WO2017142102A1 - Movable table system - Google Patents

Abstract

The present disclosure relates to a movable table system comprising: a first linear motor and a second linear motor positioned so as to face the first linear motor, the first and second linear motors comprising a driving unit and moving unit for moving a table in a first direction; a third linear motor and a fourth linear motor positioned so as to face the third linear motor, the third and fourth linear motors comprising a driving unit and moving unit for moving the table in a second direction; a first connecting unit for connecting the first linear motor with the second linear motor; a second connecting unit for connecting the third linear motor with the fourth linear motor; and support units for supporting the first, second, third, and fourth linear motors, the movable table system being characterized by comprising at least one of a first linear guide to a fourth linear guide positioned between the driving units of the first to fourth linear motors and the support units.

Description

Movable table system

The present disclosure relates to a table system that is movable in its entirety, and more particularly to a table system that is movable in two perpendicular directions.

This section provides background information related to the present disclosure which is not necessarily prior art.

Movable table systems, particularly table systems that are movable in two perpendicular directions, are generally known as XY tables.

1 is a view showing an example of the XY table described in Korean Laid-Open Patent Publication No. 2001-0013820.

For convenience of description, reference numerals are newly described.

In FIG. 1, the XY table includes a base 20, a guide rail 21 installed in the X-axis direction on the base 20, a guide rail 22 installed in the Y-axis direction at the ends of the guide rail 21, and a guide rail ( 21, an X-axis table 23 arranged on the X-axis table 23 and movably coupled in the X-axis direction, two guide rollers 24 and 25 disposed on the X-axis table 23, an X-axis driving motor 26, On the X-axis feed screw 27 connected to the X-axis drive motor 26, on the Y-axis table 28, Y-axis table 28, which is disposed on the guide rail 22 and movably coupled in the Y-axis direction Y-axis feed screw 31, X-axis table 23 and Y-axis table 28 connected to the guide rail 29 in the X-axis direction, the Y-axis drive motor 30, and the Y-axis drive motor 30 It includes a top table 32 disposed on. When the XY table 10 drives the X-axis drive motor 26, the X-axis table 23 moves in the X-axis direction through the X-axis feed screw 27 connected to the rotational axis of the X-axis drive motor 26. At the same time, the top table 32 moves in the X-axis direction through the guide rollers 24 and 25 provided on the X-axis table 23. Then, when the Y-axis driving motor 30 is driven, this Y-axis driving The Y-axis table 28 moves in the Y-axis direction through the Y-axis feed screw 31 connected to the motor 30, and the top table 32 disposed on the Y-axis table 28 moves in the Y-axis direction. It moves together with the Y-axis table 28. However, the bottom of the X-axis table 23, the Y-axis table 28 and the base 20 for the movement of the top table 32 in the X-axis direction and the Y-axis direction. There is a need for a structure, and this has a problem that the structure of the XY table 10 is enlarged and weighted as a whole. At least one moving table is disposed under the top table to move, for example, Korean Patent Laid-Open Publication No. 2008-0083297, Korean Patent Laid-Open Publication No. 2000-0006149, and Japanese Patent Laid-Open Publication No. 2005-297189. In many XY tables, at least one or more moving tables are arranged under the top table.

2 is a view showing an example of the XY table described in Korean Patent Publication No. 1520401.

For convenience of description, reference numerals are newly described.

The XY table 100 includes a table 110, a driving unit 122 moving in the X direction 121, a first linear motor 120 including the moving unit 123, and a driving unit 132 moving in the Y direction 131. And a second linear motor 130 including the moving part 133, the support part 160, the first linear guide 140 and the table 110 positioned between the table 110 and the first linear motor 120. And the second linear guide 150 and the third linear guide 170 and the support 160 positioned between the second linear guide 150 and the support 160 and the first linear motor 120 positioned between the second linear motor 130 and the second linear guide 130. And a fourth linear guide 180 positioned between the two linear motors 130. The XY table 100 described in FIG. 2 is an XY table in which the table 110 moves in two directions without a separate moving table for moving the top table below the top table in order to solve the problem of the XY table described in FIG. 1. . However, the XY table of the system described in FIG. 2 has the problem described in FIG.

It is a figure explaining the problem of the XY table of FIG.

