring apparatus stage that assists in measuring a workpiece to be measured quickly and accurately and can reduce noise generated by movement of a platform.

Therefore, the utility model discloses an objective table for an image measuring instrument, which comprises a bottom layer module, a middle layer module, an upper layer module and a supporting flat plate, wherein the bottom layer module, the middle layer module, the upper layer module and the supporting flat plate are arranged in sequence, the bottom layer module comprises a first flat plate and a first linear guide rail component arranged on the first flat plate; the middle layer module comprises fixed seats arranged at two sides of the first flat plate, a second flat plate arranged between the fixed seats, a flexible supporting piece connected with the fixed seats and the second flat plate, a dust cover provided with a plurality of through holes and arranged on the flexible supporting piece in a mode that the flexible supporting piece penetrates through the through holes, a first direction driving unit matched with the first linear guide rail assembly to drive the supporting flat plate to move towards a first direction, and a second direction driving unit matched with the second linear guide rail assembly to drive the supporting flat plate to move towards a second direction; the upper layer module comprises a third flat plate, a second linear guide rail component arranged on the third flat plate and a supporting block used for supporting the supporting flat plate.

The utility model relates to an in the objective table, the cooperation of dust cover and the first linear guide rail subassembly that have flexible support piece and first direction drive unit drive support flat board to the first direction removal, the in-process noise reduction effectively that the dust cover that has flexible support piece is marching, and first direction drive unit can drive the work piece that awaits measuring relatively fast and reach preset position.

Additionally, in the utility model relates to an in the objective table, optionally, the bottom module still including set up in first dull and stereotyped first grating chi, the middle level module still including set up in the second dull and stereotyped and with first grating chi assorted first reading head, the upper module still including set up in the dull and stereotyped second grating chi of third, the middle level module still including set up in the second dull and stereotyped and with second grating chi assorted second reading head. Therefore, the first grating ruler and the first reading head are matched to well measure the displacement of the workpiece to be measured in the first direction; the second grating ruler and the second reading head are matched to well measure the displacement of the workpiece to be measured in the second direction.

Additionally, in the utility model relates to an in the objective table, optionally, the bottom module still including set up in first dull and stereotyped first photoelectric switch, the middle level module still including set up in the second dull and stereotyped and with first photoelectric switch assorted first response piece, the middle level module still including set up in the second dull and stereotyped second photoelectric switch of second, the upper module still including set up in the third dull and stereotyped and with second photoelectric switch assorted second response piece. Therefore, the matching of the first photoelectric switch and the first induction sheet in the stroke can well judge the starting position of the workpiece to be detected in the first direction and the stopping position of the workpiece to be detected in the first direction, and the movement of the workpiece to be detected in the measuring range in the first direction can be well protected; the cooperation of second photoelectric switch and second response piece in the stroke can judge the start position of work piece in the second direction that awaits measuring and the stop position of work piece in the second direction that awaits measuring well, can protect the work piece that awaits measuring to remove in the range scope on the second direction well.

Further, in the object stage according to the present invention, optionally, the first direction driving unit is driven by a linear motor, and the second direction driving unit is driven by a linear motor. Therefore, the first direction driving unit can quickly reach the position measured in the first direction through the driving of the linear motor, and the second direction driving unit can quickly reach the position measured in the second direction through the driving of the linear motor.

Additionally, in the utility model relates to an in the objective table, optionally, the support flat board is the transparent glass flat board, the bottom module still includes the light source and is used for fixing the light source fixing base of light source, middle level module with the upper module still include with the position assorted of light source leads to the unthreaded hole so that the light source shines the work piece under test. Therefore, the light source of the bottom layer module can irradiate the workpiece to be measured on the support flat plate through the light through hole.

Additionally, in the object table of the present invention, optionally, the bottom module further includes a plurality of first limit posts, and the plurality of first limit posts are configured to limit a moving range of the second plate. Therefore, the first limiting columns can limit the moving range of the middle layer module in the first direction, and the middle layer module can be well protected.

