CN102359912B - Mechanical testing platform for in-situ tension/compression materials under scanning electronic microscope based on quasi-static loading - Google Patents
Mechanical testing platform for in-situ tension/compression materials under scanning electronic microscope based on quasi-static loading Download PDFInfo
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Abstract
The invention relates to a mechanical testing platform for in-situ tension/compression materials under a scanning electronic microscope based on quasi-static loading, which belongs to machinery and electronic products. The testing platform can realize 'ultra-low-speed quasi-static' tension/compression mode loading, load/displacement signal synchronous acquisition and precision closed-loop control, and further can be compatibly used with HitachiTM-1000 type scanning electron microscopes and various imaging instruments with cavities and objective table structures. The mechanical testing platform consists of a precision driving unit, a precision transmission unit, a load/displacement signal detection and control unit and a clamping and connecting unit. Besides, the mechanical testing platform is small in volume, compact in structure and controllable in strain rate, and has excellent structural compatibility, vacuum compatibility and electromagnetic compatibility with imaging instruments such as various mainstream scanning electron microscopes, atomic force microscopes, Raman spectrometers, X-ray diffraction instruments, optical microscopes and the like.
Description
Technical field
The present invention relates to electrical category, particularly a kind of based on original position stretching/compression material mechanical test platform under the scanning electron microscope of quasistatic loading.The present invention and scanning electron microscope SEM, atomic force microscope AFM, Raman spectrometer and optical microscope etc. have favorable compatibility, in conjunction with above-mentioned Image-forming instrument, microdeformation, damage and destructive process to material carry out online observation, can realize collection and control to load/displacement signal, provide method of testing for disclosing mechanical characteristic and the damage mechanism of material under nanoscale.
Background technology
Parameters such as elastic modulus, yield strength, tensile strength, hardness, shear modulus are the topmost research objects in the characteristic of material mechanics test, in various test, with respect to nano impress method, three-point bending method etc., stretching/compression verification method is by the mechanical test means of the most direct exosyndrome material mechanical property.Original position stretching measuring technology under the scanning electron microscope is as the important means of original position micro nanometer mechanics test, refer to material for test is being carried out in the extension test process, by introducing optical microscope, instruments such as electron microscope are to the microdeformation of material structure in the drawing process and structure generation, the process that damage was lost efficacy is carried out a kind of technology of online observation, this measuring technology certainly will be able to disclose the rule of material deformation damage under the extraneous load effect, find more novel phenomenon and rule, the relevant test of carrying out with regard to the large-size test specimen will more be conducive to true mechanical behavior and the deformation damage mechanism under research material and the goods service state thereof.
At present, the micro-nano rice of original position stretching/compression verification means still remain ten thousand times, be embodied in: (1) from testing tool, mainly the original position stretching that is undertaken by business-like tensilometer is tested, and shows the cost of equipment costliness, and can only use with the former of specific model is compatible, method of testing is single,, to compact conformation, volume is small and exquisite and can all can the compatible in-situ testing device that uses rarely have with the main flow Image-forming instrument and mention, greatly restricted research deeply with development.(2) be subjected to the space constraint of the cavity of various Image-forming instruments, restriction as the cavity space of scanning electron microscope, the focal length restriction of optical microscope, present majority all concentrates on based on MEMS (micro electro mechanical system) technology, on the mechanical test to atomic minor structures such as membraneous material and nanotube, lines, lack the trans-scale in-situ nanometer mechanical test to macroscopical test specimen, because of the existence of size effect, the research of little member has been restricted evaluation to the mechanical property of large-size element; (3) from observation method, because being subject to the vacuum service condition of scanning electron microscope, at macroscopical test specimen, be confined to the original position stretching test under optical microscope and the atomic force microscope more, optical microscope exists the problem of tangible enlargement ratio deficiency, atomic force microscope then has the slow excessively shortcoming of image taking speed, and two kinds of observation procedures all are difficult to further investigate load change to the rule that influences of mechanics of materials behavior and damage mechanism.
