CN1534688A

CN1534688A - X-Y objective talbe

Info

Publication number: CN1534688A
Application number: CNA2004100302722A
Authority: CN
Inventors: 内海和晴; 也; 小原达也
Original assignee: Sumitomo Heavy Industries Ltd
Current assignee: Sumitomo Heavy Industries Ltd
Priority date: 2003-03-28
Filing date: 2004-03-23
Publication date: 2004-10-06
Anticipated expiration: 2024-03-23
Also published as: CN100515659C; KR20040086560A; TW200425164A; KR100570445B1; TWI260646B

Abstract

An x-y stage device is provided to obtain the high stop accuracy while reducing expensive components. Two guide rails(110,120) are fixed on a base(100). An Y slider(130) moves through the guide rails by combining with the guide rails. An X slider(140) is combined with the Y slider to move through the Y slider in perpendicularly. The Y slider is moved with separating from the surface of the base by supporting in the guide rails with rolling bearings. The X slider is moved by including the rolling bearing between the Y slider and moved with floating from the surface of the base by including plural static pressure bearings(141143). The stop accuracy is improved by a brake device(190).

Description

The X-Y objective table device

Technical field

The present invention relates to objective table device, particularly relate to and worktable etc. can be driven the X-Y objective table device that object moves along X-direction, Y direction.

Background technology

An example as the X-Y objective table device describes the X-Y objective table device by propositions such as the inventor.This X-Y objective table device is disclosed in the patent documentation 1.

With reference to Fig. 4, the fixed part of X-Y objective table device, thus be that upper surface is carried out the base 20 of Surface Finishing as spigot surface, the

guide rail

21 and 22 that on base 20, disposes with predetermined fixed interval.In Fig. 4, express mutually orthogonal X-axis, Y-axis, three directions of Z

axle.Guide rail

21,22 has respectively along spigot surface 21a, the 22a of Y direction extension, mutual subtend.In the X-Y objective table device, along

spigot surface

21a, 22a in Y direction by the moving part of straight-line guidance, be Y slider 23 and hydrostatic bearing pad 25-1,25-2,25-3,25-4, and hydrostatic bearing pad 27-1,27-2,27-3.Y slider 23 is set up to be configured between

guide rail

21 and 22, has the T shape 23-2 of portion on crossbeam 23-1 that extends along X-direction and the two ends of 23-1.

Hydrostatic bearing pad 25-1～25-4 is respectively via on the side with two T shape 23-2 of portion that are arranged on Y slider 23 around the joint (omitting among the figure) of two degree of freedom of Y-axis and Z axle rotation.Hydrostatic bearing pad 25-1,25-2 are respectively applied for the blowing out pressurised air to spigot surface 21a.Hydrostatic bearing pad 25-3,25-4 are respectively applied for the blowing out pressurised air to spigot surface 22a.Hydrostatic bearing pad 27-1,27-2 be arranged on crossbeam 23-1 a T shape 23-2 of portion below, hydrostatic bearing pad 27-3, be positioned at crossbeam 23-1 below, be set at the position near another T shape 23-2 of portion.Hydrostatic bearing pad 27-1～27-3 is used for blowing out pressurised air above base 20 respectively.

In addition, hydrostatic bearing pad 27-1,27-2 be arranged on respect to the central shaft of Y slider 23, promptly, the central shaft of crossbeam 23-1 is roughly on the position of symmetry.On the other hand, hydrostatic bearing pad 27-3 is arranged on the position corresponding to the central shaft of Y slider 23.That is, hydrostatic bearing pad 27-1～27-3, the mode that forms isosceles triangle with the line segment that connects each center is configured.

In addition, among Fig. 4, one side along Y direction by straight-line guidance one side also along X-direction by the moving part of straight-line guidance, be X slider 24 and hydrostatic bearing pad 25-5,25-6,25-7,25-8 and hydrostatic bearing pad 27-4,27-5,27-6.X slider 24 is being incorporated into along the mode that crossbeam 23-1 moves on the Y slider 23.Crossbeam 23-1, its cross sectional shape are the quadrangle that has along two sides that X-direction is extended.X slider 24, its cross sectional shape are the roughly reverse U shape that has with two inside surfaces of two side subtends of the crossbeam 23-1 of Y slider 23.

