200425164 (1) 玖、發明說明 【發明所屬之技術領域】 本發明是有關載台裝置，特別是有關將載置 驅動物體朝X軸方向、γ軸方向可動的χ_γ軸 【先前技術】 π兌明Χ-Υ軸載台裝置的一例，如由本發明人 的Χ-Υ軸載台裝置。此Χ_γ軸載台裝置，是揭开 文獻1。 參照第4圖，Χ-Υ軸載台裝置的固定部，是有 面表面精整加工形成導引面的底基20、及在底基 有預定間隔地固定配置的導引軌道2 1及2 2。在第 是顯示相互垂直交會的X軸、Υ軸、Ζ軸的三方向 導引軌道21，22是分別朝Υ軸方向延伸，具 面對的導引面21a、22a。對於Χ-Υ軸載台裝置， 引面21a、22a朝Y軸方向直線導引的可動部分， 件23、及靜壓軸承襯墊25-1、25-2、25-3、25-4、 軸承襯墊27-1、27-2、27-3。Y滑件23，是橫跨導 2 1及2 2之間地配置，在朝X軸方向延伸的樑2 3 23-1的兩端具有T形部23-2。 靜壓軸承襯墊25-1〜25-4是分別通過具有Y 軸周圍旋轉的2自由度的接頭（圖示省略）設置5 件2 3的2個T形部2 3 - 2的側面。靜壓軸承襯墊 等的被 台裝置 t所提案 ;於專利 「：將上 20上隔 4圖， 〇 :有相互 沿著導 是Y t骨 及靜壓 ;引軌道 -1及樑 軸及z 公Y滑 -4 - (2) 200425164 2 5-2是分別將壓縮空氣吹出導引面21a用，靜壓軸承襯墊 2 5 - 3、2 5 - 4是分別將壓縮空氣吹出導引面2 2 a用。靜壓軸 承襯墊27-1，27-2是設置於樑23-1的一方的T形部23-2 的下面，靜壓軸承襯墊27-3是在樑23-1的下面設置於接 近他方的T形部23-2的場所。靜壓軸承襯墊27-1〜27-3 是分別將壓縮空氣吹出底基2 0的上面用。200425164 (1) 发明. Description of the invention [Technical field to which the invention belongs] The present invention relates to a stage device, and particularly to a χ_γ axis that moves a mounting drive object in the X-axis direction and the γ-axis direction [prior art] π 兑 明An example of the X-Y axis stage device is the X-Y axis stage device by the present inventor. This X_γ axis stage device is disclosed in Document 1. Referring to FIG. 4, the fixed part of the XY-axis stage device is a base 20 having a surface surface finishing process to form a guide surface, and guide rails 2 1 and 2 fixedly arranged at a predetermined interval on the base. 2. In the third direction, the guide rails 21 and 22 showing the three directions of the X-axis, the Z-axis, and the Z-axis perpendicularly intersecting with each other are guide surfaces 21a and 22a extending in the Z-axis direction, respectively. For the XY-axis stage device, the movable surfaces of the guide surfaces 21a, 22a are linearly guided in the Y-axis direction, the component 23, and the hydrostatic bearing pads 25-1, 25-2, 25-3, 25-4, Bearing pads 27-1, 27-2, 27-3. The Y slider 23 is disposed across the guides 2 1 and 22, and has T-shaped portions 23-2 at both ends of the beam 2 3 23-1 extending in the X-axis direction. The hydrostatic bearing pads 25-1 to 25-4 are each provided with two T-shaped portions 2 3-2 of 5 pieces 2 3 through a two-degree-of-freedom joint (not shown) having rotation around the Y-axis. Proposed by the table device t of static pressure bearing pads, etc .; in the patent ": the upper 20 is separated by 4 pictures, 〇: there is a mutual guide along the Y t bone and the static pressure; the guide track-1 and the beam axis and z Male Y slip-4-(2) 200425164 2 5-2 is used to blow the compressed air out of the guide surface 21a, and the static pressure bearing pads 2 5-3, 2 5-4 are used to blow the compressed air out of the guide surface 2 For 2 a. Hydrostatic bearing pads 27-1 and 27-2 are provided under the T-shaped portion 23-2 of the beam 23-1. The hydrostatic bearing pad 27-3 is provided on the beam 23-1. The lower part is installed near the T-shaped part 23-2 on the other side. The static pressure bearing pads 27-1 to 27-3 are used to blow compressed air out of the upper surface of the base 20, respectively.
