CN111007150A - Online ultrasonic imaging detection device - Google Patents
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- CN111007150A CN111007150A CN201911102907.8A CN201911102907A CN111007150A CN 111007150 A CN111007150 A CN 111007150A CN 201911102907 A CN201911102907 A CN 201911102907A CN 111007150 A CN111007150 A CN 111007150A
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- G01N29/0654—Imaging
- G01N29/069—Defect imaging, localisation and sizing using, e.g. time of flight diffraction [TOFD], synthetic aperture focusing technique [SAFT], Amplituden-Laufzeit-Ortskurven [ALOK] technique
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
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Abstract
The invention provides an online ultrasonic imaging detection device, which comprises: a detection table; the ultrasonic transducers are dispersedly arranged on the detection table and are used for simultaneously carrying out ultrasonic detection on a plurality of workpieces to be detected; and the data acquisition circuit is provided with a plurality of data receiving channels, and the data receiving channels are used for simultaneously receiving the ultrasonic echo signals output by the ultrasonic transducers. Through the arrangement, simultaneous detection of a plurality of electronic packaging devices in a single scanning process is realized, and ultrasonic echo signals output by each ultrasonic transducer are received simultaneously, so that the efficiency of ultrasonic scanning imaging detection can be greatly improved, online batch detection of internal defects of the electronic packaging devices can be realized, and real-time data feedback is provided for adjustment of packaging processes and screening of packaging product quality.
Description
Technical Field
The application relates to the technical field of ultrasonic detection, in particular to an online ultrasonic imaging detection device.
Background
In recent years, the development of smart phones, internet of things, biomedical treatment, smart automobiles and other industries promotes the continuous and rapid development of the chip industry. Packaging is an important measure for ensuring the stable performance of the chip, but is influenced by factors such as packaging materials and packaging processes, and the chip is very easy to generate various microscopic defects such as layering, microcracks, cavities and the like in the packaging process. With the change of the environmental temperature and humidity in the use process of the chip and the thermal and electromagnetic effects of the electronic packaging device, the defects can be continuously expanded and evolved, so that the packaged chip has various failure modes such as welding spot thermal fatigue fracture, lead fracture, silicon chip crack, packaging burst and the like. The method for detecting the internal microscopic defects of the packaged chip has important significance for ensuring the quality and performance of electronic products, improving the electronic packaging process and further improving the packaging yield.
At present, the nondestructive detection method for detecting the internal defects of the packaged chip mainly comprises infrared thermal imaging, X-ray transmission detection, fault X-ray detection and high-frequency ultrasonic imaging detection. The high-frequency ultrasonic imaging detection has the advantages of high imaging resolution, large penetration depth, low detection cost, high defect detection sensitivity and the like, and is widely applied to the field of semiconductor industry. However, high-frequency ultrasonic inspection equipment represented by an ultrasonic scanning microscope at home and abroad can be used only under an off-line condition. The main reasons for this are: the mechanical scanning speed of the single-base high-frequency ultrasonic transducer is limited, and the requirement of online detection on the speed is difficult to meet. With the improvement of the automation degree of the equipment and the application of the artificial intelligence technology, the detection efficiency is a main factor for limiting the application of the high-frequency ultrasonic imaging online detection.
Therefore, how to improve the efficiency of ultrasonic microscopic detection so as to realize online batch detection on the inside of the electronic packaging device is a problem to be solved at present.
Disclosure of Invention
The application provides an online ultrasonic imaging detection device, through set up a plurality of ultrasonic transducers on examining test table, utilize a plurality of data receiving channel to be used for receiving simultaneously the supersound echo signal of a plurality of ultrasonic transducer outputs can accomplish each electronic packaging device's simultaneous detection at single scanning in-process, improves the efficiency that ultrasonic scanning formation of image detected at double, realizes the online batch detection of encapsulation chip internal defect.
In order to solve the above technical problem, another technical solution adopted by the present application is: provided is an online ultrasonic imaging detection device, comprising: a detection table; the ultrasonic transducers are dispersedly arranged on the detection table and are used for simultaneously carrying out ultrasonic detection on a plurality of workpieces to be detected; and the data acquisition circuit is provided with a plurality of data receiving channels, and the data receiving channels are used for simultaneously receiving the ultrasonic echo signals output by the ultrasonic transducers.
