CN203550916U - Independent five-degree-of-freedom ultra-precise material in-situ test microscopic observation platform - Google Patents
Independent five-degree-of-freedom ultra-precise material in-situ test microscopic observation platform Download PDFInfo
- Publication number
- CN203550916U CN203550916U CN201320597289.0U CN201320597289U CN203550916U CN 203550916 U CN203550916 U CN 203550916U CN 201320597289 U CN201320597289 U CN 201320597289U CN 203550916 U CN203550916 U CN 203550916U
- Authority
- CN
- China
- Prior art keywords
- axis
- assembly
- followed
- camera lens
- screw
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn - After Issue
Links
Images
Abstract
The utility model relates to an independent five-degree-of-freedom ultra-precise material in-situ test microscopic observation platform and belongs to the field of precise scientific microscopic observation instruments. The platform is composed of X-axis, Y-axis and Z-axis precise movable assemblies, X-axis and Z-axis rotary assemblies, X-axis, Y-axis and Z-axis flexible hinge type ultra-precise following assemblies and a super-view deep observation lens. The X-axis, Y-axis and Z-axis precise movable assemblies and the X-axis and Z-axis rotary assemblies can be used for respectively carrying out the precise adjustment on relative positions and relative angles of the super-view deep observation lens in X, Y and Z directions of an observation test piece. The X-axis, Y-axis and Z-axis flexible hinge type ultra-precise following assemblies can realize active following of the test piece in microseismic movement relative to a load in the X, Y and Z directions. The Y-axis precise movable assembly can assist the super-view deep lens in zooming. The super-view deep lens is used for carrying out super-view deep observation on the shape of a microcosmic surface of the test piece. The independent five-degree-of-freedom ultra-precise material in-situ test microscopic observation platform has the advantages of ingenious volume, precise driving, good following effects, high integration and strong practicability. The independent five-degree-of-freedom ultra-precise material in-situ test microscopic observation platform can be used independently, and can also be combined with other equipment to use.
Description
Technical field
The utility model relates to exact science microscopic observation instrument, particularly a kind of super depth of field microscopic observation, accurate free-standing five degree of freedom ultraprecise material in situ test microscopic observation platform that drives, initiatively follows of integrating.Can provide in-situ monitoring for the various types of materials under different loads state, disclose mechanical characteristic and the micromechanism of damage of material under micro-nano-scale, for the development of the hi-tech industries such as new material new process, precision optics, semiconductor technology, nanometer engineering, MEMS (micro electro mechanical system) (MEMS) technology, there is very important impetus.
Background technology
Testing of materials technology is important means and the method for Materials Science and Engineering application.All parts all inevitably bear in actual use to be puted forth effort or the effect of temperature, the failure phenomenon such as in certain service condition with after service time, material will deform, weares and teares, surperficial pit.Microscopic observation is widely used technology in failure analysis, by material sample being provided to mark analysis, analysis on cracks and fracture analysis, to obtain key property and the Laws of Mechanics of material.
In-situ mechanical test refers under micro-/ nano yardstick to be carried out in the process of Mechanics Performance Testing material for test, by instruments such as optical microscope, electron microscope and atomic force microscopes, microdeformation, the damage of material under various loads and goods generation thereof is carried out to omnidistance dynamically a kind of mechanical test means of on-line monitoring.This technology has disclosed the correlativity rule between size, kind and the material property of mechanical behavior, micromechanism of damage and load of various types of materials and goods thereof from microcosmic point.
, to in-situ observation System for Large-scale Specimen, there is restriction in the current in-situ observation equipment part that still comes with some shortcomings: (1) current commercial microscope is difficult to meet the lens moving ability of large stroke; (2) due to the impact of external environment, the test specimen under some load is self state in microseismic activity often, and current commercial microscope is difficult to accomplish to synchronously the following of test specimen, to guarantee to be observed the picture that is stable in region; (3) cavity space of surface sweeping electron microscope, atomic force microscope etc. is very limited, is difficult to the test specimen under macro-scale to carry out in-situ observation.
Therefore, design and a kind ofly there is the large stroke of five degree of freedom, can initiatively follow, be easy to integrated ultraprecise material in situ test microscopic observation platform tool and be of great significance.
Summary of the invention
The purpose of this utility model is to provide a kind of free-standing five degree of freedom ultraprecise material in situ test microscopic observation platform, has solved the problems referred to above that prior art exists.The utility model can be applied in the observation of material microscopic appearance.By the accurate driven unit of five degree of freedom, realize super depth of field camera lens and be observed relative position between test specimen and carry out five degree of freedom minute adjustment; Flexible hinge chain type X, Y, Z axis ultraprecise is followed assembly can realize X, Y, Z tri-directions with respect to observing the ultraprecise of test specimen follow in microseismic activity, make super depth of field camera lens and be observed test specimen and keep relative static, X, Y, Z axis flexible hinge chain type ultraprecise follows that assembly can be realized X, Y, Z tri-directions are followed with respect to the active of test specimen in microseismic activity under load, realizes the in-situ observation to test specimen under different loads; Y-axis ultraprecise is followed assembly also can assist superfinishing god lens zoom; By super depth of field camera lens, observe, can obtain the stable microcosmic three-dimensional appearance image of test specimen.The utility model can, independently as observation platform, be realized test specimen microscopic appearance is observed; Also can be installed in testing machine and other testing apparatuss, the test specimen under integrated active subsequent load in micro-vibration, carries out real-time in-situ observation to the microdeformation of test specimen, Damage and fracture process; Also can be installed on lathe, the machine tool element in work is had a try and followed, observe online and test, can obtain machine tool element microcosmic three-dimensional appearance under real bearing state, for the design improvement of machine tool element provides critical data.Integration is high, practical, not only can independently use but also can use with other device combinations.
