CN205438489U - Accurate air supporting displacement platform - Google Patents
Accurate air supporting displacement platform Download PDFInfo
- Publication number
- CN205438489U CN205438489U CN201520967923.4U CN201520967923U CN205438489U CN 205438489 U CN205438489 U CN 205438489U CN 201520967923 U CN201520967923 U CN 201520967923U CN 205438489 U CN205438489 U CN 205438489U
- Authority
- CN
- China
- Prior art keywords
- longitudinal
- friction pulley
- air supporting
- air
- push rod
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Abstract
The utility model provides an accurate air supporting displacement platform is fixed with two longitudinal rails that are parallel to each other on the base, longitudinal sliding block sliding connection is passed through on the longitudinal rail in two transverse guide's both ends, a transverse slider sliding connection is respectively passed through on transverse guide in rectangle moving frame's both ends, shrouding interconnect is passed through in the outside of two longitudinal sliding blocks of one side, is equipped with friction pulley horizontal drive device in the outside of shrouding, is connected through horizontal push rod and the limit that this rectangle moving frame corresponds, be equipped with friction pulley vertical drive device on this base, be connected through vertical push rod and a transverse guide's outside middle part, be equipped with uninstallation air supporting device below the transverse slider and between the base. The advantage of this platform is: motion adoption groined type high accuracy aerostatic slideways realizes the accurate direction of XY axle, sets up uninstallation air supporting device between platform load main part and marble, reduces the guide rail load, increases the bearing capacity of platform, add friction pulley actuating mechanism simultaneously, improve the drive stationarity.
Description
Technical field
This utility model relates to a kind of air floating table structure, particularly relate to a kind of can provide simultaneously X to and the air floating table structure of Y-direction high-precision motion location, belong to precision optical machinery processing and micro-nano detection field.The device is mainly used for for lay photoetching mask plate and MEMS/NEMS detection field provide simultaneously X to and Y-direction is stable and the motion of high precision.
Background technology
Precision optical machinery processing and detection field it is frequently necessary to X can be provided to the two-dimension moving platform with Y-direction motor function simultaneously；Conventional two-dimensional motion platform typically more to be arranged on line slideway, and line slideway is not only responsible for accurate guiding but also be responsible for the weight of work package on carrying platform and platform, under platform is in high-mechanic, there is the unappeasable problem of motion guide precision.
Existing platform many employings T-shaped high accuracy guide rail, cross slide way is fixed on pedestal, T-shaped transverse shifting stand top crossbeam is fixedly installed on cross slide way movable slider, it is fixedly installed support road wheel in the longeron bottom of T-shaped transverse shifting stand, it is respectively arranged with longitudinal rail and longitudinal driving device on T-shaped transverse shifting stand, platform side is fixed on longitudinal rail slide block, and platform base typically uses support road wheel or floating cushion.Although this type of platform solves the contradiction between platform bearer power and precision, but T-rail platform is provided that support road wheel owing to the driving of longitudinal rail is only derived from one end and movable stand longeron bottom, cause longitudinal rail movement unstable, easily produce beat, introduce error, thus reduce the precision of platform.
Summary of the invention
Not only guided for conventional two-dimensional motion platform design middle guide but also be responsible for carrying and platform motion guide precision under high-mechanic of causing can not meet, and the instable problem of longitudinal rail movement in existing T-rail two-dimension moving platform, the utility model proposes a kind of accurate air float displacement platform.
The technical solution of the utility model is: a kind of accurate air float displacement platform, it is characterized in that, framework, friction pulley lateral driver device and friction pulley longitudinal driving device is moved including base plate, cross slide way, longitudinal rail, horizontal air supporting sliding sleeve, longitudinal air supporting sliding sleeve, rectangle, base plate is fixed with two longitudinal rails being parallel to each other, two cross slide way two ends are respectively slidably connected on longitudinal rail by a longitudinal air supporting sliding sleeve, and rectangle is moved the two ends of the relative edge of framework and is respectively slidably connected on cross slide way by a horizontal air supporting sliding sleeve；The outside of two the longitudinal air supporting sliding sleeves being arranged on same described longitudinal rail is connected with each other by shrouding, in the outside of this shrouding equipped with friction pulley lateral driver device, this friction pulley lateral driver device moves limit corresponding to framework by horizontal push rod with this rectangle and connects；Being fitted with friction pulley longitudinal driving device at this base plate, this friction pulley longitudinal driving device is by the outer middle side part connection of longitudinal push rod with this cross slide way；It is provided with unloading air-floating apparatus below described horizontal air supporting sliding sleeve and between base plate；It is equipped with air floating structure at the four sides, inner side of described horizontal air supporting sliding sleeve and longitudinal air supporting sliding sleeve, is operationally connected formation floating cushion with compressed air gas source.