Therefore, design small and exquisite, the compact conformation of a kind of volume, the measuring accuracy height can utilize microdeformation and the tensile/compressive forces test platform that based on quasistatic load of damage process of imaging system on-line monitoring such as electron microscope macroscopic view test specimen under the load effect very necessary.
Summary of the invention
The object of the present invention is to provide original position stretching/compression material mechanical test platform under a kind of scanning electron microscope that loads based on quasistatic, solved the problems referred to above that prior art exists.The test of offing normal with respect to traditional cupping machine, the present invention can realize under the high resolving power micro imaging system in-situ observation at macroscopical test specimen more than the characteristic dimension centimetre-sized, solved most limitation at nanotube, line and membraneous material in the existing original position stretching research simultaneously, because it is very big that the yardstick of sample dimensions and mechanical test and in-situ observation is crossed over, can avoid the problem of bringing because of factors such as scale effects in the existing research.Test platform can realize that the stretching/compact model of " Ultra-Low Speed quasistatic " loads, the synchronous collection of load/displacement signal and precise closed-loop control, and can realize and Hitachi TM-1000 type scanning electron microscope and all kinds of compatible use of Image-forming instrument with cavity and objective table structure.Can pass through the mechanics parameters such as elastic modulus, yield strength and tensile strength that original position stretching/compression verification obtains material, microdeformation, damage and fracture process to material carry out in-situ monitoring, provide method of testing for disclosing mechanical characteristic and the damage mechanism of material under micro-nano-scale.
Above-mentioned purpose of the present invention is achieved through the following technical solutions:
Based on original position stretching/compression material mechanical test platform under the scanning electron microscope of quasistatic loading, comprise accurate driver element, precision drive unit, load/displacement signal detection and control module and clamping and linkage unit;
Described accurate driver element is: precision DC servomotor 1 is connected with test platform pedestal 14 by motor flange dish 2, and can provide torque power output and the angular displacement output with small resolution by pulse/direction control mode;
Described precision drive unit comprises spring coupling 3, by the one-level worm screw, first-stage worm gear, second-stage worm gear, second-stage worm 5,6,8, the 30 two-stage twice-enveloping type worm couples that constitute reach by ball-screw nut support I, the accurate bidirectional ball-screw, ball-screw nut support II 17,23, the 31 accurate bidirectional ball guide screw nats that constitute, precision DC servomotor 1 links to each other with two-stage twice-enveloping type worm couple by spring coupling 3, and this two-stage twice-enveloping type worm couple is connected by second-stage worm gear (8) with the accurate bidirectional ball guide screw nat; The output torque that the precision drive unit can provide precision DC servomotor 1 through spring coupling 3 and two-stage twice-enveloping type worm couple realize big degree deceleration, increase the square purpose, and finally will rotatablely move by the accurate bidirectional ball guide screw nat and be converted to accurate straight reciprocating motion; Described I and II worm screw 5,30 is connected with test platform pedestal 14 by worm bearing 10 and I and II worm shaft bearing 4,26 respectively, the accurate bidirectional ball guide screw nat is by leading screw fixed supporting seat 25 location, and ball-screw nut support I, II 17,31 are by precise guide rail slide block I, II 13,15 and precise guide rail track 16 guiding;
Described load/displacement signal detection and control module are counted photoelectric encoder 20 by accurate pull pressure sensor 19, accurate tangent displacement sensor 9 and high line and are formed, accurate pull pressure sensor (19) is fixedly installed on the power sensor base (18), accurate tangent displacement sensor (9) and displacement transducer pedestal (11) socket, high line is counted photoelectric encoder (20) and coaxial connection of precision DC servomotor (1); Load/displacement signal detects and control module can provide and comprises that rate of deformation, rate of loading, scrambler demarcate three kinds of analog or digital amounts of rate of displacement as the feedback signal source of the pulse/direction closed loop control mode of precision DC servomotor 1, and namely test platform can be realized permanent rate of deformation, constant load speed and three kinds of load/unload modes of permanent rate of displacement;
Described clamping and support unit comprise that piece fixture body bracing frame I, II 7,21, test specimen pressing plate I, II 27,29, test specimen 28, leading screw fixed supporting seat 25, displacement transducer pedestal 11, power sensor base 18 and bearing 10 form, test specimen 28 by test specimen pressing plate I, II 27,29 and the piece fixture body bracing frame I, II 7,21 that have an annular knurl structure to compress the mode clamping.
