CN101876609A - Micron-nano scale in-situ nano indentation and scratching test system - Google Patents
Micron-nano scale in-situ nano indentation and scratching test system Download PDFInfo
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- CN101876609A CN101876609A CN2010101210600A CN201010121060A CN101876609A CN 101876609 A CN101876609 A CN 101876609A CN 2010101210600 A CN2010101210600 A CN 2010101210600A CN 201010121060 A CN201010121060 A CN 201010121060A CN 101876609 A CN101876609 A CN 101876609A
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Abstract
The invention relates to a micron-nano scale in-situ nano indentation and scratching test system which integrates driving, precise loading and signal detection, micron-nano scale mechanics performance testing, ultraprecise scratching processing and high resolution in-situ observing as one. The system is mainly composed of a precise positioning platform at X-axis and Y-axis directions, a precise linear positioning platform at Z-axis direction, a precise indentation driving unit, a load signal and displacement signal detection unit and a high resolution digital microscopic imaging system for observing and storing material deformation and damage conditions in the test process. The precise positioning platform at the X-axis and Y-axis directions is assembled on a base, the precise linear positioning platform at the Z-axis direction is assembled on a side plate, the precise indentation driving unit, a precise mechanical sensor for detecting the indentation material pressure of a diamond tool head and a precise displacement sensor for detecting the indentation depth of the diamond tool head to along the Z-axis direction are assembled on the precise linear positioning platform at the Z-axis direction, and the high resolution digital microscopic imaging system is assembled on a beam.
Description
Technical field
The present invention relates to collect driving, accurate loading and detection, micro/nano level Mechanics Performance Testing, ultraprecise delineation processing and in-situ observation is the accurate robotization test system of one, particularly, belong to the fine measuring instrument of optical, mechanical and electronic integration for the device of the nanometer pressure/scratch experiment in the Micromechanics performance test of all kinds of test specimens or material, in-situ nano pressure/scratch experiment and micron-nano scale in-situ adamas delineation processing.Exact instrument is to promote scientific-technical progress, the important assurance of social development, the present invention is the special test equipment that is used to measure the Micromechanics performance parameter of all kinds of test specimens or material, can be to the mechanical property of precision element, testing evaluation is carried out in the military service behavior, manufacturing and designing link optimization technology, improve its performance even improve its serviceable life, and can be under the high-resolution digital micro imaging system real-time monitored test specimen or distortion of materials, damage process, help research and analysis to material damage mechanism, and can be used for the processing of adamantine precision ruling trace, to China's exact instrument, microelectric technique, information science, the metallurgical manufacturing, MEMS (micro electro mechanical system), biomedical engineering, the development that the carplane key components and parts such as manufactures and designs at the industrial technology field will have wide practical value, be to widen optical element, microelectronic element, the effective way of field design-manufacturings such as metallurgical material-this bottleneck of improvement.
Background technology
The measuring technology of micro/nano level material mechanical performance mainly comprises nano impress (Nanoindentation), nanometer cut (Nanoscratch), atomic force microscope (AFM), MEMS (micro electro mechanical system) (MEMS) special test technology (as little stretching etc.) and relevant support technology etc.According to whether can being divided into original position (In situ) test and ex situ (Ex situ) test again in the test by instrument on-line real time monitoring distortion of materials and damage status such as electron microscopes.So-called original position (or on the throne) test is meant on-line continuous monitoring and analysis to carrying out in the measured piece Mechanics Performance Testing; Corresponding with it is non-in-situ test (claiming dystopy or displacement test again), is meant to utilize before the experiment or the test specimen after the experiment carries out mechanics property analysis.Most at present nanometer mechanics researchs rest on the ex situ measuring technology.
(1) support technology in the nanometer dynamic performance test-precision drives and detection technique
The Mechanics Performance Testing of nanoscale is to drive and the precision detection of loading force/displacement (or distortion) is that support technology grows up with ultraprecise.The accurate driver element of micro/nano level is the important process unit of modern high-tech field, from the middle and late in last century, has occurred utilizing intellectual materials such as electric causing/magnetostriction materials, marmem, piezoelectric ceramics to realize the accurate research that drives.Because piezoelectric element can produce accurate controlled distortion under " inverse piezoelectric effect " effect, and has a compact conformation, load-bearing capacity is strong, the resolution height, advantages such as energy conversion efficiency height and no electromagnetic interference (EMI), study the focus that becomes in recent years with piezoelectric element as the precision driving of power conversion element, and to impact type, Inchworm type, multiple piezoelectric actuators such as stick-slip formula driving mechanism and micro-displacement work table have carried out deep research, and these achievements in research are in superfinishing, fine operation, exact instrument, fields such as biomedical engineering have represented comparatively wide application prospect.In the detection of nano-deformation, main at present by the realization of means such as optical triangulation method, interferometric method, condenser type detection; And in the detection of tiny load, the researchist mainly utilizes sensitive element that loading force is converted to little distortion of flexible member, and then obtains loading force by deflection or electric capacity (or strain) variable quantity that caused by distortion are detected.
(2) ex situ (Ex situ) nano impress/delineation measuring technology
As not damaging, be " test of ex situ (Ex-situ) nanometer mechanics " in the nanometer mechanics test by instrument dynamic surveillance distortion of materials such as electron microscopes.The most nanometer mechanics test of determining at present rests in the ex situ test, and is wherein the most representative with nano impress and nanometer delineation.Nano-indenter test imposes on loading force, test piece deformation and the load of test specimen-press dark curve, the parameters such as material consistency and elasticity modulus of can measuring and monitoring the growth of standing timber by check and analysis diamond tool head.Nanometer delineation can be used to study characteristics such as the boundary strength of three-dimensional test specimen and film etc. and delineation drag.These two technology are comparatively ripe now, and all there is commercially produced product in companies such as American MTS and Hysitron, Switzerland CSM, Britain MML. and at present, China does not also possess this class technology with independent intellectual property right.
But these commercialization testing tools can't dynamic surveillance material takes place in the test deformation damage situation, restricted going deep into of research; Their motion module by a plurality of single-degree-of-freedoms assemble and realize multivariant motion output, cause that structure is huge, transmission link is complicated, increased test error, weakened the anti-interference of system; Owing to mostly adopt electromagnetism or static driven mode to realize that accurate the driving loads, cause this quasi-instrument to have significant electromagnetic interference (EMI) at work.Current China is the independent intellectual property right product of this technology not also.Importer's external equipment costs an arm and a leg, safeguards the cost of use height, and the commercial application for military and hi-tech added value field is considered, external high-end technology equipment is to also offset embargo of China, so that restricted the development of subject such as China's material science and microelectric technique and industry to a great extent.
(3) original position (In situ) nanometer dynamic performance test technology
The in-situ nano mechanical test is based on above multinomial technology and just grows up in recent years in one, once the great attention that proposes promptly to be subjected to U.S. government, Massachusetts Institute of Technology (MIT) (MIT), University of California Berkeley (UC Berkeley) and Northwest University etc., U.S. Lao Lunsi Berkeley National Laboratory (LBNL) and Lao Lunsi livermore national laboratory (LLNL) etc. and the top Electronic Speculum FEI of manufacturer etc., at USDOE (DOE), NSFC (NSF) and government organs such as (DOD) of Ministry of National Defence subsidize down, have dropped into suitable manpower, material resources are carried out this research.
The people such as M.A.Wall of U.S. LLNL and LBNL have taken the lead in developing a kind of in-situ nano impression device of realizing accurate driving by gear motor and piezoelectric element; The diamond tool head that the people such as A.M.Minor of University of California Berkeley (UC Berkeley) and LBNL promote to mix by piezoelectricity Direct Action Type drive unit has also been carried out the nano-indenter test of aluminium film under the TEM in-situ monitoring; The people such as a damp academician that the S.Suresh of U.S. MIT, the H.D.Espinosa of Northwestern university and China Beijing worker are big have also developed the special test device based on MEMS technology, respectively atomic little human body cell, nano wire and nanotube etc. are carried out the in-situ nano mechanical test, obtained some significant achievements in research.
But above-mentioned proving installation all exist deficiency: LLNL and LBNL people such as M.A.Wall exploitation device since can not detect that loading force causes can't the test material mechanics parameter, can not study the influence rule of loading to the material deformation damage; The device of A.M.Minor etc. obtains loading force by voltage and its deflection relation that is applied on the piezoelectric element through conversion, cause testing complex, off-line operation link too much, the model error and the parameter error that also exist loading force to convert have influenced the credibility of test result on value; There is the restriction of special purpose based on the proving installation of MEMS technology.Because these deficiencies make said apparatus to carry out test to the three-dimensional test specimen more than the characteristic dimension millimeter level, must make the atomic little special test specimen of structure by technologies such as " mask, burn into depositions " in order to test also, the preliminary work complexity is loaded down with trivial details.In addition, because sample dimensions is very small, its fixed form, boundary condition and and the diamond tool head between size effect etc. very remarkable to the test result influence, therefore utilize this test result to remove to estimate the comprehensive mechanical property of weighing the three-dimensional test specimen of large-size and lack credible.
In-situ nano mechanical test research at three-dimensional test specimen is detected in the part work that J.Michler of Swiss Federal Institute of Technology and R.Rabe, the W.Gao of northeastern Japan university and associate professor Zhao Hongwei place project team etc. carry out at present.
People such as J.Michler have developed a kind of in-situ nano delineation proving installation under European framework planning and Swiss Confederation's government-funded, adopt stick-slip formula (Stick-Slip) drive mechanism as driving power source, utilize capacitive displacement transducer and strain force sensor testing tool head to be pressed into the degree of depth and the pressure of test specimen, and studying the deformation damage situation of gallium arsenide (GaAs) under continuous delineation power effect under scanning electron microscope (SEM) in-situ monitoring.But this device test block full-size Φ 8 * 5mm, loading force resolution 1mN can carry maximum test specimen weight and only be 10g.Be subjected to exist in the restriction work of stick-slip formula Piezoelectric Driving mechanism the backlash phenomenon (amplitude reaches 30-100nm) that can't overcome, and all can produce micro breadth oscillation at each period of motion inner core driver element, the positioning error of drive unit also causes loading force to have very mistake and uncontrollability, has had a strong impact on measuring accuracy and reliability.
In sum, the in-situ nano mechanical test is generally believed it is the effective ways of brand-new, the most potential research material nanoscale mechanical property and damage mechanism by international academic community and engineering circle, is subjected to the great attention of international project circle, academia and department of government concerned in recent years.The in-situ nano mechanical testing instrument of commercially produced product only has U.S. Hysitron company to produce at present, and price is very expensive, and China is embargoed; The restriction that all there is certain shortcoming in other some in-situ nano mechanical tests or is subjected to special purpose.
The present invention is an object with the precise high-efficiency measuring technology of studying test specimen or material Micromechanics performance, damage mechanism, proposition is at the new equipment of the in-situ nano impression/delineation test of three-dimensional test specimen more than the characteristic dimension millimeter level, conduct a research and develop and advance its industrialization, remedying the blank in this field of China, and occupy one seat at the international level.
Summary of the invention
The object of the present invention is to provide a kind of micron-nano scale in-situ nano indentation and scratching test system, this system is that a kind of to collect driving, loading, detection, micro/nano level Mechanics Performance Testing, ultraprecise delineation processing and home position observation be the comprehensive precise experiment system of high-performance of one.It is by the grand moving adjusting mechanism of the objective table with X, Y-axis precision positioning, Z-direction and accurately be pressed into driver element, be used for detecting the moving displacement of compression distance Z direction diamond cutter and X, the precise displacement sensor I7 of the displacement of Y direction objective table, be used to detect that accurate mechanics sensor and being used to that diamond cutter is pressed into the pressure of material internal is observed and accurate micro imaging system and the digital imaging system of storing mechanical test process distortion of materials, damage status formed.Objective table with X, Y-axis precision positioning can be realized the precision feeding of workpiece on X, Y direction, the grand moving adjusting mechanism of Z-direction can the rapid adjustment diamond cutter and workpiece between the position, precision is pressed into driver element can realize that diamond cutter is pressed into to material internal, and accurate micro imaging system and digital imaging system are used for observation and store mechanical test process distortion of materials, damage status.
Above-mentioned purpose of the present invention is achieved through the following technical solutions, and accompanying drawings is as follows:
A kind of micron-nano scale in-situ nano indentation and scratching measuring technology and system, mainly by X, Y and Z-direction locating platform, driving and detecting unit and be used for observation storage test process material deformation, the high-resolution digital micro imaging system of damage status is formed, described X, X in Y and the Z-direction locating platform, Y direction precisely locating platform 17 passes through can be simultaneously along X, the slide mechanism that Y direction moves is assemblied on the base 2, the precision linear locating platform 6 of Z-direction is slidingly matched with the side plate 3 that is fixed on the base 2, described driving and detecting unit are installed on the precision linear locating platform 6 of Z-direction, the high-resolution digital micro imaging system be assemblied in base 2 hard-wired crossbeams 10 on.
Described slide mechanism is mainly formed by the guide rail of square crossing layout with to the power drag chain of the guide rail application of force, locating platform 17 is installed on the guide rail II26 that is fixed in pedestal I18, guide rail II26 is installed on the guide rail III28 that is fixed in pedestal II22 by X-axis moving slider 23, pedestal II22 is fixedly mounted on the base 2, locating platform 17 and X-axis moving slider 23 are driven by power drag chain II25 and power drag chain III24 respectively and move along Y-axis and X-direction, and amount of movement is detected by corresponding grating detection system and carries out closed-loop control as feedback signal.
The precision linear locating platform 6 of described Z-direction is driven by power drag chain I4 and moves along Z-direction, and amount of movement is detected by the grating detection system and carries out closed-loop control as feedback signal.
Described driving and detecting unit mainly are made up of flexible hinge, piezoelectric stack, power and displacement transducer and diamond penetrator, flexible hinge 8 is fixedly mounted on the locating platform 6 by web joint I7, force transducer 19 is threaded in flexible hinge 8 lower ends, precise displacement sensor 20 is fixedly mounted on the web joint I7, diamond penetrator 21 is installed on the force transducer 19 by connecting link, and is locked by lock-screw.
Described high-resolution digital micro imaging system mainly is made up of crossbeam, web member, guide rod and CCD digital imaging system, the CCD digital imaging system is contained on the guide rod 13 by web member IV15 and web member III14, guide rod 13 is fixed on the crossbeam 10 by web joint II9, be slidingly matched between web member IV15 and the web member III14, and by adjusting nut 12 location, web member III14 is slidingly mounted on the guide rod 13, and by set nut I11 location.
Described driver element is that precision is pressed into driver element, this unit comprises 2 piezoelectric stack I29 and the piezoelectric stack II30 that is contained on the flexible hinge 8, and adopt piezoelectric stack I29 and piezoelectric stack II30 to drive simultaneously, strengthen the precision feeding stroke of diamond penetrator 21 in Z-direction.
Technique effect of the present invention is: (mensuration that the test specimen size can reach mechanical property parameters such as the hardness, elastic modulus, delineation drag of 40mm * 40mm * 10mm) characterizes method of testing and equipment more accurately is provided, and measuring technology or the method load deflection resolution that the present invention proposes reaches nanoscale, loading force resolution reaches little ox level for the three-dimensional material for test of macrofeature size; By the high-resolution digital micro imaging system distortion of materials damage status in the test is carried out in-situ monitoring, for mechanical behavior or the military service behavior of evaluation analysis material under loading provides and studies means of testing more accurately and effectively, for set up distortion of materials damage under the loading and and loading and material property between the correlativity rule technological means is provided; For the nano-diamond delineation processing of complicated precise grating etc. provides the method for optimizing processing technology.Patent of the present invention will play the promotion facilitation to fields such as material science, microelectric technique, precision optics, thin film technique, Ultraprecision Machining and defence and militaries.
Description of drawings
Accompanying drawing 1 is accurate robotization nano impress/scratch test apparatus main body part body figure.
Accompanying drawing 2 is mechanism maps of X, Y direction precisely locating platform.
Accompanying drawing 3 is that precision is pressed into the driver element mechanism map
1. supporting seat, 2. base, 3. side plate, 4. power drag chain I, 5. guide rail I, the axial precision linear locating platform of 6.Z, 7. web joint I, 8. flexible hinge, 9. web joint II, 10. crossbeam, 11. set nut I, 12. adjust nuts, 13. guide rod, 14. web member III, 15. web member IV, 16.CCD digital imaging system, 17.X, the Y direction precisely locating platform, 18. pedestal I, 19. force transducer, 20. precise displacement sensors, 21. diamond penetrators, 22. pedestal II, 23.X axle moving slider, 24. power drag chain III, 25. power drag chain II, 26. guide rail II, 27. grating detection systems, 28. guide rail III, 29. piezoelectric stack I, 30. piezoelectric stack II
Embodiment
Further specify detailed content of the present invention and embodiment thereof below in conjunction with the accompanying drawing illustrated embodiment.
A kind of micron-nano scale in-situ nano indentation and scratching measuring technology and system, mainly precision linear locating platform 6 and the precision by X, Y direction precisely locating platform 17, Z-direction is pressed into driver element, load signal detecting unit, displacement signal detecting unit, is used for observing the high-resolution digital micro imaging system of storage test process material deformation, damage status to form.Described X, Y direction precisely locating platform 17 are assemblied on the base 2, the precision linear locating platform 6 of Z-direction is installed on the side plate 3, precision is pressed into driver element, detection diamond tool head is pressed into the precision force transducer 19 of material pressure and the precise displacement sensor 20 of detection Z direction diamond tool head compression distance is installed on the precision linear locating platform 6 of Z-direction, and the high-resolution digital micro imaging system is assemblied on the crossbeam 10.
Described X, Y direction precisely locating platform 17 mainly are made up of pedestal I18, pedestal II22, guide rail II26, guide rail III28, X-axis moving slider 23, grating detection system 27, power drag chain III24, power drag chain II25.Locating platform 17 is installed on the guide rail II26, and guide rail II26 is installed on the pedestal I18 by screw, and locating platform 17 drives it by power drag chain II25 and moves along Y direction, and the amount of movement size detects and form closed-loop control by grating detection system 27.Pedestal I18 is installed on the X-axis moving slider 23 by screw, and X-axis moving slider 23 is installed on the guide rail III28, and guide rail III28 is installed on the pedestal II22 by screw, and pedestal II22 is installed on the base 2.Drive X-axis moving slider 23 by power drag chain III24 and move along X-axis, finally drive locating platform 17 according to annexation and move along X-axis, the size of amount of movement is detected by corresponding grating detection system, and the realization closed-loop control, finally realizes precision positioning.
The precision linear locating platform 6 of described Z-direction is installed on the guide rail I5, guide rail I5 is installed on the side plate 3 by screw, driving locating platform 6 by power drag chain I4 moves along Z-direction, the size of amount of movement is measured by the grating detection system and is realized closed-loop control as feedback signal, and the final precision that realizes moves.
Described precision is pressed into driver element and detecting unit mainly is made up of flexible hinge 8, piezoelectric stack I29, piezoelectric stack II30, force transducer 19, precise displacement sensor 20, diamond penetrator 21.Web joint I7 is installed on the locating platform 6 by screw, flexible hinge 8 is installed on the web joint I7 by screw, force transducer 19 is by being threaded in flexible hinge 8 lower ends, precise displacement sensor 20 is installed on the web joint I7 by screw, diamond penetrator 21 is installed on the force transducer 19 by connecting link, and is locked by lock-screw.In the test process, the power that is pressed into of diamond penetrator 21 is picked up by force transducer 19, and compression distance is picked up by precise displacement sensor 20.Precision is pressed into precision on driver element and the detecting unit Z-direction and moves by the precision linear locating platform 6 of Z-direction and realize.
Described high-resolution digital micro imaging system mainly is made up of crossbeam 10, web joint II9, set nut I11, adjustment nut 12, guide rod 13, web member III14, web member IV15, CCD digital imaging system 16.Crossbeam 10 is installed on the base 2, web joint II9 is installed on the crossbeam 10 by screw, guide rod 13 is installed on the web joint II9, web member III14 can move along guide rod 9, lock by set nut I11 when arriving the appropriate location, web member IV15 can move in web member III14 groove by regulating adjustment nut 12, and it is mobile to drive 16 realizations of CCD digital imaging system.Under the high resolving power micro imaging system, can realize mechanical behavior and damage status that material under the loading in nano impress/delineation process takes place are implemented dynamic in-situ monitoring.
Described precision is pressed into driver element and adopts piezoelectric stack I29, piezoelectric stack II30 to drive simultaneously, can strengthen the stroke of diamond penetrator 21 in Z-direction, and realizes the precision feeding on the Z-direction.