然而，靜壓軸承襯墊27-1、27-2是對於Y滑件23的 中心軸，即對於樑2 3 - 1的中心軸設置成幾乎對稱的位置 。一方面，靜壓軸承襯墊2 7 - 3，是設在對應於Y滑件2 3 的中心軸處。即，靜壓軸承襯墊2 7 - 1〜2 7 - 3，是使其連結 各中心的線是形成二等邊三角形地配置。 且，第4圖中，朝Y軸方向被直線導引且也朝X軸 方向被直線導引的可動部分，是X滑件24、及靜壓軸承 襯墊 25-5、25-6、25-7、25-8、及靜壓軸承襯墊 27-4、However, the hydrostatic bearing pads 27-1 and 27-2 are arranged at almost symmetrical positions with respect to the central axis of the Y slider 23, that is, with respect to the central axis of the beam 23-1. On the one hand, the hydrostatic bearing pads 2 7-3 are provided at the central axis corresponding to the Y slider 2 3. That is, the hydrostatic bearing pads 2 7-1 to 2 7-3 are arranged so that the lines connecting the centers thereof are formed in a bi-equangular triangle. In FIG. 4, the movable portion that is guided linearly in the Y-axis direction and also linearly in the X-axis direction is the X slider 24 and the hydrostatic bearing pads 25-5, 25-6, and 25. -7, 25-8, and hydrostatic bearing pads 27-4,
2 7 - 5、2 7 - 6。X滑件2 4是沿著樑2 3 - 1移動可能地組合於 Y滑件2 3。樑2 3 - 1是形成具有朝X軸方向延伸的2個側 面的四角形的剖面形狀。X滑件24，是形成具有相面對 於Y滑件2 3的樑2 3 - 1的2個側靣的2個內面的略逆U 形狀的剖面形狀。 靜壓軸承襯墊2 5 - 5〜2 5 - 8是分別通過具有X軸及Z 軸周圍旋轉的2自由度的接頭（圖示省略）設置於X滑 件24的2個內面。靜壓軸承襯墊27-4〜27-6是分別設置 於X滑件2 4的下面。 Y滑件2 3，其朝樑2 3 -1的X軸方向延伸的2個側面 (3) 200425164 是形成供導引x滑件2 4用的基準面。靜壓軸承襯墊2 5 - 5 〜2 5 - 8是將壓縮空氣吹出樑2 3 - 1的側面用。靜壓軸承襯 墊27_4〜27-6，是將壓縮空氣吹出底基20的上面用。2 7-5, 2 7-6. The X slider 24 is combined with the Y slider 23 by moving along the beam 2 3-1. The beam 2 3-1 has a quadrangular cross-sectional shape having two sides extending in the X-axis direction. The X-slider 24 is a cross-sectional shape of a slightly inverse U-shape having two inner surfaces facing two side ridges of the beam 2 3-1 facing the Y-slider 23. The hydrostatic bearing pads 2 5-5 to 2 5-8 are provided on the two inner surfaces of the X slider 24 through a two-degree-of-freedom joint (not shown) having rotation around the X-axis and the Z-axis. Hydrostatic bearing pads 27-4 to 27-6 are provided below the X sliders 24, respectively. The Y slider 2 3 has two side surfaces extending in the X-axis direction of the beam 2 3 -1 (3) 200425164 is a reference surface for forming the x slider 24. Hydrostatic bearing pads 2 5-5 to 2 5-8 are used to blow compressed air out of the side of the beam 2 3-1. The static pressure bearing pads 27_4 to 27-6 are used to blow compressed air out of the upper surface of the substrate 20.
在此X- Y軸載台裝置中，Y滑件2 3的驅動源，是使 用分別設在導引軌道21及Y滑件23之間、和設在導引 軌道22及Y滑件23之間的一對線形馬達3 1。一方面，X 滑件24的驅動源是使用設在Y滑件23及X滑件24之間 的線形馬達3 2。線形馬達3 1、3 2是相同構造，因爲是習 知所以簡單說明線形馬達3 1。線形馬達3 1，是在配列於 Y軸方向的多數的上側永久磁鐵及配列於Y軸方向的多數 的下側永久磁鐵之間所形成的間隔，配置從Y滑件2 3的 T形部23-2延伸的可動線圈（圖示省略）而成。In this X-Y axis stage device, the driving source of the Y slider 23 is used between the guide rail 21 and the Y slider 23 and the guide rail 22 and the Y slider 23 Between a pair of linear motors 31. On the one hand, the driving source of the X slider 24 is a linear motor 32 provided between the Y slider 23 and the X slider 24. The linear motors 31 and 3 2 have the same structure. Since they are conventional, the linear motors 31 will be briefly described. The linear motor 31 is a gap formed between a plurality of upper permanent magnets arranged in the Y-axis direction and a plurality of lower permanent magnets arranged in the Y-axis direction. A T-shaped portion 23 is arranged from the Y slider 2 3 -2 Extendable movable coil (not shown).
