WO2017142102A1 - Système de table mobile - Google Patents

Système de table mobile Download PDF

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Publication number
WO2017142102A1
WO2017142102A1 PCT/KR2016/001507 KR2016001507W WO2017142102A1 WO 2017142102 A1 WO2017142102 A1 WO 2017142102A1 KR 2016001507 W KR2016001507 W KR 2016001507W WO 2017142102 A1 WO2017142102 A1 WO 2017142102A1
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WO
WIPO (PCT)
Prior art keywords
linear motor
linear
moving
guide
driving
Prior art date
Application number
PCT/KR2016/001507
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English (en)
Korean (ko)
Inventor
방영봉
Original Assignee
재단법인차세대융합기술연구원
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Publication of WO2017142102A1 publication Critical patent/WO2017142102A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/62—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
    • B23Q5/22—Feeding members carrying tools or work
    • B23Q5/28—Electric drives
    • G—PHYSICS
    • G12—INSTRUMENT DETAILS
    • G12B—CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G12B5/00—Adjusting position or attitude, e.g. level, of instruments or other apparatus, or of parts thereof; Compensating for the effects of tilting or acceleration, e.g. for optical apparatus

Definitions

  • the present disclosure relates to a table system that is movable in its entirety, and more particularly to a table system that is movable in two perpendicular directions.
  • Movable table systems particularly table systems that are movable in two perpendicular directions, are generally known as XY tables.
  • 1 is a view showing an example of the XY table described in Korean Laid-Open Patent Publication No. 2001-0013820.
  • the XY table includes a base 20, a guide rail 21 installed in the X-axis direction on the base 20, a guide rail 22 installed in the Y-axis direction at the ends of the guide rail 21, and a guide rail ( 21, an X-axis table 23 arranged on the X-axis table 23 and movably coupled in the X-axis direction, two guide rollers 24 and 25 disposed on the X-axis table 23, an X-axis driving motor 26, On the X-axis feed screw 27 connected to the X-axis drive motor 26, on the Y-axis table 28, Y-axis table 28, which is disposed on the guide rail 22 and movably coupled in the Y-axis direction Y-axis feed screw 31, X-axis table 23 and Y-axis table 28 connected to the guide rail 29 in the X-axis direction, the Y-axis drive motor 30, and the Y-axis drive motor 30 It includes a top table 32 disposed on.
  • the XY table 10 drives the X-axis drive motor 26, the X-axis table 23 moves in the X-axis direction through the X-axis feed screw 27 connected to the rotational axis of the X-axis drive motor 26.
  • the top table 32 moves in the X-axis direction through the guide rollers 24 and 25 provided on the X-axis table 23.
  • this Y-axis driving The Y-axis table 28 moves in the Y-axis direction through the Y-axis feed screw 31 connected to the motor 30, and the top table 32 disposed on the Y-axis table 28 moves in the Y-axis direction.
  • At least one moving table is disposed under the top table to move, for example, Korean Patent Laid-Open Publication No. 2008-0083297, Korean Patent Laid-Open Publication No. 2000-0006149, and Japanese Patent Laid-Open Publication No. 2005-297189.
  • at least one or more moving tables are arranged under the top table.
  • FIG. 2 is a view showing an example of the XY table described in Korean Patent Publication No. 1520401.
  • the XY table 100 includes a table 110, a driving unit 122 moving in the X direction 121, a first linear motor 120 including the moving unit 123, and a driving unit 132 moving in the Y direction 131. And a second linear motor 130 including the moving part 133, the support part 160, the first linear guide 140 and the table 110 positioned between the table 110 and the first linear motor 120. And the second linear guide 150 and the third linear guide 170 and the support 160 positioned between the second linear guide 150 and the support 160 and the first linear motor 120 positioned between the second linear motor 130 and the second linear guide 130. And a fourth linear guide 180 positioned between the two linear motors 130.
  • FIG. 2 is an XY table in which the table 110 moves in two directions without a separate moving table for moving the top table below the top table in order to solve the problem of the XY table described in FIG. 1. .