Between described horizontal push rod and rectangular frame, and being flexibly connected by magnet ring seat respectively between longitudinal push rod and cross slide way, this magnet ring seat is made up of connection seat and the top of bottom, is provided with spherical groove on the top at top；It is provided with the sphere top coincideing with this spherical groove on the top of horizontal push rod and longitudinal push rod.
Described friction pulley lateral driver device is identical with friction pulley longitudinal driving device structure, including direct current torque motor, decelerator, friction pulley, guide bearing, laterally driven bar and bearing, it is provided with groove on the top of bearing, be slidably installed in this groove laterally driven bar, direct current torque motor is vertical with the direction of horizontal push rod, it is arranged on the outside on the top of groove, decelerator installed by the outfan of direct current torque motor, the output shaft of decelerator installs friction pulley, friction pulley is connected with the upper surface wearing drive of laterally driven bar, exports stable moment；In the groove both sides of bearing and following equipped with multipair guide bearing, guide for laterally driven bar.
Described horizontal air-float guide rail and longitudinal air-float guide rail are formed by Marble processing, process flatness 000+ level.
Described base plate uses marble to make, it is ensured that flatness 000+ level.
The utility model has the advantages that: motion uses groined type high accuracy air-float guide rail to realize XY axle precision and guides, and arranges unloading air supporting, reduce guide rail load, increase the bearing capacity of platform between platform loads main body and marble；Be simultaneously introduced friction wheel driving mechanism, improve and drive stationarity, finally achieve high-mechanic, in high precision, high stability, solve the problem that locating platform precision is not enough.Simple in construction, easily implements.
Accompanying drawing explanation
Fig. 1 is the perspective view that this utility model is overall.
Fig. 2 is unloading air-floating apparatus structural representation in this utility model.
Fig. 3 is four sides air supporting supporting construction schematic diagram in this utility model.
Fig. 4 is this utility model middle magnetic ring holder structure schematic diagram；
Fig. 5 is friction pulley lateral driver device and friction pulley longitudinal driving device structural representation in this utility model.
Detailed description of the invention
See Fig. 1-Fig. 5, this utility model one precision air float displacement platform, it is characterized in that, including marble base plate 1, cross slide way 3, longitudinal rail 2, laterally air supporting sliding sleeve 6, longitudinal air supporting sliding sleeve 4, rectangle moves framework 5, friction pulley lateral driver device 7 and friction pulley longitudinal driving device 8, base plate 1 is fixed with two longitudinal rails 2 being parallel to each other, two cross slide way 3 two ends are respectively slidably connected on longitudinal rail 2 by a longitudinal air supporting sliding sleeve 4, rectangle is moved the two ends of the relative edge of framework 5 and is respectively slidably connected on cross slide way 3 by a horizontal air supporting sliding sleeve 6.The outside of two the longitudinal air supporting sliding sleeves 4 being arranged on same longitudinal rail 2 is connected with each other by shrouding 9, in the outside of this shrouding 9 equipped with friction pulley lateral driver device 7, this friction pulley lateral driver device 7 moves limit corresponding to framework 5 by horizontal push rod 12 with this rectangle and connects；(near on one side) equipped with friction pulley longitudinal driving device 8 on this base plate 1, this friction pulley longitudinal driving device 8 is connected with the outer middle side part of this cross slide way 3 by longitudinal push rod 13.Unloading air-floating apparatus 10(concrete structure it is provided with as shown in Figure 2) below described horizontal air supporting sliding sleeve 6 and between base plate 1.It is equipped with air floating structure 14 at the four sides, inner side of described horizontal air supporting sliding sleeve 6 and longitudinal air supporting sliding sleeve 4, is operationally connected formation floating cushion with compressed air gas source.
Between described horizontal push rod 12 and rectangular frame 5, and flexibly connected by magnet ring seat 11 respectively between longitudinal direction push rod 13 and cross slide way 3, this magnet ring seat 11 is made up of connection seat 111 and the top 112 of bottom, is provided with spherical groove 113(on the top at top 112 and sees Fig. 4)；The sphere top coincideing with this spherical groove 113 it is provided with on the top of horizontal push rod 12 and longitudinal push rod 13.