在X_Y軸載台裝置中，上述的構成要素之外，在各 線形馬達是需要組合作爲位置控制用的位置檢測檢測器的 線形刻度及線形檢測器。且，需要將一對的線形馬達3 1 同期驅動用的同期控制系統。進一步，需要：通往移動Υ 滑件23、X滑件24的線形馬達的電力供給線及檢測器的 檢測訊號線、靜壓軸承用的空氣配管。這些是全部具有可 撓性，並收容於可撓性配管。而且，X滑件24及Υ滑件 2 3之間是由X滑件用的可撓性配管連接，Υ滑件2 3及底 基20之間，是由X滑件及Υ滑件用的可撓性配管連接。 如上述說明，在習知的Χ-Υ軸載台裝置中，對於Υ 滑件（下軸）2 3的上下方向及水平方向的導引是使用複 數的靜壓軸承襯墊，且對於X滑件（上軸）2 4的上下方 -6 - (4) (4)200425164 向及水平方向的導引也使用複數的靜壓軸承襯墊，而可獲 得搭載於X滑件23的工件載置台的高行走精度。 靜壓軸承，一般雖可獲得高走行精度（水平方向正直 度或移動平面度），但是因爲幾乎無靜止摩擦，所以其停 止精度是依存於控制性能，需要高價且高分解能的線形刻 度。因此’爲了獲得接觸摩擦即使不使用靜壓導引但也需 使用蝸軸。 使用高分解能的線形刻度時，因爲其輸出訊號頻率的 限制，想同時獲得高速度是困難的。且，使用禍軸時，在 長行程化情況時因爲危險速度的限制所以想獲得高速度是 困難的。 一方面，未使用靜壓導引的堆疊型載台裝置的情況時 ，爲了獲得工件載置台的高移動平面度而將 Y滑件（下 軸）的走精度由機械加工達成，且因爲需要不會隨著 X 滑件的移動變形的高剛性所以質量也必然變大。 [專利文獻1 ] 2 0 0 0 - 1 5 5 1 8 6號公報 【發明內容】 (本發明所欲解決的課題） 在此，本發明的課題，是提供一種可將如靜壓軸承的 高價的零件僅可能減少並可以獲得高停止精度的X-Y軸 載台裝置。 本發明的其他的課題，是提供一種可將移動平面度的 參差不一抑制在最小，且可獲得高停止精度的X - Y軸載 -7- (5) (5)200425164 台裝置。 本發明的其他的課題，是提供一種可縮小移動體的總 質量，可獲得高速/高加速的X-Y軸載台裝置。 (用以解決課題的手段） 本發明，是提供一種X-Y軸載台裝置，其特徵爲， 具備：經表面加工的底基；及在該底基上朝一軸方向延伸 地被固定的導引構件；及在該導引構件朝與前述一軸方向 垂直的方向延伸地組合，且沿著該導引構件朝前述一軸方 向行走可能的第1滑件；及沿著該第1滑件朝前述一軸方 向垂直的方向行走可能地與該第1滑件組合的第2滑件， 前述第1滑件，是通過滾動軸承支撐在前述導引構件並可 與前述底基表面分離地行走，前述第2滑件，是使滾動軸 承位在前述第1滑件之間可行走的同時，在相面對於前述 底基表面的下面至少藉由設有1個靜壓軸承在將前述底基 表面上從其浮起的狀態下行走可能。。 對於本X - Y軸載台裝置，是在前述第2滑件的下側 ’且在則述底基表面設有由吸著可能的減壓式的唆著襯墊 所構成的至少1個制動器機構。 對於此制動器機構，是在安裝於前述第2滑件可與前 述底基表面接近·遠離方向變形的板彈簧，安裝有前述吸 著襯墊。 本X-Y軸載台裝置的前述第i、第2滑件，是分別將 線形馬達作爲驅動源行走。 (6) 200425164 對於本X-Y軸載台裝置’前述導引構件，是由隔有 預定間隔相互平行地朝前述一軸方向延伸的第1、第2導 引構件所構成，前述第1滑件是橫跨前述第1、第2導引 構件之間，在其兩端部分別通過前述滾動軸承被支撐。 (發明之效果） 本發明的X - Υ軸載台裝置是具有以下的效果。 (1)因爲將表面被精整加工的底基上面作爲上下方 向的靜壓軸承的導引面使用，所以可以獲得高移動平面度 (2 )當X滑件的X軸方向、Υ軸方向的停止時，藉 由滾動導引的摩擦可以獲得高停止精度。 (3 )因爲由摩擦力可獲得X滑件停止時的穩定性， 所以不需要高分解能的位置檢測器，就可以獲得高移動速 度。In the X_Y axis stage device, in addition to the above-mentioned constituent elements, each linear motor is a linear scale and a linear detector that need to be combined as a position detection detector for position control. In addition, a synchronous control system for synchronously driving a pair of linear motors 31 is required. Further, there is a need for a power supply line for a linear motor leading to the moving Υ slider 23 and the X slider 24, a detection signal line of a detector, and an air pipe for a static pressure bearing. These are all flexible and housed in a flexible pipe. The X slider 24 and the slider 23 are connected by a flexible pipe for the X slider, and the slider 23 and the base 20 are connected by the X slider and the slider. Flexible piping connection. As described above, in the conventional X-Y-axis stage device, a plurality of hydrostatic bearing pads are used to guide the up-down and horizontal directions of the Υ slider (lower shaft) 2 3, and for the X-slide (Upper shaft) 2 4 up and down -6-(4) (4) 200425164 Guidance in the horizontal and vertical directions also uses a plurality of hydrostatic bearing pads to obtain a workpiece mounting table mounted on the X slider 23. High walking accuracy. Although static pressure bearings can generally obtain high running accuracy (horizontal straightness or moving flatness), because there is almost no static friction, their stopping accuracy depends on control performance and requires a high-priced and high-resolution linear scale. Therefore, in order to obtain contact friction, a worm shaft is used even if static pressure guidance is not used. When using a linear scale with high resolution, it is difficult to obtain high speed at the same time because of the limitation of the output signal frequency. Furthermore, it is difficult to obtain a high speed due to the limitation of the dangerous speed in the case of a long stroke when using a troubled