CN109238848B - ESEM (electronic stability and electromagnetic Engineers) in-situ mechanical test platform - Google Patents
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- CN109238848B CN109238848B CN201811062015.5A CN201811062015A CN109238848B CN 109238848 B CN109238848 B CN 109238848B CN 201811062015 A CN201811062015 A CN 201811062015A CN 109238848 B CN109238848 B CN 109238848B
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/08—Investigating strength properties of solid materials by application of mechanical stress by applying steady tensile or compressive forces
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Abstract
The invention discloses an ESEM (electronic mechanical engineering) in-situ mechanical test platform which comprises a stretching table, wherein the stretching table is provided with a double-shaft driving ball screw, each shaft driving ball screw is respectively provided with a stepping motor, the double-shaft driving ball screw is provided with a force sensor, a displacement sensor and a stretching pressing plate, and the double-shaft driving ball screw and the two stepping motors are symmetrically distributed and synchronously rotate. And a nut meshed with the ball screw is reversely screwed in, and the displacement sensor is a pull rod type displacement sensor. The double-shaft driving ball screw design is adopted to provide space for installing the force sensor; the reverse screwing of the nut increases the installation space of the clamp, reduces the size in the width direction and increases the effective stroke of stretching and compressing; the double-step motors are symmetrically distributed, so that space is provided for mounting the displacement sensor, and the pull rod type displacement sensor also ensures that the measured dimension line is on the standard dimension line and the extension line thereof.
Description
Technical Field
The invention relates to a test platform, in particular to an ESEM (environmental Scanning Electron microscope) in-situ mechanical test platform.
Background
The ESEM is combined with an in-situ mechanical test platform, so that a specific area on the surface of a sample can be observed in real time under the loading condition, the macro and the micro structures of the material and the macro mechanical properties of the material can be dynamically observed and analyzed, and an irreplaceable research tool is provided for the mechanical property research of the material. The in-situ mechanical test platform mainly comprises a stretching table, a stretching table control box and control software, and the combination of the software and the hardware can realize the following steps: loading and stretching of the stretching table, moving speed control, force and displacement signal processing, image display and the like.
In order to better meet the requirement of in-situ observation of materials, a plurality of in-situ mechanical test platforms are provided in the prior art, the published documents mainly relate to a mechanical part, a matched driving module and a control system, and related papers and patents are mainly focused on the aspects of mechanical structures, including power sources, sensors and the like.
The power sources of the mechanical part are mainly divided into three main categories: motor drive, thermal expansion and shape change caused by memory alloy phase change. Wherein, the direct current motor is used as a power source and is most widely applied. The transmission process is basically the rotation of the motor, the speed is reduced through the reduction gear, the double-end left-right-handed screw is transmitted, the nut drives the screw rod connecting piece to move relatively, and the clamp on the screw rod connecting piece drives the sample to move relatively and load.
In the scheme in the prior art, the selection of the sensor, the design of a mechanical structure, the efficient and reasonable operation of a driving module and the humanized design of a control system still have a plurality of work needs to be completed and perfected.
Disclosure of Invention
The invention aims to provide an ESEM (electronic mechanical engineering) in-situ mechanical test platform.
The purpose of the invention is realized by the following technical scheme:
the invention relates to an ESEM (electronic stability and engineering electromagnetic field) in-situ mechanical test platform,
including tensile platform, tensile platform is equipped with the double-shaft drive ball, and every shaft drive ball is equipped with step motor respectively, and the meshing has the nut on the double-shaft drive ball, the nut is connected with screw rod connecting piece, screw rod connecting piece is connected with tensile clamp plate, force transducer and displacement sensor, double-shaft drive ball and two step motor symmetric distributions.
According to the technical scheme provided by the invention, the ESEM in-situ mechanical test platform provided by the embodiment of the invention adopts a double-shaft driving ball screw design, so that a guide rail is prevented from being cancelled by over-positioning, and a space is provided for mounting a force sensor; the double-step motors are symmetrically distributed, so that space is provided for mounting the displacement sensor, and the measured dimension line is ensured to be on the standard dimension line and the extension line thereof. The in-situ loading of the sample can be realized, the deformation length and the loading load can be measured in real time, and the surface appearance of the material and the initiation, the diffusion and the like of cracks can be dynamically observed by combining an environmental scanning electron microscope.
Drawings
FIG. 1 is a schematic top view of a stretching station in an embodiment of the present invention;
FIG. 2 is a schematic perspective view of a stretching station according to an embodiment of the present invention;
FIG. 3 is an information flow diagram of an ESEM in-situ mechanical test platform according to an embodiment of the present invention.
