CN102346117B - Dynamic performance testing device of microradian-level accuracy in-situ torsion material under scanning electronic microscope - Google Patents
Dynamic performance testing device of microradian-level accuracy in-situ torsion material under scanning electronic microscope Download PDFInfo
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- CN102346117B CN102346117B CN 201110305111 CN201110305111A CN102346117B CN 102346117 B CN102346117 B CN 102346117B CN 201110305111 CN201110305111 CN 201110305111 CN 201110305111 A CN201110305111 A CN 201110305111A CN 102346117 B CN102346117 B CN 102346117B
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Abstract
The invention relates to a dynamic performance testing device of a microradian-level accuracy in-situ torsion material under a scanning electronic microscope, which belongs to the electromechanical field. The dynamic performance testing device consists of a precision loading unit, a precision signal detection and control unit, a clamping unit and a connecting unit. The dynamic performance testing device has the advantages of ingenious structure, controllable angular strain rate, and good structure compatibility, vacuum compatibility and electromagnetic compatibility with the scanning electronic microscope, an optical microscope, an atomic force microscope and a Raman spectrometer and the like. The cross-scale in-situ torsion test for a three-dimensional macroscopic test piece can be carried out under the observation of various imaging instruments; and by the dynamic performance testing device, the microscopic deformation and the damage process of the material under the action of the torque can be observed in situ, and the mechanical behavior and the damage mechanism of the material and products made of the material under the micro-nano scale can be revealed to a certain extent.
Description
Technical field
The present invention relates to dynamo-electric field, particularly microradian class precision original position is reversed the material mechanical performance proving installation under a kind of scanning electron microscope.The present invention and scanning electron microscope (SEM), atomic force microscope (AFM), Raman spectrometer and optical microscope etc. have good compatibility, in conjunction with above-mentioned Image-forming instrument, to material under torsional interaction microdeformation, damage and fracture process carry out online observation, provide method of testing for disclosing mechanical characteristic and the damage mechanism of material under micro-nano-scale.
Background technology
In the category of many micro nanometer mechanics parameter testings, elastic modulus, shear modulus, the parameters such as yield limit twisting strength are the topmost research objects in the characteristic of material mechanics test, produced various test for these mechanical quantities, such as torsional technique, pulling method and Using Nanoindentation etc., certainly will be able to disclose the rule of material deformation damage under the extraneous load by the in-situ mechanical means of testing, find more novel phenomenon and rule, true mechanical behavior and deformation damage that the relevant test of carrying out with regard to the large-size test specimen will more be conducive under research material and the goods service state thereof are machine-processed.
One of fundamental test method of torsion test mechanical property of materials test.Twisting test can be measured intensity and the plasticity of hard brittle material and plastic material, often need carry out twisting test for making the part such as the materials such as axle, spring that often bear moment of torsion.Twisting test is carried out at torsion testing machine, and the gauge length two ends at cylindrical sample during test apply moment of torsion
Μ, at this moment between two cross sections of sample marking distance, produce torsion angle
ф, according to
ΜWith
фVariation can be depicted as torque-corner figure, simultaneously can obtain corresponding stress-strain diagram, the commercialization torsion testing machine is mainly used in metal or nonmetallic materials are carried out the torsional strength test, also can carry out the test of various parts, member twisting strength, have the functions such as twisting resistance value and torsion angle automatic tracing and measuring generally speaking the measuring accuracy of windup-degree be ± 0.1 °.
At present, original position is micro-nano to be reversed test and still locates bud, be embodied in: (1) is on means of testing and method, the test of reversing for the above macroscopic material of characteristic dimension grade, the ex situ extension test that is mainly undertaken by business-like torsion testing machine does not relate to the in-situ test under the Image-forming instrument environment for use such as scanning electron microscope.And it is comparatively expensive to show equipment, and the characteristics that content measurement is of inadequate achievement have greatly restricted going deep into and development of research.(2) be subject to the restriction of the cavity space of scanning electron microscope, the research of present majority all concentrate on take little/receive Mechatronic Systems technique as the basis, reverse in the test the simple original position of the atomic minor structures such as nanometer and membraneous material is micro-nano, lack the trans-scale in-situ nanometer mechanical test to macro-size (membraneous material or three-dimensional test specimen), because of the existence of size effect, the research of little member has been restricted evaluation to the mechanical property of large-size element; (3) see on the observation method, for macroscopical test specimen, be confined to the original position stretching test under optical microscope and the atomic force microscope more, optical microscope exists the problem of obvious enlargement ratio deficiency, atomic force microscope then has the excessively slow shortcoming of image taking speed, and two kinds of observation procedures all are difficult to further investigate load change to the rule that affects of material behavior and damage mechanism.
