CN111007150B - Online ultrasonic imaging detection device - Google Patents
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- CN111007150B CN111007150B CN201911102907.8A CN201911102907A CN111007150B CN 111007150 B CN111007150 B CN 111007150B CN 201911102907 A CN201911102907 A CN 201911102907A CN 111007150 B CN111007150 B CN 111007150B
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- 238000012285 ultrasound imaging Methods 0.000 claims 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/04—Analysing solids
- G01N29/06—Visualisation of the interior, e.g. acoustic microscopy
- G01N29/0654—Imaging
- G01N29/069—Defect imaging, localisation and sizing using, e.g. time of flight diffraction [TOFD], synthetic aperture focusing technique [SAFT], Amplituden-Laufzeit-Ortskurven [ALOK] technique
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
Abstract
The application provides an online ultrasonic imaging detection device, which comprises: a detection table; the ultrasonic transducers are arranged on the detection table in a dispersing way and are used for simultaneously carrying out ultrasonic detection on a plurality of workpieces to be detected; the data acquisition circuit is provided with a plurality of data receiving channels, and the data receiving channels are used for simultaneously receiving ultrasonic echo signals output by the ultrasonic transducers. Through the arrangement, simultaneous detection of a plurality of electronic packaging devices in a single scanning process is realized, and ultrasonic echo signals output by each ultrasonic transducer are received at the same time, so that the efficiency of ultrasonic scanning imaging detection can be greatly improved, on-line batch detection of internal defects of the electronic packaging devices can be realized, and real-time data feedback is provided for adjustment of a packaging process and screening of quality of packaged products.
Description
Technical Field
The application relates to the technical field of ultrasonic detection, in particular to an online ultrasonic imaging detection device.
Background
In recent years, the development of numerous industries such as smart phones, internet of things, biomedical and intelligent automobiles promotes the continuous and rapid development of the chip industry. Packaging is an important measure for ensuring the stability of the performance of a chip, but is influenced by factors such as packaging materials, packaging technology and the like, and the chip is extremely easy to generate various microscopic defects such as layering, microcracks, cavities and the like in the packaging process. Along with the change of environmental temperature and humidity in the use process of the chip and the thermal and electromagnetic effects of the electronic packaging device, the defects can be continuously expanded and evolved, so that the packaging chip has various failure modes such as thermal fatigue fracture of welding spots, lead fracture, silicon chip crack, packaging burst and the like. Detecting microscopic defects in the packaged chip has important significance for guaranteeing the quality and performance of electronic products, improving the electronic packaging technology and further improving the packaging yield.
At present, nondestructive detection methods for detecting defects inside a packaged chip mainly comprise infrared thermal imaging, X-ray transmission detection, fault X-ray detection and high-frequency ultrasonic imaging detection. The high-frequency ultrasonic imaging detection has the advantages of high imaging resolution, large penetration depth, low detection cost, high defect detection sensitivity and the like, and is widely applied to the field of semiconductor industry. However, high-frequency ultrasonic detection apparatuses represented by ultrasonic scanning microscopes at home and abroad can be used only in an off-line condition. The main reason is that: the mechanical scanning speed of the single-base high-frequency ultrasonic transducer is limited, and the requirement of on-line detection on the speed is difficult to meet. With the improvement of the automation degree of equipment and the application of artificial intelligence technology, the detection efficiency is a main factor limiting the application of high-frequency ultrasonic imaging on-line detection.
Therefore, how to improve the ultrasonic microscopic detection efficiency, so that the on-line batch detection of the electronic packaging device is a problem to be solved at present.
Disclosure of Invention
The application provides an online ultrasonic imaging detection device, which is characterized in that a plurality of ultrasonic transducers are arranged on a detection table, a plurality of data receiving channels are utilized for simultaneously receiving ultrasonic echo signals output by the ultrasonic transducers, so that simultaneous detection of electronic packaging devices can be completed in a single scanning process, the efficiency of ultrasonic scanning imaging detection is improved in multiple, and online batch detection of internal defects of packaging chips is realized.
