CN105033963A - Three-degree-of-freedom parallel-connection precision workbench driven by non-resonance piezoelectric motors - Google Patents
Three-degree-of-freedom parallel-connection precision workbench driven by non-resonance piezoelectric motors Download PDFInfo
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- CN105033963A CN105033963A CN201510421151.9A CN201510421151A CN105033963A CN 105033963 A CN105033963 A CN 105033963A CN 201510421151 A CN201510421151 A CN 201510421151A CN 105033963 A CN105033963 A CN 105033963A
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Abstract
The invention discloses a three-degree-of-freedom flexible parallel-connection precision workbench driven by non-resonance piezoelectric motors. The three-degree-of-freedom flexible parallel-connection precision workbench is composed of a base, the non-resonance piezoelectric linear motors, guide rails, sloping bench structures, flexible spherical hinges and a workbench body. The workbench is driven by three driving mechanisms. In each driving mechanism, the corresponding guide rail and the sloping bench structure are driven by the corresponding bipedal driven piezoelectric linear motor, and the slopping bench structure is connected with a movable platform through the corresponding flexible spherical hinge. By means of the cooperation of the three driving mechanisms, the three-degree-of-freedom motion of Z-axis translational motion, rotation around the X-axis and rotation around the Y-axis is achieved. The three-degree-of-freedom flexible parallel-connection precision workbench is simple and compact in structure, has the advantages of high precision, large stroke, rapid dynamic response and the like, and can be applied to guided-wave optical device connection, packaging and other precision manufacturing fields.
Description
Technical field
The present invention relates to Precision Piezoelectric and activate instrument field, the freedom degree parallel connection precision stage of specifically a kind of non-resonant piezoelectric motor driving.
Background technology
Micro/nano level workbench has very important effect in modern precision manufacture, manufactures, the field such as IC manufacturing is widely used at fiber alignment and encapsulation, super hot investment casting, MEMS.But traditional precision stage high accuracy and Long Distances can not get both, the translation of piezoelectric motor Z axis drives the technical problems such as difficulty.
Along with development and the application of nanometer technique, many applications propose more performance indications to micro/nano level workbench, and wherein high accuracy and Long Distances weigh the most important index of micro/nano level service behaviour.Existing micro/nano level locating platform is almost all realized by piezoelectric ceramic actuator.
Piezoelectric linear motor is a kind of novel straight line driving mechanism grown up in recent years, utilizes the inverse piezoelectric effect of piezoelectric, adopts specific version to make.When this motor has a microminiaturization efficiency high, directly can produce that straight line exports, structure is simple, response is fast, position and velocity control accuracy is high, without advantages such as electromagnetic interference.Piezoelectric motor directly push work platform can carry out straight line and rotary motion without the need to mechanism's conversion, and thus the relative electromagnetic driving system of response speed is highly improved, and meanwhile, the use of piezoelectric motor also makes the structure of system be simplified.
Summary of the invention
For the deficiency of above-mentioned background technology, the object of this invention is to provide the freedom degree parallel connection precision stage that a kind of non-resonant piezoelectric motor drives, the grand dynamic and fine motion of workbench can be realized under different working modes, significantly shorten driving-chain, and well can realize the translation of workbench Z axis.
The present invention is for solving the problems of the technologies described above by the following technical solutions:
The freedom degree parallel connection precision stage that non-resonant piezoelectric motor drives, comprises base 1, several off-resonance piezoelectric motors, several sloping platform mechanisms, several flexible ball hinge bodies and workbench 2; An off-resonance piezoelectric motor, a sloping platform mechanism and a flexible ball hinge body form single-degree-of-freedom driver element, wherein, described sloping platform mechanism there is a sloping platform, and be fixed on base 1, off-resonance piezoelectric motor is disposed side by side on by sloping platform mechanism, one end of flexible ball hinge body is connected on the sloping platform of sloping platform mechanism, and the other end is connected on workbench 2.
This freedom degree parallel connection precision stage comprises three single-degree-of-freedom driver elements, and three common connecting working tables 2 of single-degree-of-freedom driver element, centered by workbench 2, are radially uniformly distributed.
Described sloping platform mechanism comprises rolling cross unit, ceramic friction plate, sloping platform, slide unit and guide rail slide block; Described rolling cross unit is arranged on the bottom of sloping platform mechanism, and its side is provided with ceramic friction plate; Described slide unit is fixedly connected on rolling cross unit upper surface, and described sloping platform is fixedly connected on slide unit; Described sloping platform upper surface, from the horizontal by angle, is provided with guide rail, and guide rail slide block is movably connected on sloping platform by guide rail; Described guide rail slide block connects one end of flexible ball hinge body.