  • the XY table of the system described in FIG. 2 has the problem described in FIG.
  • the XY table 100 uses the first linear motor 120 and the second linear motor 130 to move the table 110 in the X and Y directions.
  • the third linear guide 170 and the fourth linear guide to prevent the inertial reaction force generated from the first linear motor 120, the second linear motor 130, and the table 110 from affecting the support unit 160. It includes 180.
  • the center of mass 111 of the table 110 has a distance from the thrust lines 121 and 131 of the first linear motor 120 and the second linear motor 130, as shown in FIGS. 3B and 3C.
  • FIG. 4 is a diagram showing an example of an XY table described in Japanese Laid-Open Patent Publication No. 2007-19269.
  • the XY table 200 includes a table 210, a first linear motor 220X and a second linear motor 221X moving in the X direction, a third linear motor 230Y and a fourth linear motor 231Y moving in the Y direction. , X direction inertial reaction force removing means (240, 241) and Y direction inertial reaction force removing means (250).
  • X direction inertial reaction force removing means 240, 241
  • Y direction inertial reaction force removing means 250
  • the structure is complicated by requiring separate inertial reaction force removing means 240, 241, and 250 for removing the inertial reaction force, and the table 210 and the first control unit are actively controlled by the inertial reaction force removing means 240, 241, and 250. It is very difficult to accurately remove the inertial reaction forces in the translational and rotational directions generated by the first to fourth linear motors 220X, 221X, 230Y, and 231Y.
  • the present disclosure does not require a movable table located under the top table, which is a problem of the prior art, and provides a movable table system which reduces the influence of the inertial reaction force in the translation direction and the rotation direction inertia on the support portion.
  • a table comprising: A first linear motor including a driving unit and a moving unit for moving the table in a first direction;
  • a support part supporting the first linear motor, the second linear motor, the third linear motor, and the fourth linear motor, wherein the support part
  • a movable table system is provided that includes at least one of the following.
  • 1 is a view showing an example of an XY table described in Korean Laid-Open Patent Publication No. 2001-0013820;
  • FIG. 2 is a view showing an example of an XY table described in Korean Patent Publication No. 1520401,
  • FIG. 3 is a view for explaining the problem of the XY table described in FIG.
  • FIG. 5 illustrates an example of a movable table system according to the present disclosure
  • FIG. 6 is a view showing an example of use of a movable table system according to the present disclosure.
  • FIG. 7 is a view illustrating an example of a linear guide used in the present disclosure.
  • FIG. 8 illustrates another example of a movable table system according to the present disclosure
  • FIG. 9 is a view showing another example of a movable table system according to the present disclosure.
  • FIG. 10 is a view showing an example of using a movable table system according to the present disclosure in a laser processing apparatus
  • FIG. 11 is a perspective view showing another example of a movable table system according to the present disclosure.
  • FIG. 12 illustrates another example of a movable table system according to the present disclosure.
  • 5 is a diagram illustrating an example of a movable table system according to the present disclosure. 5 is a plan view.
  • the movable table system 300 includes a table 310, a first linear motor 330 including a driving unit 331 and a moving unit 332 for reciprocating the table 310 in the first direction 320.
  • the second linear motor 340 including the driving unit 341 and the moving unit 342 to reciprocate the 310 in the first direction 320 and the table 310 to reciprocate in the second direction 321.
  • a third linear motor 350 including a driving unit 351 and a moving unit 352, and a driving unit 361 and a moving unit 362 that reciprocate the table 310 in the second direction 321.
  • the table 310 reciprocates in the first direction 320 and the second direction 321, and corresponds to the top table in the XY table of FIG. 1.
  • a laser light source can be placed when used in a laser processing apparatus
  • a wire bonding head can be placed when used for wire bonding in semiconductor manufacturing
  • a substrate can be placed when used in an exposure apparatus. .
  • the first to fourth linear motors 330, 340, 350, and 360 include driving units 331, 341, 351, and 361 and moving parts 332, 342, 352, and 362. Although not shown in the drawings, it is well known to those skilled in the art that the driving units 331, 341, 351, and 361 and the moving units 332, 342, 352, and 362 are combined with linear guides. In addition, the driving units 331, 341, 351, and 361 are often yokes and permanent magnets, but may be armatures including coils. In addition, the first to fourth linear motors 330, 340, 350, and 360 may reduce the inertia reaction force by using the mass of the driving units 331, 341, 351, and 361 itself, but the reaction and reaction according to the present disclosure may be reduced.
  • Additional mass portions 333, 343, 353, 363 may be included to enhance the function of reducing the inertia reaction force.
  • the second linear motor 340 is positioned to face the first linear motor 330
  • the fourth linear motor 360 is positioned to face the third linear motor 350.
  • the first linear motor 330 and the second linear motor 340 reciprocate the table 310 in the first direction 320
  • the third linear motor 350 and the fourth linear motor 360 may have a table ( 310 reciprocates in the second direction 321.
  • the first direction 320 and the second direction 321 are perpendicular to each other.
  • the first direction 320 is referred to as the X direction
  • the second direction 321 is referred to as the Y direction.
  • the first connection part 370 is coupled to the moving part 332 of the first linear motor 330, the moving part 342 of the second linear motor 340, and the table 310 so that the moving parts 332 and 342 are provided.
  • the table 310 is reciprocated in the moving first direction 320.
  • the second connection part 371 is coupled to the moving part 352 of the third linear motor 350, the moving part 362 of the fourth linear motor 360, and the table 310 to move the moving parts 352 and 362.
  • the table 310 is reciprocated in the moving second direction 321.
  • a fifth linear guide 394 may be positioned between the first connector 370 and the table 310, and a sixth linear guide 395 may be positioned between the second connector 371 and the table 310.
  • the second connection part 371 does not move and the second connection part 371 moves in the first direction.
  • the second connection part 371 is moved by the fifth linear guide 394 and the table 310 moves in the second direction 371, the first connection part 370 does not move and the first connection part 370 is moved.
  • the table 310 moving in the second direction 371 is guided.
  • the fifth linear guide 394 and the sixth linear guide 395 are shown to be visible.
  • the table 310 may be located inside the table 310 such as the fifth linear guide 394 and the sixth linear guide 395 as shown in the tables 610 and 810 of FIGS. 9 and 11. Do.
  • the linear guide located inside the table is shown unless there is a special reason.
  • the support 380 may be any type as long as it supports the first to fourth linear motors 330, 340, 350, and 360. Although only a portion of the support 380 is shown in the drawing, it appears that each of the linear motors 330, 340, 350, and 360 is separate, but the support 380 may be configured as one or may be configured separately.
  • the first to fourth linear guides 390, 391, 392, and 393 are respectively the driving units 331, 341, 351, and 361 of the first to fourth linear motors 330, 340, 350, and 360. Located between the support parts 380, the driving parts 331, 341, 351, and 361 may move in a direction opposite to the direction in which the moving parts 332, 342, 352, and 362 move, and thereby the table 310 and The influence of the translational and rotational inertia reaction forces generated by the first to fourth linear motors 330, 340, 350, and 360 on the support part 380 may be reduced. Details will be described with reference to FIG. 6.
  • FIG. 6 is a view showing an example of the use of a movable table system according to the present disclosure.
  • FIG. 6A illustrates a case in which the table 310 reciprocates in the second direction 321 while being biased toward the fourth linear motor 360. Since the center of mass of the table 310 is moved toward the fourth linear motor 360 side, the fourth linear motor is higher than the third linear motor 350 in order to perform the acceleration / deceleration movement of the table 310 in the second direction 321. At 360 the greater force should be generated. Accordingly, the distance 400 between the driving unit 361 and the additional mass unit 363 of the fourth linear motor 360 along the fourth linear guide 393 may be different from that of the driving unit 351 of the third linear motor 350.
  • the additional mass portion 353 is larger than the distance 410 moving along the third linear guide 392, thereby reducing transmission of inertial reaction forces in the translational and rotational directions to the support 380.
