CN214407368U - Measuring device based on line spectrum confocal sensor - Google Patents
Measuring device based on line spectrum confocal sensor Download PDFInfo
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- CN214407368U CN214407368U CN202120715356.9U CN202120715356U CN214407368U CN 214407368 U CN214407368 U CN 214407368U CN 202120715356 U CN202120715356 U CN 202120715356U CN 214407368 U CN214407368 U CN 214407368U
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Abstract
The utility model discloses a measuring device based on line spectrum confocal sensor, including the frame, locate the longmen platform in the frame, locate biax motion unit and Z axle linear motion module on the longmen platform to and objective table and line spectrum confocal sensor. The gantry platform comprises an installation table top and a gantry beam, a gantry opening is formed below the gantry beam, the Z-axis linear motion module is fixedly arranged on the gantry beam, and the line spectrum confocal sensor is fixedly connected with the Z-axis linear motion module to move along the Z axis. The double-shaft motion unit comprises an X-axis linear motion module and a Y-axis linear motion module which is fixedly arranged on the X-axis linear motion module and is vertical to the X-axis linear motion module, so that the objective table can pass through the gantry opening back and forth along the X direction or the Y direction under the driving of the X-axis linear motion module and the Y-axis linear motion module. The measuring device can solve the problem of 3D defect detection in semiconductor products, and can realize high-precision 3D shape measurement.
Description
Technical Field
The utility model belongs to the technical field of the laser survey technique and specifically relates to a measuring device based on line spectrum confocal sensor is related to.
Background
With the development of intelligent manufacturing, the requirements for the quality of parts in the production process are higher and higher, and the intelligent detection of the segment difference, flatness, thickness, size and part loss of the parts is more and more widely applied. The detection method comprises the following steps: the detection method comprises the steps of manual detection, point laser detection, 2D visual detection and laser three-dimensional contour detection, the detection methods correspond to an intelligent detection system for detecting the quality of the parts, and the laser three-dimensional contour intelligent detection system based on the laser three-dimensional contour measuring instrument becomes a mainstream detection system for detecting the quality of the parts due to the advantages of laser and high system repeatability.
However, 2D detection cannot be adopted for nanoscale measurement in the semiconductor industry at present, and the existing laser three-dimensional profile detection is not accurate enough for 3D shape detection of a tiny nanoscale size, and defect defects cannot be realized.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to overcome above-mentioned technique not enough, provide a measuring device based on confocal sensor of line spectrum, solve the technical problem to the 3D defect detection of semiconductor product.
In order to achieve the technical purpose, the technical scheme of the utility model provides a measuring device based on line spectrum confocal sensor, which comprises a frame, a gantry platform arranged on the frame, a double-shaft motion unit and a Z-axis linear motion module arranged on the gantry platform, an objective table arranged on the double-shaft motion unit and a line spectrum confocal sensor arranged on the Z-axis linear motion module;
the gantry platform comprises a mounting table top and a gantry beam erected on the mounting table top, a gantry opening is formed below the gantry beam, the length and width directions of the mounting table top are respectively a Y-axis direction and an X-axis direction, and the direction vertical to the mounting table top is a Z-axis direction;
the Z-axis linear motion module is fixedly arranged on the gantry beam, and the line spectrum confocal sensor is fixedly connected with a Z-axis sliding block of the Z-axis linear motion module to move along the Z axis under the driving of the Z-axis linear motion module, so that the distance between the line spectrum confocal sensor and the objective table is adjusted;
the double-shaft motion unit comprises an X-axis linear motion module, a Y-axis linear motion module which is fixedly arranged on the X-axis linear motion module and is vertical to the X-axis linear motion module, the X-axis linear motion module is fixedly connected with the mounting table board, the X-axis linear motion module is provided with an X-axis sliding block which slides along the X-axis direction, the Y-axis linear motion module is provided with a Y-axis sliding block which slides along the Y-axis direction, the Y-axis linear motion module is fixedly arranged on the X-axis sliding block, and the objective table is fixedly connected with the Y-axis sliding block so that the objective table is driven by the X-axis linear motion module and the Y-axis linear motion module to pass through the gantry opening back and forth along the X direction or the Y direction.