The XY table 100 uses the first linear motor 120 and the second linear motor 130 to move the table 110 in the X and Y directions. In addition, the third linear guide 170 and the fourth linear guide to prevent the inertial reaction force generated from the first linear motor 120, the second linear motor 130, and the table 110 from affecting the support unit 160. It includes 180. However, the center of mass 111 of the table 110 has a distance from the thrust lines 121 and 131 of the first linear motor 120 and the second linear motor 130, as shown in FIGS. 3B and 3C. Since the third and fourth linear guides 170 and 180 deviate by d, it is possible to reduce the influence of the inertia reaction forces in the translational directions (the X and Y directions) on the support 160, but the table 110 There is a problem in that the influence of the inertial reaction force in the rotational direction of the) on the support unit 160 can not be reduced.

4 is a diagram showing an example of an XY table described in Japanese Laid-Open Patent Publication No. 2007-19269.

For convenience of description, reference numerals are newly described.

The XY table 200 includes a table 210, a first linear motor 220X and a second linear motor 221X moving in the X direction, a third linear motor 230Y and a fourth linear motor 231Y moving in the Y direction. , X direction inertial reaction force removing means (240, 241) and Y direction inertial reaction force removing means (250). However, the structure is complicated by requiring separate inertial reaction force removing means 240, 241, and 250 for removing the inertial reaction force, and the table 210 and the first control unit are actively controlled by the inertial reaction force removing means 240, 241, and 250. It is very difficult to accurately remove the inertial reaction forces in the translational and rotational directions generated by the first to fourth linear motors 220X, 221X, 230Y, and 231Y.

The present disclosure does not require a movable table located under the top table, which is a problem of the prior art, and provides a movable table system which reduces the influence of the inertial reaction force in the translation direction and the rotation direction inertia on the support portion.

This will be described later in the section titled 'Details of the Invention.'

This section provides a general summary of the disclosure and is not a comprehensive disclosure of its full scope or all, provided that this is a summary of the disclosure. of its features).

According to one aspect of the present disclosure (According to one aspect of the present disclosure), a table; A first linear motor including a driving unit and a moving unit for moving the table in a first direction; A second linear motor including a driving unit and a moving unit for moving the table in a first direction, comprising: a second linear motor positioned to face the first linear motor; A third linear motor including a driving unit and a moving unit for moving the table in a second direction; A fourth linear motor including a driving unit and a moving unit for moving the table in a second direction, comprising: a fourth linear motor positioned to face the third linear motor; A first connection part connecting the first linear motor and the second linear motor; a first connection part coupled to the table and guiding the table in a second direction; A second connection portion connecting the third linear motor and the fourth linear motor; a second connection portion coupled to the table and guiding the table in a first direction; And a support part supporting the first linear motor, the second linear motor, the third linear motor, and the fourth linear motor, wherein the support part is positioned between the driving part and the support part of the first linear motor. A first linear guide guiding in a first direction; A second linear guide positioned between the driving part and the supporting part of the second linear motor to guide the driving part of the second linear motor in a first direction; A third linear guide positioned between the driving part and the supporting part of the third linear motor to guide the driving part of the third linear motor in a second direction; And a fourth linear guide positioned between the driving portion and the supporting portion of the fourth linear motor to guide the driving portion of the fourth linear motor in the second direction; A movable table system is provided that includes at least one of the following.

This will be described later in the section on Embodiments of the Invention.

1 is a view showing an example of an XY table described in Korean Laid-Open Patent Publication No. 2001-0013820;

2 is a view showing an example of an XY table described in Korean Patent Publication No. 1520401,

3 is a view for explaining the problem of the XY table described in FIG.

4 is a view showing an example of an XY table described in Japanese Laid-Open Patent Publication No. 2007-19269;

5 illustrates an example of a movable table system according to the present disclosure;

6 is a view showing an example of use of a movable table system according to the present disclosure;

7 is a view illustrating an example of a linear guide used in the present disclosure;

8 illustrates another example of a movable table system according to the present disclosure;

9 is a view showing another example of a movable table system according to the present disclosure,

10 is a view showing an example of using a movable table system according to the present disclosure in a laser processing apparatus,

11 is a perspective view showing another example of a movable table system according to the present disclosure;

12 illustrates another example of a movable table system according to the present disclosure.

The present disclosure will now be described in detail with reference to the accompanying drawing (s).

5 is a diagram illustrating an example of a movable table system according to the present disclosure. 5 is a plan view.

