CN102331370A - In-situ high-frequency fatigue material mechanical test platform under scanning electron microscope based on stretching/compressing mode - Google Patents

In-situ high-frequency fatigue material mechanical test platform under scanning electron microscope based on stretching/compressing mode Download PDF

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CN102331370A
CN102331370A CN201110305113A CN201110305113A CN102331370A CN 102331370 A CN102331370 A CN 102331370A CN 201110305113 A CN201110305113 A CN 201110305113A CN 201110305113 A CN201110305113 A CN 201110305113A CN 102331370 A CN102331370 A CN 102331370A
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test platform
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CN102331370B (en
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赵宏伟
马志超
李秦超
王开厅
胡晓利
黄虎
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Jilin University
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Jilin University
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Abstract

The invention relates to an in-situ high-frequency fatigue material mechanical test platform under a scanning electron microscope based on a stretching/compressing mode and belongs to the field of machinery and electronics. The test platform comprises a precise loading unit, a precise motion conversion unit, a load/displacement signal acquisition and control unit, a high-frequency driving unit and a test piece clamping and connecting unit. The test platform provided by the invention has the advantages that the structure is compact, the test precision is high, the strain rate and the test frequency are controllable, an in-situ high-frequency test based on the stretching/compressing mode can be performed on a three-dimensional test piece aiming at centimeter-scale or above in characteristic dimension under the condition of observation of various imaging instruments, the on-line monitoring can be carried out on the microcosmic deformation, damage and breaking process of a material under a fatigue stress, and a novel test method for revealing microcosmic deformation behaviors and a damage system of the material is provided.

Description

Based on original position high-cycle fatigue mechanics of materials test platform under the ESEM of stretching/compact model
Technical field
The present invention relates to electrical category, particularly a kind of based on original position high-cycle fatigue mechanics of materials test platform under the ESEM of stretching/compact model.Itself and scanning electron microscope, atomic force microscope, Raman spectrometer and optical microscope etc. have favorable compatibility; In conjunction with above-mentioned Image-forming instrument; Carry out under given applied stress or the strain level to material under the fatigue stress effect microdeformation, damage and destructive process carry out online observation; Can realize collection, record and control, method of testing is provided for disclosing the mechanical characteristic and the damage mechanism of material under micro-nano-scale to load/displacement signal.
Background technology
Original position micro nanometer mechanics measuring technology is meant under micro-nano-scale carries out in the Mechanics Performance Testing process material for test, through electron microscope, atomic force microscope and or Image-forming instrument such as optical microscope microdeformation that material under the loading is taken place, omnidistance dynamic monitoring is carried out in damage until the process of failure damage a kind of mechanical test technology.Certainly will be able to disclose the rule of material deformation damage under the extraneous loading through the in-situ mechanical means of testing; Find more novel phenomenon and rule, the relevant test of being carried out with regard to the large-size test specimen will more help true mechanical behavior and deformation damage mechanism under research material and the goods service state thereof.
Fatigue phenomenon can be interpreted as material, part and member under CYCLIC LOADING, produces local permanent damage at certain point or some point, and after certain cycle index, forms crackle or make crackle further expand the phenomenon that ruptures up to fully.Material or member are different fully with destruction character under the static load effect the destruction that causes under the alterante stress effect.Bear member that alterante stress is used as under the situation of working stress, also unexpected fracture possibly take place after experiencing certain working time far below the strength degree of material.Under the alterante stress effect; Because member profile and material internal quality be inhomogeneous, fault is arranged; Cause some regional area stress of member to reach yield limit, under the effect of alterante stress, will form tiny microfissure gradually at this regional area; And the crack tip serious stress concentration further cause crackle under the alterante stress effect constantly to internal extended, finally make material or member generation rupture failure.
The commercialization fatigue tester is used to the stress or the strain that provide sample or member to bear cycle or random variation, to be determined at indexs such as endurance limit and fatigue lifetime under the particular cycle radix.Torture test can be divided into according to experimental enviroment: room temperature/high temperature/fatigue testing at low temperature, thermal fatigue test, corrosion fatigue test and contact fatigue test etc.; Load mode according to test specimen can be divided into: repeated tension and compression test, repeated bend test, torsional fatigue test and compound profit torture test etc.; Type according to Cyclic Stress can be divided into: constant amplitude fatigue test, frequency conversion torture test and random fatigue test etc.