In order to solve the technical problems, the application adopts another technical scheme that: there is provided an on-line ultrasonic imaging detection apparatus comprising: a detection table; the ultrasonic transducers are arranged on the detection table in a dispersing way and are used for simultaneously carrying out ultrasonic detection on a plurality of workpieces to be detected; the data acquisition circuit is provided with a plurality of data receiving channels, and the data receiving channels are used for simultaneously receiving ultrasonic echo signals output by the ultrasonic transducers.
Further, the online ultrasonic imaging detection device comprises a position adjustment mechanism, the position adjustment mechanism comprises a power source and a vertically arranged lifting component, the bottom end of the lifting component is connected with the detection table, the power source is used for driving the lifting component to lift and adjust the distance between the ultrasonic transducer and the workpiece to be detected, so that ultrasonic output by the ultrasonic transducer is focused inside the workpiece to be detected.
Further, the position adjusting mechanism further comprises a moving base, the moving base is perpendicular to the lifting component and comprises a first base and a second base perpendicular to the first base, the second base is in sliding connection with the first base, and the top end of the lifting component is in sliding connection with the second base.
Further, the online ultrasonic imaging detection device further comprises a tray, wherein the tray comprises a tray body and a plurality of bearing units which are arranged on the tray body in a dispersing manner in the same arrangement manner as the ultrasonic transducers, and the bearing units are used for fixing the workpiece to be detected.
Further, the on-line ultrasonic imaging detection device further comprises a water tank for containing acoustic medium liquid, and the water tank is located below the detection table.
Further, the on-line ultrasonic imaging detection device also comprises a first traction groove arranged at the inlet end of the water tank and a second traction groove arranged at the outlet end of the water tank, the first traction groove, the water tank and the second traction groove together form a sliding support seat, a first sliding piece is arranged on the inner wall of the sliding support seat,
the tray further comprises a plurality of second sliding parts which are respectively arranged on two sides of the tray body, and the second sliding parts are in sliding fit with the first sliding parts.
Further, the inlet end and the outlet end are respectively provided with a grating encoder.
Further, the online ultrasonic imaging detection device further comprises a shockproof table arranged on the outer side of the groove wall of the water groove.
Further, the on-line ultrasonic imaging detection device further comprises a dust cover arranged on the water tank and used for covering the detection table and the water tank.
Further, the on-line ultrasonic imaging detection device further comprises a monitoring device, wherein the monitoring device is arranged at the corner in the dust cover and is used for monitoring the scanning of the ultrasonic transducer and the position of the tray.
Further, the monitoring device comprises an industrial camera and a laser range finder or an industrial camera and 3D structured light.
The beneficial effects of the application are as follows: the application provides an on-line ultrasonic imaging detection device, which comprises: a detection table; the ultrasonic transducers are arranged on the detection table in a dispersing way and are used for simultaneously carrying out ultrasonic detection on a plurality of workpieces to be detected; the data acquisition circuit is provided with a plurality of data receiving channels, and the data receiving channels are used for simultaneously receiving ultrasonic echo signals output by the ultrasonic transducers. Through the arrangement, simultaneous detection of a plurality of electronic packaging devices in a single scanning process is realized, and ultrasonic echo signals output by each ultrasonic transducer are received at the same time, so that the efficiency of ultrasonic scanning imaging detection can be greatly improved, on-line batch detection of internal defects of the electronic packaging devices can be realized, and real-time data feedback is provided for adjustment of a packaging process and screening of quality of packaged products.