See Fig. 5, described friction pulley lateral driver device 7 includes direct current torque motor 71, decelerator 72, friction pulley 73, guide bearing 74, laterally driven bar 75 and bearing 76, being provided with groove on the top of bearing 76, the laterally driven bar 75(that is slidably installed in this groove is coaxially connected with described horizontal push rod 12 or is structure as a whole.In order to integrally-built clear, figure only depicts the position at laterally driven bar 75 place with dotted line), direct current torque motor 71 is vertical with the direction of horizontal push rod 12, it is arranged on the outside on the top of groove, decelerator 72 installed by the outfan of direct current torque motor 71, the output shaft of decelerator 72 installs friction pulley 73, and friction pulley 73 is connected with the upper surface wearing drive of laterally driven bar 75, exports stable moment.In the groove both sides of bearing 76 with following set two equipped with multipair guide bearing 74(below laterally driven bar 75, respectively set one in the both sides at the two ends of laterally driven bar 75), guide for laterally driven bar 75.Friction pulley longitudinal driving device 8 is identical with the structure of friction pulley lateral driver device 7.
Described horizontal air-float guide rail 3 and longitudinal air-float guide rail 2 are formed by Marble processing, process flatness 000+ level.
After the air floating structure 14 of horizontal air supporting sliding sleeve 6 of the present utility model and longitudinal air supporting sliding sleeve 4 is operationally filled with clean compressed air, air film (floating cushion) is formed between the contact surface of longitudinal rail 2 and cross slide way 3, play support and vibration isolation effect so that cross slide way 3 can in the Y direction, rectangle move framework 5 in X-direction without frictionally moving freely.Article one, the longitudinal air supporting sliding sleeve 4 of two on longitudinal rail 2 play the guiding role；4 Following effects of two longitudinal air supporting sliding sleeves on another longitudinal rail 2, the purpose of this design is to eliminate the Planar Mechanisms error caused when Y-direction drives.Described cross slide way 3 has identical design.All directions self-movement eliminates plane motion coupling, it is achieved that coplanar two-dimensional quadrature moves.
Described rectangle moves the supporting body that framework 5 is motion platform, and top panel is provided with screwed hole can fix varying mesa.Rectangle moves the unloading air supporting 10 that 5 four jiaos of lower ends of framework set, it is movably arranged on floor 1, after being filled with the compressed air of cleaning, air film (floating cushion) is formed with the plane on floor 1, can rub slidably with longitudinal and transverse guide rail nothing in plane X, Y both direction, reduce the load to cross slide way 3, increase the bearing capacity of platform.Friction pulley lateral driver device 7 and friction pulley longitudinal driving device 8 are respectively by driving horizontal push rod 12 and longitudinal push rod 13 to realize moving rectangle the accurate running fix of the X of framework 5, Y-direction.
The type of drive of above-mentioned friction pulley lateral driver device 7 and friction pulley longitudinal driving device 8 can be linear electric motors or voice coil motor.Use fraction wheel drive device, there is constant moment and promote and lock-bit function.Move, at rectangle, the unloading air-floating apparatus 10 that framework corner is arranged, be directly unloaded to marble pedestal, reduce the deformation of guide rail, increase the bearing capacity of platform, improve platform precision.Rectangle moves framework 5 and can install nano-grade displacement platform simultaneously, improves accuracy of detection further.
Claims (5)
1. an accurate air float displacement platform, it is characterized in that, framework, friction pulley lateral driver device and friction pulley longitudinal driving device is moved including base plate, cross slide way, longitudinal rail, horizontal air supporting sliding sleeve, longitudinal air supporting sliding sleeve, rectangle, base plate is fixed with two longitudinal rails being parallel to each other, two cross slide way two ends are respectively slidably connected on longitudinal rail by a longitudinal air supporting sliding sleeve, and rectangle is moved the two ends of the relative edge of framework and is respectively slidably connected on cross slide way by a horizontal air supporting sliding sleeve；The outside of two the longitudinal air supporting sliding sleeves being arranged on same described longitudinal rail is connected with each other by shrouding, in the outside of this shrouding equipped with friction pulley lateral driver device, this friction pulley lateral driver device moves limit corresponding to framework by horizontal push rod with this rectangle and connects；Being fitted with friction pulley longitudinal driving device at this base plate, this friction pulley longitudinal driving device is by the outer middle side part connection of longitudinal push rod with this cross slide way；It is provided with unloading air-floating apparatus below described horizontal air supporting sliding sleeve and between base plate；It is equipped with air floating structure at the four sides, inner side of described horizontal air supporting sliding sleeve and longitudinal air supporting sliding sleeve, is operationally connected formation floating cushion with compressed air gas source.