shaft. On the one hand, when a static-guided stacking stage device is not used, the travel accuracy of the Y slide (lower axis) is achieved by machining in order to obtain a high moving flatness of the workpiece placement table, and because it requires no The high rigidity will deform with the movement of the X slider, so the mass will inevitably increase. [Patent Document 1] 20000-1 5 5 1 8 6 [Summary of the Invention] (Problems to be Solved by the Present Invention) Here, the object of the present invention is to provide a high-priced, static-pressure bearing. It is only possible to reduce the number of parts and obtain an XY axis stage device with high stopping accuracy. Another object of the present invention is to provide an X-Y axis load -7- (5) (5) 200425164 device which can suppress variations in the flatness of movement to a minimum and can obtain high stopping accuracy. Another object of the present invention is to provide an X-Y axis stage device which can reduce the total mass of a moving body and obtain high speed / high acceleration. (Means for Solving the Problems) The present invention is to provide an XY axis stage device, comprising: a surface-treated base; and a guide member fixed to the base and extending in a direction of one axis. ; And a first sliding member that is combined in such a way that the guide member extends in a direction perpendicular to the aforementioned one-axis direction, and can travel along the guide member in the aforementioned one-axis direction; and along the first sliding member in the aforementioned one-axis direction A second slider that may be combined with the first slider in a vertical direction. The first slider is supported on the guide member by a rolling bearing and can travel separately from the surface of the base. The second slider Is to make the rolling bearing move between the first sliding member, and at least one static pressure bearing is provided on the bottom surface to float from the bottom surface opposite to the bottom surface. It is possible to walk under conditions. . In this X-Y axis stage device, at least one stopper composed of a pressure-reducing pressure-type holding pad is provided on the bottom surface of the second slider and on the surface of the base. mechanism. This brake mechanism is a leaf spring that is attached to the second slider and deforms in a direction approaching and separating from the base surface, and the suction pad is attached. The i-th and second sliders of the X-Y axis stage device travel with a linear motor as a driving source, respectively. (6) 200425164 In this XY-axis stage device, the aforementioned guide member is composed of first and second guide members extending parallel to each other in the one-axis direction with a predetermined interval therebetween, and the first slider is horizontal It straddles between the first and second guide members, and is supported by the rolling bearings at both ends thereof. (Effects of the Invention) The X-sacrum stage device of the present invention has the following effects. (1) Because the upper surface of the finished substrate is used as the guide surface of the static pressure bearing in the up-down direction, a high moving flatness can be obtained. (2) When the X-axis direction and the 滑 -axis direction of the X slider are When stopping, high stopping accuracy can be achieved by friction guided by rolling. (3) Since the stability when the X slider is stopped can be obtained by friction, a high resolution energy position detector is not needed, and a high moving speed can be obtained.