Drawings
FIG. 1 is a schematic diagram of an on-line ultrasonic imaging detection apparatus according to a first embodiment of the present application;
FIG. 2 is a schematic diagram of an on-line ultrasonic imaging detection apparatus according to a second embodiment of the present application;
FIG. 3 is a schematic view of a tray structure in an in-line ultrasonic imaging detection apparatus according to a second embodiment of the present application;
FIG. 4 is a schematic structural view of an in-line ultrasonic imaging inspection apparatus with first and second traction grooves in a second embodiment of the present application;
fig. 5 is a schematic structural view of an on-line ultrasonic imaging detection apparatus with a dust cover in a second embodiment of the present application.
Detailed Description
The following description of the embodiments of the present application will be made clearly and fully with reference to the accompanying drawings, in which it is evident that the embodiments described are only some, but not all embodiments of the application. All other embodiments, which can be made by those skilled in the art based on the embodiments of the application without making any inventive effort, are intended to be within the scope of the application.
The terms "first," "second," "third," and the like in this disclosure are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first", "a second", and "a third" may explicitly or implicitly include at least one such feature. In the description of the present application, the meaning of "plurality" means at least two, for example, two, three, etc., unless specifically defined otherwise. All directional indications (such as up, down, left, right, front, back … …) in embodiments of the present application are merely used to explain the relative positional relationship, movement, etc. between the components in a particular gesture (as shown in the drawings), and if the particular gesture changes, the directional indication changes accordingly. Furthermore, the terms "comprise" and "have," as well as any variations thereof, are intended to cover a non-exclusive inclusion. For example, a process, method, system, article, or apparatus that comprises a list of steps or elements is not limited to only those listed steps or elements but may include other steps or elements not listed or inherent to such process, method, article, or apparatus.
Reference herein to "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment may be included in at least one embodiment of the application. The appearances of such phrases in various places in the specification are not necessarily all referring to the same embodiment, nor are separate or alternative embodiments mutually exclusive of other embodiments. Those of skill in the art will explicitly and implicitly appreciate that the embodiments described herein may be combined with other embodiments.
Referring to fig. 1, an on-line ultrasonic imaging detection apparatus according to a first embodiment of the present application includes: the device comprises a detection mechanism 300 and a collection mechanism 400, wherein the detection mechanism 300 comprises a detection table 320 and a plurality of ultrasonic transducers 330, the ultrasonic transducers 330 are arranged on the detection table 320 in a dispersing way, and the ultrasonic transducers 330 are used for simultaneously carrying out ultrasonic detection on a plurality of workpieces to be detected; the acquisition mechanism 400 includes a data acquisition circuit having a plurality of data receiving channels for simultaneously receiving ultrasonic echo signals output by a plurality of ultrasonic transducers 330.
Further, the detecting mechanism 300 further includes a position adjusting mechanism 310, the position adjusting mechanism 310 includes a power source (not shown) and a vertically arranged lifting member 313, the bottom end of the lifting member 313 is connected to the detecting table 320, the power source is used for driving the lifting member 313 to lift, and adjusting the distance between the ultrasonic transducer 330 and the workpiece to be detected, so that the ultrasonic output by the ultrasonic transducer 330 is focused inside the workpiece to be detected, specifically, the lifting member 313 may be a telescopic rod, or may be other structural combinations commonly used for lifting.
On the basis of the first embodiment, the application also provides an online ultrasonic imaging detection device of the second embodiment, and referring to fig. 2, fig. 2 shows a schematic structural diagram of the online ultrasonic imaging detection device of the second embodiment of the application. The on-line ultrasonic imaging detection device comprises: the water tank 100, the tray 200 detachably arranged in the water tank 100, the detection mechanism 300 arranged above the water tank 100 and the acquisition mechanism 400 in communication connection with the detection mechanism 300.
