CN101531002A - Micro-nano working platform of four-dimensional mobile orthogonal structure - Google Patents
Micro-nano working platform of four-dimensional mobile orthogonal structure Download PDFInfo
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- CN101531002A CN101531002A CN200910049397A CN200910049397A CN101531002A CN 101531002 A CN101531002 A CN 101531002A CN 200910049397 A CN200910049397 A CN 200910049397A CN 200910049397 A CN200910049397 A CN 200910049397A CN 101531002 A CN101531002 A CN 101531002A
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Abstract
The invention relates to a micro-nano working platform of four-dimensional mobile orthogonal structure, belonging to the robotics field and comprising bases, a workbench, two P-4S branched chains, piezoelectric actuators and two PSS branched chains. The bases are connected with the workbench via the two P-4S branched chains and the two PSS branched chains, each base corresponding to each branched chain is thereon provided with an elasticity parallel plate sliding joint respectively, each elasticity parallel plate sliding joint is provided with a piezoelectric actuator respectively, wherein, in the directions X and Y driven by a single piezoelectric actuator, the bases and the workbench are connected by a P-4S flexure branched chain respectively, in the direction Z driven by a double piezoelectric actuator, the bases and the workbench are connected by the two PSS branched chains, the PSS branched chains are mutually parallel and arranged along the direction vertical to the two P-4S branched chains respectively, the symmetrical axes of the branched chains of each group are orthogonal at the initial position. The invention features simple structure, displacement decoupling and huge bearing capacity and can realize four degree-of-freedom micromotion of zero fraction, zero clearance and high resolution.
Description
Technical field
What the present invention relates to is the device in a kind of Robotics field, and specifically, what relate to is a kind of micro-nano working platform of four-dimensional mobile orthogonal structure.
Background technology
The parallel micro-manipulator robot has sub-micron to nano level positioning accuracy, in Precision Machining, Electronic Packaging, fiber alignment, biological and fields such as genetic engineering, material science and Aero-Space, all have broad application prospects, and the problem of Chinese scholars concern especially.Since in 1962, after Ellis had at first proposed to adopt the micro-manipulating robot of Piezoelectric Ceramic, the research of jiggle robot had caused the attention of Chinese scholars.Hara and Sugimoto proposition in 1989 have also been studied a kind of jiggle robot that replaces conventional hinge with flexible hinge; Si Taodun (Stoughton) has designed a kind of jiggle robot of being made up of two parallel institutions, and each parallel institution is made up of six piezoelectric type elements; The Kallio of Holland has developed the 3-DOF parallel micromotion robot by hydraulic drive system drives; The Pernette of Switzerland etc. has designed a kind of 6-DOF jiggle robot in parallel, is used for locating single-mode fiber on succession optical fiber egative film.A kind of full flexible parallel connection micro-manipulating robot of 6-DOF that adopts piezoelectric ceramic actuator has been developed on peak etc. at home, the 2-2-2 orthohormbic structure that has been characterized in adopting the PSS side chain to constitute.Liu Pingan etc. have studied a kind of freedom degree parallel connection jiggle robot of two translations, one rotational structure.The subject matter that these jiggle robots exist is: the complex structure that has, the demarcation difficulty that has, the displacement decoupling zero difficulty that has.
Find through literature search prior art, " the moving condition design of asymmetric three translation parallel mechanism " that Yang Qizhi etc. delivered on the 112nd page of the 37th the 10th phase of volume of " agricultural mechanical journal " October in 2006, propose in this article to design a kind of novel asymmetrical three translation parallel mechanism according to screw theory, its deficiency is that structure is asymmetric, can not realize isotropism, demarcate difficulty.And at present the research of jiggle robot also mainly concentrates on Three Degree Of Freedom jiggle robot and six-freedom micro displacement robot, to the research of jiggle robot with four-degree-of-freedom and five degree of freedom also seldom.
Summary of the invention
The objective of the invention is at the deficiencies in the prior art, a kind of micro-nano working platform of four-dimensional mobile orthogonal structure is provided, this operating desk has four-degree-of-freedom, and have structure decoupling, and the rigidity height, bearing capacity is strong, advantages such as no hysteresis have really realized the integrated design and the making of mechanism.