The movable table system 300 includes a table 310, a first linear motor 330 including a driving unit 331 and a moving unit 332 for reciprocating the table 310 in the first direction 320. The second linear motor 340 including the driving unit 341 and the moving unit 342 to reciprocate the 310 in the first direction 320 and the table 310 to reciprocate in the second direction 321. A third linear motor 350 including a driving unit 351 and a moving unit 352, and a driving unit 361 and a moving unit 362 that reciprocate the table 310 in the second direction 321. Four linear motor 360, the first connecting portion 370 for connecting the first linear motor 330 and the second linear motor 340, for connecting the third linear motor 350 and the fourth linear motor 360 And a support part 380 for supporting the second connection part 371 and the first to fourth linear motors 330, 340, and 350 360, and the driving part 331 and the support part of the first linear motor 330 ( 380 The first linear guide 390 to guide the driving unit 331 of the first linear motor 330 in the first direction 320, the driving unit 341 and the support unit 380 of the second linear motor 340 A second linear guide 391 that is positioned between the second linear guide 391 to guide the driving unit 341 of the second linear motor 340 in the first direction 320, and a driving unit 351 and the supporting unit 380 of the third linear motor 350. ) And a driving part 361 and a supporting part of the third linear guide 392 and the fourth linear motor 360 which are positioned between the third linear guide 392 and the fourth linear motor 360 to guide the driving part 351 of the third linear motor 350 in the second direction 321. And at least one of the fourth linear guides 393 positioned between the 380s to guide the driving unit 361 of the fourth linear motor 360 in the second direction 321.

The table 310 reciprocates in the first direction 320 and the second direction 321, and corresponds to the top table in the XY table of FIG. 1. On the table 310, a laser light source can be placed when used in a laser processing apparatus, a wire bonding head can be placed when used for wire bonding in semiconductor manufacturing, and a substrate can be placed when used in an exposure apparatus. .

The first to fourth linear motors 330, 340, 350, and 360 include driving units 331, 341, 351, and 361 and moving parts 332, 342, 352, and 362. Although not shown in the drawings, it is well known to those skilled in the art that the driving units 331, 341, 351, and 361 and the moving units 332, 342, 352, and 362 are combined with linear guides. In addition, the driving units 331, 341, 351, and 361 are often yokes and permanent magnets, but may be armatures including coils. In addition, the first to fourth linear motors 330, 340, 350, and 360 may reduce the inertia reaction force by using the mass of the driving units 331, 341, 351, and 361 itself, but the reaction and reaction according to the present disclosure may be reduced. Additional mass portions 333, 343, 353, 363 may be included to enhance the function of reducing the inertia reaction force. In addition, the second linear motor 340 is positioned to face the first linear motor 330, and the fourth linear motor 360 is positioned to face the third linear motor 350. The first linear motor 330 and the second linear motor 340 reciprocate the table 310 in the first direction 320, and the third linear motor 350 and the fourth linear motor 360 may have a table ( 310 reciprocates in the second direction 321. Preferably, the first direction 320 and the second direction 321 are perpendicular to each other. In this case, the first direction 320 is referred to as the X direction and the second direction 321 is referred to as the Y direction.

The first connection part 370 is coupled to the moving part 332 of the first linear motor 330, the moving part 342 of the second linear motor 340, and the table 310 so that the moving parts 332 and 342 are provided. The table 310 is reciprocated in the moving first direction 320. The second connection part 371 is coupled to the moving part 352 of the third linear motor 350, the moving part 362 of the fourth linear motor 360, and the table 310 to move the moving parts 352 and 362. The table 310 is reciprocated in the moving second direction 321. A fifth linear guide 394 may be positioned between the first connector 370 and the table 310, and a sixth linear guide 395 may be positioned between the second connector 371 and the table 310. When the first connection part 370 is moved by the sixth linear guide 395 and the table 310 moves in the first direction, the second connection part 371 does not move and the second connection part 371 moves in the first direction. Guide the moving table (310). In addition, when the second connection part 371 is moved by the fifth linear guide 394 and the table 310 moves in the second direction 371, the first connection part 370 does not move and the first connection part 370 is moved. The table 310 moving in the second direction 371 is guided. For convenience of description, the fifth linear guide 394 and the sixth linear guide 395 are shown to be visible. For example, the table 310 may be located inside the table 310 such as the fifth linear guide 394 and the sixth linear guide 395 as shown in the tables 610 and 810 of FIGS. 9 and 11. Do. In the following drawings, the linear guide located inside the table is shown unless there is a special reason.

The support 380 may be any type as long as it supports the first to fourth linear motors 330, 340, 350, and 360. Although only a portion of the support 380 is shown in the drawing, it appears that each of the linear motors 330, 340, 350, and 360 is separate, but the support 380 may be configured as one or may be configured separately.