Additionally, in the utility model relates to an in the objective table, optionally, first linear guide subassembly symmetry install in bottom module both sides, first linear guide subassembly include first linear guide and movably install in a plurality of first sliders of first linear guide, a plurality of first sliders with second flat fixed connection, first linear guide with first flat fixed connection. One end of the first slider can be fixed to the lower surface of the second plate, the other end of the first slider is mounted on the first linear guide and can move on the first linear guide, and the other end of the first linear guide can be fixed to the upper surface of the first plate.

In the stage according to the present invention, the first direction driving unit may be configured to drive the second plate and the third plate to move in a first direction so that the first slider moves relative to each other along the first linear guide. Therefore, the first direction driving unit can drive the first sliding block fixed on the second flat plate to drive the second flat plate and the third flat plate to move in the first direction along the first linear guide rail through the linear motor.

In addition, in the object stage according to the present invention, optionally, the second linear guide assembly is symmetrically installed on both sides of the upper module, the second linear guide assembly includes a second linear guide and a plurality of second sliders movably installed on the second linear guide, the second sliders are fixedly connected to the second plate, and the second linear guide is fixedly connected to the third plate. One end of the second slider can be fixed to the upper surface of the second flat plate, one end of the second linear guide rail is mounted to the other end of the second slider and can move along the fixed second slider, and the other end of the second linear guide rail can be fixed to the lower surface of the third flat plate.

In the stage according to the present invention, the second direction driving unit may be configured to drive the third plate to move in the second direction so that the second slider moves relatively along the second linear guide. Therefore, the second direction driving unit can drive the second linear guide rail fixed on the second flat plate to drive the third flat plate to move along the second sliding block in the second direction through the linear motor.

According to the utility model discloses, image measuring instrument's objective table can assist and measure the work piece that awaits measuring fast accurately and can reduce the platform and remove produced noise.

Drawings

Fig. 1 is a plan view showing a stage according to the present embodiment.

Fig. 2 is a left side view showing the stage according to the present embodiment.

Fig. 3 is a left side view and an exploded schematic view of the stage according to the present embodiment.

Fig. 4A is a schematic diagram showing an underlayer module of the stage according to the present embodiment.

Fig. 4B is an exploded schematic view showing the bottom layer module of the stage according to the present embodiment.

Fig. 5A is a schematic view showing a middle layer module of the stage according to the present embodiment.

Fig. 5B is an exploded schematic view showing a middle layer module of the stage according to the present embodiment.

Fig. 6A is a schematic diagram showing the upper module and the support plate of the stage according to the present embodiment.

Fig. 6B is an exploded schematic view showing the upper module and the support plate of the stage according to the present embodiment.

Detailed Description

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the following description, the same components are denoted by the same reference numerals, and redundant description thereof is omitted. The drawings are schematic and the ratio of the dimensions of the components and the shapes of the components may be different from the actual ones.

It is noted that the terms "comprises," "comprising," and "having," and any variations thereof, in the present disclosure, such that a process, method, system, article, or apparatus that comprises or has a list of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include or have other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.

In addition, the headings and the like referred to in the following description of the present invention are not intended to limit the content or scope of the present invention, but only serve as a reminder for reading. Such a subtitle should neither be understood as a content for segmenting an article, nor should the content under the subtitle be limited to only the scope of the subtitle.

Hereinafter, the stage for an image measuring instrument according to the present invention will be described in detail with reference to the accompanying drawings. In addition, the application schematic diagram described in the examples of the present invention is for more clearly explaining the technical solution of the present invention, and does not constitute a limitation to the technical solution provided by the present invention.

The utility model discloses an objective table for image measuring instrument.

Fig. 1 is a plan view showing a stage 1 according to the present embodiment. Fig. 2 is a left side view showing the stage 1 according to the present embodiment. Fig. 3 is a left side view and an exploded schematic view of the stage 1 according to the present embodiment.

In some examples, the stage 1 may include a bottom layer module 10, a middle layer module 20, an upper layer module 30, and a support plate 40 for carrying a workpiece to be measured (see fig. 1, 2, and 3), which are sequentially disposed. Wherein the bottom layer module 10 is located below the middle layer module 20.

Fig. 4A is a schematic diagram showing an underlayer module of the stage according to the present embodiment. Fig. 4B is an exploded schematic view showing the bottom layer module of the stage according to the present embodiment.

