CN103308404A - In-situ nano-indentation tester based on adjustable stretching-bending preload - Google Patents

Abstract

The invention relates to an in-situ nano-indentation tester based on an adjustable stretching-bending preload, and belongs to the field of electromechanical precision scientific instruments. The in-situ nano-indentation tester comprises an in-situ nano-indentation testing module, a stretching preload loading module and a bending preload loading module, wherein the in-situ nano-indentation testing module consists of a precision displacement/force loading unit and a load/displacement signal detection unit; the stretching preload loading module consists of a precision driving unit A, a precision transmission unit A, a load/displacement signal detection and control unit A and a clamping unit A; the bending preload loading module consists of a precision driving unit B, a precision transmission unit B, and a load/displacement signal detection and control unit B. The in-situ nano-indentation tester has the advantages of small size, compact structure and high testing precision; supplied test contents are rich; the deformation/displacement/load rate can be controlled; the in-situ nano-indentation tester can be arranged on carrying platforms of various main-stream electronic microscopic vacuum cavities and is compatible with imaging equipment; the application range is wide.

Description

The in-situ nano impress tester that preloads based on adjustable stretching-bending

Technical field

The present invention relates to electromechanical integration exact science instrument field, particularly a kind of in-situ nano impress tester that preloads based on adjustable stretching-bending.

Background technology

Original position micro nanometer mechanics measuring technology refers under micro-nano-scale material for test be carried out in the Mechanics Performance Testing process, by electron microscope, atomic force microscope and or Image-forming instrument such as optical microscope microdeformation that material under the load effect is taken place, a kind of mechanical test technology that damage is carried out omnidistance dynamic monitoring until the process of failure damage.In the category of many nanometer mechanics tests, elastic modulus, yield strength, tensile strength, bending strength, bending modulus, hardness, parameters such as shear modulus are the topmost research objects in the characteristic of material mechanics test, produced various test at these mechanical quantities, as stretching/compression method, three-point bending method, nano impress method etc., the in-situ mechanical means of testing of the stretch bending impression pattern by the most direct exosyndrome material mechanical property certainly will be able to disclose the rule of material deformation damage under the extraneous load effect, find more novel phenomenon and rule, the relevant test of carrying out with regard to the large-size test specimen will more be conducive to true mechanical behavior and the deformation damage mechanism under research material and the goods service state thereof.

At present, the micro-nano impression stretch bending of original position composite test is still located bud, be in particular in: (1) is subjected to the restriction of the cavity space of scanning electron microscope, present majority all concentrate on based on little/receive Mechatronic Systems technology, in the test to atomic minor structures such as nanometer and membraneous materials, lack the trans-scale in-situ nanometer mechanical test to macro-size (membraneous material or three-dimensional test specimen), because of the existence of size effect, the research of little member has been restricted evaluation to the mechanical property of large-size element; (2) on means of testing and method, mainly carry out single stretching or crooked test by business-like instrument, show the cost of equipment costliness, load mode is single, the characteristics that content measurement is of inadequate achievement, to compact conformation, volume is small and exquisite, the in-situ testing device of the impression stretch bending compound loading that preload is various rarely has to be mentioned, has greatly restricted going deep into and development of research.(3) from observation method, because being subject to the service condition of scanning electron microscope, at macroscopical test specimen, be confined to the in-situ test under optical microscope and the atomic force microscope more, optical microscope exists the problem of tangible enlargement ratio deficiency, atomic force microscope then has the slow excessively shortcoming of image taking speed, and two kinds of observation procedures all are difficult to further investigate load change to the rule that influences of mechanics of materials behavior and damage mechanism.

And under the actual condition all parts in operational process and product in use, all bearing to a certain extent from the multi-form composite force effect of different directions, the main foundation of the selection of material is its usability, shop characteristic and economy, wherein usability at first needs to satisfy, particularly the material mechanical performance main target pursued of material design and use often targetedly.Understanding the mechanical property of material in actual condition and the various factors that influences material mechanical performance, is one of important contents in all test events.

Therefore, design small and exquisite, the compact conformation of a kind of volume, the measuring accuracy height, can utilize imaging system on-line monitoring such as electron microscope macroscopic view test specimen to preload microdeformation and damage process under the effect at stretch bending, load based on quasistatic stretch bending load, can simulate material stress under the actual condition better, it is very necessary simultaneously material to be carried out the mechanical test platform of in-situ nano impression test and real-time monitored test result.

Summary of the invention

The object of the present invention is to provide a kind of in-situ nano impress tester that preloads based on adjustable stretching-bending, solved the problems referred to above that prior art exists.The present invention can independently use, the situation of change of mechanics parameters such as test material mechanical property parameters and the hardness under different stretch-crooked preload condition, elastic modulus.Particularly this apparatus structure compactness is small, can with scanning electron microscope (SEM), atomic force microscope (AFM), laser confocal microscope, metaloscope, Raman spectrometer, material properties test instruments such as super depth of field micro imaging system and other optical microscope are compatible to be used, in conjunction with these material properties test instruments, the dynamically microdeformation behavior of material under the monitors load effect, damage mechanism and and load effect and material property between the correlativity rule, disclose the heterogeneous microstructure variation that material macromechanics behavior and load effect cause, the rule of performance reduction; The present invention can realize synchronous collection and the control to load/displacement signal.The single test of offing normal with respect to traditional mechanics testing experiment machine, present invention can be implemented under the high resolving power micro imaging system at original position stretch bending impression composite test and the observation of macroscopical test specimen more than the characteristic dimension centimetre-sized, solved in the existing situ measurement study mostly the limitation at nanotube, line and membraneous material simultaneously.Test platform can realize that the trace stretch bending composite mode of " Ultra-Low Speed quasistatic " loads, the synchronous collection of each load/displacement signal and precise closed-loop control, and can realize and Hitachi TM-1000 type scanning electron microscope and all kinds of compatible use of Image-forming instrument with cavity and objective table structure.Can obtain the mechanics parameters such as elastic modulus, yield strength, tensile strength, bending strength and hardness of material by original position trace stretch bending composite test, microdeformation, damage and fracture process to material carry out in-situ monitoring, provide method of testing for disclosing mechanical characteristic and the damage mechanism of material under nanoscale.

Above-mentioned purpose of the present invention is achieved through the following technical solutions:

The in-situ nano impress tester that preloads based on adjustable stretching-bending, comprise in-situ nano impression test module, stretching preloads load-on module and bending preloads load-on module, described in-situ nano impression test module is made up of accurate displacement/power loading unit and load/displacement signal detecting unit; Stretching preloads load-on module and is made up of accurate driver element A, precision drive unit A, load/displacement signal detection and control module A and grip unit A; Bending preloads load-on module and is made up of accurate driver element B, precision drive unit B, load/displacement signal detection and control module B; Each subelement is formed each module, and finally forms complete machine by three modules.

Accurate displacement/power loading unit comprises high precision XZ direction displacement platform 13, piezoelectric stack 10, U-shaped switching A11, high-accuracy pressure transducer 9, high accuracy displacement sensor B15 and diamond penetrator supporting rod 8 under the described in-situ nano impression test module, L type fixed head 14 bolt are in upper mounting plate B6, and the motionless bottom of high precision XZ direction displacement platform 13 portion connects L type fixed head 14 vertical sides; Impression general assembly plate 12 is connected in high precision XZ direction displacement platform 13 movable slide units with bolt; From top to bottom, under the piezoelectric stack 10 tops contact impression general assembly plate 12 outstanding crossbeams, the U-shaped switching A11 of contact two side-prominent tops, its underpart, U-shaped switching A11 epirelief part bottom contacts high-accuracy pressure transducer 9 tops again, last high-accuracy pressure transducer 9 bottoms contact diamond penetrator supporting rod 8, diamond penetrator supporting rod 8 one terminal bolts are fixedly connected in impression general assembly plate 12 lower recess; High accuracy displacement sensor B15 goes up end in contact impression general assembly plate 12 outstanding crossbeams, following end in contact diamond penetrator supporting rod 8;

So, precise 2-D displacement platform 13 can be realized accurate pressure head two dimension macro position adjustment by manual adjustments.Accurate piezoelectric stack 10 can provide accurate power output and minimum displacement output by pulse control mode, the output displacement of piezoelectric stack 10 and power pass to high-accuracy pressure transducer 9 by U-shaped switching A11, high-accuracy pressure transducer 9 presses down diamond penetrator supporting rod 8 and drives the front end pressure head, realizes the test of nano impress pressing in sample.

Load/displacement signal detecting unit comprises high-accuracy pressure transducer 9, diamond penetrator supporting rod 8, high accuracy displacement sensor B15 under the described in-situ nano impression test module, high-accuracy pressure transducer 9, piezoelectric stack 10, U-shaped switching A11 series connection, in parallel with high accuracy displacement sensor B15 again, high-accuracy pressure transducer 9, piezoelectric stack 10, U-shaped switching A11 and high accuracy displacement sensor B15 are scored general assembly plate 12 and are clipped in the middle with diamond penetrator supporting rod 8; So, the pressure head on the diamond penetrator supporting rod 8 is pressed into power and amplifies the bar amplification through this power, passes to precision pressure sensor 9 and realizes being pressed into the force signal detection; In the time of 8 distortion of diamond penetrator supporting rod distortion is passed to high accuracy displacement sensor B15, can draw the compression distance of diamond penetrator, realize the micrometric displacement input.

Described stretching preloads under the load-on module accurate driver element A and refers to DC servo motor assembly A36 and be connected with following general assembly plate 2 by supporting seat, and motor output shaft connects worm screw by shaft coupling; Scrambler connects driver, and motor driver directly connects computing machine, and by the software control motor, realization power is initially exported; So, realize the quasistatic under the tensile load pattern of test specimen is loaded by gear train, and can provide torque power output and the angular displacement output with small resolution by pulse/direction control mode;

Described stretching preloads that precision drive unit A comprises commutating tooth wheels 40, worm and gear assembly B39, lead screw guide rails assembly B42, bidirectional propulsion bar 35, two-way stretch lower thrust rod 43, rail plate assembly C33, bearing seat B34 under the load-on module, DC servo motor assembly A36 output shaft connects the worm shaft of commutating tooth wheels 40, commutating tooth wheels 40 worm gears are fixed in the middle of the worm and gear assembly B39 worm shaft, and worm and gear assembly B39 two worm gears are fixed on lead screw guide rails assembly B42 leading screw axle head; Lead screw guide rails assembly B42 is fixed on down on the general assembly plate 2 by the leading screw cage bolt; Its feed screw nut connects feed screw nut Connection Block B38, and the fixing two guide rails in thick stick nut Connection Block B38 upper end connect 41 synchronously, both sides fixed bearing block C37 above two guide rails connect 41 synchronously; Two internal bearings connect little axle respectively, and the little axle other end connects two-way stretch lower thrust rod 43 and two-way stretch upper thrust rod 35 rear ends, and two-way stretch upper thrust rod 35, two-way stretch lower thrust rod 43 front ends are by shafting structure coupling shaft bearing B34 double-slider; Bearing seat B34 is fastened on the slide block of rail plate assembly C33 by screw; And bearing seat B34 simultaneously holds the unit screw with adding above it and fixedlys connected;

So, the output torque that DC servo motor assembly A36 can be provided is realized the deceleration of big degree through commutating tooth wheels 40 and worm and gear assembly B39, increase and turn round purpose, and finally by scissor two power bar pushing mechanisms, be rail plate assembly C33, bearing seat B34, bidirectional propulsion bar 35, U-shaped connection B44 will rotatablely move and be converted to accurate straight reciprocating motion, realization loads the quasistatic under the tensile load pattern of test specimen, scissors-type two-way stretch mechanism realizes the two-way stretch of material style when utilizing triangle power amplification principle to guarantee tensile force, guaranteed the observation area the observation visual field to neutrality.

Described stretching preloads load under the load-on module/displacement signal detection and control module A is made up of high-accuracy pulling force sensor 17, high accuracy displacement sensor 7, left side anchor clamps installing plate 18 screws connect high-accuracy pulling force sensor 17, and high-accuracy pulling force sensor 17 other ends are fixed on again on the pulling force sensor card extender 19; High accuracy displacement sensor 7 main bodys are fixed on the right anchor clamps installing plate 5, and the probe of high accuracy displacement sensor 7 is connected with left anchor clamps installing plate 18; So, stressed and deflection in the time of can accurately recording the sample material stretching in real time, the analog or digital amount that comprises rate of deformation, the rate of loading feedback signal source as pulse/direction closed loop control mode of DC servo motor assembly A36 can be provided simultaneously, can realize permanent rate of deformation, constant load speed and three kinds of load/unload modes of permanent rate of displacement;

Described stretching preloads that grip unit A comprises that anchor clamps loam cake 16, sample holder sheet group 31, pulling force sensor card extender 19, pressure head are connected platform 21, leading screw holder A24, bearing seat C37, feed screw nut Connection Block B38 with guide rail under the load-on module, right anchor clamps installing plate 5 is fixed with bilateral bearing seat B34 respectively with pulling force sensor card extender 19, right anchor clamps installing plate 5 is separately fixed on two slide blocks of rail plate assembly B30 with pulling force sensor card extender 19, and rail plate assembly B30 guide rail is fixed on the upper mounting plate A4; Rail plate assembly B30, rail plate assembly C33 slide block movement direction unanimity; Left side anchor clamps installing plate 18 connects high-accuracy pulling force sensor 17 by screw, and high-accuracy pulling force sensor 17 other ends are fixed on the pulling force sensor card extender 19; Sample holder sheet group 31 is installed in right anchor clamps installing plate 5 with anchor clamps loam cake 16 and left anchor clamps installing plate 18 leans on machine center line one end; The serrate groove is arranged below the anchor clamps loam cake 16; So, test specimen just compresses the mode positioning clamping by anchor clamps loam cake 16, holding piece group 31.

Described bending preloads under the load-on module accurate driver element B and refers to DC servo motor assembly B45 and be bolted to down the general assembly plate up 2 times by supporting seat; Motor output shaft connects worm screw by shaft coupling; Scrambler connects driver, and motor driver directly connects computing machine, and by the software control motor, realization power is initially exported.So, realize the quasistatic under the bending load pattern of test specimen is loaded by gear train, and can provide torque power output and the angular displacement output with small resolution by pulse control mode;

Described bending preloads that the precision drive unit B comprises that bearing seat A25, worm and gear assembly A26, leading screw holder A24, lead screw guide rails assembly A27, feed screw nut Connection Block A23, high-accuracy pressure transducer 22, U-shaped connection B44, pressure head are connected platform 21, rail plate assembly A29, three-point bending testing pressure head 20 with guide rail under the load-on module, DC servo motor assembly B45 output shaft changes worm and gear assembly A26 by the shaft coupling connection, and worm and gear assembly A26 second-stage worm gear is fixed on lead screw guide rails assembly A27 leading screw axle head; Lead screw guide rails assembly A27 is fixed on down on the general assembly plate 2 by leading screw holder A24; Its feed screw nut connects feed screw nut Connection Block A23 by adaptor, high-accuracy pressure transducer 22 afterbodys of feed screw nut Connection Block A23 rear portion projection contact, the U-shaped connection B44U type bottom portion of groove of high-accuracy pressure transducer 22 anterior contacts, U-shaped connection B44 both sides are solid to be connected platform 21 boss both sides at pressure head with guide rail; Guide rail connects platform 21 bottoms and connects rail plate assembly A29 slide block; Three-point bending testing pressure head 20 is fixed on pressure head by screw and is connected plane on the platform 21 with guide rail.

So, the output speed that DC servo motor assembly B45 can be provided and moment of torsion significantly slow down by worm and gear assembly A26 realization two-stage, increase and turn round purpose, and will rotatablely move by lead screw guide rails assembly A27 and be converted to accurate straight reciprocating motion, finally by advancing feed screw nut Connection Block A23 directly masterpiece to be used in high-accuracy pressure transducer 22 rear ends, high-accuracy pressure transducer 22 leading portions are fixed on the U-shaped connection B44, power is connected platform 21 by the pressure head that U-shaped connection B44 promotes to fix three-point bending testing pressure head 20 again with guide rail, finally drive 20 realizations of three-point bending testing pressure head the quasistatic under the bending load pattern of tested sample is loaded.

Described bending preloads bending load under the load-on module/displacement signal detecting unit B and is made up of with DC servo motor assembly B45 high-accuracy pressure transducer 22, the feed screw nut of lead screw guide rails assembly A27 is connected with feed screw nut Connection Block A23 bolt by adaptor, high-accuracy pressure transducer 22 afterbodys of feed screw nut Connection Block A23 rear portion projection contact, the U-shaped connection B44U type bottom portion of groove of high-accuracy pressure transducer 22 anterior contacts, the both sides of U-shaped connection B44 are fastened on pressure head is connected platform 21 with guide rail boss both sides by screw.

So, power must be through 22 conduction of high-accuracy pressure transducer, can accurately record sample material stressed when crooked in real time.Record DC servo motor assembly B45 number of revolutions by calculating driver, and extrapolate the material bending deflection by ratio of gear.Simultaneously can provide the analog or digital amount that comprises rate of deformation, rate of loading can realize permanent rate of deformation, constant load speed and three kinds of load/unload modes of permanent rate of displacement as the feedback signal source of DC servo motor assembly B45 pulse/direction closed loop control mode.