(4 )與第4圖所說明的Χ-Υ軸載台裝置相比，因爲 藉由省略多數的靜壓軸承襯墊可以減輕移動體的質量，所 以對於成線形馬達的推力可以獲得高加速度。 (5 )因爲在導引系內將靜壓導引及滾動導引複合， 所以可比全部是靜壓導引的情況更達成低成本。 【實施方式】 參照第1圖、第2圖，說明本發明的x-Y軸載台裝 置的較佳實施例。 -9- (7) (7)200425164 第1圖、第2圖，本X-Y軸載台裝置，其將上面表 面精整加工作爲導引面的底基1 〇 〇是固定於架框2 〇 〇。底 基100’是通常，所使用石定盤。本Χ-Υ軸載台裝置的固 定部’是底基1 00、及在底基1 00上隔有預定間隔地固定 配置的導引軌道1 10及120 (第1、第2導引構件）。在 第1圖中，是顯示相互垂直交合的X軸、γ軸的二方向。 導引軌道1 10、120是分別朝Υ軸方向延伸。在此Χ-Υ軸 載台裝置，沿著導引軌道1 10、120朝Υ軸方向直線導引 的可動部分，是Υ滑件1 3 0。Υ滑件1 3 0，是橫跨導引軌 道1 1 〇及1 2 0之間地配置，分別藉由設置於位在Υ滑件 1 3 0的兩端部及導引軌道1 1 0、1 2 0之間的滾動軸承1 1 1、 1 2 1之間且朝Υ軸方向行走可能地被支撐。Υ滑件1 3 0， 是與底基1 0 0的上面分離地行走。 且，第1圖中，朝Υ軸方向被直線導引且朝X軸方 向也被直線導引的可動部分，是X滑件1 4 0、及靜壓軸承 襯墊14 1、142、143。X滑件140是沿著Υ滑件130移動 可能地組合在Υ滑件1 3 0。即，Υ滑件13 0，是具有朝X 軸方向延伸的導引軌道1 3 1。在此導引軌道1 3 1及X滑件 1 4 0之間，藉由與前述滾動軸承1 1 1、1 2 1同樣地位在滾 動軸承（無圖示）之間，就可使X滑件14 0沿著Υ滑件 1 3 0移動可能。 靜壓軸承襯墊1 4 1〜1 4 3，是分別設置於X滑件1 4 0 的下面，藉由將壓縮空氣吹出底基1 〇〇的上面，就可將X 滑件1 4 0從底基1 0 〇的上面浮起移動。此浮起量，是數十 -10- (8) 200425164 “ m以下。換言之，靜壓軸承襯墊1 4 1〜14 3，是支撐X 滑件1 4 0及搭載於其上的工件載置台及工件（皆圖示省略 )的全負荷並讓這些移動可能。靜壓軸承襯墊i 4 1〜1 4 3 雖是配置在對應於三角形的頂點位置，但是三角形的形狀 是依據靜壓軸承襯墊1 4 1〜1 4 3所支撐的可動部分的重心 位置來決疋。在此靜壓軸承襯塾1 4 1〜1 4 3是配置在對應 二等邊三角形的頂點的位置。(4) Compared with the X-Y-axis stage device illustrated in Fig. 4, since the mass of the moving body can be reduced by omitting most of the static pressure bearing pads, a high acceleration can be obtained for the thrust of the linear motor. (5) Since the hydrostatic guidance and the rolling guidance are combined in the guidance system, it can achieve a lower cost than the case where all the hydrostatic guidance is used. [Embodiment] A preferred embodiment of the x-Y axis stage device according to the present invention will be described with reference to Figs. 1 and 2. -9- (7) (7) 200425164 Figures 1 and 2 show this XY-axis stage device. The bottom surface with the upper surface finishing as the guide surface 1 is fixed to the frame 2. . The substrate 100 'is generally a stone plate. The fixing portion 'of the X-axis axis stage device is a base 100 and guide rails 1 10 and 120 fixedly arranged at predetermined intervals on the base 100 (the first and second guide members) . In Fig. 1, there are shown two directions of the X-axis and the γ-axis which are perpendicular to each other. The guide rails 1 10 and 120 extend in the direction of the sacral axis, respectively. Here, the movable part of the X-Z axis stage device linearly guided in the Z axis direction along the guide rails 1 10 and 120 is the Z-slider 1 30. The slider 1 3 0 is disposed across the guide rails 1 10 and 120, and is respectively disposed at both ends of the slider 1 130 and the guide rails 1 1 0, Rolling bearings between 1 2 0, 1 1 1 and 1 2 1 may be supported while walking in the direction of the stern axis. The sliding member 1 3 0 travels separately from the upper surface of the base 100. In Fig. 1, the movable portions that are guided linearly in the direction of the sagittal axis and also linearly in the direction of the X-axis are X sliders 1 40 and hydrostatic bearing pads 1, 1, 142, and 143. The X slider 140 is moved along the cymbal slider 130 and may be combined with the cymbal slider 130. That is, the slider 13 0 has a guide rail 1 3 1 extending in the X-axis direction. Between the guide rail 1 3 1 and the X slider 1 4 0, the X slider 14 0 can be made between the rolling bearings (not shown) in the same position as the aforementioned rolling bearings 1 1 1 and 1 2 1. It is possible to move along the slider 1300. The hydrostatic bearing pads 1 4 1 to 1 4 3 are respectively disposed below the X slider 1 4 0. By blowing compressed air out of the upper surface of the substrate 1 0 0, the X slider 1 4 0 can be removed from The top of the substrate 100 floats and moves. This floating amount is tens of -10- (8) 200425164 "m or less. In other words, the hydrostatic bearing pads 1 4 1 to 14 3 are support parts for the X slider 1 4 0 and the workpiece mounting table mounted thereon. And the full load of the workpiece (both omitted in the illustration) and make these movements possible. Although the hydrostatic bearing pads i 4 1 ~ 1 4 3 are arranged at the apex positions corresponding to the triangles, the shape of the triangle is based on the hydrostatic bearing pads. The position of the center of gravity of the movable part supported by the pads 1 4 1 to 1 4 3 is determined. Here, the static pressure bearing bushes 1 4 1 to 1 4 3 are arranged at positions corresponding to the vertices of the equilateral triangle.
