CN207851457U - A kind of high-accuracy panel measuring instrument of ultra-large type - Google Patents

A kind of high-accuracy panel measuring instrument of ultra-large type Download PDF

Info

Publication number
CN207851457U
CN207851457U CN201721827309.3U CN201721827309U CN207851457U CN 207851457 U CN207851457 U CN 207851457U CN 201721827309 U CN201721827309 U CN 201721827309U CN 207851457 U CN207851457 U CN 207851457U
Authority
CN
China
Prior art keywords
axis
workbench
frame
gear frame
ultra
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201721827309.3U
Other languages
Chinese (zh)
Inventor
马观岚
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Before Jiangsu Precision Instrument Co Ltd
Original Assignee
Before Jiangsu Precision Instrument Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Before Jiangsu Precision Instrument Co Ltd filed Critical Before Jiangsu Precision Instrument Co Ltd
Priority to CN201721827309.3U priority Critical patent/CN207851457U/en
Application granted granted Critical
Publication of CN207851457U publication Critical patent/CN207851457U/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Microscoopes, Condenser (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

The utility model is related to a kind of high-accuracy panel measuring instruments of ultra-large type, have workbench;It is characterized in that:The workbench is set on the base, the workbench has optical glass, the optical glass is mounted below point light source, the horizontal X-axis gear frame for having gantry structure in the vertical direction of the workbench, the workbench is radially provided with Y-axis gear frame, metallographic microscope is vertically arranged in by fixed plate on X-axis gear frame, the end of the X-axis gear frame and Y-axis gear frame is separately connected respective servo motor, the camera lens face of the metallographic microscope has point light source, the technical solution of the utility model uses movable gantry structure, bilateral support, crossbeam is light-weight, it is small using error after metallography microscope mirror case horizon glass head, it reduces simultaneously to lead screw, the abrasion of guide rail, stablized for a long time using measurement accuracy.