  • 6B is a diagram illustrating a case in which the table 310 reciprocates in the first direction 320 while being biased toward the second linear motor 340. By the same principle as in FIG. 6 (a), it is possible to reduce transmission of the inertial reaction force in the rotational direction as well as the inertial reaction force in the rotational direction.
  • FIG. 7 is a diagram illustrating an example of a linear guide used in the present disclosure.
  • Linear guide used in the present disclosure is located between the two objects to reduce the friction between the two objects during the relative linear movement of the two objects that can be used as a concept used in the present disclosure as well as the form described in FIG. All are included.
  • it may be one of an air bearing, a magnetic bearing, a ball circulating linear motion guide, a cross roller table, a cam follower and a sliding bearing.
  • FIG. 8 is a diagram illustrating another example of a movable table system according to the present disclosure.
  • the movable table system 500 includes positioning units 510, 511, and 520 at additional mass parts 533, 543, 553, and 563 of the first to fourth linear motors 530, 540, 550, and 560. It is characterized by the addition.
  • the additional mass parts 533, 543, 553, and 563 of the first to fourth linear motors 530, 540, 550, and 560 are the first to fourth linear motors 530, 540, 550, and 560. It is preferable to return to the position before moving after moving by reaction force of the moving parts 532, 542, 552, and 562. To this end, position adjusting units 510, 511, and 520 were added.
  • the position adjusting unit may use the damper 510 and the spring 511 in combination as shown in FIG. 8 (a), or use the actuator 520 as in FIG. 8 (b).
  • Actuator 520 may be a linear motor.
  • the position adjusting units 510, 511, and 520 may be directly connected to the driving units 531, 541, 551, and 561 when there are no additional mass parts 533, 543, 553, and 563. Except as described in FIG. 8, the movable table system 500 described is substantially the same as the movable table system 300 described in FIG. 5.
  • FIG. 9 is a view showing another example of a movable table system according to the present disclosure.
  • (A) is a perspective view
  • FIG. 9 (b) is sectional drawing along AA '.
  • FIG. 9 shows only a coupling method of the table 610, the first connector 630, and the second connector 640 in the movable table system 600 for convenience of description.
  • the table 610 includes a first groove 611 formed in the first direction 620 and a second groove 612 formed in the second direction 621.
  • the first groove 611 and the second connector 640 are coupled, and the second groove 612 and the first connector 630 are coupled.
  • the linear guide 650 may be located between the table 610 and the second connection part 640.
  • a linear guide may be positioned between the table 610 and the first connector 630.
  • the movable table system 600 described is substantially the same as the movable table system 300 described in FIG. 5.
  • FIG. 10 is a view illustrating an example of using a movable table system according to the present disclosure in a laser processing apparatus.
  • the movable table system according to the present disclosure is capable of directly attaching and using a laser head that emits laser light to a table and using laser light that comes from a laser head installed outside of the movable table system.
  • 10 shows an example of using a movable table system according to the present disclosure in a laser processing apparatus using an external laser light source.
  • the movable table system 700 having the laser light source installed outside is installed in at least one moving part 732, 742, 752, 762 of the first to fourth linear motors 730, 740, 750, and 760.
  • a second reflector 790 installed in the table 710 for changing the path of light to exit 771 from the table 710.
  • the first reflecting portion 780 and the second reflecting portion 790 can be used without limitation as long as the loss of the laser light can be reduced. Mirrors are also possible, for example.
  • a lens may be added to the table 710 so that the laser light emitted from the second reflector 790 may be more concentrated at a point.
  • FIG. 10 (b) shows the path of light when the first linear motor 730 and the second linear motor 740 operate, and FIG.
  • FIG. 10 (c) shows the third linear motor 750 and the fourth linear.
  • FIG. 10 (d) shows a path of light when the first to fourth linear motors 730, 740, 750, and 760 operate together. Giving. 10 (b) to 10 (d) show that externally generated laser light is transferred to a table and used for laser processing.