Above-mentioned purpose of the present utility model is achieved through the following technical solutions:
Stand alone type five degree of freedom ultraprecise material in situ test microscopic observation platform, comprises that X-axis moving assembly 14, Y-axis moving assembly 12, Z axis moving assembly 11, X-axis runner assembly 7, Z axis runner assembly 6, X-Y-Z tri-axles follow assembly, super depth of field camera lens 9; Described Y-axis moving assembly 12 is installed on X-axis moving assembly 14, and Z axis moving assembly 11 is installed on Y-axis moving assembly 12; Following assembly base plate 1 is installed on Z axis moving assembly 11, the Y-Z axle that X-Y-Z tri-axles are followed assembly is followed assembly 2 and is installed on and is followed on assembly base plate 1 by socket head cap screw 3, and X-axis is followed assembly 5 and followed assembly 2 and be connected by following assembly web joint (4) and Y-Z axle; Z axis runner assembly 6 is installed on X-axis and follows on assembly 5, and X-axis runner assembly 7 is installed on Z axis runner assembly 6; Super depth of field observation camera lens 9 is fixed in the hole of super depth of field camera lens fixed block 10, and super depth of field camera lens fixed block 10 is connected with X-axis runner assembly 7 by microscope coupling shaft 8.
Described X-axis moving assembly 14 provides accurate X-direction displacement, by servomotor 30, provide power, after speed reduction unit 29 slows down, drive ball-screw 20 output straight-line displacements, X-axis moving assembly 14 is by line slideway 18 support guides of the double-slider of both sides, limit switch 15 is equipped with respectively in line slideway 18 both sides, for having pointed out Stroke Control and position limitation protection; Described servomotor 30 is connected with speed reduction unit 29 by screw, and speed reduction unit 29 is planetary reducer, and reduction gear ratio is 33, and precision is 3 minutes; Speed reduction unit 29 is fixed on motor cabinet 28 by screw, and motor cabinet 28 is fixed in the corresponding threaded hole of X-axis base plate 25; Speed reduction unit 29 output shafts are connected with the end of ball-screw 20 by shaft coupling 27, and ball-screw 20 two ends are supported by EF leading screw seat 26 and EK leading screw seat 19 respectively, and EF leading screw seat 26 is separately fixed on X-axis base plate 25 with EK leading screw seat 19; Spring 23 is enclosed within on ball-screw 20, and two ends are connected by screw with feed screw nut 22 and EF leading screw seat 26 respectively, and feed screw nut 22 is installed in nut seat 21 holes, passes through screw fastening; Two slide blocks 24 are installed, to strengthen the anchorage force to upper working table on line slideway 18; Line slideway 18 by screw fastening on X-axis base plate 25; Limit switch 15 is installed in the threaded hole on limit switch base 16, uses former and later two nuts 17 that limit switch 15 is fixed on limit switch base 16, and limit switch base 16 is screwed on X-axis base plate 25.
Described servomotor 30 is with 20 scramblers and keep detent, make motor can reach nano level angular displacement resolution, and relative moving assembly has self-lock ability; Relative displacement between Z axis moving assembly 11 and Y-axis moving assembly 12 detects by displacement of the lines formula grating scale 13, to realize the closed-loop control to Y-axis displacement; The displacement detecting principle of X, Z axis as previously mentioned.
Described Y-axis moving assembly 12, the connected mode in Z axis moving assembly 11 are identical with X-direction moving assembly 14; Y-Z axle web joint 31 in described Z axis moving assembly 11 is connected by screw fastening with Y-axis moving assembly 12; Z axis base plate 34 is by screw and mutual vertical connection of Y-Z axle web joint 31, web joint 32 is connected to Z axis base plate 34 and Y-Z axle web joint 31 two ends with set square 33, play the effect that connects and support two plates 34,31, and reserved the space that Z direction driving-chain is arranged.
Described X-Y-Z tri-axles are followed assembly and by Y-Z axle, are followed assembly 2 and follow assembly 5 with X-direction and form, described Y-Z direction of principal axis is followed assembly 2 and is followed assembly 5 with X-direction and be connected by the L shaped assembly web joint 4 of following, and makes X-direction flexible hinge 42 mutually vertical to flexible hinge 35 with Y-Z; In conjunction with being arranged near the capacitive displacement transducer being observed test specimen, can realize closed-loop control, Y-Z direction of principal axis follow assembly 2 follow assembly 5 with X-direction together with response can realize X-Y-Z three-shaft linkage and follow.
