CN105033963B - The freedom degree parallel connection precision stage that a kind of non-resonant piezoelectric motor drives - Google Patents
The freedom degree parallel connection precision stage that a kind of non-resonant piezoelectric motor drives Download PDFInfo
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- CN105033963B CN105033963B CN201510421151.9A CN201510421151A CN105033963B CN 105033963 B CN105033963 B CN 105033963B CN 201510421151 A CN201510421151 A CN 201510421151A CN 105033963 B CN105033963 B CN 105033963B
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- sloping platform
- workbench
- guide rail
- piezoelectric motor
- flexible ball
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Abstract
The invention discloses a kind of three-degree of freedom flexible parallel precise workbench that non-resonant piezoelectric motor drives, it is made up of base, non-resonant piezoelectric linear motor, guide rail, sloping platform structure, flexible ball pivot and workbench.The platform is realized driving by three groups of drive mechanisms, and every group of drive mechanism drives guide rail and sloping platform mechanism, sloping platform mechanism to pass through flexible ball pivot and be connected with moving platform by the driving piezoelectric linear motor of biped.Cooperated by three groups of drive mechanisms, realize Z axis translation, turn about the X axis, rotate three-degree-of-freedom motion around Y-axis.The present invention it is simple and compact for structure, with high accuracy, big stroke, dynamic response is fast the features such as, can be applied to fiber waveguide device connection encapsulate etc. precision manufactureing field.
Description
Technical field
The present invention relates to Precision Piezoelectric actuating instrument field, the three of specifically a kind of non-resonant piezoelectric motor driving are free
Degree parallel precise workbench.
Background technology
Micro/nano level workbench has very important effect in modern precision manufacture, in fiber alignment and encapsulation, superfinishing
The fields such as close manufacture, MEMS manufactures, IC manufacturing are widely used.But traditional precision stage high accuracy and big stroke can not
Get both, the translation of piezoelectric motor Z axis drives the technical problems such as difficulty.
As continuing to develop for nanometer technique proposes more with application, many application fields to micro/nano level workbench
Performance indications, wherein high accuracy and big stroke be weigh the most important index of micro/nano level service behaviour.Existing micro-nano
Meter level locating platform almost all is realized by piezoelectric ceramic actuator.
Piezoelectric linear motor is a kind of new straight line driving mechanism for growing up in recent years, using the inverse of piezoelectric
Piezo-electric effect, is made of specific structure type.This motor has efficiency high when being miniaturized, can directly produce straight line defeated
Go out, simple structure, response fast, position and velocity control accuracy it is high, without electromagnetic interference the advantages of.Piezoelectric motor is changed without mechanism
Workbench can be pushed directly on carries out straight line and rotary motion, thus response speed is highly improved with respect to electromagnetic driving system,
Meanwhile, the use of piezoelectric motor is also simplified the structure of system.
The content of the invention
For the deficiency of above-mentioned background technology, driven it is an object of the invention to provide a kind of non-resonant piezoelectric motor
Freedom degree parallel connection precision stage, can realize the grand dynamic and fine motion of workbench under different working modes, significantly shorten and pass
Dynamic chain, and can well realize workbench Z axis translation.
The present invention uses following technical scheme to solve above-mentioned technical problem：
The freedom degree parallel connection precision stage that a kind of non-resonant piezoelectric motor drives, including base 1, several non-co-
Shake piezoelectric motor, several sloping platform mechanisms, several flexible ball-and-socket hinge devices and workbench 2；One off-resonance piezoelectric motor, one
Sloping platform mechanism and a flexible ball-and-socket hinge device constitute single-degree-of-freedom driver element, wherein, there is a sloping platform in the sloping platform mechanism,
And be fixed on base 1, off-resonance piezoelectric motor is disposed side by side on by sloping platform mechanism, and one end of flexible ball-and-socket hinge device is connected to tiltedly
On the sloping platform of platform mechanism, the other end is connected on workbench 2.
