CN208729169U - Precise mobile platform - Google Patents
Precise mobile platform Download PDFInfo
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- CN208729169U CN208729169U CN201820837294.7U CN201820837294U CN208729169U CN 208729169 U CN208729169 U CN 208729169U CN 201820837294 U CN201820837294 U CN 201820837294U CN 208729169 U CN208729169 U CN 208729169U
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- air
- guide rail
- float guide
- straight line
- line motor
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Abstract
The utility model relates to a kind of precise mobile platforms, comprising: pedestal；First guiding device, including the first straight line motor and the first air-float guide rail corresponding with the first straight line motor being set on the pedestal, first air-float guide rail is by the first straight line motor driven；Second guiding device, second straight line motor and the second air-float guide rail corresponding with the second straight line motor including being fixedly connected on first air-float guide rail, second air-float guide rail is by the second straight line motor driven；And objective table, it is fixedly connected on second air-float guide rail.Precise mobile platform is at work, it is passed through gas to the first air-float guide rail and the second air-float guide rail, the respective air film gap of two kinds of air-float guide rails is adjusted, under the driving of first straight line motor and second straight line motor, it realizes low friction linear motion, improves the response and kinematic accuracy of mobile platform.
Description
Technical field
The utility model relates to mobile platform technical fields, more particularly to a kind of precise mobile platform.
Background technique
The guide frame that mobile platform generally includes objective table and moves for driving objective table along different directions.
For example, a kind of XY axis mobile platform, it is not only can respective self-movement but also linkage X-axis by stacked together
The assembly of transmission mechanism and Y-axis transmission mechanism.It includes being located at the Y-axis transmission mechanism of bottom and being layered in Y-axis driver
X-axis transmission mechanism on structure is fixed with objective table on X-axis transmission mechanism.Y-axis transmission mechanism and X-axis transmission mechanism are respectively by Y-axis
Linear motor and X-axis linear motor are as driving source.
However, resulting in existing XY axis due to the foozle of linear motor and the combined influence of rigging error and moving
The precision of moving platform is usually lower.Therefore a kind of high-precision mobile platform how is provided, is that those skilled in the art need to solve
Certainly the technical issues of.
Utility model content
Based on this, it is necessary to be directed to the existing lower problem of mobile platform precision, provide a kind of precise mobile platform.
A kind of precise mobile platform, comprising:
Pedestal；
First guiding device, including the first straight line motor and corresponding with the first straight line motor being set on the pedestal
The first air-float guide rail, first air-float guide rail is by the first straight line motor driven；
Second guiding device, including being fixedly connected on the second straight line motor of first air-float guide rail and with described second
Corresponding second air-float guide rail of linear motor, second air-float guide rail is by the second straight line motor driven；And
Objective table is fixedly connected on second air-float guide rail.
At least two groups of first guiding device in one of the embodiments, several first guiding devices are flat
Row setting；The air-float guide rail of the second straight line motor and the guiding device is fixedly connected with.
The extension of the extending direction of first guiding device and second guiding device in one of the embodiments,
Direction is mutually perpendicular in the projection of the pedestal.
First air-float guide rail and/or second air-float guide rail are in respective extension side in one of the embodiments,
To two sides be respectively arranged with buffer unit.
The buffer unit includes two bolsters in one of the embodiments,.
The bolster is bumper or pneumatic cushion in one of the embodiments,.
The pedestal of first air-float guide rail and the pedestal are integrally formed in one of the embodiments,.
The first straight line motor is ironless linear motors in one of the embodiments,.
The second straight line motor is ironless linear motors in one of the embodiments,.
First guiding device has two groups in one of the embodiments, and the first guiding device described in two groups is set in parallel
It sets；The air-float guide rail of the second straight line motor and the track-type facilities is fixedly connected with；Two first guiding devices
Centre distance is 800mm.