Furthermore, the online ultrasonic imaging detection device comprises a position adjusting mechanism, the position adjusting mechanism comprises a power source and a vertically arranged lifting component, the bottom end of the lifting component is connected with the detection table, the power source is used for driving the lifting component to lift, and the distance between the ultrasonic transducer and the workpiece to be detected is adjusted, so that the ultrasonic output by the ultrasonic transducer is focused inside the workpiece to be detected.
Furthermore, the position adjusting mechanism further comprises a movable base, the movable base is perpendicular to the lifting component and comprises a first base and a second base perpendicular to the first base, the second base is in sliding connection with the first base, and the top end of the lifting component is in sliding connection with the second base.
Furthermore, the online ultrasonic imaging detection device further comprises a tray, the tray comprises a tray body and a plurality of bearing units which are dispersedly arranged on the tray body in the same arrangement mode as the plurality of ultrasonic transducers, and the bearing units are used for fixing the workpiece to be detected.
Furthermore, the online ultrasonic imaging detection device also comprises a water tank for containing the acoustic medium liquid, and the water tank is positioned below the detection platform.
Furthermore, the online ultrasonic imaging detection device also comprises a first traction groove arranged at the inlet end of the water tank and a second traction groove arranged at the outlet end of the water tank, the first traction groove, the water tank and the second traction groove together form a sliding support seat, a first sliding part is arranged on the inner wall of the sliding support seat,
the tray further comprises a plurality of second sliding parts which are arranged on two sides of the tray body respectively, and the second sliding parts are in sliding fit with the first sliding parts.
Further, the inlet end and the outlet end are respectively provided with a grating encoder.
Furthermore, the online ultrasonic imaging detection device also comprises a shockproof table arranged on the outer side of the wall of the water tank.
Furthermore, the online ultrasonic imaging detection device also comprises a dust cover arranged on the water tank and used for covering the detection platform and the water tank.
Furthermore, the online ultrasonic imaging detection device further comprises a monitoring device, wherein the monitoring device is arranged at a corner in the dust cover and used for monitoring the scanning of the ultrasonic transducer and the position of the tray.
Further, the monitoring device comprises an industrial camera and a laser range finder or an industrial camera and a 3D structured light.
The beneficial effect of this application is: the invention provides an online ultrasonic imaging detection device, which comprises: a detection table; the ultrasonic transducers are dispersedly arranged on the detection table and are used for simultaneously carrying out ultrasonic detection on a plurality of workpieces to be detected; and the data acquisition circuit is provided with a plurality of data receiving channels, and the data receiving channels are used for simultaneously receiving the ultrasonic echo signals output by the ultrasonic transducers. Through the arrangement, simultaneous detection of a plurality of electronic packaging devices in a single scanning process is realized, and ultrasonic echo signals output by each ultrasonic transducer are received simultaneously, so that the efficiency of ultrasonic scanning imaging detection can be greatly improved, online batch detection of internal defects of the electronic packaging devices can be realized, and real-time data feedback is provided for adjustment of packaging processes and screening of packaging product quality.
Drawings
FIG. 1 is a schematic structural diagram of an online ultrasonic imaging detection device according to a first embodiment of the invention;
FIG. 2 is a schematic structural diagram of an online ultrasonic imaging detection device according to a second embodiment of the invention;
FIG. 3 is a schematic structural diagram of a tray in an online ultrasonic imaging detection device according to a second embodiment of the invention;
FIG. 4 is a schematic structural diagram of an on-line ultrasonic imaging inspection device with first and second traction grooves according to a second embodiment of the present invention;
fig. 5 is a schematic structural diagram of an online ultrasonic imaging detection device with a dust cover in a second embodiment of the invention.