Therefore, design small and exquisite, the compact conformation of a kind of volume, measuring accuracy is high, can utilize the imaging system on-line monitorings such as electron microscope, and carrying out the Ultra-Low Speed quasistatic for macroscopical test specimen more than the characteristic dimension grade, to reverse the device of test very necessary.
Summary of the invention
The object of the present invention is to provide and a kind ofly reverse the material mechanical performance proving installation based on microradian class precision original position under the scanning electron microscope of super very fast quasistatic load mode, solved the problems referred to above that prior art exists.The present invention can carry out the original position twisting test and can carry out synchronously precision detection and the closed-loop control of moment of torsion/angular displacement signal under the dynamic monitoring of the Image-forming instruments such as scanning electron microscope.Test with respect to the ex situ on traditional torsion testing machine, the present invention can realize under the high resolving power micro imaging system in-situ observation for macroscopical test specimen more than the characteristic dimension grade, having solved simultaneously existing original position reverses in the research mostly for nanotube, the limitation of line and membraneous material, test platform can be realized the loading mode of " Ultra-Low Speed quasistatic ", the synchronous acquisition of moment of torsion/angular displacement signal and precise closed-loop control, the present invention is by accurate loading unit, accurate input and control module, grip unit and linkage unit form, compact conformation, volume is small and exquisite, angular strain speed is controlled, can to have a good use compatible with Zeiss EVO 18 and Hitachi TM-1000 type scanning electron microscope and all kinds of Image-forming instrument with cavity and objective table structure.Can reverse the mechanics parameters such as shear modulus that test obtains material, twisting strength by original position, in the situation of known materials Poisson ratio, also can also can obtain by simple computation the elastic modulus of material.Microdeformation, damage and the fracture process that can carry out material by this proving installation carry out in-situ monitoring, provide method of testing for disclosing mechanical characteristic and the damage mechanism of material under micro-nano-scale.
Above-mentioned purpose of the present invention is achieved through the following technical solutions:
Microradian class precision original position is reversed the material mechanical performance proving installation under the scanning electron microscope, comprises accurate loading unit, accurate input and control module, grip unit and linkage unit;
Described accurate loading unit comprise precision DC servomotor 1, spring coupling 3 and two-stage than big retarding than twice-enveloping type worm couple, this two-stage is made of first-stage worm gear worm screw (5,6), second-stage worm gear worm screw (7,26) than twice-enveloping type worm couple than big retarding; This precision DC servomotor 1 is fixed on the proving installation pedestal 15 by motor flange dish 2, and is connected with one-level worm screw 5 by spring coupling 3 and one-level worm shaft bearing 4; This precision DC servomotor 1 can provide high resolving power moment of torsion and angular displacement output, two-stage than big retarding than twice-enveloping type worm couple can provide 2500:1 than the big retarding ratio, can slow down largely, increase square to the power of precision DC servomotor 1 output, finally provide Ultra-Low Speed quasi-static load mode; Precision DC servomotor 1 can provide by given pulse drive mode has high-resolution torque power output and angular displacement output, the twice-enveloping type worm couple that is respectively 1:50 via spring coupling 3, two-stage big retarding slows down, increases motion and the transmission of power of square, the final quasi-static load capability of Ultra-Low Speed of realizing being lower than 0.001r/min largely;
Described accurate input and control module are by accurate torque sensor 19, accurate circle grating scale 9 and count photoelectric encoder 20 with the high line that precision DC servomotor 1 is synchronized with the movement and form, this precision torque sensor 19 is connected with spill planker 18, accurate circle grating scale 9 and the socket of circle Optical grating base; Accurate input and control module can be proving installation and provide and comprise that distortion angular speed, moment of torsion loading speed, scrambler demarcate three kinds of analog or digital amounts of angular displacement speed as the feedback signal source of the pulse of precision DC servomotor 1/direction closed loop control mode, and namely test platform can realize that permanent angular deforming velocity, permanent moment of torsion loading speed and permanent coding demarcate three kinds of load/unload modes of angular displacement speed;