Wherein the water tank 100 comprises a horizontal bottom surface and two first tank walls 110 arranged oppositely. The tray 200 (see fig. 3 for specific structure) includes a tray body 210 and a plurality of carrying units 220 arranged on the tray body 210 in an array manner, and the carrying units 220 may fixedly mount electronic packages to be inspected. The detection mechanism 300 (reference numeral see fig. 4) includes: a position adjusting mechanism 310 provided on the first groove wall 110, a detection stage 320 provided on the position adjusting mechanism 310, and a plurality of ultrasonic transducers 330 provided on the detection stage 320 in the same array manner as the plurality of carrying units 220, the ultrasonic transducers 330 being high-frequency ultrasonic focusing transducers; the acquisition mechanism 400 is in communication connection with the ultrasonic transducer 330 and the position adjustment mechanism 310, and the acquisition mechanism 400 comprises a multi-channel data acquisition card, and channels of the multi-channel data acquisition card are in one-to-one correspondence with the ultrasonic transducer 330.
The specific structure of the position adjustment mechanism 310 includes: the device comprises two first bases 311 respectively arranged at the top ends of two first groove walls 110, a second base 312 slidably connected with the two first bases 311, a lifting component 313 slidably connected with the second base 312, and a power source (not shown). The first base 311 is provided with a first slide 3111 extending along a first direction (X direction in the drawing), and the two first slides 3111 are disposed opposite to each other; a second slideway 3121 extending in a second direction (illustrated as a Y direction) is provided within the second base 312, the Y direction being perpendicular to the X direction; the fixed end 3131 of the lifting member 313 is slidably connected to the second slide 3121, and the bottom end 3132 is connected to the detection platform 320, so as to drive the detection platform 320 to move in a third direction (Z direction in the drawing), where the Z direction is perpendicular to both the Y direction and the X direction. The detection platform 320 of the position adjusting mechanism 310 drives the lifting component 313 to lift by a power source so as to realize movement in the Z direction, and the ultrasonic transducer 330 on the detection platform 320 is realized to move in the Z direction; the fixed end 3131 of the lifting component 313 is connected with the second slideway 3121 in the second base 312 in a sliding way, and the power source drives the lifting component 313 to move on the second base 312 and drives the ultrasonic transducer 330 on the detection platform 320 to move in the Y direction; the power source drives the second base 312 to move between the two first slide ways 3111 in the two first bases 311, so as to realize movement of the second base 312 in the X direction, and drives the lifting member 313 connected to the second base 312 to move in the X direction, so as to realize movement of the ultrasonic transducer 330 on the detection stage 320 in the X direction. The position adjusting mechanism 310 is used for driving the detecting stage 320 to move in three dimensions (X, Y and Z direction in the drawing) so as to scan the electronic package (e.g. chip) placed on the carrier unit 220 by the ultrasonic transducer 330.
The specific detection flow is as follows:
first, a work to be inspected (electronic package device) is mounted: the workpiece to be inspected takes a chip as an example, the chip is fixedly installed in the bearing unit 220 on the tray 200, and a chip array for inspection is formed on the tray 200;
next, the mounting tray 200: placing the tray 200 in the acoustic medium water of the water tank 100, adjusting the tray 200 so that the chip array is aligned with the ultrasonic transducer array above the water tank 100, immersing the chip array on the tray 200 in the water, and keeping the tray 210 parallel and fixed with the horizontal plane; then, the ultrasonic transducer 330 is adjusted: firstly, the displacement of the detection stage 320 in the X and Y directions is adjusted so that the ultrasonic transducer 330 is adjusted to the initial scanning point of the chip (which can be set manually, preferably one end point of the chip), and then the displacement of the detection stage 320 in the Z direction is adjusted so that the ultrasonic transducer 330 is focused to the detection position inside the chip;
finally, scanning detection: starting from the initial scanning point (for example, set to coordinates (0, 0)) and scanning the chips in the X-0 direction along the Y direction, fine-tuning the displacement in the X direction (for example, X=1), continuing to scan the chips in the X-1 direction, and so on until the whole chip is scanned. The position adjusting mechanism 310 can realize the scanning of the ultrasonic transducer 330 on the chip by adjusting the displacement in the X and Y directions, and the scanning is automated by presetting uniform scanning speed, preset first scanning time in the Y direction and preset second scanning time in the X direction because the specifications of the workpieces to be detected on the tray are consistent, and each channel of the multi-channel data acquisition card of the acquisition mechanism 400 receives the signal of a corresponding ultrasonic transducer 330 in the scanning process.