Preferably, the gantry beam comprises two upright columns arranged on the installation table board at intervals and a top beam arranged on the two upright columns in a spanning manner; the X-axis linear motion module is followed one side of X axle direction with the stand interval sets up in order to form a circuit sliding area, Y-axis linear motion module is provided with first circuit guide unit along Y axle direction, X-axis linear motion module is provided with second circuit guide unit along X axle direction, first circuit guide unit, second circuit guide unit are worn to locate in proper order by the circuit connecting wire that Y-axis linear motion module was drawn forth.
Preferably, a wiring opening is formed in the mounting table top of the circuit sliding region, which is close to the column, of the mounting table top, and the circuit connecting line penetrating through the second circuit guiding unit is connected with the outside through the wiring opening of the circuit sliding region.
Preferably, the top crossbeam is a vertical rectangle panel, the rectangle panel via a plurality of connecting pieces with Z axle linear motion module is connected, line spectrum confocal sensor via a mounting panel set firmly in on the Z axle linear motion module, line spectrum confocal sensor passes through a plurality of connecting pieces with the mounting panel and fastens, the mounting panel fastens through a plurality of connecting pieces with Z axle linear motion module.
Preferably, the frame is connected with the mounting table via a plurality of vibration isolation pads.
Preferably, the mounting table, the columns and the top beam are marble table, marble columns and marble beams, respectively.
Preferably, an accommodating groove is formed in the mounting table top, a boss is arranged on the X-axis linear motion module corresponding to the accommodating groove, and the X-axis linear motion module is fixedly arranged in the accommodating groove through the boss.
Preferably, the X-axis linear motion module and the Y-axis linear motion module are linear motor driving mechanisms, and a coreless linear motor is arranged in the linear motor driving mechanism, so that the linear spectrum confocal sensor scans the object to be measured on the objective table point to point.
Preferably, the Z-axis linear motion module comprises a servo motor and a ball screw mechanism connected with an output shaft of the servo motor, so as to position and focus the line spectrum confocal sensor.
Preferably, the repeated positioning precision of the X-axis linear motion module, the Y-axis linear motion module and the Z-axis linear motion module is less than or equal to +/-5 mu m.
Compared with the prior art, the beneficial effects of the utility model are that:
when an object to be detected (the object to be detected can be a semiconductor product) needs to be detected, the product is placed on an objective table on a Y-axis linear motion module, the product is moved to the position below a line spectrum confocal sensor by adjusting an X-axis linear motion module and the Y-axis linear motion module, and then the line spectrum confocal sensor is focused by adjusting a Z-axis linear motion module, so that the distance between the detected product and the line spectrum confocal sensor is within the measuring range of the line spectrum confocal sensor. After all the products are ready, the products are measured, firstly, the Y-axis linear motion module is driven to drive the products to move a distance of an outline size in the Y direction, then, the X-axis linear motion module is driven to drive the products to generate a proper displacement in the X direction, and then, the products move a distance of an outline size in the Y direction, and the steps are repeated until the whole outline of the products is scanned. That is, the utility model discloses a line spectrum confocal sensor of high accuracy under the direction of motion of XYZ triaxial is supplementary, realizes the 3D appearance precision measurement and the formation of image to realize its defect detection and solve the technical problem of 3D defect detection among the prior art semiconductor product.
In addition, through the arrangement of the first line guide unit and the second line guide unit, the circuit connecting line led out by the Y-axis linear motion module can not interfere with the relative motion of the X-axis linear motion module and the Y-axis linear motion module, and the detection effect is prevented from being influenced.