Described grip unit by the upper and lower pressing plate 12 of driving and driven dental forceps formula clamp body of test specimen 13, dental forceps formula clamp body, 14,23,24 and pressing plate trip bolt 28 form; This driving and driven dental forceps formula clamp body lower platen 23,24 is located by square opening and prism with circle Optical grating base 8 and torque sensor flange frame 16 respectively, and connect by clamp body attachment screw 27, test specimen 13 by with the upper and lower pressing plate 12 of driving and driven dental forceps formula clamp body, 14,23,24 of laciniation to compress the mode clamping;
Described linkage unit is comprised of spill planker 18, proving installation pedestal 15, motor flange dish 2, read head link 11 and second-stage worm bearing 22, one-level worm bearing 25, circle Optical grating base bearing 30, circle grating reading head 10 is fixed on the proving installation pedestal 15 by this read head link 11, and adjusts screw 29 by read head and adjust; Second-stage worm bearing 22, one-level worm bearing 25 are connected with proving installation pedestal 15 by second-stage worm bearing seat 21, one-level worm shaft bearing 4 respectively, and circle Optical grating base bearing 30 is connected with circle Optical grating base 8.
Described dental forceps formula clamp body is by on the active dental forceps formula clamp body, lower platen 12,23 and initiatively on the dental forceps formula clamp body, lower platen 24,14 form, active and driven dental forceps formula clamp body lower platen 23,14 locate by square opening and prism with circle Optical grating base 8 and torque sensor flange frame 16 respectively, and connect by clamp body attachment screw 27, test specimen 13 is the right cylinder revolving structure, be provided with two groups of how much symmetrical planes at clamping zone, by the master with laciniation, on the driven dental forceps formula clamp body, lower platen 12,14,23,24 to compress the mode clamping, to improve stability and the reliability of clamping.
Described spill planker 18 is slidingly mounted on the proving installation pedestal 15, accurate torque sensor 19 is rigidly connected with spill planker 18, relative position by the breach adjustment on the spill planker 18 and proving installation pedestal 1, and undertaken by spill carriage lock screw 17 fastening so that adjust its clamping gauge lengths for different length test specimen 13.
Test platform size of main body of the present invention is about 115mm * 34mm * 78mm, have good structure compatible, vacuum compatibility and Electro Magnetic Compatibility with Zeiss EVO 18 and Hitachi TM-1000 type scanning electron microscope, also can use with other main flow commercialization scanning electron microscope, X-ray diffractometer, atomic force microscope and optical microscope etc. are compatible.
Beneficial effect of the present invention is: compared with prior art, volume of the present invention is small and exquisite, compact conformation, measuring accuracy is high, and angular strain speed is controlled, with various main flow electron microscope vacuum cavity couplings, have wide range of applications, can carry out the trans-scale in-situ twisting test to macroscopical test specimen more than the characteristic dimension millimeter meter of various materials, to material and goods thereof load under microdeformation dynamically observe, to disclose the mechanical behavior of material under micro-nano-scale and damage mechanism.And the synchronous detection by moment of torsion/angular displacement signal, in conjunction with related algorithm, but also automatic Fitting generates moment of torsion under the load-angular displacement curve and stress-strain curve.In sum, the present invention is to enriching original position micro nanometer mechanics content measurement and promoting material mechanical performance measuring technology and equipment to have important theory significance and good application and development future.
Description of drawings
Fig. 1 is overall appearance structural representation of the present invention;
Fig. 2 is that master of the present invention looks synoptic diagram;
Fig. 3 is that synoptic diagram is looked on the right side of the present invention;
Fig. 4 is schematic top plan view of the present invention;
Fig. 5, Fig. 6, Fig. 7 are the structural representation of clamp body of the present invention.