According to the online ultrasonic imaging detection device provided by the embodiment of the application, the position fixing and the height unification of the workpiece (electronic packaging device) to be detected are realized by arranging the bearing units 220 arranged in an array in the tray 200, so that the adjustment of the height of an ultrasonic transducer is avoided in the detection process, and the influence of parameter adjustment on the detection efficiency is avoided; secondly, aiming at the characteristics of small size and limited scanning range of a workpiece (electronic packaging device) to be detected, an ultrasonic transducer 330 array which corresponds to the workpiece (electronic packaging device) array to be detected one by one is arranged, so that simultaneous detection of a plurality of chips in a single scanning process is realized, and through a multi-channel data acquisition card, each channel corresponds to one ultrasonic transducer 330, simultaneous receiving of ultrasonic echo signals output by each ultrasonic transducer 330 is realized, and therefore detection efficiency is doubled. Through the arrangement, the ultrasonic scanning imaging detection efficiency is greatly improved, the on-line batch detection of the internal defects of the workpiece to be detected (electronic packaging device) can be realized, and real-time data feedback is provided for adjustment of the packaging process and screening of the quality of the packaged products.
Specifically, on the basis of the above, in order to solve the problems that the degree of automation and intelligence of the ultrasonic detection device is not high, the adjustment of the detection parameters needs to be completed manually by an operator, and errors are caused by the detection results determined by manual experience, the following embodiments are also provided.
Referring to fig. 4 and 5, the water tank 100 includes an inlet end a and an outlet end B disposed opposite to each other, wherein the inlet end a and the outlet end B are respectively provided with a first traction groove 500 and a second traction groove 600, and the first traction groove 500, the water tank 100 and the second traction groove 600 together form a sliding support seat with a sliding rail therein. The first traction groove 500 includes two opposite second groove walls 510, and the second groove walls 510 are respectively provided with opposite second sliding grooves 511; the second traction groove 600 comprises two opposite third groove walls 610, and the third groove walls 610 are respectively provided with opposite third sliding grooves 611; the second runner 511, the first runner 111 and the third runner 611 form a coherent slide rail. The tray 200 (see fig. 2 in detail) further includes a plurality of sliders 230 disposed at both sides of the tray body 210, and the sliders 230 are slidably engaged with the slide rails. The tray 200 slides on the rails, and the tray 200 may be made of a flexible material for continuous sliding at the joints.
Specifically, the tray 200 slides on the sliding rail under the action of traction force, passes through the first traction groove 500, enters the water tank 100 through the inlet end a, stops fixing the position of the alignment detection table 320 positioned in the water tank 100, adjusts the position adjusting mechanism 310 to enable the ultrasonic transducer 330 to be adjusted to the scanning starting point of the electronic packaging device, starts scanning after focusing, and when the scanning is completed, the tray 200 is pulled out from the outlet end B of the water tank under the action of traction force, passes through the second traction groove 600, enters the drying program, and enters the subsequent link after quick drying. In order to realize the automatic detection of the on-line ultrasonic imaging detection device, the error caused by manual operation is reduced, a plurality of trays 200 which are arranged at the same interval and are connected with each other are also arranged on the slide rail, the workpiece to be detected (electronic packaging device) on each tray 200 is scanned in the same time, and the next tray 200 is scanned at the same interval, so that the automation of sample detection can be realized. The number of trays 200 and the number of array elements of the ultrasound transducer array can be extended to any number. Each tray 200 and each electronic package device respectively correspond to a tray number and an electronic package device number, and when abnormality exists in scanning, the tray number and the electronic package device number are recorded, so that abnormal electronic package devices can be conveniently screened out later.