At present, still locate bud to the research that can be used for the original position testing fatigue pertinent instruments under the ESEM, be in particular in: (1) is on means of testing and method; The ex situ testing fatigue that is mainly undertaken by business-like fatigue tester, and fatigue tester costs an arm and a leg, and operating noise is bigger; Debugging is complicated; Content measurement is single, and to compact conformation, the original position fatigue test device based on stretch mode of advantages of small volume rarely has to be mentioned.(2) receive the restriction of the cavity space of scanning electron microscope; Present majority all concentrates on the little/Mechatronic Systems technology of receiving and is the basis; In the simple in-situ nano test to atomic minor structures such as nanometer and membraneous materials; Lack trans-scale in-situ nanometer mechanical test,, the research of little member has been restricted the evaluation to the mechanical property of large-size element because of the existence of size effect to macro-size (membraneous material or three-dimensional test specimen); See from test frequency that (3) present original position fatigue tester generally all only can provide the test of the low-cycle fatigue below the 50Hz, be not inconsistent with the actual condition of material and goods thereof, also limited correlative study deeply with development.
Therefore, it is high to design a kind of measuring accuracy, compact conformation, and test frequency is higher, and can be very necessary with the compatible original position high-cycle fatigue mechanics of materials test platform based on stretch mode that uses of imaging system such as electron microscope.
Summary of the invention
The object of the present invention is to provide a kind ofly, solved the problems referred to above that present technology exists based on original position high-cycle fatigue mechanics of materials test platform under the ESEM of stretching/compact model.The present invention can be at the original position high-frequency test of carrying out under the dynamic monitoring of observation instruments such as ESEM under arbitrarily given applied stress or strain level, and carries out constant amplitude or frequency conversion torture test under the room temperature, and test frequency is controlled.With respect to the test of offing normal of transmission fatigue tester, the present invention can carry out the original position torture test under stretching/compact model and can carry out the precision detection and the closed-loop control of load/displacement signal synchronously under the dynamic monitoring of Image-forming instruments such as ESEM.Proving installation and Zeiss EVO 18 type scanning electron microscope have favorable compatibility, also can use with all kinds of imaging system compatibilities with cavity or objective table structure, like atomic force microscope, Raman spectrometer, X-ray diffractometer and optical microscope etc.Can obtain the important mechanics parameters such as endurance limit of material through the original position testing fatigue; Crack initiation, expansion and material failure fracture process to material carry out in-situ monitoring, for disclosing mechanical characteristic and the damage mechanism of material under micro-nano-scale method of testing are provided.
Above-mentioned purpose of the present invention realizes through following technical scheme:
Based on original position high-cycle fatigue mechanics of materials test platform under the ESEM of stretching/compact model, comprise accurate loading unit, precise motion converting unit, load/displacement signal collection and control module, high frequency drive unit and test specimen clamping and linkage unit;
Described accurate loading unit is: DC servo motor 1 is connected with test platform pedestal 22 through motor flange frame 2 ,Offer fixed angular speed and dynamic torque output through accurate pulse/direction control mode;
Described precise motion converting unit is: deceleration, increment to a certain degree carried out in the torque power with small resolution and the angular displacement output of the one-level spur gear transmission that constitutes through the driving and driven spur gears in the spur gear housing 3 25,29, second-stage worm gear worm drive adjutant DC servo motor 1 output that is made up of worm screw, worm gear 4,5; Final will rotatablely moving through the accurate bidirectional ball guide screw nat that is made up of ball-screw nut support I, ball-screw nut support II, accurate bidirectional ball- screw 16,20,27 converts accurate linear reciprocating motion to; Driving and driven spur gear 25,29 is connected with DC servo motor 1 and worm screw 4 through flat key 26 respectively; This worm screw 4 is connected with test platform pedestal 22 through worm bearing 32 and worm shaft bearing 23; Accurate bidirectional ball guide screw nat by ball-screw nut support I, II, accurate bidirectional ball- screw 16,20,27 constitute is located through leading screw fixed supporting seat 6, and the to-and-fro movement of ball-screw nut support I, II, (16,20) is led through guide rail slide block I, the II (17,21) that is connected on the precise guide rail track (19);