Among the figure: 1, precision DC servomotor; 2, motor flange dish; 3, spring coupling; 4, one-level worm shaft bearing; 5, one-level worm screw; 6, first-stage worm gear; 7, two-stage turbine; 8, justify Optical grating base; 9, justify grating scale; 10, justify grating reading head; 11, read head link; 12, active dental forceps formula clamp body top board; 13, test specimen; 14, driven dental forceps formula clamp body lower platen; 15, proving installation pedestal; 16, torque sensor flange frame; 17, spill supporting plate lock-screw; 18, spill planker; 19, accurate torque sensor; 20, high line is counted photoelectric encoder; 21, second-stage worm bearing seat; 22, second-stage worm bearing; 23, active dental forceps formula clamp body lower platen; 24, driven dental forceps formula clamp body top board; 25, one-level worm bearing; 26, second-stage worm; 27, clamp body attachment screw; 28, pressing plate trip bolt; 29, read head is adjusted screw; 30, justify the Optical grating base bearing.
Embodiment:
Further specify detailed content of the present invention and embodiment thereof below in conjunction with accompanying drawing.
Referring to Fig. 1 to Fig. 7, microradian class precision original position is reversed the material mechanical performance proving installation under the scanning electron microscope of the present invention, comprises accurate loading unit, accurate input and control module, grip unit and linkage unit;
Described accurate loading unit comprise precision DC servomotor 1, spring coupling 3 and two-stage than big retarding than twice-enveloping type worm couple, this two-stage is made of first-stage worm gear worm screw (5,6), second-stage worm gear worm screw (7,26) than twice-enveloping type worm couple than big retarding; This precision DC servomotor 1 is fixed on the proving installation pedestal 15 by motor flange dish 2, and is connected with one-level worm screw 5 by spring coupling 3 and one-level worm shaft bearing 4; This precision DC servomotor 1 can provide high resolving power moment of torsion and angular displacement output, two-stage than big retarding than twice-enveloping type worm couple can provide 2500:1 than the big retarding ratio, can slow down largely, increase square to the power of precision DC servomotor 1 output, finally provide Ultra-Low Speed quasi-static load mode; Precision DC servomotor 1 can provide by given pulse drive mode has high-resolution torque power output and angular displacement output, the twice-enveloping type worm couple that is respectively 1:50 via spring coupling 3, two-stage big retarding slows down, increases motion and the transmission of power of square, the final quasi-static load capability of Ultra-Low Speed of realizing being lower than 0.001r/min largely;
Described accurate input and control module are by accurate torque sensor 19, accurate circle grating scale 9 and count photoelectric encoder 20 with the high line that precision DC servomotor 1 is synchronized with the movement and form, this precision torque sensor 19 is connected with spill planker 18, accurate circle grating scale 9 and the socket of circle Optical grating base; Accurate input and control module can be proving installation and provide and comprise that distortion angular speed, moment of torsion loading speed, scrambler demarcate three kinds of analog or digital amounts of angular displacement speed as the feedback signal source of the pulse of precision DC servomotor 1/direction closed loop control mode, and namely test platform can realize that permanent angular deforming velocity, permanent moment of torsion loading speed and permanent coding demarcate three kinds of load/unload modes of angular displacement speed;
Described grip unit by the upper and lower pressing plate 12 of driving and driven dental forceps formula clamp body of test specimen 13, dental forceps formula clamp body, 14,23,24 and pressing plate trip bolt 28 form; This driving and driven dental forceps formula clamp body lower platen 23,24 is located by square opening and prism with circle Optical grating base 8 and torque sensor flange frame 16 respectively, and connect by clamp body attachment screw 27, test specimen 13 by with the upper and lower pressing plate 12 of driving and driven dental forceps formula clamp body, 14,23,24 of laciniation to compress the mode clamping;
Described linkage unit is comprised of spill planker 18, proving installation pedestal 15, motor flange dish 2, read head link 11 and second-stage worm bearing 22, one-level worm bearing 25, circle Optical grating base bearing 30, circle grating reading head 10 is fixed on the proving installation pedestal 15 by this read head link 11, and adjusts screw 29 by read head and adjust; Second-stage worm bearing 22, one-level worm bearing 25 are connected with proving installation pedestal 15 by second-stage worm bearing seat 21, one-level worm shaft bearing 4 respectively, and circle Optical grating base bearing 30 is connected with circle Optical grating base 8.