The present invention is achieved by the following technical solutions, the present invention includes pedestal, workbench, two P-4S (1 moving sets and 4 ball pairs) side chain, piezoelectric ceramic actuator and two PSS (1 moving sets and 2 ball pairs) side chain.Link to each other with two P-SS side chains by two P-4S side chains that constitute by flexible hinge between pedestal and the workbench, an elasticity parallel-plate moving sets respectively is set on the corresponding pedestal of each side chain and is connected with workbench by the elasticity ball pivot.Piezoelectric ceramic actuator of each elasticity parallel-plate moving sets configuration, and its axis respectively with x, y, three reference axis of z parallel, and represent rectilinear direction, horizontal line direction and vertical line direction respectively.On X and Y direction that single piezoelectric ceramic actuator drives, be connected by the flexible side chain of a P-4S respectively between pedestal and the workbench, on the Z of double piezoelectric ceramic driver drives direction, be connected by two PSS side chains between pedestal and the workbench, two PSS side chains be parallel to each other and respectively along and the perpendicular direction of two P-4S side chains arrange.The axis of symmetry that initial position is respectively organized side chain is vertical mutually.By two P-4S side chains and two PSS side chains workbench is driven, to realize the moving that reaches along Y-axis that moves along X, Y, Z three-dimensional.
Described each P-4S side chain comprises: the first elasticity parallel-plate moving sets, first connecting rod, first ball pivot, second ball pivot, the 3rd ball pivot and the 4th ball pivot, second connecting rod, third connecting rod, the 4th connecting rod and the 5th connecting rod.First ball pivot, second ball pivot, the 3rd ball pivot and the 4th ball pivot and first connecting rod, second connecting rod, third connecting rod and workbench are formed 4S mechanism.Each elasticity 4S mechanism links to each other with workbench by second ball pivot and the 3rd ball pivot, and links by first ball pivot and the 4th ball pivot and first connecting rod.Elasticity 4S mechanism links to each other by first connecting rod with the first elasticity parallel-plate moving sets, and the first elasticity parallel-plate moving sets links to each other with the 5th connecting rod by the 4th connecting rod and links to each other with pedestal.
Described each PSS side chain comprises: the second elasticity parallel-plate moving sets, the 5th ball pivot, the 6th ball pivot, the 6th connecting rod, seven-link assembly and the 8th connecting rod.Link to each other by the 6th connecting rod between the 5th ball pivot and the 6th ball pivot, the 6th ball pivot directly links to each other with the second elasticity parallel-plate moving sets.Whole PSS side chain links to each other with workbench by the 5th ball pivot, and links to each other with pedestal with the 8th connecting rod by seven-link assembly.
Entire mechanism body of the present invention is formed by a block of material integral cutting, disposes four piezoelectric ceramic actuators and by P-4S side chain and PSS side chain workbench is driven, to realize three-dimensional moving and the one dimension moving.The present invention can realize not having friction, no gap, three-dimensional unlubricated and that do not have a hysteresis moves and one dimension rotates, and can be widely used in fields such as fiber alignment, nano impression, life and genetic engineering and little assembling.
Description of drawings
Fig. 1 is the micro-nano working platform of four-dimensional mobile orthogonal structure schematic diagram;
Fig. 2 is the structure diagram of P-4S side chain;
Fig. 3 is the structure diagram of PSS side chain;
Among the figure: 1 is pedestal, and 2 is workbench, and 3 is the P-4S side chain, and 4 is piezoelectric ceramic actuator, 5 is the PSS side chain, and 6 is first connecting rod, and 7 is first ball pivot, and 8 is second connecting rod, 9 is second ball pivot, and 10 is seven-link assembly, and 11 is the 3rd ball pivot, and 12 is third connecting rod, 13 is the 4th ball pivot, and 14 is the 4th connecting rod, and 15 is the 5th connecting rod, 16 is the first elasticity parallel-plate moving sets, and 17 is the 8th connecting rod, and 18 is the 5th ball pivot, 19 is the 6th connecting rod, and 20 is the 6th ball pivot, and 21 is the second elasticity parallel-plate moving sets.
