CN103104793B - Integrated type six degrees of freedom precision positioning platform - Google Patents
Integrated type six degrees of freedom precision positioning platform Download PDFInfo
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- CN103104793B CN103104793B CN201310029779.5A CN201310029779A CN103104793B CN 103104793 B CN103104793 B CN 103104793B CN 201310029779 A CN201310029779 A CN 201310029779A CN 103104793 B CN103104793 B CN 103104793B
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Abstract
The invention discloses an integrated type six degrees of freedom precision positioning platform. The integrated type six degrees of freedom precision positioning platform comprises a base, a lower platform component, a middle platform component and an upper platform component. The integrated type six degrees of freedom precision positioning platform utilizes a piezoelectric ceramics brake to enable the lower platform component to achieve rectilinear motion along an X direction and a Y direction of a coordinate system, enable the middle platform component to achieve a rectilinear motion along an Z direction of the coordinate system and a rotary oscillation around an axis which is parallel to the X axis and an axis which is parallel to the Y axis, and enables the upper platform component to rotate around the Z axis. The integrated type six degrees of freedom precision positioning platform can achieve precise control position on the six degrees of freedom and effectively avoids displacement coupling among axes due to the fact that the middle platform component and the lower platform component are designed into a symmetric structure. Meanwhile, the transmission platform can achieve integral manufacture, is driven by the piezoelectric ceramics brake, has the advantages of being free from friction and coupling, being high in precision, long in journey and high in resolution rate and can meet complex manufacturing and operation requirements of nanometer science and technology studies.
Description
Technical field
The present invention relates to a kind of flexible precision drive platform, particularly a kind of integral type precision positioning table with six degrees of freedom.
Background technique
Along with developing rapidly of the subjects such as microelectronic technology, nanometer technique, space technology, precision engineering, bioengineering, manufacture field is own through entering " sub-micron-nanometer " epoch.Along with rise and the fast development of nanometer technique, at numerous sciemtifec and technical sphere if precision optical machinery manufacture, instrument and apparatus, optics, materials science etc. are all in the urgent need to high position precision, high-resolution precision positioning technology.Nanometer micro displacement workbench provides the nanometer-scale motions of one dimension, two peacekeeping multidimensional for being engaged in nanoscale science and technology research, be the critical equipment equipment of nanoscale science and technology research indispensability.
In prior art, platform for photoelectric elements has Stewart platform, magnetic levitation worktable and piezoelectric working platform, although the above two can meet the requirement of Long Distances, but be difficult to reach nano-precision requirement, simultaneously, also there is complex structure, processing difficulties, the shortcoming such as wayward, and it is high to have precision based on Piezoelectric Ceramic piezotable, compact structure, the advantages such as fast response time, but the piezotable of present stage is substantially all confined to below four degrees of freedom, freedom of movement is limited, there is no the platform that can realize large rotary oscillation and rotate along the horizontal plane, and its stroke is all less, the ability of its amount of movement and motion is all difficult to the requirement meeting complicated processing and operation.
Therefore, in order to solve the problem, need a kind of highi degree of accuracy, high rigidity, being easy to control, possess Long Distances, multivariant locating platform, to meet complicated processing and operation requirements in nanoscale science and technology research.
Summary of the invention
In view of this, the object of this invention is to provide a kind of integral type precise positioning platform with six freedom of motion, this platform accurately can control location on six-freedom degree, there is the features such as highi degree of accuracy, high rigidity, Long Distances, large swing, complicated processing and operation requirements in nanoscale science and technology research can be met.