Described load/displacement signal collection and control module are counted photoelectric encoder 24 by accurate pull pressure sensor 14, accurate tangent displacement sensor 18 and high line and are formed; This high line is counted photoelectric encoder 24 and is connected with DC servo motor 1; Accurate tangent displacement sensor 18 passes accurate flexible hinge 7 and fixing through displacement transducer trip bolt 30, and accurate pull pressure sensor 14 is fixedly connected with force transducer pedestal 15; The feedback signal source of the pulse of DC servo motor 1/direction closed loop control mode is demarcated the rate of displacement digital quantity by rate of deformation, two kinds of analog quantitys of rate of loading and scrambler and is provided, and promptly test platform can realize that permanent rate of deformation, constant load speed and three kinds of load/unload modes of permanent rate of displacement are that high-frequency test provides accurate stress and strain reference quantity;
Described high frequency drive unit is made up of accurate flexible hinge 7, piezoelectric stack 8, and wherein piezoelectric stack 8 is installed in the square groove of accurate flexible hinge 7, and with test specimen 11 coplanes, axis setting; Accurate flexible hinge 7) special construction can guarantee that under given action of pulling stress, piezoelectric stack 8 is in pressured state all the time, and accurate flexible hinge 7 screw 9 that is connected through the hinge is rigidly connected with ball-screw nut support II 20;
Described test specimen clamping and linkage unit are made up of test specimen 11, piece fixture body bracing frame 13, clamp body pressing plate I, II 10,12, force transducer pedestal 15, leading screw fixed supporting seat 6 and test platform pedestal 22, and test specimen 11 is accomplished clamping through the clamp body pressing plate I, II 10,12, accurate flexible hinge 7, the piece fixture body bracing frame 13 that have broached-tooth design to compress mode.
Described accurate flexible hinge 7 can guarantee that test specimen 11 is when receiving action of pulling stress; The interior piezoelectric stack 8 of square groove that is installed on accurate flexible hinge 7 is in pressured state all the time; Can guarantee that stacking 8 in the horizontal lower piezoelectric of given applied stress has certain displacement and load fan-out capability; Piezoelectric stack 8 and test specimen 11 coplanes, axis arranged also can guarantee that test specimen 11 receives the single shaft fatigue stress; Be connected through the hinge screw 9 and ball-screw nut support II 20 rigidly connected modes of accurate flexible hinge 7 can guarantee according to certain scale-up factor the accurate shift reciprocately of piezoelectric stack 8 outputs to be passed to the zigzag structure place that the hinge front end is used for clamping test specimen 11 simultaneously.
The body portion of described tangent displacement sensor 18 is installed in the circular hole with ball-screw nut support II 20 rigidly connected accurate flexible hinges 7; And fix through displacement transducer screw 30; Front-end probe part and piece fixture body bracing frame 13 Elastic Contact, promptly tangent displacement sensor 18 actual detected to be deformed into the relative deformation between piece fixture body bracing frame 13 and accurate flexible hinge 7 side plates; Be the weight of balance tangent displacement sensor 18, the heteropleural of accurate flexible hinge 7 has been done necessary counterweight; Accurate pull pressure sensor 14 is all installed in test specimen 28 coplanes with tangent displacement sensor 18, and the stand under load direction receives loading direction identical with test specimen 11.
Described accurate bidirectional ball-screw 27 is provided with two sections little helical pitch raceways that rotation direction is different; Can guarantee in the extension test process of given applied stress level; Ball-screw nut support I, II 16,20 can realize synchronous counter motion, thereby the geometric center position that guarantees test specimen 11 is in the most central of imaging region all the time, is convenient to the observation and the image recording of Image-forming instrument; Simultaneously; Guide rail slide block I, II 17,21 are close on the precise guide rail track 19 through dovetail grooved mechanism respectively, and are rigidly connected with ball-screw nut support I, II 16,20 respectively, and accurate guide effect is played in the to-and-fro movement that the accurate bidirectional ball guide screw nat is exported.
Described piece fixture body bracing frame 13 and accurate flexible hinge 7 all adopt the line cutting mode to be processed as laciniation with the surface of contact of test specimen 11; Clamp body pressing plate I, II (10,12) also adopt the cross hatch cutting mode to process rolling structure with the surface of contact of test specimen (11), can improve the reliability and stability of test specimen clamping in the high-frequency test.