Among the present invention, described accurate bidirectional ball-screw 23 is provided with two sections little helical pitch raceways that rotation direction is different, can guarantee in stretching or compression verification process, ball-screw nut support I, II 17,31 can realize synchronous counter motion, thereby the geometric center position that guarantees test specimen 28 is in the most central of imaging region all the time, is convenient to observation and image record.
The body portion of described accurate tangent displacement sensor 9 be installed on piece fixture body bracing frame I 7 rigidly connected displacement transducer pedestals 11 in, and pass through screw threads for fastening, the L shaped web joint Elastic Contact of front-end probe part and piece fixture body bracing frame II 21, namely accurate tangent displacement sensor 9 actual detected to be deformed into relative deformation between piece fixture body bracing frame I, the II 7,11; Accurate pull pressure sensor 19 two ends are provided with the external thread that axle journal is M5, be rigidly connected with power sensor base 18 and piece fixture body bracing frame II 21 respectively, this precision tangent displacement sensor 9 and accurate pull pressure sensor 19 all with test specimen 28 coplanar installations, and the stand under load direction is subjected to stretching/compression direction identical with test specimen 28.
Described precise guide rail slide block I, II 13,15 are rigidly connected with ball-screw nut support I, II 17,31 respectively, and precise guide rail track 16 is close to by mechanism by the dovetail grooved, and accurate guide effect is played in the to-and-fro movement that the accurate bidirectional ball guide screw nat is exported.
Described piece fixture body bracing frame I, II 7,21 and test specimen pressing plate I, II 27,29 and the surface of contact of test specimen 28 all adopt the line cutting mode to be processed as the knurling structure, can improve the reliability of test specimen clamping, concrete method is to be processed into laciniation respectively two sides.
Described piece fixture body bracing frame II 21 is equipped with semicircular groove with power sensor base 18, and in groove embedded steel ball 22, reduce gearing friction in its contact process by steel ball 22.
Test platform size of main body of the present invention is about 105mm * 34mm * 88mm, have good structure compatible, vacuum compatibility and Electro Magnetic Compatibility with Hitachi TM-1000 type scanning electron microscope, also can use with other main flow commercialization scanning electron microscope, X-ray diffractometer, atomic force microscope and optical microscope etc. are compatible.
Test platform can be installed on the objective table of Hitachi TM-1000 scanning electron microscope vacuum cavity, can its present system in-situ monitoring under carry out the material mechanical performance test of stretching/compact model of loading based on quasistatic, can carry out online observation to microdeformation, damage and the destructive process of material, can realize collection and control to load/displacement signal, but the mechanical characteristic of test material under nanoscale and damage mechanism.
Beneficial effect of the present invention is: compared with prior art, volume of the present invention is small and exquisite, compact conformation, the measuring accuracy height, available content measurement is abundant, distortion/displacement/rate of loading is controlled, can be installed on the article carrying platform of various main flow electron microscope vacuum cavities, also can use with imaging devices such as atomic force microscope, Raman spectrometer, X-ray diffractometer, optical microscope are compatible, have wide range of applications.Can carry out the trans-scale in-situ mechanical test to the three-dimensional test specimen more than the various characteristic dimension centimetre-sized, and can realize continuously, intermittence etc. multiple load mode, to material and goods thereof load under microdeformation dynamic observe, to disclose the mechanical behavior of material under nanoscale and damage mechanism.And the synchronous detection by load/displacement signal, in conjunction with related algorithm, the also stress-strain diagram under the effect of match generation load automatically.In sum, the present invention is to enriching original position micro nanometer mechanics content measurement and promoting material mechanical performance measuring technology and equipment to have important significance for theories and good application development future.
