CN102435493A - Hydraulic-driving mode based in situ tensile/compression testing platform under scanning electron microscope - Google Patents
Hydraulic-driving mode based in situ tensile/compression testing platform under scanning electron microscope Download PDFInfo
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- CN102435493A CN102435493A CN2011104104059A CN201110410405A CN102435493A CN 102435493 A CN102435493 A CN 102435493A CN 2011104104059 A CN2011104104059 A CN 2011104104059A CN 201110410405 A CN201110410405 A CN 201110410405A CN 102435493 A CN102435493 A CN 102435493A
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Abstract
The invention relates to a hydraulic-driving mode based in-situ tensile/compression testing platform under a scanning electron microscope, and belongs to the field of electromechanics. The hydraulic-driving mode based in-situ tensile/compression testing platform under the scanning electron microscope comprises a hydraulic driving unit consisting of a hydraulic cylinder, an oil tank, an oil filter, a motor, a hydraulic pump, an overflow valve, a throttle valve and an electro-hydraulic servo valve, a load/displacement signal detection and control unit consisting of a displacement sensor and a pull and pressure sensor, and a clamping and supporting unit consisting of light bars, fixture body supporting racks, base linear bearings, pressure plates, a force sensor supporting rack and a specimen. The hydraulic-driving mode based in-situ tensile/compression testing platform under the scanning electron microscope has the advantages of small volume, compact structure, large output load, continuously variable transmission loading, and good structural compatibility with a microscopic imaging system with an open space structure, such as an optical microscope, a Raman spectrometer and an X-ray diffractometer and the like, and also can used for deep study on the micro-mechanical behavior and the deformation and damage mechanism of the specimen with a centimeter-level characteristic size under the action of tensile/compression loads by combination with the instruments.
Description
Technical field
The present invention relates to dynamo-electric field, particularly a kind of based on original position stretching under the ESEM of hydraulic driving mode/compression verification platform.It can be implemented in the interior original position stretching/compression verification of vacuum cavity of scanning electron microscope (SEM) by hydraulic driving mode; And has good structure compatible property with instrument that X-ray diffractometer, atomic force microscope (AFM), Raman spectrometer and optical microscope etc. have an open imaging circumstances; On the mechanical property basis of test material self; Can carry out the further investigation of crack initiation, expansion, distortion and the failure mechanism of material under corresponding stress or strain level under the dynamic monitoring of above-mentioned instrument, means of testing is provided for disclosing the mechanics military service behavior and the deformation damage mechanism of material under micro-meter scale.
Background technology
The mechanical property of material refers under the various different operating situation (load, moment of torsion, speed, temperature etc.); From the mechanical characteristic that begins until the overall process of failure damage, demonstrated by loading; Like elasticity, plasticity, intensity, rigidity, hardness, impact flexibility, extensibility, endurance limit and creep etc., the flexible modulus of important mechanics parameter, yield limit, tensile strength, length growth rate, hardness, impact flexibility, fatigue limit, creep rupture strength and the stress relaxation etc. that obtain through mechanical test.Material mechanical performance test under the stretch mode is the effective means that the most directly, the most effectively is used for mechanics parameter measurings such as elastic modulus, yield limit, length growth rate.
Hydraulic technique is widely used, and it is combined closely with sensing technology, infotech, microelectric technique as a kind of important basic technology of industrial automation, forms and develop into the Integrated Automation Technology that comprises transmission, detection, On-line Control.Hydrostatic transmission has tangible advantage with respect to pneumatic transmission and mechanical drive mode, is embodied in: (1) under equal volume, hydraulic means can produce bigger driving force; With under the constant power, the hydraulic means volume is less, and power density is big, compact conformation, and transmission link is less; (2) hydraulic means stable drive, because it is in light weight, inertia is little, so response speed is very fast, is easy to realize quick startup, braking and frequent switching-over; (3) hydraulic means is easy to realize overload protection, hydraulic cylinder and oil motor can both be for a long time under the stall state work and do not take place overheated; (4) hydrostatic transmission easily is automated, and hydraulic fluid pressure, flow or flow direction all are easy to regulation and control; (5) design of Hydraulic System, manufacturing and working service are convenient, and Hydraulic Elements belong to the mechanical industry basic part, to have realized standardization, seriation and universalization; (6) hydraulic means can be realized stepless speed regulation in a big way, also can in motion process, carry out speed governing.
Simultaneously; In the mechanical test process of material, in conjunction with electron microscope, X-ray diffractometer, Raman spectrometer, atomic force microscope and or Image-forming instrument such as optical microscope microdeformation, damage that material is taken place carry out omnidistance dynamic monitoring until the process of failure damage, can the Micromechanics behavior and the deformation damage mechanism of material be furtherd investigate; And therefrom find more novel phenomenon and rule; Because of the cavity space that receives Image-forming instrument such as scanning electron microscope limits, the in-situ mechanical test in the existing research is primarily aimed at little member, because of the existence of size effect; Characterize the certain credibility of macroscopical material shortage with the mechanical property that little member showed; The relevant test of promptly being carried out with regard to the large-size test specimen will more help true mechanical behavior and the deformation damage mechanism under research material and the goods service state thereof, further, and the original position stretching mechanical test under the current scanline Electronic Speculum; The original position stretching test of mainly being undertaken by business-like torsion testing machine; All based on processes such as MEMS and FIBs, and research object is low-dimensional materials to the microscale member, like CNT, nano wire and membraneous material etc.; Lack trans-scale in-situ mechanical test to macro-size (membraneous material or three-dimensional test specimen); To the material more than the characteristic dimension centimetre-sized, use stepper motor to combine the mode of big retarding ratio speed reducer to carry out transmission mostly, the load range of often in the particular space size, realizing is little; Therefore test specimen is confined to have broad size membraneous material more, also be difficult to further investigate load change to the behavior of the three-dimensional macro mechanics of materials and distortion, damage machine-processed influence rule.
As stated; Utilize stretching/compact model material properties test platform down of hydraulic driving mode development realizing load greatly under the small volume space relatively; And can realize that stepless speed regulation does not have too much transmission link; If can realize the compatibility with Image-forming instruments such as scanning electron microscope, just can under micro-scale, study the above-mentioned performance of macroscopic material under the loading.Therefore; Design that a kind of output load is big, advantages of small volume, compact conformation; Measuring accuracy is high, can utilize imaging system on-line monitorings such as electron microscope, and stretches/compact model material mechanical performance test platform down necessity very to macroscopical test specimen more than the characteristic dimension centimetre-sized.
Summary of the invention
The object of the present invention is to provide a kind ofly, solved the problems referred to above that prior art exists based on original position stretching under the ESEM of hydraulic driving mode/compression verification platform.Itself and Zeiss EVO 18 scanning electron microscope have good structure compatible property, vacuum compatibility and Electro Magnetic Compatibility; Simultaneously; Also can be installed in other scanning electron microscope with similar cavity body structure and image-forming condition; In addition, the instrument that test platform and Raman spectrometer, X-ray diffractometer, atomic force microscope and optical microscope etc. have open loading and image-forming condition all has structure compatible property, can combine above-mentioned instrument to crack initiation, expansion and the distortion of material, the further investigation of fracture mechanism; Accurate flow control in conjunction with hydraulic efficiency servo-valve can realize the extension test under the ultralow speed.Simultaneously test platform can be realized the synchronous precise collection to load, displacement signal, and can simulate the stress-strain diagram of material under loading automatically, and then to the accurate evaluation of mechanics parameters such as elastic modulus, yield limit, break limit, length growth rate.
Above-mentioned purpose of the present invention realizes through following technical scheme:
Based on original position stretching under the ESEM of hydraulic driving mode/compression verification platform, comprise hydraulic drive unit, load/displacement signal detection and control module and clamping and support unit; Said hydraulic drive unit is made up of hydraulic cylinder 11, fuel tank 26, oil filter 27, motor 28, hydraulic pump 29, surplus valve 30, throttling valve 31 and electrohydraulic servo valve 32; Wherein, The output terminal piston rod 23 of said hydraulic cylinder 11 is rigidly connected respectively at clamp body bracing frame I 1 and force transducer bracing frame 8 through piston rod attachment screw 13; In-line 25 is connected with the output terminal of electrohydraulic servo valve 32 respectively with fuel-displaced pipeline 20; Hydraulic-driven power drives hydraulic pumps 29 by motor 28 hydraulic oil in the fuel tank 26 is transported to the input end of electrohydraulic servo valve 32 through oil filter 27, and surplus valve 30 and throttling valve 31 are placed at respectively in this hydraulic circuit; Simultaneously, through the accurate flow control of electrohydraulic servo valve 32, make the incorgruous to-and-fro movement of single shaft of the piston rod 23 output different rates of hydraulic cylinder 11 axle heads;
Said load/displacement signal detects and control module is made up of displacement transducer 3 and pull pressure sensor 7; Wherein, The body portion of said displacement transducer 3 is connected with clamp body bracing frame II 5 through the mode that compresses of displacement transducer trip bolt 33; The front end elasticity of displacement transducer 3 probe is rigidly connected with clamp body bracing frame I 1 through probe attachment screw 14, promptly displacement transducer 3 actual detected to deflection be the clamp body bracing frame I that is used for clamping test pieces 10, II 1, relative deformation between 5; The axle head external thread of said pull pressure sensor 7 is rigidly connected with clamp body bracing frame II 5 and force transducer bracing frame 8 respectively, and, coplane 10 coaxial with test specimen installed; Simultaneously, displacement transducer 3 provides analog quantity or digital quantity feedback sources with the accurate flow FEEDBACK CONTROL that pull pressure sensor 7 can be respectively electrohydraulic servo valve 32;
Described clamping and support unit are made up of feed rod I, II 2,12, clamp body bracing frame I, II 1,5, pedestal 9 linear bearings 4, pressing plate 17, piston rod trip bolt 13, force transducer bracing frame 8 and test specimen 10; Wherein, Said feed rod I 2 through linear bearing 4 respectively with clamp body bracing frame I, II 1,5 sockets; Said feed rod II 12 through linear bearing respectively with clamp body bracing frame I 1 and 8 sockets of force transducer bracing frame; The axial end portion of said feed rod I, II 2,12 is installed between pedestal 9 and the feed rod pressing plate 15, and compresses through feed rod trip bolt 6.
The surface of contact of clamp body bracing frame I of the present invention, II 1,5 and pressing plate 17 and test specimen 10 all has the array structure of knurling, is used to improve the reliability and the stability of clamping.
Feed rod I of the present invention, II 2,12 through four groups of linear bearings 4 respectively with clamp body bracing frame I, II 1,5 and 8 sockets of force transducer bracing frame; Clamp body bracing frame I, II 1,5 and force transducer bracing frame 8 are respectively through linear bearing 4 guiding in stretching/compression verification process; Thereby guarantee that test specimen 10 and pull pressure sensor 7 are in uniaxial tension/compressive state, also can guarantee that the displacement that displacement transducer 3 is detected is the axial deflection of test specimen 10 under the effect of single shaft Tensile or Compressive Loading.
Test platform size of main body of the present invention is 145mm * 38mm * 104mm; Have good structure compatible property, vacuum compatibility and Electro Magnetic Compatibility with Zeiss EVO 18 type scanning electron microscope; Also can be installed on the article carrying platform of X-ray diffractometer, Raman spectrometer, optical microscope and atomic force microscope, also can have structure compatible property with above-mentioned instrument with open imaging circumstances.
Beneficial effect of the present invention is: compared with prior art; The present invention realizes stretching/compression movement that single shaft is incorgruous through the hydraulic cylinder that electrohydraulic servo valve control has double piston-rod, simultaneously, and advantages of small volume of the present invention; Compact conformation; Output load is big, can realize surpassing load capability and the above stretching/compression travel of 20mm of 5000N, can realize infinite variable speed strain rate; Use with Zeiss EVO 18 type scanning electron microscope are compatible; Have wide range of applications, also can be installed in other scanning electron microscope, in addition with similar cavity body structure and image-forming condition; The instrument that test platform and Raman spectrometer, X-ray diffractometer, atomic force microscope and optical microscope etc. have open loading and image-forming condition all has structure compatible property, can combine above-mentioned instrument to crack initiation, expansion and the distortion of material, the further investigation of fracture mechanism.Can be to crack initiation, expansion and the distortion of material, the further investigation of fracture mechanism under Zeiss EVO 18 type scanning electron microscope, the accurate flow control in conjunction with hydraulic servo control system can realize the stretching/compression verification under the ultralow speed.Test platform can be realized the synchronous precise collection to load, displacement signal simultaneously; And can simulate the stress-strain diagram of material under loading automatically, and then mechanics parameters such as elastic modulus, yield limit, break limit, length growth rate are accurately estimated.
Compare little members such as the nanotube tested based on processes such as MEMS and FIBs in the existing research, line; And utilize stepper motor to combine than big retarding than being directed against the mechanical test that membraneous material carried out with macroscopical width; The tested object that the present invention was directed against is macroscopical test specimen more than the characteristic dimension centimetre-sized; Because of it avoids the problem of size effect, so test result has more reliability and credibility.
Simultaneously, and the synchronous detection through load/displacement signal, ins conjunction with related algorithm, the also stress-strain curve under the match generation loading automatically.In sum, the present invention is to enriching the in-situ mechanical content measurement and promoting material mechanical performance measuring technology and equipment to have important significance for theories and good application development future.
Description of drawings
Accompanying drawing described herein is used to provide further understanding of the present invention, constitutes the application's a part, and illustrative example of the present invention and explanation thereof are used to explain the present invention, do not constitute improper qualification of the present invention.
Fig. 1 is an overall appearance structural representation of the present invention;
Fig. 2 is a schematic top plan view of the present invention;
Fig. 3 looks synoptic diagram for master of the present invention;
Fig. 4 is the sectional structure synoptic diagram of hydraulic cylinder of the present invention;
Fig. 5 is the overall appearance structural representation of hydraulic cylinder of the present invention;
Fig. 6 is the loop structure synoptic diagram of hydraulic control system of the present invention.
Among the figure: 1. clamp body bracing frame I; 2. feed rod I; 3. displacement transducer; 4. linear bearing; 5. clamp body bracing frame II; 6. feed rod trip bolt; 7. pull pressure sensor; 8. force transducer bracing frame; 9. pedestal; 10. test specimen; 11. hydraulic cylinder; 12. feed rod II; 13. piston rod attachment screw; 14. probe attachment screw; 15. feed rod pressing plate; 16. pressing plate trip bolt; 17. pressing plate; 18. end cap; 19. end cap seal circle; 20. fuel-displaced pipeline; 21. cylinder bucket; 22. piston; 23. piston rod; 24. piston packing; 25. in-line; 26. fuel tank; 27. oil filter; 28. motor; 29. hydraulic pump; 30. surplus valve; 31. throttling valve; 32. electrohydraulic servo valve; 33. displacement transducer trip bolt.
Embodiment
Further specify detailed content of the present invention and embodiment thereof below in conjunction with accompanying drawing.
Referring to Fig. 1 to Fig. 6, of the present invention based on original position stretching under the ESEM of hydraulic driving mode/compression verification platform, comprise hydraulic drive unit, load/displacement signal detection and control module and clamping and support unit; Said hydraulic drive unit is made up of hydraulic cylinder 11, fuel tank 26, oil filter 27, motor 28, hydraulic pump 29, surplus valve 30, throttling valve 31 and electrohydraulic servo valve 32; Wherein, The output terminal piston rod 23 of said hydraulic cylinder 11 is rigidly connected respectively at clamp body bracing frame I 1 and force transducer bracing frame 8 through piston rod attachment screw 13; In-line 25 is connected with the output terminal of electrohydraulic servo valve 32 respectively with fuel-displaced pipeline 20; Hydraulic-driven power drives hydraulic pumps 29 by motor 28 hydraulic oil in the fuel tank 26 is transported to the input end of electrohydraulic servo valve 32 through oil filter 27, and surplus valve 30 and throttling valve 31 are placed at respectively in this hydraulic circuit; Simultaneously, through the accurate flow control of electrohydraulic servo valve 32, make the incorgruous to-and-fro movement of single shaft of the piston rod 23 output different rates of hydraulic cylinder 11 axle heads;
Said load/displacement signal detects and control module is made up of displacement transducer 3 and pull pressure sensor 7; Wherein, The body portion of said displacement transducer 3 is connected with clamp body bracing frame II 5 through the mode that compresses of displacement transducer trip bolt 33; The front end elasticity of displacement transducer 3 probe is rigidly connected with clamp body bracing frame I 1 through probe attachment screw 14, promptly displacement transducer 3 actual detected to deflection be the clamp body bracing frame I that is used for clamping test pieces 10, II 1, relative deformation between 5; The axle head external thread of said pull pressure sensor 7 is rigidly connected with clamp body bracing frame II 5 and force transducer bracing frame 8 respectively, and, coplane 10 coaxial with test specimen installed; Simultaneously, displacement transducer 3 provides analog quantity or digital quantity feedback sources with the accurate flow FEEDBACK CONTROL that pull pressure sensor 7 can be respectively electrohydraulic servo valve 32;
Described clamping and support unit are made up of feed rod I, II 2,12, clamp body bracing frame I, II 1,5, pedestal 9 linear bearings 4, pressing plate 17, piston rod trip bolt 13, force transducer bracing frame 8 and test specimen 10; Wherein, Said feed rod I 2 through linear bearing 4 respectively with clamp body bracing frame I, II 1,5 sockets; Said feed rod II 12 through linear bearing respectively with clamp body bracing frame I 1 and 8 sockets of force transducer bracing frame; The axial end portion of said feed rod I, II 2,12 is installed between pedestal 9 and the feed rod pressing plate 15, and compresses through feed rod trip bolt 6.
The surface of contact of clamp body bracing frame I of the present invention, II 1,5 and pressing plate 17 and test specimen 10 all has the array structure of knurling, is used to improve the reliability and the stability of clamping.
Referring to Fig. 4 and Fig. 5, cylinder bucket 21 two ends of hydraulic cylinder 11 of the present invention connect end cap 18 respectively, and through end cap seal circle 19 and piston rod 23 sockets; At piston 22 and 21 in cylinder bucket piston packing 24 is set; Piston rod 23 is rigidly connected with clamp body bracing frame I 1 and power sensing bracing frame 8 respectively; Accurate flow control through electrohydraulic servo valve 32; Realize the incorgruous speed together of the accurate single shaft motion of two groups of piston rods 23 of hydraulic cylinder 11; In conjunction with the in-situ observation of Image-forming instruments such as scanning electron microscope, stretch or the compression verification process in, can guarantee test specimen 10 draft observation station be in all the time the imaging area of visual field central authorities.Utilize this hydraulic driving mode, can realize surpassing the output load of 5000N, also can be implemented in the function of stepless speed regulation in the above scope of 20mm.
Feed rod I of the present invention, II 2,12 through four groups of linear bearings 4 respectively with clamp body bracing frame I, II 1,5 and 8 sockets of force transducer bracing frame; Clamp body bracing frame I, II 1,5 and force transducer bracing frame 8 are respectively through linear bearing 4 guiding in stretching/compression verification process; Thereby guarantee that test specimen 10 and pull pressure sensor 7 are in uniaxial tension/compressive state, also can guarantee that the displacement that displacement transducer 3 is detected is the axial deflection of test specimen 10 under the effect of single shaft Tensile or Compressive Loading.
Test platform size of main body of the present invention is 145mm * 38mm * 104mm; Have good structure compatible property, vacuum compatibility and Electro Magnetic Compatibility with Zeiss EVO 18 type scanning electron microscope; Also can be installed on the article carrying platform of X-ray diffractometer, Raman spectrometer, optical microscope and atomic force microscope, also can have structure compatible property with above-mentioned instrument with open imaging circumstances.
Referring to Fig. 1 to Fig. 5; Involved in the present invention based on original position stretching under the ESEM of hydraulic driving mode/compression verification platform; The overall dimensions of this apparatus main body part is 145mm * 38mm * 104mm; Be that vacuum cavity size and image-forming condition according to Zeiss EVO 18 ESEMs designs, can use with the compatibility of main flow Image-forming instrument simultaneously, can be installed in the cavity of various main flow scanning electron microscope and other Image-forming instruments or on the objective table.Concrete components and parts with concrete model are in the proving installation: the model of electrohydraulic servo valve 32 is that the model of MOGO72, pull pressure sensor 7 is that the model of UNIPULSE 5000N, displacement transducer 3 is the WYM-1 type.In the stretching/compression verification process; Displacement transducer 3 and pull pressure sensor 7 are used for the synchronous precise of load/displacement signal is detected, and 5000N that the two-way sensor has respectively and the range of 20mm are through after the Subdividing Processing; The measuring resolution that two paths of signals can reach is respectively 1N and 1 μ m; The accurate flow closed-loop control that load/shift simulation or digital signal can be electrohydraulic servo valve 32 provides feedback sources, and the length range of test specimen 10 is 8-40mm, and breadth extreme can reach 6mm.
The present invention is before concrete test process; Need manufacture experimently out given shape through processing modes such as line cuttings to test specimen 10; Can precast breach in case of necessity at the smallest cross-sectional place of test specimen 10 to form area of stress concentration, be convenient to the in-situ observation to material crack germinating and expansion, the while test specimen need be done single the throwing and handle; Or obtain specific metallographic through processing modes such as chemical corrosions; Then test specimen is installed on the surface that clamp body bracing frame I, II 1,5 have rolling shape structure, and compresses to accomplish holding action, in clamping process through pressing plate 17 and pressing plate trip bolt 16; The retained part width of test specimen 10 is consistent with the distance of two interior buses of pressing plate trip bolt 16, guarantees the coaxial positioning of test specimen 10 with this.In the concrete test process; Drive hydraulic pump 29 rotations by motor 28, through oil filter 27 oil suctions, hydraulic oil gets in the electrohydraulic servo valve 32 through throttling valve 31 hydraulic pump 29 from fuel tank 26; And through accurate flow control in oil inlet pipe 25 gets into the rodless cavity of hydraulic cylinders; And then promote the coaxial incorgruous synchronous linear motion of two groups of piston rods, 25 realizations, simultaneously, test specimen 10 suffered accurate tensile forces are detected by pull pressure sensor 7 in the test process; Simultaneously the stretcher strain amount of test specimen is picked up by displacement transducer 3 synchronously, and two paths of signals is through analog to digital conversion and carry out sending into computing machine behind the necessary signal condition.In the whole process of test; Test specimen 10 distortion of materials degree of impairment under loading carries out dynamic monitoring by the scanning electron microscope imaging system of high enlargement ratio; And document image simultaneously, also can obtain the important mechanics parameters such as load-deflection curve, stress-strain curve, elastic modulus, yield limit, length growth rate of exosyndrome material mechanical property in real time in conjunction with the host computer debugging software.