Above-mentioned precise mobile platform is passed through gas at work, to the first air-float guide rail and the second air-float guide rail, adjusts
Realize that low friction is straight under the driving of first straight line motor and second straight line motor in the respective air film gap of two kinds of air-float guide rails
Line movement, improves the response and kinematic accuracy of mobile platform.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of one of the utility model embodiment precise mobile platform；
Fig. 2 is the top view of one of the utility model embodiment precise mobile platform.
Appended drawing reference: 100, pedestal；200, the first guiding device；210, first straight line motor；220, the first air-float guide rail；
230, the first pedestal；240, first movement part；300, the second guiding device；310, second straight line motor；320, the second air bearing is led
Rail；330, the second pedestal；340, the second moving member；400, objective table；500, buffer unit；510, bolster.
Specific embodiment
The utility model is described more fully referring to relevant drawings for the ease of understanding the utility model,.
The utility model preferred embodiment is given in attached drawing.But the utility model can be realized in many different forms, and
It is not limited to embodiment described herein.On the contrary, purpose of providing these embodiments is makes the utility model disclosure
Understand more preferably thorough and comprehensive.
It should be noted that it can directly on the other element when element is referred to as " being fixed on " another element
Or there may also be elements placed in the middle.When an element is considered as " connection " another element, it, which can be, is directly connected to
To another element or it may be simultaneously present centering elements.On the contrary, when element is referred to as " directly existing " another element "upper",
There is no intermediary elements.Term as used herein "vertical", "horizontal", "left" and "right" and similar statement are
For illustrative purposes.
A kind of precise mobile platform, referring to Fig. 1 and Fig. 2, including pedestal 100, the first guiding device 200, second guiding dress
Set 300 and objective table 400.
First guiding device 200 is arranged along the y axis, and the second guiding device 300 is arranged along the x axis.That is, the present embodiment
In the first guiding device 200 extending direction and second guiding device 300 extending direction the pedestal 100 projection
It is mutually perpendicular to；Certainly in other embodiments, the extending direction of the first guiding device 200 and the second guiding device 300 is described
The angle of the projection of pedestal 100 can also be between 0 ° to 90 ° (not including boundary).
First guiding device 200 includes first straight line motor 210 and the first air-float guide rail 220.First air-float guide rail 220
The first movement part 240 for including the first pedestal 230 and being slidably matched with the first pedestal 230.It is mobile flat in order to enhance the precision
The structural strength of platform, the first pedestal 230 are integrally formed with pedestal 100；In other embodiments, the first pedestal 230 can pass through
Screw is fixed on pedestal 100.First pedestal 230 includes two parallel sliding rails, forms striped spatial between two sliding rails, and first
Linear motor 210 is arranged in the striped spatial.Above-mentioned first movement part 240 is fixed on the mover of first straight line motor 210
On, drive first movement part 240 to slide along the first pedestal 230 by first straight line motor 210.
First guiding device 200 can be set to one or more, and in the present embodiment, there are two the first guiding devices 200,
And parallel setting is on pedestal 100.
Second guiding device 300 includes second straight line motor 310 and the second air-float guide rail 320.Second air-float guide rail 320
It include the second pedestal 330 and the second moving member 340 being slidably matched with the second pedestal 330, the second pedestal 330 passes through screw point
It is not fixedly connected with the first movement part 240 of two the first guiding devices 200.In the present embodiment, the first pedestal 230 is along Y-axis side
To setting, the second pedestal 330 is arranged along the x axis, i.e., the movement dimension of precise mobile platform provided in this embodiment be X-axis and
Y-axis.Second pedestal 330 includes two parallel sliding rails, forms striped spatial between two sliding rails, second straight line motor 310 is set
It sets in the striped spatial.The second above-mentioned moving member 340 is fixed on the mover of second straight line motor 310, by second straight line
Motor 310 drives the second moving member 340 to slide along the second pedestal 330.
Objective table 400 is fixed on the second moving member 340, is moved synchronously with the second moving member 340.