Described piece fixture body support 13 all processes through the line cutting mode with ball-screw nut support I 16 and has semicircular groove; And in this groove, be provided with steel ball, reduce the detection error brought because of friction factor in the load signal gatherer process through being embedded in steel ball in the groove.
Test platform size of main body of the present invention is about 140mm * 44mm * 80mm, has good structure compatible property, vacuum compatibility and Electro Magnetic Compatibility with Zeiss EVO 18 type scanning electron microscope.
Beneficial effect of the present invention is: compared with prior art; Compact conformation of the present invention; Measuring accuracy is high; Available content measurement enriches, has favorable compatibility with Zeiss EVO 18 type scanning electron microscope, also can use with all kinds of imaging system compatibilities with cavity or objective table structure, has wide range of applications.Can carry out the test of trans-scale in-situ fatigue mechanics to the three-dimensional test specimen more than the various characteristic dimension centimetre-sized; Material and goods thereof are dynamic observed in crack initiation, the expansion of load under following fatigue stress effect, machine-processed to disclose the mechanical behavior of material under micro-nano-scale with damage.And the synchronous detection through load/displacement signal, ins conjunction with related algorithm, the also stress-strain diagram and the curve of fatigue under the match generation loading automatically.In sum, the present invention is to enriching original position and promoting material mechanical performance measuring technology and equipment to have important significance for theories and good application development future.
Description of drawings
Fig. 1 is an overall appearance structural representation of the present invention;
Fig. 2 looks synoptic diagram for master of the present invention;
Fig. 3 is a schematic rear view of the present invention;
Fig. 4 is a schematic top plan view of the present invention;
Fig. 5, Fig. 6 are flexible hinge structural representation of the present invention;
Fig. 7, Fig. 8 are clamp body bracing frame synoptic diagram of the present invention.
Among the figure: 1; DC servo motor 2; Motor flange frame 3; Spur gear housing 4; Worm screw 5; Worm gear 6; Leading screw fixed mounting base 7; Accurate flexible hinge 8; Piezoelectric stack 9; Hinge attachment screw 10; Clamp body pressing plate I 11; Test specimen 12; Clamp body pressing plate II 13; Piece fixture body bracing frame 14; Accurate pull pressure sensor 15; Force transducer pedestal 16; Ball-screw nut support I 17; Guide rail slide block I 18; Tangent displacement sensor 19; Precise guide rail track 20; Ball-screw nut support II 21; Guide rail slide block II 22; Test platform pedestal 23; Worm shaft bearing 24; High line is counted photoelectric encoder 25; Active spur gear 26; Flat key 27; Accurate bidirectional ball-screw 28; Force transducer trip bolt 29; Driven spur gear 30; Displacement transducer trip bolt 31; Motor flange dish gib screw 32; Worm bearing 33; The clamp body trip bolt.
Embodiment
Further specify detailed content of the present invention and embodiment thereof below in conjunction with accompanying drawing.
Referring to Fig. 1 to Fig. 8; Of the present invention based on original position high-cycle fatigue mechanics of materials test platform under the ESEM of stretching/compact model, comprise accurate loading unit, precise motion converting unit, load/displacement signal collection and control module, high frequency drive unit and test specimen clamping and linkage unit;
Described accurate loading unit is: DC servo motor 1 is connected with test platform pedestal 22 through motor flange frame 2 ,Offer fixed angular speed and dynamic torque output through accurate pulse/direction control mode; DC servo motor 1 is fixed on the test platform pedestal 22 through motor flange dish gib screw 31;
Described precise motion converting unit is: deceleration, increment to a certain degree carried out in the torque power with small resolution and the angular displacement output of the one-level spur gear transmission that constitutes through the driving and driven spur gears in the spur gear housing 3 25,29, second-stage worm gear worm drive adjutant DC servo motor 1 output that is made up of worm screw, worm gear 4,5; Final will rotatablely moving through the accurate bidirectional ball guide screw nat that is made up of ball-screw nut support I, ball-screw nut support II, accurate bidirectional ball- screw 16,20,27 converts accurate linear reciprocating motion to; Driving and driven spur gear 25,29 is connected with DC servo motor 1 and worm screw 4 through flat key 26 respectively; This worm screw 4 is connected with test platform pedestal 22 through worm bearing 32 and worm shaft bearing 23; Accurate bidirectional ball guide screw nat by ball-screw nut support I, II, accurate bidirectional ball- screw 16,20,27 constitute is located through leading screw fixed supporting seat 6, and the to-and-fro movement of ball-screw nut support I, II, (16,20) is led through guide rail slide block I, the II (17,21) that is connected on the precise guide rail track (19);