Accurate air float displacement platform the most according to claim 1, it is characterized in that, between described horizontal push rod and rectangular frame, and flexibly connected by magnet ring seat respectively between longitudinal direction push rod and cross slide way, this magnet ring seat is made up of connection seat and the top of bottom, is provided with spherical groove on the top at top；It is provided with the sphere top coincideing with this spherical groove on the top of horizontal push rod and longitudinal push rod.
Accurate air float displacement platform the most according to claim 1, it is characterized in that, described friction pulley lateral driver device is identical with friction pulley longitudinal driving device structure, including direct current torque motor, decelerator, friction pulley, guide bearing, laterally driven bar and bearing, it is provided with groove on the top of bearing, be slidably installed in this groove laterally driven bar, direct current torque motor is vertical with the direction of horizontal push rod, it is arranged on the outside on the top of groove, decelerator installed by the outfan of direct current torque motor, the output shaft of decelerator installs friction pulley, friction pulley is connected with the upper surface wearing drive of laterally driven bar, export stable moment；In the groove both sides of bearing and following equipped with multipair guide bearing, guide for laterally driven bar.
Accurate air float displacement platform the most according to claim 1, it is characterised in that described horizontal air-float guide rail and longitudinal air-float guide rail are formed by Marble processing.
Accurate air float displacement platform the most according to claim 1, it is characterised in that described base plate uses marble to make.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520967923.4U CN205438489U (en) | 2015-11-30 | 2015-11-30 | Accurate air supporting displacement platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520967923.4U CN205438489U (en) | 2015-11-30 | 2015-11-30 | Accurate air supporting displacement platform |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205438489U true CN205438489U (en) | 2016-08-10 |
Family
ID=57179911
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520967923.4U Expired - Fee Related CN205438489U (en) | 2015-11-30 | 2015-11-30 | Accurate air supporting displacement platform |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205438489U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114406454A (en) * | 2022-01-28 | 2022-04-29 | 河南通用智能装备有限公司 | Air supporting cutting platform |
| CN116967796A (en) * | 2023-09-22 | 2023-10-31 | 无锡星微科技有限公司杭州分公司 | Mobile assembly of air floatation linear platform |
-
2015
- 2015-11-30 CN CN201520967923.4U patent/CN205438489U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114406454A (en) * | 2022-01-28 | 2022-04-29 | 河南通用智能装备有限公司 | Air supporting cutting platform |
| CN114406454B (en) * | 2022-01-28 | 2024-02-13 | 河南通用智能装备有限公司 | Air supporting cutting platform |
| CN116967796A (en) * | 2023-09-22 | 2023-10-31 | 无锡星微科技有限公司杭州分公司 | Mobile assembly of air floatation linear platform |
| CN116967796B (en) * | 2023-09-22 | 2023-12-29 | 无锡星微科技有限公司杭州分公司 | Mobile assembly of air floatation linear platform |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105252505B (en) | Precise air-floatation displacement platform | |
| CN105666225B (en) | A kind of ultraprecise low speed ball-screw straight-line feed device | |
| CN112355990B (en) | XY motion platform and telecontrol equipment | |
| CN102255472B (en) | Permanent magnet linear synchronous motor with aerostatic slideways | |
| CN102501224B (en) | A kind of planar maglev linear-motion platform | |
| CN105711103A (en) | 3D printing device based on section bar building | |
| CN204248549U (en) | The aerial Handling device of material | |
| CN202752161U (en) | Dispensing head moving mechanism of online dispenser | |
| CN205438489U (en) | Accurate air supporting displacement platform | |
| CN208729169U (en) | Precise mobile platform | |
| CN103639711B (en) | High-bearing-capacitprecise precise two-dimensional motion platform | |
| CN100515659C (en) | X-Y objective table | |
| CN101746711B (en) | H-shaped two-dimensional ultraprecise worktable structure | |
| CN110729230B (en) | Ultra-high precision planar air-floatation workpiece table | |
| JP4335704B2 (en) | XY stage device | |
| CN210706044U (en) | Horizontal movement structure of FDM printer nozzle | |
| CN218726710U (en) | Moving device for semiconductor surface detection with high precision | |
| CN102566292B (en) | Switching structure and switching method for double workpiece tables | |
| CN104875200A (en) | XY axis automatic slide rail mechanical arm | |
| CN213894260U (en) | Improved mechanism of adjustable feeding platform mechanism of detection equipment | |
| CN104760900A (en) | Mechanical lifting device of pump test bed | |
| CN106813553A (en) | A kind of building lot length-measuring appliance | |
| CN208342771U (en) | Super-huge gantry locating platform | |
| CN202622351U (en) | Parallel connection driving bidirectional mobile platform | |
| CN204772535U (en) | Automatic slide rail arm of XY axle |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160810 Termination date: 20201130 |