Described dental forceps formula clamp body is by on the active dental forceps formula clamp body, lower platen 12,23 and initiatively on the dental forceps formula clamp body, lower platen 24,14 form, active and driven dental forceps formula clamp body lower platen 23,14 locate by square opening and prism with circle Optical grating base 8 and torque sensor flange frame 16 respectively, and connect by clamp body attachment screw 27, test specimen 13 is the right cylinder revolving structure, be provided with two groups of how much symmetrical planes at clamping zone, by the master with laciniation, on the driven dental forceps formula clamp body, lower platen 12,14,23,24 to compress the mode clamping, to improve stability and the reliability of clamping.
Described spill planker 18 is slidingly mounted on the proving installation pedestal 15, accurate torque sensor 19 is rigidly connected with spill planker 18, relative position by the breach adjustment on the spill planker 18 and proving installation pedestal 1, and undertaken by spill carriage lock screw 17 fastening so that adjust its clamping gauge lengths for different length test specimen 13.
Test platform size of main body of the present invention is about 115mm * 34mm * 78mm, have good structure compatible, vacuum compatibility and Electro Magnetic Compatibility with Zeiss EVO 18 and Hitachi TM-1000 type scanning electron microscope, also can use with other main flow commercialization scanning electron microscope, X-ray diffractometer, atomic force microscope and optical microscope etc. are compatible.
Referring to Fig. 1 to Fig. 7, microradian class precision original position is reversed the material mechanical performance proving installation under a kind of scanning electron microscope involved in the present invention, the overall dimensions of this apparatus main body part is 115mm * 34mm * 78m, designed according to vacuum cavity size and the image-forming condition of Zeiss EVO 18 and Hitachi TM-1000 type scanning electron microscope, can use with the compatibility of main flow Image-forming instrument simultaneously, can be installed in the cavity of various main flow scanning electron microscope and other Image-forming instruments or on the objective table.Concrete components and parts and concrete model are in the proving installation: the precision DC servo motor model number is Maxon EC-MAX22, and 25W, accurate torque tester 19 models are that D-2452-0.2NM, accurate circle grating scale 9 models are Heidenhain RCN727), to count photoelectric encoder 20 models be HEDL9140-1000 to high line.
The present invention is in concrete test process, at first, test specimen 13 is before reversing test, need to adopt method for turning to manufacture experimently out shaped specimens, by the line cutting mode retained part is manufactured experimently out symmetrical plane for clamping again, and utilize small-sized cylindrical polishing machine that test specimen is carried out the better surface smoothness that polishing obtains can be used for the monitoring of high resolving power micro-imaging, or obtain the microstructures such as metallographic by techniques such as chemical corrosions, then test specimen 13 clampings are being led, on the driven dental forceps formula clamp body, lower platen 12,14,23, in 24, tighten afterwards the clamping process that pressing plate trip bolt 28 is finished test specimen 13.Further, adjust screw 28 to determine the relative position of accurate circle grating scale 9 and circle grating reading head 10 by adjusting read head.Accurate torque sensor 19 two ends are rigidly connected with torque sensor flange frame 16 and spill planker 18 respectively, then, close the airtight baffle plate of scanning electron microscope vacuum chamber and in XOY plane, draft the accurate location of test point by the article carrying platform of scanning electron microscope self.Then, given permanent angular deformation or the moment of torsion control mode of reversing test, mode with pulse output drives the beginning test process, namely by testing algorithm program setting test condition and parameter, the accurate angular displacement of precision DC servomotor 1 output under the effect of time sequential pulse control signal, than final realization of deceleration, the increment of twice-enveloping type worm couple the Ultra-Low Speed quasistatic of test specimen 13 is loaded the moment of torsion of 19 pairs of test specimens 13 of accurate torque sensor in the test process than big retarding by two-stage
MDetect; The torsional deflection amount of while test specimen
hPicked up synchronously by precision circle grating scale 9, two paths of signals is by analog to digital conversion and carry out sending into computing machine behind the necessary signal condition.In the whole process of test, the deformation damage situation of test specimen 13 material under load is carried out dynamic monitoring by the scanning electron microscope imaging system of high magnification, and document image simultaneously, but in conjunction with also important mechanics parameters such as the moment of torsion of Real-time Obtaining exosyndrome material mechanical property-angular displacement curve, stress-strain curve, shear modulus and twisting strength of host computer debugging software.