Described flexible ball hinge body comprises supporting seat, supporting seat gland, flexible ball pivot and workbench gland; Supporting seat is fixed on guide rail slide block, and flexible ball pivot one end is fixed on supporting seat by supporting seat gland, and the other end is fixed on workbench 2 by workbench gland.
Described off-resonance piezoelectric motor adopts biped to drive piezoelectric linear motor, and this motor is provided with driving head.
Described ceramic friction plate and biped drive the driving head close contact on piezoelectric linear motor, and sloping platform is bolted on the slide unit of rolling cross unit, and guide rail is bolted on sloping platform inclined-plane.
The present invention adopts above technical scheme compared with prior art, has following technique effect:
1, apply non-resonant biped and drive piezoelectric linear motor Direct driver workbench, significantly shorten driving-chain, improve response speed, Long Distances start can be realized under continuous start mode of operation, high-resolution accurate actuating can be realized under direct acting mode of operation.
The problems such as 2, adopting sloping platform mechanism, is vertical direction displacement by horizontal direction converts displacement, and effectively the thrust of solution piezoelectric motor Direct driver vertical motion generation is not enough, self-locking is difficult.
3, adopt parallel combination form, workbench is driven by three piezoelectric motors simultaneously, has the advantages such as inertia is little, fast response time.
Accompanying drawing explanation
Fig. 1 is the top view of this freedom degree parallel connection precision stage;
Fig. 2 is the stereogram of this freedom degree parallel connection precision stage;
Fig. 3 is that piezoelectric motor drives rolling cross unit structure top view;
Fig. 4 is that piezoelectric motor drives rolling cross unit structural perspective;
Fig. 5 is sloping platform mechanism composition diagram;
Fig. 6 is flexible ball hinge body composition diagram;
Wherein, the resonant piezoelectric motor of a1, b1, c1-, a2, b2, c2-sloping platform mechanism, a3, b3, c3-flexible ball hinge body, a21, b21, c21-rolling cross unit, a22, b22, c22-slide unit, a23, b23, c23-ceramic friction plate, a24, b24, c24-sloping platform, a25, b25, c25-guide rail, a26, b26, c26-guide rail slide block;
A31, b31, c31-supporting seat, a32, b32, c32-supporting seat gland, the flexible ball pivot of a33, b33, c33-, a34, b34, c34-workbench gland, 1-base, 2-workbench.
Detailed description of the invention
The invention provides the freedom degree parallel connection precision stage that a kind of non-resonant piezoelectric motor drives, for making object of the present invention, clearly, clearly, and the present invention is described in more detail with reference to accompanying drawing examples for technical scheme and effect.Should be appreciated that concrete enforcement described herein is only in order to explain the present invention, is not intended to limit the present invention.
Be described in detail below in conjunction with the technical scheme of accompanying drawing to invention:
As shown in Figure 1 and Figure 2, the freedom degree parallel connection precision stage that non-resonant piezoelectric motor provided by the invention drives, comprises base 1, three groups of non-resonant piezoelectric motors a1, b1, c1, three groups of sloping platform mechanisms a2, b2, c2, three groups of flexible ball hinge body a3, b3, c3 and workbench 2.
This freedom degree parallel connection precision stage comprises three single-degree-of-freedom driver elements, and three common connecting working tables 2 of single-degree-of-freedom driver element, centered by workbench 2, are radially uniformly distributed.Three groups of sloping platform mechanisms a2, b2, c2 become 120 degree and are evenly arranged on base 1, an off-resonance piezoelectric motor, a sloping platform mechanism and a flexible ball hinge body form single-degree-of-freedom driver element, wherein, non-resonant piezoelectric motor in each single-degree-of-freedom driver element is parallel to sloping platform arrangement of mechanism, and the driving head of non-resonant piezoelectric motor contacts with ceramic friction plate.Flexible ball hinge body one end is vertically mounted on guide rail slide block, other end connecting working table 2.Workbench 2 should be positioned at level at initial position.