Integral type precise positioning platform with six freedom of motion of the present invention, comprises pedestal, lower bolster assembly, halfpace assembly and upper mounting plate assembly, with pedestal upper surface be some initial point, with this plane for XY plane sets up rectangular coordinate system in space X-Y-Z;
Described lower bolster assembly comprise center be located at Z axis lower bolster and be parallel to pedestal upper surface arrange and be connected to pedestal and lower bolster for driving lower bolster along X at least two translation driving devices with Y-direction translation; Described translation driving device comprises translational displacement enlarger and translation piezoelectric ceramic actuator; Described translational displacement enlarger is by eight rigid link head and the tail hinged plane eight-bar linkage formed successively; Two working ends of described translation piezoelectric ceramic actuator are fixedly connected with the thin tail sheep rigid link I of two in translational displacement enlarger respectively; A Large travel range rigid link I in translational displacement enlarger is fixed on pedestal, and another root Large travel range rigid link I is articulated with lower bolster by parallel, isometric two connecting bodys I and forms plane four slotted link mechanism;
Described halfpace assembly comprise the halfpace being located at Z axis in center arrange with perpendicular to lower bolster place plane and be connected to lower bolster and halfpace for driving halfpace to be elevated and at least four lift driving mechanisms rotated around the axle parallel with X-axis and the axle parallel with Y-axis along Z-direction; Described lift driving mechanism comprises lifting displacement amplifying mechanism and lifting piezoelectric ceramic actuator; Described lifting displacement amplifying mechanism is by eight rigid link head and the tail hinged plane eight-bar linkage formed successively; Two working ends of described lifting piezoelectric ceramic actuator are fixedly connected with two thin tail sheep rigid link II in lifting displacement amplifying mechanism respectively; A Large travel range rigid link II in lifting displacement amplifying mechanism is fixed on lower bolster, and another root Large travel range rigid link II is articulated with halfpace by a connecting body II;
Described upper mounting plate assembly comprises center and is located at the upper mounting plate of Z axis and is parallel to halfpace place plane and arranges and at least two rotating driving devices for driving upper mounting plate to rotate around Z axis being connected to halfpace and upper mounting plate; Described rotating driving device comprises swing offset enlarger and rotary piezoelectric ceramic driver; Described swing offset enlarger is by eight rigid link head and the tail hinged plane eight-bar linkage formed successively; Two working ends of described rotary piezoelectric ceramic driver are fixedly connected with the thin tail sheep rigid link III of two in swing offset enlarger respectively; A Large travel range rigid link III in swing offset enlarger is fixed on halfpace, and another root Large travel range rigid link III is articulated with upper mounting plate by an eccentric connecting body.
Further, described connecting body I, connecting body II and eccentric connecting body are straight beam type flexible hinge;
Further, each connecting body I length is equal; Each connecting body II length is equal; Each eccentric connecting body length is equal;
Further, described translation driving device be around Z axis circumferential array and along X to four of Y-direction cross distribution; Described lift driving mechanism be around Z axis circumferential array and along X to four of Y-direction cross distribution, described rotating driving device is around evenly distributed two of Z axis circumference;
Further, described translational displacement enlarger, lifting displacement amplifying mechanism, swing offset enlarger, connecting body I, connecting body II, eccentric connecting body, lower bolster, halfpace and upper mounting plate one-body molded.
The invention has the beneficial effects as follows: integral type precise positioning platform with six freedom of motion of the present invention, the inverse piezoelectric effect of piezoelectric constant is utilized to achieve upper mounting plate along X, Y of system of coordinates and Z-direction linear translation and the six-degree-of-freedom interlock precision positioning that rotates around the axle parallel with X-axis, the axle parallel with Y-axis and Z axis, and increase stroke by displacement amplifying mechanism, make upper mounting plate have Long Distances, large swing, multi-freedom degree, be easy to the advantages such as control; The symplex structure that lower bolster assembly designs, also effectively eliminates between centers displacement coupling, meanwhile, passes through the hinged of flexible hinge, fully achieve the gapless of platform, without friction driving, effectively improve the transmission accuracy of platform between each component; The displacement resolution of piezoelectric ceramic actuator is high in addition, fast response time, makes micrometer-nanometer transmission platform of the present invention also possess the advantages such as highi degree of accuracy, high-resolution, high frequency sound, can meet complicated processing and operation requirements in nanoscale science and technology research.