Detailed Description
The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
The terms "first", "second" and "third" in this application are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implying any indication of the number of technical features indicated. Thus, a feature defined as "first," "second," or "third" may explicitly or implicitly include at least one of the feature. In the description of the present application, "plurality" means at least two, e.g., two, three, etc., unless explicitly specifically limited otherwise. All directional indications (such as up, down, left, right, front, and rear … …) in the embodiments of the present application are only used to explain the relative positional relationship between the components, the movement, and the like in a specific posture (as shown in the drawings), and if the specific posture is changed, the directional indication is changed accordingly. Furthermore, the terms "include" and "have," as well as any variations thereof, are intended to cover non-exclusive inclusions. For example, a process, method, system, article, or apparatus that comprises a list of steps or elements is not limited to only those steps or elements listed, but may alternatively include other steps or elements not listed, or inherent to such process, method, article, or apparatus.
Reference herein to "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment can be included in at least one embodiment of the application. The appearances of the phrase in various places in the specification are not necessarily all referring to the same embodiment, nor are separate or alternative embodiments mutually exclusive of other embodiments. It is explicitly and implicitly understood by one skilled in the art that the embodiments described herein can be combined with other embodiments.
Referring to fig. 1, an on-line ultrasonic imaging detection apparatus according to a first embodiment of the present invention includes: the detection mechanism 300 comprises a detection table 320 and a plurality of ultrasonic transducers 330, wherein the detection mechanism 300 comprises the detection table 320 and the plurality of ultrasonic transducers 330, the plurality of ultrasonic transducers 330 are dispersedly arranged on the detection table 320, and the plurality of ultrasonic transducers 330 are used for simultaneously carrying out ultrasonic detection on a plurality of workpieces to be detected; the acquisition mechanism 400 includes a data acquisition circuit having a number of data receiving channels for simultaneously receiving ultrasound echo signals output by a number of ultrasound transducers 330.
Further, the detection mechanism 300 further includes a position adjustment mechanism 310, the position adjustment mechanism 310 includes a power source (not shown) and a vertically disposed lifting component 313, the bottom end of the lifting component 313 is connected to the detection table 320, the power source is used for driving the lifting component 313 to lift and lower, and a distance between the ultrasonic transducer 330 and the workpiece to be detected is adjusted, so that the ultrasound output by the ultrasonic transducer 330 is focused inside the workpiece to be detected, specifically, the lifting component 313 may be a telescopic rod, and may also be other structural combinations commonly used for lifting.
On the basis of the first embodiment, the present invention further provides an online ultrasonic imaging detection apparatus of a second embodiment, please refer to fig. 2, and fig. 2 shows a schematic structural diagram of the online ultrasonic imaging detection apparatus of the second embodiment of the present invention. This online ultrasonic imaging detection device includes: the water tank 100, the tray 200 detachably arranged in the water tank 100, the detection mechanism 300 arranged above the water tank 100 and the collection mechanism 400 in communication connection with the detection mechanism 300.
Wherein the sink 100 includes a horizontal bottom surface and two first sink walls 110 disposed opposite each other. The tray 200 (see fig. 3 for specific structure) includes a tray body 210 and a plurality of bearing units 220 arranged on the tray body 210 in an array manner, and the bearing units 220 can fixedly mount electronic packaging devices to be tested. The detection mechanism 300 (reference numeral refer to fig. 4) includes: a position adjusting mechanism 310 disposed on the first tank wall 110, a detection table 320 disposed on the position adjusting mechanism 310, and a plurality of ultrasonic transducers 330 disposed on the detection table 320 in the same array manner as the plurality of carrying units 220, the ultrasonic transducers 330 being high-frequency ultrasonic focusing transducers; the acquisition mechanism 400 is in communication connection with the ultrasonic transducer 330 and the position adjustment mechanism 310, and the acquisition mechanism 400 comprises a multi-channel data acquisition card, and channels of the multi-channel data acquisition card correspond to the ultrasonic transducer 330 one by one.