The above is merely preferred embodiment of the present invention, is not limited to the present invention, and for a person skilled in the art, the present invention can have various changes and variation.All within spirit of the present invention and principle, any modification of being done, be equal to replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (6)
1. one kind based on original position stretching under the ESEM of hydraulic driving mode/compression verification platform, it is characterized in that: comprise hydraulic drive unit, load/displacement signal detection and control module and clamping and support unit; Said hydraulic drive unit is made up of hydraulic cylinder (11), fuel tank (26), oil filter (27), motor (28), hydraulic pump (29), surplus valve (30), throttling valve (31) and electrohydraulic servo valve (32); Wherein, The output terminal piston rod (23) of said hydraulic cylinder (11) is rigidly connected respectively at clamp body bracing frame I (1) and force transducer bracing frame (8) through piston rod attachment screw (13); In-line (25) is connected with the output terminal of electrohydraulic servo valve (32) respectively with fuel-displaced pipeline (20); Hydraulic-driven power drives hydraulic pump (29) by motor (28) hydraulic oil in the fuel tank (26) is transported to the input end of electrohydraulic servo valve (32) through oil filter (27), and surplus valve (30) and throttling valve (31) are placed at respectively in this hydraulic circuit; Simultaneously, through the accurate flow control of electrohydraulic servo valve (32), make the incorgruous to-and-fro movement of single shaft of piston rod (23) the output different rates of hydraulic cylinder (11) axle head;
Said load/displacement signal detects and control module is made up of displacement transducer (3) and pull pressure sensor (7); Wherein, The body portion of said displacement transducer (3) is connected with clamp body bracing frame II (5) through displacement transducer trip bolt (33); The front end elasticity of displacement transducer (3) probe is rigidly connected through probe attachment screw (14) and clamp body bracing frame I (1), promptly displacement transducer (3) actual detected to deflection be to be used for the clamp body bracing frame I of clamping test pieces (10), the relative deformation between the II (1,5); The axle head external thread of said pull pressure sensor (7) is rigidly connected with clamp body bracing frame II (5) and force transducer bracing frame (8) respectively, and, coplane installation coaxial with test specimen (10); Simultaneously, displacement transducer (3) provides analog quantity or digital quantity feedback sources with the accurate flow FEEDBACK CONTROL that pull pressure sensor (7) can be respectively electrohydraulic servo valve (32);
Described clamping and support unit are made up of feed rod I, II (2,12), clamp body bracing frame I, II (1,5), pedestal (9) linear bearing (4), pressing plate (17), piston rod trip bolt (13), force transducer bracing frame (8) and test specimen (10); Wherein, Said feed rod I (2) through linear bearing (4) respectively with clamp body bracing frame I, II (1,5) socket; Said feed rod II (12) through linear bearing respectively with clamp body bracing frame I (1) and force transducer bracing frame (8) socket; The axial end portion of said feed rod I, II (2,12) is installed between pedestal (9) and the feed rod pressing plate (15), and compresses through feed rod trip bolt (6).
2. according to claim 1 based on original position stretching under the ESEM of hydraulic driving mode/compression verification platform, it is characterized in that: the surface of contact of described clamp body bracing frame I, II (1,5) and pressing plate (17) and test specimen (10) all has the array structure of knurling.
3. according to claim 1 based on original position stretching under the ESEM of hydraulic driving mode/compression verification platform; It is characterized in that: cylinder bucket (21) two ends of described hydraulic cylinder (11) connect end cap (18) respectively, and through end cap seal circle (19) and piston rod (23) socket; Between piston (22) and cylinder bucket (21), piston packing (24) is set; Piston rod (23) is rigidly connected with clamp body bracing frame I (1) and power sensing bracing frame (8) respectively, through the accurate flow control of electrohydraulic servo valve (32), realizes the incorgruous speed together of the accurate single shaft motion of two groups of piston rods (23) of hydraulic cylinder (11).
4. according to claim 1 based on original position stretching under the ESEM of hydraulic driving mode/compression verification platform; It is characterized in that: described feed rod I, II (2,12) through four groups of linear bearings (4) respectively with clamp body bracing frame I, II (1,5) and force transducer bracing frame (8) socket, clamp body bracing frame I, II (1,5) and force transducer bracing frame (8) are respectively through linear bearing (4) guiding.
5. according to claim 1 based on original position stretching under the ESEM of hydraulic driving mode/compression verification platform, it is characterized in that: described pedestal (9) and feed rod pressing plate (15) all are provided with semi-circular recesses with the surface of contact of feed rod I, II (2,12).
According in the claim 1 to 5 any one described based on original position stretching under the ESEM of hydraulic driving mode/compression verification platform, it is characterized in that: described test platform size of main body is 145mm * 38mm * 104mm.
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| CN111076881A (en) * | 2020-01-18 | 2020-04-28 | 山东普泰工程检测鉴定有限公司 | Intelligent deformation detection system for large building steel structure |
| CN112730896A (en) * | 2020-12-21 | 2021-04-30 | 湘潭大学 | Material micro-pushing device used with atomic force microscope and using method thereof |
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Application publication date: 20120502 |