Accompanying drawing explanation
Below in conjunction with drawings and Examples, the invention will be further described:
Fig. 1 is structural representation of the present invention;
Fig. 2 is the plan view that the present invention removes upper mounting plate.
Embodiment
Fig. 1 is structural representation of the present invention, Fig. 2 is the plan view that the present invention removes upper mounting plate, as shown in the figure: the integral type precise positioning platform with six freedom of motion of the present embodiment, comprise pedestal 1, lower bolster assembly, halfpace assembly and upper mounting plate assembly, with pedestal 1 upper surface be some initial point, with this plane for XY plane sets up rectangular coordinate system in space X-Y-Z; As shown in Figure 1, pedestal 1 is square plate, rectangular coordinate system in space X-Y-Z is with pedestal 1 upper surface mid point for initial point, and X-axis and Y-axis are parallel to arbitrary group of pedestal 1 and face limit, and pedestal 1, lower bolster assembly, halfpace assembly are connected from bottom to top successively with upper mounting plate assembly;
Described lower bolster assembly comprise center be located at Z axis lower bolster 2 and be parallel to pedestal 1 upper surface arranges and be connected to pedestal 1 and lower bolster 2 for driving lower bolster 2 along X at least two translation driving devices 3 with Y-direction translation; Described translation driving device 3 comprises translational displacement enlarger 11a and translation piezoelectric ceramic actuator 12a; Described translational displacement enlarger 11a is by eight rigid link head and the tail hinged plane eight-bar linkage formed successively; Two working ends of described translation piezoelectric ceramic actuator 12a are fixedly connected with two thin tail sheep rigid link I 13a in translational displacement enlarger 11a respectively; Large travel range rigid link I 14a in translational displacement enlarger 11a is fixed on pedestal 1, and another root Large travel range rigid link I 14a is articulated with lower bolster 2 by parallel, isometric two connecting bodys I 4 and forms plane four slotted link mechanism; Plane four slotted link mechanism not only can effectively drive lower bolster 2 to move, and can also carry out spacingly making it translation and not rotating to lower bolster 2, ensure control accuracy; Each translation driving device 3 coordinate export corresponding displacement amount can realize driving lower bolster 2 along X to Y-direction translation; When thin tail sheep rigid link I 13a refers to that translational displacement enlarger 11a moves, minimum two of change in displacement in all motion bars, when Large travel range rigid link I 14a refers to that translational displacement enlarger 11a moves, maximum two of change in displacement in all motion bars;
Described halfpace assembly comprise the halfpace 5 being located at Z axis in center arrange with perpendicular to lower bolster 2 place plane and be connected to lower bolster 2 and halfpace 5 for driving halfpace 5 to be elevated and at least four lift driving mechanisms 6 rotated around the axle parallel with X-axis and the axle parallel with Y-axis along Z-direction, described lift driving mechanism 6 comprises lifting displacement amplifying mechanism 11b and lifting piezoelectric ceramic actuator 12b, described lifting displacement amplifying mechanism 11b is by eight rigid link head and the tail hinged plane eight-bar linkage formed successively, two working ends of described lifting piezoelectric ceramic actuator 12b are fixedly connected with two thin tail sheep rigid link II 13b in lifting displacement amplifying mechanism 11b respectively, Large travel range rigid link II 14b in lifting displacement amplifying mechanism 11b is fixed on lower bolster 2, another root Large travel range rigid link II 14b is articulated with halfpace 5 by a connecting body II 7, when thin tail sheep rigid link II 13b refers to the 11b motion of lifting displacement amplifying mechanism, minimum two of change in displacement in all motion bars, when Large travel range rigid link II 14b refers to the 11b motion of lifting displacement amplifying mechanism, maximum two of change in displacement in all motion bars, each lift driving mechanism 6 cooperation can realize when exporting corresponding displacement amount driving central platform to rotate along Z axis lifting and around around the axle parallel with X-axis and the axle parallel with Y-axis,