The freedom degree parallel connection precision stage includes three single-degree-of-freedom driver elements, three single-degree-of-freedom driver elements
Common connecting working table 2, it is radial to be uniformly distributed centered on workbench 2.
The sloping platform mechanism includes rolling cross unit, ceramic friction plate, sloping platform, slide unit and guide rail slide block；The rolling
Cross unit is arranged on the bottom of sloping platform mechanism, and its side is provided with ceramic friction plate；The slide unit is fixedly connected on rolling and intersects
On unit upper surface, the sloping platform is fixedly connected on slide unit；The sloping platform upper surface is set thereon from the horizontal by angle
There is guide rail, guide rail slide block is movably coupled on sloping platform by guide rail；The one of the flexible ball-and-socket hinge device of guide rail slide block connection
End.
The flexible ball-and-socket hinge device includes support base, support base gland, flexible ball pivot and workbench gland；Support base is fixed
On guide rail slide block, flexible ball pivot one end is fixed on support base by support base gland, and the other end is solid by workbench gland
It is scheduled on workbench 2.
The off-resonance piezoelectric motor drives piezoelectric linear motor, the motor to be provided with driving head using biped.
The ceramic friction plate drives the driving head on piezoelectric linear motor to be in close contact with biped, and sloping platform is solid by bolt
It is scheduled on the slide unit for rolling cross unit, guide rail is bolted on sloping platform inclined-plane.
The present invention uses above technical scheme compared with prior art, with following technique effect：
1st, piezoelectric linear motor direct drive workbench is driven using non-resonant biped, significantly shortens driving-chain, improved
Response speed, is capable of achieving big stroke start under continuous start mode of operation, and high-resolution is capable of achieving under direct acting mode of operation
Accurate actuating.
2nd, using sloping platform mechanism, horizontal direction displacement is converted into vertical direction displacement, effectively solves piezoelectric motor direct
Drive the problems such as vertically movable thrust for producing is not enough, self-locking is difficult.
3rd, using parallel combination form, workbench is driven by three piezoelectric motors simultaneously, with inertia is small, fast response time
The advantages of.
Brief description of the drawings
Fig. 1 is the top view of this freedom degree parallel connection precision stage；
Fig. 2 is the stereogram of this freedom degree parallel connection precision stage；
Fig. 3 is that piezoelectric motor drives rolling cross unit structure top view；
Fig. 4 is that piezoelectric motor drives rolling cross unit structural perspective；
Fig. 5 is that sloping platform mechanism constitutes figure；
Fig. 6 is flexible ball-and-socket hinge device composition figure；
Wherein, the resonant piezoelectric motor of a1, b1, c1-, a2, b2, c2- sloping platform mechanism, a3, b3, c3- flexibility ball-and-socket hinge device,
A21, b21, c21- roll cross unit, a22, b22, c22- slide unit, a23, b23, c23- ceramic friction plate, a24, b24, c24-
Sloping platform, a25, b25, c25- guide rail, a26, b26, c26- guide rail slide block；
A31, b31, c31- support base, a32, b32, c32- support base gland, a33, b33, c33- flexibility ball pivot, a34,
B34, c34- workbench gland, 1- bases, 2- workbench.
Specific embodiment
The present invention provides the freedom degree parallel connection precision stage that a kind of non-resonant piezoelectric motor drives, to make the present invention
Purpose, technical scheme and effect be clearer, clearly, and referring to the drawings and gives an actual example to the present invention further specifically
It is bright.It should be appreciated that specific implementation described herein is only used to explain the present invention, it is not intended to limit the present invention.
The technical scheme invented is described in detail below in conjunction with the accompanying drawings：
As shown in Figure 1 and Figure 2, the freedom degree parallel connection fine-limit work that the non-resonant piezoelectric motor that the present invention is provided drives
Platform, including base 1, three groups of non-resonant piezoelectric motor a1, b1, c1, three groups of sloping platform mechanisms a2, b2, c2, three groups of flexible ball pivot machines
Structure a3, b3, c3 and workbench 2.
