CN102331376B - Cross-scale micro-nano in-situ three-point bending mechanical performance testing platform - Google Patents
Cross-scale micro-nano in-situ three-point bending mechanical performance testing platform Download PDFInfo
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- CN102331376B CN102331376B CN 201110172197 CN201110172197A CN102331376B CN 102331376 B CN102331376 B CN 102331376B CN 201110172197 CN201110172197 CN 201110172197 CN 201110172197 A CN201110172197 A CN 201110172197A CN 102331376 B CN102331376 B CN 102331376B
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- 238000012360 testing method Methods 0.000 title claims abstract description 45
- 238000013001 point bending Methods 0.000 title claims abstract description 24
- 238000011065 in-situ storage Methods 0.000 title abstract description 10
- 230000005540 biological transmission Effects 0.000 claims abstract description 19
- 238000003384 imaging method Methods 0.000 claims description 9
- 230000008878 coupling Effects 0.000 claims description 7
- 238000010168 coupling process Methods 0.000 claims description 7
- 238000005859 coupling reaction Methods 0.000 claims description 7
- 238000003754 machining Methods 0.000 claims description 3
- 238000001514 detection method Methods 0.000 abstract description 2
- 239000000463 material Substances 0.000 description 23
- 238000000034 method Methods 0.000 description 12
- 238000005452 bending Methods 0.000 description 11
- 239000000523 sample Substances 0.000 description 11
- 238000005259 measurement Methods 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 5
- 238000006073 displacement reaction Methods 0.000 description 4
- 238000012544 monitoring process Methods 0.000 description 4
- 238000011160 research Methods 0.000 description 4
- 238000011161 development Methods 0.000 description 3
- 230000002929 anti-fatigue Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000011835 investigation Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000011056 performance test Methods 0.000 description 2
- 238000010998 test method Methods 0.000 description 2
- 238000001069 Raman spectroscopy Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 239000002071 nanotube Substances 0.000 description 1
- 239000002070 nanowire Substances 0.000 description 1
- 238000004621 scanning probe microscopy Methods 0.000 description 1
- 238000010008 shearing Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
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Abstract
The invention relates to a cross-scale micro-nano in-situ three-point bending mechanical performance testing platform which belongs to the field of in-situ mechanical performance testing and structurally comprises a precise drive unit, a transmission and execution unit, a signal control and detection unit and a connection and support unit, wherein a brushless direct-current servo motor is connected with a primary worm, connected with a secondary worm shaft through a primary worm gear drive pair, respectively connected with precise ball screws I and II through a secondary worm gear drive pair, and further connected with a hammer head. The cross-scale micro-nano in-situ three-point bending mechanical performance testing platform has the advantages of small volume, light weight, high rigidity, compact structure and high test precision, can provide plentiful test contents, and can be mutually compatible with carrier platforms of various electronic microscope vacuum cavities.
Description
Technical field
The present invention relates to the in-situ mechanical field tests, particularly a kind of scale micro-nano-stage normal-position three-point bending mechanics performance testing platform of striding.Can be when sample being carried out the three-point bending loading, with the microdeformation of the microscopic imaging instruments such as Electronic Speculum (such as scanning electron microscope SEM, transmission electron microscope TEM, scanning probe microscopy SPM etc.) to sample in the loading procedure, damage and fracture process are implemented in-situ monitoring; Also can repeatedly load sample, with microscopic imaging instruments such as Electronic Speculum sample be carried out online observation; Can realize collection, control and conversion to load/displacement signal, for the Accurate Measurement sample at the mechanical characteristic under the micro-nano-scale with disclose the microdeformation of sample under the three-point bending effect, damage and failure mechanism provides new test mode.
Background technology
The in-situ mechanical test refers under the micro-/ nano yardstick material for test be carried out in the process of Mechanics Performance Testing, by the microdeformation that the instruments such as optical microscope, electron microscope and atomic force microscope occur material and goods thereof under the various loads, omnidistance dynamically a kind of mechanical test means of on-line monitoring are carried out in damage.This technology has disclosed the correlativity rule between size, kind and the material property of mechanical behavior, micromechanism of damage and load of various types of materials and goods thereof from microcosmic point.In the category of many micro nanometer mechanics performance tests, elastic modulus, shear modulus, bending modulus, hardness, the parameters such as break limit are the topmost tested objects in little member mechanical property testing, a variety of method of testings have been produced for these mechanical quantities, such as nano impress/cut, the stretching/compressing method, shearing method, torsional technique, bending method and eardrum method etc., its situ three-point bending method of testing is reaction material or the mechanical characteristic of goods under bending condition more comprehensively, and can measure more intuitively the material bending modulus, the important mechanics parameter such as yield limit and fracture strength; By repeated multiple times material or goods are carried out three-point bending loading and unloading, also can reflect to a certain extent the anti-fatigue performance of sample.
Current research for the test of original position three-point bending still is in the junior stage, concrete manifestation is as follows: (1) scanning electron microscope, the cavity space of atomic force microscope and transmission electron microscope etc. is very limited, to such an extent as to present majority research all concentrates on take micro-/ nano yardstick material and structure as the basis, to nanotube, the atomic minor structure such as nano wire and membraneous material is carried out on the simple in-situ nano extension test, lack the further investigation to the trans-scale in-situ micro-/ nano Mechanics Performance Testing of macro-size (membraneous material or three-dimensional test specimen), thereby seriously fettered academia to the Micromechanics behavior of large-size element and the further investigation of damage and failure mechanism; (2) from surveying instrument, mainly wear crooked charger by means of business-like scanning electron microscope (SEM) material and goods thereof are carried out the Mechanics Performance Testing of original position micro-/ nano, this method exists cost of equipment expensive, test specification is limited, the characteristics such as content measurement is outmoded, to compact conformation, measurement range is adjustable, rare the mentioning of original position three-point bending proving installation that content measurement is various greatly restricted going deep into and development of research;
Before the three-point bending mechanical property measuring technology was used in position, bending test generally was to the test of offing normal of material and goods thereof with large-scale Apparatus for Bending at low-temp.Testing machine loads sample with uniform rate according to relevant criterion, draw load-deflection curve by testing machine, and then obtain stress-strain curve under the load, therefore, initial Apparatus for Bending at low-temp is after material is bent to the angle or fracture of regulation, draws the mechanics parameters such as elastic modulus, yield limit, break limit of material.The conventional bending testing machine for mostly be the grand material yardstick of large scale test specimen, do not relate to the mechanical property research of sample micro-nano-scale category, do not relate to the original position online observation under the high resolving power micro imaging system yet.
Summary of the invention
The object of the present invention is to provide a kind of scale micro-nano-stage normal-position three-point bending mechanics performance testing platform of striding, solved that somewhat expensive, volume that present technology exists are large, complex structure, Heavy Weight, measuring accuracy is low and the problem such as poor compatibility.The present invention has that volume is little, lightweight, rigidity is high, compact conformation, measuring accuracy are high, and can utilize microdeformation and the Damage and Fracture processes of imaging system on-line monitoring macroscopic view test specimen under load such as electron microscope, the characteristics such as available content measurement is abundant, can obtain by the test of original position three-point bending the important mechanics parameters such as bending modulus, yield limit and fracture strength of material, also can carry out three-point bending loading and unloading to material or goods by repeated multiple times, reflect to a certain extent the anti-fatigue performance of sample.Microdeformation, damage and fracture process to material are implemented the original position on-line monitoring, provide new proving installation for disclosing mechanical characteristic and the damage and failure mechanism of material under micro-nano-scale.