Described DC servo motor assembly A36 is the accurate displacement of output continuously under the clock signal effect, realize the quasistatic under the tensile load pattern of test specimen is loaded by the multi-stage speed-reducing of gear train, gear train is made of commutating tooth wheels 40, worm and gear assembly B39, lead screw guide rails assembly B42, bearing seat C37, two-way stretch upper thrust rod 35, two-way stretch lower thrust rod 43, bearing seat B34, cross-brace plate 32; Scissor two power bar pushing mechanism rail plate assembly C33, bearing seat B34, two-way stretch upper thrust rod 35, two-way stretch lower thrust rod 43 realize that tensile load loads, when realizing two-way stretch, the sample center is good, thereby the geometric center position that guarantees test specimen is in the most central of imaging region all the time, be convenient to observation and image record, utilize triangle power amplification principle simultaneously, can also realize that the power amplification quasistatic that arrives the superelevation ratio at high proportion loads.

By the deceleration conduction of DC servo motor assembly B45 in conjunction with worm and gear assembly A26, the lead screw guide rails assembly A27 of sweep, power is loaded into earlier on the feed screw nut Connection Block A23, this feed screw nut Connection Block A23 directly is used in masterpiece high-accuracy pressure transducer 22 rear ends again, high-accuracy pressure transducer 22 leading portions are fixed on the U-shaped connection B44, power is connected platform 21 by the pressure head that U-shaped connection B44 promotes to fix three-point bending testing pressure head 20 again with guide rail, finally realize the loading of bending load.Such pressure transducer embedding structure has been saved the space, provides convenience for instrument is inserted scanning electron microscope.

Adopt three-dimensional three layers of all structure member of compact Layout, take full advantage of the space, following general assembly plate 2 is installed on five workbenches of scanning electron microscope with mechanical connection manner by scanning electron microscope coupling assembling 1; Following general assembly plate 2 bottoms are ground floor, power source assembly bearing seat A25, the worm and gear assembly A26 of sweep, DC servo motor assembly B45, stretched portion power source assembly motor driver 28, DC servo motor assembly A 36, commutating tooth wheels 40 are fixed on ground floor; Be the second layer between general assembly base plate 2 tops and upper mounting plate A4 upper mounting plate B6, extension section component drive disk assembly cross-brace plate 32, rail plate assembly C 33, bearing seat B34, two-way stretch upper thrust rod 35, bearing seat C37, feed screw nut Connection Block B38, worm and gear assembly B 39, two guide rails connect 41 synchronously, lead screw guide rails assembly B42, two-way stretch lower thrust rod 43, crooked loading section power transmission component pressure head is connected platform 21 with guide rail, high-accuracy pressure transducer 22, feed screw nut Connection Block A23, leading screw holder A24, worm and gear assembly A26, lead screw guide rails assembly A 27 all installs concentratedly in the second layer; Upper mounting plate A4 and upper mounting plate B6 top are the 3rd layer, comprise nano-indenter test mechanism all components diamond penetrator supporting rod 8, high-accuracy pressure transducer 9, piezoelectric stack 10, U-shaped switching A11, impression general assembly plate 12, high precision XZ direction displacement platform 13, L type fixed head 14, high accuracy displacement sensor B15, stretching adds mounted terminal-clamping device and tensile force/displacement measurement module fixture loam cake 16, high-accuracy pulling force sensor 17, left side anchor clamps installing plate 18, pulling force sensor card extender 19, rail plate assembly B30, load pressure head 20 in sample holder sheet group 31 and the three-point bending and all be installed in the 3rd layer.Three-dimensional three-decker maximization conserve space has increased integral rigidity simultaneously.

When carrying out the in-situ nano impression test, after giving piezoelectric stack 10 electric signal, it will promote high-accuracy pressure transducer 9 pressure diamond penetrator supporting rods 8 by promoting U-shaped switching A11, the final pressure head of realizing is pressed into the style test, and power is passed to high-accuracy pressure transducer 9 by the lever principle amplification, can obtain the pressure delta data more accurately like this, make test result more accurate.

The combination of stretching/crooked two test modules, upper mounting plate A goes up fixedly rail plate assembly B30, simultaneously the extension test terminal; Right anchor clamps installing plate 5 also is fixed on horizontally disposed being fixed on the rail plate assembly B30 slide block with left anchor clamps installing plate 18, glide direction is vertical with crooked loading force direction, the stretching terminal has been unloaded bending load effectively, improved the precision that bending load loads, guarantee to stretch and do not disturb mutually with the bending load loading, increased integral rigidity simultaneously.

On loading direction, totally adopt parallel way to arrange between high accuracy displacement sensor 7 and high-accuracy pulling force sensor 17, sample holder sheet group 31, the anchor clamps loam cake 16, can fully guarantee the structure microminaturization of test platform, and effectively improve the integral rigidity of test platform.

Beneficial effect of the present invention is: compared with prior art, volume of the present invention is small and exquisite, compact conformation, the measuring accuracy height, available content measurement is abundant, distortion/displacement/rate of loading is controlled, can be installed on the article carrying platform of various main flow electron microscope vacuum cavities, also can use with imaging devices such as atomic force microscope, Raman spectrometer, X-ray diffractometer, optical microscope are compatible, have wide range of applications.Can carry out the trans-scale in-situ mechanical test to the three-dimensional test specimen more than the various characteristic dimension centimetre-sized, can carry out high-precision to material when two kinds of pre-load patterns of stretching and bending are provided be nano-indenter test originally, calculate the hardness of material in different stretch stage or crooked stage according to the Elastic Contact theory, mechanics parameters such as elastic modulus, the real-time mechanics Performance Detection of material surface and the detection of specimen surface mechanical property distribution in material extending or the crooked test have been realized, and can realize continuously, multiple load modes such as intermittence, to material and goods thereof load under microdeformation dynamic observe the mechanical behavior when under nanoscale, having loaded the stretch bending combined load to disclose material and damage mechanism.And the synchronous detection by load/displacement signal, in conjunction with related algorithm, the also stress-strain diagram under the effect of match generation load automatically.In sum, the present invention is to enriching in-situ nano mechanical test content and promoting material mechanical performance measuring technology and equipment to have important significance for theories and good application development future.

Description of drawings

Accompanying drawing described herein is used to provide further understanding of the present invention, constitutes the application's a part, and illustrative example of the present invention and explanation thereof are used for explaining the present invention, do not constitute improper restriction of the present invention.

Fig. 1 is overall appearance synoptic diagram of the present invention;

Fig. 2 is overall appearance vertical view of the present invention;

Fig. 3 is one-piece construction right view of the present invention;

Fig. 4 is anchor clamps exploded perspective view of the present invention;

Fig. 5 is holder part vertical view of the present invention;

Fig. 6 is three-point bending pressure head propulsive mechanism axonometric drawing of the present invention

Fig. 7 is three-point bending pressure head propulsive mechanism explosive view of the present invention

Fig. 8 is two-way stretch of the present invention mechanism intraware axonometric drawing;

Fig. 9 is nano-indenter test of the present invention mechanism exploded perspective view.

Among the figure: 1. scanning electron microscope coupling assembling; 2. descend the general assembly plate; 3. brace table; 4. upper mounting plate A; 5. right anchor clamps installing plate; 6. upper mounting plate B; 7. high accuracy displacement sensor A; 8. diamond penetrator supporting rod; 9. high-accuracy pressure transducer; 10. piezoelectric stack; 11. U-shaped switching A; 12. impression general assembly plate; 13. high precision XZ direction displacement platform; 14.L type fixed head; 15. high accuracy displacement sensor B; 16. anchor clamps loam cake; 17. high-accuracy pulling force sensor; 18. left anchor clamps installing plate; 19. pulling force sensor card extender; 20. three-point bending testing pressure head; 21. pressure head is connected platform with guide rail; 22. high-accuracy pressure transducer; 23. feed screw nut Connection Block A; 24. leading screw holder A; 25. bearing seat A; 26. worm and gear assembly A; 27. lead screw guide rails assembly A; 28. motor driver; 29. rail plate assembly A; 30. rail plate assembly B; 31. sample holder sheet group; 32. cross-brace plate; 33. rail plate assembly C; 34. bearing seat B; 35. two-way stretch upper thrust rod; 36. DC servo motor assembly A; 37. bearing seat C; 38. feed screw nut Connection Block B; 39. worm and gear assembly B; 40. commutating tooth wheels; 41. two guide rails connect synchronously; 42. lead screw guide rails assembly B; 43. two-way stretch lower thrust rod; 44. U-shaped connection B; 45. DC servo motor assembly B.

Embodiment

Further specify detailed content of the present invention and embodiment thereof below in conjunction with accompanying drawing.

