CN103395059B - Three-degree of freedom flexible topological decouplity parallel micromotion platform - Google Patents
Three-degree of freedom flexible topological decouplity parallel micromotion platform Download PDFInfo
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- CN103395059B CN103395059B CN201310281924.9A CN201310281924A CN103395059B CN 103395059 B CN103395059 B CN 103395059B CN 201310281924 A CN201310281924 A CN 201310281924A CN 103395059 B CN103395059 B CN 103395059B
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Abstract
A kind of three-degree of freedom flexible topological decouplity parallel micromotion platform, it comprises silent flatform (1) and moving platform (2), it is characterized in that: described moving platform (2) is by the first side chain (3), second side chain (4) is connected with silent flatform (1) with the 3rd side chain (5), first side chain (3), second side chain (4), 3rd side chain (5) is all connected by flexible hinge with between moving platform (2) and silent flatform (1), first side chain (3) drives by the first driver (6), second side chain (4) drives by the second driver (7), 3rd side chain (5) drives by the 3rd driver (8), the origin position of the present invention first driver and the second driver determination moving platform, 3rd driver determines the angle that moving platform moves around origin position, this mechanism has partly decoupled characteristic, reduce kinematics of mechanism and dynamicly solve difficulty, be easy to real-time control, simply be there is by integral module formula processing structure the feature of exempting to assemble, improve location and the repeatable accuracy of micromotion platform micrometric displacement.
Description
Technical field
The invention belongs to MEMS precision drive technical field, specifically just relate to a kind of three-degree of freedom flexible topological decouplity parallel micromotion platform that can realize decoupling zero function, improve the transmission accuracy of MEMS transmission.
Background technology
Micromotion platform is the usual means in micro-nano field, and it has a high advantage of precision in location and motion, is widely used in the fields such as electromechanical industries, bioengineering and Minimally Invasive Surgery.Micromotion platform is used widely in the small machine industry of similar camera, mobile phone and so on, micromotion platform often uses flexible hinge bindiny mechanism, flexible hinge is before and after nineteen sixties, due to the development of aeronautical and space technology, to the supporting construction realizing intrinsic deflection among a small circle, not only propose high-resolution requirement, go back requirement claimed structure with microminaturization.People, after to all types of resiliency supported experimental exploring, progressively develop that volume is little, mechanical friction, gapless, move flexible hinge flexibly.Flexure hinge mechanism make use of elastomeric material micro-strain and from the characteristic of replying, eliminates the idle running in transmission process and mechanical friction, can obtain the displacement resolution of superelevation.Flexible hinge is widely used in the instrument and meters such as gyroscope, accelerometer, precision balance, STT missile, and obtains unprecedented high accuracy and stability.Flexible hinge mainly contains two types, straight beam type flexible hinge and circular arc type flexible hinge.Straight beam type flexible hinge has larger slewing area, but its kinematic accuracy is poor, and center of rotation has obvious deflection in rotation process.As shown in Figure 1, the kinematic accuracy of circular arc type flexible hinge is higher, but movement travel is very restricted, and can only realize the rotation of slight amplitude.Prevailing form is around an axle elastic bending, and reversible during this elastic deformation.Flexible hinge is used for the finite angular displacements doing compound movement around axle, and its feature is: mechanical friction, gapless, autokinesis are high.
The symmetry of parallel institution, the advantage such as high accuracy and high strength makes it be applied to micromotion platform field, Chinese scholars also successively devises the jiggle robot of some parallel institution formulas, but existing jiggle robot transmission requires it is nano level sometimes, cause traditional micromotion platform ubiquity complex structure of design research and development at present, demarcate difficulty, the defect of mobile decoupling difficulty, Chinese patent 201010216326.X discloses a kind of two-degree of freedom translation parallel decoupling micromotion platform of micro-electromechanical system field, comprise: piezoelectric ceramic actuator, the auxiliary side chain of two driving side chains and correspondence thereof, workbench and fixed frame, wherein: two X-direction and Y-directions driving the auxiliary side chain of side chain and correspondence thereof to be symmetrically distributed in workbench respectively between two.This invention relies on the symmetry of the decoupling zero function of Composite Double straight parallel plate hinge, stiffness characteristics and platform and integrally structure, thus reaches the function eliminating coupling and parasitic displacement, realizes the two dimensional motion of motion platform.But first this technology can only realize two-degree of freedom translation parallel decoupling function, be secondly complex structure, decoupling zero difficulty.
Summary of the invention
The object of the invention is for existing micro electronmechanical field micro-transmission platform kinematics Dynamics Coupling degree high, control algolithm is complicated, be difficult to reach requirement of real-time control, a kind of three-degree of freedom flexible topological decouplity parallel micromotion platform is provided, position and angle have Decoupling Characteristics, improve the transmission accuracy of micromotion platform.
Technical scheme
In order to realize above-mentioned technical purpose, the present invention designs a kind of three-degree of freedom flexible topological decouplity parallel micromotion platform, it comprises silent flatform and moving platform, it is characterized in that: described moving platform is connected with silent flatform with the 3rd side chain by the first side chain, the second side chain, first side chain, the 3rd side chain with between moving platform and silent flatform and the second side chain be all connected by flexible hinge with between the first side chain and silent flatform, first side chain is by the first driver drives, second side chain is by the second driver drives, and the 3rd side chain is by the 3rd driver drives;
First driver, the second driver and the 3rd driver are contained on silent flatform respectively.
Beneficial effect
The present invention both can pass through the first driver and the second driver drives moving platform translation planar, also after startup first driver and the second driver can being utilized to reach balance simultaneously, start the 3rd driver to make moving platform realize flexible hinge central point between moving platform and connecting rod three to rotate, this mechanism constantly has partly decoupled characteristic, reduce kinematics of mechanism and dynamicly solve difficulty, being easy to real-time control.This device simply has the feature of exempting to assemble by integral module formula processing structure, improve location and the repeatable accuracy of micromotion platform micrometric displacement.，
Accompanying drawing explanation
Accompanying drawing 1 is circular arc flexible hinge structure schematic diagram.
Accompanying drawing 2 is structural representations of the present invention.
Detailed description of the invention
Below in conjunction with drawings and Examples, the present invention will be further described.
Embodiment
As shown in Figure 2, a kind of three-degree of freedom flexible topological decouplity parallel micromotion platform, it comprises silent flatform 1 and moving platform 2, wherein, described moving platform 2 is connected with silent flatform 1 with the 3rd side chain 5 by the first side chain 3, second side chain 4, first side chain 3, the 3rd side chain 5 with between moving platform 2 and silent flatform 1 and the second side chain 4 be all connected by flexible hinge with between the first side chain 3 and silent flatform 1, first side chain 3 drives by the first driver 6, second side chain 4 drives by the second driver 7, and the 3rd side chain 5 drives by the 3rd driver 8;
First driver 6, second driver 7 and the 3rd driver 8 are contained on silent flatform 1 respectively.
Described first side chain 3 comprises connecting rod 1, connecting rod 2 302 and connecting rod 3 303, and described second side chain 4 comprises connecting rod 4 401, and described 3rd side chain 5 comprises connecting rod 5 501 and connecting rod 6 502;
Between described connecting rod 1 and connecting rod 2 302, between connecting rod 2 302 and connecting rod 3 303, between connecting rod 3 303 and connecting rod 4 401, all connected by flexible hinge between connecting rod 5 501 and connecting rod 6 502, connecting rod 1, connecting rod 4 401 are connected with silent flatform 1 respectively by flexible hinge with connecting rod 6 502;
Described connecting rod 3 303 is connected with moving platform 2 by flexible hinge with connecting rod 5 501.
3rd driver 8 drive link 6 502.
Described first driver 6, second driver 7 and the 3rd driver 8 are all piezoelectric ceramic actuator or leading screw fine motion driver.。
The present invention not only can be acted on and connecting rod 1 by the first driver 6, second driver 7 acts on connecting rod 4 401 thus realizes the object of moving platform 2 planar translation, can also realize simultaneously, the object that between moving platform 2 moving platform 2 and connecting rod 3 303, flexible hinge central point A rotates, it rotates implementation procedure is apply driving force by the first driver 6 and the second driver 7 to the first side chain 3 and the second side chain 4, according to motion-promotion force compatibility principle, 3rd driver 8 to the 3rd side chain execute 5 add driving force time, moving platform 2 can rotate by flexible hinge central point A between moving platform 2 and connecting rod 3 303.
The calculating of traditional Three Degree Of Freedom micromotion platform displacement needs to solve eight ternary Nonlinear System of Equations, solving complexity is high, the moving displacement equation of mechanism of the present invention only needs two quadratic equation with one unknown, a quadratic equation with one unknown determines moving platform origin position, and second quadratic equation with one unknown determines the rotational angle of moving platform around initial point.Namely the one the second side chains determine the origin position A of moving platform, and the 3rd side chain determines the rotational angle of moving platform around A point.Therefore the center of rotation impact of the displacement of the 3rd side chain on moving platform is very little, be all less than 2.6% by the maximum displacement rate of change of finite element analysis in working space, this displacement can be ignored.Prove that micromotion platform of the present invention has the Decoupling Characteristics of displacement and the anglec of rotation, reduce kinematics of mechanism and dynamicly solve difficulty, being easy to real-time control.
Claims (3)
1. a three-degree of freedom flexible topological decouplity parallel micromotion platform, it comprises silent flatform (1) and moving platform (2), it is characterized in that: described moving platform (2) is by the first side chain (3), second side chain (4) is connected with silent flatform (1) with the 3rd side chain (5), first side chain (3), 3rd side chain (5) with between moving platform (2) and silent flatform (1) and the second side chain (4) be all connected by flexible hinge with between the first side chain (3) and silent flatform (1), first side chain (3) drives by the first driver (6), second side chain (4) drives by the second driver (7), 3rd side chain (5) drives by the 3rd driver (8),
Described first driver (6), the second driver (7) and the 3rd driver (8) are contained on silent flatform (1) respectively;
Described first side chain (3) comprises connecting rod one (301), connecting rod two (302) and connecting rod three (303), described second side chain (4) comprises connecting rod four (401), and described 3rd side chain (5) comprises connecting rod five (501) and connecting rod six (502);
Between described connecting rod one (301) and connecting rod two (302), between connecting rod two (302) and connecting rod three (303), between connecting rod three (303) and connecting rod four (401), all connected by flexible hinge between connecting rod five (501) and connecting rod six (502), connecting rod one (301), connecting rod four (401) are connected with silent flatform (1) respectively by flexible hinge with connecting rod six (502);
Described connecting rod three (303) is connected with moving platform (2) by flexible hinge with connecting rod five (501).
2. a kind of three-degree of freedom flexible topological decouplity parallel micromotion platform as claimed in claim 1, it is characterized in that: described first driver (6) drive link one (301), second driver (7) drive link the four (401), the 3rd driver (8) drive link six (502).
3. a kind of three-degree of freedom flexible topological decouplity parallel micromotion platform as claimed in claim 1 or 2, is characterized in that: described first driver (6), the second driver (7) and the 3rd driver (8) are all piezoelectric ceramic actuator or leading screw fine motion driver.
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| CN104358976A (en) * | 2014-10-22 | 2015-02-18 | 中国科学院苏州生物医学工程技术研究所 | Flexible hinge micro-angle adjustment table for precise optical detection |
| CN104526683A (en) * | 2014-12-30 | 2015-04-22 | 天津福云天翼科技有限公司 | Three-freedom-degree swing platform based on parallel mechanism |
| CN104925738B (en) * | 2015-06-30 | 2017-04-12 | 宁波大学 | Piezoelectric micro-platform capable of amplifying based on flexible hinge |
| CN105690358B (en) * | 2016-04-18 | 2017-08-01 | 河北工业大学 | A kind of flexible micro operating mechanism |
| CN116092571B (en) * | 2022-12-15 | 2024-03-26 | 齐鲁工业大学 | Three-degree-of-freedom flexible parallel motion platform and system |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1645518A (en) * | 2004-12-28 | 2005-07-27 | 华南理工大学 | Planar three freedom meek precisively positioning platform |
| CN103021472A (en) * | 2012-12-03 | 2013-04-03 | 天津大学 | Plane parallel type three-freedom-degree precise positioning work table |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JPH03115892A (en) * | 1989-09-29 | 1991-05-16 | Hitachi Constr Mach Co Ltd | Micromotion mechanism |
| WO2006050560A1 (en) * | 2004-11-11 | 2006-05-18 | Adelaide Research And Innovation | Parallel micromanipulator and control method |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN1645518A (en) * | 2004-12-28 | 2005-07-27 | 华南理工大学 | Planar three freedom meek precisively positioning platform |
| CN103021472A (en) * | 2012-12-03 | 2013-04-03 | 天津大学 | Plane parallel type three-freedom-degree precise positioning work table |
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