CN203405477U - Micro in-situ mechanical tester based on scanning electron microscope - Google Patents
Micro in-situ mechanical tester based on scanning electron microscope Download PDFInfo
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- CN203405477U CN203405477U CN201320529232.7U CN201320529232U CN203405477U CN 203405477 U CN203405477 U CN 203405477U CN 201320529232 U CN201320529232 U CN 201320529232U CN 203405477 U CN203405477 U CN 203405477U
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Abstract
The utility model relates to a micro in-situ mechanical tester based on a scanning electron microscope. The tester comprises guide rails fixedly arranged on a workbench bottom board, a first workbench and a second workbench arranged on the guide rails via sliding blocks, and corresponding clamps respectively arranged on the two workbenches. A tension test and a pressure test for a sample are carried out via a DC servo motor in driving connection with two-stage worm gear pairs and two leading screws arranged at the two ends of the two workbenches. A torsion test for the sample is carried out according to the torsion of the clamps via the other DC servo motor and a torsion shaft in driving connection with two-stage worm gear pairs. By employing the tester, an in-situ mechanical test with a single and complex load mode for "tension/pressure-shear-torsion" under scanning electron microscope dynamic monitoring conditions can be carried out, and function defects that a conventional material mechanical property tester only bears a single load and incapable of carrying out an in-suit test are overcame.
Description
Technical field
The utility model relates to microminiature material properties test testing machine, be can be under scanning electron microscope dynamic monitoring tension and compression-shearing-torsion multi-load and the in-situ mechanical proving installation of compound loading pattern, be convenient to obtain the micro-property closer under the actual service condition of material.
Background technology
Traditional material mechanical performance measuring technology mostly rests on ex situ test phase, as the test of tension/pressure, shock-testing, hardness test, testing fatigue, creep test (creep rupture strength and stress relaxation test), fracture toughness test, anti-bending test, antitorque test etc.The mankind are carried out to academic research to these traditional material mechanical performance method of testings and vital role has been brought into play in engineering research.But these measuring technologies are all non-in-situ tests, can not be in material properties test process the deformation damage of material and performance development rule under dynamic monitoring load, cannot realize the micromechanism of material, deformational behavior, damage mechanism and carry out directly corresponding measurement with external load effect and material property, can not meet the demand of current development in science and technology.
Secondly, because of all kinds of solid-state materials and goods thereof, condition of work is comparatively complicated during one's term of military service, inevitably can be subject to when stretching/compressing-shearings waits multi-load pattern acting on, and same material will show far different mechanical behavior under different loads pattern.Summary by domestic and international present Research is analyzed, and current existing in-situ mechanical measuring technology all cannot realize the material Micro Mechanical Properties test for the multi-load pattern under the true mechanics service condition of material that approaches of three-dimensional macro test specimen.
Wherein, the load mode of the single stretching/compressing module of existing microminiature, its primary structure is to drive by DC servo motor, drives unidirectional leading screw rotation in the middle of entering after first-stage worm gear worm gear box, and leading screw is fixed on floor by bearing, one section of work bench with adjustable holder and nut are connected, the other end is fixed on floor, when leading screw rotates, drives nut to move axially, and then a side work bench with adjustable holder is moved axially, make test specimen axially receive tension and compression.Its design drawback is that load mode is single, can only load axial force, does not meet the stressing conditions of material under actual service condition.And not that bi-directional synchronization loads, be difficult to guarantee in-situ observation.
The utility model, for material behavior under combined load pattern, the problem that the important development trend of damage mechanism and performance development rule test aspect and existing research exist, from realizing in-situ mechanical test philosophy and the method for " stretching/compressing-shearing-torsion " the multi-load pattern under scanning electron microscope dynamic monitoring, studying emphatically test platform drives in precision, multi-load pattern loads, detect, basic theory and the gordian technique of the aspects such as control and in-situ monitoring, development collects " combined load on this basis, in-situ observation " with the microminiature test platform of one.