In the figure:
1. base 2, stepping motor 3, speed reducer 4, coupling 5, displacement sensor 6, miniature planar thrust ball bearing F7-15M 7, lead screw connecting piece I8, lead screw 9, stretching pressing plate 10, chassis 11, lead screw connecting piece II 12, nut 13, force sensor 14, miniature planar thrust ball bearing F6-14M 15, bottom plate 16 and end cover
Detailed Description
The embodiments of the present invention will be described in further detail below. Details which are not described in detail in the embodiments of the invention belong to the prior art which is known to the person skilled in the art.
The ESEM in-situ mechanical test platform disclosed by the invention has the preferred specific implementation modes that:
including tensile platform, tensile platform is equipped with the double-shaft drive ball, and every shaft drive ball is equipped with step motor respectively, and the meshing has the nut on the double-shaft drive ball, the nut is connected with screw rod connecting piece, screw rod connecting piece is connected with tensile clamp plate, force transducer and displacement sensor, double-shaft drive ball and two step motor symmetric distributions.
The ball screw is a double-thread screw, the thread turning directions of two ends are opposite, the threads of the two ends are respectively meshed with nuts, the two nuts are respectively connected with screw rod connecting pieces, and the two screw rod connecting pieces are respectively fixed with a stretching pressing plate.
The stretching pressing plate is fixed on the inner side of the screw rod connecting piece, and the nut is installed on the outer side of the screw rod connecting piece.
The nut is reversely mounted on the ball screw.
The displacement sensor is a pull rod type displacement sensor.
The two stepping motors synchronously rotate, and the synchronous driving adopts any one of the following control modes:
the same signal is connected in parallel to two drivers to control two corresponding stepping motors;
one drive has two stepper motors.
The stepping motor control adopts an upper computer to control the single chip microcomputer, when the single chip microcomputer is electrified for the first time, basic parameters of a TMC260 motor driving chip are configured to enable the single chip microcomputer to be kept in a DIR/STEP control mode, upper computer control software configures a signal output channel of a USB type data acquisition card of NI company to provide pulse signals and high and low level signals, and two driving chips with consistent electrical characteristics in a driving circuit board control the synchronous operation of the double motors.
The ESEM in-situ mechanical test platform can realize the following functions and indexes:
(1) carrying out operations such as stretching, compressing, shearing, bending and the like on the test piece;
(2) the rotating speed and the steering of the motor are controlled in real time, the switching process is stable, and no impact or idle stroke exists;
(3) the loading process is stable, and the loading stress can be adjusted in real time;
(4) simultaneously recording and monitoring the loading stress and displacement, so that any point on a material stress-strain curve can be in one-to-one correspondence with the corresponding surface morphology;
(5) the position precision reaches 0.1 mu m, and the load precision reaches 0.1N.
Firstly, designing a route specifically:
(1) mechanical structure design of stretching table
Generally speaking, the reasonability and the high efficiency of a mechanical structure are the basis of system control and the guarantee of high-precision operation. Traditional in-situ stretching platform mechanical structure adopts single lead screw transmission more, through controlling both ends symmetry guide rail keep balance, and the centre is because blockking of lead screw, need rise anchor clamps to lead screw connecting piece top, has increased the vertical direction height, and at sample loading in-process, the vertical direction can produce certain bending deformation, has produced measuring error.
The double-shaft driving ball screw design is adopted, so that the guide rail is prevented from being cancelled due to over-positioning, and meanwhile, a space is provided for installing the force sensor;
the invention adopts the reverse screwing of the nut, increases the installation space of the clamp, reduces the size in the width direction and increases the effective stroke of stretching and compressing. "reverse rotation" is a common term in the art and means: the ball screw nut consists of a front end D-shaped nut end (one end with large outer diameter) and a rear end nut end, the screwing is usually started from the nut end (forward screwing), the screw is screwed from the rear end nut, so the ball screw nut is called reverse screwing, and the final effect is to install the ball screw nut on the outer side (two non-working side surfaces) of the screw connecting piece;
the prior art solution similar to the present application has the following drawbacks in that it employs forward screwing:
1. when the stretching press plate interferes with the press plate of the stretching table, the stretching press plate can deform (small displacement) and is mutually abutted with the nut of the ball screw in the working process; to avoid interference, the following three measures can be taken: 1) increasing the width (the specific increased width is the diameter of a ball screw nut) 2), sacrificing the effective stroke to increase the gap between the ball nut and the stretching press plate 3), reducing the size of the stretching press plate, so that the strength of the stretching press plate can be reduced, the size of a stretching and compressing sample is limited, and the application range of the workbench is reduced;
2. the effective stroke is reduced, and the width of the ball screw nut is increased;
3. the strength is reduced and the stress part is hollowed out seriously.
The invention adopts the reverse screwing of the nut to overcome the defects.
The invention adopts the symmetrical distribution of the double stepping motors, provides space for installing the displacement sensor, and ensures that the measured dimension line is on the standard dimension line and the extension line thereof.
(2) Double-shaft synchronous drive
The synchronous rotation of the left and right screw rods of the stretching table is ensured by the consistency of the electric part, so that the motor cannot lose steps, block rotation, take off line, discontinuous operation and the like, otherwise, the mechanical part is irreversibly damaged. The accuracy and reliability of the whole system are directly affected by the quality of the motor drive.
Two synchronous driving modes of the two stepping motors are provided, one mode is that the same signal is connected in parallel to the two drivers to control the two corresponding stepping motors, and the other mode is that one driver is provided with the two stepping motors. Regarding one driver driving two stepping motors, the requirement for the driver is higher, and the consistency of the stepping motors is also required to be good, so that the first mode is preferred.
The invention adopts an upper computer to control a singlechip, configures basic parameters of a TMC260 motor driving chip to keep the basic parameters in a DIR/STEP control mode, configures a signal output channel of a USB type data acquisition card of NI company by upper computer control software, provides pulse signals and high and low level signals, and controls two motors to synchronously run by two driving chips with consistent electrical characteristics in a driving circuit board.
(3) Designing control software of in-situ mechanical testing machine, including which modules
In the control software design phase, the design is carried out in a top-down mode. Corresponding functional areas must be divided, functions correspond to modules one by one, independence of each module is guaranteed, and meanwhile sharing of information among the modules and hierarchical relation among the modules also need to be guaranteed.
(4) Control panel design
Software needs to interact with a user, and an operator directly faces a control panel, so that the panel design must ensure the following principles:
1. the simple, ordered and descriptive characters are simple, are described by words and are assisted by a wire frame and backgrounds with different colors; the layout sequence of the buttons, the indicator lights, the instruments and the like is related to the operation sequence and is arranged orderly;
2. the function partitions are placed in a block with similar functions, and an operator can find the position of a required function key at a glance;
3. the state can monitor the stress and the strain in real time and display the extreme value;
4. it is fit for human factors engineering.
Secondly, the invention has the advantages and positive effects that:
1. the stretching table with the innovative structure keeps symmetry along the axial line of a sample, the left end and the right end are stressed in a balanced manner, the nuts are reversely screwed into the lead screws, a wider mounting space is provided for the clamp, the clamping height of the sample is reduced, and the mechanical structure is reasonable. The mounting height and the working direction of the displacement sensor and the force sensor are completely consistent with the clamping height and the loading direction of the sample, so that the theoretical rationality and scientificity of the measurement result are ensured.
2. The synchronous driving of the double stepping motors by the double stepping motors provides possibility for keeping symmetry along the axial line of the sample in the integral structure, and the layout of parts is more reasonable; the stepping motor and the reduction gearbox are configured in a set, so that the precision is high, and the processing period and the processing cost are shortened; the double-step motor makes up the defect that the direct current motor provides larger torque under the same size to a certain extent, and provides larger torque under the condition of controlling the whole size; a reversing device is not needed, the operation efficiency is improved, the reverse clearance is reduced, the repeatability precision is high, and the functional application range of the instrument is expanded; the synchronism in mechanical output is ensured through electrical synchronization, and feedback control is performed, so that the control precision is improved; the TMC260 driving chip is adopted, output current is synchronously adjusted along with load change, step loss is prevented, and heating of the motor is reduced.
3. The design of the visual control interface is compiled based on a LabVIEW platform of the national instruments company of America, a three-layer progressive structure is adopted for analysis, the three-layer progressive structure is respectively a top layer, a logic layer and a driving layer, the user requirements and a hardware system are subjected to requirement analysis, a login interface and an operation main interface are set, keys, icons and text boxes are scientifically designed according to human factors engineering knowledge, and the requirements that the interface is simple and clear and interaction is friendly are met to the greatest extent.