The specific embodiment
Below in conjunction with accompanying drawing embodiments of the invention are elaborated: present embodiment has provided detailed embodiment and process being to implement under the prerequisite with the technical solution of the present invention, but protection scope of the present invention is not limited to following embodiment.
As shown in Figure 1, be one embodiment of the present of invention, this micro-nano working platform of four-dimensional mobile orthogonal structure can be realized three-dimensional moving and the one dimension rotation, its body is the non-assembly of time processing moulding, comprises pedestal 1, workbench 2, two P-4S side chains 3, piezoelectric ceramic actuator 4 and two PSS side chains 5.Link to each other with two P-SS side chains 5 by two P-4S side chains 3 that constitute by flexible hinge between pedestal 1 and the workbench 2, on the corresponding pedestal of each side chain, directly process an elasticity parallel-plate moving sets and be connected with workbench 2 by the elasticity ball pivot that integral body processes.Piezoelectric ceramic actuator 4 of each elasticity parallel-plate moving sets configuration, the driving direction of piezoelectric ceramic actuator 4 parallels with the coordinate system axis direction all the time.On the X and Y direction that drive by a piezoelectric ceramic actuator 4 respectively, be connected by the flexible side chain of a P-4S respectively between pedestal 1 and the workbench 2, on the Z direction that drives by two piezoelectric ceramic actuators 4, be connected by two PSS side chains 5 between pedestal 1 and the workbench 2.At initial position, the axis direction of two PSS side chains 5 and orthohormbic structure micro-nano operating desk the Z axle parallel, the axis direction of two P-4S side chains 3 is parallel with Y-axis with the X of orthohormbic structure micro-nano operating desk respectively, each is organized the side chain axis direction and is arranged vertically mutually.The axis of symmetry that initial position is respectively organized side chain is vertical mutually.
As shown in Figure 2, be the partial structurtes figure of P-4S side chain 3.Each P-4S side chain 3 consists of the following components: the first elasticity parallel-plate moving sets 16, first connecting rod 6, first ball pivot 7, second ball pivot 9, the 3rd ball pivot 11 and the 4th ball pivot 13 and second connecting rod 8, third connecting rod 12, the 4th connecting rod 14 and the 5th connecting rod 15.First ball pivot 7, second ball pivot 9, the 3rd ball pivot 11 and the 4th ball pivot 13 and first connecting rod 6, second connecting rod 8, third connecting rod 12 and workbench 2 are formed 4S mechanism, each elasticity 4S mechanism links to each other with workbench 2 by second ball pivot 9 and the 3rd ball pivot 11, links with first connecting rod 6 by first ball pivot 7 and the 4th ball pivot 13.Elasticity 4S mechanism links to each other by first connecting rod 6 with the first elasticity parallel-plate moving sets 16, and the first elasticity parallel-plate moving sets 16 links to each other with pedestal 1 with the 5th connecting rod 15 by the 4th connecting rod 14.
As shown in Figure 3, be the partial structurtes figure of PSS side chain 5.Each PSS side chain 5 is made up of following several parts: the second elasticity parallel-plate moving sets 21, the 5th ball pivot 18, the 6th ball pivot 20, the 6th connecting rod 19, seven-link assembly 10 and the 8th connecting rod 17, link to each other by the 6th connecting rod 19 between the 5th ball pivot 18 and the 6th ball pivot 20, the 6th ball pivot 20 directly links to each other with the second elasticity parallel-plate moving sets 21.Whole PSS side chain 5 links to each other with workbench 2 by the 5th ball pivot 18, links to each other with pedestal 1 with the 8th connecting rod 17 by seven-link assembly 10.