Further, the acquisition mechanism 400 according to the embodiment of the present application further includes a signal amplifier (not shown), through which the signal acquired by the ultrasonic transducer 330 is amplified. One end of the signal amplifier is connected with the multichannel data acquisition card, and the other end of the signal amplifier is in communication connection with the ultrasonic transducer 330.
Further, referring to fig. 1, the on-line ultrasonic imaging detection apparatus according to the embodiment of the present application further includes a vibration-proof table 700, where the vibration-proof table 700 is made of marble and is disposed outside the first groove wall 110, so as to ensure that the horizontal plane in the water tank 100 is not disturbed by the outside to generate fluctuation.
Further, referring to fig. 1, the on-line ultrasonic imaging detection apparatus according to the embodiment of the present application further includes a grating encoder 800 disposed at the inlet end a and the outlet end B, respectively. By the arrangement of the grating encoder 800, it is possible to detect whether the tray 200 enters the tub 100, to ensure that the tray 200 to be detected moves to the center of the tub 100 to be aligned with the detecting stage 320 provided above the tub 100.
Further, referring to fig. 1 and 5, a monitoring device 900 is disposed above the water tank 100 according to the embodiment of the present application, and the monitoring device 900 is disposed at the inlet end a and the outlet end B. The monitoring device 900 includes an industrial camera and a laser range finder or an industrial camera and 3D structured light, and is used for monitoring the movement of the tray and the height of the ultrasonic transducer 330 relative to the tray from different angles in real time, so as to avoid damaging the ultrasonic transducer 330 in the scanning process.
Further, referring to fig. 5, the on-line ultrasonic imaging detection device of the embodiment of the present application further includes a dust cover C, where the dust cover C includes a space for accommodating the water tank 100, and covers the water tank 100 and the detection table 320, so as to prevent the water tank 100 and the detection table 320 from being affected by dust and affecting the detection result. The dust cover C may be transparent, and the monitoring device 900 is disposed at four corners D in the dust cover C.
The foregoing is only the embodiments of the present application, and therefore, the patent scope of the application is not limited thereto, and all equivalent structures or equivalent processes using the descriptions of the present application and the accompanying drawings, or direct or indirect application in other related technical fields, are included in the scope of the application.
Claims (4)
1. An on-line ultrasound imaging detection apparatus, comprising:
a detection table;
the ultrasonic transducers are arranged on the detection table in a dispersing way and are used for simultaneously carrying out ultrasonic detection on a plurality of workpieces to be detected;
the data acquisition circuit is provided with a plurality of data receiving channels, and the data receiving channels are used for simultaneously receiving ultrasonic echo signals output by the ultrasonic transducers;
the signal amplifier amplifies the signal acquired by the ultrasonic transducer;
the tray comprises a tray body and a plurality of bearing units which are arranged on the tray body in a dispersing manner in the same arrangement manner as the ultrasonic transducers, and the bearing units are used for fixing the workpieces to be detected;
a water tank for containing an acoustic medium liquid, the water tank being located below the detection stage;
the first traction groove, the water tank and the second traction groove are arranged at the inlet end of the water tank, the grating encoders are respectively arranged at the inlet end and the outlet end of the water tank, a sliding support seat is formed by the first traction groove, the water tank and the second traction groove together, a first sliding piece is arranged on the inner wall of the sliding support seat, the tray further comprises a plurality of second sliding pieces respectively arranged at two sides of the tray body, and the second sliding pieces are in sliding fit with the first sliding pieces;
the dust cover is arranged on the water tank and used for covering the detection table and the water tank;
the monitoring device is arranged at the corner in the dust cover and used for monitoring the scanning of the ultrasonic transducer and the position of the tray, and comprises an industrial camera and 3D structured light and is used for detecting the movement of the tray and the height of the ultrasonic transducer relative to the tray in real time from different angles;
the tray slides on the sliding rail under the action of traction force, passes through the first traction groove, enters the water tank through the inlet end, starts scanning in the water tank, is pulled out from the outlet end under the action of traction force after the scanning is completed, and passes through the second traction groove, and starts drying.
