CN214843321U - Three-axis hollow precision motion platform - Google Patents
Three-axis hollow precision motion platform Download PDFInfo
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- CN214843321U CN214843321U CN202122244551.0U CN202122244551U CN214843321U CN 214843321 U CN214843321 U CN 214843321U CN 202122244551 U CN202122244551 U CN 202122244551U CN 214843321 U CN214843321 U CN 214843321U
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Abstract
The utility model discloses a triaxial cavity precision motion platform, include: the base is provided with an area for placing a substance to be detected and arranged along the horizontal direction; the three-axis motion platform is arranged on the base and comprises an XY-axis motion platform and a Z-axis motion platform, the XY-axis motion platform can move in two directions perpendicular to each other in the horizontal plane, the Z-axis motion platform can move in the vertical direction, through holes are formed in the XY-axis motion platform and the Z-axis motion platform, and the through holes allow the detection equipment to pass through and reach the upper part of a region for placing a substance to be detected. The utility model discloses a big well pore structure of XYZ direction can provide sufficient installation and detection space for the optical detection of jumbo size work piece to satisfy the requirement of heavy load and big acceleration and high accuracy.
Description
Technical Field
The utility model belongs to the technical field of optical detection, a triaxial cavity precision motion platform is related to.
Background
With the rapid development of various fields, the demands of various industries on precision machining and precision measurement are higher and higher. In optical detection, linear motion platforms are widely used, and with the continuous development of these industries, there are more and more requirements for different types of linear motion platforms, and not only motion platforms capable of precise measurement and precision machining, but also motion platforms capable of detecting and detecting substances at multiple angles are required. However, the conventional motion table for detection mostly has no hollow structure or the hollow structure is too small, which cannot provide enough installation and detection space for a large-sized optical detection instrument, and cannot meet the requirements of large load, large acceleration, high precision and the like.
SUMMERY OF THE UTILITY MODEL
An object of the present invention is to solve at least the above problems and/or disadvantages and to provide at least the advantages which will be described later.
The utility model discloses a triaxial cavity precision motion platform is provided to still another purpose, the utility model discloses a big well pore structure of XYZ direction can provide sufficient installation and detection space for the optical detection of jumbo size work piece to satisfy the requirement of heavy load and big acceleration and high accuracy.
Therefore, the utility model provides a technical scheme does:
accurate motion platform of triaxial cavity includes:
the device comprises a base, a detection device and a control device, wherein the base is provided with an area for placing a substance to be detected and is arranged along the horizontal direction;
the three-axis motion platform is arranged on the base and comprises an XY-axis motion platform and a Z-axis motion platform, the XY-axis motion platform can move in two directions which are perpendicular to each other in the horizontal plane, the Z-axis motion platform can move in the vertical direction, through holes are formed in the XY-axis motion platform and the Z-axis motion platform, and the through holes allow detection equipment to pass through and reach the position above an area where the substance to be detected is placed.
Preferably, the three-axis hollow precision motion stage further includes:
and the XY shaft component is arranged above the area for placing the substance to be detected along the horizontal direction, forms the XY shaft motion platform and performs reciprocating motion along two mutually perpendicular directions in the horizontal plane.
Preferably, the three-axis hollow precision motion stage further includes:
and the Z shaft assembly is arranged on one side of the area for placing the substances to be detected along the vertical direction, forms the Z shaft motion platform and performs reciprocating motion along the vertical direction.
Preferably, in the three-axis hollow precision motion table, the XY axis assembly comprises a bottom layer assembly, a middle layer assembly and an upper layer assembly which are arranged from bottom to top along the vertical direction, each layer of structure is connected with each other in a sliding manner through a sliding block and a sliding rail, the middle layer assembly linearly reciprocates in a first direction relative to the bottom layer assembly, the upper layer assembly linearly reciprocates in a second direction relative to the middle layer assembly, and the first direction is perpendicular to the second direction.
