CN102262016A - Cross-scale micro nanometer grade in-situ composite load mechanical property testing platform - Google Patents

Cross-scale micro nanometer grade in-situ composite load mechanical property testing platform Download PDF

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CN102262016A
CN102262016A CN2011101092539A CN201110109253A CN102262016A CN 102262016 A CN102262016 A CN 102262016A CN 2011101092539 A CN2011101092539 A CN 2011101092539A CN 201110109253 A CN201110109253 A CN 201110109253A CN 102262016 A CN102262016 A CN 102262016A
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China
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standard specimen
worm
anchor clamps
test
stage worm
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CN2011101092539A
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Chinese (zh)
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CN102262016B (en
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赵宏伟
马志超
黄虎
王开厅
胡晓利
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吉林大学
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Abstract

The invention relates to a cross-scale micro nanometer grade in-situ composite load mechanical property testing platform, belonging to electromechanics. The cross-scale micro nanometer grade in-situ composite load mechanical property testing platform is composed of a precision drive and transmission unit, a signal detection and control unit and a clamping, connecting and supporting unit, wherein, in the precision drive and transmission unit, a DC servo motor provides power output, and a two-stage worm and gear mechanism with large reduction ratio and a precision ball screw mechanism transmit power; the signal detection and control unit is composed of a precision displacement sensor, a precision pull pressure sensor and a coder in coaxial rigid connection with the DC servo motor; and the clamping, connecting and supporting unit comprises a clamper component for locating and mounting a standard test specimen, and the like. The cross-scale micro nanometer grade in-situ composite load mechanical property testing platform can be compatible with imaging instruments, and performs a cross-scale in-situ micro nanometer composite load test on a macroscopic test specimen through observation via the imaging instruments, so as to perform in-situ monitoring on processes of microscopic deformation, injury and fracture of materials, so that a new testing method for revealing the mechanical properties and the injury mechanism of the materials at the micro nanometer grade is provided.

Description

Stride yardstick micron-nano scale in-situ combined load Mechanics Performance Testing platform
Technical field
The present invention relates to electrical category, particularly a kind of yardstick micron-nano scale in-situ combined load Mechanics Performance Testing platform of striding.The combined load mechanical test that can under the in-situ monitoring of micro-imaging instruments such as Electronic Speculum (as scanning electron microscope SEM, transmission electron microscope TEM, scanning probe microscopy SPM etc.), comprise original position stretching/compression verification, original position shearing test, original position stretching/shearing, compression/shearing test, can carry out online observation to microdeformation, damage and the destructive process of material, can realize collection and control to load/displacement signal, but the mechanical characteristic of test material under nanoscale and damage mechanism.
Background technology
The in-situ nano mechanical test is meant under nanoscale material for test carried out in the Mechanics Performance Testing process, by electron microscope, atomic force microscope and or instrument such as optical microscope microdeformation damage that material under the loading is taken place a kind of mechanical test technology of carrying out omnidistance dynamic monitoring.The announcement that this technology is deep the Micromechanics behavior of various types of materials and goods thereof, micromechanism of damage and and loading and material property between the correlativity rule.In the category of many nanometer mechanics tests, elastic modulus, hardness, break limit, parameters such as shear modulus are the topmost tested objects in little member mechanical property testing, produced various test at these mechanical quantities, as stretching/compression method, shearing method, torsional technique, bending method, nano impress method and eardrum method etc., wherein with the more comprehensive strength characteristics of reactive means of original position stretching/compression verification method, and can measure elasticity modulus of materials the most intuitively, important mechanics parameter such as yield limit and fracture strength also can obtain the material shear modulus by shearing test simultaneously, forces associated mathematic(al) parameters such as shear resistance.