The first to fourth linear guides 390, 391, 392, and 393 are respectively the driving units 331, 341, 351, and 361 of the first to fourth linear motors 330, 340, 350, and 360. Located between the support parts 380, the driving parts 331, 341, 351, and 361 may move in a direction opposite to the direction in which the moving parts 332, 342, 352, and 362 move, and thereby the table 310 and The influence of the translational and rotational inertia reaction forces generated by the first to fourth linear motors 330, 340, 350, and 360 on the support part 380 may be reduced. Details will be described with reference to FIG. 6.

6 is a view showing an example of the use of a movable table system according to the present disclosure.

FIG. 6A illustrates a case in which the table 310 reciprocates in the second direction 321 while being biased toward the fourth linear motor 360. Since the center of mass of the table 310 is moved toward the fourth linear motor 360 side, the fourth linear motor is higher than the third linear motor 350 in order to perform the acceleration / deceleration movement of the table 310 in the second direction 321. At 360 the greater force should be generated. Accordingly, the distance 400 between the driving unit 361 and the additional mass unit 363 of the fourth linear motor 360 along the fourth linear guide 393 may be different from that of the driving unit 351 of the third linear motor 350. The additional mass portion 353 is larger than the distance 410 moving along the third linear guide 392, thereby reducing transmission of inertial reaction forces in the translational and rotational directions to the support 380. 6B is a diagram illustrating a case in which the table 310 reciprocates in the first direction 320 while being biased toward the second linear motor 340. By the same principle as in FIG. 6 (a), it is possible to reduce transmission of the inertial reaction force in the rotational direction as well as the inertial reaction force in the rotational direction.

7 is a diagram illustrating an example of a linear guide used in the present disclosure.

Linear guide used in the present disclosure is located between the two objects to reduce the friction between the two objects during the relative linear movement of the two objects that can be used as a concept used in the present disclosure as well as the form described in FIG. All are included. For example, it may be one of an air bearing, a magnetic bearing, a ball circulating linear motion guide, a cross roller table, a cam follower and a sliding bearing.

8 is a diagram illustrating another example of a movable table system according to the present disclosure.

The movable table system 500 includes positioning units 510, 511, and 520 at additional mass parts 533, 543, 553, and 563 of the first to fourth linear motors 530, 540, 550, and 560. It is characterized by the addition. The additional mass parts 533, 543, 553, and 563 of the first to fourth linear motors 530, 540, 550, and 560 are the first to fourth linear motors 530, 540, 550, and 560. It is preferable to return to the position before moving after moving by reaction force of the moving parts 532, 542, 552, and 562. To this end, position adjusting units 510, 511, and 520 were added. The position adjusting unit may use the damper 510 and the spring 511 in combination as shown in FIG. 8 (a), or use the actuator 520 as in FIG. 8 (b). Actuator 520 may be a linear motor. The position adjusting units 510, 511, and 520 may be directly connected to the driving units 531, 541, 551, and 561 when there are no additional mass parts 533, 543, 553, and 563. Except as described in FIG. 8, the movable table system 500 described is substantially the same as the movable table system 300 described in FIG. 5.

9 is a view showing another example of a movable table system according to the present disclosure. (A) is a perspective view, and FIG. 9 (b) is sectional drawing along AA '.

FIG. 9 shows only a coupling method of the table 610, the first connector 630, and the second connector 640 in the movable table system 600 for convenience of description. The table 610 includes a first groove 611 formed in the first direction 620 and a second groove 612 formed in the second direction 621. The first groove 611 and the second connector 640 are coupled, and the second groove 612 and the first connector 630 are coupled. In addition, as illustrated in FIG. 9B, the linear guide 650 may be located between the table 610 and the second connection part 640. Although not shown, a linear guide may be positioned between the table 610 and the first connector 630. Except as described in FIG. 9, the movable table system 600 described is substantially the same as the movable table system 300 described in FIG. 5.

10 is a view illustrating an example of using a movable table system according to the present disclosure in a laser processing apparatus.

The movable table system according to the present disclosure is capable of directly attaching and using a laser head that emits laser light to a table and using laser light that comes from a laser head installed outside of the movable table system. 10 shows an example of using a movable table system according to the present disclosure in a laser processing apparatus using an external laser light source. The movable table system 700 having the laser light source installed outside is installed in at least one moving part 732, 742, 752, 762 of the first to fourth linear motors 730, 740, 750, and 760. A path of light entering the table 710 through the first reflector 780 and the first reflector 780 that changes the path 770 of the light coming into the movable table system 700 in the direction of the table 710. And a second reflector 790 installed in the table 710 for changing the path of light to exit 771 from the table 710. Although the path of the light exiting from the table 710 is not shown, it is preferable to exit in a direction perpendicular to the surface 711 of the table 710. The first reflecting portion 780 and the second reflecting portion 790 can be used without limitation as long as the loss of the laser light can be reduced. Mirrors are also possible, for example. In addition, a lens may be added to the table 710 so that the laser light emitted from the second reflector 790 may be more concentrated at a point. FIG. 10 (b) shows the path of light when the first linear motor 730 and the second linear motor 740 operate, and FIG. 10 (c) shows the third linear motor 750 and the fourth linear. FIG. 10 (d) shows a path of light when the first to fourth linear motors 730, 740, 750, and 760 operate together. Giving. 10 (b) to 10 (d) show that externally generated laser light is transferred to a table and used for laser processing. The movable table system 700 described except as described in FIG. 10 is substantially the same as the movable table system 300 described in FIG.