Described upper mounting plate assembly comprises center and is located at the upper mounting plate 8 of Z axis and is parallel to halfpace 5 place plane and arranges and at least two rotating driving devices 9 for driving upper mounting plate 8 to rotate around Z axis being connected to halfpace 5 and upper mounting plate 8; Described rotating driving device 9 comprises swing offset enlarger 11c and rotary piezoelectric ceramic driver 12c; Described swing offset enlarger 11c is by eight rigid link head and the tail hinged plane eight-bar linkage formed successively; Two working ends of described rotary piezoelectric ceramic driver 12c are fixedly connected with two thin tail sheep rigid link III 13c in swing offset enlarger 11c respectively; Large travel range rigid link III 14c in swing offset enlarger 11c is fixed on halfpace 5, and another root Large travel range rigid link III 14c is articulated with upper mounting plate 8 by an eccentric connecting body 10; When thin tail sheep rigid link III 13c refers to that swing offset enlarger 11c moves, minimum two of change in displacement in all motion bars, when Large travel range rigid link III 14c refers to that swing offset enlarger 11c moves, maximum two of change in displacement in all motion bars; Eccentric connecting body 10 refers to that the elongation line of this connecting body and upper mounting plate 8 axis are non-intersect, and each eccentric connecting body 10 not conllinear is arranged, and each rotating driving device 9 is coordinated during the corresponding displacement of output and drives upper mounting plate 8 to rotate around Z axis;
Plane eight-bar linkage in the present embodiment is by the rectangular ring-type of eight rigid link head and the tail successively hinged formation, during this plane eight link motion, be positioned at long two rigid link change in displacement amplitudes to two ends and be less than wide two rigid link to both sides, be therefore positioned at long minimum to two rigid link change in displacement at two ends; Be positioned at wide two rigid link change in displacement to both sides maximum; Other four rigid link and minimum and maximum totally four rigid link of change in displacement by connecting body III separately be hinged to ring, and the connecting body III being articulated with the minimum rigid link of change in displacement is arranged in the outer part along plane eight-bar linkage place plane; The connecting body III being articulated with the maximum rigid link of change in displacement is arranged in the inner part along plane eight-bar linkage place plane; Plane eight-bar linkage can be effectively avoided to produce motion conflict.
In the present embodiment, described connecting body I 4, connecting body II 7, connecting body III and eccentric connecting body 10 are straight beam type flexible hinge, avoid using common hinge mode, effectively prevent the driving error that the factors such as the gap of traditional articulated manner, friction cause, achieve the gapless of platform transmission, without friction, effectively improve the precision of transmission platform.
In the present embodiment, each connecting body I 4 length is equal; Each connecting body II 7 length is equal; Each eccentric connecting body 10 length is equal, makes each translation driving device 3 drive the arm of force equal; The driving arm of force of each lift driving mechanism 6 is equal; The driving arm of force of each rotating driving device 9 is equal, therefore each translation driving device 3, lift driving mechanism 6 and rotating driving device 9 can be set to respectively the piezoelectric ceramic actuator 12 of the hinge of same structure parameter, displacement amplifying mechanism 11 and same model, be convenient to the control of manufacturing and output displacement.