Preferably, in the triaxial hollow precision motion platform, in the XY shaft assembly, the bottom layer assembly, the middle layer assembly and the upper layer assembly respectively comprise a bottom layer bottom plate, a middle plate and an upper load plate in sequence, and the bottom layer bottom plate, the middle plate and the upper load plate are all provided with through holes.
Preferably, in the three-axis hollow precision motion platform, a bottom grating reading head is fixed on a bottom plate through a bottom axis grating reading head mounting seat, a bottom scale grating is fixed on one side edge of the lower part of the middle plate, and the bottom scale grating is matched with the bottom grating reading head; the upper-layer scale grating is fixed on one side edge of the upper part of the middle plate, the reading head of the upper-layer grating is fixed on the upper load plate through the upper-layer reading head mounting seat, and the upper-layer scale grating is matched with the reading head of the upper-layer grating.
Preferably, in the three-axis hollow precision motion platform, the XY-axis motion platform is driven by a linear motor to move in two directions perpendicular to each other, and the Z-axis motion platform is driven by a linear motor to move in a vertical direction.
Preferably, in the three-axis hollow precision motion platform, the two sides of the Z-axis motion platform balance the weight of the Z-axis motion part through air cylinders.
Preferably, the three-axis hollow precision motion stage further includes:
and one ends of the three stand columns are fixed on the base, and the XY shaft assembly is fixed at the other ends of the three stand columns.
Preferably, in the three-axis hollow precision motion platform, the base is a stone base, and each motion platform main body frame is made of granite materials through precision grinding.
The utility model discloses at least, include following beneficial effect:
each axis of XYZ is driven by a double linear motor, and the high-precision operation of the motion platform is ensured by guiding a roller slide block guide rail and feeding back a grating closed loop and applying gantry cross decoupling algorithm control.
Both the middle of the XYZ axes provide a large size mesoporous structure.
And 3, the XY axis adopts a three-piece structural design, so that the overall height of the motion platform is fully reduced, and reliable guarantee is provided for the large acceleration and high-precision operation of the platform.
4. The motion platform main body frame is made of granite materials through precision grinding. The XY-axis motion platform is fixedly connected with the supporting upright columns distributed at the three points.
And 5, carrying out sufficient weight reduction design on the Z-axis load plate on the premise of ensuring the rigidity through simulation analysis, and ensuring the running stability of the motion platform.
The utility model discloses a big mesopore structural design of XYZ direction provides sufficient installation and detection space for the optical detection of jumbo size work piece to satisfy the requirement of heavy load and big acceleration and high accuracy, provide reliable scheme to the optical detection of mesopore structural demand.
Additional advantages, objects, and features of the invention will be set forth in part in the description which follows and in part will become apparent to those having ordinary skill in the art upon examination of the following or may be learned from practice of the invention.
Drawings
Fig. 1 is the utility model discloses a structural schematic of triaxial cavity precision motion platform among one of them technical scheme, wherein A is the elevation view of triaxial cavity precision motion platform, and B is the plan view of triaxial cavity precision motion platform, and C is the side view of triaxial cavity precision motion platform, and D is the stereogram of triaxial cavity precision motion platform.
Fig. 2 is a structural schematic diagram of the XY shaft assembly in one of the technical solutions of the present invention, in which a is a front view of the XY shaft assembly, B is a top view of the XY shaft assembly, C is a side view of the XY shaft assembly, and D is a perspective view of the XY shaft assembly.
Fig. 3 is a schematic structural diagram of a bottom layer assembly according to one embodiment of the present invention, in which a is a front view of the bottom layer assembly, B is a top view of the bottom layer assembly, and C is a perspective view of the bottom layer assembly.
Fig. 4 is a schematic structural diagram of the middle layer assembly in one of the technical solutions of the present invention, wherein a is a top view of the middle layer assembly, B is a side view of the middle layer assembly, C is a bottom view of the middle layer assembly, and D is a perspective view of the middle layer assembly.
Fig. 5 is a schematic structural diagram of an upper layer assembly in one embodiment of the present invention, where a is a front view of the upper layer assembly, B is a bottom view of the upper layer assembly, C is a top view of the upper layer assembly, and D is a perspective view of the upper layer assembly.
Fig. 6 is a schematic structural diagram of a Z-axis assembly in one of the technical solutions of the present invention, where a is a front view of the Z-axis assembly, B is a rear view of the Z-axis assembly, C is a side view of the Z-axis assembly, and D is a perspective view of the Z-axis assembly.
Wherein, each mark is: stone base 1, first upright 2, second upright 3, third upright 4, Z-axis assembly 5, XY-axis assembly 6, bottom assembly 610, middle assembly 620, upper assembly 630, bottom floor 611, first slide rail (2) 612 on the bottom, bottom motor stator (2) 613, bottom buffer (4) 614, bottom grating reading head 615 on the bottom, bottom shaft reading head mounting seat 616, middle plate 621, second slide rail (2) 622, second slider (4) 623, upper motor stator (2) 624, upper buffer (4) 625, upper scale grating 626, first bump block (4) 627, bottom scale grating 628, bottom motor mover (2) 629, upper plate 631, second slider (4) 632, upper motor mover (2) 633, upper cable groove 634, second bump block (4) 635, upper grating head mounting seat 636, upper grating reading head 637, upper shading board 638, stone beam 701, Z-axis load board 702, third slide rail (2) 703, third slider 704 (4) 704, Z-axis motor rotor (2) 705, cylinder adapter (2) 706, Z-axis scale grating (2) 707, Z-axis motor stator 708, cylinder (2) 709, floating joint (2) 710, Z-axis grating reading head (2) 711, Z-axis grating mounting seat (2) 712, cylinder fixing seat (2) 713, limit buffer (4) 714, and limit block (2) 715.
Detailed Description
The present invention is further described in detail below with reference to the drawings so that those skilled in the art can implement the invention with reference to the description.
It will be understood that terms such as "having," "including," and "comprising," as used herein, do not preclude the presence or addition of one or more other elements or groups thereof.
As shown in fig. 1 and 2, the utility model provides a triaxial cavity precision motion platform, include:
the device comprises a base, a detection device and a control device, wherein the base is provided with an area for placing a substance to be detected and is arranged along the horizontal direction; in one of the technical solutions of the present invention, preferably, the base is a stone base 1.
The three-axis motion platform is arranged on the base and comprises an XY-axis motion platform and a Z-axis motion platform, the XY-axis motion platform can move in two directions which are perpendicular to each other in the horizontal plane, the Z-axis motion platform can move in the vertical direction, through holes are formed in the XY-axis motion platform and the Z-axis motion platform, and the through holes allow detection equipment to pass through and reach the position above an area where the substance to be detected is placed. Each motion platform main body frame is made of granite materials through precision grinding. The utility model discloses an among one of them technical scheme, as preferred, the through hole of XY axle subassembly is 300 ~ 360mm, and the through hole of Z axle subassembly is 900 ~ 1100mm 700 ~ 900 mm. Most preferably, the XY-axis assembly has a through-hole of 330mm X330 mm, and the Z-axis assembly has a through-hole of 1000mm X800 mm.
The utility model discloses when using, will wait to detect that the material is for example the crystal is placed in putting on the base and is waited the regional of detecting the material, and the optical detection instrument who wears to come through the perforating hole of XY axle subassembly treats that the detecting material detects, and the optical detection instrument that also can wear to come through the perforating hole of Z axle subassembly treats that the detecting material detects to can adjust through the position of the regulation income optical detection instrument of XY axle subassembly and Z axle subassembly respectively. The utility model discloses a big mesopore structural design of XYZ direction provides sufficient installation and detection space for the optical detection of jumbo size work piece to satisfy the requirement of heavy load and big acceleration and high accuracy, provide reliable scheme to the optical detection of mesopore structural demand.
In the above aspect, as shown in fig. 3, it is preferable that the method further includes:
and the XY shaft assembly 6 is arranged above the area for placing the substance to be detected along the horizontal direction, and the XY shaft assembly 6 forms an XY shaft motion platform which reciprocates along two mutually perpendicular directions in the horizontal plane. The XY-axis assembly 6 is used to adjust the movement of the detection device in the horizontal X-axis and Y-axis directions.
In one of the technical solutions of the present invention, as shown in fig. 6, preferably, the present invention further includes:
and the Z shaft assembly is arranged on one side of the area for placing the substances to be detected along the vertical direction, forms the Z shaft motion platform and performs reciprocating motion along the vertical direction. The Z-axis assembly is used to adjust the movement of the detection device in the vertical direction.
In one of the technical solutions of the present invention, as a preferred option, as shown in fig. 3, the XY shaft assembly 6 includes a three-piece structure of a bottom component 610, a middle component 620 and an upper component 630, which are arranged from bottom to top along a vertical direction, and each layer of structure is slidably connected via a slider and a slide rail, the middle component 620 is relative to the bottom component 610 performs reciprocating linear movement in a first direction, the upper component 630 is relative to the middle component 620 performs reciprocating linear movement in a second direction, and the first direction is perpendicular to the second direction. The first direction is the X-axis direction or the Y-axis direction, and the second direction is the other direction correspondingly.
In the above solution, preferably, in the XY shaft assembly 6, the bottom layer assembly 610, the middle layer assembly 620 and the upper layer assembly 630 sequentially include a bottom layer bottom plate 611, a middle plate 621 and an upper load plate 631 respectively, and the bottom layer bottom plate 611, the middle plate 621 and the upper load plate 631 are all provided with through holes. So that the detection device can pass through the through hole.
In the above solution, preferably, the bottom layer grating reading head 615 is fixed on the bottom layer bottom plate 611 through the bottom shaft grating reading head mounting seat 616, the bottom layer scale grating 628 is fixed on one side edge of the lower portion of the middle plate 621, and the bottom layer scale grating 628 is matched with the bottom layer grating reading head 615; an upper scale grating 626 is fixed on one side of the upper part of the middle plate 621, an upper scale reading head 637 is fixed on an upper load plate 631 through an upper scale reading head mounting seat 636, and the upper scale grating 626 is matched with the upper scale reading head 637. For providing position information feedback of the moving platform.
The utility model discloses an among one of them technical scheme, as preferred, XY axle motion platform carries out the ascending removal in two directions of mutually perpendicular through motor drive, Z axle motion platform carries out the ascending removal in vertical side through the drive of cylinder 709. Through the cooperation of motor stator and motor active cell, realize motion platform's big acceleration, high accuracy and adjust.
In one of the technical solutions of the present invention, preferably, the weight of the Z-axis moving part is balanced by the air cylinders 709 at both sides of the Z-axis moving platform.
In one of the technical solutions of the present invention, as preferable, the present invention further includes:
the device comprises three upright columns, namely a first upright column 2, a second upright column 3 and a fourth upright column 4, wherein one ends of the three upright columns are fixed on the base, and the XY shaft assembly 6 is fixed at the other ends of the three upright columns.
The utility model discloses when using, will wait to detect that the material is for example the crystal is placed in putting on the base and is waited the regional of detecting the material, and the optical detection instrument who wears to come through the perforating hole of XY axle subassembly 6 treats the detection material and detects, and the optical detection instrument that also can wear to come through the perforating hole of Z axle subassembly treats the detection material and detects to can adjust through the position of the regulation income optical detection instrument of XY axle subassembly 6 and Z axle subassembly respectively.
In order to make the technical solution of the present invention better understood by those skilled in the art, the following examples are now provided for illustration:
accurate motion platform of triaxial cavity includes:
the device comprises a base, a detection device and a control device, wherein the base is provided with an area for placing a substance to be detected and is arranged along the horizontal direction;
the three-axis motion platform is arranged on the base and comprises an XY-axis motion platform and a Z-axis motion platform, the XY-axis motion platform can move in two directions which are perpendicular to each other in the horizontal plane, the Z-axis motion platform can move in the vertical direction, through holes are formed in the XY-axis motion platform and the Z-axis motion platform, and the through holes allow detection equipment to pass through and reach the position above an area where the substance to be detected is placed. Each motion platform main body frame is made of granite materials through precision grinding.