  • the movable table system 700 described except as described in FIG. 10 is substantially the same as the movable table system 300 described in FIG.
  • FIG. 11 is a perspective view showing another example of a movable table system according to the present disclosure.
  • the movable table system 800 includes a table 810, drives 831, 841, 851, 861, moving parts 832, 842, 852, 862 and additional mass parts 833, 843, 853, 863.
  • the second connection portion 871 and the support 880 is included.
  • the relative displacement between the three parts of the support part, the moving part, and the driving part must be measured, and can be measured using two position sensors. For example, as shown in FIG.
  • the movable table system 800 includes a first position sensor 900 and a driver 831, 841 that measure displacement of the moving parts 832, 842, 852, and 862 with respect to the support part 880. And second position sensor 910 for measuring displacement with respect to support 880 of 851, 861.
  • the relative displacement between the remaining moving parts 832, 842, 852, 862 and the driving parts 831, 841, 851, 861 is obtained using the signals obtained from the first position sensor 900 and the second position sensor 910. You can get it. That is, the first position sensor 900 and the second position sensor 910 are relative displacements between the support part 880 and the moving parts 832, 842, 852, and 862, and the support part 880 and the driving parts 831, 841, and 851.
  • FIG. 11 may be positioned as shown in FIG. 11 to measure the relative displacement between and 861, but the relative displacement between the support 880 and the moving parts 832, 842, 852, and 862 and the driving parts 831, 841, 851, 861.
  • first position sensors 900 and two second position sensors 910 are shown in FIG. 11, the displacements of the moving parts 832, 842, 852, and 862 and the driving parts 831, 841, 851, and 861 are shown. It is located in the moving part and the driving part, respectively, for measurement.
  • the first to fourth linear motors 830, 840, 850, and 860 control the positions of the moving parts 832, 842, 852, and 862 using the first position sensor 900 signal, and the second position sensor. Phase switching of the driving units 831, 841, 851, and 861 is performed using the signal 910 and the signal of the first position sensor 900.
  • the table system 800 described in FIG. 11 also uses a linear motor 930 as a position adjuster.
  • the linear motor 930 has only a moving part 930, and the driving part shares the driving parts 831, 841, 851, and 861 of the first to fourth linear motors 830, 840, 850, and 860.
  • the moving part 930 is fixed to the support part 880 so that the moving part 930 does not move due to the thrust generated by the driving parts 831, 841, 851, 861 and the driving parts 831, 841, 851, 861. Is moved to move the additional portions 833, 843, 853, and 863 connected to the driving units 831, 841, 851, 861 and the driving units 831, 841, 851, 861 to a desired position.
  • FIG. 11 also shows a linear guide 896 located between the support 880 and the moving parts 832, 842, 852, 862 of the first to fourth linear motors 830, 840, 850, 860. .
  • the linear guide 896 allows the moving parts 832, 842, 852, and 862 to move more stably.
  • the combined height of the center of mass of the driving unit 831 of 830 and the driving unit 841 of the second linear motor 840 is the same as the first height, and the moving unit 852 and the fourth of the third linear motor 850 are the same.
  • the height of the thrust line of the linear motor 930 positioned in the first linear motor 830 and the second linear motor 840 and used as a position adjuster has a first height
  • the third linear motor 850 and the fourth linear motor preferably has a second height.
  • the height of the center of mass and the height of the thrust line are based on the support 880.
  • the height 950 of the center of mass 940 of the driver 841 of the second linear motor 840 may be measured based on the support 880.
  • the movable table system 800 described is substantially the same as the movable table system 300 described in FIG. 5.
  • FIG. 12 illustrates another example of a movable table system according to the present disclosure.
  • FIG. 12A is a plan view
  • FIG. 12B is a cross-sectional view taken along AA ′.