Furthermore, the circuit connecting lines led out by the Y-axis linear motion module are guided to the line sliding area through the first line guide unit and the second line guide unit and are connected with the outside through the wiring openings, so that the circuit connecting lines led out by the second line guide unit can be prevented from interfering the double-axis motion unit, and the overall planning and layout of the line is further realized.
Drawings
Fig. 1 is a schematic structural diagram of a measuring device based on a line spectrum confocal sensor according to the present invention;
fig. 2 is an exploded view of a portion of the structure of fig. 1.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
The utility model provides a measuring device based on confocal sensor of line spectrum, including frame 10, locate gantry platform 20 in the frame is located biax motion unit 30 and Z axle linear motion module 40 on gantry platform 20 and locating the objective table 50 on the biax motion unit 30 with locate the confocal sensor 60 of line spectrum on the Z axle linear motion module 40.
The gantry platform 20 comprises a mounting table top 21 and a gantry beam 22 erected on the mounting table top 21, a gantry opening 23 is formed below the gantry beam 22, the length and width directions of the mounting table top 21 are respectively a Y-axis direction and an X-axis direction, and the direction vertical to the mounting table top 21 is a Z-axis direction;
the Z-axis linear motion module 40 is fixedly mounted on the gantry beam 22, and the line spectrum confocal sensor 60 is fixedly connected with a Z-axis slider of the Z-axis linear motion module 40 to move along the Z-axis under the driving of the Z-axis linear motion module 40, so as to adjust the distance between the line spectrum confocal sensor 60 and the objective table 50.
The biaxial movement unit 30 includes an X-axis linear movement module 31, and a Y-axis linear movement module 32 fixed on the X-axis linear movement module 31 and perpendicular to the X-axis linear movement module 31, the X-axis linear movement module 31 is fixedly connected to the mounting table 21, the X-axis linear movement module 31 has an X-axis slider sliding along the X-axis direction, the Y-axis linear movement module 32 has a Y-axis slider sliding along the Y-axis direction, the Y-axis linear movement module 32 is fixed on the X-axis slider, and the stage 50 is fixedly connected to the Y-axis slider, so that the stage 50 is driven by the X-axis linear movement module 31 and the Y-axis linear movement module 32 to move back and forth through the gantry opening 23 along the X-axis direction or the Y-axis direction.
When an object to be detected (the object to be detected can be a semiconductor product) needs to be detected, the product is firstly placed on the object stage 50 on the Y-axis linear motion module 32, the product is moved to the lower part of the line spectrum confocal sensor 60 by adjusting the X-axis linear motion module 31 and the Y-axis linear motion module 32, then the line spectrum confocal sensor 60 is focused by adjusting the Z-axis linear motion module 40, and the distance between the detected product and the line spectrum confocal sensor 60 is in the measuring range of the line spectrum confocal sensor 60. After all the products are ready, the products are measured, firstly, the Y-axis linear motion module 32 is driven to drive the products to move a distance of an outline size in the Y direction, then, the X-axis linear motion module 31 is driven to drive the products to generate a proper displacement in the X direction, and then, the products move a distance of an outline size in the Y direction, and the steps are repeated until the whole outline of the products is scanned. That is, the utility model discloses a line spectrum confocal sensor 70 of high accuracy under the direction of motion of XYZ triaxial is supplementary, realizes the 3D appearance precision measurement and the formation of image to realize the technical problem of 3D defect detection among the semiconductor product among its defect detection solution prior art.
In this embodiment, the gantry beam 22 includes two columns 221 spaced apart from each other on the installation platform 21 and a top beam 222 spanning the two columns 221; x axle linear motion module 31 is followed one side of X axle direction with one the stand 221 interval sets up in order to form a circuit sliding region 70, Y axle linear motion module 32 is provided with first circuit guide unit 81 along Y axle direction, X axle linear motion module 31 is provided with second circuit guide unit 82 along X axle direction, the circuit connecting line that Y axle linear motion module 32 was drawn is worn to locate first circuit guide unit 81, second circuit guide unit 82 in proper order. Through the arrangement of the first line guide unit 81 and the second line guide unit 82, the circuit connection line led out by the Y-axis linear motion module 32 can not interfere with the relative motion of the X-axis linear motion module 31 and the Y-axis linear motion module 32, and the detection effect is prevented from being influenced. The gantry beam 22 can be integrally formed and can also be spliced.