Hydrostatic bearing pad 25-5～25-8 is arranged on two inside surfaces of X slider 24 via the joint (omitting among the figure) that has around two degree of freedom of X-axis and Z axle rotation.Hydrostatic bearing pad 27-4～27-6, be set at respectively X slider 24 below.In Y slider 23,, form as the reference field of usefulness that X slider 24 is led along two sides that the X-direction of crossbeam 23-1 is extended.Hydrostatic bearing pad 25-5～25-8 is used for pressurized air is blown out to the side of crossbeam 23-1.Hydrostatic bearing pad 27-4～27-6, be used for pressurized air be blown out to base 20 above.

In this X-Y objective table device,, use at the paired linear motor 31 of formation respectively between guide rail 21 and the Y slider 23, between guide rail 22 and the Y slider 23 as the drive source of Y slider 23.On the other hand, as the drive source of X slider 24, use the linear motor 32 that between Y slider 23 and X slider 24, constitutes.

Linear motor

31,32 has identical structure, for known linear motor 31, carries out simple explanation.Linear motor 31, the gap location that between a plurality of upside permanent magnets of Y direction alignment arrangements and a plurality of downside permanent magnets, produces in the Y direction alignment arrangements, configuration forms from the moving coil (omitting the figure) of the T shape 23-2 of the portion extension of Y slider 23.

In the X-Y objective table device, except that the said structure key element, on each linear motor,, be necessary to assemble linear scale and linear transducer as carrying out the position-detection sensor that position control is used.In addition, need synchronously be driven into the synchronous control system of right linear motor 31 usefulness.And then, also need electric wire and sensor signal wire, hydrostatic bearing pad air pipe arrangement etc. to the linear motor power supply of the Y slider 23 that moves, X slider 24.They all have flexible, are accommodated in the flexible pipe arrangement.Simultaneously, between X slider 24 and the Y slider 23, connect with flexible pipe arrangement, between Y slider 23 and the base 20, connect with flexible pipe arrangement by X slider and Y slider by the X slider.

As described above, in the X-Y of prior art objective table device, for the above-below direction that carries out Y slider (lower shaft) 23 and the guiding of horizontal direction, use a plurality of hydrostatic bearing pads, and, for X slider (going up axle) 24 the above-below direction and the guiding of horizontal direction, also use a plurality of hydrostatic bearing pads, thereby obtain to carry the high mobile accuracy of the workpiece worktable on X slider 23.

Usually, hydrostatic bearing can obtain high mobile accuracy (linearity of horizontal direction and plane of motion degree), but owing to almost do not have static friction, so it stops precision and depends on control performance, needs high price and high-resolution linear scale.Therefore, also have, do not use static pressure guiding, and be to use ball-screw in order to obtain contact friction by force.

Use high-resolution linear scale, because the restriction of its output signal frequency is difficult to obtain simultaneously high-speed.In addition, use ball-screw, under the situation of long stroke,, be difficult to obtain high-speed owing to be subjected to the restriction of cal speed.

On the other hand, under the situation of the stacked objective table that does not use the static pressure guiding, in order to obtain the high plane of motion degree of workpiece worktable, must improve the mobile accuracy of Y slider (lower shaft) by machining, and be out of shape in order not to be accompanied by moving of X slider, its weight needs high rigidity, so can increase inevitably.

Patent documentation 1 spy opens the 2000-155186 communique

Therefore problem of the present invention is, provides a kind of outside the parts that reduce this high price of hydrostatic bearing as much as possible, can obtain the high X-Y objective table device that stops precision.

Another problem of the present invention is to provide a kind of deviation with the plane of motion degree to be suppressed at minimum, and can obtain the high X-Y objective table device that stops precision.