In the present embodiment, described translation driving device 3 be around Z axis circumferential array and along X to four of Y-direction cross distribution; Described lift driving mechanism 6 be around Z axis circumferential array and along X to four of Y-direction cross distribution, described rotating driving device 9 is around evenly distributed two of Z axis circumference; Halfpace assembly and lower bolster assembly are symplex structure, effectively eliminate between centers displacement coupling; When the translation driving device 3 not output displacement along X to layout, the displacement reverse greatly such as translation driving device 3 output of arranging along Y-direction or only have side's output displacement, then realize the linear motion along Y-direction of lower bolster 2, halfpace 5 and upper mounting plate 8, extend by controlling piezoelectric ceramic actuator 12 and shorten, whole platform can be made to do back and forth movement in Y-direction, and same can realize the back and forth movement of whole platform in X-direction; When four lift driving mechanisms 6 export equal displacement, then halfpace 5 and upper mounting plate 8 is jointly driven to move linearly along Z-direction; When one group of lift driving mechanism be oppositely arranged 6 not output displacement, when other one group of lift driving mechanism be oppositely arranged 6 exports the contrary displacement in equal and opposite in direction direction, halfpace 5 rotates around the axle parallel with X-axis or the axle parallel with Y-axis with upper mounting plate 8, extend by controlling piezoelectric ceramic actuator 12 and shorten, halfpace 5 and upper mounting plate 8 reciprocally swinging can be made to rotate; Upper mounting plate 8 can be driven to rotate around Z axis when rotating driving device 9 exports corresponding displacement, the reciprocating swing of upper mounting plate 8 around Z axis can be realized by the elongation and shortening controlling piezoelectric ceramic actuator 12; When only having one to work in rotating driving device 9, can realize upper mounting plate 8 under single driving around certain axle reciprocating swing parallel with Z axis, as can be seen here, six-degree-of-freedom integral type flexible precision positioning platform of the present invention can realize the transmission along the large movement of X, Y, Z axis, the large swing around X, Y-axis and large rotation 6 degrees of freedom around Z axis.
In the present embodiment, described translational displacement enlarger 11a, lifting displacement amplifying mechanism 11b, swing offset enlarger 11c, connecting body I 4, connecting body II 7, eccentric connecting body 10, lower bolster 2, halfpace 5 and upper mounting plate 8 are one-body molded, namely by whole block material through Linear cut, brill, milling or utilize the processes such as metallic dust rapid shaping to form, compact structure, gapless, nothing friction, effectively can improve the precision of transmission platform.
What finally illustrate is, above embodiment is only in order to illustrate technological scheme of the present invention and unrestricted, although with reference to preferred embodiment to invention has been detailed description, those of ordinary skill in the art is to be understood that, can modify to technological scheme of the present invention or equivalent replacement, and not departing from aim and the scope of technical solution of the present invention, it all should be encompassed in the middle of right of the present invention.
Claims (5)
1. an integral type precise positioning platform with six freedom of motion, it is characterized in that: comprise pedestal (1), lower bolster assembly, halfpace assembly and upper mounting plate assembly, with pedestal (1) upper surface a bit for initial point, with this plane for XY plane sets up rectangular coordinate system in space X-Y-Z;
Described lower bolster assembly comprise center be located at Z axis lower bolster (2) and be parallel to pedestal (1) upper surface arrange and be connected to pedestal (1) and lower bolster (2) for driving lower bolster (2) along X at least two translation driving devices (3) with Y-direction translation; Described translation driving device (3) comprises translational displacement enlarger (11a) and translation piezoelectric ceramic actuator (12a); Described translational displacement enlarger (11a) is by eight rigid link head and the tail hinged plane eight-bar linkage formed successively; Two working ends of described translation piezoelectric ceramic actuator (12a) are fixedly connected with the two thin tail sheep rigid link I (13a) in translational displacement enlarger (11a) respectively; A Large travel range rigid link I (14a) in translational displacement enlarger (11a) is fixed on pedestal (1), and another root Large travel range rigid link I (14a) is articulated with lower bolster (2) by parallel, isometric two connecting bodys I (4) and forms plane four slotted link mechanism;
