CN103308404B - In-situ nano-indentation tester based on adjustable stretching-bending preload - Google Patents

Abstract

The invention relates to an in-situ nano-indentation tester based on an adjustable stretching-bending preload, and belongs to the field of electromechanical precision scientific instruments. The in-situ nano-indentation tester comprises an in-situ nano-indentation testing module, a stretching preload loading module and a bending preload loading module, wherein the in-situ nano-indentation testing module consists of a precision displacement/force loading unit and a load/displacement signal detection unit; the stretching preload loading module consists of a precision driving unit A, a precision transmission unit A, a load/displacement signal detection and control unit A and a clamping unit A; the bending preload loading module consists of a precision driving unit B, a precision transmission unit B, and a load/displacement signal detection and control unit B. The in-situ nano-indentation tester has the advantages of small size, compact structure and high testing precision; supplied test contents are rich; the deformation/displacement/load rate can be controlled; the in-situ nano-indentation tester can be arranged on carrying platforms of various main-stream electronic microscopic vacuum cavities and is compatible with imaging equipment; the application range is wide.

Description

Based on adjustable stretching-bending in-situ nano-indentation tester preloaded

Technical field

The present invention relates to mechanical-electrical integration precision scientific instrument field, particularly a kind of based on adjustable stretching-bending in-situ nano-indentation tester preloaded.

Background technology

Original position micro nanometer mechanics measuring technology refers to carries out in Mechanics Performance Testing process to material for test under micro-nano-scale, by electron microscope, atomic force microscope and or the Image-forming instrument such as optical microscope material under load effect is occurred microdeformation, damage is until the process of failure damage carries out a kind of mechanical test technology of omnidistance dynamic monitoring.In the category that many nanometer mechanics are tested, elastic modulus, yield strength, tensile strength, bending strength, bending modulus, hardness, the parameters such as shear modulus are the topmost research objects in characteristic of material mechanics test, various test is created for these mechanical quantities, as stretching/compressing method, three-point bending method, Using Nanoindentation etc., the rule of material deformation damage under extraneous load effect certainly will can be disclosed by the in-situ mechanical means of testing of the stretch bending impression pattern of the most direct exosyndrome material mechanical property, find more novel phenomenon and rule, the relevant test carried out with regard to large-size test specimen is by the true mechanical behavior that is more conducive under research material and goods service state thereof and deformation damage mechanism.

At present, original position micro-nano impression stretch bending composite test still locates bud, be in particular in: (1) is subject to the restriction of the cavity space of scanning electron microscope, current majority all concentrates on based on micro-/nano electromechanical systems technique, in test to the atomic minor structure such as nanometer and membraneous material, lack the trans-scale in-situ nanometer mechanical test to macro-size (membraneous material or three-dimensional test specimen), because of the existence of size effect, the research of micro structures is constrained to the evaluation of the mechanical property to large-size element; (2) from means of testing and method, mainly carry out single stretching or crooked test by business-like instrument, show cost of equipment costliness, load mode is single, the feature that content measurement is of inadequate achievement, to compact conformation, compact, the in-situ testing device of the impression stretch bending compound loading that preload is various rarely has to be mentioned, greatly constrains going deep into and development of research.(3) from observation method, because being limited to the service condition of scanning electron microscope, for macroscopical test specimen, be confined to the in-situ test under optical microscope and atomic force microscope more, optical microscope also exists the problem of obvious enlargement ratio deficiency, atomic force microscope then has the excessively slow shortcoming of image taking speed, and two kinds of observation procedures are all difficult to further investigate the affecting laws of load change to material behavior and damage mechanisms.

And under actual condition all parts in operational process and product in use, subject from the multi-form composite force effect of different directions all to a certain extent, the Main Basis of the selection of material is its usability, shop characteristic and economy, wherein usability is first demand fulfillment, particularly material mechanical performance design of material and use the main target pursued often targetedly.The mechanical property of Knowing material in actual condition and affect the various factors of material mechanical performance is one of most important content in all test events.