In the present embodiment, power up and make each piezoelectric ceramic actuator all be in the half trip state, only need increase or reduce that the voltage of piezoelectric ceramic actuator gets final product on the respective direction in the time of need carrying out positive negative direction mobile to determine initial zero.Carry out timing signal and can be earlier calculate theoretical stroke on all directions, compensate by ANSYS finite element analysis and actual measurement then with method of geometry.When two PSS side chains that are parallel to each other along the displacement of axis Z direction when identical, then this micromotion mechanism can moving along the Z direction, and when two PSS side chains that be parallel to each other not simultaneously along the displacement of axis Z direction, then may produce simultaneously around the rotation of Y-axis and along the Z axle move or around the pure rotation of Y-axis.Because two orthogonal P-4S side chains lack a rotary freedom around its 4S mechanism place plane normal respectively, so this micro-nano operating desk can only be realized the rotation that reaches along Y-axis of moving along X, Y, three directions of Z.This micro-nano operating desk has been realized the integrated design and the manufacturing of mechanism, and has simple in structure, displacement decoupling zero, no gap, need not lubricate and advantage such as bearing capacity is big.
Claims (3)
1, a kind of micro-nano working platform of four-dimensional mobile orthogonal structure, it is characterized in that comprising pedestal, workbench, two P-4S side chains, piezoelectric ceramic actuator and two PSS side chains, link to each other with two P-SS side chains by two P-4S side chains that constitute by flexible hinge between pedestal and the workbench, on the corresponding pedestal of each side chain, respectively be provided with an elasticity parallel-plate moving sets, each elasticity parallel-plate moving sets respectively is provided with a piezoelectric ceramic actuator, on X and Y direction that single piezoelectric ceramic actuator drives, be connected by the flexible side chain of a P-4S respectively between pedestal and the workbench, on the Z of double piezoelectric ceramic driver drives direction, be connected by two PSS side chains between pedestal and the workbench, two PSS side chains be parallel to each other and respectively along and the perpendicular direction of two P-4S side chains arrange that the axis of symmetry that initial position is respectively organized side chain is vertical mutually.
2, micro-nano working platform of four-dimensional mobile orthogonal structure according to claim 1, it is characterized in that, described P-4S side chain, each P-4S side chain comprises: the first elasticity parallel-plate moving sets, first connecting rod, first ball pivot, second ball pivot, the 3rd ball pivot and the 4th ball pivot, first connecting rod, second connecting rod, the 4th connecting rod and the 5th connecting rod, first ball pivot wherein, second ball pivot, the 3rd ball pivot and the 4th ball pivot and first connecting rod, second connecting rod, third connecting rod and workbench are formed 4S mechanism, each elasticity 4S mechanism links to each other with workbench by second ball pivot and the 3rd ball pivot, and link by first ball pivot and the 4th ball pivot and first connecting rod, elasticity 4S mechanism links to each other by first connecting rod with the first elasticity parallel-plate moving sets, and the first elasticity parallel-plate moving sets links to each other with pedestal with the 5th connecting rod by the 4th connecting rod.
3, micro-nano working platform of four-dimensional mobile orthogonal structure according to claim 1, it is characterized in that, described each PSS side chain comprises: the second elasticity parallel-plate moving sets, the 5th ball pivot, the 6th ball pivot, the 6th connecting rod, seven-link assembly and the 8th connecting rod, wherein link to each other by the 6th connecting rod between the 5th ball pivot and the 6th ball pivot, the 6th ball pivot directly links to each other with the second elasticity parallel-plate moving sets, whole PSS side chain links to each other with workbench by the 5th ball pivot, and links to each other with pedestal with the 8th connecting rod by seven-link assembly.