The specific structure of the position adjustment mechanism 310 includes: two first bases 311 respectively disposed at the top ends of the two first groove walls 110, a second base 312 slidably connected to the two first bases 311, a lifting member 313 slidably connected to the second base 312, and a power source (not shown). The first base 311 is provided with a first slide 3111 extending along a first direction (shown as an X direction), and the two first slides 3111 are disposed opposite to each other; a second slide 3121 extending along a second direction (shown as a Y direction) is disposed in the second base 312, and the Y direction is perpendicular to the X direction; the fixed end 3131 of the lifting member 313 is slidably connected to the second sliding way 3121, and the bottom end 3132 is connected to the testing table 320, so as to drive the testing table 320 to move in a third direction (shown as Z direction), which is perpendicular to both the Y direction and the X direction. The detection table 320 of the position adjusting mechanism 310 drives the lifting part 313 to lift through the power source to realize the movement in the Z direction, and the ultrasonic transducer 330 on the detection table 320 moves in the Z direction; a fixed end 3131 of the lifting member 313 is connected to the second sliding way 3121 in the second base 312 in a sliding manner, and the power source drives the lifting member 313 to move on the second base 312, so as to drive the ultrasonic transducer 330 on the detection table 320 to move in the Y direction; the power source drives the second base 312 to move between the two first sliding ways 3111 in the two first bases 311, so that the second base 312 moves in the X direction, and drives the lifting component 313 connected with the second base 312 to move in the X direction, thereby moving the ultrasonic transducer 330 on the detection table 320 in the X direction. The position adjustment mechanism 310 is used to move the inspection stage 320 in three dimensions (X, Y and Z direction shown) to scan the electronic package device (e.g. chip) placed on the carrying unit 220 by the ultrasonic transducer 330.
The specific detection process is as follows:
first, a workpiece to be inspected (electronic package device) is mounted: taking a chip as an example, the workpiece to be detected is to fixedly mount the chip in the bearing unit 220 on the tray 200, and a chip array for detection is formed on the tray 200;
next, the mounting tray 200: placing the tray 200 in the acoustic medium water of the water tank 100, adjusting the tray 200 to make the chip array align with the ultrasonic transducer array above the water tank 100, and immersing the chip array on the tray 200 in the water, keeping the tray body 210 parallel to the horizontal plane and fixed; then, the ultrasonic transducer 330 is adjusted: firstly, adjusting the displacements in the X and Y directions of the inspection table 320 to adjust the ultrasonic transducer 330 to the initial scanning point of the chip (which may be set manually, and is preferably an end point of the chip), and then adjusting the displacement in the Z direction of the inspection table 320 to focus the ultrasonic transducer 330 on the inspection position inside the chip;
and finally, scanning and detecting: after the chips in the X-0 direction are scanned sequentially along the Y direction from the start scanning point (e.g., set as the coordinate (0,0)), the displacement in the X direction is finely adjusted (e.g., X equals 1), the chips in the X-1 direction are continuously scanned, and so on until the entire chips are scanned. The position adjusting mechanism 310 can realize the scanning of the ultrasonic transducers 330 on the chip by adjusting the displacement in the X and Y directions, and because the specifications of the workpieces to be detected on the tray are consistent, the automation of the scanning is realized by presetting uniform scanning speed, presetting a first scanning time in the Y direction and presetting a second scanning time in the X direction, and in the scanning process, each channel of the multi-channel data acquisition card of the acquisition mechanism 400 receives a signal of a corresponding ultrasonic transducer 330.
According to the online ultrasonic imaging detection device provided by the embodiment of the invention, the bearing units 220 arranged in an array manner are arranged in the tray 200, so that the position fixation and the height unification of workpieces to be detected (electronic packaging devices) are realized, the height adjustment of an ultrasonic transducer is avoided in the detection process, and the influence on the detection efficiency caused by the parameter adjustment is avoided; secondly, aiming at the characteristics that the workpiece (electronic packaging device) to be detected is small in size and limited in scanning range, the ultrasonic transducer 330 arrays which are in one-to-one correspondence with the workpiece (electronic packaging device) array to be detected are arranged, so that simultaneous detection of a plurality of chips in a single scanning process is realized, and through a multi-channel data acquisition card, each channel corresponds to one ultrasonic transducer 330, so that ultrasonic echo signals output by the ultrasonic transducers 330 are simultaneously received, and the detection efficiency is improved in multiples. Through the arrangement, the invention greatly improves the efficiency of ultrasonic scanning imaging detection, can realize online batch detection of internal defects of workpieces to be detected (electronic packaging devices), and provides real-time data feedback for adjustment of packaging processes and screening of packaging product quality.
Specifically, on the basis of the above, in order to solve the problems that the degree of automation and intelligence of the ultrasonic detection device is not high, the adjustment of the detection parameters needs to be manually completed by an operator, and the detection result is judged by manual experience to bring errors, the following embodiments are further provided.