Therefore, design a kind of compact, compact conformation, measuring accuracy is high, the microdeformation of the imaging system on-line monitoring such as electron microscope macroscopic view test specimen under stretch bending preloads effect and damage process can be utilized, load based on quasistatic stretch bending load, material stress under actual condition can be simulated better, in-situ nano impression test is carried out to material and the mechanical test platform of real-time monitored test result is very necessary simultaneously.

Summary of the invention

The object of the present invention is to provide a kind of based on adjustable stretching-bending in-situ nano-indentation tester preloaded, solve the problems referred to above that prior art exists.The present invention can independently use, the situation of change of test material mechanical property parameters and the mechanics parameter such as hardness, elastic modulus under different stretch-bending preloaded condition.Particularly this apparatus structure is compact small, can with scanning electron microscope (SEM), atomic force microscope (AFM), laser confocal microscope, metaloscope, Raman spectrometer, the material properties test instrument compatibilities such as super depth of field micro imaging system and other optical microscope use, in conjunction with these material properties test instruments, the microdeformation behavior of material under the effect of dynamic monitors load, damage mechanisms and and correlativity rule between load effect and material property, the heterogeneous microstructure that announcement material macromechanics behavior and load effect cause changes, the rule that performance weakens, the present invention can realize synchronous acquisition to load/displacement signal and control.Relative to the single test of offing normal of traditional mechanics testing experiment machine, to present invention can be implemented under high resolving power micro imaging system for the original position stretch bending impression composite test of more than characteristic dimension centimetre-sized macroscopical test specimen and observation, solve the limitation mostly for nanotube, line and membraneous material in existing situ measurement study simultaneously.The trace stretch bending composite mode that test platform can realize " Ultra-Low Speed quasistatic " loads, the synchronous acquisition of each load/displacement signal and precise closed-loop control, and can realize using with Hitachi TM-1000 type scanning electron microscope and all kinds of Image-forming instrument compatibility with cavity and carrier structure.The mechanics parameters such as the elastic modulus of material, yield strength, tensile strength, bending strength and hardness are obtained by original position trace stretch bending composite test, in-situ monitoring is carried out to the microdeformation of material, damage and fracture process, for disclosing the mechanical characteristic of material under nanoscale and damage mechanisms provides method of testing.

Above-mentioned purpose of the present invention is achieved through the following technical solutions:

Based on adjustable stretching-bending in-situ nano-indentation tester preloaded, comprise in-situ nano impression test module, stretching to preload load-on module and bend preloads load-on module, described in-situ nano impression test module is made up of accurate displacement/power loading unit and load/displacement signal detecting unit; Stretching preloads load-on module and is made up of precision actuation unit A, precision drive unit A, load/displacement signal detection and control module A and grip unit A; The bending load-on module that preloads is made up of precision actuation unit B, precision drive unit B, load/displacement signal detection and control module B; Each subelement composition modules, and finally form complete machine by three modules.

Under described in-situ nano impression test module, accurate displacement/power loading unit comprises high precision XZ direction displacement platform 13, piezoelectric stack 10, U-shaped switching A11, high-accuracy pressure transducer 9, high accuracy displacement sensor B15 and diamond penetrator supporting rod 8, L-type fixed head 14 bolt is fixed on upper mounting plate B6, and high precision XZ direction displacement platform 13 motionless bottom portion connects L-type fixed head 14 vertical side; Impression general assembly plate 12 is connected to the movable slide unit of high precision XZ direction displacement platform 13 with bolt; From top to bottom, under crossbeam given prominence to by piezoelectric stack 10 top contact impression general assembly plate 12, top is given prominence in the U-shaped switching A11 both sides of contact, its underpart, U-shaped switching A11 epirelief section lower contacts again high-accuracy pressure transducer 9 top, last high-accuracy pressure transducer 9 lower contacts diamond penetrator supporting rod 8, diamond penetrator supporting rod 8 one terminal bolt is fixedly connected in impression general assembly plate 12 lower recess; High accuracy displacement sensor B15 upper-end contact impression general assembly plate 12 gives prominence to crossbeam, lower end in contact diamond penetrator supporting rod 8;

So, precise 2-D displacement platform 13 manually regulates and can realize accurate pressure head two dimension macro position adjustment.Accurate piezoelectric stack 10 provides accurate power to export by pulse control mode and minimum displacement exports, the output displacement of piezoelectric stack 10 and power pass to high-accuracy pressure transducer 9 by U-shaped switching A11, high-accuracy pressure transducer 9 presses down diamond penetrator supporting rod 8 and drives front end pressure head, realizes the test of nano impress pressing in sample.