Description

A kind of high-accuracy panel measuring instrument of ultra-large type
Technical field
The present invention relates to a kind of precision instruments, more particularly, to a kind of high-accuracy panel measuring instrument of ultra-large type.
Background technology
The observation of existing liquid crystal larger panel conductive ion and measurement accuracy data be all by small-sized measuring instrument into Row, while the degree of automation is low, and precision and structure cannot meet the measurement demand of larger panel.
Invention content
The purpose of the present invention is overcoming defect of the existing technology, a kind of structure conveniently moving is provided, can be measured big Type panel, and the high-accuracy panel measuring instrument of a kind of ultra-large type that measurement accuracy is stablized.
Realizing the technical solution of the object of the invention is:A kind of high-accuracy panel measuring instrument of ultra-large type has workbench;Its It is characterized in that:The workbench is set on the base, and there is the workbench optical glass, the optical glass to be mounted below Point light source, the horizontal X-axis gear frame for having gantry structure in the vertical direction of the workbench, the workbench are radially provided with Y Axis gear frame, metallographic microscope are vertically arranged in by fixed plate on X-axis gear frame, the X-axis gear frame and Y-axis gear frame End is separately connected respective servo motor, and the camera lens face of the metallographic microscope has point light source.
Further prioritization scheme is a kind of high-accuracy panel measuring instrument of ultra-large type, is driven in the X-axis Sliding is provided with Z-axis transmission frame on frame, and the metallographic microscope is moved up and down in the Z-axis transmission frame, the Z-axis transmission frame Top be electrically connected Z axis motor.
Further prioritization scheme is a kind of high-accuracy panel measuring instrument of ultra-large type, the X-axis gear frame Including X-axis synchronous belt, X-axis limited block and lower lamp line wheel, the X-axis synchronous belt is socketed on lower lamp line wheel and drives Z-axis transmission Frame moves in the X-direction of workbench.
Further prioritization scheme is a kind of high-accuracy panel measuring instrument of ultra-large type, the X-axis gear frame On be additionally provided with ink indicia, the ink indicia is close to metallographic microscope.
Further prioritization scheme is a kind of high-accuracy panel measuring instrument of ultra-large type, the X-axis gear frame Both sides be equipped with crossbeam three-dimensional bracket, the bottom of the crossbeam three-dimensional bracket is arranged on Y-axis gear frame and in the workbench Y-axis on slide, the crossbeam three-dimensional bracket be equipped with limit glue fixed block.
Further prioritization scheme is a kind of high-accuracy panel measuring instrument of ultra-large type, the Z-axis transmission frame It is equipped with horizontal camera lens, the horizontal camera lens is for observing two lateral sections.
After adopting the above technical scheme, the present invention have the effect of it is following positive:
(1) technical scheme of the present invention uses movable gantry structure, and bilateral support, crossbeam is light-weight, is shown using metallographic Error is small after the horizontal camera lens of micro mirror box, while reducing the abrasion to lead screw, guide rail, is stablized for a long time using measurement accuracy.
Description of the drawings
In order that the present invention can be more clearly and readily understood, right below according to specific embodiment and in conjunction with attached drawing The present invention is described in further detail, wherein:
Fig. 1 is the structural schematic diagram of the utility model.
Specific implementation mode
(embodiment 1)
As shown in Figure 1, the present invention has a kind of high-accuracy panel measuring instrument of ultra-large type, has workbench 1;The work Platform 1 is arranged on pedestal 2, and the workbench 1 has optical glass 3, and the optical glass 3 is mounted below point light source 4, described The horizontal X-axis gear frame 5 for having gantry structure, the workbench 1 are radially provided with Y-axis gear frame in the vertical direction of workbench 1 6, metallographic microscope 7 is vertically arranged in by fixed plate on X-axis gear frame 5, the end of the X-axis gear frame 5 and Y-axis gear frame 6 Portion is separately connected respective servo motor, and 10 face of camera lens of the metallographic microscope 7 has point light source 4.It is passed in the X-axis Sliding is provided with Z-axis transmission frame 8 in moving frame 5, and the metallographic microscope 7 is moved up and down in the Z-axis transmission frame 8, the Z axis The top electrical connection Z axis motor 9 of gear frame 8.
The X-axis gear frame 5 includes X-axis synchronous belt 51, X-axis limited block 52 and lower lamp line wheel 53, the X-axis synchronous belt 51 It is socketed on lower lamp line wheel 53 and Z-axis transmission frame 8 is driven to be moved in the X-direction of workbench 1.
Ink indicia 14 is additionally provided on the X-axis gear frame 5, the ink indicia 14 is close to metallographic microscope 7.
The both sides of the X-axis gear frame 5 are equipped with crossbeam three-dimensional bracket 13, and the bottom setting of the crossbeam three-dimensional bracket 13 exists It is slided on Y-axis gear frame 6 and in the Y-axis of the workbench 1, the crossbeam three-dimensional bracket 13 is equipped with limit glue fixed block 11.The Z-axis transmission frame 8 is equipped with horizontal camera lens 12, and the horizontal camera lens 12 is for observing two lateral sections.
The operation principle of the present invention is that:The technical solution installs metallographic microscope and horizontal camera lens on gantry structure additional again, By the servo motor of tri- shaft ends of XYZ, using servo-control system, three axis have fast move and low speed movement pattern, That is installed under objective table has point light source to ensure that and the synchronization-moving requirement of micro objective optical axis.
Particular embodiments described above has carried out further in detail the purpose of the present invention, technical solution and advantageous effect It describes in detail bright, it should be understood that the above is only a specific embodiment of the present invention, is not intended to restrict the invention, it is all Within the spirit and principles in the present invention, any modification, equivalent substitution, improvement and etc. done should be included in the guarantor of the present invention Within the scope of shield.

Claims (6)