Described load/displacement signal collection and control module are counted photoelectric encoder 24 by accurate pull pressure sensor 14, accurate tangent displacement sensor 18 and high line and are formed; This high line is counted photoelectric encoder 24 and is connected with DC servo motor 1; Accurate tangent displacement sensor 18 passes accurate flexible hinge 7 and fixing through displacement transducer trip bolt 30, and accurate pull pressure sensor 14 is fixedly connected with force transducer pedestal 15; The feedback signal source of the pulse of DC servo motor 1/direction closed loop control mode is demarcated the rate of displacement digital quantity by rate of deformation, two kinds of analog quantitys of rate of loading and scrambler and is provided, and promptly test platform can realize that permanent rate of deformation, constant load speed and three kinds of load/unload modes of permanent rate of displacement are that high-frequency test provides accurate stress and strain reference quantity;
Described high frequency drive unit is made up of accurate flexible hinge 7, piezoelectric stack 8, and wherein piezoelectric stack 8 is installed in the square groove of accurate flexible hinge 7, and with test specimen 11 coplanes, axis setting; Accurate flexible hinge 7) special construction can guarantee that under given action of pulling stress, piezoelectric stack 8 is in pressured state all the time, and accurate flexible hinge 7 screw 9 that is connected through the hinge is rigidly connected with ball-screw nut support II 20;
Described test specimen clamping and linkage unit are made up of test specimen 11, piece fixture body bracing frame 13, clamp body pressing plate I, II 10,12, force transducer pedestal 15, leading screw fixed supporting seat 6 and test platform pedestal 22, and test specimen 11 is accomplished clamping through the clamp body pressing plate I, II 10,12, accurate flexible hinge 7, the piece fixture body bracing frame 13 that have broached-tooth design to compress mode.
Described accurate flexible hinge 7 can guarantee that test specimen 11 is when receiving action of pulling stress; The interior piezoelectric stack 8 of square groove that is installed on accurate flexible hinge 7 is in pressured state all the time; Can guarantee that stacking 8 in the horizontal lower piezoelectric of given applied stress has certain displacement and load fan-out capability; Piezoelectric stack 8 and test specimen 11 coplanes, axis arranged also can guarantee that test specimen 11 receives the single shaft fatigue stress; Be connected through the hinge screw 9 and ball-screw nut support II 20 rigidly connected modes of accurate flexible hinge 7 can guarantee according to certain scale-up factor the accurate shift reciprocately of piezoelectric stack 8 outputs to be passed to the zigzag structure place that the hinge front end is used for clamping test specimen 11 simultaneously.
The body portion of described tangent displacement sensor 18 is installed in the circular hole with ball-screw nut support II 20 rigidly connected accurate flexible hinges 7; And fix through displacement transducer screw 30; Front-end probe part and piece fixture body bracing frame 13 Elastic Contact, promptly tangent displacement sensor 18 actual detected to be deformed into the relative deformation between piece fixture body bracing frame 13 and accurate flexible hinge 7 side plates; Be the weight of balance tangent displacement sensor 18, the heteropleural of accurate flexible hinge 7 has been done necessary counterweight; Accurate pull pressure sensor 14 is all installed in test specimen 28 coplanes with tangent displacement sensor 18, and the stand under load direction receives loading direction identical with test specimen 11.
Described accurate bidirectional ball-screw 27 is provided with two sections little helical pitch raceways that rotation direction is different; Can guarantee in the extension test process of given applied stress level; Ball-screw nut support I, II 16,20 can realize synchronous counter motion, thereby the geometric center position that guarantees test specimen 11 is in the most central of imaging region all the time, is convenient to the observation and the image recording of Image-forming instrument; Simultaneously; Guide rail slide block I, II 17,21 are close on the precise guide rail track 19 through dovetail grooved mechanism respectively, and are rigidly connected with ball-screw nut support I, II 16,20 respectively, and accurate guide effect is played in the to-and-fro movement that the accurate bidirectional ball guide screw nat is exported.