Summary of the invention
The purpose of this utility model is, for traditional material mechanical property tester, can not realize in-situ observation and existing micro/nano level Material mechanics test instrument load is single, can not observe material at the mechanical behavior approaching under actual service condition, the defect of damage mechanism and performance development rule, propose a kind ofly by two accurate drive motor, to be driven respectively, two-stage worm and gear reduction of speed increases to be turned round, guide rail and ball-screw cooperatively interact, grating displacement sensor, the miniature in-situ materials mechanical property tester that S type power sensor is measured in real time, " driving, load, detect " etc. under the cooperation of test platform of function, " stretching/compressing-shearing-torsion " of realization under scanning electron microscope dynamic monitoring in-situ mechanical single and combined load pattern is tested.
The utility model is realized by following scheme:
A miniature in-situ mechanical tester under scanning electron microscope, comprises a worktable base plate, is installed in guide rail on worktable base plate, is arranged on I worktable and II worktable on guide rail, corresponding clamp body is set respectively on two worktable respectively by slide block;
Nut in being set in two nuts that the two rhizoid thick sticks at these two worktable two ends coordinate by two sections of reverse threads with on every rhizoid thick stick and described II worktable are connected, the power sensor support base in another nut and I worktable outside is connected, and power sensor two ends are connected in respectively on I worktable and power sensor support base;
A side at described worktable base plate sets firmly the first DC servo motor, its motor shaft is connected with the scroll bar axle of the first worm gear pair by shaft coupling, and the turboshaft by being set in parallel in two secondary transmission worm gear pairs on the first worm gear pair turboshaft is connected with one end of the described two rhizoid thick sticks that are set in these two worktable two ends;
Opposite side at described worktable base plate sets firmly the second DC servo motor, its motor shaft is connected with the scroll bar axle of the second worm gear pair by shaft coupling, by being arranged on the turboshaft of the secondary transmission worm gear pair on the second worm gear pair turboshaft, is connected with the spline housing being installed on worktable base plate by bearing support block;
In described II worktable, by thrust bearing, one torsion shaft is set, the clamp body described in is installed in one end of torsion shaft, and the other end of torsion shaft is made splined shaft and is plugged in described spline housing and is axial sliding fit with it.
A side at described guide rail arranges a grating displacement sensor, and the interface module at its two ends is connected on I worktable and II worktable side with screw by support respectively.
The utlity model has following superior effect:
1) the utility model organization distribution and size are that cavity body structure based on scanning electron microscope designs, and to realize, utilize scanning electron microscope to carry out in real time dynamically observation to process of the test, and it is of a size of 250mm*150mm*80mm.Compare with existing similar testing machine, not only on mechanism size, there is the feature of miniature miniaturization, also greatly improved testing machine measuring accuracy simultaneously, under scanning electron microscope, real-time monitored material is approaching mechanical behavior, damage mechanism and the performance development rule under actual service condition, thereby obtains comparatively exactly the Micro Mechanical Properties of material.
2) on load mode, there is significant improvement, broken the limitation that existing most of testing of materials platform can only carry out single load loading.Adopt two motors as motive drive source, be respectively and draw/press--shear, reverse module power is provided, and overcome the interference problem between mutual motion, three modules can be worked independently, can load again simultaneously, can realize single load test, (compression) test that stretches, torsion test, shearing test, and can realize stretching (compression) and reverse combined load test, shear and reverse combined load test.Can make the maximized military service situation approaching under actual condition of experiment condition of material.
3) the utility model can be broken through existing major part testing of materials technological means, by design optimization testing machine, can realize under scanning electron microscope material is carried out to in-situ observation.Adopt two accurate bidirectional ball-screws, guarantee that test specimen adds to hold the homogeneity that worktable has good stability and load, realize material is carried out to in-situ observation, thus can accurate observation material more directly perceived under arms the microstructure under condition change.
4) compact in design of experiment porch is reasonable, designs ingeniously, and by adjustment, optimizes the position of each mechanism, avoids it to produce interference.When the combination of reversing, stretch loads, utilize Miniature ball spline mechanism, the ingenious extensional motion of having avoided worktable is to reversing the interference of driving-chain.Select ball spline, make the friction on axial direction drop to minimum, and by demarcation, the correction work in later stage, maximize and reduce error.