Described Y-Z axle is followed assembly 2 and is comprised of to flexible hinge 35, wedge 36, piezoelectric ceramics 37 Y-Z, and described Y-Z is fixed on and is followed on assembly base plate 1 by three attachment screws to flexible hinge 35; Y-Z is comprised of two orthogonal parallel four-bar linkages to flexible hinge 35, within Y-direction parallel four-bar linkage is nested in Z-direction parallel four-bar linkage; Piezoelectric effect by piezoelectric ceramics 37 provides driving force, and Z-direction parallel four-bar linkage consists of two connecting link portion I 38 and Y-direction parallel four-bar linkage; Y-direction parallel four-bar linkage consists of two connecting link portion II 40 and mobile position I 39; Wedge 36, for adjusting piezoelectric ceramics 37 and the gap of Y-Z to flexible hinge 35, can carry out precompressed to piezoelectric ceramics 37 simultaneously.
The X-direction flexible hinge 42 that described X-axis is followed in assembly 5 is fixed on and is followed on assembly web joint 4 by two attachment screws, drive principle as previously mentioned, X-direction flexible hinge 42 comprises an X-direction parallel four-bar linkage, X-direction parallel four-bar linkage consists of two connecting link portion III 43 and mobile position II 41, can realize X-axis and follow.
The nut seat 21 of described X-axis moving assembly 14 at motion process medi-spring 23 all the time in extended state, be aided with the ball of ball-screw 20 through zero stand-off pre-service, make feed screw nut 22 in to-and-fro movement, eliminate gap, improved the precision of X-axis moving assembly 14; The ball-screw of Y, Z axis disappears gap method as previously mentioned.
The mobile position II 41 that the multi-functional web joint 47 of described Z axis runner assembly 6 is followed in assembly 5 by screw and X-axis is connected; Runner assembly provides power by steering wheel 46, and X-axis runner assembly 7 is connected by U-shaped web joint 45 with Z axis runner assembly 6, and output shaft direction is mutually vertical; Microscope coupling shaft 8 is installed on X-axis runner assembly 7, and microscope coupling shaft 8 is connected by axis hole interference with super depth of field camera lens fixed block 10, and super depth of field camera lens 9 is fixedly connected with by axis hole with super depth of field camera lens fixed block 10.
Described super depth of field camera lens 9 is installed on the top of five degree of freedom moving link, and X, Y, Z axis moving assembly 14,12,11 respectively has the stroke capability of 100mm, and displacement accuracy is 0.1 μ m, makes super depth of field camera lens 9 have very large moving range; X, Z axis runner assembly 7,6 respectively have 180 ° of angular displacement abilities, and corner accuracy is 0.18 °, and super depth of field camera lens 9 can be observed the different angles of test specimen; X, Y-Z axle are followed assembly 5,2 respectively to have stroke are the ultraprecise micrometric displacement ability that 30 μ m, precision are 10nm, while making super depth of field camera lens 9 be subject to external environment vibrations, have the good response of following; Y-Z axle is followed assembly 2 simultaneously can provide auxiliary zoom for super depth of field camera lens 9; The super depth of field camera lens 9 of selecting has very wide amplification range, the camera lens of replaceable 100 ~ 1000 times of zoom capabilities, 250 ~ 2500 times of zoom capabilities, 500 ~ 5000 times of zoom capabilities; Super depth of field camera lens 9 has larger depth of field ability, can obtain microcosmic and be observed test piece three-dimensional feature image.
The beneficial effects of the utility model are: compared with prior art, the utlity model has volume exquisiteness, accurate drive, follow effective, be easy to the advantages such as integrated.By the accurate driven unit of five degree of freedom, realize super depth of field camera lens and be observed relative position between test specimen and carry out five degree of freedom minute adjustment, make super depth of field camera lens there is larger observation scope; X-Y-Z tri-axles are followed assembly can realize X, Y, Z tri-directions with respect to observing the ultraprecise of test specimen follow, to obtain the clear micro image of the test specimen in relative microseismic activity; By super depth of field camera lens, observe, obtain the stable microcosmic three-dimensional appearance image of test specimen.The utility model can, independently as observation platform, be realized test specimen microscopic appearance is observed; Also can be installed in testing machine and other testing apparatuss, the test specimen under integrated active subsequent load in micro-vibration, carries out real-time in-situ observation to the microdeformation of test specimen, Damage and fracture process; Also can be installed on lathe, the machine tool element in work is had a try and followed, observe online and test, can obtain machine tool element microcosmic three-dimensional appearance under real bearing state, for the design improvement of machine tool element provides critical data.Integration is high, practical, not only can independently use but also can use with other device combinations.
Accompanying drawing explanation
Accompanying drawing described herein is used to provide further understanding of the present utility model, forms the application's a part, and illustrative example of the present utility model and explanation thereof are used for explaining the utility model, do not form improper restriction of the present utility model.
Fig. 1 is agent structure schematic diagram of the present utility model;
Fig. 2 is the structural representation of X-axis moving assembly of the present utility model;
Fig. 3 is the structural representation of Y-axis moving assembly of the present utility model;
Fig. 4 is the structural representation of Z axis moving assembly of the present utility model;
Fig. 5 is the structural representation that Y-Z axle of the present utility model is followed assembly;
Fig. 6 is the structural representation that X-axis of the present utility model is followed assembly;
Fig. 7 is the structural representation of super depth of field camera lens of the present utility model and X, Z axis runner assembly.
In figure: 1, follow assembly base plate; 2, Y-Z axle is followed assembly; 3, socket head cap screw; 4, follow assembly web joint; 5, X-axis is followed assembly; 6, Z axis runner assembly; 7, X-axis runner assembly; 8, microscope coupling shaft; 9, super depth of field camera lens; 10, super depth of field camera lens fixed block; 11, Z axis moving assembly; 12, Y-axis moving assembly; 13, displacement of the lines formula grating scale; 14, X-axis moving assembly; 15, limit switch; 16, limit switch base; 17, nut; 18, line slideway; 19, EK leading screw seat; 20, ball-screw; 21, nut seat; 22, feed screw nut; 23, spring; 24, slide block; 25, X-axis base plate; 26, EF leading screw seat; 27, shaft coupling; 28, motor cabinet; 29, speed reduction unit; 30, servomotor; 31, Y-Z axle web joint; 32, web joint; 33, set square; 34, Z axis base plate; 35, Y-Z is to flexible hinge; 36, wedge; 37, piezoelectric ceramics; 38, connecting link portion I; 39, mobile position I; 40, connecting link portion II; 41, mobile position II; 42, X-direction flexible hinge; 43, connecting link portion III; 44, output wheel; 45, U-shaped web joint; 46, steering wheel; 47, multi-functional web joint.
Embodiment
Below in conjunction with accompanying drawing, further illustrate detailed content of the present utility model and embodiment thereof.
Referring to shown in Fig. 1 to Fig. 7, free-standing five degree of freedom ultraprecise material in situ test microscopic observation platform of the present utility model is mainly by X, Y, Z axis moving assembly 14,12,11, X, Z axis runner assembly 7,6, X, Y-Z axle flexible hinge chain type ultraprecise are followed assembly 5,2 and super depth of field observation camera lens 9 compositions.
Described Y-axis moving assembly 12 is installed on X-axis moving assembly 14, and Z axis moving assembly 11 is installed on Y-axis moving assembly 12; Follow assembly base plate 1 and be installed on Z axis moving assembly 11, Y-Z axle is followed assembly 2 and is installed on and is followed on assembly base plate 1 by socket head cap screw 3, and X-axis is followed assembly 5 and followed assembly 2 and be connected by following assembly web joint (4) and Y-Z axle; Z axis runner assembly 6 is installed on X-axis and follows on assembly 5, and X-axis runner assembly 7 is installed on Z axis runner assembly 6; Super depth of field observation camera lens 9 is fixed in the hole of super depth of field camera lens fixed block 10, and super depth of field camera lens fixed block 10 is connected with X-axis runner assembly 7 by microscope coupling shaft 8.
The servomotor being equipped with in described X, Y, Z axis moving assembly 14,12,11 is with 20 scramblers and keep detent, make motor can reach nano level angular displacement resolution, and relative moving assembly has self-lock ability.Detection line displacement-type grating scale 13 is for detection of relative displacement between Z axis moving assembly 11 and Y-axis moving assembly 12, to realize the closed-loop control to Y-axis displacement.The displacement detecting principle of X, Z axis as previously mentioned.
Shown in Figure 2; described X-axis moving assembly 14 can provide accurate X-direction displacement; by servomotor 30, provide power; after speed reduction unit 29 slows down; drive ball-screw 20 output straight-line displacements; the accurate moving assembly 14 of X-direction relies on double-slider guide rail 18 support guides of both sides, and limit switch 15 is equipped with respectively in line slideway 18 both sides, for having pointed out Stroke Control and position limitation protection.Described servomotor 30 is connected with speed reduction unit 29 by screw, and speed reduction unit 29 is planetary reducer, and reduction gear ratio is 33, and precision is 3 minutes; Speed reduction unit 29 is fixed on motor cabinet 28 by screw, and motor cabinet 28 is fixed in the corresponding threaded hole of X-axis base plate 25; Speed reduction unit 29 output shafts are connected with the end of ball-screw 20 by shaft coupling 27, and ball-screw 20 two ends are supported by EF leading screw seat 26 and EK leading screw seat 19 respectively, and EF leading screw seat 26 is fixed on X-axis base plate 25 with EK leading screw seat 19; Spring 23 is enclosed within on ball-screw 20, and two ends are connected by screw with feed screw nut 22 and EF leading screw seat 26 respectively, and feed screw nut 22 is installed in nut seat 21 holes, passes through screw fastening; Two slide blocks 24 are installed, to strengthen the anchorage force to upper working table on line slideway 18; Line slideway 18 by screw fastening on X-axis base plate 25; Limit switch 15 is installed in the threaded hole on limit switch base 16, uses former and later two nuts 17 that limit switch 15 is fixed on limit switch base 16, and limit switch base 16 is screwed on X-axis base plate 25.