Under described in-situ nano impression test module, load/displacement signal detecting unit comprises high-accuracy pressure transducer 9, diamond penetrator supporting rod 8, high accuracy displacement sensor B15, high-accuracy pressure transducer 9, piezoelectric stack 10, U-shaped switching A11 are connected, in parallel with high accuracy displacement sensor B15 again, high-accuracy pressure transducer 9, piezoelectric stack 10, U-shaped switching A11 and high accuracy displacement sensor B15 are scored general assembly plate 12 and are clipped in the middle with diamond penetrator supporting rod 8; So, the pressure head pressing-in force on diamond penetrator supporting rod 8 amplifies bar through this power and amplifies, and passes to precision pressure sensor 9 to realize pressing-in force input; Diamond penetrator supporting rod 8 be out of shape while by displacement transfer to high accuracy displacement sensor B15, the compression distance of diamond penetrator can be drawn, realize micrometric displacement input.

Described stretching is preloaded precision actuation unit A under load-on module and refers to DC servo motor assembly A36 and be connected with lower general assembly plate 2 by supporting seat, and motor output shaft is by shaft coupling connecting worm; Scrambler connects driver, and motor driver directly connects computing machine, by software control motor, realizes power and initially exports; So, realized the semi-static load under the tensile load pattern of test specimen by gear train, and provide the torque power with small resolution to export and angular displacement output by pulse/direction controlling mode;

Under described stretching preloads load-on module, precision drive unit A comprises commutating tooth wheels 40, worm and gear assembly B39, lead screw guide rails assembly B42, bidirectional propulsion bar 35, two-way stretch lower thrust rod 43, rail plate assembly C33, bearing seat B34, DC servo motor assembly A36 output shaft connects the worm shaft of commutating tooth wheels 40, commutating tooth wheels 40 worm gear is fixed in the middle of worm and gear assembly B39 worm shaft, and worm and gear assembly B39 two worm gear is fixed on lead screw guide rails assembly B42 leading screw axle head; Lead screw guide rails assembly B42 is fixed on lower general assembly plate 2 by leading screw cage bolt; Its feed screw nut connects feed screw nut Connection Block B38, the fixing two guide rail synchronized links 41 in thick stick nut Connection Block B38 upper end, and two guide rail synchronized links 41 is both sides fixed bearing block C37 above; Two internal bearings connect little axle respectively, and the little axle other end connects two-way stretch lower thrust rod 43 and two-way stretch upper thrust rod 35 rear end, and two-way stretch upper thrust rod 35, two-way stretch lower thrust rod 43 front end are by shafting structure coupling shaft bearing B34 double-slider; Bearing seat B34 be connected by screw be fixed on rail plate assembly C33 slide block on; And bearing seat B34 is fixedly connected with the blessing unit screw above it simultaneously;

So, the output torque that DC servo motor assembly A36 can be provided realizes the deceleration of large degree through commutating tooth wheels 40 and worm and gear assembly B39, increase and turn round object, and eventually through scissor two power bar pushing mechanisms, i.e. rail plate assembly C33, bearing seat B34, bidirectional propulsion bar 35, rotary motion is converted to accurate straight reciprocating motion by U-shaped connection B44, realize the semi-static load under the tensile load pattern of test specimen, scissors-type two-way stretch mechanism realizes the two-way stretch of material style while utilizing triangle power amplification principle to ensure tensile force, ensure that the centering of observation area in the observation visual field.