Described piece fixture body bracing frame 13 and accurate flexible hinge 7 all adopt the line cutting mode to be processed as laciniation with the surface of contact of test specimen 11; Clamp body pressing plate I, II (10,12) also adopt the cross hatch cutting mode to process rolling structure with the surface of contact of test specimen (11), can improve the reliability and stability of test specimen clamping in the high-frequency test.
Described piece fixture body support 13 all processes through the line cutting mode with ball-screw nut support I 16 and has semicircular groove; And in this groove, be provided with steel ball, reduce the detection error brought because of friction factor in the load signal gatherer process through being embedded in steel ball in the groove.
Test platform size of main body of the present invention is about 140mm * 44mm * 80mm, has good structure compatible property, vacuum compatibility and Electro Magnetic Compatibility with Zeiss EVO 18 type scanning electron microscope.
Referring to Fig. 1 to Fig. 8; Involved in the present invention based on original position high-cycle fatigue mechanics of materials test platform under the ESEM of stretch mode; The overall dimensions of this test platform is about 140mm * 44mm * 80mm; Be that vacuum cavity and image-forming condition according to Zeiss EVO 18 type ESEMs designs, can use with the compatibility of main flow Image-forming instruments such as X-ray diffractometer, Raman spectrometer, atomic force microscope and optical microscope simultaneously.The components and parts that wherein relate to concrete model are: piezoelectric stack 8 (model is NEC-AE0505D08F), DC servo motor 1 (model is Maxon RE-MAX22 25W), tangent displacement sensor 18 (model is the WYM-1 type) and accurate pull pressure sensor 14 (model is the TEST-304 type), high line are counted photoelectric encoder 24 (model is HEDL9140-1000); To the pulse/direction control of DC servo motor 1, test platform can provide rate of deformation control, power rate controlled two-way analog quantity feedback sources and rate of displacement control figure amount feedback.Test specimen 11 length ranges are 4-26mm; Minimum widith is 1mm; The high line that DC servo motor 1 and matching uses is counted photoelectric encoder 24 and can be combined the Accelnet type to watch position control unit DC servo motor 1 is carried out accurate angular displacement and moment of torsion output control, thereby guarantees the strain rate may command of test specimen 11 in the test process.Also can realize precise motion control in conjunction with the Piezoelectric Driving module to piezoelectric stack 8.
The present invention is in concrete test process; At first; Test specimen 11 is before carrying out testing fatigue; Need to adopt wire-electrode cutting and processing method trial-production place to have the standard specimen of stress weakness zone or prevision breach, and handle the better surface smoothness that obtains can be used for the monitoring of high resolving power micro-imaging, or obtain microstructures such as metallographic through technologies such as chemical corrosions through single-sided polishing; Then test specimen 11 is placed in the bare terminal end that accurate flexible hinge 7 and clamp body bracing frame 13 front ends have broached-tooth design; The clamping process of test specimens 11 is accomplished through clamp body pressing plate I, II 10,12 and clamp body trip bolt 33 in the back, further, and the position through the adjustment anchor clamps and utilize level meter and the detection of clock gauge guarantees the coplanarity of test specimen 11 in test process and accurate position.The body portion of tangent displacement sensor 18 is installed in the circular hole with ball-screw nut support II 20 rigidly connected accurate flexible hinges 7; And fix through displacement transducer screw 30; Front-end probe part and piece fixture body bracing frame 13 Elastic Contact, promptly tangent displacement sensor 18 actual detected to be deformed into the relative deformation between piece fixture body bracing frame 13 and accurate flexible hinge 7 side plates.Be the weight of balance tangent displacement sensor 18, the heteropleural of accurate flexible hinge 7 has been done necessary counterweight.Accurate pull pressure sensor 14 is all installed in test specimen 28 coplanes with tangent displacement sensor 18, and the stand under load direction receives loading direction identical with test specimen 11.Then, the accurate position of closing the airtight baffle plate of scanning electron microscope vacuum chamber and in XOY plane, drafting test point through the article carrying platform of ESEM self.