Common, the precision of mobile platform is related with the rigidity of itself components and load, additionally with the knot of itself
Structure design is related.For example, if the stroke of guiding device is too long, load excessive when can generate biggish heeling moment, lead to system
Deformation and vibration, to influence the precision of system.In the present embodiment, the centre distance of two first guiding devices 200
For 800mm, i.e. distance L in Fig. 2 is 800mm.By rationally designing the structure of precision movement platform, precision movement platform is improved
Precision.
In the present embodiment, first straight line motor 210 and second straight line motor 310 are all made of ironless linear motors, iron-free
Core linear motor has the advantages that magnetism is big, speed is fast and acceleration is big than traditional line motor, substantially increases precision fortune
The response speed of moving platform.
Pedestal 100 made of traditional metal will lead to 100 surface planarity of pedestal due to the stress release after processing
Fluctuation declines so as to cause the precision of precision movement platform.For this purpose, the pedestal 100 in the present embodiment is made of marble, greatly
The excellent performance of fibrous gypsum itself makes pedestal 100 after processing is completed, does not have stress release, to make the plane on 100 surface of pedestal
Degree basically will not produce fluctuation.The absorbing of pedestal 100 made of marble guarantees better than pedestal 100 made of metal simultaneously
It stationarity of the platform when high speed moves and lower must shake.
In the present embodiment, the first air-float guide rail 220 and the second air-float guide rail 320 are set respectively in the two sides of respective extending direction
It is equipped with buffer unit 500.Buffer unit 500 includes two bolsters 510, and bolster 510 can for example buffer for spring
Device or pneumatic cushion.In other embodiments, one of the first air-float guide rail 220 or the second air-float guide rail 320 are respectively extending
Two sides be respectively arranged with buffer unit 500.
The cooperation using air-float guide rail and linear motor in the present embodiment is designed in conjunction with reasonable structure, to improve essence
The precision of close mobile platform.Air-float guide rail is based on gas dynamic and static pressure effect, realizes without friction and vibrationless smooth movement.Tool
There is the features such as high precision, cleanliness without any pollution.Its Panel-corrected Model can obtain higher guiding with the relatively low accuracy of manufacture
Precision.
In the present embodiment, by using the setting of two group of first guiding device 200, two 200 1 sides of the first guiding device
It plays a supporting role jointly in face of the second guiding device 300；On the other hand, after being passed through gas, two the first air-float guide rails 220 are each
Position adjustment, adjust automatically guiding accuracy are carried out from based on gas dynamic and static pressure effect.Meanwhile when two first straight line motors 210
After generating micro alternate position spike during exercise, two the first air-float guide rails 220 can also be used gas dynamic and static pressure effect and carry out automatically
Adjustment, to ensure that the work that the precision movement platform is steady, stable.
When the precise mobile platform works, the first air-float guide rail 220 and the second air-float guide rail 320 are passed through gas, adjust each
From the air film gap of guide rail, respectively under the driving of first straight line motor 210 and second straight line motor 310, realize that low friction is straight
Line movement, improves the response and kinematic accuracy of platform.
Each technical characteristic of embodiment described above can be combined arbitrarily, for simplicity of description, not to above-mentioned reality
It applies all possible combination of each technical characteristic in example to be all described, as long as however, the combination of these technical characteristics is not deposited
In contradiction, all should be considered as described in this specification.
Above-described embodiments merely represent several embodiments of the utility model, the description thereof is more specific and detailed,
But it cannot be understood as the limitations to utility model patent range.It should be pointed out that for the common skill of this field
For art personnel, without departing from the concept of the premise utility, various modifications and improvements can be made, these are belonged to
The protection scope of the utility model.Therefore, the scope of protection shall be subject to the appended claims for the utility model patent.
Claims (10)
1. a kind of precise mobile platform characterized by comprising
Pedestal (100)；
First guiding device (200), including the first straight line motor (210) being set on the pedestal (100) and with described first
Corresponding first air-float guide rail (220) of linear motor (210), first air-float guide rail (220) is by the first straight line motor
(210) it drives；
Second guiding device (300), the second straight line motor (310) including being fixedly connected on first air-float guide rail (220)
With the second air-float guide rail (320) corresponding with second straight line motor (310), second air-float guide rail (320) is by described
Second straight line motor (310) driving；And
Objective table (400) is fixedly connected on second air-float guide rail (320).