The nut seat 21 of described X-axis moving assembly 14 at motion process medi-spring 23 all the time in extended state, be aided with the ball of ball-screw 20 through zero stand-off pre-service, make feed screw nut 22 in to-and-fro movement, eliminate gap, improved the precision of X-axis moving assembly 14.The ball-screw of Y, Z axis disappears gap method as previously mentioned.
Shown in Fig. 3 and Fig. 4, described Y-axis moving assembly 12, the connected mode in Z axis moving assembly 11 are similar to X-direction moving assembly 14.Y-Z axle web joint 31 in described Z axis moving assembly 11 is connected by screw fastening with Y-axis moving assembly 12; Z axis base plate 34 is by screw and mutual vertical connection of Y-Z axle web joint 31, web joint 32 is connected to Z axis base plate 34 and Y-Z axle web joint 31 two ends with set square 33, play the effect that connects and support two plates 34,31, and reserved the space that Z direction driving-chain is arranged.
Shown in Fig. 5 and 6, described X-Y-Z tri-axles are followed assembly and by Y-Z axle, are followed assembly 2 and follow assembly 5 with X-direction and form.Described Y-Z direction of principal axis is followed assembly 2 and is followed assembly 5 with X-direction and be connected by the L shaped assembly web joint 4 of following, and makes X-direction flexible hinge 42 mutually vertical to flexible hinge 35 with Y-Z; Y-Z direction of principal axis follow assembly 2 follow assembly 5 with X-direction together with response can realize X-Y-Z three-shaft linkage and follow.
Described Y-Z axle is followed assembly 2 and is comprised of to flexible hinge 35, wedge 36, piezoelectric ceramics 37 Y-Z.Described Y-Z is fixed on and is followed on assembly base plate 1 by three attachment screws to flexible hinge 35; Y-Z is comprised of two orthogonal parallel four-bar linkages to flexible hinge 35, within Y-direction parallel four-bar linkage is nested in Z-direction parallel four-bar linkage; Utilize the piezoelectric effect of piezoelectric ceramics 37 that driving force is provided, Z-direction parallel four-bar linkage consists of two connecting link portion I 38 and Y-direction parallel four-bar linkage; Y-direction parallel four-bar linkage consists of two connecting link portion II 40 and mobile position I 39; Wedge 36 is for adjusting piezoelectric ceramics 37 and the gap of Y-Z to flexible hinge 35, and the while can be to piezoelectric ceramics 37 precompressed processing.
The X-direction flexible hinge 42 that described X-axis is followed in assembly 5 is fixed on and is followed on assembly web joint 4 by two attachment screws, drive principle as previously mentioned, X-direction flexible hinge 42 comprises an X-direction parallel four-bar linkage, X-direction parallel four-bar linkage consists of two connecting link portion III 43 and mobile position II 41, can realize X-axis and follow.
Shown in Figure 7, the mobile position II 41 that the multi-functional web joint 47 of described Z axis runner assembly 6 is followed in assembly 5 by screw and X-axis is connected; Runner assembly provides power by steering wheel 46, and X-axis runner assembly 7 is connected by U-shaped web joint 45 with Z axis runner assembly 6, and output shaft direction is mutually vertical; Microscope coupling shaft 8 is installed on X-axis runner assembly 7, and microscope coupling shaft 8 is connected by axis hole interference with super depth of field camera lens fixed block 10, and super depth of field camera lens 9 is fixedly connected with by axis hole with super depth of field camera lens fixed block 10.
Described super depth of field camera lens 9 is installed on the top of five degree of freedom moving link, and X, Y, Z axis moving assembly 14,12,11 respectively has the stroke capability of 100mm, and displacement accuracy is 0.1 μ m, makes super depth of field camera lens 9 have very large moving range; X, Z axis runner assembly 7,6 respectively have 180 ° of angular displacement abilities, and corner accuracy is 0.18 °, and super depth of field camera lens 9 can be observed the different angles of test specimen; X, Y, Z axis is followed assembly 5,2, and respectively to have stroke be the ultraprecise micrometric displacement ability that 30 μ m, precision are 10nm, while making super depth of field camera lens 9 be subject to external environment vibrations, has the good response of following; Y-Z axle is followed assembly 2 simultaneously can provide auxiliary zoom for super depth of field camera lens 9; The super depth of field camera lens 9 of selecting has very wide amplification range, the camera lens of replaceable 100 ~ 1000 times of zoom capabilities, 250 ~ 2500 times of zoom capabilities, 500 ~ 5000 times of zoom capabilities; Super depth of field camera lens 9 has larger depth of field ability, can obtain microcosmic and be observed test piece three-dimensional feature image.