Described halfpace assembly comprise the halfpace (5) being located at Z axis in center arrange with perpendicular to lower bolster (2) place plane and be connected to lower bolster (2) and halfpace (5) for driving halfpace (5) to be elevated and at least four lift driving mechanisms (6) rotated around the axle parallel with X-axis and the axle parallel with Y-axis along Z-direction; Described lift driving mechanism (6) comprises lifting displacement amplifying mechanism (11b) and lifting piezoelectric ceramic actuator (12b); Described lifting displacement amplifying mechanism (11b) is by eight rigid link head and the tail hinged plane eight-bar linkage formed successively; Two working ends of described lifting piezoelectric ceramic actuator (12b) are fixedly connected with the two thin tail sheep rigid link II (13b) in lifting displacement amplifying mechanism (11b) respectively; A Large travel range rigid link II (14b) in lifting displacement amplifying mechanism (11b) is fixed on lower bolster (2), and another root Large travel range rigid link II (14b) is articulated with halfpace (5) by a connecting body II (7);
Described upper mounting plate assembly comprises center and is located at the upper mounting plate (8) of Z axis and is parallel to halfpace (5) place plane and arranges and at least two rotating driving devices (9) for driving upper mounting plate (8) to rotate around Z axis being connected to halfpace (5) and upper mounting plate (8); Described rotating driving device (9) comprises swing offset enlarger (11c) and rotary piezoelectric ceramic driver (12c); Described swing offset enlarger (11c) is by eight rigid link head and the tail hinged plane eight-bar linkage formed successively; Two working ends of described rotary piezoelectric ceramic driver (12c) are fixedly connected with the two thin tail sheep rigid link III (13c) in swing offset enlarger (11c) respectively; A Large travel range rigid link III (14c) in swing offset enlarger (11c) is fixed on halfpace (5), and another root Large travel range rigid link III (14c) is articulated with upper mounting plate (8) by an eccentric connecting body (10).
2. integral type precise positioning platform with six freedom of motion according to claim 1, is characterized in that: described connecting body I (4), connecting body II (7) and eccentric connecting body (10) are straight beam type flexible hinge.
3. integral type precise positioning platform with six freedom of motion according to claim 2, is characterized in that: each connecting body I (4) length is equal; Each connecting body II (7) length is equal; Each eccentric connecting body (10) length is equal.
4. integral type precise positioning platform with six freedom of motion according to claim 3, is characterized in that: described translation driving device (3) be around Z axis circumferential array and along X to four of Y-direction cross distribution; Described lift driving mechanism (6) be around Z axis circumferential array and along X to four of Y-direction cross distribution, described rotating driving device (9) is around evenly distributed two of Z axis circumference.
5. the integral type precise positioning platform with six freedom of motion according to the arbitrary claim of Claims 1-4, is characterized in that: described translational displacement enlarger (11a), lifting displacement amplifying mechanism (11b), swing offset enlarger (11c), connecting body I (4), connecting body II (7), eccentric connecting body (10), lower bolster (2), halfpace (5) and upper mounting plate (8) are one-body molded.
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| CN1588556A (en) * | 2004-07-30 | 2005-03-02 | 中国科学院上海光学精密机械研究所 | Five-degree-of-freedom precision positioning platform |
| CN2758935Y (en) * | 2004-12-28 | 2006-02-15 | 华南理工大学 | Plane three-freedom precision positioning platform |
| CN2782326Y (en) * | 2005-03-10 | 2006-05-24 | 中国科学院上海光学精密机械研究所 | Six-freedom-degree precision positioning workbench |
| CN1776471A (en) * | 2005-12-05 | 2006-05-24 | 北京航空航天大学 | Motion platform mechanism suitable for optical waveguide automatic-packaging robot system |
| JP5061569B2 (en) * | 2006-10-12 | 2012-10-31 | 株式会社安川電機 | Alignment stage |
| CN201168876Y (en) * | 2008-01-04 | 2008-12-24 | 华南农业大学 | Three-freedom degree precision positioning worktable |
| CN101786269A (en) * | 2010-01-26 | 2010-07-28 | 重庆大学 | Micrometer-nanometer transmission platform |
| CN103225728A (en) * | 2013-04-24 | 2013-07-31 | 山东大学 | Two-dimensional parallel micromotion platform driven by piezoceramic |
| CN103727364A (en) * | 2014-01-03 | 2014-04-16 | 天津大学 | Three-freedom-degree precision locating platform |
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| CN103104793A (en) | 2013-05-15 |
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