Described stretching preloads load/displacement signal under load-on module and to detect and control module A is made up of high-accuracy pulling force sensor 17, high accuracy displacement sensor 7, left fixture installing plate 18 screw connects high-accuracy pulling force sensor 17, and high-accuracy pulling force sensor 17 other end is fixed on again on pulling force sensor card extender 19; High accuracy displacement sensor 7 main body is fixed on right fixture installing plate 5, and the probe of high accuracy displacement sensor 7 is connected with left fixture installing plate 18; So, accurately can record force and deformation amount when sample material stretches in real time, can provide simultaneously comprise rate of deformation, rate of loading analog or digital amount as the feedback signal source of the pulse/direction closed loop control mode of DC servo motor assembly A36, permanent rate of deformation, constant loading rate and permanent rate of displacement three kinds of load/unload modes can be realized;

Under described stretching preloads load-on module, grip unit A comprises fixture upper cover 16, sample holder sheet group 31, pulling force sensor card extender 19, pressure head and guide rail connected unit 21, leading screw holder A24, bearing seat C37, feed screw nut Connection Block B38, right fixture installing plate 5 is fixed with double-sided bearings seat B34 respectively with pulling force sensor card extender 19, right fixture installing plate 5 is separately fixed on rail plate assembly B30 two slide blocks with pulling force sensor card extender 19, and rail plate assembly B30 guide rail is fixed on upper mounting plate A4; Rail plate assembly B30, rail plate assembly C33 slide block movement direction are consistent; Left fixture installing plate 18 is connected by screw high-accuracy pulling force sensor 17, and high-accuracy pulling force sensor 17 other end is fixed on pulling force sensor card extender 19; Sample holder sheet group 31 and fixture upper cover 16 are arranged on right fixture installing plate 5 and left fixture installing plate 18 leans on machine center line one end; Fixture upper cover 16 has incised groove below; So, test specimen just compresses mode positioning clamping by fixture upper cover 16, holding piece group 31.

Described bendingly preload precision actuation unit B under load-on module and refer to DC servo motor assembly B45 and be bolted to lower general assembly plate 2 times upward by supporting seat; Motor output shaft is by shaft coupling connecting worm; Scrambler connects driver, and motor driver directly connects computing machine, by software control motor, realizes power and initially exports.So, realized the semi-static load under the bending load pattern of test specimen by gear train, and provide the torque power with small resolution to export and angular displacement output by pulse control mode;

Described bending preload load-on module under precision drive unit B comprise bearing seat A25, worm and gear assembly A26, leading screw holder A24, lead screw guide rails assembly A27, feed screw nut Connection Block A23, high-accuracy pressure transducer 22, U-shaped connection B44, pressure head and guide rail connected unit 21, rail plate assembly A29, three-point bend test pressure head 20, DC servo motor assembly B45 output shaft changes worm and gear assembly A26 by shaft coupling connection, and worm and gear assembly A26 second-stage worm gear is fixed on lead screw guide rails assembly A27 leading screw axle head; Lead screw guide rails assembly A27 is fixed on lower general assembly plate 2 by leading screw holder A24; Its feed screw nut connects feed screw nut Connection Block A23 by adaptor, feed screw nut Connection Block A23 rear portion projection contacts high-accuracy pressure transducer 22 afterbody, high-accuracy pressure transducer 22 front contact U-shaped connection B44U type bottom portion of groove, U-shaped connection B44 both sides are solid in pressure head and guide rail connected unit 21 boss both sides; Rail plate assembly A29 slide block is connected bottom guide rail connected unit 21; Three-point bend test pressure head 20 is fixed by screws in plane in pressure head and guide rail connected unit 21.

So, the output speed that DC servo motor assembly B45 can be provided and moment of torsion realize two-stage by worm and gear assembly A26 and significantly slow down, increase and turn round object, and by lead screw guide rails assembly A27, rotary motion is converted to accurate straight reciprocating motion, directly masterpiece is used in high-accuracy pressure transducer 22 rear end eventually through propulsion lead screw nut Connection Block A23, high-accuracy pressure transducer 22 leading portion is fixed on U-shaped connection B44, power promotes by U-shaped connection B44 the pressure head and the guide rail connected unit 21 that are fixed wtih three-point bend test pressure head 20 again, final drive three-point bend test pressure head 20 realizes the semi-static load under the bending load pattern of tested sample.