The foregoing is only preferred embodiment of the present utility model, be not limited to the utility model, for a person skilled in the art, the utility model can have various modifications and variations.All any modifications that the utility model is done, be equal to replacement, improvement etc., within all should being included in protection domain of the present utility model.
Claims (10)
1. a free-standing five degree of freedom ultraprecise material in situ test microscopic observation platform, is characterized in that: comprise that X-axis moving assembly (14), Y-axis moving assembly (12), Z axis moving assembly (11), X-axis runner assembly (7), Z axis runner assembly (6), X-Y-Z tri-axles follow assembly, super depth of field camera lens (9); Described Y-axis moving assembly (12) is installed on X-axis moving assembly (14), and Z axis moving assembly (11) is installed on Y-axis moving assembly (12); Following assembly base plate (1) is installed on Z axis moving assembly (11), the Y-Z axle that X-Y-Z tri-axles are followed assembly is followed assembly (2) and is installed on and is followed on assembly base plate (1) by socket head cap screw (3), and X-axis is followed assembly (5) and followed assembly (2) and be connected by following assembly web joint (4) and Y-Z axle; Z axis runner assembly (6) is installed on X-axis and follows on assembly (5), and X-axis runner assembly (7) is installed on Z axis runner assembly (6); Super depth of field observation camera lens (9) is fixed in the hole of super depth of field camera lens fixed block (10), and super depth of field camera lens fixed block (10) is connected with X-axis runner assembly (7) by microscope coupling shaft (8).
2. free-standing five degree of freedom ultraprecise material in situ according to claim 1 is tested microscopic observation platform, it is characterized in that: described X-axis moving assembly (14) provides accurate X-direction displacement, by servomotor (30), provide power, after speed reduction unit (29) slows down, drive ball-screw (20) output straight-line displacement, X-axis moving assembly (14) is by line slideway (18) support guide of the double-slider of both sides, limit switch (15) is equipped with respectively in line slideway (18) both sides, for having pointed out Stroke Control and position limitation protection; Described servomotor (30) is connected with speed reduction unit (29) by screw, and speed reduction unit (29) is planetary reducer; Speed reduction unit (29) is fixed on motor cabinet (28) by screw, and motor cabinet (28) is fixed in the corresponding threaded hole of X-axis base plate (25); Speed reduction unit (29) output shaft is connected with the end of ball-screw (20) by shaft coupling (27), ball-screw (20) two ends are supported by EF leading screw seat (26) and EK leading screw seat (19) respectively, and EF leading screw seat (26) is separately fixed on X-axis base plate (25) with EK leading screw seat (19); It is upper that spring (23) is enclosed within ball-screw (20), and two ends are connected by screw with feed screw nut (22) and EF leading screw seat (26) respectively, and feed screw nut (22) is installed in nut seat (21) hole, passes through screw fastening; Two slide blocks (24) are installed, to strengthen the anchorage force to upper working table on line slideway (18); Line slideway (18) by screw fastening on X-axis base plate (25); Limit switch (15) is installed in the threaded hole on limit switch base (16), uses former and later two nuts (17) that limit switch (15) is fixed on to limit switch base (16) upper, and limit switch base (16) is screwed on X-axis base plate (25).
3. free-standing five degree of freedom ultraprecise material in situ according to claim 2 is tested microscopic observation platform, it is characterized in that: described servomotor (30) is with 20 scramblers and keep detent, make motor can reach nano level angular displacement resolution, and relative moving assembly have self-lock ability; Relative displacement between Z axis moving assembly (11) and Y-axis moving assembly (12) detects by displacement of the lines formula grating scale (13), to realize the closed-loop control to Y-axis displacement.
4. free-standing five degree of freedom ultraprecise material in situ test microscopic observation platform according to claim 1, is characterized in that: described Y-axis moving assembly (12), the connected mode in Z axis moving assembly (11) are identical with X-direction moving assembly (14); Y-Z axle web joint (31) in described Z axis moving assembly (11) is connected by screw fastening with Y-axis moving assembly (12); Z axis base plate (34) is by mutual vertical connection of screw and Y-Z axle web joint (31), web joint (32) is connected to Z axis base plate (34) and Y-Z axle web joint (31) two ends with set square (33), play the effect that connects and support Z axis base plate (34), Y-Z axle web joint (31), and reserved the space that Z direction driving-chain is arranged.
5. free-standing five degree of freedom ultraprecise material in situ according to claim 1 is tested microscopic observation platform, it is characterized in that: described X-Y-Z tri-axles are followed assembly and by Y-Z axle, followed assembly (2) and X-direction and follow assembly (5) and form, described Y-Z direction of principal axis is followed assembly (2) and is followed assembly (5) with X-direction and be connected by following assembly web joint (4), makes X-direction flexible hinge (42) mutually vertical to flexible hinge (35) with Y-Z; In conjunction with capacitive displacement transducer, can realize closed-loop control, Y-Z direction of principal axis follow assembly (2) follow assembly (5) with X-direction together with response can realize X-Y-Z three-shaft linkage and follow.