Accompanying drawing explanation
Fig. 1 is that a kind of axle based on miniature in-situ mechanical tester structure under scanning electron microscope measures intention;
Fig. 2 is the side view of tester shown in Fig. 1;
Fig. 3 is the working state schematic representation of clamp body shown in Fig. 1 (7,8), wherein:
A, B, C, D, for by adjusting the relative position of two clamp bodies, can adjust the direction of the suffered loading force of test specimen, thereby realize tension and compression, shearing combined load.
Embodiment
The embodiment providing below in conjunction with accompanying drawing is described in further detail the utility model.
With reference to Fig. 1,2, a miniature in-situ mechanical tester under scanning electron microscope, comprises a worktable base plate 1, is installed in guide rail 2 on worktable base plate 1, is arranged on I worktable 4 and II worktable 5 on guide rail 2, on two worktable 4,5, corresponding clamp body 7,8 is set respectively respectively by slide block 3;
Being set in nut in two nuts that the two rhizoid thick sticks 6 at these two worktable two ends coordinate by two sections of reverse threads with on every rhizoid thick stick and described II worktable 5 is connected, the power sensor support base 20 in another nut and I worktable 4 outsides is connected, one power sensor 21 two ends are connected in respectively on I worktable 4 and power sensor support base 20, for measuring the power value of materials in tension and compression experiment;
Forward and reverse rotation by leading screw 6 can drive worktable 5 and power sensor support base 20 and then drive I worktable 4 and II worktable 5 to make traveling priority on the contrary or in opposite directions with exertin sensor support base 20 drawing force sensors 21 simultaneously, to realize, stretch or compression test
A side at described worktable base plate 1 sets firmly the first DC servo motor 9, its motor shaft is connected with the scroll bar axle 10 of the first worm gear pair by shaft coupling, and the turboshaft 12 by being set in parallel in two secondary transmission worm gear pairs on the turboshaft 11 of the first worm gear pair is connected with one end of the described two rhizoid thick sticks 6 that are set in these two worktable two ends;
Opposite side at described worktable base plate 1 sets firmly the second DC servo motor 13, its motor shaft is connected with the scroll bar axle 14 of the second worm gear pair by shaft coupling, by being arranged on the turboshaft 16 of the secondary transmission worm gear pair on the turboshaft 15 of the second worm gear pair, is connected with the spline housing 18 being installed on worktable base plate by bearing support block 17;
In described II worktable 5, by thrust bearing, one end that clamp body 7 described in 19, one of one torsion shafts is installed in torsion shaft 18 is set, the other end of torsion shaft 19 is made splined shaft and is plugged in described spline housing 18 and is axial sliding fit with it.
On the other end of the described two rhizoid thick sticks 5 that are set in two worktable two ends, setting firmly power sensor support base 20, one power sensor 21 two ends is connected in respectively on described I worktable 4 and power sensor support base 20.For measuring the power value of materials in tension and compression experiment.
A side at described guide rail 2 arranges a grating displacement sensor 22, and the interface module at its two ends is connected on I worktable 4 and II worktable 5 sides with screw by support respectively, for measuring the displacement of materials in tension and compression experiment.
On described clamp body 7,8, arrange respectively by the fixing clamping sample pressing plate 23 of screw.
With reference to Fig. 3, described clamp body 7,8 is connected on the axle head of the torsion shaft 19 on I worktable 4 and in II worktable 5 by socket head cap screw.By adjusting the relative position of two clamp bodies, can adjust the direction of the suffered loading force of test specimen, thereby realize tension and compression, shearing combined load.
Principle of work of the present utility model is as follows:
1) single stretching/compressing load.
The two-stage speed-down of the first DC servo motor 9 by the worm gear pair A that is connected with its driving and worm gear pair B increases turns round two-way leading screw 6 low speed rotation of rear drive, when servomotor forward, makes two worktable synchronized low-speed motions round about simultaneously, and workpiece is stretched; When servomotor reverses, make two worktable synchronized low-speed motion in opposite directions simultaneously, make workpiece compression.
2) single torsional load.