And the XY shaft assembly 6 is arranged above the area for placing the substance to be detected along the horizontal direction, and the XY shaft assembly 6 forms an XY shaft motion platform which reciprocates along two mutually perpendicular directions in the horizontal plane. The XY-axis motion platform is driven by a motor to move in two directions which are perpendicular to each other.
And the Z shaft assembly is arranged on one side of the area for placing the substances to be detected along the vertical direction, forms the Z shaft motion platform and performs reciprocating motion along the vertical direction. The Z-axis motion platform is driven by a cylinder 709 to move in the vertical direction.
The XY-axis assembly 6 comprises a bottom layer assembly 610, a middle layer assembly 620 and an upper layer assembly 630 which are arranged from bottom to top in the vertical direction, each layer of structure is connected in a sliding mode through a sliding block and a sliding rail, the middle layer assembly 620 makes reciprocating linear movement in the first direction relative to the bottom layer assembly 610, the upper layer assembly 630 makes reciprocating linear movement in the second direction relative to the middle layer assembly 620, and the first direction is perpendicular to the second direction.
In the XY shaft assembly 6, the bottom layer assembly 610, the middle layer assembly 620 and the upper layer assembly 630 sequentially and respectively include a bottom layer bottom plate, a middle plate 621 and an upper load plate 631, and through holes are formed in the bottom layer bottom plate, the middle plate 621 and the upper load plate 631.
The bottom-layer grating reading head 615 is fixed on the bottom-layer bottom plate 611 through a bottom-axis grating reading head mounting seat 616, the bottom-layer scale grating 628 is fixed on one side edge of the lower part of the middle plate 621, and the bottom-layer scale grating 628 is matched with the bottom-layer grating reading head 615; an upper scale grating 626 is fixed on one side of the upper part of the middle plate 621, an upper scale reading head 637 is fixed on an upper load plate 631 through an upper scale reading head mounting seat 636, and the upper scale grating 626 is matched with the upper scale reading head 637.
The device comprises three upright columns, namely a first upright column 2, a second upright column 3 and a fourth upright column 4, wherein one ends of the three upright columns are fixed on the base, and the XY shaft assembly 6 is fixed at the other ends of the three upright columns.
As shown in fig. 1, the motion platform is based on a stone base 1, the upright columns 1, 2, 3 and the stone beam of the Z-axis assembly are respectively and fixedly mounted with the stone base, the top surfaces of the upright columns 1, 2, 3 are on the same plane, and the XY-axis assembly is respectively and fixedly mounted with the top surfaces of the upright columns 1, 2, 3.
As shown in fig. 2, the XY-motion axis is composed of three-piece structures, and the structures of each layer are connected in a sliding manner through a sliding block and a sliding rail.
As shown in fig. 3, the bottom motor stators 613 of the bottom assembly 610 are respectively mounted on two sides of the bottom plate 611, two first sliding rails 612 are fixedly mounted with the bottom plate 611, and 4 bottom bumpers 614 are respectively fixedly mounted on two ends of the bottom plate 612 for motion damping and stroke limitation of the middle assembly 620. The bottom grating reading head 615 is fixed to the bottom base 611 by a bottom shaft grating reading head mounting base 616. The grating ruler consists of two parts, namely a ruler grating and a grating reading head.