To shown in Figure 9, the in-situ nano impress tester that preloads based on adjustable stretching-bending of the present invention comprises that in-situ nano impression test module, stretching preload load-on module and bending preloads load-on module three parts composition referring to Fig. 1; Wherein the nano-indenter test module is made up of accurate displacement/power loading unit and load/displacement signal detecting unit; Stretching preloads load-on module and is made up of accurate driver element, precision drive unit, load/displacement signal detection and control module and grip unit; Bending preloads load-on module and is made up of accurate driver element, precision drive unit, load/displacement signal detection and control module.Each subelement is formed each module, and finally forms complete machine by three modules.

Among the present invention under the said in-situ nano impression test module accurate displacement/power loading unit comprise high precision XZ direction displacement platform 13, piezoelectric stack 10, U-shaped switching A11, high-accuracy pressure transducer 9, high accuracy displacement sensor B15, diamond penetrator supporting rod 8, L type fixed head 14 is fixed on the upper mounting plate B6 by four fastening bolts, and the motionless bottom portion of high precision XZ direction displacement platform 13 then is fastened on L type fixed head 14 perpendicular to installing plate B6 one side by bolt.Impression general assembly plate 12 is connected and fixed on the high precision XZ direction displacement platform 13 movable slide units with bolt again; Press order from top to bottom, under the piezoelectric stack 10 tops contact impression general assembly plate 12 outstanding crossbeams, the U-shaped switching A11 of contact two side-prominent tops, its underpart, epirelief part bottom contacts high-accuracy pressure transducer 9 tops again in the middle of the U-shaped switching A11, last high-accuracy pressure transducer 9 bottoms contact diamond penetrator supporting rod 8, diamond penetrator supporting rod 8 one ends are fastened in impression general assembly plate 12 lower recess by bolt; High accuracy displacement sensor B15 is then in parallel with testing agency with the power transmission that high-accuracy pressure transducer 9, piezoelectric stack 10, U-shaped switching A 11 form, last end in contact impression general assembly plate 12 outstanding crossbeams, following end in contact diamond penetrator supporting rod 8.High-accuracy pressure transducer 9, piezoelectric stack 10, U-shaped switching A 11, high accuracy displacement sensor B 15 are scored general assembly plate 12 like this and are clipped in the middle with diamond penetrator supporting rod 8.The Nano diamond pressure head adds by the bolt clip locking structure and is held in diamond penetrator supporting rod 8 other ends.

So, precise 2-D displacement platform 13 can be realized accurate pressure head two dimension macro position adjustment by manual adjustments, accurate piezoelectric stack 10 can provide accurate power output and minimum displacement output by pulse control mode, the output displacement of piezoelectric stack 10 and power pass to high-accuracy pressure transducer 9 by U-shaped switching A11, and by diamond penetrator supporting rod 8 drive pressure heads, realize that nano impress is pressed into the style test.

Among the present invention under the said in-situ nano impression test module load/displacement signal detecting unit comprise high-accuracy pressure transducer 9, diamond penetrator supporting rod 8, high accuracy displacement sensor B15, high-accuracy pressure transducer 9, piezoelectric stack 10, U-shaped switching A11 series connection, again with high accuracy displacement sensor B15 in-parallel, so, pressure head on the diamond penetrator supporting rod 8 is pressed into power and amplifies the bar amplification through this power, passes to precision pressure sensor 9 and realizes being pressed into the force signal detection; In the time of 8 distortion of diamond penetrator supporting rod distortion is passed to high accuracy displacement sensor B15, can draw the compression distance of diamond penetrator, realize the micrometric displacement input.

Said stretching preloads under the load-on module accurate driver element A and refers to DC servo motor assembly A36 self band scrambler and drag cup planetary reducer among the present invention, speed reduction unit one end is fastened on the motor supporting seat by bolt, and the motor supporting seat connects by bolt again and is fixed on down up below the general assembly plate 2; Motor output shaft connects worm screw by shaft coupling; Scrambler connects driver, and motor driver directly connects computing machine, and by the software control motor, realization power is initially exported.So, realize the quasistatic under the tensile load pattern of test specimen is loaded by gear train, and can provide torque power output and the angular displacement output with small resolution by pulse/direction control mode.

Said stretching preloads that precision drive unit A comprises commutating tooth wheels 40 under the load-on module among the present invention, worm and gear assembly B39, lead screw guide rails assembly B42, bidirectional propulsion bar 35, two-way stretch lower thrust rod 43, rail plate assembly C33, bearing seat B34, DC servo motor assembly A36 output shaft connects the worm shaft of commutating tooth wheels 40 by shaft coupling, the worm gear that can realize one-level deceleration commutating tooth wheels 40 is fixed on the worm and gear assembly B39 worm shaft centre position of double reduction by register pin, and two worm gears of worm and gear assembly B39 of double reduction are separately fixed at two leading screw axle heads of lead screw guide rails assembly B42 by register pin.What select for use among the lead screw guide rails assembly B42 is support end FK series flange supporting base, and the anti-feed screw nut of terminal set nut comes off.Lead screw guide rails assembly B42FK supporting base is fastened on the leading screw holder by bolt, and the leading screw holder is bolted to down above the general assembly plate 2 by two groups, realizes lead screw guide rails fixing at following general assembly plate 2 like this.Lead screw guide rails assembly B42 feed screw nut connects feed screw nut Connection Block B38 by bolt.Connect both sides fixed bearing block C37 above the fixing two guide rails in feed screw nut Connection Block B38 upper end connect 41,41 synchronously by screw.Connect two little axles respectively by two internal bearings, two little axle other ends again respectively wringing fit connect two-way stretch lower thrust rod 43 and two-way stretch upper thrust rod 35 rear ends, 35,43 front ends also are movably connected in the middle of the bearing seat B34 double-slider by same axle, bearing arrangement.Bearing seat B34 is fastened on by screw on the slide block of rail plate assembly C33, and rail plate assembly C33 is fixed on cross-brace plate 32 1 sides by screw again, and cross-brace plate 32 final screws are fixedly connected on down above the general assembly plate 2.And bearing seat B34 simultaneously holds the unit screw with adding above it and fixedlys connected.

So, the output torque that DC servo motor assembly A36 can be provided is realized the deceleration of big degree through commutating tooth wheels 40 and worm and gear assembly B39, increase and turn round purpose, and finally by lead screw guide rails assembly B42 and scissor two power bar pushing mechanism rail plate assembly C33, bearing seat B34, two-way stretch upper thrust rod 35, two-way stretch lower thrust rod 43 will rotatablely move and be converted to accurate straight reciprocating motion, realization loads the quasistatic under the tensile load pattern of test specimen, scissors-type two-way stretch mechanism realizes the two-way stretch of material style when utilizing triangle power amplification principle to guarantee tensile force, guaranteed the observation area the observation visual field to neutrality.

Said stretching preloads that load under the load-on module/displacement signal detects and control module A is made up of high-accuracy pulling force sensor 17, high accuracy displacement sensor 7 among the present invention.Left side anchor clamps installing plate 18 connects high-accuracy pulling force sensor 17,17 other ends by screw and is fixed on again on the pulling force sensor card extender 19.High accuracy displacement sensor 7 main bodys are fastened on the right anchor clamps installing plate 5 by screw, and the probe of high accuracy displacement sensor 7 connects left anchor clamps installing plate 18 by a little extending-board of L type.So, stressed and deflection in the time of can accurately recording the sample material stretching in real time, the analog or digital amount that comprises rate of deformation, the rate of loading feedback signal source as pulse/direction closed loop control mode of DC servo motor assembly A36 can be provided simultaneously, can realize permanent rate of deformation, constant load speed and three kinds of load/unload modes of permanent rate of displacement.

Said stretching preloads that grip unit A comprises that anchor clamps loam cake 16, sample holder sheet group 31, pulling force sensor card extender 19, pressure head are connected platform 21, leading screw holder A24, bearing seat C37, feed screw nut Connection Block B38 with guide rail under the load-on module among the present invention.Be processed with threaded hole above the bearing seat B34, right anchor clamps installing plate 5 is fixedlyed connected with bilateral bearing seat B34 respectively by screw with pulling force sensor card extender 19.Right anchor clamps installing plate 5 is fastened on two slide blocks of rail plate assembly B30 by screw respectively again with pulling force sensor card extender 19, rail plate assembly B30 is fixed on the upper mounting plate A4 by screw, and upper mounting plate A 4 is fixedlyed connected with following general assembly plate 2 by brace table 3.So right anchor clamps installing plate 5, pulling force sensor card extender 19 be fixedly assurance position and the rigidity of the slide block by horizontal and vertical two planes just, rail plate assembly B 30, rail plate assembly C 33 all slide block movement direction unanimities.Left side anchor clamps installing plate 18 is by the high-accuracy pulling force sensor 17 that is threaded, and high-accuracy pulling force sensor 17 other ends are fixed on again on the pulling force sensor card extender 19.Sample holder sheet group 31 is installed in right anchor clamps installing plate 5 with anchor clamps loam cake 16 and left anchor clamps installing plate 18 leans on the machine center line end.The test specimen two ends are installed in sample holder sheet group 31 grooves, are anchor clamps loam cake 16 above, fix, compress by the bolt group.The serrate groove is arranged below the anchor clamps loam cake 16, and compressing can the changing of the relative positions about back assurance test specimen.So, test specimen just compresses the mode positioning clamping by specimen holder loam cake 16, holding piece group 31.