Referring to fig. 4 and 5, the water tank 100 includes an inlet end a and an outlet end B disposed opposite to each other, the inlet end a and the outlet end B are respectively provided with a first traction groove 500 and a second traction groove 600, and the first traction groove 500, the water tank 100 and the second traction groove 600 together form a sliding support seat with a sliding rail therein. The first traction groove 500 includes two second groove walls 510 disposed oppositely, and the second groove walls 510 are respectively provided with two opposite second sliding grooves 511; the second traction groove 600 comprises two third groove walls 610 arranged oppositely, and the third groove walls 610 are respectively provided with opposite third sliding grooves 611; the second, first and third sliding grooves 511, 111 and 611 form a coherent sliding track. The tray 200 (see fig. 2) further includes a plurality of sliders 230 respectively disposed at two sides of the tray body 210, and the sliders 230 are slidably engaged with the sliding rails. The tray 200 slides on the slide rails, and the tray 200 may be made of a flexible material for continuous sliding at the joints.
Specifically, the tray 200 slides on a slide rail under the action of traction force, passes through the first traction groove 500, enters the water tank 100 through the inlet end a, is positioned in the water tank 100 to stop and fix the position of the alignment detection table 320, and adjusts the position adjusting mechanism 310, so that the ultrasonic transducer 330 is adjusted to the scanning starting point of the electronic packaging device, and starts scanning after focusing, after scanning is completed, the tray 200 is pulled out by the outlet end B of the water tank under the action of traction force, passes through the second traction groove 600, enters a drying program, and enters a subsequent link after rapid drying. In order to realize the automatic detection of the online ultrasonic imaging detection device and reduce errors caused by manual operation, a plurality of trays 200 which are arranged at the same interval and connected with each other are also arranged on the sliding rail, the workpieces (electronic packaging devices) to be detected on each tray 200 are scanned in the same time, and the next tray 200 is scanned at the same interval, so that the automation of sample detection is realized. The number of trays 200 and the number of array elements of the ultrasound transducer array may be extended to any number. Each tray 200 and each electronic packaging device respectively correspond to a tray number and an electronic packaging device number, and when the scanning is abnormal, the tray numbers and the electronic packaging device numbers are recorded, so that the abnormal electronic packaging devices can be screened out conveniently.
Further, the acquisition mechanism 400 according to the embodiment of the present invention further includes a signal amplifier (not shown), and the signal amplifier amplifies the signal acquired by the ultrasonic transducer 330. One end of the signal amplifier is connected with the multi-channel data acquisition card, and the other end is in communication connection with the ultrasonic transducer 330.
Further, referring to fig. 1, the online ultrasonic imaging detection apparatus according to the embodiment of the present invention further includes a vibration-proof table 700, where the vibration-proof table 700 is made of marble and is disposed outside the first tank wall 110 to ensure that the horizontal plane in the water tank 100 is not fluctuated by external interference.
Further, referring to fig. 1, the online ultrasonic imaging detection apparatus according to the embodiment of the present invention further includes a grating encoder 800, which is respectively disposed at the inlet end a and the outlet end B. Through the arrangement of the grating encoder 800, whether the tray 200 enters the water tank 100 or not can be detected, so that the tray 200 to be detected is moved to the center of the water tank 100 and is aligned with the detection table 320 arranged above the water tank 100.
Further, referring to fig. 1 and 5, a monitoring device 900 is disposed above the water tank 100 according to the embodiment of the present invention, and the monitoring device 900 is disposed at the inlet end a and the outlet end B. The monitoring device 900 comprises an industrial camera and a laser range finder or an industrial camera and a 3D structured light, and is used for monitoring the movement of the tray and the height of the ultrasonic transducer 330 relative to the tray in real time from different angles, and avoiding the ultrasonic transducer 330 from being damaged in the scanning process.
Further, referring to fig. 5, the online ultrasonic imaging detection apparatus according to the embodiment of the present invention further includes a dust cover C, where the dust cover C includes a space for accommodating the water tank 100, and covers the water tank 100 and the detection platform 320, so as to prevent the water tank 100 and the detection platform 320 from being affected by dust and affecting the detection result. The dust cover C may be transparent, and the monitoring device 900 is disposed at four corners D in the dust cover C.