As shown in fig. 4, a first slider 623 is mounted on the bottom surface of the middle plate 621 of the middle layer assembly 620, the first slider 623 is slidably mounted on the first slide rail 612 of the bottom layer assembly, and two bottom layer motor movers 628 are respectively fixedly mounted on two sides of the bottom surface of the middle plate and correspond to the bottom layer motor stator 613 to provide a driving force for the motion platform. The bottom scale grating 626 is adhered to the side of the bottom step of the middle plate 621, corresponding to the bottom grating reading head 615 of the bottom assembly 610, for providing position information feedback of the motion platform, and the upper scale grating 626 is adhered to the side of the upper step of the middle plate 621, corresponding to the upper grating reading head 637 of the upper assembly 630, for providing position information feedback of the motion platform. The 4 first anti-collision blocks 627 are installed on the bottom surface of the middle plate 621 corresponding to the bottom buffer 614 of the bottom assembly. Two sides of the middle plate 620 are provided with (2) upper motor stators 624, and two ends of the upper surface are provided with 4 upper buffers 625 for motion buffering and stroke limitation of the upper assembly 630.
As shown in fig. 5, a second slider 632 is mounted on the bottom surface of the upper load plate 631 of the upper layer assembly 630, the second slider 632 is slidably mounted with the second slide rail 622 of the middle layer assembly 620, and two upper layer motor movers 633 are respectively fixedly mounted on two sides of the bottom surface of the upper load plate 631 and correspond to the upper layer motor stators 624 on the middle layer assembly to provide driving force for the motion platform. The upper grating read head 637 is fixedly mounted to the upper load plate 631 via the upper read head mount 636, and the upper grating read head 637 corresponds to the upper scale grating 626 on the middle layer assembly 620 and is configured to provide position information feedback for the motion stage. 4 second crash blocks 634 are mounted on the bottom surface of the upper load plate 631 corresponding to the upper layer bumper 625 of the middle layer assembly. (wherein the moving direction of the upper module 630 relative to the middle module 620 is perpendicular to the moving direction of the middle module 620 relative to the bottom module 610.) and the upper load plate 631 is provided with an upper cable slot 634 and is shielded by an upper wire shielding plate 638 for receiving cables.
As shown in fig. 6, the Z-axis assembly includes a Z-axis motion platform, a Z-axis motor stator 708 and a third slide rail 703 are respectively mounted on two sides of the stone beam 701, a Z-axis motor mover 705805 and a third slider 704804 are respectively mounted on two sides of the Z-axis load plate 702, the Z-axis motor mover 705805 corresponds to the Z-axis motor stator 708 mounted on the stone beam 701 to provide a driving force for the Z-axis platform, and the third slider 704804 is slidably connected to the third slide rail 703 mounted on the stone beam 701 to provide a support guide for the Z-axis motion platform. Two sides of the stone beam 701 are respectively adhered with a Z-axis scale grating 707, two sides of the Z-axis load plate 702 are fixedly provided with a Z-axis grating reading head 711811 through a Z-axis grating reading head mounting seat 712812, and the Z-axis grating reading head 711811 corresponds to the Z-axis scale grating 707 to provide position information feedback of the Z-axis motion platform. Third collision prevention blocks are installed at two ends of the Z-axis load plate 702, limiting buffers 714 are installed at two ends corresponding to the stone beam 701, and the third collision prevention blocks and the limiting buffers 714 correspond to provide motion buffering and stroke limiting for the Z-axis motion platform. The lower end of the cylinder body of the cylinder 709809 is fixedly mounted with the stone beam 701 through a cylinder fixing seat 713813, the piston rod end of the cylinder 709809 is mounted and connected with the Z-axis load plate 702 through a floating joint 710810 and a cylinder adapter 706, the output force of the two cylinders 709809 is adjusted through the pressure of compressed gas introduced into the cylinder 709809, and therefore the total weight of the Z-axis load plate 702 and the mounting piece on the Z-axis load plate is balanced, and the Z-axis motion platform is guaranteed to run precisely and stably.
The number of modules and the processing scale described herein are intended to simplify the description of the present invention. Applications, modifications and variations of the three-axis hollow precision motion stage of the present invention will be apparent to those skilled in the art.
While the embodiments of the invention have been described above, it is not intended to be limited to the details shown, or described, but rather to cover all modifications, which would come within the scope of the appended claims, and all changes which come within the meaning and range of equivalency of the art are therefore intended to be embraced therein.