11 is a perspective view showing another example of a movable table system according to the present disclosure.

The movable table system 800 includes a table 810, drives 831, 841, 851, 861, moving parts 832, 842, 852, 862 and additional mass parts 833, 843, 853, 863. The first to fourth linear motors 830, 840, 850, 860, the first to sixth linear guides 890, 891, 892, 893, 894, 895, and the first connection part 870. The second connection portion 871 and the support 880 is included. In addition, in order to control the movable table system 800, the relative displacement between the three parts of the support part, the moving part, and the driving part must be measured, and can be measured using two position sensors. For example, as shown in FIG. 11, the movable table system 800 includes a first position sensor 900 and a driver 831, 841 that measure displacement of the moving parts 832, 842, 852, and 862 with respect to the support part 880. And second position sensor 910 for measuring displacement with respect to support 880 of 851, 861. The relative displacement between the remaining moving parts 832, 842, 852, 862 and the driving parts 831, 841, 851, 861 is obtained using the signals obtained from the first position sensor 900 and the second position sensor 910. You can get it. That is, the first position sensor 900 and the second position sensor 910 are relative displacements between the support part 880 and the moving parts 832, 842, 852, and 862, and the support part 880 and the driving parts 831, 841, and 851. 11 may be positioned as shown in FIG. 11 to measure the relative displacement between and 861, but the relative displacement between the support 880 and the moving parts 832, 842, 852, and 862 and the driving parts 831, 841, 851, 861. ) And the moving parts 832, 842, 852, 862 and the driving parts 831, 841, 851, 861 to measure the relative displacement between the moving parts 832, 842, 852, 862. May be installed (not shown) to measure the relative displacement between the < RTI ID = 0.0 >) and the < / RTI > relative displacement between the support 880 and the drivers 831, 841, 851, 861. Although only two first position sensors 900 and two second position sensors 910 are shown in FIG. 11, the displacements of the moving parts 832, 842, 852, and 862 and the driving parts 831, 841, 851, and 861 are shown. It is located in the moving part and the driving part, respectively, for measurement. The first to fourth linear motors 830, 840, 850, and 860 control the positions of the moving parts 832, 842, 852, and 862 using the first position sensor 900 signal, and the second position sensor. Phase switching of the driving units 831, 841, 851, and 861 is performed using the signal 910 and the signal of the first position sensor 900. The table system 800 described in FIG. 11 also uses a linear motor 930 as a position adjuster. However, the linear motor 930 has only a moving part 930, and the driving part shares the driving parts 831, 841, 851, and 861 of the first to fourth linear motors 830, 840, 850, and 860. In addition, the moving part 930 is fixed to the support part 880 so that the moving part 930 does not move due to the thrust generated by the driving parts 831, 841, 851, 861 and the driving parts 831, 841, 851, 861. Is moved to move the additional portions 833, 843, 853, and 863 connected to the driving units 831, 841, 851, 861 and the driving units 831, 841, 851, 861 to a desired position. 11 also shows a linear guide 896 located between the support 880 and the moving parts 832, 842, 852, 862 of the first to fourth linear motors 830, 840, 850, 860. . The linear guide 896 allows the moving parts 832, 842, 852, and 862 to move more stably. In addition, the combined mass center height of the moving part 832 of the first linear motor 830, the moving part 842 of the second linear motor 840, the first connecting part 870, and the table 810 and the first linear motor The combined height of the center of mass of the driving unit 831 of 830 and the driving unit 841 of the second linear motor 840 is the same as the first height, and the moving unit 852 and the fourth of the third linear motor 850 are the same. The combined center of mass height of the moving part 862, the second connection part 871 and the table 810 of the linear motor 860, and the driving part 851 and the fourth linear motor 860 of the third linear motor 850. It is preferred that the combined center of mass height of the drive 861 be the same as the second height. Furthermore, the height of the thrust lines of the first linear motor 830 and the second linear motor 840 is the first height, and the height of the thrust lines of the third linear motor 850 and the fourth linear motor 860 is the second height. desirable. By making the height of the center of mass and the height of the thrust line the same, it is possible to reduce the rotational inertia reaction that may occur because the height of the center of mass is different when moving in the first direction 820 and the second direction 821. In addition, the height of the thrust line of the linear motor 930 positioned in the first linear motor 830 and the second linear motor 840 and used as a position adjuster has a first height, and the third linear motor 850 and the fourth linear motor. The height of the thrust line of the linear motor 930, which is located at 860 and used as the position adjuster, preferably has a second height. The height of the center of mass and the height of the thrust line are based on the support 880. For example, the height 950 of the center of mass 940 of the driver 841 of the second linear motor 840 may be measured based on the support 880. Except as described in FIG. 11, the movable table system 800 described is substantially the same as the movable table system 300 described in FIG. 5.