The two-stage speed-down of the second DC servo motor 12 by the worm gear pair C that is connected with its driving and worm gear pair D increases turns round 17 rotations of rear drive spline housing, and then the torsion shaft 18 that drive matches with spline housing 17 rotates, and makes workpiece for measurement bear moment of torsion.
3) shearing, stretching combined load.When changing the different setting angles of clamp body, can realize shearing, the combination of the different big or small power that stretch.(as accompanying drawing 3)
With reference to Fig. 3, the mode that applies of load is explained.By interior hexagonal holding screw, adjust the relative position of I clamp body 7,8, can adjust the direction of the suffered loading force of test specimen.Realize and shear stressed combinations different from stretching/compressing.Applying by the second DC servo motor 13 of torsional load realizes, and Miniature ball spline assembly can be avoided the interference of tensile load and torsional load.
4) stretching/compressing, shearing, torsion meet load.When allowing two servomotors have identical or different rotating speed, by gear train independently separately, coordinate different fixture setting angles can realize stretching, reverse, compression, torsion, stretch, shear, reverse, the multi-form combined loads such as compression, shearing, torsion, at utmost approach the force-bearing situation of material under actual service condition.
Whole mechanism makes to measure according to the cavity of scanning electron microscope, and structure is small and exquisite, can under scanning electron microscope, observe the whole stress deformation process of material.
Claims (4)
1. one kind based on miniature in-situ mechanical tester under scanning electron microscope, comprise a worktable base plate (1), be installed in guide rail (2) on worktable base plate (1), by slide block (3), be arranged on I worktable (4) and II worktable (5) on guide rail (2), corresponding clamp body (7,8) is set respectively on two worktable (4,5) respectively, it is characterized in that:
Being set in nut in two nuts that the two rhizoid thick sticks (6) at these two worktable two ends coordinate by two sections of reverse threads with on every rhizoid thick stick and described II worktable (5) is connected, the power sensor support base (20) in another nut and I worktable (4) outside is connected, and power sensor (21) two ends are connected in respectively on I worktable (4) and power sensor support base (20);
A side at described worktable base plate (1) sets firmly the first DC servo motor (9), its motor shaft is connected with the scroll bar axle (10) of the first worm gear pair by shaft coupling, and the turboshaft (12) by being set in parallel in two secondary transmission worm gear pairs on the first worm gear pair turboshaft (11) is connected with one end of the described two rhizoid thick sticks (6) that are set in these two worktable two ends;
Opposite side at described worktable base plate (1) sets firmly the second DC servo motor (13), its motor shaft is connected with the scroll bar axle (14) of the second worm gear pair by shaft coupling, by being arranged on the turboshaft (16) of the secondary transmission worm gear pair on the second worm gear pair turboshaft (15), is connected with the spline housing (18) being installed on worktable base plate by bearing support block (17);
In described II worktable (5), by thrust bearing, one torsion shaft (19) is set, clamp body described in one (8) is installed in one end of torsion shaft (19), and the other end of torsion shaft (19) is made splined shaft and is plugged in described spline housing (18) and is axial sliding fit with it.
2. according to claim 1 based on miniature in-situ mechanical tester under scanning electron microscope, it is characterized in that, a side at described guide rail (2) arranges a grating displacement sensor (22), and the interface module at its two ends is connected on I worktable (4) and II worktable (5) side with screw by support respectively.
3. according to claim 1ly based on miniature in-situ mechanical tester under scanning electron microscope, it is characterized in that, on described clamp body (7,8), arrange respectively by the fixing clamping sample pressing plate (23) of screw.