與第4圖所說明的X-Y軸載台裝置同樣，對於此χ_ Υ軸載台裝置’ Υ滑件1 3 0的驅動源，也使用分別形成於 與導引軌道1 1 0鄰接並朝Υ軸方向延伸的固定部1 5丨及γ 滑件1 3 0的一端部之間、和與導引軌道丨2 〇鄰接並朝γ 軸方向延伸的固定部1 61及Y滑件1 3 0的他端部之間的 一對線形馬達 1 5 0、1 6 0。一*方面，X滑件1 4 0的驅動源 是使用形成於Y滑件1 3 0及X滑件1 4 0之間的線形馬達 170°Similar to the XY-axis stage device illustrated in FIG. 4, the drive source of this χ_ Υ-axis stage device 'Υ slider 1 3 0 is also formed adjacent to the guide rail 1 1 0 and facing the Υ-axis The fixing portion 15 extending in the direction and one end portion of the γ slider 1 3 0 and the fixing portion 1 61 adjacent to the guide rail 丨 2 〇 and extending in the direction of the γ axis 1 and the other of the Y slider 1 3 0 A pair of linear motors 150, 160 between the ends. On the one hand, the drive source of X slider 1 40 is a linear motor 170 ° formed between Y slider 1 3 0 and X slider 1 40
線形馬達150 ' 160、170是相同構造，因爲是習知所 以對於線形馬達1 5 0簡單說明。線形馬達1 5 〇，是在朝Y 軸方向延伸的固定部1 5 1相互靣對地2列配列的多數的永 久磁鐵1 5 2及1 5 3之間所形成間隔，配置從γ滑件1 3 0 的一端部形成逆L形狀的可動線圈（圖示省略）而成。然 而，線形馬達1 7 0，是使多數的永久磁鐵呈上下2列地配 置，在這些之間，水平地設置可動線圈。 在本X-Y軸載台裝置中，上述的構成要素之外，在 各線形馬途中雖设置作爲位置控制用的位置檢測檢測器的 -11 - (9) (9)200425164 線形刻度及線形檢測器的組合，但是比如第4圖所說明的 位置檢測檢測器的分解能更低的分解能也可以。當然，不 限定線形刻度及線形測益的組合，使用其他的周知的位 置檢測器也可以。且’具備將一對的線形馬達1 5 0、1 6 0 同期驅動用的同期控制系統。 進一步，需要：朝移動X滑件1 4 0的線形馬達的電 力供給線或靜壓軸承用的空氣配管、Y滑件1 3 0、X滑件 1 4 0的檢測器的檢測訊號線。這些全部是具有可撓性，且 被收容於可撓性配管。而且，在X滑件1 4 0及Y滑件1 3 〇 之間是由X滑件用的可撓性配管連接，在Y滑件1 3 0及 底基1 〇 〇之間，是由X滑件及Y滑件用的可撓性配管連 接。在第1圖、第2圖中，是顯示沿著導引軌道i丨〇、 1 2 0延伸的X滑件及Y滑件用的可撓性配管的收容部1 8 1 、182° 在本形態中，更如第2圖所示’在X滑件1 4 0中， 搭載於其上的載置台（二點鎖線所示）朝Ζ軸方向驅動， 或是組入供具有傾斜功能用的複數的滑動楔機構3 0 0。 也參照第3圖，更在本形態的X- Υ軸載台裝置中， 在X滑件1 4 0的下側，設有由底基1 〇 〇的上面吸著可能 的減壓式的吸著襯墊1 9 1所構成的1個以上（在此2個） 的制動器機構1 9 0。此制動器機構1 9 0 ’是在設置於X滑 件1 4 0的孔（在此四角形的孔）的緣部橫跨此孔地安裝並 朝與底基1 〇 〇的表面接近·遠離方向變形可能的十字形狀 的板彈簧1 92安裝有吸著襯墊1 9 1。在吸著襯墊1 9 1，連 -12- (10) 200425164 接有正壓用及減壓用的空氣配管（圖示省略）。吸 1 9 1，通常是將壓縮空氣吹出底基1 0 〇使移動於其 十v m以上。一方面’在X滑件1 4〇的停止時’將 墊1 9 1的下面側形成減壓狀態並將吸著襯墊1 9 1吸 基1 0 0的上面。由此，制動器機構1 9 0是作爲制動 〇 依據以上的X-Y軸載台裝置，X滑件140的底 上的上下方向（X軸方向）的行走導引是藉由3個 承平順地進行。一方面，在底基1 0 0及Y滑件1 3 以及Y滑件1 3 〇及X滑件1 4 0之間在是藉由設置 承，使在X軸及Y軸方向作用適度的摩擦力。加 由具備朝底基1 00面的吸著襯墊所構成的制動器機 移動體的停止精度不依存於控制系統的控制性能， 高價且高分解能的位置檢測器。且，使用高分解能 刻度的情況時，雖因輸出訊號頻率的限制使想獲得 是困難的，但是在本X-Y軸載台裝置中則無那樣 〇 然而，在上述的形態中，Y滑件1 3 0，是將其 組合於導引構件1 1 0、1 2 0而行走可能，但是將’ 1 3 0只由一方的導引構件以上持方式行走也可能。 ’在Y滑件1 3 0的自由端部的下面設置靜壓軸承 行走導引即可。這種懸臂式的Y滑件，是顯示於 利文獻1。且，在上述的形態中，橫跨二條的導引 間的滑件雖稱爲Y滑件，組合於此的滑件雖稱爲 著襯墊 上面數 吸著襯 著在底 器作用 基100 靜壓軸 0之間 滾動軸 上，藉 構，使 不需要 的線形 高速度 的限制 兩端部 Y滑件 此情況 來進行 前述專 軌道之 X滑件 -13- (11) (11)200425164 ，但是這些X、Y的關係當然相反也可以。進一步，在上 述的形態中，在X滑件1 4 0的下面側雖具備3個靜壓軸 承襯墊，但是1個以上即可。 【圖式簡單說明】 [第1圖]顯示本發明的Χ-Υ軸載台裝置的實施例的平 面圖。 [第2圖]將第1圖的Χ-Υ軸載台裝置從第1圖的下側 所見的前視圖。 [第3圖]說明顯示於第1圖的制動器機構的結構用的 圖。 [第4圖]顯示習知的Χ-Υ軸載台裝置的一例的立體圖 【主要元件對照表】 20 底基 21導引軌道 2 1 a導引衙 22導引軌道 22a導引面 2 3 Y滑件 2 3 - 1 樑 2 3 - 2 T形部 2 4 X滑件 -14- (12) (12)200425164 25靜壓軸承襯墊 2 7靜壓軸承襯墊 j1線形馬達 3 2線形馬達 1 00 底基 1 10導引軌道 111滾動軸承 120導引軌道 1 3 0 Y滑件 131導引軌道 1 4 0 X滑件 1 4 1 , 1 4 2，1 4 3 靜壓軸承襯墊 1 5 0，1 6 0 線形馬達 1 5 1固定部 1 5 2 永久磁鐵 1 6 1固定部 蠊 1 7 〇 線形馬達 1 8 1 5 1 8 2 收容部 1 9 0制動器機構 1 9 1吸著襯墊 1 9 2板彈簧 2 0 0 架框 3 0 0滑動楔機構 -15-The linear motors 150'160, 170 have the same structure, because the linear motors 150 are briefly explained because they are conventional. The linear motor 1 50 is a space formed between a plurality of permanent magnets 1 5 2 and 1 5 3 arranged in two rows on the fixed portion 1 5 1 extending in the Y-axis direction, and is arranged from the γ slider 1 One end of 3 0 is formed with a movable coil (not shown) having an inverse L shape. However, in the linear motor 170, most of the permanent magnets are arranged in two rows, and a movable coil is horizontally arranged between them. In this XY-axis stage device, in addition to the above-mentioned constituent elements, -11-(9) (9) 200425164 linear scale and linear detector are provided as position detection detectors for position control in the course of each linear horse. Combination, but the decomposition energy of the position detection detector such as illustrated in FIG. 4 may be lower. Of course, the combination of linear scale and linear gain is not limited, and other well-known position detectors may be used. Furthermore, 'is provided with a synchronous control system for synchronously driving a pair of linear motors 150 and 160. Further, there is a need for a power supply line for a linear motor that moves the X slider 1 40 or an air pipe for a static pressure bearing, a detection signal line for a detector of the Y slider 1 3 0, and the X slider 1 4 0. These are all flexible and are housed in a flexible pipe. The X slider 1 400 and the Y slider 1 300 are connected by a flexible pipe for the X slider, and the Y slider 1 300 and the base 100 are connected by the X Flexible piping connection for slider and Y slider. In FIGS. 1 and 2, there are receiving portions 1 8 1 and 182 ° showing flexible pipes for the X slider and the Y slider extending along the guide rails i0 and 120. In the form, as shown in FIG. 2, the mounting table (shown by two-point lock line) mounted on the X slider 1 40 is driven in the direction of the Z axis, or it is assembled for a tilting function. A plurality of sliding wedge mechanisms 3 0 0. Referring also to FIG. 3, in the X-Υ-axis stage device of this embodiment, a pressure-reduction type suction capable of sucking from the upper surface of the base 100 is provided below the X slider 140. One or more (in this case, two) brake mechanisms 1 9 0 which are composed of pads 1 9 1. This brake mechanism 19 0 ′ is installed at the edge of a hole (here a quadrangular hole) provided in the X slider 1 40 across the hole and deforms toward and away from the surface of the base 100. Possible cross-shaped leaf springs 1 92 are fitted with suction pads 1 9 1. The suction pad 1 91 is connected to -12- (10) 200425164. Air pipes for positive pressure and decompression (not shown) are connected. Suction 1 9 1 usually blows compressed air out of the substrate 100 to move it above ten v m. On the one hand, "at the time when the X slider 1 40 is stopped", the lower side of the pad 1 91 is brought into a reduced pressure state, and the pad 19 1 is attracted to the upper surface of the base 1 0 0. Accordingly, the