Description of drawings:
Fig. 1 is overall appearance structural representation of the present invention;
Fig. 2 looks synoptic diagram for the right side of the present invention;
Fig. 3 looks synoptic diagram for master of the present invention;
Fig. 4 looks synoptic diagram for a left side of the present invention;
Fig. 5 is schematic top plan view of the present invention;
Fig. 6, Fig. 7, Fig. 8 are the structural representation of clamp body of the present invention.
Among the figure:
1, precision DC servomotor; 2, motor flange dish; 3, spring coupling; 4, one-level worm shaft bearing;
5, one-level worm screw; 6, first-stage worm gear; 7, piece fixture body bracing frame I; 8, second-stage worm gear; 9, accurate tangent displacement sensor; 10, worm bearing; 11, displacement transducer pedestal; 12, second-stage worm bearing seat pedestal; 13, precise guide rail slide block I; 14, test platform pedestal; 15, precise guide rail slide block II; 16, precise guide rail track; 17, ball-screw nut support I; 18, power sensor base; 19, accurate pull pressure sensor; 20, high line is counted photoelectric encoder; 21, piece fixture body bracing frame II; 22, steel ball; 23, accurate bidirectional ball-screw; 24, displacement transducer trip bolt; 25, leading screw fixed supporting seat; 26, second-stage worm bearing seat; 27, test specimen pressure plates I; 28, test specimen; 29, test specimen pressing plate II; 30, second-stage worm; 31, ball-screw nut support II.
Embodiment:
Further specify detailed content of the present invention and embodiment thereof below in conjunction with accompanying drawing.
Referring to Fig. 1 to Fig. 8, of the present invention based on original position stretching/compression material mechanical test platform under the scanning electron microscope of quasistatic loading, comprise accurate driver element, precision drive unit, load/displacement signal detection and control module and clamping and linkage unit;
Described accurate driver element is: precision DC servomotor 1 is connected with test platform pedestal 14 by motor flange dish 2, and can provide torque power output and the angular displacement output with small resolution by pulse/direction control mode;
Described precision drive unit comprises spring coupling 3, by the one-level worm screw, first-stage worm gear, second-stage worm gear, second-stage worm 5,6,8, the 30 two-stage twice-enveloping type worm couples that constitute reach by ball-screw nut support I, the accurate bidirectional ball-screw, ball-screw nut support II 17,23, the 31 accurate bidirectional ball guide screw nats that constitute, precision DC servomotor 1 links to each other with two-stage twice-enveloping type worm couple by spring coupling 3, and this two-stage twice-enveloping type worm couple is connected by second-stage worm gear (8) with the accurate bidirectional ball guide screw nat; The output torque that the precision drive unit can provide precision DC servomotor 1 through spring coupling 3 and two-stage twice-enveloping type worm couple realize big degree deceleration, increase the square purpose, and finally will rotatablely move by the accurate bidirectional ball guide screw nat and be converted to accurate straight reciprocating motion; Described I and II worm screw 5,30 is connected with test platform pedestal 14 by worm bearing 10 and I and II worm shaft bearing 4,26 respectively, the accurate bidirectional ball guide screw nat is by leading screw fixed supporting seat 25 location, and ball-screw nut support I, II 17,31 are by precise guide rail slide block I, II 13,15 and precise guide rail track 16 guiding;
Described load/displacement signal detection and control module are counted photoelectric encoder 20 by accurate pull pressure sensor 19, accurate tangent displacement sensor 9 and high line and are formed, accurate pull pressure sensor (19) is fixedly installed on the power sensor base (18), accurate tangent displacement sensor (9) and displacement transducer pedestal (11) socket, high line is counted photoelectric encoder (20) and coaxial connection of precision DC servomotor (1); Load/displacement signal detects and control module can provide and comprises that rate of deformation, rate of loading, scrambler demarcate three kinds of analog or digital amounts of rate of displacement as the feedback signal source of the pulse/direction closed loop control mode of precision DC servomotor 1, and namely test platform can be realized permanent rate of deformation, constant load speed and three kinds of load/unload modes of permanent rate of displacement;
Described clamping and support unit comprise that piece fixture body bracing frame I, II 7,21, test specimen pressing plate I, II 27,29, test specimen 28, leading screw fixed supporting seat 25, displacement transducer pedestal 11, power sensor base 18 and bearing 10 form, test specimen 28 by test specimen pressing plate I, II 27,29 and the piece fixture body bracing frame I, II 7,21 that have an annular knurl structure to compress the mode clamping.
Among the present invention, described accurate bidirectional ball-screw 23 is provided with two sections little helical pitch raceways that rotation direction is different, can guarantee in stretching or compression verification process, ball-screw nut support I, II 17,31 can realize synchronous counter motion, thereby the geometric center position that guarantees test specimen 28 is in the most central of imaging region all the time, is convenient to observation and image record.
The body portion of described accurate tangent displacement sensor 9 be installed on piece fixture body bracing frame I 7 rigidly connected displacement transducer pedestals 11 in, and pass through screw threads for fastening, front-end probe part is with the L shaped web joint Elastic Contact of piece fixture body bracing frame II 21 and by displacement transducer trip bolt 24 pretensions, namely accurate tangent displacement sensor 9 actual detected to be deformed into relative deformation between piece fixture body bracing frame I, the II 7,11; Accurate pull pressure sensor 19 two ends are provided with the external thread that axle journal is M5, be rigidly connected with power sensor base 18 and piece fixture body bracing frame II 21 respectively, this precision tangent displacement sensor 9 and accurate pull pressure sensor 19 all with test specimen 28 coplanar installations, and the stand under load direction is subjected to stretching/compression direction identical with test specimen 28.
Described precise guide rail slide block I, II 13,15 are rigidly connected with ball-screw nut support I, II 17,31 respectively, and precise guide rail track 16 is close to by mechanism by the dovetail grooved, and accurate guide effect is played in the to-and-fro movement that the accurate bidirectional ball guide screw nat is exported.
As accompanying drawing 6 to shown in Figure 8, described piece fixture body bracing frame I, II 7,21 and test specimen pressing plate I, II 27,29 and the surface of contact of test specimen 28 all adopt the line cutting mode to be processed as the knurling structure, can improve the reliability of test specimen clamping, concrete method is to be processed into laciniation respectively two sides.
As shown in Figure 3, described piece fixture body bracing frame II 21 is equipped with semicircular groove with power sensor base 18, and in groove embedded steel ball 22, reduce gearing friction in its contact process by steel ball 22.
Test platform size of main body of the present invention is about 105mm * 34mm * 88mm, have good structure compatible, vacuum compatibility and Electro Magnetic Compatibility with Hitachi TM-1000 type scanning electron microscope, also can use with other main flow commercialization scanning electron microscope, X-ray diffractometer, atomic force microscope and optical microscope etc. are compatible.
Test platform can be installed on the objective table of Hitachi TM-1000 scanning electron microscope vacuum cavity, can its present system in-situ monitoring under carry out the material mechanical performance test of stretching/compact model of loading based on quasistatic, can carry out online observation to microdeformation, damage and the destructive process of material, can realize collection and control to load/displacement signal, but the mechanical characteristic of test material under nanoscale and damage mechanism.
Referring to Fig. 1 to Fig. 8, original position stretching/compression material mechanical test platform under the scanning electron microscope that loads based on quasistatic involved in the present invention, be designed according to vacuum cavity size and the image-forming condition of Hitachi TM-1000 type scanning electron microscope, the overall dimensions of this apparatus main body part is 105mm * 88mm * 34mm, can be installed on simultaneously in the cavity of various main flow scanning electron microscope and other micro imaging systems or on the objective table, realize using with the compatibility of main flow Image-forming instrument.The components and parts that wherein relate to and concrete model are: accurate tangent displacement sensor 9 models can be the WYM-1 type, accurate pull pressure sensor 19 models can be the TEST-304 type, in order to the displacement/load signal in the synchronous detection stretching/compression process, can provide three kinds of digital-to-analog feedback signal sources that comprise rate of deformation control, the control of power speed, rate of displacement control at the pulse/direction control model of precision DC servomotor 1.The model of precision DC servomotor 1 can be Maxon RE-MAX22 25W type, test specimen 28 length ranges are 4-26mm, minimum widith is 1mm, the model that high line is counted photoelectric encoder 20 can be HEDL9140-1000, watch position control unit in conjunction with the Accelnet type precision DC servomotor 1 is carried out accurate angular displacement control, thereby guarantee that the strain rate of test specimen 28 in the test process is adjustable and export given torque value.