Then; The drawing stress or the strain value that load before the given testing fatigue; Mode with given pulse output drives DC servo motor 1 beginning test process; Promptly through testing algorithm program setting test condition and parameter; The accurate angular displacement of DC servo motor 1 output converts DC servo motor 1 rotatablely moving of output in the linear reciprocating motion test process 14 pairs of axial load of Compression and Expansion of accurate pull pressure sensor through one-level spur gear transmission, second-stage worm gear worm transmission pair and accurate bidirectional ball guide screw nat under the effect of time sequential pulse control signal FDetect; The deflection of while test specimen hPick up synchronously by accurate tangent displacement sensor 18.Given stress level can be a Tensile strength arbitrary value once.At this moment, piezoelectric stack 8 is in pressured state, after this; By the given specific frequency signal of random waveform/pulse producer, be example with sinusoidal and square-wave signal, through power amplifier; The voltage signal of output is acted on two electrodes of piezoelectric stack 8, and the precision of accomplishing piezoelectric stack 8 drives, and given signal can be a fixed frequency signal; Also swept-frequency signal, the frequency range of signal can reach 200Hz, and the shift reciprocately of piezoelectric stack 8 outputs amplifies according to certain ratio through accurate flexible hinge 7; Finally act on test specimen 11, load/displacement two paths of signals is through analog to digital conversion and carry out sending into computing machine behind the necessary signal condition.In the whole process of test; Crack initiation, expansion and the deformation damage situation of test specimen material under tensile load and alternate load effect are carried out dynamic monitoring by the scanning electron microscope imaging system of high enlargement ratio; And document image simultaneously, also can obtain the important mechanics parameters such as endurance limit, elastic modulus of exosyndrome material mechanical property in real time in conjunction with the host computer debugging software.

Claims (6)

1. one kind based on original position high-cycle fatigue mechanics of materials test platform under the ESEM of stretching/compact model, it is characterized in that: comprise accurate loading unit, precise motion converting unit, load/displacement signal collection and control module, high frequency drive unit and test specimen clamping and linkage unit;
Described accurate loading unit is: DC servo motor (1) is connected with test platform pedestal (22) through motor flange frame (2)
Described precise motion converting unit is: driving and driven spur gear (25,29) is connected with DC servo motor (1) and worm screw (4) through flat key (26) respectively; This worm screw (4) is connected with test platform pedestal (22) through worm bearing (32) and worm shaft bearing (23); Accurate bidirectional ball guide screw nat by ball-screw nut support I, II, accurate bidirectional ball-screw (16,20,27) constitute is located through leading screw fixed supporting seat (6), and the to-and-fro movement of ball-screw nut support I, II, (16,20) is led through guide rail slide block I, the II (17,21) that is connected on the precise guide rail track (19);
Described load/displacement signal collection and control module are counted photoelectric encoder (24) by accurate pull pressure sensor (14), accurate tangent displacement sensor (18) and high line and are formed; This high line is counted photoelectric encoder (24) and is connected with DC servo motor (1); Accurate tangent displacement sensor (18) passes accurate flexible hinge (7) and fixing through displacement transducer trip bolt (30), and accurate pull pressure sensor (14) is fixedly connected with force transducer pedestal (15);
Described high frequency drive unit is made up of accurate flexible hinge (7), piezoelectric stack (8), and wherein piezoelectric stack (8) is installed in the square groove of accurate flexible hinge (7), and with test specimen (11) coplane, axis setting; Accurate flexible hinge (7) screw (9) that is connected through the hinge is rigidly connected with ball-screw nut support II (20);
Described test specimen clamping and linkage unit are made up of test specimen (11), piece fixture body bracing frame (13), clamp body pressing plate I, II (10,12), force transducer pedestal (15), leading screw fixed supporting seat (6) and test platform pedestal (22), and test specimen (11) is accomplished clamping through the clamp body pressing plate I, II (10,12), accurate flexible hinge (7), the piece fixture body bracing frame (13) that have broached-tooth design to compress mode.
2. according to claim 1 based on original position high-cycle fatigue mechanics of materials test platform under the ESEM of stretching/compact model; It is characterized in that: the body portion of described tangent displacement sensor (18) is installed in the circular hole with the rigidly connected accurate flexible hinge of ball-screw nut support II (20) (7); And fix through displacement transducer screw (30); Front-end probe part and piece fixture body bracing frame (13) Elastic Contact, promptly tangent displacement sensor (18) actual detected to be deformed into the relative deformation between piece fixture body bracing frame (13) and accurate flexible hinge (7) side plate; Accurate pull pressure sensor (14) is all installed in test specimen (28) coplane with tangent displacement sensor (18), and the stand under load direction receives loading direction identical with test specimen (11).