12 illustrates another example of a movable table system according to the present disclosure. FIG. 12A is a plan view, and FIG. 12B is a cross-sectional view taken along AA ′.

The movable table system 1000 includes a table 1010, a first linear motor 1030 including a driving unit 1031 and a moving unit 1032 for moving the table 1010 in the first direction 1020, and a table ( The drive part 1051 which moves the 1010 in the 2nd direction 1021, the 2nd linear motor 1040 which contains the moving part 1042, and the drive part 1051 which moves the table 1010 in the 2nd direction 1021. ), A third linear motor 1050 including a moving part 1052, a connecting part 1060 connecting the second linear motor 1040 and the third linear motor 1050, a second linear motor 1040, and a third linear motor 1050. And a support part 1070 supporting the three linear motors 1050, and positioned between the driving part 1031 and the connecting part 1060 of the first linear motor 1030, and the driving part 1031 of the first linear motor 1030. Is positioned between the first linear guide (1080) for guiding the first direction (1020), the driving unit (1041) and the support unit (1070) of the second linear motor (1040). The second linear guide 1081 for guiding the driving unit 1041 of the rotor 1040 in the second direction 1020 and between the driving unit 1051 and the supporting unit 1070 of the third linear motor 1050. At least one of the third linear guide 1082 to guide the driving unit 1051 of the three linear motor 1050 in the second direction (1021). In addition, a fourth linear guide 1083 may be included between the table 1010 and the connecting portion 1060 for the stable reciprocating movement of the table 1010 in the first direction 1020. By installing the first linear motor 1030 on the connecting portion 1060 for reciprocating the table 1010 in the first direction 1020, the overall structure is simpler than the movable table system 300 shown in FIG. Through the first linear guide 1080, the translational and rotational inertial reaction forces generated when the first direction 1020 is moved by the same principle as the movable table system 300 illustrated in FIG. 5 affect the support part 1070. The same effect of reducing the effect can be obtained. However, when the table 1010 is reciprocated in the second direction 1021, the first linear motor 1030 also moves together in addition to the table 1010, so that the second linear motor 1040 and the second direction 1021 move. The third linear motor 1050 should use more output.

Hereinafter, various embodiments of the present disclosure will be described.

(1) table; A first linear motor including a driving unit and a moving unit for moving the table in a first direction; A second linear motor including a driving unit and a moving unit for moving the table in a first direction, comprising: a second linear motor positioned to face the first linear motor; A third linear motor including a driving unit and a moving unit for moving the table in a second direction; A fourth linear motor including a driving unit and a moving unit for moving the table in a second direction, comprising: a fourth linear motor positioned to face the third linear motor; A first connection part connecting the first linear motor and the second linear motor; a first connection part coupled to the table and guiding the table in a second direction; A second connection portion connecting the third linear motor and the fourth linear motor; a second connection portion coupled to the table and guiding the table in a first direction; And a support part supporting the first linear motor, the second linear motor, the third linear motor, and the fourth linear motor, wherein the support part is positioned between the driving part and the support part of the first linear motor. A first linear guide guiding in a first direction; a second linear guide positioned between the driving part and the supporting part of the second linear motor to guide the driving part of the second linear motor in the first direction; A third linear guide positioned between the driving part and the supporting part of the third linear motor to guide the driving part of the third linear motor in a second direction; And a fourth linear guide positioned between the driving portion and the supporting portion of the fourth linear motor to guide the driving portion of the fourth linear motor in the second direction; And at least one of: a movable table system.

(2) The driving unit of the first linear motor, the second linear motor, the third linear motor, and the fourth linear motor is generated by moving the moving parts of the first linear motor, the second linear motor, the third linear motor, and the fourth linear motor. A movable table system, characterized in that the movable portion can move in the opposite direction to the moving direction by the reaction force.