6. free-standing five degree of freedom ultraprecise material in situ according to claim 5 is tested microscopic observation platform, it is characterized in that: described Y-Z axle is followed assembly (2) and is comprised of to flexible hinge (35), wedge (36), piezoelectric ceramics (37) Y-Z, and described Y-Z is fixed on and is followed on assembly base plate (1) by three attachment screws to flexible hinge (35); Y-Z is comprised of two orthogonal parallel four-bar linkages to flexible hinge (35), within Y-direction parallel four-bar linkage is nested in Z-direction parallel four-bar linkage; Piezoelectric effect by piezoelectric ceramics (37) provides driving force, and Z-direction parallel four-bar linkage consists of two connecting link portion I (38) and Y-direction parallel four-bar linkage; Y-direction parallel four-bar linkage consists of two connecting link portion II (40) and mobile position I (39); Wedge (36), for adjusting piezoelectric ceramics (37) and the gap of Y-Z to flexible hinge (35), can carry out precompressed to piezoelectric ceramics (37) simultaneously.
7. free-standing five degree of freedom ultraprecise material in situ according to claim 5 is tested microscopic observation platform, it is characterized in that: the X-direction flexible hinge (42) that described X-axis is followed in assembly (5) is fixed on and is followed on assembly web joint (4) by two attachment screws, X-direction flexible hinge (42) comprises an X-direction parallel four-bar linkage, X-direction parallel four-bar linkage consists of two connecting link portion III (43) and mobile position II (41), can realize X-axis and follow.
8. free-standing five degree of freedom ultraprecise material in situ according to claim 1 is tested microscopic observation platform, it is characterized in that: the nut seat (21) of described X-axis moving assembly (14) at motion process medi-spring (23) all the time in extended state, be aided with the ball of ball-screw (20) through zero stand-off pre-service, make feed screw nut (22) in to-and-fro movement, eliminate gap, improved the precision of X-axis moving assembly (14).
9. free-standing five degree of freedom ultraprecise material in situ test microscopic observation platform according to claim 1, is characterized in that: the mobile position II (41) that the multi-functional web joint (47) of described Z axis runner assembly (6) is followed in assembly (5) by screw and X-axis is connected; Runner assembly provides power by steering wheel (46), and X-axis runner assembly (7) is connected by U-shaped web joint (45) with Z axis runner assembly (6), and output shaft direction is mutually vertical; Microscope coupling shaft (8) is installed on X-axis runner assembly (7), and microscope coupling shaft (8) is connected by axis hole interference with super depth of field camera lens fixed block (10), and super depth of field camera lens (9) is fixedly connected with by axis hole with super depth of field camera lens fixed block (10).
10. free-standing five degree of freedom ultraprecise material in situ according to claim 1 is tested microscopic observation platform, it is characterized in that: described super depth of field camera lens (9) is installed on the top of five degree of freedom moving link, X, Y, Z axis moving assembly (14,12,11) respectively has the stroke capability of 100mm, displacement accuracy is 0.1 μ m, X, Z axis runner assembly (7,6) respectively have 180 ° of angular displacement abilities, corner accuracy is 0.18 °, and super depth of field camera lens (9) can be observed the different angles of test specimen; X, Y-Z axle are followed assembly (5,2) respectively to have stroke are the ultraprecise micrometric displacement ability that 30 μ m, precision are 10nm, while making super depth of field camera lens (9) be subject to external environment vibrations, have the good response of following; Y-Z axle is followed assembly (2) simultaneously can provide auxiliary zoom for super depth of field camera lens (9); The super depth of field camera lens (9) of selecting has amplification range, the camera lens of replaceable 100 ~ 1000 times of zoom capabilities, 250 ~ 2500 times of zoom capabilities, 500 ~ 5000 times of zoom capabilities; Super depth of field camera lens (9) has depth of field ability, can obtain microcosmic and be observed test piece three-dimensional feature image.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320597289.0U CN203550916U (en) | 2013-09-26 | 2013-09-26 | Independent five-degree-of-freedom ultra-precise material in-situ test microscopic observation platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320597289.0U CN203550916U (en) | 2013-09-26 | 2013-09-26 | Independent five-degree-of-freedom ultra-precise material in-situ test microscopic observation platform |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203550916U true CN203550916U (en) | 2014-04-16 |
Family
ID=50469016
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320597289.0U Withdrawn - After Issue CN203550916U (en) | 2013-09-26 | 2013-09-26 | Independent five-degree-of-freedom ultra-precise material in-situ test microscopic observation platform |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203550916U (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103499308A (en) * | 2013-09-26 | 2014-01-08 | 吉林大学 | Independent five-degree-of-freedom ultra-precise material in-situ test microscopic observation platform |