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Cited By (11)
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| CN102819186A (en) * | 2012-09-07 | 2012-12-12 | 天津大学 | 3T1R four-degrees-of-freedom precise location workbench |
| CN103143732A (en) * | 2013-03-01 | 2013-06-12 | 天津大学 | Displacement sensor type piezoceramic driver based on flexible mechanism |
| CN104842344A (en) * | 2015-06-01 | 2015-08-19 | 山东理工大学 | Non-overconstrained single-rotation triple-translation micromanipulation robot |
| CN104842343A (en) * | 2015-05-25 | 2015-08-19 | 山东理工大学 | Direct-driven rotary three-translation micromanipulation robot |
| CN107240423A (en) * | 2017-07-13 | 2017-10-10 | 中国科学院苏州生物医学工程技术研究所 | Three-dimensional manometer workbench based on flexible hinge |
| CN107984443A (en) * | 2017-12-28 | 2018-05-04 | 大连交通大学 | One kind intersects curved beam six-freedom parallel compliant mechanism |
| CN109256175A (en) * | 2018-11-08 | 2019-01-22 | 江南大学 | High-precision large-stroke space translation mini positioning platform |
| CN109732547A (en) * | 2019-01-18 | 2019-05-10 | 宁波大学 | The multiple degrees of freedom micromotion platform of multistage linking output |
| CN109765842A (en) * | 2019-01-17 | 2019-05-17 | 湖北工程学院 | A kind of micro-positioning table |
| WO2020107612A1 (en) * | 2018-11-26 | 2020-06-04 | 中国科学院光电技术研究所 | Flexible hinge structure |
| CN113125094A (en) * | 2019-12-31 | 2021-07-16 | 上海交通大学 | Six-degree-of-freedom micro-vibration device based on flexible mechanism |
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| CN1233511C (en) * | 2002-05-23 | 2005-12-28 | 河北工业大学 | Recombineable modular 3-6 freedom structure decoupling parallel micro moving robot |
| CN1238165C (en) * | 2003-06-06 | 2006-01-25 | 河北工业大学 | parallel decoupling mechanism with 4 degree of freedom |
| CN100484728C (en) * | 2006-12-28 | 2009-05-06 | 山东理工大学 | Three-translation orthogonal decoupling parallel micromotion platform |
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2009
- 2009-04-16 CN CN2009100493972A patent/CN101531002B/en not_active Expired - Fee Related
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| CN102819186B (en) * | 2012-09-07 | 2014-01-15 | 天津大学 | 3T1R four-degrees-of-freedom precise location workbench |
| CN102819186A (en) * | 2012-09-07 | 2012-12-12 | 天津大学 | 3T1R four-degrees-of-freedom precise location workbench |
| CN103143732A (en) * | 2013-03-01 | 2013-06-12 | 天津大学 | Displacement sensor type piezoceramic driver based on flexible mechanism |
| CN104842343B (en) * | 2015-05-25 | 2020-08-07 | 山东理工大学 | Direct-drive type one-rotation three-translation micro-operation robot |
| CN104842343A (en) * | 2015-05-25 | 2015-08-19 | 山东理工大学 | Direct-driven rotary three-translation micromanipulation robot |
| CN104842344B (en) * | 2015-06-01 | 2020-08-07 | 山东理工大学 | Over-constraint-free type one-rotation three-translation micro-operation robot |
| CN104842344A (en) * | 2015-06-01 | 2015-08-19 | 山东理工大学 | Non-overconstrained single-rotation triple-translation micromanipulation robot |
| CN107240423A (en) * | 2017-07-13 | 2017-10-10 | 中国科学院苏州生物医学工程技术研究所 | Three-dimensional manometer workbench based on flexible hinge |
| CN107984443A (en) * | 2017-12-28 | 2018-05-04 | 大连交通大学 | One kind intersects curved beam six-freedom parallel compliant mechanism |
| CN107984443B (en) * | 2017-12-28 | 2024-01-30 | 大连交通大学 | Six-degree-of-freedom parallel compliant mechanism with crossed curved beams |
| CN109256175A (en) * | 2018-11-08 | 2019-01-22 | 江南大学 | High-precision large-stroke space translation mini positioning platform |
| CN109256175B (en) * | 2018-11-08 | 2023-04-28 | 江南大学 | High-precision large-stroke space translation micro-positioning platform |
| WO2020107612A1 (en) * | 2018-11-26 | 2020-06-04 | 中国科学院光电技术研究所 | Flexible hinge structure |
| CN109765842A (en) * | 2019-01-17 | 2019-05-17 | 湖北工程学院 | A kind of micro-positioning table |
| CN109732547A (en) * | 2019-01-18 | 2019-05-10 | 宁波大学 | The multiple degrees of freedom micromotion platform of multistage linking output |
| CN109732547B (en) * | 2019-01-18 | 2021-12-21 | 宁波大学 | Multi-degree-of-freedom micro-motion platform with multi-stage linkage output |
| CN113125094A (en) * | 2019-12-31 | 2021-07-16 | 上海交通大学 | Six-degree-of-freedom micro-vibration device based on flexible mechanism |
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