The freedom degree parallel connection precision stage includes three single-degree-of-freedom driver elements, three single-degree-of-freedom driver elements
Common connecting working table 2, it is radial to be uniformly distributed centered on workbench 2.Three groups of sloping platform mechanism a2, b2, c2 are into 120 degree
It is evenly arranged on base 1, the flexible ball-and-socket hinge device of an off-resonance piezoelectric motor, a sloping platform mechanism and constitutes one certainly
By degree driver element, wherein, the non-resonant piezoelectric motor in each single-degree-of-freedom driver element parallel to sloping platform arrangement of mechanism,
The driving head of non-resonant piezoelectric motor is contacted with ceramic friction plate.Flexible ball-and-socket hinge device one end is vertically mounted on guide rail slide block
On, other end connecting working table 2.Workbench 2 should be located at horizontality in initial position.
Sloping platform mechanism is constituted as shown in figure 5, being slided including rolling cross unit, ceramic friction plate, sloping platform, slide unit and guide rail
Block；Above-mentioned rolling cross unit is arranged on the bottom of sloping platform mechanism, and its side is provided with ceramic friction plate；The slide unit is fixedly connected
On cross unit upper surface is rolled, the sloping platform is fixedly connected on slide unit；The sloping platform upper surface is from the horizontal by angle
Degree, is provided with guide rail, and guide rail slide block is movably coupled on sloping platform by guide rail；The guide rail slide block connects flexible ball
One end of hinge body.
Roll cross unit middle guide to be fixed by bolts on base 1 by precision instrument, sloping platform is by 4 interior hexagonal cylindricals
Head screw is fixed on slide unit, and guide rail is fixed by bolts on sloping platform inclined-plane by precision instrument, from the horizontal by 30 degree of angles.Tiltedly
Horizontal direction displacement can be converted into vertical direction displacement by platform mechanism.
Piezoelectric motor drives and rolls cross unit structure as shown in Figure 3, Figure 4, biped drive piezoelectric linear motor a1, b1,
C1 is fixed on base 1 by two hexagon socket cap head screws respectively, and driving head contact is intersecting rolling unit by AB stickers
On ceramic friction plate a23, b23, c23 of side.Piezoelectric linear motor a1, b1, c1 is driven to access appropriate pumping signal to biped
Afterwards, motor driving head produces fine motion, drives ceramic friction plate a23, b23, c23 to be moved to specific direction.
Flexible ball-and-socket hinge device composition is as shown in fig. 6, including support base, support base gland, flexible ball pivot and workbench gland；
Support base is fixed on guide rail slide block, and flexible ball pivot one end is fixed on support base by support base gland, and the other end passes through work
Make platform gland to be fixed on workbench 2.Specifically, support base a31, b31, c31 are hung down by 2 hexagon socket cap head screws respectively
Directly it is fixed on guide rail slide block a26, b26, c26, from the horizontal by 60 degree of angles.Support base gland a32, b32, c32 pass through 2
Be fixed on support base a31, b31, c31 for flexible ball pivot a33, b33, c33 one end by hexagon socket cap head screw, flexible ball pivot
A33, b33, c33 other end are fixed on workbench 2 by workbench gland a34, b34, c34 and 2 hexagon socket cap head screws.
Flexible ball-and-socket hinge device can realize the deflection supporting of small range.
With reference to Fig. 1,2, illustrate that the present invention realizes Z axis translation, the motion scheme of XY axles rotation and mechanism；X, Y-axis are in level
In face, as shown in Figure 1, vertically, its specific direction is as shown in Figure 2 for Z axis in its specific direction.