The above embodiments are merely examples and are not intended to limit the scope of the present disclosure, and all modifications, equivalents, and flow charts using the contents of the specification and drawings of the present disclosure or those directly or indirectly applied to other related technical fields are intended to be included in the scope of the present disclosure.
Claims (11)
1. An online ultrasonic imaging detection device, comprising:
a detection table;
the ultrasonic transducers are dispersedly arranged on the detection table and are used for simultaneously carrying out ultrasonic detection on a plurality of workpieces to be detected;
and the data acquisition circuit is provided with a plurality of data receiving channels, and the data receiving channels are used for simultaneously receiving the ultrasonic echo signals output by the ultrasonic transducers.
2. The on-line ultrasonic imaging detection device of claim 1,
the online ultrasonic imaging detection device comprises a position adjusting mechanism, the position adjusting mechanism comprises a power source and a vertically arranged lifting component, the bottom end of the lifting component is connected with the detection table, the power source is used for driving the lifting component to lift, and the distance between the ultrasonic transducer and the workpiece to be detected is adjusted, so that the ultrasonic output by the ultrasonic transducer is focused inside the workpiece to be detected.
3. The on-line ultrasonic imaging detection apparatus of claim 2,
the position adjusting mechanism further comprises a moving base, the moving base is perpendicular to the lifting component and comprises a first base and a second base perpendicular to the first base, the second base is connected with the first base in a sliding mode, and the top end of the lifting component is connected with the second base in a sliding mode.
4. The on-line ultrasonic imaging detection apparatus of any one of claims 1 to 3,
the online ultrasonic imaging detection device further comprises a tray, the tray comprises a tray body and a plurality of bearing units which are dispersedly arranged on the tray body in the same arrangement mode as the plurality of ultrasonic transducers, and the bearing units are used for fixing the workpiece to be detected.
5. The on-line ultrasonic imaging detection device of claim 4,
the online ultrasonic imaging detection device also comprises a water tank for containing the acoustic medium liquid, and the water tank is positioned below the detection platform.
6. The on-line ultrasonic imaging detection device of claim 5,
the on-line ultrasonic imaging detection device also comprises a first traction groove arranged at the inlet end of the water tank and a second traction groove arranged at the outlet end of the water tank, the first traction groove, the water tank and the second traction groove together form a sliding support seat, the inner wall of the sliding support seat is provided with a first sliding piece,
the tray further comprises a plurality of second sliding parts which are arranged on two sides of the tray body respectively, and the second sliding parts are in sliding fit with the first sliding parts.
7. The on-line ultrasonic imaging detecting device of claim 6, wherein the inlet end and the outlet end are respectively provided with a grating encoder.
8. The on-line ultrasonic imaging detection device of claim 5, further comprising a vibration isolation table disposed outside the tank wall of the tank.
9. The on-line ultrasonic imaging detection device of claim 8, further comprising a dust cover disposed on the water tank for covering the detection table and the water tank.
10. The on-line ultrasonic imaging inspection device of claim 9, further comprising a monitoring device disposed at a corner of the dust cover for monitoring the scanning of the ultrasonic transducer and the position of the tray.
11. The on-line ultrasonic imaging detection device of claim 10, wherein the monitoring device comprises an industrial camera and a laser range finder or an industrial camera and a 3D structured light.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111665295A (en) * | 2020-05-28 | 2020-09-15 | 深圳第三代半导体研究院 | Solid material and semiconductor device internal defect detection method |
| CN112666256A (en) * | 2020-12-18 | 2021-04-16 | 济南海马机械设计有限公司 | Workpiece online scanning system and use method thereof |
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| CN111665295A (en) * | 2020-05-28 | 2020-09-15 | 深圳第三代半导体研究院 | Solid material and semiconductor device internal defect detection method |
| CN112666256A (en) * | 2020-12-18 | 2021-04-16 | 济南海马机械设计有限公司 | Workpiece online scanning system and use method thereof |
| CN112666256B (en) * | 2020-12-18 | 2022-12-23 | 嘉禾县宏盛制造有限公司 | Workpiece online scanning system and use method thereof |
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| CN111007150B (en) | 2023-11-10 |
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