Another one problem of the present invention is, provides a kind of gross mass of moving body little, can obtain the X-Y objective table device of high speed/high acceleration.

Summary of the invention

According to the present invention, a kind of X-Y objective table device is provided, it is characterized in that comprising: the base that carried out surface working; The ways that on this base, is fixed along a direction of principal axis with extending, on this ways, to be combined along mode with the rectangular direction extension of an aforementioned direction of principal axis, and first slider that can on an aforementioned direction of principal axis, move along this ways, can move with an aforementioned direction of principal axis rectangular direction along this first slider, be incorporated into second slider on this first slider, wherein, aforementioned first slider is supported on the aforementioned ways via rolling bearing, can leave aforementioned susceptor surface ground moves, aforementioned second slider, and installing rolling bearing between aforementioned first slider additional also can constitute movably, simultaneously, by a hydrostatic bearing being set at least, can on aforementioned susceptor surface, move with the state that floats from it at lower surface with aforementioned susceptor surface subtend.

In this X-Y objective table device,, at least one arrestment mechanism of the absorption layer formation of the lip-deep decompression type that can be adsorbed onto aforementioned base is set also at the downside of aforementioned second slider.

In aforementioned arrestment mechanism, aforementioned absorption layer is installed to can be on leaf spring approaching, that be out of shape away from the direction of aforementioned susceptor surface what install on aforementioned second slider.

Aforementioned first, second slider in this X-Y objective table device moves as drive source with linear motor respectively.

In addition, in this X-Y objective table device, first, second ways that aforementioned ways extends along an aforementioned direction of principal axis in parallel to each other by separating predetermined space constitutes, aforementioned first slider is erected between aforementioned first, second ways, supports via aforementioned rolling bearing respectively at its both ends.

X-Y objective table device according to the present invention has following effect.

(1) spigot surface owing to the top hydrostatic bearing as above-below direction that the surface can be carried out accurately machined base uses, so, can obtain high plane of motion degree.

(2) in the X-direction of X slider, when Y direction stops, can obtain the high precision that stops by the friction force of rolling bearing.

(3) because the stability when utilizing friction force can obtain the X slider to stop, so, need not high-resolution position transducer, can obtain high translational speed.

(4) compare with X-Y objective table device, because can be by omitting the quality that a plurality of hydrostatic bearing pads alleviate moving body, so, can obtain high acceleration with respect to the thrust of linear motor with Fig. 4 explanation.

(5) because in guidance system that the static pressure guiding and the guiding of rolling is compound, so, compare when all carrying out the static pressure guiding, can reach and reduce cost.

Description of drawings

Fig. 1 is the vertical view of expression according to the form of implementation of X-Y objective table device of the present invention.

Fig. 2 is the X-Y objective table device front view of Fig. 1 of seeing when the downside of Fig. 1 is observed.

Fig. 3 is the diagram that is used for the structure of key diagram 1 described arrestment mechanism.

Fig. 4 is the stereographic map of an example of the X-Y objective table device of prior art.

Symbol description

100 bases; 110,120,131 guide rails

111,121 rolling bearings; 130 Y sliders

140 X sliders; 141～143 hydrostatic bearing pads

150,160 linear motors; 151,153 permanent magnets

200 frameworks

Embodiment

Below, with reference to Fig. 1, Fig. 2, the preferred implementing form according to X-Y objective table device of the present invention is described.

In Fig. 1, Fig. 2, this X-Y objective table device carries out Surface Finishing with upper surface and is fixed on the framework 200 as the base 100 of spigot surface.Base 100 adopts the stone flat board usually.The fixed part of this X-Y objective table device is base 100, and on base 100 with the guide rail 110 and 120 (first, second ways) of predetermined space fixed configurations.In Fig. 1, express mutually orthogonal X-axis, Y-axis both direction.Guide rail 110,120 extends along Y direction respectively.In this X-Y objective table device, along guide rail 11,120 in Y direction by the moving part of straight-line guidance, be Y slider 130.Y slider 130 is configured between guide rail 110 and 120 by being set up, and the rolling bearing 111,121 that two ends by being installed at Y slider 130 respectively and the mode between the guide rail 110,120 are provided with can be supported movably along Y direction.Y slider 130, the upper surface ground that leaves base 100 moves.