Referring to fig. 4A and 4B, in some examples, the bottom layer module 10 may include a first flat plate 100, a first linear guide rail assembly 101, a first photoelectric switch 102, a first grating scale 103, a light source 104, and a light source holder 105.

In some examples, the first plate 100 may be a marble plate with a high levelness, so that the stage 1 can have a good levelness, which is beneficial to improve the accuracy of the measurement.

In some examples, the first linear guide assemblies 101 may be symmetrically installed at both sides of the upper surface of the first plate 100, and the number of the first linear guide assemblies 101 may be 2. For example, the first linear guide assembly 101 may include a first linear guide assembly 101a and a first linear guide assembly 101b symmetrically installed at both sides of the upper surface of the bottom module.

In some examples, the first linear guide assembly 101 may include a first linear guide 1011 and a plurality of first sliders 1012 movably mounted on the first linear guide 1011.

In some examples, the first linear guide 1011 may further include a first linear guide 1011a and a first linear guide 1011B symmetrically disposed on both sides of the first flat board 100 (see fig. 4B). In the embodiment of fig. 4B, the first linear guide 1011 is fixedly attached to the floor module 10.

In some examples, the plurality of first sliders 1012 movably mounted on the first linear guide 1011 is four in number, and the first sliders 1012 may include a first slider 1012a, a first slider 1012b, a first slider 1012c, and a first slider 1012 d. The plurality of first sliders 1012 can thereby move on the first linear guide 1011.

In some examples, the first plurality of sliders 1012 may be fixedly coupled to the middle layer module 20 such that the middle layer module 20 is movable in a first direction along the first linear guide 1011 via the first plurality of sliders 1012.

In some examples, the bottom layer module 10 further includes a first opto-electronic switch 102 mounted on one side of the first plate 100, and in the embodiment of fig. 4B, the number of the first opto-electronic switches 102 is two. The first opto-electronic switch 102 may include a first opto-electronic switch 102a and a first opto-electronic switch 102 b.

In some examples, the bottom layer module 10 further includes a first linear scale 103 (see fig. 4B) mounted on a side of the first plate 100, and in some examples, the bottom layer module 10 further includes a kinematic drag chain 107 mounted on a side of the first plate 100. In some examples, the kinematic drag chain 107 has flexible wires inside it that can be moved in a bendable manner, whereby the kinematic drag chain 107 can be moved in a first direction.

In some examples, the bottom module 10 further includes a first position-limiting pillar 106 mounted on the other side of the first plate 100, in the embodiment of fig. 4B, the number of the first position-limiting pillars 106 is 2, and the first position-limiting pillars 106 may include a first position-limiting pillar 106a and a first position-limiting pillar 106B. In some examples, the first restraint posts 106a and 106b may act as hard restraints (described later) for a start and end of movement of the middle module 20, the upper module 30, and the support plate 40 in the first direction.

In some examples, the bottom module 10 may further include a light source 104 and a light source holder 105 installed in the middle of the first plate 100. In some examples, the light source mount 105 is used to secure the light source 104.

In some examples, the light source 104 may be used to illuminate a workpiece to be measured placed on the support plate 40. In some examples, the support plate 40 (described later) may be a transparent glass plate.

Fig. 5A is a schematic view showing a middle layer module of the stage according to the present embodiment. Fig. 5B is an exploded schematic view showing a middle layer module of the stage according to the present embodiment.

In some examples, the middle module 20 may include a second plate 200, a second direction driving unit 202, a first stopper 203, a first direction driving unit 204, and a second linear guide stopper 205 (see fig. 5B). In some examples, the second plate 200 may be a marble plate having a high levelness, whereby the middle layer module 20 can be moved in a horizontal direction well.

In some examples, the second direction driving unit 202 may be a linear motor, and the second direction driving unit 202 may drive the upper module 30 and the support plate 40 to move in the second direction. The linear motor can move at a high speed and be accurately positioned, the relative motion of the stator and the rotor of the linear motor can be realized without mechanical contact, and the mechanical loss and the mechanical noise can be well reduced by the linear motor. The second direction driving unit 202 thus drives the upper module 30 and the support plate 40 to move in the second direction, which enables faster positioning and good noise reduction.

In some examples, the first direction driving unit 204 may also be driven by a linear motor, so that the first direction driving unit 204 drives the middle module 20, the upper module 30 and the support plate 40 to move in the first direction to position at a faster speed and reduce noise well.