Sloping platform mechanism composition as shown in Figure 5, comprises rolling cross unit, ceramic friction plate, sloping platform, slide unit and guide rail slide block; Above-mentioned rolling cross unit is arranged on the bottom of sloping platform mechanism, and its side is provided with ceramic friction plate; Described slide unit is fixedly connected on rolling cross unit upper surface, and described sloping platform is fixedly connected on slide unit; Described sloping platform upper surface, from the horizontal by angle, is provided with guide rail, and guide rail slide block is movably connected on sloping platform by guide rail; Described guide rail slide block connects one end of flexible ball hinge body.
Rolling cross unit middle guide is fixed by bolts on base 1 by precision instrument, and sloping platform is fixed on slide unit by 4 hexagon socket cap head screws, and guide rail is fixed by bolts on sloping platform inclined-plane by precision instrument, from the horizontal by 30 degree of angles.Horizontal direction converts displacement can be vertical direction displacement by sloping platform mechanism.
Piezoelectric motor drives rolling cross unit structure as shown in Figure 3, Figure 4, biped drives piezoelectric linear motor a1, b1, c1 to be fixed on base 1 respectively by two hexagon socket cap head screws, and driving head contacts by AB sticker on ceramic friction plate a23, b23, c23 of intersecting rolling unit side.After driving piezoelectric linear motor a1, b1, c1 to access suitable pumping signal to biped, motor driving head produces fine motion, drives ceramic friction plate a23, b23, c23 to move to specific direction.
Flexible ball hinge body composition as shown in Figure 6, comprises supporting seat, supporting seat gland, flexible ball pivot and workbench gland; Supporting seat is fixed on guide rail slide block, and flexible ball pivot one end is fixed on supporting seat by supporting seat gland, and the other end is fixed on workbench 2 by workbench gland.Concrete, supporting seat a31, b31, c31 are vertically fixed on guide rail slide block a26, b26, c26 respectively by 2 hexagon socket cap head screws, from the horizontal by 60 degree of angles.Flexible ball pivot a33, b33, c33 one end is fixed on supporting seat a31, b31, c31 by 2 hexagon socket cap head screws by supporting seat gland a32, b32, c32, and flexible ball pivot a33, b33, c33 other end is fixed on workbench 2 by workbench gland a34, b34, c34 and 2 hexagon socket cap head screw.Flexible ball hinge body can realize deflection supporting among a small circle.
Composition graphs 1,2, illustrates the present invention realizes Z axis translation, XY axle rotates motion scheme and mechanism; X, Y-axis are in horizontal plane, and as shown in Figure 1, vertically, its concrete direction as shown in Figure 2 for Z axis in its concrete direction.
(1) Z axis translation
A, b, c tri-unit piezoelectric motors a1, b1, c1 input identical signal, advance simultaneously or retreat.When piezoelectric motor a1, b1, c1 advance simultaneously, workbench moves along Z axis positive direction; When piezoelectric motor a1, b1, c1 retreat simultaneously, workbench moves along Z axis negative direction.
(2) Y-axis rotates
A, b two unit piezoelectric motors a1, b1 input identical signal, the signal that c unit piezoelectric motor c1 input phase is contrary, and piezoelectric motor a1, b1 advance simultaneously or retreat, and piezoelectric motor c1 is contrary with piezoelectric motor a1, b1 direction of motion.Piezoelectric motor a1, b1 advance simultaneously, and when piezoelectric motor c1 retreats, workbench rotates clockwise around Y-axis positive direction; Piezoelectric motor a1, b1 retreat simultaneously, and when piezoelectric motor c1 advances, workbench rotates counterclockwise around Y-axis positive direction.
(3) X-axis rotates
The signal that a, b two unit piezoelectric motor a1, b1 input phases are contrary, c unit piezoelectric motor c1 inputs the signal that amplitude is piezoelectric motor a1, b1 amplitude 1/2.Piezoelectric motor a1, c1 retreat, and when piezoelectric motor b1 advances, workbench rotates clockwise around X-axis positive direction.Piezoelectric motor b1, c1 retreat, and when piezoelectric motor a1 advances, workbench rotates counterclockwise around X-axis positive direction.
By the interlock of above-mentioned 3 frees degree, other motion can be realized.
To those skilled in the art, obviously the invention is not restricted to above-mentioned exemplary details, and when not deviating from spirit of the present invention or essential characteristic, the present invention can be realized in other specific forms.Therefore, no matter from which point, all should this description be regarded as exemplary, and be nonrestrictive, scope of the present invention is limited by claims instead of above-mentioned explanation, and all changes be therefore intended in the implication of the equivalency by dropping on claim and scope are included in the present invention.Any Reference numeral in claim should be considered as the claim involved by limiting.It should be pointed out that for those skilled in the art, under the premise without departing from the principles of the invention, can also make some improvement, these improvement also should be considered as protection scope of the present invention.