Furthermore, the mounting table 21 of the mounting table 21 near the circuit sliding region 70 of the column 221 is provided with a wiring opening 90, and the circuit connection line passing through the second circuit guiding unit 82 is connected to the outside through the wiring opening 90 of the circuit sliding region 70. The circuit connecting lines led out from the Y-axis linear motion module 32 are guided to the line sliding area 70 by the first line guiding unit 81 and the second line guiding unit 82 and are connected with the outside through the routing opening 90, so that the circuit connecting lines led out from the second line guiding unit 82 can be prevented from interfering with the biaxial motion unit 30, and the overall planning and layout of the lines are also realized. In this embodiment, the first line guiding unit 81 and the second line guiding unit 82 are tow chain structures, the moving directions of the two tow chain structures are perpendicular to each other, wherein the tow chain structure on the Y-axis linear motion module 32 is arranged on one side of the Y-axis linear motion module 32 along the Y-axis direction, the tow chain structure on the X-axis linear motion module 31 is arranged on one side of the X-axis linear motion module 31 along the X-axis direction, and the extension lines of the wire guiding openings of the two tow chain structures are intersected.
It can be understood that the top beam 222 is a vertical rectangular panel, the rectangular panel is connected to the Z-axis linear motion module 40 through a plurality of connectors, the line spectrum confocal sensor 60 is fixed to the Z-axis linear motion module 40 through a mounting plate 41, the line spectrum confocal sensor 60 is fastened to the mounting plate 41 through a plurality of connectors, and the mounting plate 41 is fastened to the Z-axis linear motion module 40 through a plurality of connectors. The mounting plate 41 is arranged to facilitate mounting of the line spectrum confocal sensor 60, and reduce the influence of vibration generated by movement of the Z-axis linear motion module 4 on the line spectrum confocal sensor 60, thereby improving scanning accuracy. In this embodiment, the connecting members are screws.
In practical application, the rack 10 is connected with the mounting table surface 21 through a plurality of shock insulation pads 11 for reducing external vibration interference, then the mounting table surface 21 can be fastened through screws, a wheel body assembly for adjusting levelness is arranged at the bottom of the rack 10, and the wheel body assembly comprises a plurality of horseshoes 12 uniformly distributed on the bottom of the rack 10. Through the arrangement of the horse wheel 12, the carrying is convenient, and the horizontal height can be finely adjusted, so that the whole measuring platform is kept in a horizontal state.
It should be noted that the mounting platform 21, the upright columns 221 and the top beam 222 are marble platform, marble upright columns and marble beams, respectively, and the marble platform, the marble upright columns and the marble beams all have the advantages of strong rigidity, good vibration resistance, high thermal expansion coefficient and the like, and are suitable for application scenes with high precision levels.
It can be understood that the mounting platform 21 is provided with a receiving groove 211, the X-axis linear motion module 31 is provided with a boss corresponding to the receiving groove 211, and the X-axis linear motion module 31 is fixedly disposed in the receiving groove 211 via the boss. Through setting firmly X axle linear motion module 31 in holding tank 211, when the product that awaits measuring when adjusting position, can effectively avoid X axle linear motion module 31 to produce the displacement because of the vibration, improved and detected the precision.
In this embodiment, the X-axis linear motion module 31 and the Y-axis linear motion module 32 are both linear motor driving mechanisms, and a coreless linear motor or a coreless linear motor is disposed in the linear motor driving mechanism, so that the line spectrum confocal sensor 60 scans the object to be measured on the stage 50 point by point. The Z-axis linear motion module 40 includes a servo motor and a ball screw mechanism connected to an output shaft of the servo motor for positioning and focusing the line spectrum confocal sensor 60.