The present invention is in concrete test process, at first, test specimen 28 stretching/compression verification before, need to adopt wire-electrode cutting and processing method trial-production place to have the standard specimen of stress weakness zone or precognition breach, and handle the better surface smoothness obtain can be used for the monitoring of high resolving power micro-imaging by single-sided polishing, or obtain microstructures such as metallographic by technologies such as chemical corrosions, then test specimen 28 clampings are being used for piece fixture body bracing frame I, II 7,21 and test specimen pressing plate I, II 27, between 29, the width of test specimen 28 retained parts and test specimen pressing plate I, II 7, the spacing of 21 upper screwed hole internal tangents is identical, further, the position by adjusting anchor clamps and utilize level meter and the detection of clock gauge guarantees coplanarity and accurate position in test specimen 28 test processs.The body portion of accurate tangent displacement sensor 9 be installed on piece fixture body bracing frame I 7 rigidly connected displacement transducer pedestals 11 in, and pass through screw threads for fastening, the L shaped web joint Elastic Contact of front-end probe part and piece fixture body bracing frame II 21, namely 9 actual detected of accurate tangent displacement sensor to be deformed into relative deformation between piece fixture body bracing frame I, the II 7,21.Accurate pull pressure sensor 19 two ends are that axle journal is the external thread of M5, be rigidly connected with power sensor base 18 and piece fixture body bracing frame II 21 respectively, two kinds of sensors are all in test specimen 28 coplanar installations, and the stand under load direction is subjected to stretching/compression direction identical with test specimen 28.Then, the accurate position of closing the airtight baffle plate of scanning electron microscope vacuum chamber and in XOY plane, drafting test point by the article carrying platform of scanning electron microscope self.Then, the distortion of given stretching/compression verification or load control mode, mode with pulse output drives precision DC servomotor 1 beginning test process, namely by testing algorithm program setting test condition and parameter, the accurate angular displacement of precision DC servomotor 1 output under the effect of time sequential pulse control signal, deceleration by two-stage twice-enveloping type worm couple, the final realization of the motion conversion of increment and accurate bidirectional ball guide screw nat loads the Ultra-Low Speed quasistatic of test specimen 28, and 19 couples of axial load F of Compression and Expansion of accurate pull pressure sensor detect in the test process; Simultaneously the deflection h of test specimen is picked up synchronously by accurate tangent displacement sensor 9, and two paths of signals is by analog to digital conversion and carry out sending into computing machine behind the necessary signal condition.In the whole process of test, test specimen 28 distortion of materials degree of impairment under the load effect carries out dynamic monitoring by the scanning electron microscope imaging system of high enlargement ratio, and document image simultaneously, also can obtain the important mechanics parameters such as stress-strain curve, elastic modulus, yield strength and tensile strength of exosyndrome material mechanical property in real time in conjunction with the host computer debugging software.