3. according to claim 1 based on original position high-cycle fatigue mechanics of materials test platform under the ESEM of stretching/compact model; It is characterized in that: described accurate bidirectional ball-screw (27) is provided with two sections little helical pitch raceways that rotation direction is different; Guide rail slide block I, II (17,21) are close on the precise guide rail track (19) through dovetail grooved mechanism respectively, and are rigidly connected with ball-screw nut support I, II (16,20) respectively.
4. according to claim 1 based on original position high-cycle fatigue mechanics of materials test platform under the ESEM of stretching/compact model; It is characterized in that: described piece fixture body bracing frame (13) and accurate flexible hinge (7) are laciniation with the surface of contact of test specimen (11), and clamp body pressing plate I, II (10,12) also adopt the cross hatch cutting mode to process rolling structure with the surface of contact of test specimen (11).
5. according to claim 1 based on original position high-cycle fatigue mechanics of materials test platform under the ESEM of stretching/compact model; It is characterized in that: described piece fixture body supports (13) and is respectively equipped with semicircular groove with ball-screw nut support I (16), and in this groove, is provided with steel ball.
According in the claim 1 to 5 any one described based on stretching/compact model ESEM under original position high-cycle fatigue mechanics of materials test platform, it is characterized in that: described test platform size of main body is 140mm * 44mm * 80mm.
CN 201110305113 2011-10-11 2011-10-11 In-situ high-frequency fatigue material mechanical test platform under scanning electron microscope based on stretching/compressing mode Active CN102331370B (en)

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CN102331370A true CN102331370A (en) 2012-01-25
CN102331370B CN102331370B (en) 2013-01-23

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CN109682681A (en) * 2018-12-06 2019-04-26 内蒙合成化工研究所 A kind of test method of coating micro-crack dynamic expansion and selfreparing effect
CN110161048A (en) * 2019-06-17 2019-08-23 西南交通大学 Super high cycle fatigue damage test system based on advanced light source in situ imaging
CN111318438A (en) * 2019-06-03 2020-06-23 北京建筑大学 Piezoelectric stack type high-frequency excitation system
CN111413231A (en) * 2020-04-02 2020-07-14 浙江理工大学 Small-stroke electromagnetic resonance type axial tension-compression fatigue test method
CN112698056A (en) * 2020-12-07 2021-04-23 西安交通大学 Magnetic-force electric coupling loading system for atomic force microscope
CN113514319A (en) * 2021-05-10 2021-10-19 吉林大学 In-situ static-dynamic fatigue mechanical property testing instrument in scanning electron microscope
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CN102914442A (en) * 2012-10-22 2013-02-06 清华大学 One-way pressure dynamic loading device
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CN103116039A (en) * 2013-01-31 2013-05-22 上海纳米技术及应用国家工程研究中心有限公司 Film sampling compressing device used with atomic force microscopes
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CN105043871A (en) * 2015-07-09 2015-11-11 上海交通大学 Unidirectional and bidirectional tensile test device for mesoscopic structure in-situ online observation
CN105424702A (en) * 2015-12-10 2016-03-23 东南大学 Method for dynamically analyzing cracking failure of carbides in high speed steels
CN106483021A (en) * 2016-12-07 2017-03-08 湘潭大学 With amorphous alloy ribbon stretching device and its using method associated with nano-hardness tester
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CN109682681A (en) * 2018-12-06 2019-04-26 内蒙合成化工研究所 A kind of test method of coating micro-crack dynamic expansion and selfreparing effect
CN109612833A (en) * 2019-01-28 2019-04-12 桂林电子科技大学 The Young's modulus detection device of cable
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CN110161048B (en) * 2019-06-17 2020-06-19 西南交通大学 Ultrahigh cycle fatigue damage test system based on advanced light source in-situ imaging
CN110161048A (en) * 2019-06-17 2019-08-23 西南交通大学 Super high cycle fatigue damage test system based on advanced light source in situ imaging
CN111413231A (en) * 2020-04-02 2020-07-14 浙江理工大学 Small-stroke electromagnetic resonance type axial tension-compression fatigue test method
CN111413231B (en) * 2020-04-02 2022-11-08 浙江理工大学 Small-stroke electromagnetic resonance type axial tension-compression fatigue test method
CN112698056A (en) * 2020-12-07 2021-04-23 西安交通大学 Magnetic-force electric coupling loading system for atomic force microscope
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