| CN104979155A (en) * | 2015-06-16 | 2015-10-14 | 上海交通大学 | Six-DOF (Degree of Freedom) microplasma jet machining platform system |
| CN105895492A (en) * | 2016-06-12 | 2016-08-24 | 江苏天瑞仪器股份有限公司 | XY mobile platform for analyzing ion source sampling device |
| WO2017049671A1 (en) * | 2015-09-25 | 2017-03-30 | 苏州大学张家港工业技术研究院 | Micro operating system based on scanning electron microscope |
| CN108173452A (en) * | 2018-01-12 | 2018-06-15 | 长春工业大学 | Three-dimensional piezoelectric micro-nano drives platform and its driving method |
| CN111308130A (en) * | 2020-03-17 | 2020-06-19 | 清华大学 | Piezoelectric displacement device and atomic force microscope |
-
2013
- 2013-09-26 CN CN201320597289.0U patent/CN203550916U/en not_active Withdrawn - After Issue
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103499308A (en) * | 2013-09-26 | 2014-01-08 | 吉林大学 | Independent five-degree-of-freedom ultra-precise material in-situ test microscopic observation platform |
| CN103499308B (en) * | 2013-09-26 | 2015-12-16 | 吉林大学 | Independent five-degree-of-freedultra-precise ultra-precise material in-situ test microscopic observation platform |
| CN104979155A (en) * | 2015-06-16 | 2015-10-14 | 上海交通大学 | Six-DOF (Degree of Freedom) microplasma jet machining platform system |
| CN104979155B (en) * | 2015-06-16 | 2017-05-10 | 上海交通大学 | Six-DOF (Degree of Freedom) microplasma jet machining platform system |
| WO2017049671A1 (en) * | 2015-09-25 | 2017-03-30 | 苏州大学张家港工业技术研究院 | Micro operating system based on scanning electron microscope |
| CN105895492A (en) * | 2016-06-12 | 2016-08-24 | 江苏天瑞仪器股份有限公司 | XY mobile platform for analyzing ion source sampling device |
| CN108173452A (en) * | 2018-01-12 | 2018-06-15 | 长春工业大学 | Three-dimensional piezoelectric micro-nano drives platform and its driving method |
| CN108173452B (en) * | 2018-01-12 | 2019-11-26 | 长春工业大学 | Three-dimensional piezoelectric micro-nano drives platform and its driving method |
| CN111308130A (en) * | 2020-03-17 | 2020-06-19 | 清华大学 | Piezoelectric displacement device and atomic force microscope |
| CN111308130B (en) * | 2020-03-17 | 2022-01-28 | 清华大学 | Piezoelectric displacement device and atomic force microscope |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103499308B (en) | Independent five-degree-of-freedultra-precise ultra-precise material in-situ test microscopic observation platform | |
| CN203550916U (en) | Independent five-degree-of-freedom ultra-precise material in-situ test microscopic observation platform | |
| CN101876609B (en) | Micron-nano scale in-situ nano indentation and scratching test system | |
| CN203405372U (en) | Flexible hinge type mechanics performance testing platform for in-situ nanoindentation scratching materials | |
| CN101520389B (en) | Super-precision trans-scale in-situ nanometer indentation marking test system | |
| CN202903617U (en) | In-situ three-point bending test device | |
| Tian et al. | A flexure-based five-bar mechanism for micro/nano manipulation | |
| CN201689021U (en) | Micro-nanometer level in-situ nanometer indentation scratch test system | |
| CN105033963B (en) | The freedom degree parallel connection precision stage that a kind of non-resonant piezoelectric motor drives | |
| CN102252923B (en) | Miniaturized in-situ nanoindentation testing device | |
| CN104297082A (en) | In-situ micro-nano indentation/scratch tester | |
| CN104464838A (en) | One-dimensional precision positioning platform with Z axis enlarged in negative direction | |
| JP5286383B2 (en) | Toggle alignment platform | |
| CN103903942B (en) | A kind of multi-degree-of-freedom nanometer operating desk being applicable to nano material manipulation | |
| CN102969031B (en) | Z-thetax-thetay three-degree-of-freedom nanoscale precision split worktable | |
| CN204536114U (en) | For monitoring the in-situ observation system of material Micromechanics behavior | |
| CN101833018B (en) | Scanning probe surface measurement system and measurement method based on optical fiber sensor | |
| Lv et al. | A parallel 3-DOF micro-nano motion stage for vibration-assisted milling | |
| CN203643238U (en) | In-situ test observation platform for testing micro-mechanical property of portable five-freedom-degree material | |
| CN102494955A (en) | Cross-scale in-situ micro-nanometer three-point/four-point bending test device under microscopic assembly | |
| CN201421426Y (en) | Ultra-precision trans-scale in-situ nano-indentation score test system | |
| Lee et al. | Measurement of geometric errors in a miniaturized machine tool using capacitance sensors | |
| CN101261206A (en) | Material nanometer dynamic performance test two freedom degree loading unit | |
| CN204403695U (en) | A kind of Z axis negative sense amplifies micro-move device platform | |
| CN205352971U (en) | A accurate motion platform of diaxon for X X -ray diffractometer |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20140416 Effective date of abandoning: 20151216 |
|
| C25 | Abandonment of patent right or utility model to avoid double patenting |