In addition, the repeated positioning precision of the X-axis linear motion module 31, the Y-axis linear motion module 32 and the Z-axis linear motion module 30 is less than or equal to +/-5 microns. Specifically, the X-axis linear motion module adopts a linear motor driving mechanism to realize high-precision positioning of a measured product in the X direction, the repeated positioning precision is less than or equal to +/-0.5 mu m, and high-precision 3D shape measurement is favorably realized. The Y-axis linear motion module adopts a linear motor driving mechanism to realize high-precision positioning of a measured product in the Y direction, the repeated positioning precision is less than or equal to +/-0.5 mu m, and high-precision 3D shape measurement is favorably realized. The Z-axis linear motion module adopts a ball screw and servo motor driving mode to realize the positioning and focusing of the line spectrum confocal sensor, the repeated positioning precision is less than or equal to +/-5 mu m, and the accurate positioning of the line spectrum confocal sensor is favorably realized.
When right the utility model provides a measuring device when assembling, with the back of installing table surface 21 erection fixation on frame 10, fix X axle linear motion module 31 on horizontal marble installation table surface through the screw installation, after having adjusted the motion function, fix Y axle linear motion module 32 on X axle linear motion module through the screw installation again, have adjusted its motion function simultaneously. In a similar way, the Z-axis linear motion module 40 is installed and fastened on the marble cross beam through screws, and the motion function of the Z-axis linear motion module is adjusted. The line spectrum confocal sensor 60 is fixedly installed on the Z-axis linear motion module 40 through the installation plate 41, the line spectrum confocal sensor 60 is fastened with the installation plate 41 through screws, and the installation plate 41 is fastened with the Z-axis linear motion module 40 through screws.
When an object to be detected (the object to be detected can be a semiconductor product) needs to be detected, the product is placed on an objective table on a Y-axis linear motion module, the product is moved to the position below a line spectrum confocal sensor by adjusting an X-axis linear motion module and the Y-axis linear motion module, and then the line spectrum confocal sensor is focused by adjusting a Z-axis linear motion module, so that the distance between the detected product and the line spectrum confocal sensor is within the measuring range of the line spectrum confocal sensor. After all the products are ready, the products are measured, firstly, the Y-axis linear motion module is driven to drive the products to move a distance of an outline size in the Y direction, then, the X-axis linear motion module is driven to drive the products to generate a proper displacement in the X direction, and then, the products move a distance of an outline size in the Y direction, and the steps are repeated until the whole outline of the products is scanned. That is, the utility model discloses a line spectrum confocal sensor of high accuracy under the direction of motion of XYZ triaxial is supplementary, realizes the 3D appearance precision measurement and the formation of image to realize its defect detection and solve the technical problem of the 3D defect detection among the semiconductor product among the prior art, can realize the 3D appearance measurement of high accuracy simultaneously.
The above description of the present invention does not limit the scope of the present invention. Any other corresponding changes and modifications made according to the technical idea of the present invention should be included in the scope of the claims of the present invention.