Claims (6)
1. a freedom degree parallel connection precision stage for non-resonant piezoelectric motor driving, is characterized in that: comprise base (1), several off-resonance piezoelectric motors, several sloping platform mechanisms, several flexible ball hinge bodies and workbench (2); An off-resonance piezoelectric motor, a sloping platform mechanism and a flexible ball hinge body form single-degree-of-freedom driver element, wherein, described sloping platform mechanism there is a sloping platform, and be fixed on base (1), off-resonance piezoelectric motor is disposed side by side on by sloping platform mechanism, one end of flexible ball hinge body is connected on the sloping platform of sloping platform mechanism, and the other end is connected on workbench (2).
2. the freedom degree parallel connection precision stage of a kind of non-resonant piezoelectric motor driving according to claim 1, it is characterized in that: this freedom degree parallel connection precision stage comprises three single-degree-of-freedom driver elements, three common connecting working tables of single-degree-of-freedom driver element (2), centered by workbench (2), be radially uniformly distributed.
3. the freedom degree parallel connection precision stage of a kind of non-resonant piezoelectric motor driving according to claim 2, is characterized in that: described sloping platform mechanism comprises rolling cross unit, ceramic friction plate, sloping platform, slide unit and guide rail slide block; Described rolling cross unit is arranged on the bottom of sloping platform mechanism, and its side is provided with ceramic friction plate; Described slide unit is fixedly connected on rolling cross unit upper surface, and described sloping platform is fixedly connected on slide unit; Described sloping platform upper surface, from the horizontal by angle, is provided with guide rail, and guide rail slide block is movably connected on sloping platform by guide rail; Described guide rail slide block connects one end of flexible ball hinge body.
4. the freedom degree parallel connection precision stage of a kind of non-resonant piezoelectric motor driving according to claim 2, is characterized in that: described flexible ball hinge body comprises supporting seat, supporting seat gland, flexible ball pivot and workbench gland; Supporting seat is fixed on guide rail slide block, and flexible ball pivot one end is fixed on supporting seat by supporting seat gland, and the other end is fixed on workbench (2) by workbench gland.
5. the freedom degree parallel connection precision stage of a kind of non-resonant piezoelectric motor driving according to claim 3, is characterized in that: described off-resonance piezoelectric motor adopts biped to drive piezoelectric linear motor, and this motor is provided with driving head.
6. the freedom degree parallel connection precision stage of a kind of non-resonant piezoelectric motor driving according to claim 5, it is characterized in that: described ceramic friction plate and biped drive the driving head close contact on piezoelectric linear motor, sloping platform is bolted on the slide unit of rolling cross unit, and guide rail is bolted on sloping platform inclined-plane.
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| CN105666162A (en) * | 2016-03-15 | 2016-06-15 | 南京航空航天大学 | Macro and micro dual-driving precise wedged feeding worktable and motion generation method |
| CN106863282A (en) * | 2017-04-18 | 2017-06-20 | 常州大学 | A kind of big corner intelligent solar tracking device |
| CN108270369A (en) * | 2018-02-28 | 2018-07-10 | 华侨大学 | A kind of differential rotary piezoelectric stepper motor and electric excitation mode |
| CN108555615A (en) * | 2018-07-10 | 2018-09-21 | 广东工业大学 | A kind of macro micro- composite motion platform of big stroke five degree of freedom |
| CN113917798A (en) * | 2021-09-22 | 2022-01-11 | 哈尔滨工业大学 | Movement device for Z-axis direction macro movement of workbench |
| CN114123851A (en) * | 2021-12-03 | 2022-03-01 | 散裂中子源科学中心 | Six-degree-of-freedom posture adjusting platform |
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| CN115446612A (en) * | 2022-09-22 | 2022-12-09 | 山东大学 | Six-degree-of-freedom precision positioning platform driven by stick-slip |
| CN115476326A (en) * | 2022-09-22 | 2022-12-16 | 山东大学 | Three-degree-of-freedom precision positioning platform based on stick-slip driving principle |
| CN115476444A (en) * | 2022-10-11 | 2022-12-16 | 无锡地心科技有限公司 | Multi-degree-of-freedom linear guide rail displacement platform for quickly adjusting wafers |
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