  • the movable table system 1000 includes a table 1010, a first linear motor 1030 including a driving unit 1031 and a moving unit 1032 for moving the table 1010 in the first direction 1020, and a table ( The drive part 1051 which moves the 1010 in the 2nd direction 1021, the 2nd linear motor 1040 which contains the moving part 1042, and the drive part 1051 which moves the table 1010 in the 2nd direction 1021. ), A third linear motor 1050 including a moving part 1052, a connecting part 1060 connecting the second linear motor 1040 and the third linear motor 1050, a second linear motor 1040, and a third linear motor 1050.
  • a support part 1070 supporting the three linear motors 1050 and positioned between the driving part 1031 and the connecting part 1060 of the first linear motor 1030, and the driving part 1031 of the first linear motor 1030. Is positioned between the first linear guide (1080) for guiding the first direction (1020), the driving unit (1041) and the support unit (1070) of the second linear motor (1040).
  • At least one of the third linear guide 1082 to guide the driving unit 1051 of the three linear motor 1050 in the second direction (1021).
  • a fourth linear guide 1083 may be included between the table 1010 and the connecting portion 1060 for the stable reciprocating movement of the table 1010 in the first direction 1020.
  • the first linear motor 1030 By installing the first linear motor 1030 on the connecting portion 1060 for reciprocating the table 1010 in the first direction 1020, the overall structure is simpler than the movable table system 300 shown in FIG.
  • the first linear guide 1080 Through the first linear guide 1080, the translational and rotational inertial reaction forces generated when the first direction 1020 is moved by the same principle as the movable table system 300 illustrated in FIG. 5 affect the support part 1070. The same effect of reducing the effect can be obtained.
  • the first linear motor 1030 when the table 1010 is reciprocated in the second direction 1021, the first linear motor 1030 also moves together in addition to the table 1010, so that the second linear motor 1040 and the second direction 1021 move.
  • the third linear motor 1050 should use more output.
  • a first linear motor including a driving unit and a moving unit for moving the table in a first direction
  • a second linear motor including a driving unit and a moving unit for moving the table in a first direction, comprising: a second linear motor positioned to face the first linear motor
  • a third linear motor including a driving unit and a moving unit for moving the table in a second direction
  • a fourth linear motor including a driving unit and a moving unit for moving the table in a second direction, comprising: a fourth linear motor positioned to face the third linear motor;
  • a second connection portion connecting the third linear motor and the fourth linear motor; a second connection portion coupled to the table and guiding the table in a first direction;
  • a support part supporting the first linear motor, the second linear motor, the third linear motor, and the fourth linear motor, wherein the support part is positioned between the driving part and the support part of the first linear
  • the driving unit of the first linear motor, the second linear motor, the third linear motor, and the fourth linear motor is generated by moving the moving parts of the first linear motor, the second linear motor, the third linear motor, and the fourth linear motor.
  • a movable table system characterized in that the movable portion can move in the opposite direction to the moving direction by the reaction force.
  • a movable table system wherein the position adjusting portion is a linear motor.
  • (6) a fifth linear guide positioned between the first connection portion and the table to guide the table in a second direction; And a sixth linear guide positioned between the second connection part and the table to guide the table in the first direction. And at least one of: a movable table system.
  • first to sixth linear guides are at least one of an air bearing, a magnetic bearing, a ball recirculating linear motion guide, a cross roller table, a cam follower, and a sliding bearing.
  • the table includes a first groove formed in the first direction and a second groove formed in the second direction, wherein the first groove and the second connection portion are coupled, and the second groove and the first connection portion are coupled. Movable table system.
  • a second reflector for changing the path of the light to exit the table from the table through the first reflector in cooperation with the table.
  • a movable table system characterized in that the path of light reflected from the second reflecting portion and exiting from the table is perpendicular to the table plane.
  • a first position sensor for measuring a relative displacement between the support and the moving part and the driving part of the first to fourth linear motors; And a second position sensor.
  • the first position sensor measures the displacement with respect to the support of the moving parts of the first to fourth linear motors
  • the second position sensor measures the displacement with respect to the support of the drive of the first to fourth linear motors.
  • Movable table system characterized in that for measuring.
  • the combined center of mass height of the moving part of the first linear motor, the moving part of the second linear motor, the first connecting part and the table, and the combined center of mass height of the driving part of the first linear motor and the driving part of the second linear motor are the first.