Claims (4)
1. microradian class precision original position is reversed the material mechanical performance proving installation under the scanning electron microscope, it is characterized in that: comprise accurate loading unit, accurate input and control module, grip unit and linkage unit, described accurate loading unit, accurate input and control module, grip unit are connected with linkage unit respectively;
Described accurate loading unit comprise precision DC servomotor (1), spring coupling (3) and two-stage than big retarding than twice-enveloping type worm couple, this two-stage is made of first-stage worm gear worm screw (5,6), second-stage worm gear worm screw (7,26) than twice-enveloping type worm couple than big retarding; This precision DC servomotor (1) is fixed on the proving installation pedestal (15) by motor flange dish (2), and is connected with one-level worm screw (5) by spring coupling (3);
Described accurate input and control module are by accurate torque sensor (19), accurate circle grating scale (9) and count photoelectric encoder (20) with the high line that precision DC servomotor (1) is synchronized with the movement and form, this precision torque sensor (19) is connected with spill planker (18), accurate circle grating scale (9) and the socket of circle Optical grating base;
Described grip unit is comprised of the upper and lower pressing plate of driving and driven dental forceps formula clamp body (12,14,23,24) and the pressing plate trip bolt (28) of test specimen (13), dental forceps formula clamp body; These active dental forceps formula clamp body lower platens (23) are located by square opening and prism with circle Optical grating base (8), and connect by clamp body attachment screw (27), this driven dental forceps formula clamp body lower platen (24) is located by square opening and prism with torque sensor flange frame (16), and connect by clamp body attachment screw (27), test specimen (13) by with the upper and lower pressing plate of driving and driven dental forceps formula clamp body (12,14,23,24) of laciniation to compress the mode clamping;
Described linkage unit is by spill planker (18), proving installation pedestal (15), motor flange dish (2), read head link (11) and second-stage worm bearing (22), one-level worm bearing (25), circle Optical grating base bearing (30) forms, circle grating reading head (10) is fixed on the proving installation pedestal (15) by this read head link (11), second-stage worm bearing (22), one-level worm bearing (25) is respectively by second-stage worm bearing seat (21), one-level worm shaft bearing (4) is connected with proving installation pedestal (15), and circle Optical grating base bearing (30) is connected with circle Optical grating base (8).
2. microradian class precision original position is reversed the material mechanical performance proving installation under the scanning electron microscope according to claim 1, it is characterized in that: described dental forceps formula clamp body is by on the active dental forceps formula clamp body, lower platen (12,23) and on the driven dental forceps formula clamp body, lower platen (24,14) form, these active dental forceps formula clamp body lower platens (23) are located by square opening and prism with circle Optical grating base (8), and connect by clamp body attachment screw (27), this driven dental forceps formula clamp body lower platen (24) is located by square opening and prism with torque sensor flange frame (16), and connect by clamp body attachment screw (27), test specimen (13) is the right cylinder revolving structure, be provided with two groups of how much symmetrical planes at clamping zone, by the master with laciniation, on the driven dental forceps formula clamp body, lower platen (12,14,23,24) to compress the mode clamping.
3. microradian class precision original position is reversed the material mechanical performance proving installation under the scanning electron microscope according to claim 1, it is characterized in that: described spill planker (18) is slidingly mounted on the proving installation pedestal (15), accurate torque sensor (19) is rigidly connected with spill planker (18), by the relative position of the breach adjustment on the spill planker (18) and proving installation pedestal (1), and undertaken fastening by spill carriage lock screw (17).
According to claim 1 in 3 under the described scanning electron microscope of any one microradian class precision original position reverse the material mechanical performance proving installation, it is characterized in that: to reverse material mechanical performance proving installation size of main body be 115mm * 34mm * 78mm to microradian class precision original position under the described scanning electron microscope.
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