CN109443203B - A kind of high-precision two-dimentional work bench Z axis error compensating method and system - Google Patents
A kind of high-precision two-dimentional work bench Z axis error compensating method and system Download PDFInfo
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- CN109443203B CN109443203B CN201811315192.XA CN201811315192A CN109443203B CN 109443203 B CN109443203 B CN 109443203B CN 201811315192 A CN201811315192 A CN 201811315192A CN 109443203 B CN109443203 B CN 109443203B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25H—WORKSHOP EQUIPMENT, e.g. FOR MARKING-OUT WORK; STORAGE MEANS FOR WORKSHOPS
- B25H1/00—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
Abstract
The invention discloses a kind of high-precision two-dimentional work bench Z axis error compensating method and systems, and wherein Z axis error-compensating apparatus includes capacitance displacement sensor (602) and datum level (604)；The compensation device cooperates two-dimentional work bench to use, wherein, datum level (604) is used to be arranged in the target area of two-dimentional work bench, capacitance displacement sensor (602) is used to obtain the displacement of datum level (604) in the Z-axis direction by detecting the distance between the capacitance displacement sensor (602) and datum level (604), Z axis error at target area caused by the displacement, that is, two-dimentional work bench, to be compensated based on Z axis error of the displacement to two-dimentional work bench.The present invention is by improving principle, the means for measuring Z axis error etc. based on Z axis error compensating method, the fiducial error in Z-direction can effectively be overcome, realize measurement and compensation for Z-direction error caused by thermal deformation, guide precision, installation error etc..
Description
Technical field
The invention belongs to measuring surface form technical fields, more particularly, to a kind of high-precision two-dimentional work bench Z axis
Error compensating method and system, being capable of effective compensation Z axis error.
Background technique
3 d surface topography measuring instrument needs corresponding two-dimensional scanning workbench to have positioning accuracy high, and plane of movement is steady
Determine the characteristics such as reliable.Existing precise 2-D workbench mostly uses greatly superposing type two-dimensional scanning platform, due to objective table and practical X-axis
Vertical range is larger between Y-axis motion module, and then causes Abbe error larger, it is desirable to obtain flatness height and move flat
Steady datum level is relatively difficult.Since table stroke is long, the precision of worktable displacement is missed by the straightness of respective guide rail itself
Difference and influence each other larger, to cause the required precision of table member high, the almost limit is difficult to process.It is high-accuracy
Two-dimentional work bench disregards cost, a large amount of technologies using such as magnetic suspension, air-float guide rail state-of-the-art technology to realize ultraprecise.
Although the requirement of accuracy Design may be implemented, ignore situation of the platform in industrial application, cost is too high, while to environment
Requirement it is also more harsh, industrial application is highly difficult.It is main to concentrate how to guarantee height both at home and abroad for the research of two-dimentional work bench
The positioning accuracy of resolution ratio, for thermal deformation, guide precision, error in Z-direction caused by installation error there is no into
Row correlated error method and system design studies.
Summary of the invention
Aiming at the above defects or improvement requirements of the prior art, the purpose of the present invention is to provide a kind of high-precision two dimensions
Workbench Z axis error compensating method and system, wherein by principle, measurement Z axis error based on Z axis error compensating method
Means and related device used by details component etc. improve, can effectively overcome the fiducial error in Z-direction,
It realizes the measurement and compensation for Z-direction error caused by thermal deformation, guide precision, installation error etc., and then realizes Z axis side
To high-precision control.Also, the present invention also passes through two-dimentional work bench its details group to Z axis error compensation component cooperating
Cooperating mode between the composition and various components of part etc. carries out advantageous embodiment, it can be achieved that objective table is along X-axis, Y-axis side
It is moved in same plane of movement to when movement, the high-precision control in realization X-axis, Y direction.Present invention is particularly suitable for touchings
In the piece surfaces topography measurement instrument such as pin type contourgraph, three coordinate machine, while being also applicable in photoetching technique, micro manufacturing etc. and need
Want the field of precision stage cooperative motion.
To achieve the above object, according to one aspect of the present invention, a kind of high-precision two-dimentional work bench Z axis mistake is provided
Poor compensation method, which is characterized in that this method is by the two-dimentional work bench target area in pending Z axis error compensation
It is arranged datum level (604), then using capacitance displacement sensor (602) by detecting the capacitance displacement sensor (602) and institute
It states the distance between datum level (604) and then obtains the displacement of the datum level (604) in the Z-axis direction, the displacement is i.e. described
Z axis error at target area caused by two-dimentional work bench, thus based on the displacement to the Z axis error of the two-dimentional work bench into
Row compensation.
As present invention further optimization, the flatness of the datum level (604) is mended lower than the high-precision Z-axis error
Repay the compensation precision of device；Preferably, capacitance displacement sensor (602) the cooperation three coordinate machine uses, which passes
Sensor (602) is located at the underface of the three coordinate machine gauge head, corrects the three coordinate machine gauge head based on the displacement real-time compensation
Measurement data.
It is another aspect of this invention to provide that the present invention provides a kind of high-precision Z-axis error benefits for two-dimentional work bench
Repay device, which is characterized in that including capacitance displacement sensor (602) and datum level (604)；The compensation device cooperates two-dimensional working
Platform uses, wherein the datum level (604) is used to be arranged in the target area of the two-dimentional work bench, capacitive displacement sensing
Device (602) is used to obtain institute by detecting the distance between the capacitance displacement sensor (602) and the datum level (604)
The displacement of datum level (604) in the Z-axis direction is stated, the Z axis at target area caused by the displacement, that is, two-dimentional work bench misses
Difference, to be compensated based on Z axis error of the displacement to the two-dimentional work bench.
As present invention further optimization, the high-precision Z-axis error-compensating apparatus further include adjustment base (601) and
It adjusts screw (603), the capacitance displacement sensor (602) is fixed in the two cooperation, wherein the adjustment base
(601) for being fixedly mounted in the two-dimentional work bench, the adjusting screw (603) is arranged on adjustment base (601) simultaneously
For adjusting the relative position of the capacitance displacement sensor (602) in the Z-axis direction, the capacitance displacement sensor is avoided
(602) exceed the range of the capacitance displacement sensor (602) with the distance between the datum level (604)；Preferably, the tune
Screw (603) are saved to be arranged on the side wall of the adjustment base (601).
As present invention further optimization, the flatness of the datum level (604) is mended lower than the high-precision Z-axis error
Repay the compensation precision of device；Preferably, capacitance displacement sensor (602) the cooperation three coordinate machine uses, which passes
Sensor (602) is located at the underface of the three coordinate machine gauge head, corrects the three coordinate machine gauge head based on the displacement real-time compensation
Measurement data.
Another aspect according to the invention, the present invention provides a kind of high-precision two-dimensional work systems, which is characterized in that
Including pedestal (1), and be located at the pedestal (1) on X-axis motion module (2), Y-axis motion module (3), altogether plane of movement (4),
Z axis error compensation component (6) and objective table (7), the Y-axis motion module (3) and the objective table (7) are respectively positioned on the total fortune
On dynamic plane (4), the X-axis motion module (2) is used to that plane of movement (4) altogether and the Y-axis thereon to be driven to move mould
Block (3) and the objective table (7) move along the x axis, and the Y-axis motion module (3) is for driving the objective table (7) along Y
Axis direction is mobile, and the X-axis motion module (2) and the Y-axis motion module (3) are for driving the objective table (7) same
It is moved in plane of movement；The Z axis error compensation component (6) includes capacitance displacement sensor (602) and datum level (604), institute
It states capacitance displacement sensor (602) to be installed on the pedestal (1), the datum level (604) is arranged in the objective table (7)
On bottom surface, the capacitance displacement sensor (602) is used for by detecting the capacitance displacement sensor (602) and the datum level
The distance between (604) and then the displacement of the datum level (604) in the Z-axis direction, the displacement, that is, objective table (7) are obtained
Z axis error, so as to be compensated to the Z axis error of the objective table (7) based on the displacement, realization can compensate for Z axis
The high-precision two-dimensional workbench of error.
As present invention further optimization, the Z axis error compensation component (6) further includes adjustment base (601) and adjusts
It saves screw (603), the capacitance displacement sensor (602) is fixed in the two cooperation, wherein the adjustment base (601)
For being fixedly mounted in the pedestal (1), the adjusting screw (603) is arranged on adjustment base (601) and for adjusting
The relative position of the capacitance displacement sensor (602) in the Z-axis direction, avoids the capacitance displacement sensor (602) and institute
State the range that the distance between datum level (604) exceeds the capacitance displacement sensor (602)；Preferably, the adjusting screw
(603) it is arranged on the side wall of the adjustment base (601).
As present invention further optimization, the X-axis motion module (2) includes X-axis linear stepping motor (201), X-axis
Motor installation base (202), X-axis roller screw (203), X-axis limiting device (204), X-axis flexible hinge (205), X-axis are flexible
Decussation roller is led to the right by decussation roller guide rail (208a) and X to the left by hinge mounting plate (206), X-axis lead screw support base (207), X
Rail (208b)；The X-axis motion module (2) is driven by the X-axis linear stepping motor (201), and by being fixed on the pedestal (1)
On the X decussation roller guide rail (208b) is oriented to the right by decussation roller guide rail (208a) and the X to the left；
Wherein, the X-axis linear stepping motor (201) is installed by the X-axis motor being fixed on the pedestal (1)
Pedestal (202) is fixed, and the X-axis roller screw (203) is supported by the X-axis linear stepping motor (201) and the X-axis lead screw
Pedestal (207) is fixed by the way of the fixed one end travelling support in one end；The X-axis limiting device (204) is used for the X-axis
Feed screw nut on roller screw (203) limits；The X-axis roller screw (203) by X-axis flexible hinge (205) with
X-axis flexible hinge mounting plate (206) connection, the X-axis flexible hinge mounting plate (206) are fixed on the plane of movement altogether
(4) on；The X-axis linear stepping motor (201) is used to drive the X-axis roller screw (203), and by rolling with the X-axis
The X-axis flexible hinge (205) of column lead screw (203) cooperation, by power transmission to the X-axis flexible hinge mounting plate (206)
Drive plane of movement (4) movement altogether；Decussation roller guide rail (208a) is mounted on the pedestal (1) X to the left, described
Decussation roller guide rail (208b) is installed on plane of movement (4) altogether X to the right；
The Y-axis motion module (3) includes Y-axis linear stepping motor (301), y-axis motor mounting seat (302), Y-axis rolling
Column lead screw (303), Y-axis limiting device (304), Y-axis flexible hinge (305), Y-axis flexible hinge mounting plate (306), Y-axis lead screw
The left decussation roller guide rail (308a) of support base (307), Y-direction and the right decussation roller guide rail (308b) of Y-direction；The Y-axis moves mould
Block (3) is driven by the Y-axis linear stepping motor (301), and the left intersection of the Y-direction by being fixed on the objective table (7)
Roller guide (308a) and right decussation roller guide rail (308b) guiding of the Y-direction；
Wherein, the Y-axis linear stepping motor (301) is electric by the Y-axis being fixed on plane of movement (4) altogether
Machine mounting seat (302) is fixed, and the Y-axis roller screw (303) is by the Y-axis linear stepping motor (301) and the Y-axis silk
Thick stick support base (307) is fixed by the way of the fixed one end travelling support in one end；The Y-axis limiting device (304) for pair
Feed screw nut on the Y-axis roller screw (303) limits；The Y-axis roller screw (303) passes through Y-axis flexible hinge
(305) it is connect with the Y-axis flexible hinge mounting plate (306), the Y-axis flexible hinge mounting plate (306) is fixed on the load
On object platform (7)；The Y-axis linear stepping motor (301) for driving the Y-axis roller screw (303), and by with the Y
The X-axis flexible hinge (305) of axis roller screw (303) cooperation, by power transmission to the Y-axis flexible hinge mounting plate
(306) objective table (7) movement is driven；The left decussation roller guide rail (308a) of Y-direction is mounted on the objective table (7),
The right decussation roller guide rail (308b) of Y-direction is installed on plane of movement (4) altogether.
As present invention further optimization, XY is additionally provided with to position detecting device on plane of movement (4) altogether
(5), which is used for displacement of the objective table (7) in X-direction and Y direction described in real-time detection to position detecting device (5),
And then control the movement of the X-axis motion module (2) and the Y-axis motion module (3)；
The XY includes X to position detecting device (5) to be read to grating scale (501), Y-direction grating scale (502), X to grating scale
Several (503) and Y-direction grating ruler reading head (504)；Wherein, the X is fixed on the plane of movement altogether to grating scale (501)
(4) on, the X is fixed on the pedestal (1) to grating ruler reading head (503)；The Y-direction grating scale (502) is fixed on institute
It states on objective table (7), the Y-direction grating ruler reading head (504) is fixed on plane of movement (4) altogether.
It is surveyed it is another aspect of this invention to provide that the present invention provides above-mentioned high-precision two-dimensional work systems in three coordinate machine
Application in amount, which is characterized in that the application is that the system is applied on three coordinate machine, and the capacitive displacement in the system passes
Sensor (602) cooperate the three coordinate machine use, the capacitance displacement sensor (602) be located at the three coordinate machine gauge head just under
Side corrects the measurement data of the three coordinate machine gauge head based on the displacement real-time compensation.
Contemplated above technical scheme through the invention on the whole, has below beneficial to effect compared with prior art
Fruit:
(1) the invention proposes high-precision two-dimentional work bench Z axis error compensating methods and system to design.It is existing domestic and international
The research of workbench is mainly concentrated in and improves its positioning accuracy, such as reaches nanoscale positioning accuracy.And for
The measurement error in Z-direction due to caused by vibrating or assemble considers very few.Meanwhile for the error in Z-direction
What compensation considered is also not very much, and a small amount of relevant research considers that the Run-out error of work top, i.e. consideration workbench are being installed
When debugging, error compensation is carried out to the inclination conditions in working table movement face caused by rigging error etc..But such compensation method,
It can not be compensated from error of the source to measurement, while also only considered the static tilt as caused by assembly situation and missing
Difference.But in practical situations, error component is that also there are many multiplicity, therefore one can the error caused by a variety of situations
The method and device compensated is essential.When actual measurement, theoretical datum level is not deposited again already due to various errors
, and the compensation method for using invention described and the structure as designed by the compensation method, utilize designed high face type essence
The datum level of degree, can be as the datum level of measurement.So that the error of Z-direction may map to it is designed
It in the measurement data bounce of datum level, is analyzed by data, such as using subsequent improving data Processing Algorithm, it will such as three seats
The Z axis error information that mark machine is surveyed carries out error compensation.Common line can not only be missed using the compensation method and structure
Difference compensates, the structure based on its workbench, can also be by certain data fusion and backoff algorithm, can be to tested
The face shape error of workpiece compensates, to compensate from measurement error of the source to Z-direction.
(2) random meausrement error when being measured due to capacitance displacement sensor, the random vibration of workbench during exercise are missed
The reasons such as difference, therefore the data that capacitance displacement sensor obtains can not directly carry out error compensation.For this situation, the present invention
The data processing method for also further devising a kind of improvement will be located using the data of this method processing capacitance displacement sensor
The data that data after reason are obtained with three coordinate machine measurement again are fitted, and then the surface topography number of available measured workpiece
According to, and then further the surface topography of measured workpiece is analyzed and processed.
During actual measurement, due to system or the suddenly change of external environment, inevitably there is coarse mistake
Difference, so the gross error to the data of inductance displacement sensor is needed to reject.Due to least square method, overall minimum two
The routine datas processing methods such as multiplication, minimum containment method can not handle the gross error in measurement data, after leading to data processing
Result be affected by gross error, do not have the characteristics of robustness；Minimum truncated method can handle data well
In gross error.Comprehensively consider the different characteristics of two kinds of algorithms, the data processing method improved in the present invention, comprehensive minimum is cut
Quadratic method (LTS) and total least square method (TLS), while total least square method handles all variable random errors,
Truncation is carried out for the gross error in measurement data using minimum truncated method, so that it is steady to have improved algorithm
Strong property, improves the availability of data of capacitance displacement sensor.
When carrying out flatness fitting to the data of inductance sensor, ideal fit plane Y=X θ can establish.But in practice
Not only observation vector Y is there are error delta Y, and there is also error delta X by coefficient matrix X, at this time in order to solve unknown quantityConsider matrix
Non trivial solution:
In formula, X is the sequency spectrum coefficient matrix of dimension n × t (t < n)；Y is the observation vector of dimension n × 1；It is dimension t
× 1 independent parameter matrix.Δ X is the random error of coefficient matrix, and dimension is n × t；Δ Y is the random error of observation vector,
Dimension is also n × 1.N is observation number, and t is number of parameters.
Formula (1-1) can be of equal value are as follows:
Solve optimal solutionIt can be understood as seeking constrained optimum solution:
Represent the two norm operations of Δ X Yu Δ Y.
To smallest point [the Δ X for meeting formula (1-3) constraint condition0 ΔY0], then meeting
'sFor the solution of the TLS.
C=[XY] is enabled, singular value decomposition may be expressed as:
C=U ∑ VT (1-4)
Wherein:
U is [X Y] [X Y] in formulaTN feature value vector composition orthogonal matrix；
V is [X Y]TThe orthogonal matrix of the t+1 feature vector composition of [X Y]；
∑=diag (σ1, σ2... σt+1) be Matrix C singular value, singular value is arranged as σ by sequence from small to large1
≥σ2≥…σt+1。
Therefore, total least square solution are as follows:
Pass through θtls, available fitting least square plane:
Z=ax+by+c (1-7)
Wherein, a, b, c θtlsValue in matrix；
Minimum truncated method is for the multiple linear regression mould comprising an explained variable y (i) He k independent variable x (i)
Type:
Y (i)=x (i) β+εi, i=1,2 ..., n (1-8)
Wherein: β is coefficient to be estimated, εiFor random error, for giving arbitrary parameter β, residual sum of squares (RSS):
r(i)2=(y (i)-x (i) β)2 (1-9)
Residual sum of squares (RSS) is ranked up:
Then minimum truncated side's estimation are as follows:
Wherein: m=int [(n+k+1)/2] (i.e. the downward rounding operation of numerical value), k are the number of independent variable.
It, can be random effectively in measurement data in conjunction with the advantages of minimum truncated method and two kinds of algorithms of total least square method
Error and gross error, therefore redefine residual error are as follows:
Wherein: W is linear regression independent variable coefficient quadratic sum.
After rejecting the gross error point in inductance displacement sensor data by above-mentioned modified algorithm, recycle overall minimum
Square law can acquire the plane that capacitance displacement sensor data measured is fitted.Using this plane corresponding coordinate value, sat with three
Mark data measured is fitted.The modified algorithm combines truncated two kinds of basic algorithms of method of minimum of total least square method
Advantage, while having fully considered the error of independent variable and dependent variable, the number measured using this method to capacitance displacement sensor
When according to carrying out data processing, the robustness of capacitance displacement sensor measurement data can be greatly improved.
(3) present invention can compensate the error of Z axis, and then improve Z axis accuracy of measurement, improve three-dimensional appearance
Measurement accuracy.For example, the surface precision of datum level by high-precision processing technology, can be guaranteed (for example, precision is up to 0.25
μm), high-precision capacitance displacement sensor is used on this basis, and dynamic resolution can achieve 10nm, absolute error
It can achieve 0.25 μm.Implemented by the DATA REASONING in later period and relevant backoff algorithm, so that the error precision of Z axis be made to drop
Within 0.5 μm, and then Z axis measurement pattern precision is greatly improved, is extensive, the good technology ginseng of low cost detection offer
It examines.
(4) the high-precision two-dimentional work bench Z axis error compensating method and system are used, can be convenient use in three-dimensional shaped
At low cost in looks measuring instrument, mechanical structure is simple.Decussation roller guide rail is mounted on X with the right decussation roller guide rail of Y-direction to the right
Altogether on plane of movement, by the way that the right cross slideway of X, Y to be mounted on total plane of movement, so as to guarantee two guide surfaces well
Unifying datum, realize the characteristic of its total plane of movement, object tables move benchmark surface error and are much smaller than to be oriented to by bilayer
The object tables that face is formed by stacking are done exercises datum level, so as to realize the plane of movement degree of workbench scanning work.
Higher two-dimensional localization precision may be implemented to the control of the feedback closed loop of position detecting device using XY.
(5) two-dimentional work bench Z axis error compensation is realized by Capacitive Displacement Sensor With High Accuracy in the present invention, high
Accurate capacitors displacement sensor can carry out real-time measurement to the vibration generated due to various reasons such as movements.Particularly,
Vibration error compensation principle is as follows: a highly accurate plane is processed in motion workbench system bottom surface, as compensation
The datum level of measurement, during the motion by Capacitive Displacement Sensor With High Accuracy real-time measurement, since vibration causes datum level
In the change in displacement of Z-direction；For above two-dimentional work bench system for the gauge head of three coordinate machine, it is displaced in high-accuracy capacitor
The surface of sensor is the gauge head of three coordinate machine.By by the data Real-time Feedback of Capacitive Displacement Sensor With High Accuracy to three
Data measured by coordinate machine gauge head can be realized the compensation to measured position Z-direction data, and then improve measuring three-dimensional morphology
Precision.Also, the present invention has unified XY axis guide surface preferably by total plane of movement, first from mechanical structure, and then realizes
Then high flatness precision carries out Z axis error compensation to two-dimentional work bench using Z axis error-compensating apparatus, thus to Z axis
Benchmark carries out error compensation.X-axis motion module and Y-axis motion module can be inside and outside two layers arrangement in the present invention, it is ensured that make to carry
Object platform moves in same plane of movement.XY motion module preferably uses accurate linear grating ruler Real-time Feedback work system
In the position in space, and then realize fully closed feedback position control.
(6) overall construction design of the present invention comprehensively considers the arrangement of datum level, the installation of capacitance displacement sensor, work
The motion conditions of platform.Since the compensation mechanism is the electricity in order to realize the direct compensation to such as three coordinate machine measurement data
Hold displacement sensor be necessarily mounted at three coordinate machine side head underface, can rationally carry out real-time point-to-point compensation, so with
Come, conventional two-dimentional work bench structure is unable to satisfy work requirements, and thus integrally-built driving has to carry out side design.
Simultaneously in order to reduce error from design source, uses guide rail to be total to the design of plane of movement, designed by this, can be very good to subtract
Small measurement error.The present invention has benefited from the precision and associated materials machining accuracy of current capacitance displacement sensor, compare with
Toward the raising for having high degree；The plane of precision superelevation can be processed, and in this, as the datum level of measurement, and previous machine
The machining accuracy of device and the measurement accuracy of sensor do not reach requirement.This method and the workbench designed using the method,
Its principle is understandable, and operability is good, can greatly improve the measurement accuracy of existing three coordinate measuring machine etc..
Detailed description of the invention
Fig. 1 is the schematic illustration of the method for the present invention.
Fig. 2 is the overall structure diagram for the system that the present invention designs.
Fig. 3 is the top view of present system.
Fig. 4 is Z axis error-compensating apparatus schematic illustration of the present invention.
Fig. 5 is the total plane of movement rail mounting structure schematic diagram of designing system of the present invention.
The meaning of each appended drawing reference is as follows in figure: 1 is pedestal, and 2 be X-axis motion module, and 3 be Y-axis motion module, and 4 be total
Plane of movement, 5 be XY to position detecting device, and 6 be Z axis error-compensating apparatus (that is, Z axis error compensation component), and 7 be loading
Platform.For X-axis motion module: 201 be X-axis linear stepping motor, and 202 be motor installation base (i.e. X-axis motor installation base),
203 be roller screw (i.e. X-axis roller screw), and 204 be limiting device (i.e. X-axis limiting device), and 205 be flexible hinge (i.e. X-axis
Flexible hinge), 206 be flexible hinge mounting plate (i.e. X-axis flexible hinge mounting plate), and 207 be lead screw support base (i.e. X-axis silk
Thick stick support base), 208a is X decussation roller guide rail to the left, and 208b is X decussation roller guide rail to the right.For Y-axis motion module:
301 be Y-axis linear stepping motor, and 302 be motor installation base (i.e. y-axis motor mounting seat), and 303 be roller screw (i.e. Y-axis
Roller screw), 304 be limiting device (i.e. Y-axis limiting device), and 305 be flexible hinge (i.e. Y-axis flexible hinge), and 306 be Y-axis
Flexible hinge mounting plate (i.e. Y-axis flexible hinge mounting plate), 307 be lead screw support base (i.e. Y-axis lead screw support base), 308a
For the left decussation roller guide rail of Y-direction, 308b is the right decussation roller guide rail of Y-direction.For XY to position detecting device: 501 be X to grating
Ruler, 502 be Y-direction grating scale, and 503 be X to grating ruler reading head, and 504 be Y-direction grating ruler reading head.It is filled for Z axis error compensation
Set: 601 be adjustment base, and 602 be Capacitive Displacement Sensor With High Accuracy, and 603 is adjust screw, and 604 be benchmark face.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.As long as in addition, technical characteristic involved in the various embodiments of the present invention described below
Not constituting a conflict with each other can be combined with each other.
High-precision two-dimentional work bench Z axis error compensating method in the present invention is in short by pending Z axis
Datum level 604 is set on the two-dimentional work bench target area in error compensation, then passes through inspection using capacitance displacement sensor 602
It surveys the distance between the capacitance displacement sensor 602 and datum level 604 and then obtains the displacement of datum level 604 in the Z-axis direction,
Z axis error at target area caused by the displacement, that is, two-dimentional work bench, to be missed based on Z axis of the displacement to two-dimentional work bench
Difference compensates.
High-precision two-dimensional work system includes that XY axis motion module, XY shaft position detection device and Z axis are mended in the present invention
Repay device, wherein X-axis motion module is driven from X to linear stepping motor by X-axis lead screw, is led by decussation roller linear guide
To linear guide is mounted on the base.Y-axis motion module is located on plane of movement altogether, passes through Y-axis by Y-direction linear stepping motor
Lead screw is driven.The two-dimentional work bench system being made of X-axis and Y-axis motion module constitutes the contour total movement of two kinematic axis
Plane motion plateform system.Z axis error-compensating apparatus, the mainly precision by Capacitive Displacement Sensor With High Accuracy as error compensation
Measuring instrument is set by treating location using Capacitive Displacement Sensor With High Accuracy and is measured with the distance of datum level, can be with structure
The real-time range scatter plot of measurement error is produced, the self compensation of Z axis error is then carried out.
Fig. 1 is the corresponding structural schematic diagram of above-mentioned high-precision two-dimentional work bench Z axis error compensating method；Fig. 2 is high-precision
The two-dimentional work bench Z axis error compensation system overall structure diagram of degree；Fig. 3 is total plane of movement structural schematic diagram；Fig. 4 is base
In Z axis error-compensating apparatus figure；Fig. 5 is total plane of movement rail mounting structure schematic diagram.The high-precision Z axis error compensation system
System is made of total plane of movement two-dimension displacement mechanism and Z axis error compensation mechanism and XY axis grating measurement device.
The basic functional principle of this high-precision Z axis error compensating method are as follows: by Z axis error-compensating apparatus to workbench
System during the motion, since the factors such as guide precision, assembly and thermal deformation cause accuracy of measurement in Z-direction to cause
Influence, set by treating location using Capacitive Displacement Sensor With High Accuracy and measured with the distance of datum level, can constructed
The real-time range scatter plot measured out.To be compensated to the error of Z-direction.
Shown in Figure 1: high-precision two-dimentional work bench Z axis error compensating method, compensation are by high-accuracy capacitor position
Come what is realized, Capacitive Displacement Sensor With High Accuracy can carry out the vibration generated due to various reasons such as movements displacement sensor
Real-time measurement.Vibration error compensation principle: a highly accurate plane is processed in motion workbench bottom surface, as compensation
The datum level of measurement, during the motion by Capacitive Displacement Sensor With High Accuracy real-time measurement, since vibration causes datum level
It is the gauge head of three coordinate machine in the surface of Capacitive Displacement Sensor With High Accuracy in the change in displacement of Z-direction.By will be high
Data measured by the data Real-time Feedback to three coordinate machine gauge head of accurate capacitors displacement sensor, can be realized to measured position Z
The compensation of axis direction data, and then improve measuring three-dimensional morphology precision.
Referring to fig. 2, shown in 3: high-precision two-dimentional work bench Z axis error system, Y-axis motion module 3 are mounted on total fortune
In dynamic plane 4.X-axis and Y-axis cross linear guides are installed on total plane of movement 4, form two contour two dimensions of kinematic axis
Motion workbench.Its X-axis motion module 2 and Y-axis motion module 3 are by the unilateral driving of lead screw progress, to avoid due to bilateral
Consistency problem is controlled caused by driving.Using linear stepping motor 201,301, by motor and roller screw be made into one it is whole
Body is avoided impacting working performance using shaft coupling, while reducing it and being taken up space.Using the structure of total plane of movement,
Keep kinematic axis contour, guarantee the flatness of its plane of movement, there is better dynamic performance.Simultaneously from the angle of processing,
Plane of movement is easier to process, and then reduces kinematic error, improves kinematic accuracy.
Also, altogether plane of movement 4 can by X-axis flexible hinge mounting plate 206, Y-axis flexible hinge mounting plate 306, with
Roller screw 203,303 is attached, so that Y-axis motion module 3 is attached with X-axis motion module 2.X decussation roller to the left
Guide rail 208a carries out connected with pedestal 1.The objective table 7 and left decussation roller guide rail 308a of Y-direction carries out connected.
The present invention has unified XY axis guide surface using plane of movement altogether from mechanical structure first, and then realizes high put down
Then face degree precision carries out Z axis error compensation to two-dimentional work bench using Z axis error-compensating apparatus, thus to the benchmark of Z axis into
Row error compensation.
It is shown in Figure 4: in order to guarantee to install, assembly, and the case where interfering when movement is prevented, it will in this design
1 middle position of pedestal fluting, so that Z axis error compensation mechanism 6 is placed in the slot opened among pedestal 1.Utilize plane height
The principle of accurate capacitors, by being measured to the distance between Capacitive Displacement Sensor With High Accuracy and datum level.In order to guarantee
The distance between Capacitive Displacement Sensor With High Accuracy and datum level design a height adjustment device in the range of its range,
By being adjusted to it, guarantees the requirement of range, prevent in working table movement, the case where outranging.Due to high-precision
Degree capacitance displacement sensor probe segment is smooth surface structure, for the ease of installation, is punched in the side of height adjustment device, installation
Plastic screw.The plane 604 for designing processing, selectes it as datum level.Its surface accuracy can be very high, the pattern error on surface
It can be ignored compared to Z axis datum to be compensated, i.e. precision of the flatness of datum level far below capacitance displacement sensor；
Flatness numerical value is smaller more smooth.By its whole structure design, guarantee the whole design performance requirement of Z axis compensation mechanism.
Shown in Figure 5: decussation roller guide rail 208b and the right decussation roller guide rail 308b of Y-direction are mounted on total fortune to X to the right
In dynamic plane 4, by the way that the right cross slideway of X, Y to be mounted on total plane of movement 4, and then it is located at the guide surface in both direction
Approximately the same plane.The left straight line cross slideway 208a of X-axis as X to basic rack, enable the positioning of its plane of movement 4 together first
Then the alignment of step side group quasi- is fixed on the datum plane of total plane of movement 4, then from middle position screw with screw preload
Start, starts to tighten screw to two sides by crossover location.Until basic rack is after the installation is completed, the right straight line cross slideway of X-axis
208b carries out adjustment on the basis of basic rack 208a.Meanwhile the left straight line cross slideway 308a of Y-axis and the right straight line intersection of Y-axis are led
Rail 308b carries out adjustment on the basis of basic rack 208a, thus guarantee its X to verticality precision.
X-axis, Y direction and Z-direction meet relationship mutually orthogonal two-by-two, and X-axis, Y direction two in the present invention
Person can be interchanged；Respective limiting device can control XY axis motion module motion range in X-axis, Y direction.
Capacitive Displacement Sensor With High Accuracy in the present invention can select German rice iridium DT6530@8.5kHz measuring system, match
It closes using gauge heads such as CS05 gauge heads, so that its sensing system dynamic resolution is can achieve 10nm, absolute error can achieve
0.25μm。
As it will be easily appreciated by one skilled in the art that the foregoing is merely illustrative of the preferred embodiments of the present invention, not to
The limitation present invention, any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should all include
Within protection scope of the present invention.
Claims (6)
1. a kind of high-precision two-dimensional work system, which is characterized in that including pedestal (1), and the X being located on the pedestal (1)
Axis motion module (2), Y-axis motion module (3), altogether plane of movement (4), Z axis error compensation component (6) and objective table (7), it is described
Y-axis motion module (3) and the objective table (7) are respectively positioned on plane of movement (4) altogether, and the X-axis motion module (2) is used for
Plane of movement (4) altogether and the Y-axis motion module (3) thereon and the objective table (7) is driven to move along the x axis,
The Y-axis motion module (3) is for driving the objective table (7) to move along the y axis, the X-axis motion module (2) and described
Y-axis motion module (3) is for driving the objective table (7) to move in same plane of movement；The Z axis error compensation component
It (6) include capacitance displacement sensor (602) and datum level (604), the capacitance displacement sensor (602) is installed on the pedestal
(1) on, the datum level (604) is arranged on the bottom surface of the objective table (7), and the capacitance displacement sensor (602) is used for
The datum level is obtained and then detecting the distance between the capacitance displacement sensor (602) and the datum level (604)
(604) displacement in the Z-axis direction, the displacement, that is, objective table (7) Z axis error, so as to be based on the displacement to institute
The Z axis error for stating objective table (7) compensates, and realizes the high-precision two-dimensional workbench that can compensate for Z axis error.
2. high-precision two-dimensional work system as described in claim 1, which is characterized in that the Z axis error compensation component (6) is also
Including adjustment base (601) and screw (603) are adjusted, the capacitance displacement sensor (602) is fixed in the two cooperation,
In, for the adjustment base (601) for being fixedly mounted in the pedestal (1), adjusting screw (603) setting is adjusting bottom
On seat (601) and for adjusting the relative position of the capacitance displacement sensor (602) in the Z-axis direction, the capacitor is avoided
The distance between displacement sensor (602) and the datum level (604) exceed the range of the capacitance displacement sensor (602).
3. high-precision two-dimensional work system as claimed in claim 2, which is characterized in that adjusting screw (603) setting exists
On the side wall of the adjustment base (601).