(3) the first linear motor, the second linear motor, the third linear motor and the fourth linear motor in association with at least one driving unit of the first linear motor, the second linear motor, the third linear motor and the fourth linear motor; And a position adjusting unit for moving the driving unit to its original position by the reaction force generated by moving the moving unit.

(4) Movable table system, characterized in that the position adjusting portion includes a damper and a spring.

(5) A movable table system, wherein the position adjusting portion is a linear motor.

(6) a fifth linear guide positioned between the first connection portion and the table to guide the table in a second direction; And a sixth linear guide positioned between the second connection part and the table to guide the table in the first direction. And at least one of: a movable table system.

(7) The movable table system, wherein the first to sixth linear guides are at least one of an air bearing, a magnetic bearing, a ball recirculating linear motion guide, a cross roller table, a cam follower, and a sliding bearing.

(8) The table includes a first groove formed in the first direction and a second groove formed in the second direction, wherein the first groove and the second connection portion are coupled, and the second groove and the first connection portion are coupled. Movable table system.

(9) A movable table system, wherein the first to fourth linear motors comprise additional mass parts.

(10) a first reflector for changing the path of light entering the table system movable from the outside in association with at least one moving unit of the first to fourth linear motors in the table direction; Possible table system.

And a second reflector for changing the path of the light to exit the table from the table through the first reflector in cooperation with the table.

(12) A movable table system, characterized in that the path of light reflected from the second reflecting portion and exiting from the table is perpendicular to the table plane.

(13) a first position sensor for measuring a relative displacement between the support and the moving part and the driving part of the first to fourth linear motors; And a second position sensor.

(14) The first position sensor measures the displacement with respect to the support of the moving parts of the first to fourth linear motors, and the second position sensor measures the displacement with respect to the support of the drive of the first to fourth linear motors. Movable table system, characterized in that for measuring.

(15) The combined center of mass height of the moving part of the first linear motor, the moving part of the second linear motor, the first connecting part and the table, and the combined center of mass height of the driving part of the first linear motor and the driving part of the second linear motor are the first. The same center of mass, the combined center of mass of the moving part of the third linear motor, the moving part of the fourth linear motor, the second connecting part and the table, and the combined center of mass of the driving part of the third linear motor and the driving part of the fourth linear motor. A movable table system, wherein the height is the same as the second height.

(16) The movable table system, wherein the height of the thrust lines of the first linear motor and the second linear motor is the first height, and the height of the thrust lines of the third linear motor and the fourth linear motor is the second height.

(17) tables; A first linear motor including a driving unit and a moving unit for moving the table in a first direction; A second linear motor including a driving unit and a moving unit for moving the table in a second direction; A third linear motor including a driving part and a moving part for moving the table in a second direction; a third linear motor positioned to face the second linear motor; a connection part connecting the second linear motor and the third linear motor; A connection part on which the first linear motor is positioned; And a support part supporting the second and third linear motors, the first linear guide being positioned between the driving part and the connecting part of the first linear motor to guide the driving part of the first linear motor in the first direction. ; A second linear guide positioned between the driving unit and the supporting unit of the second linear motor to guide the driving unit of the second linear motor in a second direction; And a third linear guide positioned between the driving part and the supporting part of the third linear motor to guide the driving part of the third linear motor in the second direction; And at least one of: a movable table system.

And (18) a fourth linear guide positioned between the table and the connecting portion to guide the table in the first direction.

According to the movable table system according to the present disclosure, it is possible to create a movable table system in which the influence of the inertial reaction forces in the translational and rotational directions on the support portion is reduced.

Claims (18)

1. table;

   A first linear motor including a driving unit and a moving unit for moving the table in a first direction;

   A second linear motor including a driving unit and a moving unit for moving the table in a first direction, comprising: a second linear motor positioned to face the first linear motor;

   A third linear motor including a driving unit and a moving unit for moving the table in a second direction;

   A fourth linear motor including a driving unit and a moving unit for moving the table in a second direction, comprising: a fourth linear motor positioned to face the third linear motor;

   A first connection part connecting the first linear motor and the second linear motor; a first connection part coupled to the table and guiding the table in a second direction;

   A second connection portion connecting the third linear motor and the fourth linear motor; a second connection portion coupled to the table and guiding the table in a first direction; And,

   And a support for supporting the first linear motor, the second linear motor, the third linear motor, and the fourth linear motor.