In some examples, the first stop block 203 may cooperate with the first stop post of the bottom module 10 to achieve a hard stop for movement of the middle module 20, the upper module 30, and the support plate 40 in a first direction. In some examples, the number of the first stoppers 203 is 2, and the first stoppers 203 may include a first stopper 203a and a first stopper 203 b.

In some examples, the first stopper 203a may cooperate with the first stopper post 106a to achieve a first direction of stopper. In some examples, the first stopper 203b may cooperate with the first stopper post 106b to achieve a first direction of stopper. The first limiting block 203 and the first limiting column 106 are matched to limit the movement of the middle module 20, the upper module 30 and the support plate 40 in the first direction.

In some examples, the second linear guide stop 205 may act as a stop for the middle module 20, the upper module 30, and the support plate 40 in the second direction. In some examples, second linear guide stop 205 is 4 in number, and second linear guide stop 205 may include second linear guide stop 205a, second linear guide stop 205b, second linear guide stop 205c, and second linear guide stop 205 d.

In some examples, the middle module 20 may also include a dust cover 201, a mount 206, a flexible support 207, and a dust cover mounting plate 208 (see fig. 2 and 5B). In some examples, the fixing base 206 may be installed at both sides of the first plate 100, and the dust cover 201 may be fixedly connected with the fixing base 206. Whereby the dust cover 201 can be fixed at one end and movable in the first direction at the other end.

In some examples, the dust cover 201 may also be connected to the second platform 20 by a dust cover mounting plate 208.

In some examples, the dust cover 201 may be dust proof, and the dust cover 201 may reduce dust from entering the grating scale, linear guide, etc. The dust cover 201 can also prevent foreign matter from falling into the stage 1.

In some examples, the flexible support 207 may connect the fixing base 206 and the second plate 200, and in some examples, the dust cover 201 may have a plurality of through holes through which the flexible support 207 may be installed in the dust cover 201. In this case, the flexible support 207 can support the dust cover 201.

In some examples, the flexible support 207 may be used for flexible cushioning of the movement of the middle module 20 in the first direction, and in some examples, the flexible support 207 may be good at reducing frictional noise generated by the movement of the middle module 20 in the first direction.

In some examples, the number of dust caps 201 is 2, and the dust caps 201 may include dust caps 201a and 201 b. The dust cover 201 can thereby protect the front and rear components of the middle layer module 20.

In some examples, in the embodiment of fig. 5B, the number of the flexible supports 207 is four, and the flexible supports 207 may include a flexible support 207a, a flexible support 207B, a flexible support 207c, and a flexible support 207 d. The flexible supports 207a, 207b, 207c, and 207d thus installed in the dust cover 201 can serve as flexible buffers for the middle layer module 20 and the dust cover 201 to move back and forth in the first direction, and can reduce frictional noise generated by the middle layer module 20 moving back and forth in the first direction.

In some examples, the middle layer module 20 may further include a second photoelectric switch 209, a first sensing piece 210, a first reading head 211, and a second reading head 212.

In some examples, the first sensing tabs 210 are matched with the first optoelectronic switches 102 of the bottom layer module 10, and in some examples, the number of the first sensing tabs 210 may be 2. The first sensing piece 210 may include a first sensing piece 210a and a first sensing piece 210 b.

In some examples, the first sensing tab 210a of the middle layer module 20 can cooperate with the first optoelectronic switch 102a of the bottom layer module 10 to set a start position for the movement of the middle layer module 20, the middle layer module 20 moves in a first direction, when the first sensing tab 210a moves to the position of the first optoelectronic switch 102b, the first sensing tab 210a senses an optoelectronic signal of the first optoelectronic switch 102b, and a computer processing system connected to the stage 1 sends an instruction, and the middle layer module 20 stops moving in the first direction.

In some examples, the first sensing tab 210b of the middle module 20 can cooperate with the first optoelectronic switch 102b of the bottom module 10 to set a start position for the middle module 20 to move, the middle module 20 moves in a first direction, when the first sensing tab 210b moves to the position of the first optoelectronic switch 102a, the first sensing tab 210b senses an optoelectronic signal of the first optoelectronic switch 102a, and a computer processing system connected to the stage 1 sends an instruction, and the middle module 20 stops moving in the first direction.