1. a kind of high-accuracy panel measuring instrument of ultra-large type has workbench (1);It is characterized in that:Workbench (1) setting On pedestal (2), there is the workbench (1) optical glass (3), the optical glass (3) to be mounted below point light source (4), The horizontal X-axis gear frame (5) for having gantry structure in the vertical direction of the workbench (1), workbench (1) is radially provided with Y-axis gear frame (6), metallographic microscope (7) are vertically arranged in by fixed plate on X-axis gear frame (5), the X-axis gear frame (5) It is separately connected respective servo motor with the end of Y-axis gear frame (6), the camera lens (10) of the metallographic microscope (7) are just To there is point light source (4).
2. the high-accuracy panel measuring instrument of a kind of ultra-large type according to claim 1, it is characterised in that:It is passed in the X-axis Sliding is provided with Z-axis transmission frame (8) in moving frame (5), and the metallographic microscope (7) is done in the Z-axis transmission frame (8) and moved down It is dynamic, the top electrical connection Z axis motor (9) of the Z-axis transmission frame (8).
3. the high-accuracy panel measuring instrument of a kind of ultra-large type according to claim 1, it is characterised in that:The X-axis transmission Frame (5) includes X-axis synchronous belt (51), X-axis limited block (52) and lower lamp line wheel (53), and the X-axis synchronous belt (51) is socketed in down On lamp line wheel (53) and Z-axis transmission frame (8) is driven to be moved in the X-direction of workbench (1).
4. the high-accuracy panel measuring instrument of a kind of ultra-large type according to claim 1, it is characterised in that:The X-axis transmission Ink indicia (14) is additionally provided on frame (5), the ink indicia (14) is close to metallographic microscope (7).
5. the high-accuracy panel measuring instrument of a kind of ultra-large type according to claim 1, it is characterised in that:The X-axis transmission The both sides of frame (5) are equipped with crossbeam three-dimensional bracket (13), and the bottom of the crossbeam three-dimensional bracket (13) is arranged in Y-axis gear frame (6) It slides above and in the Y-axis of the workbench (1), the crossbeam three-dimensional bracket (13) is equipped with limit glue fixed block (11).
6. the high-accuracy panel measuring instrument of a kind of ultra-large type according to claim 2, it is characterised in that:The Z-axis transmission Frame (8) is equipped with horizontal camera lens (12), and the horizontal camera lens (12) is for observing two lateral sections.
CN201721827309.3U 2017-12-25 2017-12-25 A kind of high-accuracy panel measuring instrument of ultra-large type Active CN207851457U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201721827309.3U CN207851457U (en) 2017-12-25 2017-12-25 A kind of high-accuracy panel measuring instrument of ultra-large type

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201721827309.3U CN207851457U (en) 2017-12-25 2017-12-25 A kind of high-accuracy panel measuring instrument of ultra-large type

Publications (1)

Publication Number Publication Date
CN207851457U true CN207851457U (en) 2018-09-11

Family

ID=63422106

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201721827309.3U Active CN207851457U (en) 2017-12-25 2017-12-25 A kind of high-accuracy panel measuring instrument of ultra-large type

Country Status (1)

Country Link
CN (1) CN207851457U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108107612A (en) * 2017-12-25 2018-06-01 江苏才道精密仪器有限公司 A kind of high-accuracy panel measuring instrument of ultra-large type
CN113251959A (en) * 2021-07-08 2021-08-13 江苏才道精密仪器有限公司 Two-sided outward appearance synchronous detection device of U type work piece

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108107612A (en) * 2017-12-25 2018-06-01 江苏才道精密仪器有限公司 A kind of high-accuracy panel measuring instrument of ultra-large type
CN113251959A (en) * 2021-07-08 2021-08-13 江苏才道精密仪器有限公司 Two-sided outward appearance synchronous detection device of U type work piece

Similar Documents

Publication Publication Date Title
CN106767516B (en) Automatic optical white light scanner
CN203518947U (en) Optical measurement equipment
CN207851457U (en) A kind of high-accuracy panel measuring instrument of ultra-large type
CN104515487A (en) Two-in-one full-automatic three-Z-axis measuring instrument
CN101793496B (en) Precision video mapping analyzer
CN202648618U (en) Manual operated measuring instrument
CN104678889B (en) A kind of laser interference control method of grating mechanical scratching machine
CN106292196B (en) A kind of litho machine vibration damping frame
CN108107612A (en) A kind of high-accuracy panel measuring instrument of ultra-large type
CN202614184U (en) Ultrahigh-precision full-automatic image coordinate measuring machine
CN206058718U (en) Optical element coaxial adjustment experimental provision
CN102564303A (en) Measuring apparatus and measuring method
CN110595382A (en) 3D space vision curved surface measuring equipment and measured data processing method
CN105527019B (en) A kind of three coordinate four-degree-of-freedom diffraction intensity measuring tables
CN216595622U (en) Full-automatic horizontal counter shaft coupling device
CN108519050A (en) A kind of mechanical body of non-contact image measuring instrument
CN211954038U (en) Digital display grating ruler type hand-operated scribing machine for scribing cubic mirror
CN115900584A (en) Device for measuring skin profile tolerance
CN108534621A (en) A kind of glass linear scale self-checking device based on machine vision
CN204988178U (en) Image measuring apparatus
CN2879120Y (en) Image measuring instrument
CN204313790U (en) Long Distances manual image measuring instrument
CN208567789U (en) Combined type three-coordinates measuring machine
CN209086594U (en) A kind of FPC binding contraposition transfer device
CN219641209U (en) Imaging test tool for electronic equipment

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant