CN2890890Y

CN2890890Y - Micro-nanometer scale mechanical property tester

Info

Publication number: CN2890890Y
Application number: CN 200620012381
Authority: CN
Inventors: 周亮; 姚英学
Original assignee: Harbin Institute of Technology
Current assignee: Harbin Institute of Technology
Priority date: 2006-04-14
Filing date: 2006-04-14
Publication date: 2007-04-18
Anticipated expiration: 2016-04-14

Abstract

The utility model relates to a tester for micro-nanometer scale mechanics performance, wherein an impress processing device (9) and an impress scanning device (12) are fixedly connected with a long distance binary workbench (1) through gantries (7, 14) to respectively realize impress processing and impress scanning functions, thereby being able to provide large-scale loading or impress depth and highly precised impress three-dimension graphics. The tested sample is driven by the long distance binary workbench (1) and a short distance binary workbench (6) to move to realize long distance quick movement and short distance high precision movement, thereby promoting testing speed and testing precision. The utility model has the advantages of large testing range, high precision, complete information and convenient employment, thereby being able to promote mechanics performance study with material micro-nanometer scales.

Description

Micro/nano level yardstick mechanical property tester

Technical field

The utility model relates to a kind of mechanical property detecting instrument, especially nano level device for detecting mechanical property.

Background technology

Under the micro/nano level yardstick, to the mechanical property detecting instrument of material can test material hardness, Young modulus, creep, fracture toughness etc.There is the such instrument of three classes at present, but certain limitation and deficiency are arranged all, with the testing material hardness is example, first kind testing tool is after the impression preparation, need to arrive microscopically again and measure the impression size, this will reorientate and fix sample, will inevitably cause measuring error, and impression is small-sized sometimes, can't find impression at all; The second class testing instrument can be pressed dark curve by recording load one in the impression preparation process, and obtain hardness number by corresponding algorithm computation, do not need to test impression figure, but there is not impression figure, can't obtain the more information of impression, such as crackle, projection and depression etc., be unfavorable for further research to material property; The 3rd class is to obtain the dark curve of load-press by the impression preparation facilities, simultaneously can also use same pressure head, adopt the atomic force microscope principle to record impression figure, but owing to surveying the required power size of dark curve of load-pressure and pressure measurement trace figure not at an order of magnitude, adopt same pressure head, limited its range of application under different depths of cup or load, promptly its maximum depth of cup is smaller, is generally less than 2 microns.In order to overcome present deficiency to material mechanical performance testing tool under the micro-nano-scale, need testing tool of development, the impression that both can prepare different depths of cup (from 100 microns～10 nanometers), obtain the dark curve of load-press, can obtain impression figure by impression figure scanister again, and not need sample is reorientated and fixed.This just needs two pick-up units, a device is the impression preparation facilities, and detecting the different load under dark-press dark curve, another device of pressing is the impression scanister, can obtain impression figure, but two devices are installed in integrated detection system of formation on the worktable simultaneously.The development of this detecting instrument can promote correlation technique and the reach of sciences such as film coating technology, nanometer technology, functional material, new material, MEMS.

Summary of the invention

The utility model adopts impression preparation and impression figure scanning two covering devices separately, but be fixed on simultaneously on the two-dimentional work bench, driving sample by two-dimentional work bench moves between two devices, do not need to reorientate and fix, thereby reach under the micro/nano level yardstick, this detecting instrument has big depth of cup scope, high-precision impression scintigram, finds the impression position easy, does not have resetting and alignment error, improve measuring accuracy, purpose easy to use.

The utility model is achieved in that

Two-dimentional work bench is made up of a big stroke two-dimentional work bench and a little stroke two-dimensional micromotion worktable, little stroke micro displacement workbench is installed on the big stroke worktable, sample is placed on the little stroke micro displacement workbench, driving little stroke micro displacement workbench by big stroke worktable moves between two pick-up units, big stroke worktable is driven by piezoelectric ceramic motor, on guide rail, move, and detect moving displacement by the grating chi.And little stroke micro displacement workbench drive sample carries out high-precision motion among a small circle under the pressure head of two pick-up units, so that accurate detection position and the scanning impression figure of adjusting, little stroke micro displacement workbench is by line cutting formation flexible hinge, by Piezoelectric Ceramic, capacitive displacement transducer detects displacement.

The impression preparation facilities installs and fixes together by portal frame with big stroke two-dimentional work bench, can be by the position between manual adjustment pressure head and the sample, after arriving certain distance, by Electromagnetic Drive, make the pressure head pressing in sample, the capacitive transducer that passes through of displacement and load detects, and by the curve of demarcating, can calculate the size of depth of cup and imposed load.

The impression scanister also is to install and fix together by portal frame with big stroke two-dimentional work bench, and by the position between manual adjustment pressure head and the sample, adopt the atomic force microscope principle, after arriving certain distance, by the Piezoelectric Ceramic pressure head, with the two-dimentional work bench coordinated movement of various economic factors, record the three-dimensional plot of impression.Final by corresponding algorithm, obtain the various mechanical properties under the detected material micro-nano metrical scale.

Description of drawings

Fig. 1 is the synoptic diagram of micro-nano-scale mechanical property detector;

Fig. 2 is big stroke two-dimentional work bench synoptic diagram;

Fig. 3 is little stroke two-dimensional micromotion worktable synoptic diagram.

Embodiment

Referring to Fig. 1, impression preparation facilities 9 and impression scanister 12 are respectively by portal frame 7 and 14, be fixed together with big stroke two-dimentional work bench 1, the pressure head of installing on the back impression preparation facilities 9 10 is just fixing with the distance between the scanning feeler 11 on the impression scanister 12, and the motion by big stroke two-dimentional work bench 1 can be placed on testing sample on the position of setting.The X of big stroke two-dimentional work bench 1 is driven by the piezoelectric ceramic motor above it 3 to motion, and motion on guide rail 2; Y is driven by piezoelectric ceramic motor 4 to motion, motion on guide rail 5; And between pressure head 10, scanning feeler 11 and the tested sample Z to distance finish by adjusting mechanism 8 and 13 respectively.Little stroke micro displacement workbench 6 is fixed together by bolt and big stroke two-dimentional work bench 1, tested sample is placed on the centre of little stroke micro displacement workbench 6, little stroke micro displacement workbench 6 forms 8 flexible hinges 15 by the line cutting, and respectively by

piezoelectric ceramics

17 and 16 drive make its at X and Y to moving, drive sample and do accurate motion.

Claims

1. micro-nano-scale mechanical property tester, comprise big stroke two-dimentional work bench (1), little stroke micro displacement workbench (6), impression preparation facilities (9) and impression scanister (12), it is characterized in that, little stroke worktable (6) is installed on the big stroke worktable (1), driving little stroke worktable (6) by big stroke worktable (1) moves between two pick-up units, big stroke worktable (1) is by big stroke worktable piezoelectric ceramic motor (3,4) drive, at big stroke table slide (2,5) go up motion, little stroke micro displacement workbench (6) forms flexible hinge by the line cutting, by little stroke worktable piezoelectric ceramic motor (16,17) drive, impression preparation facilities (9) and impression scanister (12) are installed together by portal frame and big stroke worktable.

2. micro-nano-scale mechanical property tester according to claim 1, it is characterized in that, impression preparation facilities (9) and impression scanister (12) are installed on the little stroke worktable (6) independently of each other, have different pressure heads or the probe of realizing impression preparation and impression scan function simultaneously.

3. micro-nano-scale mechanical property tester according to claim 1 is characterized in that, has the grating chi that detects big stroke worktable (1) displacement, and the capacitive displacement transducer that detects little stroke worktable (6) displacement.