  • a first linear motor including a driving unit and a moving unit for moving the table in a first direction
  • a second linear motor including a driving unit and a moving unit for moving the table in a second direction
  • a third linear motor including a driving part and a moving part for moving the table in a second direction
  • a third linear motor positioned to face the second linear motor
  • a connection part connecting the second linear motor and the third linear motor A connection part on which the first linear motor is positioned;
  • a support part supporting the second and third linear motors, the first linear guide being positioned between the driving part and the connecting part of the first linear motor to guide the driving part of the first linear motor in the first direction.
  • a second linear guide positioned between the driving unit and the supporting unit of the second linear motor to guide the driving unit of the second linear motor in a second direction
  • a third linear guide positioned between the driving part and the supporting part of the third linear motor to guide the driving part of the third linear motor in the second direction
  • the movable table system According to the movable table system according to the present disclosure, it is possible to create a movable table system in which the influence of the inertial reaction forces in the translational and rotational directions on the support portion is reduced.

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Abstract

La présente invention concerne un système de table mobile comprenant : un premier moteur linéaire et un deuxième moteur linéaire positionné de manière à être tourné vers le premier moteur linéaire, les premier et deuxième moteurs linéaires comprenant une unité d'entraînement et une unité mobile permettant de déplacer une table dans une première direction ; un troisième moteur linéaire et un quatrième moteur linéaire positionné de façon à faire face au troisième moteur linéaire, les troisième et quatrième moteurs linéaires comprenant une unité d'entraînement et une unité mobile pour déplacer la table dans une seconde direction ; une première unité de liaison permettant de raccorder le premier moteur linéaire au deuxième moteur linéaire ; une seconde unité de liaison permettant de raccorder le troisième moteur linéaire au quatrième moteur linéaire ; et des moyens de support pour supporter les premier, deuxième, troisième et quatrième moteurs linéaires, le système de table mobile étant caractérisé en ce qu'il comprend au moins un parmi un premier guide linéaire à un quatrième guide linéaire positionné entre les unités d'entraînement des premier à quatrième moteurs linéaires et les unités de support.
PCT/KR2016/001507 2016-02-15 2016-02-15 Système de table mobile WO2017142102A1 (fr)

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KR101949773B1 (ko) * 2018-10-10 2019-02-19 주식회사 케이에스테크놀러지 판재가공물의 크기를 측정하고 고정하는 cnc 가공 공작기계

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001307983A (ja) * 2000-04-20 2001-11-02 Nikon Corp ステージ装置及び露光装置
JP2003059797A (ja) * 2001-08-09 2003-02-28 Canon Inc 移動装置、ステージ装置及び露光装置
KR20040086560A (ko) * 2003-03-28 2004-10-11 스미도모쥬기가이고교 가부시키가이샤 엑스-와이 스테이지 장치
KR20110129438A (ko) * 2009-03-26 2011-12-01 일렉트로 싸이언티픽 인더스트리이즈 인코포레이티드 인쇄 회로 기판의 비아 드릴링 스테이지 조립체
KR101520401B1 (ko) * 2015-01-13 2015-05-15 재단법인차세대융합기술연구원 이동 가능한 테이블 시스템

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001307983A (ja) * 2000-04-20 2001-11-02 Nikon Corp ステージ装置及び露光装置
JP2003059797A (ja) * 2001-08-09 2003-02-28 Canon Inc 移動装置、ステージ装置及び露光装置
KR20040086560A (ko) * 2003-03-28 2004-10-11 스미도모쥬기가이고교 가부시키가이샤 엑스-와이 스테이지 장치
KR20110129438A (ko) * 2009-03-26 2011-12-01 일렉트로 싸이언티픽 인더스트리이즈 인코포레이티드 인쇄 회로 기판의 비아 드릴링 스테이지 조립체
KR101520401B1 (ko) * 2015-01-13 2015-05-15 재단법인차세대융합기술연구원 이동 가능한 테이블 시스템

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