At present, in-situ nano stretching/compression verification is still located bud, be in particular in: (1) is subjected to atomic force microscope, the restriction of the cavity space of scanning electron microscope and transmission electron microscope etc., present majority all concentrate on based on little/receive Mechatronic Systems technology, to nanotube, on the simple in-situ nano extension test of atomic minor structure such as nano wire and membraneous material, lack trans-scale in-situ nanometer mechanical test, thereby seriously hindered academia the Micromechanics behavior of large-size element and the new phenomenon of damage mechanism to macro-size (membraneous material or three-dimensional test specimen), the discovery of new rule; (2) on means of testing and method, the mainly original position stretching test carried out of in-situ nano impression test that is undertaken by business-like nano-hardness tester and in-situ nano tensilometer, all there is the cost of equipment costliness in two kinds of methods, method of testing is single, the characteristics that content measurement is of inadequate achievement, to compact conformation, the small and exquisite dual-purpose in-situ testing device of tension and compression of volume rarely has to be mentioned, has greatly restricted going deep into and development of research; (3) from content measurement, the content measurement of existing instrument and equipment is single relatively, the composite test instrument of two kinds and two or more load type rarely has to be mentioned, therefore more find original position combined load tester, limited under the complex working condition Micromechanics performance and the damage Study on Mechanism of material and deeply changed at the above test specimen of characteristic dimension centimetre-sized.
Before nanometer stretching/compression in position-shearing combined load mechanical test technology was used, stretching/compression test and shear test generally were the tests of offing normal on Material Testing Machine.Testing machine loads sample equably according to the speed of regulation, draw load elongation chart by testing machine, and then obtain stress-strain curve under the loading, therefore, initial drawing machine and shearing test machine are after material is broken or cut off, draw material the tensile yield limit, the pulling strengrth limit, the shear yielding limit, shear mechanics parameter such as the limit.What tradition drawing machine and shearing test eedle were right all is the macro-scale test specimen, does not relate to the mechanical property of material nano yardstick category, does not also relate to the in-situ observation under the high resolving power micro imaging system.
Therefore, design little, the compact conformation of a kind of volume, the measuring accuracy height can utilize imaging system on-line monitoring such as the electron microscope macroscopic view microdeformation of test specimen under loading and the stretching/compression of damage process-shearing combined load mechanical test platform very necessary.
Summary of the invention
The object of the present invention is to provide a kind of yardstick micron-nano scale in-situ combined load Mechanics Performance Testing platform of striding, solved traditional drawing machine and shearing test eedle right all be the macro-scale test specimen, do not relate to the mechanical property research of material nano yardstick category, also do not relate to the in-situ observation under the high resolving power micro imaging system; Lack trans-scale in-situ nanometer mechanical test to macro-size (membraneous material or three-dimensional test specimen), the cost of equipment costliness, method of testing is single, and content measurement is of inadequate achievement; The content measurement of existing instrument and equipment is single relatively, the composite test instrument of two kinds and two or more load type rarely has to be mentioned, more do not find original position combined load tester, limited the Micromechanics performance and the damage Study on Mechanism of material under the complex working condition and deeply changed at the above test specimen of characteristic dimension centimetre-sized.It is little that the present invention has a volume, compact conformation, available content measurement is abundant, measuring accuracy is high, the characteristics that rigidity is high, can pass through original position stretching/compression verification, original position shearing test and original position stretching/compression-shear load test and obtain the important mechanics parameters such as elastic modulus, shear modulus, yield limit and strength degree of material, microdeformation, damage and fracture process to material carry out in-situ monitoring, provide means of testing for disclosing the mechanical characteristic and the damage mechanism of material under nanoscale.The present invention can implement the platform of trans-scale in-situ combined load mechanical test to three-dimensional test specimen more than the characteristic dimension centimetre-sized, can comprise original position stretching/compression verification, original position pure shear test and original position stretching/compression and shear composite test, and can carry out the detection and the analysis of load/displacement signal synchronously in three kinds of interior mechanical test tests.
Above-mentioned purpose of the present invention is achieved through the following technical solutions:
Stride yardstick micron-nano scale in-situ combined load Mechanics Performance Testing platform, comprise accurate driving and gear unit, input and control module, clamping, connection and support unit; Described accurate driving and gear unit are: DC servo motor 1 is connected with one-level worm screw 7 by spring coupling 5 and provides power to export, and pass through first-stage worm gear worm transmission pair and second-stage worm gear worm drive adjutant transmission of power, and further by leading screw square nut I, the accurate straight reciprocating motion of II 51,52 outputs to precision ball screw I, II 16,21 places;
Described input and control module comprise accurate contact capacitance displacement sensor 22, pull pressure sensor 28 and photoelectric encoder 31, provide according to the pulse/direction control model of DC servo motor 1 and to comprise rate of deformation control, the power rate controlled, three kinds of digital-to-analog feedback signal sources in rate of displacement is controlled at, wherein, the front end elasticity probe of the accurate contact capacitance displacement sensor 22 realization deformation process that contacts with displacement transducer fixed dam 25, the main part of accurate contact capacitance displacement sensor 22 is passed through displacement transducer pedestal trip bolt 42 and displacement transducer pedestal 18 clearance fit, and is connected with standard specimen fixture support frame I 19; Pull pressure sensor 28 is rigidly connected by force transducer trip bolt I, II 27,45 with force transducer fixed dam 26 and standard specimen fixture support frame II 24 respectively, the flexible direction of displacement transducer 22 front end elasticity probes, force transducer 28 be subjected to force direction identical with the flexible direction of standard specimen 2 under loading, to guarantee the accuracy of displacement/load signal detection;
Described clamping, connection and support unit comprise standard specimen anchor clamps I, II 4,30, anchor clamps pressing plate I, II 3,32 and standard specimen 2, wherein, standard specimen 2 be installed in the dovetail grooved standard specimen anchor clamps I of its consistent size, II 4,30 in, and compress by the anchor clamps pressing plate I, the II 3,32 that are fastenedly connected by pressing plate trip bolt 44 with standard specimen anchor clamps I, II 4,30, prevent moving freely of in compression or shearing test process standard specimen 2; Simultaneously, the whole height of test platform has guaranteed the requirement for height of its complete coincidence imaging after the article carrying platform that is installed on Image-forming instruments such as scanning electron microscope, can with micro-imaging instrument such as Electronic Speculum, use as scanning electron microscope SEM, transmission electron microscope TEM, scanning probe microscopy SPM etc. are compatible;
Described first-stage worm gear worm transmission pair is made up of one-level worm screw 7 and the one-level turbine 8 that is fastened on the second-stage worm 11; The second-stage worm gear worm transmission pair is made up of second-stage worm 11 and second-stage worm gear I, II 9,13.
Described DC servo motor 1 is fastenedly connected by motor trip bolt 48 and motor flange dish 53, and by the solid screw 33 of ring flange directly and platform base 20 fastening; One-level worm screw 7 is fixed on the platform base 20 by one-level worm bearing 54, one-level worm shaft bearing 6 and second-stage worm bearing I, II 10,15, second-stage worm bearing seat I, II 49,14 respectively with second-stage worm 11; First-stage worm gear 8 and second-stage worm gear 9,13 are rigidly connected by worm gear attachment screw I, II 34,50 and one-level worm screw 7 and precision ball screw I, II 16,21 respectively; The leading screw fixed pedestal I, II, III, the IV 23,36,39,46 that are used to install precision ball screw I, II 16,21 are connected with platform base 20 by leading screw fixed pedestal trip bolt V, III, IV, I, II, VI 43,38,40,35,37,47 respectively; The perpendicular type groove of second-stage worm bearing seat I, II 49,14 and platform base 20 have guaranteed the centre distance of two-stage worm couple by the gluing mode that connects.
Described standard specimen anchor clamps I, II 4,30 by anchor clamps trip bolt 29 and standard specimen fixture support frame I, II 19,24 connect, standard specimen anchor clamps I, II 4, the circle center that 30 through hole center is formed overlaps with the geometric center point of standard specimen 2, its structure provides four kinds of test specimen clamping patterns, to guarantee that test platform can carry out original position stretching/compression verification respectively, double mode original position draws (pressure) to cut changes combined load test and original position pure shear test, be that test platform and standard specimen 2 stretching/compression axis directions are mutually 0 °, 30 °, the load mode at 60 ° or 90 ° angles is by conversion standard specimen anchor clamps I, II 4, the combined load test function can be realized in 30 installation site; Standard specimen anchor clamps I, II 4,30 match, change with the structure and the size of standard specimen 2.
In the mounting hole of described leading screw fixed pedestal I, III, II, IV 23,39,36,46 by wire cutting technology processing respectively interference guide pole I, II 17,55 are installed, and this guide pole I, II 17,55 cooperate with the via clearance of leading screw square nut I, II 51,52, can guarantee that in test process leading screw square nut 51,52 can not produce the rollover and the phenomenon of toppling because of the difference in height of standard specimen 2 force-detecting positions and ball-screw 16,21 stress points.
Test platform can be installed on the combined load mechanical test that comprises original position stretching/compression verification, original position shearing test, original position stretching/shearing, compression/shearing test under the in-situ monitoring of micro-imaging instrument (as scanning electron microscope SEM, transmission electron microscope TEM, scanning probe microscopy SPM etc.), can carry out online observation to microdeformation, damage and the destructive process of material, can realize collection and control to load/displacement signal, but the mechanical characteristic of test material under nanoscale and damage mechanism.
Beneficial effect of the present invention is: compared with prior art, volume of the present invention is small and exquisite, compact conformation, the measuring accuracy height, available content measurement is abundant, distortion/displacement/rate of loading is controlled, can be installed on the article carrying platform of various main flow electron microscope vacuum cavities, also can use, have wide range of applications with imaging devices such as atomic force microscope, Raman spectrometer, X-ray diffractometer, optical microscope are compatible.Can carry out the trans-scale in-situ mechanical test to macroscopical test specimen of various materials, and can realize continuously, intermittence etc. multiple load mode, to material and goods thereof load under microdeformation dynamic observe, to disclose the mechanical behavior of material under nanoscale and damage mechanism.And the synchronous detection by load/displacement signal, in conjunction with related algorithm, the also stress-strain diagram under the match generation loading automatically.In sum, the present invention is to enriching in-situ nano mechanical test content and promoting material mechanical performance measuring technology and equipment to have important significance for theories and good application development future.
Description of drawings
Fig. 1 is a three-dimensional appearance structural representation of the present invention;
Fig. 2 looks synoptic diagram for master of the present invention;
Fig. 3 is a schematic top plan view of the present invention;
Fig. 4 looks synoptic diagram for a left side of the present invention;
Fig. 5 to Fig. 9 is a combined load test philosophy synoptic diagram of the present invention; Wherein Fig. 6 is pure extension/test pattern compression; Fig. 7 is the pure shear test pattern; Fig. 8 and Fig. 9 are stretching/compression-shear load test pattern.
Among the figure: 1, DC servo motor 2, standard specimen 3, anchor clamps pressing plate I 4, standard specimen anchor clamps I 5, elastic coupling 6, one-level worm shaft bearing 7, one-level worm screw 8, first-stage worm gear 9, second-stage worm gear I 10, second-stage worm bearing I 11, second-stage worm 12, first-stage worm gear attachment screw 13, two-stage turbine II 14, second-stage worm bearing seat II 15, second-stage worm bearing 16, precision ball screw I 17, guide pole I 18, displacement transducer pedestal 19, standard specimen fixture support frame I 20, platform base 21, precision ball screw II 22, accurate contact capacitance displacement sensor 23, leading screw fixed pedestal I 24, standard specimen fixture support frame II 25, displacement transducer fixed dam 26, force transducer fixed dam 27, force transducer trip bolt I 28, pull pressure sensor 29, anchor clamps trip bolt 30, standard specimen anchor clamps II 31, photoelectric encoder 32, anchor clamps pressing plate II 33, ring flange trip bolt 34, second-stage worm gear attachment screw I 35, leading screw fixed pedestal trip bolt I 36, leading screw fixed pedestal II 37, leading screw fixed pedestal trip bolt II 38, leading screw fixed pedestal trip bolt III 39, leading screw fixed pedestal III 40, leading screw fixed pedestal trip bolt IV 41, bracing frame trip bolt 42, displacement transducer pedestal trip bolt 43, leading screw fixed pedestal trip bolt V 44, pressing plate trip bolt 45, force transducer trip bolt II 46, leading screw fixed pedestal IV 47, leading screw fixed pedestal trip bolt VI 48, motor trip bolt 49, second-stage worm bearing seat I 50, second-stage worm gear attachment screw II 51, leading screw square nut I 52, leading screw square nut II 53, motor flange dish 54, one-level worm bearing 55, the guide pole II.
Embodiment
Further specify detailed content of the present invention and embodiment thereof below in conjunction with accompanying drawing.
Referring to Fig. 1 to Fig. 9, the yardstick micron-nano scale in-situ combined load Mechanics Performance Testing platform of striding of the present invention comprises accurate driving and gear unit, input and control module, clamping, connection and support unit; Described accurate driving and gear unit are: DC servo motor 1 is connected with one-level worm screw 7 by spring coupling 5 and provides power to export, and pass through first-stage worm gear worm transmission pair and second-stage worm gear worm drive adjutant transmission of power, and further by leading screw square nut I, the accurate straight reciprocating motion of II 51,52 outputs to precision ball screw I, II 16,21 places;
Described input and control module comprise accurate contact capacitance displacement sensor 22, pull pressure sensor 28 and photoelectric encoder 31, provide according to the pulse/direction control model of DC servo motor 1 and to comprise rate of deformation control, the power rate controlled, three kinds of digital-to-analog feedback signal sources in rate of displacement is controlled at, wherein, the front end elasticity probe of the accurate contact capacitance displacement sensor 22 realization deformation process that contacts with displacement transducer fixed dam 25, the main part of accurate contact capacitance displacement sensor 22 is passed through displacement transducer pedestal trip bolt 42 and displacement transducer pedestal 18 clearance fit, and is connected with standard specimen fixture support frame I 19; Pull pressure sensor 28 is rigidly connected by force transducer trip bolt I, II 27,45 with force transducer fixed dam 26 and standard specimen fixture support frame II 24 respectively, the flexible direction of displacement transducer 22 front end elasticity probes, force transducer 28 be subjected to force direction identical with the flexible direction of standard specimen 2 under loading, to guarantee the accuracy of displacement/load signal detection;
Described clamping, connection and support unit comprise standard specimen anchor clamps I, II 4,30, anchor clamps pressing plate I, II 3,32 and standard specimen 2, wherein, standard specimen 2 be installed in the dovetail grooved standard specimen anchor clamps I of its consistent size, II 4,30 in, and compress by the anchor clamps pressing plate I, the II 3,32 that are fastenedly connected by pressing plate trip bolt 44 with standard specimen anchor clamps I, II 4,30, prevent moving freely of in compression or shearing test process standard specimen 2; Simultaneously, the whole height of test platform has guaranteed the requirement for height of its complete coincidence imaging after the article carrying platform that is installed on Image-forming instruments such as scanning electron microscope, can with micro-imaging instrument such as Electronic Speculum, use as scanning electron microscope SEM, transmission electron microscope TEM, scanning probe microscopy SPM etc. are compatible;
Described first-stage worm gear worm transmission pair is made up of one-level worm screw 7 and the one-level turbine 8 that is fastened on the second-stage worm 11; The second-stage worm gear worm transmission pair is made up of second-stage worm 11 and second-stage worm gear I, II 9,13.
Described DC servo motor 1 is fastenedly connected by motor trip bolt 48 and motor flange dish 53, and by the solid screw 33 of ring flange directly and platform base 20 fastening; One-level worm screw 7 is fixed on the platform base 20 by one-level worm bearing 54, one-level worm shaft bearing 6 and second-stage worm bearing I, II 10,15, second-stage worm bearing seat I, II 49,14 respectively with second-stage worm 11; First-stage worm gear 8 and second-stage worm gear 9,13 are rigidly connected by worm gear attachment screw I, II 34,50 and one-level worm screw 7 and precision ball screw I, II 16,21 respectively; The leading screw fixed pedestal I, II, III, the IV 23,36,39,46 that are used to install precision ball screw I, II 16,21 are connected with platform base 20 by leading screw fixed pedestal trip bolt V, III, IV, I, II, VI 43,38,40,35,37,47 respectively; The perpendicular type groove of second-stage worm bearing seat I, II 49,14 and platform base 20 have guaranteed the centre distance of two-stage worm couple by the gluing mode that connects.
Described standard specimen anchor clamps I, II 4,30 by anchor clamps trip bolt 29 and standard specimen fixture support frame I, II 19,24 connect, standard specimen anchor clamps I, II 4, the circle center that 30 through hole center is formed overlaps with the geometric center point of standard specimen 2, its structure provides four kinds of test specimen clamping patterns, to guarantee that test platform can carry out original position stretching/compression verification respectively, double mode original position draws (pressure) to cut changes combined load test and original position pure shear test, be that test platform and standard specimen 2 stretching/compression axis directions are mutually 0 °, 30 °, the load mode at 60 ° or 90 ° angles is by conversion standard specimen anchor clamps I, II 4, the combined load test function can be realized in 30 installation site; Standard specimen anchor clamps I, II 4,30 match, change with the structure and the size of standard specimen 2.
In the mounting hole of described leading screw fixed pedestal I, III, II, IV 23,39,36,46 by wire cutting technology processing respectively interference guide pole I, II 17,55 are installed, and this guide pole I, II 17,55 cooperate with the via clearance of leading screw square nut I, II 51,52, can guarantee that in test process leading screw square nut 51,52 can not produce the rollover and the phenomenon of toppling because of the difference in height of standard specimen 2 force-detecting positions and ball-screw 16,21 stress points.
Test platform can be installed on the combined load mechanical test that comprises original position stretching/compression verification, original position shearing test, original position stretching/shearing, compression/shearing test under the in-situ monitoring of micro-imaging instrument (as scanning electron microscope SEM, transmission electron microscope TEM, scanning probe microscopy SPM etc.), can carry out online observation to microdeformation, damage and the destructive process of material, can realize collection and control to load/displacement signal, but the mechanical characteristic of test material under nanoscale and damage mechanism.
The yardstick micron-nano scale in-situ combined load Mechanics Performance Testing platform of striding of the present invention mainly is made up of precision driving and gear unit, input and control module, clamping, connection and support unit.Accurate driver element wherein is made up of DC servo motor 1, spring coupling 5, first-stage worm gear worm gear pair, second-stage worm gear worm gear pair, precision ball screw I, II 16,21 etc., the two-stage worm couple all can provide the very big reduction gear ratio of 1:50, promptly the accurate driving torque of DC servo motor 1 output can be realized slowing down largely increase square by above-mentioned transmission link, the ultralow strain rate of final output is to satisfy the test request that the Ultra-Low Speed quasistatic loads.Input wherein and control module mainly are made of accurate contact capacitance displacement sensor 22, pull pressure sensor 28 and photoelectric encoder 31, can provide at the pulse/direction control model of DC servo motor 1 to comprise that rate of deformation control, power rate controlled, rate of displacement are controlled at three kinds of interior digital-to-analog feedback signal sources.The exquisite structure of test platform can make on its article carrying platform that is installed on various main flow electron microscope vacuum cavities, also can with atomic force microscope, Raman spectrometer, X-ray diffractometer, imaging devices such as optical microscope are compatible to be used, and meet of the specific requirement of above-mentioned instrument and equipment fully to imaging, wherein relate to by DC servo motor 1, accurate contact capacitance displacement sensor 22, pull pressure sensor 28 can be placed on outside the cavity of instrument by the closed guard of above-mentioned instrument and equipment with relevant power supply and signal lead with photoelectric encoder 31, so that artificially test process is rationally controlled in the imaging device outside.
Consult accompanying drawing 1 to Fig. 9, involved in the present invention a kind of can be used for the in-situ nano mechanical test stride yardstick micron-nano scale in-situ combined load Mechanics Performance Testing platform, design according to Hitachi TM-1000 type scanning electron microscope, the overall dimensions of this apparatus main body part is 93mm * 34mm * 99mm, can be installed in the inside cavity of various main flow scanning electron microscope and other micro imaging systems simultaneously.The model of DC servo motor 1 is a maxon RE-MAX type, tested standard specimen 2 is the cu-based amorphous alloys material, its total length is 16mm, minimum widith is 1mm, photoelectric encoder 31 is the high-performance optical photoelectric coder of HEDL9140-500 line, cooperating the EPOS type to watch position control unit can accurately control DC servo motor 1, and then guarantees that the strain rate of test process is adjustable.Accurate contact capacitance displacement sensor 22(model is the WYM-1 type) and high precision pull pressure sensor 28(model be the UNCLB-5000 type) in order to the displacement/load signal in the synchronous detection stretching/compression process, can provide at the pulse/direction control model of DC servo motor 1 to comprise that rate of deformation control, power rate controlled, rate of displacement are controlled at three kinds of interior digital-to-analog feedback signal sources.
The present invention is in concrete test process, at first, tested standard specimen 2 clampings are sheared the standard specimen anchor clamps I of combined load test, the dovetail grooved anchor clamps of II 4,30 being used for original position stretching (compression), and the position by adjusting anchor clamps and utilize level meter and the detection of clock gauge guarantees coplanarity and accurate position in the test specimen test process.The special construction of standard specimen anchor clamps I, II 4,30 can provide four kinds of test specimen clamping patterns, to guarantee that test platform can carry out original position stretching/compression verification respectively, double mode original position draws (pressure) to cut changes combined load test and original position pure shear test, see accompanying drawing 5 to 9 explanations for details, be the load mode that test platform can realize being mutually with standard specimen 2 stretching/compression axis directions 0 °, 30 °, 60 ° and 90 ° respectively, can realize the combined load test function by the installation site of changing clamp.Accurate pull pressure sensor 28 and accurate contact capacitance displacement sensor 22 are arranged in parallel with the stand under load direction of standard specimen 2.Then, close the airtight baffle plate of scanning electron microscope vacuum chamber and pass through X, Y motion, the accurate position of in XOY plane, drafting test point to precision driving worktable.Then, the distortion or the Load Control mode of given combined load test, mode with pulse output drives the beginning test process, promptly by testing algorithm program setting test condition and parameter, the accurate angular displacement of precision DC servomotor 1 output under the effect of time sequential pulse control signal, the final realization loads the Ultra-Low Speed quasistatic of standard specimen 2, and 28 couples of axial load F of Compression and Expansion of accurate pull pressure sensor detect in the test process, and make necessary correcting process by algorithm routine; Simultaneously the deflection h of test specimen is picked up synchronously by accurate contact capacitance displacement sensor 22, and two paths of signals is by analog to digital conversion and carry out sending into computing machine behind the necessary signal condition.In the whole process of test, tested standard specimen 2 distortion of materials degree of impairment under loading carries out dynamic monitoring by the scanning electron microscope imaging system of high enlargement ratio, and preserve captured images or video recording simultaneously, also can obtain the important mechanics parameters such as stress-strain curve, elastic modulus, yield strength, shear modulus and breakdown strength of exosyndrome material mechanical property in real time by the host computer debugging software.In addition, by the control of time sequential pulse signal, also can realize that stepping loads, and draw (pressure) to cut multi-mode method of testings such as testing fatigue, and then deformation damage mechanism and the mechanics military service behavior under loading is furtherd investigate to material.