（1）Z axis translation
A, b, c tri- unit piezoelectric motors a1, b1, c1 are input into identical signal, while advancing or retreating.Piezoelectric motor a1,
B1, c1 advance simultaneously when, workbench is moved along Z axis positive direction；Piezoelectric motor a1, b1, c1 are retreated simultaneously when, workbench is along Z axis
Negative direction is moved.
（2）Y-axis rotates
A, b two unit piezoelectric motors a1, b1 are input into identical signal, the opposite letter of c unit piezoelectric motor c1 input phases
Number, piezoelectric motor a1, b1 advance or retreat simultaneously, and piezoelectric motor c1 is opposite with piezoelectric motor a1, b1 direction of motion.Piezoelectric motor
A1, b1 advance simultaneously, and when piezoelectric motor c1 is retreated, workbench is rotated clockwise around Y-axis positive direction；Piezoelectric motor a1, b1 are same
When retreat, piezoelectric motor c1 advance when, workbench is rotated counterclockwise around Y-axis positive direction.
（3）X-axis rotates
The opposite signal of two unit piezoelectric motor a1, b1 input phases of a, b, c unit piezoelectric motors c1 is input into amplitude and is
The signal of piezoelectric motor a1, b1 amplitude 1/2.Piezoelectric motor a1, c1 retreat, piezoelectric motor b1 advance when, workbench around X-axis just
Direction rotates clockwise.Piezoelectric motor b1, c1 are retreated, and when piezoelectric motor a1 advances, workbench turns counterclockwise around X-axis positive direction
It is dynamic.
Other motions can be realized by the linkage of above-mentioned 3 frees degree.
It is obvious to a person skilled in the art that the invention is not restricted to above-mentioned exemplary details, and without departing substantially from
In the case of spirit or essential attributes of the invention, the present invention can be in other specific forms realized.Therefore, no matter from which
From the point of view of point, this specification all should be regarded as exemplary, and be nonrestrictive, the scope of the present invention will by appended right
Ask and limited rather than described above, it is intended that all changes that will fall in the implication and scope of the equivalency of claim
Include in the present invention.Any reference in claim should not be considered as the claim involved by limitation.Should refer to
Go out, for those skilled in the art, under the premise without departing from the principles of the invention, can also make some
Improve, these improvement also should be regarded as protection scope of the present invention.
Claims (4)
1. the freedom degree parallel connection precision stage that a kind of non-resonant piezoelectric motor drives, it is characterised in that：Including base
（1）, several off-resonance piezoelectric motors, several sloping platform mechanisms, several flexible ball-and-socket hinge devices and workbench（2）；One non-
The flexible ball-and-socket hinge device of resonant piezo-electhc motor, a sloping platform mechanism and one constitutes single-degree-of-freedom driver element, wherein, it is described oblique
There is a sloping platform in platform mechanism, and be fixed on base（1）On, off-resonance piezoelectric motor is disposed side by side on by sloping platform mechanism, flexible ball
One end of hinge body is connected on the sloping platform of sloping platform mechanism, and the other end is connected to workbench（2）On；
The freedom degree parallel connection precision stage includes three single-degree-of-freedom driver elements, and three single-degree-of-freedom driver elements are common
Connecting working table（2）, with workbench（2）Centered on, it is radial to be uniformly distributed；
The sloping platform mechanism includes rolling cross unit, ceramic friction plate, sloping platform, slide unit and guide rail slide block；Described rolling is intersected
Unit is arranged on the bottom of sloping platform mechanism, and its side is provided with ceramic friction plate；The slide unit is fixedly connected on rolling cross unit
On upper surface, the sloping platform is fixedly connected on slide unit；The sloping platform upper surface is provided with and leads from the horizontal by angle
Rail, guide rail slide block is movably coupled on sloping platform by guide rail；One end of the flexible ball-and-socket hinge device of guide rail slide block connection.
2. the freedom degree parallel connection precision stage that a kind of non-resonant piezoelectric motor according to claim 1 drives, its
It is characterised by：The flexible ball-and-socket hinge device includes support base, support base gland, flexible ball pivot and workbench gland；Support base is consolidated
It is scheduled on guide rail slide block, flexible ball pivot one end is fixed on support base by support base gland, the other end passes through workbench gland
It is fixed on workbench（2）On.
3. the freedom degree parallel connection precision stage that a kind of non-resonant piezoelectric motor according to claim 1 drives, its
It is characterised by：The off-resonance piezoelectric motor drives piezoelectric linear motor, the motor to be provided with driving head using biped.
4. the freedom degree parallel connection precision stage that a kind of non-resonant piezoelectric motor according to claim 3 drives, its
It is characterised by：The ceramic friction plate drives the driving head on piezoelectric linear motor to be in close contact with biped, and sloping platform passes through bolt
It is fixed on the slide unit for rolling cross unit, guide rail is bolted on sloping platform inclined-plane.
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| CN201510421151.9A CN105033963B (en) | 2015-07-17 | 2015-07-17 | The freedom degree parallel connection precision stage that a kind of non-resonant piezoelectric motor drives |
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| CN201510421151.9A CN105033963B (en) | 2015-07-17 | 2015-07-17 | The freedom degree parallel connection precision stage that a kind of non-resonant piezoelectric motor drives |
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| CN105033963B true CN105033963B (en) | 2017-06-30 |
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| CN105666162B (en) * | 2016-03-15 | 2017-12-15 | 南京航空航天大学 | The accurate wedge-shaped Feed table of macro-micro dual-drive and motion production method |
| CN106863282A (en) * | 2017-04-18 | 2017-06-20 | 常州大学 | A kind of big corner intelligent solar tracking device |
| CN108270369B (en) * | 2018-02-28 | 2023-06-20 | 华侨大学 | Differential rotation piezoelectric stepping motor and electric excitation mode |
| CN108555615A (en) * | 2018-07-10 | 2018-09-21 | 广东工业大学 | A kind of macro micro- composite motion platform of big stroke five degree of freedom |
| CN113917798B (en) * | 2021-09-22 | 2022-10-14 | 哈尔滨工业大学 | Movement device for Z-axis direction macro movement of workbench |
| CN114123851A (en) * | 2021-12-03 | 2022-03-01 | 散裂中子源科学中心 | Six-degree-of-freedom posture adjusting platform |
| CN114833299A (en) * | 2022-04-12 | 2022-08-02 | 北京机电工程研究所 | Riveting device suitable for large-scale product |
| CN115446612A (en) * | 2022-09-22 | 2022-12-09 | 山东大学 | Six-degree-of-freedom precision positioning platform driven by stick-slip |
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| CN2476392Y (en) * | 2001-04-30 | 2002-02-13 | 天津大学 | Vertical three-translation freedom shun machine |
| CN101441127B (en) * | 2008-11-19 | 2011-02-02 | 浙江工业大学 | Three-freedom degree mechanical type vibration environmental test platform |
| CN102866030B (en) * | 2012-09-20 | 2014-12-10 | 北京航空航天大学 | Five-axis linkage loading test device and loading test method for machine tool |
| CN103737576A (en) * | 2014-01-08 | 2014-04-23 | 北京邮电大学 | Six freedom degree force feedback hand controller |
| CN203832112U (en) * | 2014-05-27 | 2014-09-17 | 安徽省皖凯机械有限公司 | Parallel execution device mounted on gantry bracket of engraving machine |
| CN104260081B (en) * | 2014-09-09 | 2016-01-13 | 南京航空航天大学 | Three Degree Of Freedom driver and driving method |
| CN204844092U (en) * | 2015-07-17 | 2015-12-09 | 南京航空航天大学 | Off -resonance style piezoelectricity motor drive's parallelly connected precision operating stage of 3DOF motion |
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