4. high-precision two-dimensional work system as described in claim 1, which is characterized in that the X-axis motion module (2) includes X
Axis linear stepping motor (201), X-axis motor installation base (202), X-axis roller screw (203), X-axis limiting device (204), X
Axis flexible hinge (205), X-axis flexible hinge mounting plate (206), X-axis lead screw support base (207), X decussation roller guide rail to the left
(208a) and X decussation roller guide rail (208b) to the right；The X-axis motion module (2) is driven by the X-axis linear stepping motor (201)
It is dynamic, and the X by being fixed on the pedestal (1) to the left lead to the right by decussation roller guide rail (208a) and the X by decussation roller
Rail (208b) guiding；
Wherein, the X-axis linear stepping motor (201) passes through the X-axis motor installation base that is fixed on the pedestal (1)
(202) fixed, the X-axis roller screw (203) is by the X-axis linear stepping motor (201) and the X-axis lead screw support base
(207) it is fixed by the way of the fixed one end travelling support in one end；The X-axis limiting device (204) is used for the X-axis roller
Feed screw nut on lead screw (203) limits；The X-axis roller screw (203) passes through X-axis flexible hinge (205) and the X
Axis flexible hinge mounting plate (206) connection, the X-axis flexible hinge mounting plate (206) are fixed on total plane of movement (4)
On；The X-axis linear stepping motor (201) for driving the X-axis roller screw (203), and by with the X-axis roller silk
The X-axis flexible hinge (205) of thick stick (203) cooperation, power transmission to the X-axis flexible hinge mounting plate (206) is driven
Plane of movement (4) movement altogether；Decussation roller guide rail (208a) is mounted on the pedestal (1) X to the left, the X to
Right decussation roller guide rail (208b) is installed on plane of movement (4) altogether；
The Y-axis motion module (3) includes Y-axis linear stepping motor (301), y-axis motor mounting seat (302), Y-axis roller silk
Thick stick (303), Y-axis limiting device (304), Y-axis flexible hinge (305), Y-axis flexible hinge mounting plate (306), the support of Y-axis lead screw
The left decussation roller guide rail (308a) of pedestal (307), Y-direction and the right decussation roller guide rail (308b) of Y-direction；The Y-axis motion module (3)
It is driven by the Y-axis linear stepping motor (301), and the left decussation roller of the Y-direction by being fixed on the objective table (7) is led
Rail (308a) and right decussation roller guide rail (308b) guiding of the Y-direction；
Wherein, the Y-axis linear stepping motor (301) is pacified by the y-axis motor being fixed on plane of movement (4) altogether
It fills pedestal (302) to fix, the Y-axis roller screw (303) is by the Y-axis linear stepping motor (301) and the Y-axis lead screw branch
Support pedestal (307) is fixed by the way of the fixed one end travelling support in one end；The Y-axis limiting device (304) is used for the Y
Feed screw nut on axis roller screw (303) limits；The Y-axis roller screw (303) passes through Y-axis flexible hinge (305)
It is connect with the Y-axis flexible hinge mounting plate (306), the Y-axis flexible hinge mounting plate (306) is fixed on the objective table
(7) on；The Y-axis linear stepping motor (301) is used to drive the Y-axis roller screw (303), and by rolling with the Y-axis
The X-axis flexible hinge (305) of column lead screw (303) cooperation, by power transmission to the Y-axis flexible hinge mounting plate (306)
The objective table (7) are driven to move；The left decussation roller guide rail (308a) of Y-direction is mounted on the objective table (7), the Y
Decussation roller guide rail (308b) is installed on plane of movement (4) altogether to the right.
5. high-precision two-dimensional work system as described in claim 1, which is characterized in that also set on plane of movement (4) altogether
XY is equipped with to position detecting device (5), which is used for objective table (7) described in real-time detection in X-axis side to position detecting device (5)
To with the displacement in Y direction, and then control the movement of the X-axis motion module (2) and the Y-axis motion module (3)；
The XY to position detecting device (5) include X to grating scale (501), Y-direction grating scale (502), X to grating ruler reading head
(503) and Y-direction grating ruler reading head (504)；Wherein, the X is fixed on plane of movement (4) altogether to grating scale (501),
The X is fixed on the pedestal (1) to grating ruler reading head (503)；The Y-direction grating scale (502) is fixed on the loading
On platform (7), the Y-direction grating ruler reading head (504) is fixed on plane of movement (4) altogether.
6. application of the high-precision two-dimensional work system in three coordinate machine measurement as described in claim 1-5 any one,
It is characterized in that, the application is that the system is applied on three coordinate machine, capacitance displacement sensor (602) cooperation in the system
The three coordinate machine uses, and the capacitance displacement sensor (602) is located at the underface of the three coordinate machine gauge head, is based on the displacement
Real-time compensation corrects the measurement data of the three coordinate machine gauge head.
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| CN111721255A (en) * | 2020-06-30 | 2020-09-29 | 中建材轻工业自动化研究所有限公司 | Flatness detection method and system |
| CN112405108B (en) * | 2020-09-17 | 2022-08-26 | 山东理工大学 | Method for realizing ultra-precise parallel linear microstructure machining by using common machine tool |
| CN112284313B (en) * | 2020-10-27 | 2022-02-18 | 深圳市勤丽华铖科技有限公司 | High-precision double-measuring-head measuring block comparator |
| CN112578267A (en) * | 2020-12-02 | 2021-03-30 | 长春光华微电子设备工程中心有限公司 | Flatness compensation method for high-low temperature test working disc |
| CN113175893B (en) * | 2021-04-15 | 2022-02-11 | 中国工程物理研究院激光聚变研究中心 | Optical free-form surface full-aperture detection method based on multi-error real-time compensation |
| CN113375596A (en) * | 2021-06-25 | 2021-09-10 | 山东省科学院激光研究所 | Measuring mechanism for detecting surface appearance of large-scale structural part |
| CN114812390B (en) * | 2022-04-13 | 2023-10-03 | 广东工业大学 | Self-adaptive grating ruler error compensation method |
| CN117161550B (en) * | 2023-11-02 | 2024-01-26 | 珠海市申科谱工业科技有限公司 | 2D platform compensation method and device and laser processing equipment |
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