Claims (10)
1. A measuring device based on a line spectrum confocal sensor is characterized by comprising a rack, a gantry platform arranged on the rack, a double-shaft motion unit and a Z-axis linear motion module arranged on the gantry platform, an object stage arranged on the double-shaft motion unit and a line spectrum confocal sensor arranged on the Z-axis linear motion module;
the gantry platform comprises a mounting table top and a gantry beam erected on the mounting table top, a gantry opening is formed below the gantry beam, the length and width directions of the mounting table top are respectively a Y-axis direction and an X-axis direction, and the direction vertical to the mounting table top is a Z-axis direction;
the Z-axis linear motion module is fixedly arranged on the gantry beam, and the line spectrum confocal sensor is fixedly connected with a Z-axis sliding block of the Z-axis linear motion module to move along the Z axis under the driving of the Z-axis linear motion module, so that the distance between the line spectrum confocal sensor and the objective table is adjusted;
the double-shaft motion unit comprises an X-axis linear motion module, a Y-axis linear motion module which is fixedly arranged on the X-axis linear motion module and is vertical to the X-axis linear motion module, the X-axis linear motion module is fixedly connected with the mounting table board, the X-axis linear motion module is provided with an X-axis sliding block which slides along the X-axis direction, the Y-axis linear motion module is provided with a Y-axis sliding block which slides along the Y-axis direction, the Y-axis linear motion module is fixedly arranged on the X-axis sliding block, and the objective table is fixedly connected with the Y-axis sliding block so that the objective table is driven by the X-axis linear motion module and the Y-axis linear motion module to pass through the gantry opening back and forth along the X direction or the Y direction.
2. The measuring device of claim 1, wherein the gantry beam comprises two columns spaced apart from each other on the mounting table and a top beam spanning the two columns; the X-axis linear motion module is followed one side of X axle direction with the stand interval sets up in order to form a circuit sliding area, Y-axis linear motion module is provided with first circuit guide unit along Y axle direction, X-axis linear motion module is provided with second circuit guide unit along X axle direction, first circuit guide unit, second circuit guide unit are worn to locate in proper order by the circuit connecting wire that Y-axis linear motion module was drawn forth.
3. The measuring device according to claim 2, wherein a wiring opening is formed on the mounting table surface of the circuit sliding region of the mounting table surface close to the column, and the circuit connecting wire passing through the second circuit guiding unit is connected with the outside through the wiring opening of the circuit sliding region.
4. The measuring device as claimed in claim 2, wherein the top beam is a vertical rectangular panel, the rectangular panel is connected to the Z-axis linear motion module via a plurality of connectors, the line spectrum confocal sensor is fixed to the Z-axis linear motion module via a mounting plate, the line spectrum confocal sensor is fastened to the mounting plate via a plurality of connectors, and the mounting plate is fastened to the Z-axis linear motion module via a plurality of connectors.
5. A measuring device according to claim 2, wherein the frame is connected to the mounting table via a plurality of vibration isolation pads.
6. The measuring device of claim 2, wherein the mounting deck, posts, and top beam are marble deck, marble posts, and marble beams, respectively.
7. The measuring device according to claim 1, wherein a receiving groove is formed in the mounting table, a boss is disposed on the X-axis linear motion module corresponding to the receiving groove, and the X-axis linear motion module is fixedly disposed in the receiving groove via the boss.
8. The measuring device according to claim 1, wherein the X-axis linear motion module and the Y-axis linear motion module are linear motor driving mechanisms, and a coreless linear motor or a coreless linear motor is disposed in the linear motor driving mechanism, so that the line spectrum confocal sensor scans the object to be measured on the stage point to point.
9. The measurement device of claim 1, wherein the Z-axis linear motion module comprises a servo motor and a ball screw mechanism coupled to an output shaft of the servo motor for positioning and focusing the line spectral confocal sensor.
10. The measuring device of claim 1, wherein the repeated positioning accuracy of the X-axis linear motion module, the Y-axis linear motion module and the Z-axis linear motion module is less than or equal to +/-5 μm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120715356.9U CN214407368U (en) | 2021-04-08 | 2021-04-08 | Measuring device based on line spectrum confocal sensor |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120715356.9U CN214407368U (en) | 2021-04-08 | 2021-04-08 | Measuring device based on line spectrum confocal sensor |
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| Publication Number | Publication Date |
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| CN214407368U true CN214407368U (en) | 2021-10-15 |
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| CN202120715356.9U Active CN214407368U (en) | 2021-04-08 | 2021-04-08 | Measuring device based on line spectrum confocal sensor |
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2021
- 2021-04-08 CN CN202120715356.9U patent/CN214407368U/en active Active
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