Said bending preloads under the load-on module accurate driver element B and refers to DC servo motor assembly B45 self band scrambler and drag cup planetary reducer among the present invention, speed reduction unit one end is fastened on the supporting seat by bolt, and the motor supporting seat connects by bolt again and is fixed on down up below the general assembly plate 2; Motor output shaft connects worm screw by shaft coupling; Scrambler connects driver, and motor driver directly connects computing machine, and by the software control motor, realization power is initially exported.So, realize the quasistatic under the bending load pattern of test specimen is loaded by gear train, and can provide torque power output and the angular displacement output with small resolution by pulse control mode.

Said bending preloads that the precision drive unit B comprises that bearing seat A25, worm and gear assembly A26, leading screw holder A24, lead screw guide rails assembly A27, feed screw nut Connection Block A23, high-accuracy pressure transducer 22, U-shaped connection B44, pressure head are connected platform 21, rail plate assembly A29, three-point bending testing pressure head 20 with guide rail under the load-on module among the present invention.DC servo motor assembly B45 output shaft connects the worm shaft of the first order worm and gear of worm and gear assembly A26 by shaft coupling, the worm gear of worm and gear assembly A26 first-stage worm gear worm screw group is fixed on the worm and gear group worm shaft of double reduction by register pin, this worm shaft is installed in down on the general assembly plate 2 by two bearing seat A25, and the worm and gear assembly worm gear of double reduction is fixed on lead screw guide rails assembly A27 leading screw axle head by register pin.What select for use among the lead screw guide rails assembly A27 is support end end FK series flange supporting base, and the anti-feed screw nut of terminal set nut comes off.Lead screw guide rails assembly A27FK supporting base is fastened on leading screw holder A24 by bolt, and leading screw holder A24 is bolted to down above the general assembly plate 2 by two groups, realizes lead screw guide rails fixing at following general assembly plate 2 like this.The feed screw nut of lead screw guide rails assembly A27 is connected with feed screw nut Connection Block A23 bolt by adaptor, feed screw nut Connection Block A23 rear portion projection just in time contacts high-accuracy pressure transducer 22 afterbodys, the U-shaped connection B44U type bottom portion of groove of high-accuracy pressure transducer 22 anterior contacts, the both sides of U-shaped connection B44 are fastened on pressure head is connected platform 21 with guide rail boss both sides by screw.Pressure head is connected platform 21 bottoms and is fixed on two slide blocks of rail plate assembly A29 by screw with guide rail, rail plate assembly A29 is fastened on down on the general assembly plate 2 by screw.Three-point bending testing pressure head 20 is fixed on pressure head by screw and is connected platform 21 tops with guide rail.

So, the output speed that DC servo motor assembly B45 can be provided and moment of torsion significantly slow down by worm and gear assembly A26 realization two-stage, increase and turn round purpose, and will rotatablely move by lead screw guide rails assembly A27 and be converted to accurate straight reciprocating motion, finally by advancing feed screw nut Connection Block A23 directly masterpiece to be used in high-accuracy pressure transducer 22 rear ends, high-accuracy pressure transducer 22 leading portions are fixed on the U-shaped connection B44, power is connected platform 21 by the pressure head that U-shaped connection B44 promotes to fix three-point bending testing pressure head 20 again with guide rail, finally drive 20 realizations of three-point bending testing pressure head the quasistatic under the bending load pattern of test specimen is loaded.

Said bending preloads bending load under the load-on module/displacement signal detecting unit B and is made up of with DC servo motor assembly B45 high-accuracy pressure transducer 22 among the present invention.The feed screw nut of lead screw guide rails assembly A27 is connected with feed screw nut Connection Block A23 bolt by adaptor, feed screw nut Connection Block A23 rear portion projection just in time contacts high-accuracy pressure transducer 22 afterbodys, the U-shaped connection B44U type bottom portion of groove of high-accuracy pressure transducer 22 anterior contacts, the both sides of U-shaped connection B44 are fastened on pressure head is connected platform 21 with guide rail boss both sides by screw.So, power must be through 22 conduction of high-accuracy pressure transducer, can accurately record sample material stressed when crooked in real time.By calculating driver record DC servo motor assembly B45 number of revolutions, and extrapolate the material bending deflection by ratio of gear, can provide the analog or digital amount that comprises rate of deformation, rate of loading can realize permanent rate of deformation, constant load speed and three kinds of load/unload modes of permanent rate of displacement as the feedback signal source of DC servo motor assembly B45 pulse/direction closed loop control mode simultaneously.

The said in-situ nano impress tester that preloads based on adjustable stretching-bending is under the clock signal effect among the present invention, the DC servo motor assembly A36 accurate displacement of output continuously realizes the quasistatic under the tensile load pattern of test specimen is loaded by the multi-stage speed-reducing of gear train commutating tooth wheels 40, worm and gear assembly B39, lead screw guide rails assembly B42, bearing seat C37, two-way stretch upper thrust rod 35, two-way stretch lower thrust rod 43, bearing seat B34, cross-brace plate 32.Scissor two power bar pushing mechanism rail plate assembly C33, bearing seat B34, two-way stretch upper thrust rod 35, U-shaped connection B 44 realize that tensile load loads, when realizing two-way stretch, the sample center is good, thereby the geometric center position that guarantees test specimen is in the most central of imaging region all the time, be convenient to observation and image record, utilize triangle power amplification principle simultaneously, can also realize that the power amplification quasistatic that arrives the superelevation ratio at high proportion loads.

The said in-situ nano impress tester that preloads based on adjustable stretching-bending is by the worm and gear assembly A26 of DC servo motor assembly B45 in conjunction with sweep among the present invention, the deceleration conduction of lead screw guide rails assembly A27, power is loaded into earlier on the feed screw nut Connection Block A23, this feed screw nut Connection Block A23 directly is used in masterpiece high-accuracy pressure transducer 22 rear ends again, high-accuracy pressure transducer 22 leading portions are fixed on the U-shaped connection B44, power is connected platform 21 by the pressure head that U-shaped connection B44 promotes to fix three-point bending testing pressure head 20 again with guide rail, finally realize the loading of bending load.Such pressure transducer embedding structure has been saved the space, provides convenience for instrument is inserted scanning electron microscope.

Said whole three layers of compact Layout of solid that adopt of in-situ nano impress tester general assembly that preload based on adjustable stretching-bending among the present invention.All structure members take full advantage of the space, and following general assembly plate 2 is installed on five workbenches of scanning electron microscope with mechanical connection manner by scanning electron microscope coupling assembling 1; Following general assembly plate 2 bottoms are ground floor, power source assembly bearing seat A25, the worm and gear assembly A26 of sweep, DC servo motor assembly B45, stretched portion power source assembly motor driver 28, DC servo motor assembly A 36, commutating tooth wheels 40 are fixed on ground floor; Be the second layer between general assembly base plate 2 tops and upper mounting plate A4 upper mounting plate B6, extension section component drive disk assembly cross-brace plate 32, rail plate assembly C 33, bearing seat B34, two-way stretch upper thrust rod 35, bearing seat C37, feed screw nut Connection Block B38, worm and gear assembly B 39, two guide rails connect 41 synchronously, lead screw guide rails assembly B42, two-way stretch lower thrust rod 43, crooked loading section power transmission component pressure head is connected platform 21 with guide rail, high-accuracy pressure transducer 22, feed screw nut Connection Block A23, leading screw holder A24, worm and gear assembly A26, lead screw guide rails assembly A 27 all installs concentratedly in the second layer; Upper mounting plate A4 and upper mounting plate B6 top are the 3rd layer, comprise nano-indenter test mechanism all components diamond penetrator supporting rod 8, high-accuracy pressure transducer 9, piezoelectric stack 10, U-shaped switching A11, impression general assembly plate 12, high precision XZ direction displacement platform 13, L type fixed head 14, high accuracy displacement sensor B15, stretching adds mounted terminal-clamping device and tensile force/displacement measurement module fixture loam cake 16, high-accuracy pulling force sensor 17, left side anchor clamps installing plate 18, pulling force sensor card extender 19, rail plate assembly B30, load pressure head 20 in sample holder sheet group 31 and the three-point bending and all be installed in the 3rd layer.Three-dimensional three-decker maximization conserve space has increased integral rigidity simultaneously.

