CN202141647U - Cross-scale micro-nano-stage normal-position three-point bending mechanics performance testing platform - Google Patents

Cross-scale micro-nano-stage normal-position three-point bending mechanics performance testing platform Download PDF

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Publication number
CN202141647U
CN202141647U CN201120216830U CN201120216830U CN202141647U CN 202141647 U CN202141647 U CN 202141647U CN 201120216830 U CN201120216830 U CN 201120216830U CN 201120216830 U CN201120216830 U CN 201120216830U CN 202141647 U CN202141647 U CN 202141647U
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worm
screw
stage worm
point bending
stage
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赵宏伟
胡晓利
马志超
黄虎
史成利
张霖
张鹏
刘长胜
李秦超
万顺光
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赵宏伟
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Abstract

The utility model relates to a cross-scale micro-nano-stage normal-position three-point bending mechanics performance testing platform, which belongs to the field of normal-position mechanics performance testing and structurally comprises an accurate driving unit, a transmission and execution unit, a signal control and detection unit and a connection and support unit. A brushless direct current servo motor is connected with a first-level worm, connected with a second-level worm shaft through a first-level worm gear and worm transmission pair, then connected with an accurate ball screw I and an accurate ball screw II respectively through a second-level worm gear and worm transmission pair, and further connected with a hammer head. The testing platform has the advantages of being small in size, light in weight, high in rigidity, compact in structure, high in measurement accuracy, rich in available testing contents and compatible with bearing platforms of vacuum cavities of various electron microscopes.

Description

Stride yardstick micron-nano scale in-situ three-point bending mechanical property test platform
Technical field
The utility model relates to the in-situ mechanical field tests, particularly a kind of yardstick micron-nano scale in-situ three-point bending mechanical property test platform of striding.Can be when sample being carried out the three-point bending loading; With the microdeformation of micro-imaging instruments such as Electronic Speculum (like scanning electron microscope SEM, transmission electron microscope TEM, scanning probe microscopy SPM etc.) to sample in the loading procedure, damage and fracture process are implemented in-situ monitoring; Also can load repeatedly, sample carried out online observation with micro-imaging instruments such as Electronic Speculum to sample; Can realize collection, control and conversion to load/displacement signal, for accurately working sample is at mechanical characteristic under the micro-nano-scale and the microdeformation of announcement sample under the three-point bending effect, Damage and Fracture mechanism provides new test mode.
Background technology
The in-situ mechanical test is meant under the micro-/ nano yardstick to be carried out in the process of Mechanics Performance Testing material for test; Through the microdeformation that instruments such as optical microscope, electron microscope and atomic force microscope take place material and goods thereof under the various loadings, omnidistance dynamically a kind of mechanical test means of on-line monitoring are carried out in damage.This technology has disclosed the correlativity rule between size, kind and the material property of mechanical behavior, micromechanism of damage and load of various types of materials and goods thereof from microcosmic point.In the category of many micro nanometer mechanics performance tests; Parameters such as elastic modulus, shear modulus, bending modulus, hardness, break limit are the topmost tested objects in little member mechanical property testing; A variety of method of testings have been produced to these mechanical quantities; Like nano impress/cut, stretching/compression method, shearing method, torsional technique, bending method and eardrum method etc.; More comprehensively reaction material or the mechanical characteristic of goods under bending condition of original position three-point bending method of testing wherein, and can measure important mechanics parameters such as material bending modulus, yield limit and fracture strength more intuitively; Through repeated multiple times material or goods are carried out three-point bending loads and unloading, also can reflect the anti-fatigue performance of sample to a certain extent.
Currently still be in the junior stage for original position three-point bending Research of measuring; Concrete manifestation is following: the cavity space of (1) scanning electron microscope, atomic force microscope and transmission electron microscope etc. is very limited; To such an extent as to the research of present majority all concentrates on micro-/ nano yardstick material and structure and is the basis; Atomic minor structures such as nanotube, nano wire and membraneous material are carried out on the simple in-situ nano extension test; Lack further investigation, thereby seriously fettered academia the Micromechanics behavior of large-size element and the further investigation of Damage and Fracture mechanism to the trans-scale in-situ micro-/ nano Mechanics Performance Testing of macro-size (membraneous material or three-dimensional test specimen); (2) from surveying instrument, mainly to wear crooked charger material and goods thereof are carried out the Mechanics Performance Testing of original position micro-/ nano by means of business-like scanning electron microscope (SEM), this method exists cost of equipment expensive; Test specification is limited; Characteristics such as content measurement is outmoded, to compact conformation, measurement range is adjustable; Rare the mentioning of original position three-point bending proving installation that content measurement is various greatly restricted going deep into and development of research;
Before the three-point bending mechanical property measuring technology was used in position, bending test generally was to the test of offing normal of material and goods thereof with large-scale Apparatus for Bending at low-temp.Testing machine loads sample with uniform rate according to relevant criterion; Draw load-deflection curve by testing machine; And then obtain stress-strain curve under the loading; Therefore, initial Apparatus for Bending at low-temp is after material is bent to the angle or fracture of regulation, draws the mechanics parameters such as elastic modulus, yield limit, break limit of material.What the conventional bending testing machine was directed against mostly is the grand material yardstick of large scale test specimen, does not relate to the mechanical property research of sample micro-nano-scale category, does not also relate to the original position online observation under the high resolving power micro imaging system.
Summary of the invention
The purpose of the utility model is to provide a kind of yardstick micron-nano scale in-situ three-point bending mechanical property test platform of striding, and has solved that expensive, volume that present technology exists are big, complex structure, Heavy Weight, measuring accuracy is low and problem such as poor compatibility.The utlity model has that volume is little, in light weight, rigidity is high, compact conformation, measuring accuracy be high; And can utilize microdeformation and the Damage and Fracture processes of imaging system on-line monitoring macroscopic view test specimen under loading such as electron microscope; Characteristics such as available content measurement is abundant; Can obtain the important mechanics parameters such as bending modulus, yield limit and fracture strength of material through the test of original position three-point bending; Also can through repeated multiple times material or goods are carried out three-point bending loads and unloading, reflect the anti-fatigue performance of sample to a certain extent.Microdeformation, damage and fracture process to material are implemented the original position on-line monitoring, for disclosing mechanical characteristic and the Damage and Fracture mechanism of material under micro-nano-scale new proving installation are provided.
The above-mentioned purpose of the utility model realizes through following technical scheme:
Stride yardstick micron-nano scale in-situ three-point bending mechanical property test platform; Comprise accurate driver element, transmission and performance element, signal controlling and detecting unit, connection and support unit; Described accurate driver element, transmission and performance element are: brushless servomotor 33 is connected with one-level worm screw 37 through corrugated tube spring coupling 35; And the first-stage worm gear worm transmission pair through being made up of one-level worm screw 37 and first-stage worm gear 4 is connected with second-stage worm axle 1; The second-stage worm gear worm transmission pair of forming through second-stage worm cover I, II 3,27 and second-stage worm gear I, II 2,28 again is connected with precision ball screw I, II 13,18 respectively, and further is connected with tup 12 through square nut I, II 7,22; Wherein brushless servomotor 33 is fastenedly connected with motor flange dish 34, and motor flange dish 34 is fixedly connected with platform base 19; Bellows coupling 35 is rigidly connected with motor output shaft and one-level worm shaft 37 respectively, and this one-level worm screw 37 is fixed on the platform base 19 through one-level worm shaft bearing 36, register pin and sunk screw with the one-level worm drive assembly that the one-level worm bearing is formed; Second-stage worm axle 1 is connected through interference fit with side plate II, I 24,31 dead eyes respectively with the second-stage worm transmission component that the second-stage worm bearing is formed; First-stage worm gear 4 and second-stage worm gear I, II 2,28 are rigidly connected with one-level worm screw 37 and precision ball screw I, II 13,18 respectively; Second-stage worm cover I, II 3,27 are rigidly connected with second-stage worm axle 1 respectively; Leading screw stiff end I, the II 5,25 of precision ball screw I, II 13,18 are connected with platform base 19, and leading screw support end 16 is connected with platform base 19; Square nut I, II 7,22 are rigidly connected with feed screw nut I, II 6,23 respectively; Force transducer 11 is threaded with force transducer web member 10 and tup 12 respectively, and fastening through nut; The performance element that force transducer 11, force transducer web member 10 and tup 12 are formed is located by connecting through holding screw and sunk screw and square nut I, II 7,22.
Described signal controlling and detecting unit comprise force transducer 11 and photoelectric encoder 32, and this force transducer 11 is threaded with force transducer web member 10 and tup 12 respectively, and fastening through nut.
Described connection and support unit comprise T type groove 15, supporting member I, II 14,17 and auxiliary support plate; This T type groove 15 is fixed on the leading screw support end 16; Supporting member I, II 14,17 move to the span of testing requirements in this T type groove 15 after; Fastening through T type bolt, nut and T type groove 15, auxiliary support plate places in the slit of supporting member I, II 14,17.
One side of described square nut I, II 7,22 is a groove shape.
Described leading screw stiff end I, II 5,25 are assembled with an end interference of guide pole I, II 8,21 respectively; The other end of this guide pole I, II 8,21 is installed in respectively in guide pole supporting seat I, the II 9,20; And through screws clamp, the finishing hole interference fit on linear bearing 30 and square nut I, the II 7,22.
Described side plate II, I 24,31 are separately fixed on the saddle 29, and these saddle 29 inclined-planes become certain angle adjustable (0 ~ 90 °) with the bottom surface, and these saddle 29 bottoms are provided with collet support bar 26, and the ear seat through both sides is fixed on the objective table of micro-imaging instrument.
The beneficial effect of the utility model is: compared with prior art; The utility model volume is little, in light weight, rigidity is high, compact conformation, measuring accuracy high; Available content measurement is abundant; Can be compatible with the article carrying platform of various electron microscope vacuum cavities, also can use with imaging devices such as atomic force microscope, Raman spectrometer, X-ray diffractometer, optical microscope are compatible, have wide range of applications; Can carry out the trans-scale in-situ mechanical test to macroscopical test specimen of various materials and goods; And can realize continuously, intermittence etc. multiple load mode, to material and goods thereof bending load under microdeformation carry out dynamic online observation, machine-processed to disclose mechanical behavior and the Damage and Fracture of material under micro-nano-scale.Through the synchronous detection of load/displacement signal, in conjunction with the related software algorithm, match generates the stress-strain diagram under the bending load effect automatically, and is practical.
In sum, the utility model has important theory directive significance and good application development prospect to enriching original position micro nanometer mechanics performance test content and the development that promotes material mechanical performance measuring technology and equipment.
Description of drawings
Fig. 1 is the perspective view of the utility model;
Fig. 2 is another perspective view of the utility model;
Fig. 3 looks synoptic diagram for the right side of the utility model;
Fig. 4 is the schematic top plan view of the utility model.
Among the figure:
1, second-stage worm axle 2, second-stage worm gear I 3, second-stage worm cover I 4, first-stage worm gear 5, leading screw stiff end I
6, feed screw nut I 7, square nut I 8, guide pole I 9, guide pole supporting base I 10, force transducer web member 11, force transducer 12, tup 13, precision ball screw I 14, supporting member I 15, T type groove
16, leading screw support end 17, supporting member II 18, precision ball screw II 19, platform base 20, guide pole supporting base II 21, guide pole II 22, square nut II 23, feed screw nut II 24, side plate II 25, leading screw stiff end II
26, collet support bar II 27, second-stage worm cover nail II 28, second-stage worm gear II 29, saddle 30, linear bearing 31, side plate I 32, photoelectric encoder 33, DC servo-motor 34, motor flange dish
35, bellows coupling 36, one-level worm screw supporting seat 37, one-level worm screw.
Embodiment
Further specify the detailed content and the embodiment thereof of the utility model below in conjunction with accompanying drawing.
Referring to Fig. 1 to Fig. 4; The yardstick micron-nano scale in-situ three-point bending mechanical property test platform of striding of the utility model comprises accurate driver element, transmission and performance element, signal controlling and detecting unit, connection and support unit; Described accurate driver element, transmission and performance element are by brushless servomotor 33 power output to be provided; Brushless servomotor 33 is connected with one-level worm screw 37 through corrugated tube spring coupling 35; And through by one-level worm screw 37 and be fastened on the first-stage worm gear worm transmission pair that the first-stage worm gear 4 on the second-stage worm axle 1 formed and be connected with second-stage worm axle 1; Power is reached on the second-stage worm axle 1; Again through be fastened on second-stage worm cover I, II 3,27 and the second-stage worm gear I on the second-stage worm axle 1, the second-stage worm gear worm transmission pair that II 2,28 is formed is connected with precision ball screw I, II 13,18 respectively; With transmission of power to precision ball screw I, II 13,18 places, and further be connected with tup 12, drive the accurate straight reciprocating motion of tup 12 outputs through square nut I, II 7,22; Wherein brushless servomotor 33 is fastenedly connected through motor trip bolt and motor flange dish 34, and motor flange dish 34 directly is fixedly connected with platform base 19 through holding screw; Bellows coupling 35 is rigidly connected with motor output shaft and one-level worm shaft 37 respectively through holding screw, and this one-level worm screw 37 accurately is fixed on the platform base 19 through one-level worm shaft bearing 36, register pin and sunk screw with the one-level worm drive assembly that the one-level worm bearing is formed; Second-stage worm axle 1 is connected through interference fit with side plate II, I 24,31 dead eyes respectively with the second-stage worm transmission component that the second-stage worm bearing is formed; First-stage worm gear 4 and second-stage worm gear I, II 2,28 are rigidly connected through worm gear attachment screw and one-level worm screw 37 and precision ball screw I, II 13,18 respectively; Second-stage worm cover I, II 3,27 are rigidly connected with second-stage worm axle 1 respectively through the worm screw attachment screw; The leading screw stiff end I of precision ball screw I, II 13,18, II 5,25 are connected with platform base 19 through sunk screw, and leading screw support end 16 accurately is located by connecting through register pin, sunk screw and platform base 19; Square nut I, II 7,22 are rigidly connected with feed screw nut I, II 6,23 respectively through trip bolt; Force transducer 11 is threaded with force transducer web member 10 and tup 12 respectively, and fastening through nut; The performance element that force transducer 11, force transducer web member 10 and tup 12 are formed is located by connecting through holding screw and sunk screw and square nut I, II 7,22.
Described signal controlling and detecting unit comprise force transducer 11 and photoelectric encoder 32, can provide to the pulse/direction control model of DC servo-motor 33 to comprise that rate of displacement control, power rate controlled, rate of deformation are controlled at three kinds of interior digital-to-analog feedback signal sources; This force transducer 11 is threaded with force transducer web member 10 and tup 12 respectively, and fastening through nut; This force transducer 11 receive force direction consistent with the flexible direction of standard specimen under loading, with synchronism and the accuracy that guarantees that load/displacement signal detects.
Described connection and support unit comprise T type groove 15, supporting member I, II 14,17 and auxiliary support plate; This T type groove 15 is fixed on the leading screw support end 16; Supporting member I, II 14,17 move to the span of testing requirements in this T type groove 15 after; Fastening through T type bolt, nut and T type groove 15, according to different requirement, can pass through this supporting member I, II 14,17 and in this T type groove 15, move the original position three-point bending mechanical property test that realizes the different spans of sample; Auxiliary support plate places in the slit of supporting member I, II 14,17; Standard specimen is placed on the auxiliary support plate,, realize preparatory contact of standard specimen and supporting member I, II 14,17 through prestrain.
One side of described square nut I, II 7,22 is a groove shape; Can adjust the asynchronous problem between two square nuts that cause owing to foozle through in groove, adding the standard shim liner, thereby the actual loaded direction that has guaranteed tup 12 is consistent with theoretical loading direction.
Described leading screw stiff end I, II 5,25 are assembled with an end interference of guide pole I, II 8,21 respectively; The other end of this guide pole I, II 8,21 is installed in respectively in guide pole supporting seat I, the II 9,20; And pass through screws clamp; Finishing hole interference fit on linear bearing (30) and square nut I, the II 7,22; Can guarantee in whole test process in the error allowed band that leading screw square nut I, II 7,22 can not produce owing to the existence of load topples or turn on one's side phenomenon.
Described side plate II, I 24,31 are separately fixed on the saddle 29 through holding screw; These saddle 29 inclined-planes become certain angle adjustable (0 ~ 90 °) with the bottom surface; These saddle 29 bottoms are provided with collet support bar 26, and the ear seat through both sides is fixed on the objective table of micro-imaging instruments such as Electronic Speculum.Thereby micro-imaging instruments such as assurance test specimen entering Electronic Speculum is within sweep of the eye clear.

Claims (6)

1. stride yardstick micron-nano scale in-situ three-point bending mechanical property test platform for one kind; Comprise accurate driver element, transmission and performance element, signal controlling and detecting unit, connection and support unit; It is characterized in that described accurate driver element, transmission and performance element are :Brushless servomotor (33) is connected with one-level worm screw (37) through corrugated tube spring coupling (35); And the first-stage worm gear worm transmission pair through being made up of one-level worm screw (37) and first-stage worm gear (4) is connected with second-stage worm axle (1); The second-stage worm gear worm transmission pair of forming through second-stage worm cover I, II (3,27) and second-stage worm gear I, II (2,28) again is connected with precision ball screw I, II (13,18) respectively, and further is connected with tup (12) through square nut I, II (7,22); Wherein brushless servomotor (33) is fastenedly connected with motor flange dish (34), and motor flange dish (34) is fixedly connected with platform base (19); Bellows coupling (35) is rigidly connected with motor output shaft and one-level worm shaft (37) respectively, and the one-level worm drive assembly that this one-level worm screw (37) and one-level worm bearing are formed is fixed on the platform base (19) through one-level worm shaft bearing (36), register pin and sunk screw; Second-stage worm axle (1) is connected through interference fit with side plate II, I (24,31) dead eye respectively with the second-stage worm transmission component that the second-stage worm bearing is formed; First-stage worm gear (4) and second-stage worm gear I, II (2,28) are rigidly connected with one-level worm screw (37) and precision ball screw I, II (13,18) respectively; Second-stage worm cover I, II (3,27) are rigidly connected with second-stage worm axle (1) respectively; The leading screw stiff end I of precision ball screw I, II (13,18), II (5,25) are connected with platform base (19), and leading screw support end (16) is connected with platform base (19); Square nut I, II (7,22) are rigidly connected with feed screw nut I, II (6,23) respectively; Force transducer (11) is threaded with force transducer web member (10) and tup (12) respectively, and fastening through nut; The performance element that force transducer (11), force transducer web member (10) and tup (12) are formed is located by connecting through holding screw and sunk screw and square nut I, II (7,22).
2. the yardstick micron-nano scale in-situ three-point bending mechanical property test platform of striding according to claim 1; It is characterized in that: described signal controlling and detecting unit comprise force transducer (11) and photoelectric encoder (32); This force transducer (11) is threaded with force transducer web member (10) and tup (12) respectively, and fastening through nut.
3. the yardstick micron-nano scale in-situ three-point bending mechanical property test platform of striding according to claim 1; It is characterized in that; Described connection and support unit comprise T type groove (15), supporting member I, II (14,17) and auxiliary support plate; This T type groove (15) is fixed on the leading screw support end (16); Supporting member I, II (14,17) move to the setting span in this T type groove (15) fastening through T type bolt, nut and T type groove (15), and auxiliary support plate places in the slit of supporting member I, II (14,17).
4. the yardstick micron-nano scale in-situ three-point bending mechanical property test platform of striding according to claim 1 is characterized in that a side of described square nut I, II (7,22) is a groove shape.
5. the yardstick micron-nano scale in-situ three-point bending mechanical property test platform of striding according to claim 1; It is characterized in that; Described leading screw stiff end I, II (5,25) are assembled with an end interference of guide pole I, II (8,21) respectively; The other end of this guide pole I, II (8,21) is installed in respectively in guide pole supporting seat I, the II (9,20), and through screws clamp, the finishing hole interference fit on linear bearing (30) and square nut I, the II (7,22).
6. the yardstick micron-nano scale in-situ three-point bending mechanical property test platform of striding according to claim 1; It is characterized in that; Described side plate II, I (24,31) are separately fixed on the saddle (29); This saddle (29) inclined-plane becomes 0 ~ 90 ° of angle with the bottom surface, this saddle (29) is fixed on the objective table of micro-imaging instrument through the ear seat of both sides.
CN201120216830U 2011-06-24 2011-06-24 Cross-scale micro-nano-stage normal-position three-point bending mechanics performance testing platform Expired - Lifetime CN202141647U (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102331376A (en) * 2011-06-24 2012-01-25 赵宏伟 Cross-scale micro-nano in-situ three-point bending mechanical performance testing platform
CN103076237A (en) * 2012-12-26 2013-05-01 江苏沪宁钢机股份有限公司 Male pin bending device
CN103308498A (en) * 2013-05-14 2013-09-18 中国科学院物理研究所 Direction-controlled uniaxial strain applying device for two-dimensional layered nano material
CN103575228A (en) * 2013-11-13 2014-02-12 武钢集团昆明钢铁股份有限公司 Device for measuring residual deformation of bolt after proof load test
CN107014688A (en) * 2017-06-09 2017-08-04 中国科学院新疆理化技术研究所 A kind of method of home position observation Materials Fracture behavior

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102331376A (en) * 2011-06-24 2012-01-25 赵宏伟 Cross-scale micro-nano in-situ three-point bending mechanical performance testing platform
CN103076237A (en) * 2012-12-26 2013-05-01 江苏沪宁钢机股份有限公司 Male pin bending device
CN103076237B (en) * 2012-12-26 2015-06-17 江苏沪宁钢机股份有限公司 Male pin bending device
CN103308498A (en) * 2013-05-14 2013-09-18 中国科学院物理研究所 Direction-controlled uniaxial strain applying device for two-dimensional layered nano material
CN103575228A (en) * 2013-11-13 2014-02-12 武钢集团昆明钢铁股份有限公司 Device for measuring residual deformation of bolt after proof load test
CN107014688A (en) * 2017-06-09 2017-08-04 中国科学院新疆理化技术研究所 A kind of method of home position observation Materials Fracture behavior
CN107014688B (en) * 2017-06-09 2019-08-06 中国科学院新疆理化技术研究所 A kind of method of home position observation material fracture behaviour

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