Claims (6)

1. stride yardstick micron-nano scale in-situ combined load Mechanics Performance Testing platform for one kind, it is characterized in that: comprise accurate driving and gear unit, input and control module, clamping, connection and support unit;
Described accurate driving and gear unit are: DC servo motor (1) is connected with one-level worm screw (7) by spring coupling (5) and provides power to export, and locate, and further by leading screw square nut I, the accurate straight reciprocating motion of II (51,52) output by first-stage worm gear worm transmission pair and second-stage worm gear worm drive adjutant transmission of power to precision ball screw I, II (16,21);
Described input and control module comprise accurate contact capacitance displacement sensor (22), pull pressure sensor (28) and photoelectric encoder (31), provide according to the pulse/direction control model of DC servo motor (1) to comprise rate of deformation control, power rate controlled, rate of displacement three kinds of digital-to-analog feedback signal sources in being controlled at; The front end elasticity of this precision contact capacitance displacement sensor (22) the probe realization deformation process that contacts with displacement transducer fixed dam (25), the main part of accurate contact capacitance displacement sensor (22) is passed through displacement transducer pedestal trip bolt (42) and displacement transducer pedestal (18) clearance fit, and is connected with standard specimen fixture support frame I (19); Pull pressure sensor (28) is rigidly connected by force transducer trip bolt I, II (27,45) with force transducer fixed dam (26) and standard specimen fixture support frame II (24) respectively, the flexible direction of displacement transducer (22) front end elasticity probe, force transducer (28) be subjected to force direction identical with the flexible direction of standard specimen (2) under loading;
Described clamping, connection and support unit comprise standard specimen anchor clamps I, II (4,30), anchor clamps pressing plate I, II (3,32) and standard specimen (2), this standard specimen (2) be installed in the dovetail grooved standard specimen anchor clamps I of its consistent size, II (4,30) in, and compress by the anchor clamps pressing plate I, the II (3,32) that are fastenedly connected by pressing plate trip bolt (44) with standard specimen anchor clamps I, II (4,30).
2. the yardstick micron-nano scale in-situ combined load Mechanics Performance Testing platform of striding according to claim 1, it is characterized in that: described DC servo motor (1) is fastenedly connected by motor trip bolt (48) and motor flange dish (53), and by the solid screw (33) of ring flange directly and platform base (20) fastening; One-level worm screw (7) is fixed on the platform base (20) by one-level worm bearing (54), one-level worm shaft bearing (6) and second-stage worm bearing I, II (10,15), second-stage worm bearing seat I, II (49,14) respectively with second-stage worm (11); First-stage worm gear (8) and second-stage worm gear (9,13) are rigidly connected by worm gear attachment screw I, II (34,50) and one-level worm screw (7) and precision ball screw I, II (16,21) respectively; The leading screw fixed pedestal I, II, III, the IV (23,36,39,46) that are used to install precision ball screw I, II (16,21) are connected with platform base (20) by leading screw fixed pedestal trip bolt V, III, IV, I, II, VI (43,38,40,35,37,47) respectively; The perpendicular type groove of second-stage worm bearing seat I, II (49,14) and platform base (20) have guaranteed the centre distance of two-stage worm couple by the gluing mode that connects.
3. the yardstick micron-nano scale in-situ combined load Mechanics Performance Testing platform of striding according to claim 1 is characterized in that: described first-stage worm gear worm transmission pair is made up of one-level worm screw (7) and the one-level turbine (8) that is fastened on the second-stage worm (11); The second-stage worm gear worm transmission pair is made up of second-stage worm (11) and second-stage worm gear I, II (9,13).
4. the yardstick micron-nano scale in-situ combined load Mechanics Performance Testing platform of striding according to claim 1, it is characterized in that: described standard specimen anchor clamps I, II (4,30) are connected with standard specimen fixture support frame I, II (19,24) by anchor clamps trip bolt (29), and the circle center that the through hole center of standard specimen anchor clamps I, II (4,30) is formed overlaps with the geometric center point of standard specimen (2); Test platform and standard specimen (2) stretching/compression axis direction is mutually the load mode at 0 °, 30 °, 60 ° or 90 ° angle, can realize the combined load test function by the installation site of conversion standard specimen anchor clamps I, II (4,30); Standard specimen anchor clamps I, II (4,30) match with the structure and the size of standard specimen (2).
5. the yardstick micron-nano scale in-situ combined load Mechanics Performance Testing platform of striding according to claim 2, it is characterized in that: in the mounting hole of described leading screw fixed pedestal I, III, II, IV (23,39,36,46) respectively interference guide pole I, II (17,55) are installed, and this guide pole I, II (17,55) cooperate with the via clearance of leading screw square nut I, II (51,52).
6. according to any described yardstick micron-nano scale in-situ combined load Mechanics Performance Testing platform of striding in the claim 1 to 5, it is characterized in that: test platform is installed in the micro-imaging instrument.
CN 201110109253 2011-04-29 2011-04-29 Cross-scale micro nanometer grade in-situ composite load mechanical property testing platform CN102262016B (en)

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