2. The on-line ultrasonic imaging detection apparatus of claim 1, wherein,
the on-line ultrasonic imaging detection device comprises a position adjusting mechanism, the position adjusting mechanism comprises a power source and a vertically arranged lifting component, the bottom end of the lifting component is connected with the detection table, the power source is used for driving the lifting component to lift and adjust the distance between the ultrasonic transducer and the workpiece to be detected, so that ultrasonic output by the ultrasonic transducer is focused inside the workpiece to be detected.
3. The on-line ultrasonic imaging detection apparatus of claim 2, wherein,
the position adjusting mechanism further comprises a moving base, wherein the moving base is perpendicular to the lifting component and comprises a first base and a second base perpendicular to the first base, the second base is in sliding connection with the first base, and the top end of the lifting component is in sliding connection with the second base.
4. The on-line ultrasonic imaging detection apparatus of claim 1, further comprising a vibration isolation table disposed outside a wall of the water tank.
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| CN201911102907.8A CN111007150B (en) | 2019-11-12 | 2019-11-12 | Online ultrasonic imaging detection device |
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| CN111665295A (en) * | 2020-05-28 | 2020-09-15 | 深圳第三代半导体研究院 | Solid material and semiconductor device internal defect detection method |
| CN112666256B (en) * | 2020-12-18 | 2022-12-23 | 嘉禾县宏盛制造有限公司 | Workpiece online scanning system and use method thereof |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05232093A (en) * | 1992-02-20 | 1993-09-07 | Hitachi Ltd | Ultrasonic wave inspection device |
| CN1221112A (en) * | 1997-12-26 | 1999-06-30 | 三星电子株式会社 | Test and burn-in apparatus in-line system using apparatus, and test method using the system |
| CN102279224A (en) * | 2011-03-08 | 2011-12-14 | 中国航空工业集团公司北京航空制造工程研究所 | Adaptive ultrasonic tracking and scanning array transducer |
| CN102411032A (en) * | 2011-07-18 | 2012-04-11 | 中国航空工业集团公司北京航空制造工程研究所 | Industrial scale ultrasonic automatic scanning and imaging detection device |
| CN103018339A (en) * | 2011-09-22 | 2013-04-03 | 北京理工大学 | High-speed high-precision ultrasonic microscopic scanning device |
| CN105203637A (en) * | 2015-09-24 | 2015-12-30 | 南昌航空大学 | Ultrasound feature imaging detecting device for detecting stirring friction weld detect of airplane oil tank |
-
2019
- 2019-11-12 CN CN201911102907.8A patent/CN111007150B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05232093A (en) * | 1992-02-20 | 1993-09-07 | Hitachi Ltd | Ultrasonic wave inspection device |
| CN1221112A (en) * | 1997-12-26 | 1999-06-30 | 三星电子株式会社 | Test and burn-in apparatus in-line system using apparatus, and test method using the system |
| CN102279224A (en) * | 2011-03-08 | 2011-12-14 | 中国航空工业集团公司北京航空制造工程研究所 | Adaptive ultrasonic tracking and scanning array transducer |
| CN102411032A (en) * | 2011-07-18 | 2012-04-11 | 中国航空工业集团公司北京航空制造工程研究所 | Industrial scale ultrasonic automatic scanning and imaging detection device |
| CN103018339A (en) * | 2011-09-22 | 2013-04-03 | 北京理工大学 | High-speed high-precision ultrasonic microscopic scanning device |
| CN105203637A (en) * | 2015-09-24 | 2015-12-30 | 南昌航空大学 | Ultrasound feature imaging detecting device for detecting stirring friction weld detect of airplane oil tank |
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