The said in-situ nano impress tester nano impress module that preloads based on adjustable stretching-bending among the present invention, when carrying out the in-situ nano impression test, after giving piezoelectric stack 10 electric signal, it will promote high-accuracy pressure transducer 9 pressure diamond penetrator supporting rods 8 by promoting U-shaped switching A11, the final pressure head of realizing is pressed into the style test, and power is passed to high-accuracy pressure transducer 9 by the lever principle amplification, can obtain the pressure delta data more accurately like this, make test result more accurate.

The combination of stretching/two test modules of bending of the said in-situ nano impress tester that preloads based on adjustable stretching-bending among the present invention, upper mounting plate A goes up fixedly rail plate assembly B30, while extension test terminal, right anchor clamps installing plate 5 also is fixed on horizontally disposed being fixed on the rail plate assembly B30 slide block with left anchor clamps installing plate 18, glide direction is vertical with crooked loading force direction, the stretching terminal has been unloaded bending load effectively, improved the precision that bending load loads, guarantee to stretch and do not disturb mutually with the bending load loading, increased integral rigidity simultaneously.

Said sample adds the surface of contact of holding device loam cake 16, sample holder sheet 31 and test specimen and all adopts the line cutting mode to be processed into the knurling structure among the present invention, can improve the reliability of test specimen clamping.Concrete method is to be processed into laciniation respectively two sides.

The said in-situ nano impress tester that preloads based on adjustable stretching-bending among the present invention, on loading direction, totally adopt parallel way to arrange between high accuracy displacement sensor 7 and high-accuracy pulling force sensor 17, sample holder sheet group 31, the anchor clamps loam cake 16, can fully guarantee the structure microminaturization of test platform, and effectively improve the integral rigidity of test platform.

The present invention is divided into four implementation steps in concrete test process: the test specimen that, is installed, install instruments; Two, stretching-bending load prestrain; Three, in-situ nano impression test; Four, scanning electron microscope home position observation and record data.Test specimen is before carrying out impression stretch bending composite test, need to adopt wire-electrode cutting and processing method trial-production place to have the standard specimen of stress weakness zone or precognition breach, and handle the better surface smoothness obtain can be used for the monitoring of high resolving power micro-imaging by single-sided polishing, or obtain microstructures such as metallographic by technologies such as chemical corrosions.

In conjunction with Fig. 1, Fig. 4, Fig. 5, the first step: the test specimen that is installed, install instruments.General assembly plate 2 is mounted on five workbenches of scanning electron microscope with mechanical connection manner by wedge shape scanning electron microscope coupling assembling 1 under the in-situ nano impress tester that preloads based on adjustable stretching-bending in the test, instrument at this time keeps one 39 ° the elevation angle with surface level, make things convenient for scanning electron microscope to the patterned surface imaging.Afterwards, test specimen is placed in the location that the groove shape structure place of sample holder sheet group 31 realizes the style vertical axis, adds a cover anchor clamps loam cake 16 afterwards and fix with screw-driving, utilize the serrate groove of anchor clamps loam cake 16 bottoms to realize axial clamping and location.It is accurate with the position that guarantees test specimen to utilize level meter or clock gauge to adjust clamping device.By adjusting impression test module and the crooked Two-axes Position Mechanism that preloads load-on module, make diamond penetrator on the diamond penetrator supporting rod 8 and three-point bending testing pressure head 20 be in test specimen directly over or dead ahead and keep roughly reasonable distance.On this basis, trickle adjustment high precision XZ direction displacement platform 13 makes diamond penetrator be positioned at suitable position, the optimum distance before keeping being pressed into.Pose by five workbenches of Electronic Speculum system adjustment obtains best observation angle at last, namely calibrate the position of drafting test point of test specimen after, close scanning electron microscope vacuum chamber sealing hatch door.Open the scanning electron microscope power supply, by the operating distance of adjustment scanning electron microscope and the Z-direction position of diamond penetrator or crooked pressure head, finish the imaging multiplying power of test specimen and the adjustment of observation area.

In conjunction with Fig. 2, Fig. 6, Fig. 7, second step: bending load prestrain.Physical construction aspect: by the computer control motor driver, under the clock signal effect of motor driver output, DC servo motor assembly B45 power output and displacement pass to sweep worm and gear assembly A26 and lead screw guide rails assembly A27, realize double reduction power amplification conduction.Lead screw guide rails assembly A27 is converted into straight-line displacement with rotational displacement again, power passes to feed screw nut Connection Block A23, feed screw nut Connection Block A23 directly is used in masterpiece high-accuracy pressure transducer 22 rear ends again, high-accuracy pressure transducer 22 leading portions are fixed on the U-shaped connection B44, power is connected platform 21 by the pressure head that U-shaped connection B44 promotes to fix three-point bending testing pressure head 20 so again with guide rail, three-point bending testing pressure head 20 is perpendicular to test specimen length direction loading force, big retarding is finally realized the loading of the bending load of 20 pairs of samples of three-point bending pressure head than quasistatic load bending power.

Detect the control aspect: high-accuracy pressure transducer 22 is formed bending with DC servo motor assembly B45 and is preloaded bending load under the load-on module/displacement signal detecting unit, and high-accuracy pressure transducer 22 can accurately record sample material stressed when crooked in real time.By calculating driver record DC servo motor assembly B45 number of revolutions, and extrapolate the material bending deflection by ratio of gear, can provide the analog or digital amount that comprises rate of deformation, rate of loading can realize permanent rate of deformation, constant load speed and three kinds of load/unload modes of permanent rate of displacement as the feedback signal source of DC servo motor assembly B45 pulse/direction closed loop control mode simultaneously;

In conjunction with Fig. 2, Fig. 3, Fig. 8, second step: tensile load prestrain.Physical construction aspect: by the computer control motor driver, under the clock signal effect of motor driver output, the DC servo motor assembly A36 accurate displacement of output continuously realizes the quasistatic under the tensile load pattern of test specimen is loaded by the multi-stage speed-reducing of tensile load prestrain module underdrive unit commutating tooth wheels 40, worm and gear assembly B39, lead screw guide rails assembly B42, bidirectional propulsion bar 35, two-way stretch lower thrust rod 43, rail plate assembly C33, bearing seat B 34.In this process, the planet cup speed reduction unit that precision DC servomotor 36 carries carries out the first order and slows down, power and angular displacement are delivered to worm and gear group 39 and lead screw guide rails assembly B42 and carry out the second level and slow down and simultaneously angular displacement is converted into straight-line displacement, and novel scissors type bidirectional propulsion bar two-way stretch upper thrust rod 35, to stretching lower thrust rod 43 by triangle power amplification principle, longitudinal thrust is converted into horizontal two-way pulling force, guaranteed the observation area the observation visual field to neutrality.Also power is amplified when having realized two-way stretch, three grades of decelerations have guaranteed that really the two-way quasistatic of tensile force loads;

Detect the control aspect: high-accuracy pulling force sensor 17, high accuracy displacement sensor 7 are formed stretching and are preloaded load under the load-on module/displacement signal detection and control module, stressed and deflection in the time of can accurately recording the sample material stretching in real time, the analog or digital amount that comprises rate of deformation, the rate of loading feedback signal source as pulse/direction closed loop control mode of DC servo motor assembly A36 can be provided simultaneously, can realize permanent rate of deformation, constant load speed and three kinds of load/unload modes of permanent rate of displacement;

In conjunction with Fig. 3, Fig. 9, the 3rd step, in-situ nano impression test.When carrying out the in-situ nano impression test, trickle adjustment high precision XZ direction displacement platform 13 makes diamond penetrator be positioned at suitable position, the optimum distance before keeping being pressed into.Set parameters such as the loading force of in-situ mechanical test or displacement by program interface, send instruction by PC to hyperchannel servo driving controller and Piezoelectric Driving power supply.After giving piezoelectric stack 10 electric signal, piezoelectric stack 10 will pass to high-accuracy pressure transducer 9 with power and displacement by promoting U-shaped switching A11, promote precision pressure sensor 9 and press diamond penetrator supporting rod 8, a be installed end of bar 8 of diamond penetrator is line cutting flexible hinges, be fixed on the impression general assembly plate 12, after diamond penetrator supporting rod 8 was subjected to the downforce of high-accuracy pressure transducer 9, the diamond penetrator of front end pressed down, and realized that finally pressure head is pressed into the style test.The power that is pressed into of nano-indenter test is passed to high-accuracy pressure transducer 9 by the lever principle amplification, can obtain the pressure delta data more accurately.In the time of 8 distortion of diamond penetrator supporting rod distortion is passed to high accuracy displacement sensor B15, can draw the compression distance of diamond penetrator, realize the micrometric displacement input.