The present invention is a kind of accurate robotization test system, test specimen sticks on X, the Y direction precisely locating platform, driving precisely locating platform by the power drag chain on X, the Y direction moves along X, Y direction, the size of amount of movement is detected by corresponding grating detection system and realizes closed-loop control as feedback signal, thereby realizes the precision positioning of test specimen along X, Y direction.Diamond penetrator moves by the power drag chain on the Z-direction in the precision on the Z-direction and drives realization, and realization self-locking, amount of displacement is detected as feedback signal by corresponding grating detection system and realizes closed-loop control, guarantee mobile accuracy, whether have registration to change according to force transducer and judge whether pressure head touches the test specimen surface.The pressure head precision is pressed into driver element and is realized by flexible hinge and two piezoelectric stacks of design, advantage such as have that stroke is big, high, the no electromagnetic interference (EMI) of resolution, structure are small.Detect pressure head respectively by precision force transducer and precise displacement sensor and be pressed into the power that is pressed in the test specimen process and the size of compression distance, by software programming control A/D capture card with the force signal synchronous acquisition of the displacement signal of displacement transducer output and force transducer output in computing machine, by data processing, obtain load---the depth curve of indentation test again.Drive test specimen by the power drag chain on control X or the Y direction and realize the accurate scratch experiment that to finish test specimen that moves along X or Y direction.By the high-resolution digital imaging system on the proving installation, can distortion, the damage status of real-time monitored test specimen under the loading force effect.
Consult shown in the accompanying drawing 1, X, Y direction precisely locating platform 17 are assemblied on the base 2, the precision linear locating platform 6 of Z-direction is installed on the side plate, precision is pressed into driver element, detect the precise displacement sensor 20 that the diamond tool head is pressed into the precision force transducer 19 of material pressure and detects Z direction diamond tool head compression distance is installed on the precision linear locating platform 6 of Z-direction by web joint I7, is used for observing and the high-resolution digital micro imaging system of storing mechanical test process distortion of materials, damage status is assemblied in crossbeam 10.
Accompanying drawing 2 is mechanism maps of X, Y direction precisely locating platform, locating platform 17 is installed on the guide rail II26, guide rail II26 is installed on the pedestal I18 by screw, locating platform 17 drives it by power drag chain II25 and moves along Y direction, and the amount of movement size detects and form closed-loop control by grating detection system 27.Pedestal I18 is installed on the X-axis moving slider 23 by screw, and X-axis moving slider 23 is installed on the guide rail III28, and guide rail III28 is installed on the pedestal II22 by screw, and pedestal II22 is installed on the base 2.Drive X-axis moving slider 23 by power drag chain III24 and move along X-axis, finally drive locating platform 17 according to annexation and move along X-axis, the size of amount of movement is detected by corresponding grating detection system, and the realization closed-loop control, finally realizes precision positioning.
Accompanying drawing 3 is mechanism maps that precision is pressed into driver element, flexible hinge 8 is installed on the web joint I7 by screw, piezoelectric stack I29, piezoelectric stack II30 are installed in two corresponding mounting holes of flexible hinge, and use the pad pretension, in the experimentation,, operating personnel realize the precision feeding of diamond penetrator 21 in Z-direction thereby can driving two piezoelectric stacks simultaneously by the power supply of control piezoelectricity fold stack driver.
In nano-indenter test, the degree of depth h that the diamond tool head is pressed into test specimen can record by precise displacement sensor; And imposing on the contact load P of test specimen, the diamond tool head can record by the high-precision force sensor.
According to the relevant knowledge of contact mechanics, the contact stiffness S of test specimen can be expressed as
In conjunction with the correlation theory of Oliver-Pharr, the load at impression test unloading curve top can fit to an exponential function relation with corresponding displacement
P＝α(h-h
f)
m (2)
In the formula: α and m are fitting parameter.
(2) formula is carried out the contact stiffness that differential can obtain test specimen at the maximum load place
S＝αm(h
max-h
f)
m-1 (3)
In addition, the contact stiffness of test specimen also can be provided by following formula
In the formula: A be pressure head this moment with the contact area of test specimen; E
rBe the conversion modulus
In the formula: E
sYoung modulus for test specimen; E
iYoung modulus for the diamond tool head; v
sPoisson ratio for test specimen; v
iPoisson ratio for the diamond tool head.
The micro-hardness of material can be expressed as
In the formula: H is the hardness of measured material; P is applied to load on the material for the diamond tool head; A diamond tool head is pressed into the contact area of material, at rectangular pyramid diamond tool head
At triangular pyramid diamond tool head
Wherein h is the contact degree of depth, and α is the central axis of diamond tool head and the angle of its faceted pebble.
In conjunction with above-mentioned theory,, can calculate the performance parameter such as hardness, elastic modulus of measured material test specimen by indentation curves and the related data that nano indentation test records.By instruments such as electron microscopes the test specimen indented region is observed, and even also can be studied crackle, situation such as stress distribution microstructure change.
Claims (6)
1. micron-nano scale in-situ nano indentation and scratching test system, mainly by X, Y and Z-direction locating platform, driving and detecting unit and be used for observation storage test process material deformation, the high-resolution digital micro imaging system of damage status is formed, it is characterized in that, described X, X in Y and the Z-direction locating platform, Y direction precisely locating platform (17) passes through can be simultaneously along X, the slide mechanism that Y direction moves is assemblied on the base (2), the precision linear locating platform (6) of Z-direction is slidingly matched with the side plate (3) that is fixed on the base (2), described driving and detecting unit are installed on the precision linear locating platform (6) of Z-direction, the high-resolution digital micro imaging system be assemblied in the hard-wired crossbeam of base (2) (10) on.
2. a kind of micron-nano scale in-situ nano indentation and scratching test system according to claim 1, it is characterized in that, described slide mechanism is mainly formed by the guide rail of square crossing layout with to the power drag chain of the guide rail application of force, locating platform (17) is installed on the guide rail II (26) that is fixed in pedestal I (18), guide rail II (26) is installed on the guide rail III (28) that is fixed in pedestal II (22) by X-axis moving slider (23), pedestal II (22) is fixedly mounted on the base (2), locating platform (17) and X-axis moving slider (23) are driven by power drag chain II (25) and power drag chain III (24) respectively and move along Y-axis and X-direction, and amount of movement is detected by corresponding grating detection system and carries out closed-loop control as feedback signal.
3. a kind of micron-nano scale in-situ nano indentation and scratching test system according to claim 1, it is characterized in that, the precision linear locating platform (6) of described Z-direction is driven by power drag chain I (4) and moves along Z-direction, and amount of movement is detected by the grating detection system and carries out closed-loop control as feedback signal.
4. according to claim 1 or 3 described a kind of micron-nano scale in-situ nano indentation and scratching test systems, it is characterized in that, described driving and detecting unit are mainly by flexible hinge, piezoelectric stack, power and displacement transducer and diamond penetrator are formed, flexible hinge (8) is fixedly mounted on the locating platform (6) by web joint I (7), force transducer (19) is threaded in flexible hinge (8) lower end, precise displacement sensor (20) is fixedly mounted on the web joint I (7), diamond penetrator (21) is installed on the force transducer (19) by connecting link, and is locked by lock-screw.
5. a kind of micron-nano scale in-situ nano indentation and scratching test system according to claim 1, it is characterized in that, described high-resolution digital micro imaging system is mainly by crossbeam, web member, guide rod and CCD digital imaging system are formed, the CCD digital imaging system is contained on the guide rod (13) by web member IV (15) and web member III (14), guide rod (13) is fixed on the crossbeam (10) by web joint II (9), be slidingly matched between web member IV (15) and the web member III (14), and by adjusting nut (12) location, web member III (14) is slidingly mounted on the guide rod (13), and by set nut I (11) location.
6. according to claim 1 or 4 described a kind of micron-nano scale in-situ nano indentation and scratching test systems, it is characterized in that, described driver element is that precision is pressed into driver element, this unit comprises 2 piezoelectric stack I (29) and the piezoelectric stack II (30) that is contained on the flexible hinge (8), and adopt piezoelectric stack I (29) and piezoelectric stack II (30) to drive simultaneously, strengthen the precision feeding stroke of diamond penetrator (21) in Z-direction.
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Cited By (31)
| Publication number | Priority date | Publication date | Assignee | Title |
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