In some examples, the middle module 20 may move the upper module 30 and the support plate 40 together in a first direction. The first sensing piece 210 and the first photoelectric switch 102 cooperate to realize the electronic limit of the start position and the end position of the movement of the middle module 20, the upper module 30 and the support plate 40 in the first direction.

In some examples, the first readhead 211 may be matched to the first linear scale 103 in the underlying module 10. In some examples, the first reading head 211 and the first linear scale 103 in cooperation can measure the displacement of the middle layer module 20, the upper layer module 30, and the support plate 40 in a first direction. The first reading head 211 and the first grating scale 103 can cooperate to measure the displacement of the workpiece to be measured in the first direction.

Fig. 6A is a schematic diagram showing the upper module 30 and the support plate 40 of the stage 1 according to the present embodiment. Fig. 6B is an exploded schematic view showing the upper module 30 and the support plate 40 of the stage 1 according to the present embodiment.

In some examples, the upper module 30 in the embodiment of fig. 6B includes a third plate 300, a second linear guide assembly 301, a support block 302, a plunger 303, a second linear scale 304, and a second sensor chip 305.

In some examples, the third plate 300 may be a marble plate having a good levelness.

In some examples, the second linear guide assembly 301 may include a second linear guide assembly 301a and a second linear guide assembly 301b, and the second linear guide assembly 301a and the second linear guide assembly 301b are symmetrically installed at both sides of the lower surface of the upper module 30, and in some examples, the second linear guide assembly 301 may also be symmetrically installed at both sides of the lower surface of the upper flat plate 300.

In some examples, the second linear guide assembly 301 may include a second linear guide 3011 and a plurality of second sliders 3012 movably mounted to the second linear guide 3011. In the embodiment of fig. 6B, the number of the second sliders 3012 is 4, and the second sliders 3012 may include a second slider 3012a, a second slider 3012B, a second slider 3012c, and a second slider 3012 d. In some examples, the second slider 3012a, the second slider 3012b, the second slider 3012c, and the second slider 3012d may be fixedly connected to the second panel 200.

In some examples, the second linear guide 3011 may be fixedly connected to the third plate 300. In the embodiment of fig. 6B, the number of the second linear guides 3011 is 2, and the second linear guides 3011 may include a second linear guide 3011a and a second linear guide 3011B. In some examples, the second linear guide 3011 may be fixedly connected to the third plate 300.

In some examples, the second direction driving unit 202 may drive the upper module 30 to move in the second direction by a linear motor, and the second direction driving unit 202 may drive the upper module 30 and the support plate 40 to move in the second direction by cooperation of the second linear guide assembly 301 with the upper module 30.

In some examples, the second slider 3012 may be fixed to the second plate 200, and the second linear guide 3011 may move in a second direction along the second slider 3012. In some examples, the second linear guide 3011 may be fixed to the third plate 300. Whereby the second linear guide 3011, the upper module 30 and the support plate 40 can move in the second direction along the plurality of second sliders 3012.

In some examples, the second grating scale 304 of the upper module 30 may be mounted on one side of the third plate 300 (see fig. 6B), and the second grating scale 304 of the upper module 30 may be matched with the second readhead 212 of the middle module 20. In this case, the second grating scale 304 and the second readhead 212 are adapted to measure the distance that the upper module 30 and the support plate 40 move in the second direction.

In some examples, the upper module 30 further includes a second linear guide stop 306, and the second linear guide stop 306 may cooperate with the second linear guide stop 205 of the middle module 20 to limit the movement of the upper module 30 and the support plate 40 in the second direction. The second linear guide stopper 306 and the second linear guide stopper 205 cooperate to protect the upper module 30 and the support plate 40 from moving in the second direction.

In some examples, the second sensing tab 305 of the upper module 30 can mate with the second opto-electronic switch 209 of the middle module 20, and the second sensing tab 305 and the second opto-electronic switch 209 can cooperate to create an electronic limit. The second sensing piece 305 and the second photoelectric switch 209 cooperate to realize the electronic limit of the start position and the end position of the movement of the middle module 20, the upper module 30 and the support plate 40 in the second direction.