The 4th step is by scanning electron microscope home position observation and record data.Realize picking up pressure head loading of pressing in and compression distance signal by high-resolution power sensor and displacement transducer, by acquisition software data acquisition and processing are obtained loading of pressing in-depth relationship curve, calculate material at mechanics parameters such as the hardness in different stretch stage or crooked stage, elastic modulus according to the Elastic Contact theory, realized that the real-time mechanics Performance Detection of material surface and specimen surface mechanical property distribution detect in material extending or the crooked test.In conjunction with accurate detecting, initially contacting detection, control module and algorithm routine, also can guarantee to stretch/compressive load prestrain test module, the loading sequential of bending load prestrain test module and nano-indenter test module selects arbitrarily.

In the observation, under the low enlargement ratio of scanning electron microscope, the test piece deformation zone is scanned earlier in position, find test piece deformation damage weakness zone after, improve enlargement ratio in-situ observation carried out in distortion of materials damage in the test.Sensor detects in real time to stretch mode external load F in the in-situ test, the test piece deformation amount by precise displacement sensor by picking up two relative displacements between the test specimen clamping device synchronously.On this basis, multiple signals are sent into computing machine by analog to digital conversion and after the necessary signals conditioning.Can obtain the mechanics parameters such as stress-strain curve, elastic modulus, hardness and yield strength of exosyndrome material mechanical property in real time by algorithm routine.

The in-situ nano impress tester that preloads based on adjustable stretching-bending that the present invention relates to belongs to electromechanical integration quasi-instrument category.Test platform in conjunction with traditional at the three-dimensional macro test specimen more than the characteristic dimension centimetre-sized, can realize stretching-bending to material in-situ nano impression test under preloading, and can realize and Hitachi TM-1000 type scanning electron microscope and all kinds of compatible use of Image-forming instrument with cavity and objective table structure.Small-sized stretching-bending by high integration preloads charger when realizing MATERIALS ' DYNAMIC stretch bending, utilize piezoelectric principle to drive diamond penetrator and realize the nanoscale impression test, realize picking up pressure head loading of pressing in and compression distance signal by high-resolution power sensor and displacement transducer, by acquisition software data acquisition and processing are obtained loading of pressing in-depth relationship curve, calculate the hardness of material in different stretch stage or crooked stage according to the Elastic Contact theory, mechanics parameters such as elastic modulus have been realized the real-time mechanics Performance Detection of material surface and the detection of specimen surface mechanical property distribution in material extending or the crooked test.In conjunction with accurate detecting, initially contacting detection, control module and algorithm routine, also can guarantee to stretch/compressive load prestrain test module, the loading sequential of bending load prestrain test module and nano-indenter test module selects arbitrarily.Volume of the present invention is small and exquisite, compact conformation, strain rate is controlled, has good structure compatible, vacuum compatibility and Electro Magnetic Compatibility with Image-forming instruments such as all kinds of main flow scanning electron microscope, atomic force microscope, Raman spectrometer, X-ray diffractometer and optical microscopes.Can more than carrying out at the characteristic dimension centimetre-sized under the observation of all kinds of Image-forming instruments, the yardstick material extending-bending of striding of three-dimensional test specimen preload in-situ nano impression test down, material is carried out on-line monitoring at microdeformation, damage and the fracture process of compound drawing-bend under the effect of preloading, for disclosing the behavior of material microdeformation and damage mechanism provides brand-new method of testing.

The above is preferred embodiment of the present invention only, is not limited to the present invention, and for a person skilled in the art, the present invention can have various changes and variation.All any modifications that the present invention is done, be equal to replacement, improvement etc., all should be included within protection scope of the present invention.

Claims (10)

1. in-situ nano impress tester that preloads based on adjustable stretching-bending, it is characterized in that: comprise in-situ nano impression test module, stretching preloads load-on module and bending preloads load-on module, described in-situ nano impression test module is made up of accurate displacement/power loading unit and load/displacement signal detecting unit; Stretching preloads load-on module and is made up of accurate driver element A, precision drive unit A, load/displacement signal detection and control module A and grip unit A; Bending preloads load-on module and is made up of accurate driver element B, precision drive unit B, load/displacement signal detection and control module B;

Accurate displacement/power loading unit comprises high precision XZ direction displacement platform (13), piezoelectric stack (10), U-shaped switching A(11 under the described in-situ nano impression test module), high-accuracy pressure transducer (9), high accuracy displacement sensor B(15) and diamond penetrator supporting rod (8), L type fixed head (14) bolt is in upper mounting plate B(6), the motionless bottom of high precision XZ direction displacement platform (13) portion connects L type fixed head (14) vertical side; Impression general assembly plate (12) is connected in the movable slide unit of high precision XZ direction displacement platform (13) with bolt; From top to bottom, under the outstanding crossbeam of piezoelectric stack (10) top contact impression general assembly plate (12), the U-shaped switching A(11 of its underpart contact) two side-prominent tops, U-shaped switching A(11) epirelief part bottom contacts high-accuracy pressure transducer (9) top again, last high-accuracy pressure transducer (9) bottom contact diamond penetrator supporting rod (8), diamond penetrator supporting rod (8) one terminal bolts are fixedly connected in impression general assembly plate (12) lower recess; High accuracy displacement sensor B(15) goes up the outstanding crossbeam of end in contact impression general assembly plate (12), following end in contact diamond penetrator supporting rod (8);

Load/displacement signal detecting unit comprises high-accuracy pressure transducer (9), diamond penetrator supporting rod (8) and high accuracy displacement sensor B(15 under the described in-situ nano impression test module), described high-accuracy pressure transducer (9), piezoelectric stack (10), U-shaped switching A(11) series connection, again with high accuracy displacement sensor B(15) in parallel, high-accuracy pressure transducer (9), piezoelectric stack (10), U-shaped switching A(11) and high accuracy displacement sensor B(15) be scored general assembly plate (12) and diamond penetrator supporting rod (8) and be clipped in the middle; So, the pressure head on the diamond penetrator supporting rod (8) is pressed into power and amplifies the bar amplification through this power, passes to precision pressure sensor (9) and realizes being pressed into the force signal detection; In diamond penetrator supporting rod (8) distortion time, pass to high accuracy displacement sensor B(15 with distortion), draw the compression distance of diamond penetrator, realize the micrometric displacement input.

2. the in-situ nano impress tester that preloads based on adjustable stretching-bending according to claim 1, it is characterized in that: described stretching preloads that accurate driver element A refers to DC servo motor assembly A(36 under the load-on module) be connected with following general assembly plate (2) by supporting seat, motor output shaft connects worm screw by shaft coupling; Scrambler connects driver, motor driver and directly connects computing machine, and by the software control motor, realization power is initially exported; So, realize the quasistatic under the tensile load pattern of test specimen is loaded by gear train, and can provide torque power output and the angular displacement output with small resolution by pulse/direction control mode.

3. the in-situ nano impress tester that preloads based on adjustable stretching-bending according to claim 1, it is characterized in that: described stretching preloads that precision drive unit A comprises commutating tooth wheels (40) under the load-on module, worm and gear assembly B(39), lead screw guide rails assembly B(42), bidirectional propulsion bar (35), two-way stretch lower thrust rod (43), rail plate assembly C(33), bearing seat B (34), DC servo motor assembly A(36) output shaft connects the worm shaft of commutating tooth wheels (40), commutating tooth wheels (40) worm gear is fixed on worm and gear assembly B(39) in the middle of the worm shaft, worm and gear assembly B(39) two worm gears are fixed on lead screw guide rails assembly B(42) the leading screw axle head; Lead screw guide rails assembly B(42) is fixed on down on the general assembly plate (2) by the leading screw cage bolt; Its feed screw nut connects feed screw nut Connection Block B(38), thick stick nut Connection Block B(38) the fixing two guide rails in upper end connect (41) synchronously, two guide rails connect both sides fixed bearing block C(37 above (41) synchronously); Two internal bearings connect little axle respectively, the little axle other end connects two-way stretch lower thrust rod (43) and two-way stretch upper thrust rod (35) rear end, and two-way stretch upper thrust rod (35), two-way stretch lower thrust rod (43) front end are by shafting structure coupling shaft bearing B(34) double-slider; Bearing seat B(34) be fastened on rail plate assembly C(33 by screw) slide block on; And bearing seat B(34) simultaneously hold the unit screw with adding above it and fixedly connected.