In addition, in Fig. 1, can be along Y direction the time, also can comprise X slider 140 along X-direction by the moving part of straight-line guidance, hydrostatic bearing pad 141,142,143 by straight-line guidance.X slider 140 is being assembled into along the mode that Y slider 130 moves on the Y slider 130.That is, Y slider 130 has the guide rail 131 that extends along X-direction.Between this guide rail 131 and X slider 140, by installing the rolling bearing (not shown) same with aforementioned rolling bearing 111,121 additional, X slider 140 can move along Y slider 130.

Hydrostatic bearing pad 141～143 be set at respectively X slider 140 below, blow out pressurized air by upper surface to base 100, X slider 140 is moved from the upper surface of base 100 with floating.Its float-amount is below tens μ m.In other words, hydrostatic bearing pad 141～143, one surface bearing X slider 140 and lift-launch workpiece worktable thereon and whole loads of workpiece (all omitting among the figure) can move them simultaneously.Hydrostatic bearing pad 141～143 is configured on the position corresponding to vertex of a triangle, but leg-of-mutton shape, determines according to the centre of gravity place of the moving part of hydrostatic bearing pad 141～143 supportings.Here, hydrostatic bearing pad 141～143 is configured in the position corresponding to the summit of isosceles triangle.

With the same at X-Y objective table device illustrated in fig. 4, in this X-Y objective table device, drive source as Y slider 130, use respectively and guide rail 110 in abutting connection with between the end of, the fixed part 151 that extends along Y direction and Y slider 130, and, a pair of linear motor 150,160 of formation between the fixed part 161 that extends in abutting connection with guide rail 120, along Y direction and another end of Y slider 130.On the other hand, as the drive source of X slider 140, use the linear motor 170 that between Y slider 130 and X slider 140, constitutes.

Linear motor 150,160,170 has identical structure, owing to be known, so only carry out simple explanation for linear motor.Linear motor 150, in the gap that produces between a plurality of permanent magnets 152,153 of two row with the mode alignment arrangements of subtend on the fixed part 151 that extends along Y direction, configuration is down L shaped moving coil (omitting the figure) and constitutes from what an end of Y slider 130 installed additional.In addition, in linear motor 170, dispose a plurality of permanent magnets, between them, install the moving coil of level additional in the modes of two row up and down.

In this X-Y objective table device, except that the said structure key element, on each linear motor, the position-detection sensor of using as position control, the combination of linear scale and linear transducer is set, but its resolution can be lower than the resolution of position-detection sensor illustrated in fig. 4.Self-evident, be not limited to the combination of linear scale and linear transducer, also can use other known position transducer.In addition, the synchronous control system that comprises a pair of linear motor 150,160 usefulness of driven in synchronism.

And then, need be to the supply lines of the linear motor power supply usefulness of the X slider 140 that moves and the air pipe arrangement that hydrostatic bearing is used, the signal lines of the sensor of Y slider 130, X slider 40.They are all made have flexiblely, be contained in the flexible pipe arrangement.Simultaneously, connect with flexible pipe arrangement with the X slider between X slider 140 and the Y slider 130, between Y slider 130 and the base 100, the flexible pipe arrangement of using with X slider and Y slider connects.In Fig. 1, Fig. 2, expressed the accommodation section 181,182 of the flexible pipe arrangement that the X slider that extends along guide rail 110,120 and Y slider use.

In this form, and then as shown in Figure 2, the worktable (representing with double dot dash line) that will carry thereon of packing on X slider 140 drives or has a plurality of so-called slide wedge (スライ De ウエ Star ジ) mechanism 300 that tilt function is used along Z-direction.