Above-mentioned purpose of the present invention is achieved through the following technical solutions:
Stride scale micro-nano-stage normal-position three-point bending mechanics performance testing platform, comprise accurate driver element, transmission and performance element, signal controlling and detecting unit, connect and support unit, described accurate driver element, transmission and performance element are: brushless servomotor 33 is connected with one-level worm screw 37 by bellow spring coupling 35, and be connected with second-stage worm axle 1 by the first-stage worm gear worm transmission pair that is formed by one-level worm screw 37 and first-stage worm gear 4, again by second-stage worm cover I, II 3,27 and the second-stage worm gear I, II 2, the 28 second-stage worm gear worm transmission pairs that form respectively with the precision ball screw I, II 13,18 connect, and further by the square nut I, II 7,22 are connected with tup 12; Wherein brushless servomotor 33 is fastenedly connected with motor flange dish 34, and motor flange dish 34 is fixedly connected with platform base 19; Bellows coupling 35 is rigidly connected with motor output shaft and one-level worm shaft 37 respectively, and the one-level worm drive assembly that this one-level worm screw 37 and one-level worm bearing form is fixed on the platform base 19 by one-level worm shaft bearing 36, register pin and sunk screw; The second-stage worm transmission component that second-stage worm axle 1 is connected with the second-stage worm bearing is connected by interference fit with side plate II, I 24,31 dead eyes respectively; First-stage worm gear 4 and second-stage worm gear I, II 2,28 are rigidly connected with one-level worm screw 37 and precision ball screw I, II 13,18 respectively; Second-stage worm cover I, II 3,27 are rigidly connected with second-stage worm axle 1 respectively; Precision ball screw I, II 13,18 leading screw stiff end I, II 5,25 are connected with platform base 19, and leading screw support end 16 is connected with platform base 19; Square nut I, II 7,22 are rigidly connected with feed screw nut I, II 6,23 respectively; Power sensor 11 is threaded with power sensor connecting piece 10 and tup 12 respectively, and passes through fastening nuts; The performance element that power sensor 11, power sensor connecting piece 10 and tup 12 form is located by connecting by holding screw and sunk screw and square nut I, II 7,22.
Described signal controlling and detecting unit comprise power sensor 11 and photoelectric encoder 32, and this power sensor 11 is threaded with power sensor connecting piece 10 and tup 12 respectively, and passes through fastening nuts.
Described connection and support unit comprise T-shaped groove 15, supporting member I, II 14,17 and auxiliary support plate, this T-shaped groove 15 is fixed on the leading screw support end 16, supporting member I, II 14,17 move to the span of testing requirements in this T-shaped groove 15 after, fastening by T-shaped bolt, nut and T-shaped groove 15, auxiliary support plate places in supporting member I, II 14,17 the slit.
Described square nut I, II 7, a side of 22 are groove type.
Described leading screw stiff end I, II 5,25 respectively with guide pole I, II 8,21 end interference assembling, this guide pole I, II 8,21 the other end are installed in respectively in guide pole supporting seat I, the II 9,20, and by screws clamp, the Finish Machining Bore interference fit on linear bearing 30 and square nut I, the II 7,22.
Described side plate II, I 24,31 are separately fixed on the saddle 29, and these saddle 29 inclined-planes become certain angle adjustable (0 ~ 90 °) with the bottom surface, and these saddle 29 bottoms arrange collet support bar 26, and the ear seat by both sides is fixed on the objective table of microscopic imaging instrument.
Beneficial effect of the present invention is: compared with prior art, volume of the present invention is little, lightweight, rigidity is high, compact conformation, measuring accuracy is high, available content measurement is abundant, can be compatible with the article carrying platform of various electron microscope vacuum cavities, also can with atomic force microscope, Raman spectrometer, X-ray diffractometer, the imaging devices such as optical microscope are compatible to be used, have wide range of applications, can carry out the trans-scale in-situ mechanical test to macroscopical test specimen of various materials and goods, and can realize continuously, the multiple load modes such as intermittence, to material and goods thereof bending load under microdeformation carry out dynamic online observation, to disclose mechanical behavior and the damage and failure mechanism of material under micro-nano-scale.By the synchronous detection of load/displacement signal, in conjunction with the related software algorithm, but automatic Fitting generates the stress-strain diagram under the bending load effect, and is practical.