4. according to claim 1 based on miniature in-situ mechanical tester under scanning electron microscope, it is characterized in that, described clamp body (7,8) is connected on the axle head of the torsion shaft (19) of I worktable (4) above and in II worktable (5) by interior hexagonal holding screw.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201320529232.7U CN203405477U (en) | 2013-08-28 | 2013-08-28 | Micro in-situ mechanical tester based on scanning electron microscope |
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| CN201320529232.7U CN203405477U (en) | 2013-08-28 | 2013-08-28 | Micro in-situ mechanical tester based on scanning electron microscope |
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Cited By (15)
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| CN103926160A (en) * | 2014-04-18 | 2014-07-16 | 吉林大学 | In-situ tester for micromechanical property of material under combined tension and torsion |
| CN105021454A (en) * | 2015-08-12 | 2015-11-04 | 天津大学 | Clamp used for tension-torsional fatigue performance test of samples of micron-grade sizes |
| CN105300797A (en) * | 2015-09-18 | 2016-02-03 | 辽宁科技大学 | Micro-forming stretcher |
| CN105388327A (en) * | 2015-11-11 | 2016-03-09 | 浙江大学 | Apparatus for achieving in-situ micromechanics, microstructure and component integrated research in scanning electron microscope |
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- 2013-08-28 CN CN201320529232.7U patent/CN203405477U/en not_active Expired - Fee Related
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| CN105021454A (en) * | 2015-08-12 | 2015-11-04 | 天津大学 | Clamp used for tension-torsional fatigue performance test of samples of micron-grade sizes |
| CN105021454B (en) * | 2015-08-12 | 2017-12-26 | 天津大学 | A kind of micron order sized samples tension-torsion experiment on fatigue properties fixture |
| CN105300797A (en) * | 2015-09-18 | 2016-02-03 | 辽宁科技大学 | Micro-forming stretcher |
| CN105388327A (en) * | 2015-11-11 | 2016-03-09 | 浙江大学 | Apparatus for achieving in-situ micromechanics, microstructure and component integrated research in scanning electron microscope |
| CN105388327B (en) * | 2015-11-11 | 2018-05-18 | 浙江大学 | It is a kind of that original position Micromechanics, micro-structure, the device and method of ingredient Study on Integration are carried out in scanning electron microscope |
| CN107238539A (en) * | 2017-06-27 | 2017-10-10 | 天津大学 | A kind of miniature nothing returns gap transmission-type fatigue tester |
| CN107764640A (en) * | 2017-09-13 | 2018-03-06 | 上海海洋大学 | The supporting Universal micro mechanics machine of AFM |
| CN108051614B (en) * | 2017-12-05 | 2020-03-24 | 湘潭大学 | Light/force/electric coupling testing device based on scanning electron microscope in-situ mechanical testing system and testing method thereof |
| CN108051614A (en) * | 2017-12-05 | 2018-05-18 | 湘潭大学 | A kind of light based on scanning electron microscope home position mechanics test system/power/is electrically coupled test device and its test method |
| CN108459035A (en) * | 2018-02-11 | 2018-08-28 | 中国科学院高能物理研究所 | A kind of Portable in-situ multi- scenarios method loading device for neutron scattering |
| CN108459035B (en) * | 2018-02-11 | 2020-09-29 | 中国科学院高能物理研究所 | Portable in-situ multi-field coupling loading device for neutron scattering |
| CN109238848A (en) * | 2018-09-12 | 2019-01-18 | 中国科学技术大学 | ESEM in-situ mechanical test platform |
| CN109238848B (en) * | 2018-09-12 | 2020-05-15 | 中国科学技术大学 | ESEM (electronic stability and electromagnetic Engineers) in-situ mechanical test platform |
| CN109297813A (en) * | 2018-11-08 | 2019-02-01 | 清华大学 | The elasticity modulus test method of nano thin-film in a kind of flexible substrates |
| CN109781760A (en) * | 2018-12-27 | 2019-05-21 | 西安交通大学 | A kind of miniature multi-function in-situ test platform based on SEM Electronic Speculum |
| CN109781761A (en) * | 2018-12-27 | 2019-05-21 | 西安交通大学 | A kind of superhigh temperature under scanning electron microscope is broken in-situ observation device |
| CN109752214A (en) * | 2019-01-15 | 2019-05-14 | 中南大学 | A kind of concentrate material automatic sampling equipment and its application method |
| CN109752214B (en) * | 2019-01-15 | 2023-10-31 | 中南大学 | Automatic concentrate material sampling equipment and application method thereof |
| CN110487628A (en) * | 2019-08-23 | 2019-11-22 | 杭州源位科技有限公司 | A kind of miniature mechanical test platform in original position |
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Granted publication date: 20140122 Termination date: 20140828 |
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| EXPY | Termination of patent right or utility model |