   A first linear guide positioned between the driving part and the supporting part of the first linear motor to guide the driving part of the first linear motor in a first direction;

   A second linear guide positioned between the driving part and the supporting part of the second linear motor to guide the driving part of the second linear motor in a first direction;

   A third linear guide positioned between the driving part and the supporting part of the third linear motor to guide the driving part of the third linear motor in a second direction; And,

   A fourth linear guide positioned between the driving part and the supporting part of the fourth linear motor to guide the driving part of the fourth linear motor in a second direction; And at least one of: a movable table system.
2. The method according to claim 1,

   The driving portions of the first linear motor, the second linear motor, the third linear motor, and the fourth linear motor are driven by reaction forces generated by moving the moving parts of the first linear motor, the second linear motor, the third linear motor, and the fourth linear motor. Movable table system, characterized in that each of the moving parts to move in the opposite direction of the moving direction.
3. The method according to claim 2,

   The moving parts of the first linear motor, the second linear motor, the third linear motor and the fourth linear motor move in conjunction with at least one driving unit of the first linear motor, the second linear motor, the third linear motor, and the fourth linear motor. And a position adjusting unit for moving the driving unit moved to the original position by the generated reaction force.
4. The method according to claim 3,

   Movable table system, characterized in that the position adjustment portion includes a damper and a spring.
5. The method according to claim 3,

   A movable table system, characterized in that the position adjusting portion is a linear motor.
6. The method according to claim 1,

   A fifth linear guide positioned between the first connection portion and the table to guide the table in a second direction; And,

   A sixth linear guide positioned between the second connection part and the table to guide the table in a first direction; And at least one of: a movable table system.
7. The method according to claim 6,

   And the first to sixth linear guides are at least one of an air bearing, a magnetic bearing, a ball recirculating linear motion guide, a cross roller table, a cam follower, and a sliding bearing.
8. The method according to claim 1,

   The table includes a first groove formed in the first direction and a second groove formed in the second direction, wherein the movable table combines the first groove and the second connection part and the second groove and the first connection part. system.
9. The method according to claim 1,

   A movable table system, wherein the first to fourth linear motors comprise additional mass parts.
10. The method according to claim 1,

    A movable table system, comprising: a first reflector for changing a path of light entering the table system movable from the outside in a table direction in association with at least one moving unit among the first linear motor and the fourth linear motor. .
11. The method according to claim 10,

    And a second reflector configured to change a path of light to exit the table from the table through the first reflector in association with the table.
12. The method according to claim 11,

    And the path of the light reflected from the second reflector to the table is perpendicular to the table plane.
13. The method according to claim 1,

    A first position sensor for measuring a relative displacement between the support, the moving portions of the first to fourth linear motors, and the three driving portions; And a second position sensor.
14. The method according to claim 13,

    The first position sensor measures the displacement of the support of the moving parts of the first to fourth linear motors, and the second position sensor measures the displacement of the support of the drive of the first to fourth linear motors. Movable table system characterized.
15. The method according to claim 1,

    The combined center of mass height of the moving part of the first linear motor, the moving part of the second linear motor, the first connecting part and the table and the combined center of mass height of the driving part of the first linear motor and the driving part of the second linear motor are the first height. The same, the combined center of mass height of the moving part of the third linear motor, the moving part of the fourth linear motor, the second connecting part and the table and the combined center of mass height of the driving part of the third linear motor and the driving part of the fourth linear motor are Movable table system, characterized by two heights equal.
16. The method according to claim 15,

    The height of the thrust lines of the first linear motor and the second linear motor is a first height, the height of the thrust lines of the third linear motor and the fourth linear motor is a second height.
17. table;

    A first linear motor including a driving unit and a moving unit for moving the table in a first direction;

    A second linear motor including a driving unit and a moving unit for moving the table in a second direction;

    A third linear motor including a driving unit and a moving unit for moving the table in a second direction, comprising: a third linear motor positioned to face the second linear motor;

    A connecting portion connecting the second linear motor and the third linear motor, the connecting portion having the first linear motor positioned on the connecting portion; And,

    Includes; support for supporting the second liner motor and the third linear motor,

    A first linear guide positioned between the driving unit and the connecting unit of the first linear motor to guide the driving unit of the first linear motor in a first direction;

    A second linear guide positioned between the driving unit and the supporting unit of the second linear motor to guide the driving unit of the second linear motor in a second direction; And,

    A third linear guide positioned between the driving part and the supporting part of the third linear motor to guide the driving part of the third linear motor in a second direction; And at least one of: a movable table system.
18. The method according to claim 17,

    And a fourth linear guide positioned between the table and the connecting portion to guide the table in a first direction.

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