In sum, the present invention has important theory directive significance and good application and development prospect to enriching the development of original position micro nanometer mechanics performance test content and promotion material mechanical performance measuring technology and equipment.
Description of drawings
Fig. 1 is perspective view of the present invention;
Fig. 2 is another perspective view of the present invention;
Fig. 3 is that schematic diagram is looked on the right side of the present invention;
Fig. 4 is schematic top plan view of the present invention.
Among the figure:
1, second-stage worm axle 2, second-stage worm gear I 3, second-stage worm cover I 4, first-stage worm gear 5, leading screw stiff end I
6, feed screw nut I 7, square nut I 8, guide pole I 9, guide pole supporting base I 10, power sensor connecting piece 11, power sensor 12, tup 13, precision ball screw I 14, supporting member I 15, T-shaped groove
16, leading screw support end 17, supporting member II 18, precision ball screw II 19, platform base 20, guide pole supporting base II 21, guide pole II 22, square nut II 23, feed screw nut II 24, side plate II 25, leading screw stiff end II
26, collet support bar II 27, second-stage worm cover nail II 28, second-stage worm gear II 29, saddle 30, linear bearing 31, side plate I 32, photoelectric encoder 33, DC servo-motor 34, motor flange dish
35, bellows coupling 36, one-level worm screw supporting seat 37, one-level worm screw.
Embodiment
Further specify detailed content of the present invention and embodiment thereof below in conjunction with accompanying drawing.
Referring to Fig. 1 to Fig. 4, the scale micro-nano-stage normal-position three-point bending mechanics performance testing platform of striding of the present invention comprises accurate driver element, transmission and performance element, signal controlling and detecting unit, connect and support unit, described accurate driver element, transmission and performance element are to provide power output by brushless servomotor 33, brushless servomotor 33 is connected with one-level worm screw 37 by bellow spring coupling 35, and by by one-level worm screw 37 and be fastened on the first-stage worm gear worm transmission pair that the first-stage worm gear 4 on the second-stage worm axle 1 forms and be connected with second-stage worm axle 1, power is reached on the second-stage worm axle 1, again by being fastened on the second-stage worm cover I on the second-stage worm axle 1, II 3,27 and the second-stage worm gear I, II 2, the 28 second-stage worm gear worm transmission pairs that form respectively with the precision ball screw I, II 13,18 connect, with transmission of power to the precision ball screw I, II 13,18 places, and further by the square nut I, II 7,22 are connected with tup 12, drive the accurate straight reciprocating motion of tup 12 outputs; Wherein brushless servomotor 33 is fastenedly connected by motor trip bolt and motor flange dish 34, and motor flange dish 34 directly is fixedly connected with platform base 19 by holding screw; Bellows coupling 35 is rigidly connected with motor output shaft and one-level worm shaft 37 respectively by holding screw, and the one-level worm drive assembly that this one-level worm screw 37 and one-level worm bearing form accurately is fixed on the platform base 19 by one-level worm shaft bearing 36, register pin and sunk screw; The second-stage worm transmission component that second-stage worm axle 1 is connected with the second-stage worm bearing is connected by interference fit with side plate II, I 24,31 dead eyes respectively; First-stage worm gear 4 and second-stage worm gear I, II 2,28 are rigidly connected by worm gear attachment screw and one-level worm screw 37 and precision ball screw I, II 13,18 respectively; Second-stage worm cover I, II 3,27 are rigidly connected with second-stage worm axle 1 respectively by the worm screw attachment screw; Precision ball screw I, II 13,18 leading screw stiff end I, II 5,25 are connected with platform base 19 by sunk screw, and leading screw support end 16 accurately is located by connecting by register pin, sunk screw and platform base 19; Square nut I, II 7,22 are rigidly connected with feed screw nut I, II 6,23 respectively by trip bolt; Power sensor 11 is threaded with power sensor connecting piece 10 and tup 12 respectively, and passes through fastening nuts; The performance element that power sensor 11, power sensor connecting piece 10 and tup 12 form is located by connecting by holding screw and sunk screw and square nut I, II 7,22.