Described bending preload load-on module under bending load/displacement signal detecting unit B be made up of with DC servo motor assembly B45 high-accuracy pressure transducer 22, the feed screw nut of lead screw guide rails assembly A27 is connected with feed screw nut Connection Block A23 bolt by adaptor, feed screw nut Connection Block A23 rear portion projection contacts high-accuracy pressure transducer 22 afterbody, high-accuracy pressure transducer 22 front contact U-shaped connection B44U type bottom portion of groove, the both sides of U-shaped connection B44 are by the boss both sides of screw fastening in pressure head and guide rail connected unit 21.

So, power must be conducted through high-accuracy pressure transducer 22, and that can accurately record when sample material bends in real time is stressed.By calculating driver record DC servo motor assembly B45 number of revolutions, and extrapolate material bending deflection by ratio of gear.Can provide simultaneously comprise rate of deformation, the analog or digital amount of rate of loading can realize permanent rate of deformation, constant loading rate and permanent rate of displacement three kinds of load/unload modes as the feedback signal source of DC servo motor assembly B45 pulse/direction closed loop control mode.

Described DC servo motor assembly A36 exports accurate displacement continuously under clock signal effect, realized the semi-static load under the tensile load pattern of test specimen by the multi-stage speed-reducing of gear train, gear train is made up of commutating tooth wheels 40, worm and gear assembly B39, lead screw guide rails assembly B42, bearing seat C37, two-way stretch upper thrust rod 35, two-way stretch lower thrust rod 43, bearing seat B34, cross-brace plate 32; Scissor two power bar pushing mechanism rail plate assembly C33, bearing seat B34, two-way stretch upper thrust rod 35, two-way stretch lower thrust rod 43 realize tensile load and load, when realizing two-way stretch, sample center centering is good, thus ensure that the geometric center position of test specimen is in the most central of imaging region all the time, be convenient to observation and image record, utilize triangle power amplification principle simultaneously, can also realize arriving super a high proportion of power at high proportion and amplify semi-static load.

By the worm and gear assembly A26 of DC servo motor assembly B45 in conjunction with sweep, the deceleration conduction of lead screw guide rails assembly A27, power is first loaded on feed screw nut Connection Block A23, this feed screw nut Connection Block A23 is direct is again used in high-accuracy pressure transducer 22 rear end by masterpiece, high-accuracy pressure transducer 22 leading portion is fixed on U-shaped connection B44, power promotes by U-shaped connection B44 the pressure head and the guide rail connected unit 21 that are fixed wtih three-point bend test pressure head 20 again, finally realizes the loading of bending load.Such pressure transducer embedding structure saves space, provides conveniently for instrument being inserted scanning electron microscope.

Adopt three-dimensional three layers of all structure member of compact Layout, make full use of space, lower general assembly plate 2 is installed on scanning electron microscope five axle workbench by scanning electron microscope coupling assembling 1 with mechanical connection manner, lower general assembly plate 2 bottom is ground floor, the power source assembly bearing seat A25 of sweep, worm and gear assembly A26, DC servo motor assembly B45, stretched portion power source assembly motor driver 28, DC servo motor assembly A 36, commutating tooth wheels 40 are fixed on ground floor, be the second layer between general assembly base plate 2 top and upper mounting plate A4 upper mounting plate B6, extension section component drive disk assembly cross-brace plate 32, rail plate assembly C 33, bearing seat B34, two-way stretch upper thrust rod 35, bearing seat C37, feed screw nut Connection Block B38, worm and gear assembly B 39, two guide rail synchronized links 41, lead screw guide rails assembly B42, two-way stretch lower thrust rod 43, bending loading unit component transmission component pressure head and guide rail connected unit 21, high-accuracy pressure transducer 22, feed screw nut Connection Block A23, leading screw holder A24, worm and gear assembly A26, lead screw guide rails assembly A 27 all installs concentratedly in the second layer, upper mounting plate A4 and upper mounting plate B6 top are third layer, comprise nano-indenter test mechanism all components diamond penetrator supporting rod 8, high-accuracy pressure transducer 9, piezoelectric stack 10, U-shaped switching A11, impression general assembly plate 12, high precision XZ direction displacement platform 13, L-type fixed head 14, high accuracy displacement sensor B15, tensile loads terminal-clamping device and tensile force/displacement measurement module fixture upper cover 16, high-accuracy pulling force sensor 17, left fixture installing plate 18, pulling force sensor card extender 19, rail plate assembly B30, load pressure head 20 in sample holder sheet group 31 and three-point bending and be all arranged on third layer.Three-dimensional three-decker maximizes conserve space and adds integral rigidity simultaneously.