4. the in-situ nano impress tester that preloads based on adjustable stretching-bending according to claim 1, it is characterized in that: described stretching preloads load under the load-on module/displacement signal detection and control module A is made up of high-accuracy pulling force sensor (17), high accuracy displacement sensor (7), left side anchor clamps installing plates (18) screw connects high-accuracy pulling force sensor (17), and high-accuracy pulling force sensor (17) other end is fixed on again on the pulling force sensor card extender (19); High accuracy displacement sensor (7) main body is fixed on the right anchor clamps installing plate (5), and the probe of high accuracy displacement sensor (7) is connected with left anchor clamps installing plate (18); So, stressed and deflection in the time of can accurately recording the sample material stretching in real time, simultaneously can provide the analog or digital amount that comprises rate of deformation, rate of loading as DC servo motor assembly A(36) the feedback signal source of pulse/direction closed loop control mode, can realize permanent rate of deformation, constant load speed and three kinds of load/unload modes of permanent rate of displacement.

5. the in-situ nano impress tester that preloads based on adjustable stretching-bending according to claim 1, it is characterized in that: described stretching preloads that grip unit A comprises anchor clamps loam cake (16) under the load-on module, sample holder sheet group (31), pulling force sensor card extender (19), pressure head is connected platform (21) with guide rail, leading screw holder A(24), bearing seat C(37), feed screw nut Connection Block B(38), right anchor clamps installing plates (5) and pulling force sensor card extender (19) respectively with bilateral bearing seat B(34) fixing, right anchor clamps installing plates (5) are separately fixed at rail plate assembly B(30 with pulling force sensor card extender (19)) on two slide blocks, rail plate assembly B(30) guide rail is fixed on upper mounting plate A(4) on; Rail plate assembly B(30), slide block movement direction unanimity rail plate assembly C(33); Left side anchor clamps installing plates (18) connect high-accuracy pulling force sensor (17) by screw, and high-accuracy pulling force sensor (17) other end is fixed on the pulling force sensor card extender (19); Sample holder sheet group (31) is installed in right anchor clamps installing plate (5) with anchor clamps loam cake (16) and left anchor clamps installing plate (18) leans on machine center line one end; The anchor clamps loam cake has the serrate groove below (16); So, test specimen just compresses the mode positioning clamping by anchor clamps loam cake (16), holding piece group (31).

6. the in-situ nano impress tester that preloads based on adjustable stretching-bending according to claim 1 is characterized in that: described bending preloads that accurate driver element B refers to DC servo motor assembly B(45 under the load-on module) be bolted to down up under the general assembly plate (2) by supporting seat; Motor output shaft connects worm screw by shaft coupling; Scrambler connects driver, and motor driver directly connects computing machine, and by the software control motor, realization power is initially exported; So, realize the quasistatic under the bending load pattern of test specimen is loaded by gear train, and can provide torque power output and the angular displacement output with small resolution by pulse control mode;

Described bending preloads that the precision drive unit B comprises bearing seat A(25 under the load-on module), worm and gear assembly A(26), leading screw holder A(24), lead screw guide rails assembly A(27), feed screw nut Connection Block A(23), high-accuracy pressure transducer (22), U-shaped connection B(44), pressure head is connected platform (21) with guide rail, rail plate assembly A(29), three-point bending testing pressure head (20), DC servo motor assembly B(45) output shaft connect by shaft coupling change worm and gear assembly A(26), worm and gear assembly A(26) second-stage worm gear is fixed on lead screw guide rails assembly A(27) the leading screw axle head; Lead screw guide rails assembly A(27) by leading screw holder A(24) be fixed on down on the general assembly plate (2); Its feed screw nut connects feed screw nut Connection Block A(23 by adaptor), feed screw nut Connection Block A(23) rear portion projection contact high-accuracy pressure transducer (22) afterbody, U-shaped the connections B(44 of the anterior contact of high-accuracy pressure transducer (22)) U-shaped bottom portion of groove, U-shaped connection B(44) both sides are consolidated and are connected platform (21) boss both sides with guide rail at pressure head; Guide rail connects platform (21) bottom and connects rail plate assembly A(29) slide block; Three-point bending testing pressure head (20) is fixed on pressure head by screw and is connected upward plane of platform (21) with guide rail;

Described bending preloads bending load under the load-on module/displacement signal detecting unit B by high-accuracy pressure transducer (22) and DC servo motor assembly B(45) form, lead screw guide rails assembly A(27) feed screw nut is by adaptor and feed screw nut Connection Block A(23) bolt is connected, feed screw nut Connection Block A(23) rear portion projection contact high-accuracy pressure transducer (22) afterbody, the U-shaped connection B(44 of the anterior contact of high-accuracy pressure transducer (22)) both sides U-shaped bottom portion of groove, U-shaped connection B(44) are fastened on pressure head is connected platform (21) with guide rail boss both sides by screw.

7. the in-situ nano impress tester that preloads based on adjustable stretching-bending according to claim 2, it is characterized in that: the accurate displacement of output continuously under the clock signal effect described DC servo motor assembly A(36), realize the quasistatic under the tensile load pattern of test specimen is loaded by the multi-stage speed-reducing of gear train, gear train is by commutating tooth wheels (40), worm and gear assembly B(39), lead screw guide rails assembly B(42), bearing seat C(37), two-way stretch upper thrust rod (35), two-way stretch lower thrust rod (43), bearing seat B(34), cross-brace plate (32) constitutes; Scissor two power bar pushing mechanism rail plate assembly C(33), bearing seat B(34), two-way stretch upper thrust rod (35), two-way stretch lower thrust rod (43) realize that tensile load loads, when realizing two-way stretch, the sample center is good, thereby the geometric center position that guarantees test specimen is in the most central of imaging region all the time, be convenient to observation and image record, utilize triangle power amplification principle simultaneously, can also realize that the power amplification quasistatic that arrives the superelevation ratio at high proportion loads.

8. according to claim 5 or the 6 described in-situ nano impress testers that preload based on adjustable stretching-bending, it is characterized in that: described DC servo motor assembly B(45) in conjunction with the worm and gear assembly A(26 of sweep), lead screw guide rails assembly A(27) deceleration conduction, power is loaded into feed screw nut Connection Block A(23 earlier) on, this feed screw nut Connection Block A(23) directly masterpiece is used in high-accuracy pressure transducer (22) rear end again, high-accuracy pressure transducer (22) leading portion is fixed on U-shaped connection B(44) on, power is again by U-shaped connection B(44) pressure head that promotes to fix three-point bending testing pressure head (20) is connected platform (21) with guide rail, finally realize the loading of bending load.

9. the in-situ nano impress tester that preloads based on adjustable stretching-bending according to claim 1, it is characterized in that: the described in-situ nano impress tester that preloads based on adjustable stretching-bending adopts three-dimensional three layers of all structure member of compact Layout, and following general assembly plate (2) is installed on five workbenches of scanning electron microscope with mechanical connection manner by scanning electron microscope coupling assembling (1); Following general assembly plate (2) bottom is ground floor, the power source assembly bearing seat A(25 of sweep), worm and gear assembly A(26), DC servo motor assembly B(45), stretched portion power source assembly motor driver (28), DC servo motor assembly A(36), commutating tooth wheels (40) are fixed on ground floor; General assembly base plate (2) top and upper mounting plate A(4), upper mounting plate B(6) be the second layer between, extension section component drive disk assembly cross-brace plate (32), rail plate assembly C(33), bearing seat B(34), two-way stretch upper thrust rod (35), bearing seat C(37), feed screw nut Connection Block B(38), worm and gear assembly B(39), two guide rails connect (41) synchronously, lead screw guide rails assembly B(42), two-way stretch lower thrust rod (43), crooked loading section power transmission component pressure head is connected platform (21) with guide rail, high-accuracy pressure transducer (22), feed screw nut Connection Block A(23), leading screw holder A(24), worm and gear assembly A(26), lead screw guide rails assembly A(27) all installs concentratedly in the second layer; Upper mounting plate A(4) with upper mounting plate B(6) top is the 3rd layer, comprise nano-indenter test mechanism all components diamond penetrator supporting rod (8), high-accuracy pressure transducer (9), piezoelectric stack (10), U-shaped switching A(11), impression general assembly plate (12), high precision XZ direction displacement platform (13), L type fixed head (14), high accuracy displacement sensor B(15), stretching adds mounted terminal-clamping device and tensile force/displacement measurement module fixture loam cake (16), high-accuracy pulling force sensor (17), left side anchor clamps installing plates (18), pulling force sensor card extender (19), rail plate assembly B(30), load pressure head (20) in sample holder sheet group (31) and the three-point bending and all be installed in the 3rd layer.

10. the in-situ nano impress tester that preloads based on adjustable stretching-bending according to claim 4 is characterized in that: totally adopt parallel way to arrange between described high accuracy displacement sensor (7) and high-accuracy pulling force sensor (17), sample holder sheet group (31), the anchor clamps loam cake (16) on loading direction.

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