Described signal controlling and detecting unit comprise power sensor 11 and photoelectric encoder 32, can provide for the pulse of DC servo-motor 33/direction control model to comprise rate of displacement control, the control of power speed, rate of deformation three kinds of digital-to-analog feedback signal sources in being controlled at; This power sensor 11 is threaded with power sensor connecting piece 10 and tup 12 respectively, and passes through fastening nuts; This power sensor 11 be subjected to force direction consistent with the flexible direction of standard specimen under load, with synchronism and the accuracy that guarantees that load/displacement signal detects.
Described connection and support unit comprise T-shaped groove 15, the supporting member I, II 14,17 and auxiliary support plate, this T-shaped groove 15 is fixed on the leading screw support end 16, the supporting member I, II 14,17 in this T-shaped groove 15, move to the span of testing requirements after, by T-shaped bolt, nut and T-shaped groove 15 are fastening, according to different requirements, can pass through this supporting member I, II 14,17 in these T-shaped groove 15 interior mobile original position three-point bending mechanical property tests that realize the different spans of sample, auxiliary support plate places the supporting member I, II 14, in 17 the slit, standard specimen is placed on the auxiliary support plate, by prestrain, realize standard specimen and supporting member I, II 14,17 pre-contact.
Described square nut I, II 7, a side of 22 are groove type, can be by adding in groove that the standard shim liner is adjusted because the asynchronous problem between two square nuts causing of foozle, thereby the actual loaded direction that has guaranteed tup 12 is consistent with theoretical loading direction.
Described leading screw stiff end I, II 5,25 respectively with guide pole I, II 8,21 end interference assembling, this guide pole I, II 8,21 the other end are installed in respectively in guide pole supporting seat I, the II 9,20, and pass through screws clamp, Finish Machining Bore interference fit on linear bearing (30) and square nut I, the II 7,22, can guarantee in the error allowed band in whole test process, leading screw square nut I, II 7,22 can not produce owing to the existence of load topples or turns on one's side phenomenon.
Described side plate II, I 24,31 are separately fixed on the saddle 29 by holding screw, these saddle 29 inclined-planes become certain angle adjustable (0 ~ 90 °) with the bottom surface, these saddle 29 bottoms arrange collet support bar 26, and the ear seat by both sides is fixed on the objective table of the microscopic imaging instruments such as Electronic Speculum.Thereby guarantee that test specimen enters the within sweep of the eye clear of the microscopic imaging instruments such as Electronic Speculum.
Claims (6)
1. stride scale micro-nano-stage normal-position three-point bending mechanics performance testing platform for one kind, comprise accurate driver element, transmission and performance element, signal controlling and detecting unit, connection and support unit, it is characterized in that, described accurate driver element, transmission and performance element are
:Brushless servomotor (33) is connected with one-level worm screw (37) by bellow spring coupling (35), and be connected with second-stage worm axle (1) by the first-stage worm gear worm transmission pair that is formed by one-level worm screw (37) and first-stage worm gear (4), the second-stage worm gear worm transmission pair that forms by second-stage worm cover I, II (3,27) and second-stage worm gear I, II (2,28) again is connected with precision ball screw I, II (13,18) respectively, and further is connected with tup (12) by square nut I, II (7,22); Wherein brushless servomotor (33) is fastenedly connected with motor flange dish (34), and motor flange dish (34) is fixedly connected with platform base (19); Bellow spring coupling (35) is rigidly connected with motor output shaft and one-level worm shaft (37) respectively, and the one-level worm drive assembly that this one-level worm screw (37) and one-level worm bearing form is fixed on the platform base (19) by one-level worm shaft bearing (36), register pin and sunk screw; The second-stage worm transmission component that second-stage worm axle (1) is connected with the second-stage worm bearing is connected by interference fit with side plate II, I (24,31) dead eye respectively; First-stage worm gear (4) and second-stage worm gear I, II (2,28) are rigidly connected with one-level worm screw (37) and precision ball screw I, II (13,18) respectively; Second-stage worm cover I, II (3,27) are rigidly connected with second-stage worm axle (1) respectively; The leading screw stiff end I of precision ball screw I, II (13,18), II (5,25) are connected with platform base (19), and leading screw support end (16) is connected with platform base (19); Square nut I, II (7,22) are rigidly connected with feed screw nut I, II (6,23) respectively; Power sensor (11) is threaded with power sensor connecting piece (10) and tup (12) respectively, and passes through fastening nuts; The performance element that power sensor (11), power sensor connecting piece (10) and tup (12) form is located by connecting by holding screw and sunk screw and square nut I, II (7,22).
2. the scale micro-nano-stage normal-position three-point bending mechanics performance testing platform of striding according to claim 1, it is characterized in that: described signal controlling and detecting unit comprise power sensor (11) and photoelectric encoder (32), this power sensor (11) is threaded with power sensor connecting piece (10) and tup (12) respectively, and passes through fastening nuts.
3. the scale micro-nano-stage normal-position three-point bending mechanics performance testing platform of striding according to claim 1, it is characterized in that, described connection and support unit comprise T-shaped groove (15), supporting member I, II (14,17) and auxiliary support plate, this T-shaped groove (15) is fixed on the leading screw support end (16), supporting member I, II (14,17) move to the setting span in this T-shaped groove (15) fastening by T-shaped bolt, nut and T-shaped groove (15), and auxiliary support plate places in the slit of supporting member I, II (14,17).
4. the scale micro-nano-stage normal-position three-point bending mechanics performance testing platform of striding according to claim 1 is characterized in that, a side of described square nut I, II (7,22) is groove type.
5. the scale micro-nano-stage normal-position three-point bending mechanics performance testing platform of striding according to claim 1, it is characterized in that, described leading screw stiff end I, II (5,25) are assembled with an end interference of guide pole I, II (8,21) respectively, the other end of this guide pole I, II (8,21) is installed in respectively in guide pole supporting seat I, the II (9,20), and by screws clamp, the Finish Machining Bore interference fit on linear bearing (30) and square nut I, the II (7,22).
6. the scale micro-nano-stage normal-position three-point bending mechanics performance testing platform of striding according to claim 1, it is characterized in that, described side plate II, I (24,31) are separately fixed on the saddle (29), this saddle (29) inclined-plane becomes 0 ~ 90 ° of angle with the bottom surface, this saddle (29) is fixed on the objective table of microscopic imaging instrument by the ear seat of both sides.
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| CN102494955B (en) * | 2011-11-10 | 2013-04-24 | 吉林大学 | Cross-scale in-situ micro-nanometer three-point/four-point bending test device under microscopic assembly |
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| CN106680108A (en) * | 2016-11-24 | 2017-05-17 | 惠科股份有限公司 | Method and device for testing bending of display panel |
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| FR2704649B1 (en) * | 1993-04-30 | 1995-07-21 | Centre Nat Rech Scient | IN SITU TRACTION MACHINE AND TEST FOR ELECTRONIC SCANNING MICROSCOPE. |
| CN101113946B (en) * | 2007-07-20 | 2010-08-04 | 北京工业大学 | Force and electrical behavior testing device under Nanometer lines in-situ compressing in transmission electron microscope |
| CN101226121B (en) * | 2008-01-30 | 2010-06-02 | 赵宏伟 | Precision charger for material nano metric bending mechanical properties test |
| CN101285747B (en) * | 2008-04-25 | 2010-09-08 | 哈尔滨工业大学 | In situ nanometer stretching experiment measuring detection device |
| CN101876609B (en) * | 2009-06-12 | 2013-05-08 | 赵宏伟 | Micron-nano scale in-situ nano indentation and scratching test system |
| CN202141647U (en) * | 2011-06-24 | 2012-02-08 | 赵宏伟 | Cross-scale micro-nano-stage normal-position three-point bending mechanics performance testing platform |
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