brake mechanism 190 is used as a brake. According to the above X-Y axis stage device, the up-down direction (X-axis direction) of the bottom of the X slider 140 is guided smoothly by three bearings. On the one hand, between the base 100 and the Y slider 1 3, and between the Y slider 1 300 and the X slider 1 40, a proper bearing is applied to the X-axis and Y-axis directions through the setting bearing. force. In addition, a brake mechanism composed of a suction pad with a surface facing 100 on the base is provided. The stop accuracy of the moving body does not depend on the control performance of the control system, and it is an expensive and high-resolution position detector. In the case of using a high resolution energy scale, it is difficult to obtain it due to the limitation of the output signal frequency, but this is not the case in this XY axis stage device. However, in the above-mentioned form, the Y slider 1 3 0, it is possible to walk by combining it with the guide members 1 1 0, 1 2 0, but it is also possible to walk '1 3 0 with only one guide member held above. ’A hydrostatic bearing can be provided under the free end of the Y slider 1 30 for travel guidance. This cantilevered Y slider is shown in Lee literature 1. Moreover, in the above-mentioned form, although the slider across the two guides is referred to as a Y slider, the slider combined with it is referred to as the top surface of the pad, and is sucked against the bottom of the base. On the rolling axis between the final axis 0, the Y-slider on both ends of the linear high-speed limit is unnecessarily limited by the structure. The X-slider of the aforementioned special track is performed. 13- (11) (11) 200425164, but these The relationship between X and Y is of course the opposite. Furthermore, in the above-mentioned embodiment, although three static pressure bearing pads are provided on the lower surface side of the X slider 1 40, one or more may be used. [Brief description of the drawings] [Fig. 1] A plan view showing an embodiment of the X-Z axis stage device of the present invention. [Fig. 2] A front view of the XY-axis stage device of Fig. 1 as viewed from the lower side of Fig. 1. [Fig. 3] A diagram for explaining the structure of the brake mechanism shown in Fig. 1. [Fig. [Fig. 4] A perspective view showing an example of a conventional X-Z axis stage device [comparison table of main components] 20 Substrate 21 guide rail 2 1 a guide 衙 22 guide rail 22a guide surface 2 3 Y Slide 2 3-1 Beam 2 3-2 T-shaped part 2 4 X Slide -14- (12) (12) 200425164 25 Hydrostatic bearing pad 2 7 Hydrostatic bearing pad j1 Linear motor 3 2 Linear motor 1 00 Substrate 1 10 Guide rail 111 Rolling bearing 120 Guide rail 1 3 0 Y Slider 131 Guide rail 1 4 0 X Slider 1 4 1, 1 4 2, 1 4 3 Hydrostatic bearing pad 1 5 0, 1 6 0 Linear motor 1 5 1 Fixing part 1 5 2 Permanent magnet 1 6 1 Fixing part 蠊 1 7 〇 Linear motor 1 8 1 5 1 8 2 Storage part 1 9 0 Brake mechanism 1 9 1 Suction pad 1 9 2 Leaf spring 2 0 0 frame 3 3 0 sliding wedge mechanism -15-