Claims (6)
1. original position stretching/compression material mechanical test platform under the scanning electron microscope that loads based on quasistatic is characterized in that: comprise accurate driver element, precision drive unit, load/displacement signal detection and control module, clamping and linkage unit;
Described accurate driver element is: precision DC servomotor (1) is connected with test platform pedestal (14) by motor flange dish (2);
Described precision drive unit comprises spring coupling (3), by the one-level worm screw, first-stage worm gear, second-stage worm gear, second-stage worm (5,6,8,30) the two-stage twice-enveloping type worm couple of Gou Chenging reaches by ball-screw nut support I, the accurate bidirectional ball-screw, ball-screw nut support II (17,23,31) the accurate bidirectional ball guide screw nat of Gou Chenging, precision DC servomotor (1) links to each other with two-stage twice-enveloping type worm couple by spring coupling (3), this two-stage twice-enveloping type worm couple is connected by second-stage worm gear (8) with the accurate bidirectional ball guide screw nat, the output torque that the precision drive unit provides precision DC servomotor (1) is realized the deceleration of big degree through spring coupling (3) and two-stage twice-enveloping type worm couple, increase the square purpose, and finally will rotatablely move by the accurate bidirectional ball guide screw nat and be converted to accurate straight reciprocating motion; I and II worm screw (5,30) is connected with test platform pedestal (14) by worm bearing (10) and I and II worm shaft bearing (4,26) respectively, the accurate bidirectional ball guide screw nat is by leading screw fixed supporting seat (25) location, and ball-screw nut support I, II (17,31) are by precise guide rail slide block I, II (13,15) and precise guide rail track (16) guiding;
Described load/displacement signal detection and control module are counted photoelectric encoder (20) by accurate pull pressure sensor (19), accurate tangent displacement sensor (9) and high line and are formed, accurate pull pressure sensor (19) is fixedly installed on the power sensor base (18), accurate tangent displacement sensor (9) and displacement transducer pedestal (11) socket, high line is counted photoelectric encoder (20) and coaxial connection of precision DC servomotor (1);
Described clamping and linkage unit comprise piece fixture body bracing frame I, II (7,21), test specimen pressing plate I, II (27,29), test specimen (28), leading screw fixed supporting seat (25), displacement transducer pedestal (11), power sensor base (18) and worm bearing (10), test specimen (28) by test specimen pressing plate I, II (27,29) and the piece fixture body bracing frame I, II (7,21) that have an annular knurl structure to compress the mode clamping;
The body portion of described accurate tangent displacement sensor (9) be installed on the rigidly connected displacement transducer pedestal of piece fixture body bracing frame I (7) (11) in, and pass through screw threads for fastening, the L shaped web joint Elastic Contact of front-end probe part and piece fixture body bracing frame II (21), accurate pull pressure sensor (19) two ends are respectively equipped with external thread, be rigidly connected with power sensor base (18) and piece fixture body bracing frame II (21) respectively, this precision tangent displacement sensor (9) and accurate pull pressure sensor (19) all with the coplanar installation of test specimen (28), and the stand under load direction is subjected to stretching/compression direction identical with test specimen (28).
2. according to claim 1 based on original position stretching/compression material mechanical test platform under the scanning electron microscope of quasistatic loading, it is characterized in that: described accurate bidirectional ball-screw (23) is provided with two sections little helical pitch raceways that rotation direction is different, and the geometric center position of test specimen in test process (28) is in the most central of imaging region all the time.
3. according to claim 1 based on original position stretching/compression material mechanical test platform under the scanning electron microscope of quasistatic loading, it is characterized in that: described precise guide rail slide block I, II (13,15) are rigidly connected, and are close to precise guide rail track (16) by dovetail grooved mechanism with ball-screw nut support I, II (17,31) respectively.
4. according to claim 1 based on original position stretching/compression material mechanical test platform under the scanning electron microscope of quasistatic loading, it is characterized in that: described piece fixture body bracing frame I, II (7,21) and test specimen pressing plate I, II (27,29) are the knurling structure with the surface of contact of test specimen (28).
5. according to claim 1 based on original position stretching/compression material mechanical test platform under the scanning electron microscope of quasistatic loading, it is characterized in that: described piece fixture body bracing frame II (21) and power sensor base (18) are equipped with semicircular groove, and in groove embedded steel ball (22).
6. according to original position stretching/compression material mechanical test platform under any described scanning electron microscope that loads based on quasistatic in the claim 1 to 5, it is characterized in that: described test platform size of main body is 105mm * 34mm * 88mm, can be installed in the cavity of Hitachi TM-1000 type scanning electron microscope instrument.
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