In some examples, the plurality of support blocks 302 of the upper form 30 may be used to support the support plate 40 and the plurality of plungers 303 of the upper form 30 may be used to secure the support plate 40.

In some examples, a plurality of support blocks 302 may be mounted to an upper surface of the third plate 300, and a plurality of plungers 303 may be mounted in holes of the third plate 300 beside the plurality of support blocks 302. The support plate 40 may be mounted on a plurality of support blocks 302, and the support plate 40 may be elastically compressed by a plurality of plungers 303. Whereby the support plate 40 can be fixed to the upper module 30.

While the present invention has been described in detail in connection with the drawings and examples, it is to be understood that the above description is not intended to limit the invention in any way. The present invention may be modified and varied as necessary by those skilled in the art without departing from the true spirit and scope of the invention, and all such modifications and variations are intended to be included within the scope of the invention.

Claims (10)

1. An object stage for an image measuring instrument is characterized by comprising a bottom layer module, a middle layer module, an upper layer module and a supporting flat plate for bearing a measured workpiece which are arranged in sequence,

the bottom layer module comprises a first flat plate and a first linear guide rail component arranged on the first flat plate;

the middle layer module comprises fixed seats arranged at two sides of the first flat plate, a second flat plate arranged between the fixed seats, a flexible supporting piece connected with the fixed seats and the second flat plate, a dust cover provided with a plurality of through holes and arranged on the flexible supporting piece in a manner that the flexible supporting piece penetrates through the through holes, a first direction driving unit matched with the first linear guide rail assembly to drive the supporting flat plate to move towards a first direction, and a second direction driving unit matched with the second linear guide rail assembly to drive the supporting flat plate to move towards a second direction;

the upper layer module comprises a third flat plate, a second linear guide rail component arranged on the third flat plate and a supporting block used for supporting the supporting flat plate.

2. The object table of claim 1, wherein:

the bottom layer module also comprises a first grating ruler arranged on the first flat plate, the middle layer module also comprises a first reading head arranged on the second flat plate and matched with the first grating ruler,

the upper module further comprises a second grating ruler arranged on the third flat plate, and the middle module further comprises a second reading head arranged on the second flat plate and matched with the second grating ruler.

3. The object table of claim 1, wherein:

the bottom layer module also comprises a first photoelectric switch arranged on the first flat plate, the middle layer module also comprises a first induction sheet arranged on the second flat plate and matched with the first photoelectric switch,

the middle layer module further comprises a second photoelectric switch arranged on the second flat plate, and the upper layer module further comprises a second induction sheet arranged on the third flat plate and matched with the second photoelectric switch.

4. The object table of claim 1, wherein:

the first direction driving unit is driven by a linear motor, and the second direction driving unit is driven by a linear motor.

5. The object table of claim 1, wherein:

the supporting flat plate is a transparent glass flat plate, the bottom layer module further comprises a light source and a light source fixing seat used for fixing the light source, and the middle layer module and the upper layer module further comprise light through holes matched with the position of the light source so that the light source irradiates the workpiece to be detected.

6. The object table of claim 1, wherein:

the bottom module further includes a plurality of first restraint posts configured to define a range of motion of the second panel.

7. The object table of claim 1, wherein:

the first linear guide rail assemblies are symmetrically arranged on two sides of the bottom layer module and comprise a first linear guide rail and a plurality of first sliding blocks movably arranged on the first linear guide rail, the first sliding blocks are fixedly connected with the second flat plate, and the first linear guide rail is fixedly connected with the first flat plate.

8. The object table of claim 7, wherein:

the first direction driving unit is configured to drive the second and third flat plates to move in a first direction in such a manner that the first slider relatively moves along the first linear guide.

9. The object table of claim 1, wherein:

the second linear guide rail assemblies are symmetrically arranged on two sides of the upper layer module and comprise a second linear guide rail and a plurality of second sliding blocks movably arranged on the second linear guide rail, the second sliding blocks are fixedly connected with the second flat plate, and the second linear guide rail is fixedly connected with the third flat plate.

10. The object table of claim 9, wherein:

the second direction driving unit is configured to drive the third flat plate to move in a second direction in such a manner that the second slider relatively moves along the second linear guide.

Images