2. precise mobile platform according to claim 1, which is characterized in that first guiding device (200) is at least
Two groups, several first guiding devices (200) are arranged in parallel；The second straight line motor (310) is led with several described first
It is fixedly connected with to the first air-float guide rail (220) of device (200).
3. precise mobile platform according to claim 1, which is characterized in that the extension of first guiding device (200)
Projection of the extending direction of direction and second guiding device (300) in the pedestal (100) is mutually perpendicular to.
4. precise mobile platform according to claim 1, which is characterized in that first air-float guide rail (220) and/or institute
It states the second air-float guide rail (320) and is respectively arranged with buffer unit (500) in the two sides of respective extending direction.
5. precise mobile platform according to claim 4, which is characterized in that the buffer unit (500) includes two slow
Stamping (510).
6. precise mobile platform according to claim 5, which is characterized in that the bolster (510) is spring buffering
Device or pneumatic cushion.
7. precise mobile platform according to claim 1, which is characterized in that the pedestal of first air-float guide rail (220)
It is integrally formed with the pedestal (100).
8. precise mobile platform according to claim 1, which is characterized in that the first straight line motor (210) is iron-free
Core linear motor.
9. precise mobile platform according to claim 1, which is characterized in that the second straight line motor (310) is iron-free
Core linear motor.
10. precise mobile platform according to claim 1, which is characterized in that first guiding device (200) has two
Group, the first guiding device (200) described in two groups are arranged in parallel；The second straight line motor (310) and the first guiding described in two groups
The first air-float guide rail (220) of device (200) is fixedly connected with；The centre distance of two first guiding devices (200) is
800mm。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820837294.7U CN208729169U (en) | 2018-05-31 | 2018-05-31 | Precise mobile platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820837294.7U CN208729169U (en) | 2018-05-31 | 2018-05-31 | Precise mobile platform |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208729169U true CN208729169U (en) | 2019-04-12 |
Family
ID=66023240
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| CN201820837294.7U Active CN208729169U (en) | 2018-05-31 | 2018-05-31 | Precise mobile platform |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114309925A (en) * | 2021-12-31 | 2022-04-12 | 河南通用智能装备有限公司 | Wafer recessive cutting device |
| CN114833597A (en) * | 2022-05-12 | 2022-08-02 | 横川机器人（深圳）有限公司 | Gantry double-drive multi-axis motion platform |
| CN117047499A (en) * | 2023-10-11 | 2023-11-14 | 无锡星微科技有限公司杭州分公司 | Nano positioning precision controller and motion platform |
-
2018
- 2018-05-31 CN CN201820837294.7U patent/CN208729169U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114309925A (en) * | 2021-12-31 | 2022-04-12 | 河南通用智能装备有限公司 | Wafer recessive cutting device |
| CN114833597A (en) * | 2022-05-12 | 2022-08-02 | 横川机器人（深圳）有限公司 | Gantry double-drive multi-axis motion platform |
| CN117047499A (en) * | 2023-10-11 | 2023-11-14 | 无锡星微科技有限公司杭州分公司 | Nano positioning precision controller and motion platform |
| CN117047499B (en) * | 2023-10-11 | 2024-01-19 | 无锡星微科技有限公司杭州分公司 | Nano positioning precision controller and motion platform |
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| TR01 | Transfer of patent right |
Effective date of registration: 20220729 Address after: 518000 101, building 6, Wanyan Industrial Zone, Qiaotou community, Fuhai street, Bao'an District, Shenzhen City, Guangdong Province Patentee after: Shenzhen Han's Semiconductor Equipment Technology Co.,Ltd. Address before: 518051 Dazu laser building, 9 new West Road, North Nanshan District high tech park, Shenzhen, Guangdong Patentee before: HAN'S LASER TECHNOLOGY INDUSTRY GROUP Co.,Ltd. |