Claims (10)
1. Accurate motion platform of triaxial cavity, its characterized in that includes:
the device comprises a base, a detection device and a control device, wherein the base is provided with an area for placing a substance to be detected and is arranged along the horizontal direction;
the three-axis motion platform is arranged on the base and comprises an XY-axis motion platform and a Z-axis motion platform, the XY-axis motion platform can move in two directions which are perpendicular to each other in the horizontal plane, the Z-axis motion platform can move in the vertical direction, through holes are formed in the XY-axis motion platform and the Z-axis motion platform, and the through holes allow detection equipment to pass through and reach the position above an area where the substance to be detected is placed.
2. The three-axis hollow precision motion stage of claim 1, further comprising:
and the XY shaft component is arranged above the area for placing the substance to be detected along the horizontal direction, forms the XY shaft motion platform and performs reciprocating motion along two mutually perpendicular directions in the horizontal plane.
3. The three-axis hollow precision motion stage of claim 1, further comprising:
and the Z shaft assembly is arranged on one side of the area for placing the substances to be detected along the vertical direction, forms the Z shaft motion platform and performs reciprocating motion along the vertical direction.
4. The three-axis hollow precision motion stage as claimed in claim 2, wherein the XY axis assembly comprises a three-piece structure of a bottom layer assembly, a middle layer assembly and a top layer assembly arranged from bottom to top along the vertical direction, each layer of structure is connected with each other by a sliding block and a sliding rail in a sliding manner, the middle layer assembly linearly moves back and forth relative to the bottom layer assembly in a first direction, the top layer assembly linearly moves back and forth relative to the middle layer assembly in a second direction, and the first direction and the second direction are perpendicular to each other.
5. The triaxial hollow precision motion stage of claim 4, wherein the XY axle assembly comprises a bottom floor, a middle plate and an upper load plate, which are provided with through holes, respectively.
6. The three-axis hollow precision motion stage of claim 5, wherein the bottom grating reading head is fixed on the bottom base plate by a bottom axis grating reading head mounting seat, the bottom scale grating is fixed on one side edge of the lower part of the middle plate, and the bottom scale grating is matched with the bottom grating reading head; the upper-layer scale grating is fixed on one side edge of the upper part of the middle plate, the reading head of the upper-layer grating is fixed on the upper load plate through the upper-layer reading head mounting seat, and the upper-layer scale grating is matched with the reading head of the upper-layer grating.
7. The three-axis hollow precision motion stage of claim 1, wherein the XY-axis motion stage is driven by a motor to move in two directions perpendicular to each other, and the Z-axis motion stage is driven by a cylinder to move in a vertical direction.
8. The three-axis hollow precision motion stage of claim 1, wherein the Z-axis motion stage is balanced on both sides by air cylinders.
9. The three-axis hollow precision motion stage of claim 1, further comprising:
and one ends of the three stand columns are fixed on the base, and the XY shaft assembly is fixed at the other ends of the three stand columns.
10. A three-axis hollow precision motion stage as claimed in claim 1, wherein said base is a stone base and each motion stage body frame is made of granite material by precision grinding.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN202122244551.0U CN214843321U (en) | 2021-09-16 | 2021-09-16 | Three-axis hollow precision motion platform |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202122244551.0U CN214843321U (en) | 2021-09-16 | 2021-09-16 | Three-axis hollow precision motion platform |
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| CN214843321U true CN214843321U (en) | 2021-11-23 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117091514A (en) * | 2023-10-19 | 2023-11-21 | 中国科学院长春光学精密机械与物理研究所 | Grating displacement measuring device, method, medium and equipment of double-layer floating reading head |
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2021
- 2021-09-16 CN CN202122244551.0U patent/CN214843321U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117091514A (en) * | 2023-10-19 | 2023-11-21 | 中国科学院长春光学精密机械与物理研究所 | Grating displacement measuring device, method, medium and equipment of double-layer floating reading head |
| CN117091514B (en) * | 2023-10-19 | 2023-12-19 | 中国科学院长春光学精密机械与物理研究所 | Grating displacement measuring device, method, medium and equipment of double-layer floating reading head |
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