The ESEM in-situ mechanical test platform is a complete system, consists of three parts, namely a stretching platform, a driving control box and control software, can independently complete material mechanical property tests such as in-situ stretching, compression, bending and the like, can also be combined with ESEM, and can observe the change of the surface appearance of a material while loading the test, for example: the appearance of crack initiation and propagation and fracture interface. Meanwhile, the device can be matched with a heating device to carry out a thermal coupling experiment, and has wide application prospect in the fields of materials, biology and the like.
Third, the concrete embodiment:
as shown in fig. 1 to fig. 3, a stretching stage of the ESEM in-situ mechanical test platform is placed on a sample chamber lifting stage of an environmental scanning electron microscope, a sample is fixed on the stretching stage, and the sample is deformed by relative motion, so that the viewing angle of the scanning electron microscope is unchanged, and the sample is observed as a determined region, which is also called as in-situ loading. The stretching operation is exemplified:
turning on a main power switch to preheat the system;
placing a sample on a force supporting plate, adjusting the position, tightly screwing a pressing plate at one end of a force sensor, enabling the other end of the force sensor to be in a free state, clicking a relative load right side zero setting button of control software, and setting the relative load to be zero;
the other end of the pressure plate is screwed tightly, and a small pulling force is applied to the sample through manual control. Clicking a zero setting key on the right side of the relative displacement to set the relative displacement to zero;
selecting a required control mode in a software control main interface! For example: setting a 'moving speed' click 'manual control' column 'stretching' key, transmitting a pulse frequency and high and low electric frequency signals corresponding to the 'moving speed' and 'stretching' signal transmission by a data acquisition card, transmitting the signals to a driving circuit board, driving a motor to run, performing mechanical transmission, generating relative motion, and stretching a sample;
the force sensor and the displacement sensor output corresponding voltage signals, the force sensor signals are input into the data acquisition card through an amplifying and filtering circuit with the power of 495 times, the displacement sensor signals are input into the data acquisition card through the filtering circuit, and finally the responded displacement and load numerical values are displayed on a software interface.
In the concrete implementation, place the sample in the power backup pad, compression, bending, shear test need change anchor clamps, and anchor clamps carry out the centre gripping through tensile clamp plate, can use general anchor clamps also can design by oneself.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are included in the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (2)
1. An ESEM (electronic mechanical engineering) in-situ mechanical test platform is characterized by comprising a stretching table, wherein the stretching table is provided with a double-shaft driving ball screw, each shaft driving ball screw is respectively provided with a stepping motor, a nut is meshed with the double-shaft driving ball screw and is connected with a screw connecting piece, the screw connecting piece is connected with a stretching pressing plate, a force sensor and a displacement sensor, and the double-shaft driving ball screws and the two stepping motors are symmetrically distributed;
the mounting height and the working direction of the displacement sensor and the force sensor are completely consistent with the clamping height and the loading direction of the sample;
the ball screw is a double-thread screw, the thread turning directions of two ends are opposite, the threads of the two ends are respectively engaged with nuts, the two nuts are respectively connected with screw rod connecting pieces, and the two screw rod connecting pieces are respectively fixed with a stretching pressing plate;
the stretching pressing plate is fixed on the inner side of the screw rod connecting piece, and the nut is installed on the outer side of the screw rod connecting piece;
the nut is reversely mounted on the ball screw;
the displacement sensor is a pull rod type displacement sensor;
the two stepping motors synchronously rotate, and the synchronous driving adopts any one of the following control modes:
the same signal is connected in parallel to two drivers to control two corresponding stepping motors;
one drive has two stepper motors.
2. The ESEM in-situ mechanical test platform according to claim 1 to claim, wherein the stepping motor is controlled by an upper computer to control the single chip microcomputer, when the single chip microcomputer is powered on for the first time, basic parameters of a TMC260 motor driving chip are configured to be kept in a DIR/STEP control mode, upper computer control software configures a signal output channel of a USB type data acquisition card of NI company to provide pulse signals and high and low level signals, and two driving chips in a driving circuit board with consistent electrical characteristics control the synchronous operation of two motors.
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| CN201811062015.5A CN109238848B (en) | 2018-09-12 | 2018-09-12 | ESEM (electronic stability and electromagnetic Engineers) in-situ mechanical test platform |
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| CN109826916A (en) * | 2019-01-21 | 2019-05-31 | 陕西科技大学 | A kind of single axle helical feed mechanism based on differential principle |
| CN113514319B (en) * | 2021-05-10 | 2022-06-14 | 吉林大学 | In-situ static-dynamic fatigue mechanical property testing instrument in scanning electron microscope |
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| JP2003163256A (en) * | 2001-11-26 | 2003-06-06 | Kyocera Corp | Stage device available in vacuum |
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