With reference to Fig. 3, in X-Y objective table device according to this form, and then, at the downside of X slider 140, setting can be adsorbed on that the absorption layer 191 of decompression type of the upper surface of base 100 constitutes the arrestment mechanism 190 that (is 2 here) more than.This arrestment mechanism 190, by absorption layer 191 is installed to by on the edge part of being located at hole on the X slider 140 (being dimetric hole here), be mounted in the mode of crossing over this hole, can on the criss-cross leaf spring 192 of approaching, the direction distortion left of base 100, constitute.On absorption layer 191, be connected with malleation with and decompression with air pipe arrangement (omitting among the figure).Absorption layer 191 is blowing out pressurised air on base 100 usually, thereby move the top of tens μ m in the above.On the other hand, when X slider 140 stops, making the following side of absorption layer 191 be in decompression state, with absorption layer 191 be adsorbed onto base 100 above.Whereby, arrestment mechanism 190 plays a part as detent.

According to aforesaid X-Y objective table device, X slider 140 is carried out by 3 hydrostatic bearings smoothly along the mobile guide of the above-below direction on the base 100 (Z-direction).On the other hand,, and install rolling bearing additional between Y slider 130 and the X slider 140, appropriate friction force is arranged in X-direction and Y direction effect by between base 100 and Y slider 130.In addition, by being equipped with the arrestment mechanism that forms by the absorption layer on 100 of bases, moving body stop the control performance that precision does not rely on control system, need not to cost an arm and a leg and high-resolution position transducer.In addition, under the situation of using high-resolution linear scale,, be difficult to obtain at a high speed, but in this X-Y objective table device, do not produce this restriction owing to restriction from output signal frequency.

In addition, in above-mentioned form, Y slider 130 is assembled on the ways 110,120 its two ends, can move, but also can make it and can move only with the ways single arm type supporting Y slider 130 of a side.In this case, can below the free end of Y slider 130, hydrostatic bearing be set, carry out mobile guide.The Y slider of this single arm type is disclosed in the foregoing patent documentation 1.In addition, in above-mentioned form, be called the Y slider with being erected at two sliders between the guide rail, the slider that is fitted thereon is called the X slider, still self-evident, the relation of X, Y also can be put upside down.And then, in above-mentioned form, below X slider 140, have 3 hydrostatic bearing pads, but also can be more than one.

Claims

1, a kind of X-Y objective table device is characterized in that comprising:

Carried out the base of surface working; The ways that on this base, is fixed along a direction of principal axis with extending,

On this ways, with first slider that is combined along the mode of extending with the rectangular direction of an aforementioned direction of principal axis and can on an aforementioned direction of principal axis, moves along this ways,

Can along this first slider move with the rectangular direction of an aforementioned direction of principal axis, be incorporated into second slider on this first slider, wherein,

Aforementioned first slider is supported on the aforementioned ways via rolling bearing, and can leave aforementioned susceptor surface ground and move,

Aforementioned second slider, and installing rolling bearing between aforementioned first slider additional also can constitute movably, simultaneously, by a hydrostatic bearing being set at least, can on aforementioned susceptor surface, move with the state that floats from it at lower surface with aforementioned susceptor surface subtend.

2, X-Y objective table device as claimed in claim 1 is characterized in that, at the downside of aforementioned second slider, at least one arrestment mechanism of the absorption layer formation of the lip-deep decompression type that can be adsorbed onto aforementioned base is set also.

3, X-Y objective table device as claimed in claim 2 is characterized in that, in aforementioned arrestment mechanism, aforementioned absorption layer is installed to can be on leaf spring approaching, that be out of shape away from the direction of aforementioned susceptor surface what install on aforementioned second slider.

4, as each described X-Y objective table device in the claim 1～3, it is characterized in that aforementioned first, second slider moves as drive source with linear motor respectively.

5, as each described X-Y objective table device in the claim 1～4, it is characterized in that, first, second ways that aforementioned ways extends along an aforementioned direction of principal axis in parallel to each other by separating predetermined space constitutes, aforementioned first slider is erected between aforementioned first, second ways, supports via aforementioned rolling bearing respectively at its both ends.