When carrying out in-situ nano impression test, after giving piezoelectric stack 10 electric signal, it will promote high-accuracy pressure transducer 9 and press diamond penetrator supporting rod 8 by promoting U-shaped switching A11, finally realize the test of pressure head press-in style, and power passes to high-accuracy pressure transducer 9 by lever principle amplification, pressure delta data can be obtained more accurately like this, make test result more accurate.

The combination of stretching/bending two test modules, upper mounting plate A is fixed with rail plate assembly B30, simultaneously extension test terminal; Right fixture installing plate 5 and left fixture installing plate 18 are also fixed on and horizontally disposed are fixed on rail plate assembly B30 slide block, glide direction is vertical with bending loading force direction, bending load has been unloaded effectively to stretching terminal, improve the precision that bending load loads, ensure that stretching and bending load load not interfere with each other, add integral rigidity simultaneously.

On loading direction, totally parallel way is adopted to arrange between high accuracy displacement sensor 7 and high-accuracy pulling force sensor 17, sample holder sheet group 31, fixture upper cover 16, fully can ensure the structure microminaturization of test platform, and effectively improve the integral rigidity of test platform.

Beneficial effect of the present invention is: compared with prior art, compact of the present invention, compact conformation, measuring accuracy is high, available content measurement is abundant, distortion/displacement/rate of loading is controlled, can be installed on the article carrying platform of various mainstream electronic microscope vacuum cavity, also can use with the imaging device such as atomic force microscope, Raman spectrometer, X-ray diffractometer, optical microscope compatibility, have wide range of applications.Trans-scale in-situ mechanical test can be carried out to three-dimensional test specimen more than various characteristic dimension centimetre-sized, can carry out high-precision to material while providing stretching and bending two kinds of pre-load patterns was nano-indenter test originally, the hardness of material in different stretch stage or bending stage is calculated according to Elastic Contact Theory, the mechanics parameters such as elastic modulus, achieve the real-time mechanics properties testing of material surface and specimen surface mechanical property distribution in material extending or crooked test to detect, and can realize continuously, the multiple load modes such as interval, to material and goods thereof load under microdeformation dynamically observe, to disclose mechanical behavior when material is loaded with stretch bending combined load under nanoscale and damage mechanisms.And by the synchronous detection of load/displacement signal, in conjunction with related algorithm, also stress-strain diagram under load effect can be generated by automatic Fitting.In sum, the present invention is to enriching in-situ nano mechanical test content and promoting that material mechanical performance measuring technology and equipment have important theory significance and good application and development future.

Accompanying drawing explanation

Accompanying drawing described herein is used to provide a further understanding of the present invention, forms a application's part, and illustrative example of the present invention and explanation thereof, for explaining the present invention, do not form inappropriate limitation of the present invention.

Fig. 1 is overall appearance schematic diagram of the present invention;

Fig. 2 is overall appearance vertical view of the present invention;

Fig. 3 is one-piece construction right view of the present invention;

Fig. 4 is fixture exploded perspective view of the present invention;

Fig. 5 is holder part vertical view of the present invention;

Fig. 6 is three-point bending pressure head propulsive mechanism axonometric drawing of the present invention

Fig. 7 is three-point bending pressure head propulsive mechanism explosive view of the present invention

Fig. 8 is two-way stretch mechanism of the present invention intraware axonometric drawing;

Fig. 9 is nano-indenter test mechanism of the present invention exploded perspective view.

In figure: 1. scanning electron microscope coupling assembling; 2. descend general assembly plate; 3. brace table; 4. upper mounting plate A; 5. right fixture installing plate; 6. upper mounting plate B; 7. high accuracy displacement sensor A; 8. diamond penetrator supporting rod; 9. high-accuracy pressure transducer; 10. piezoelectric stack; 11. U-shaped switching A; 12. impression general assembly plates; 13. high precision XZ direction displacement platforms; 14.L type fixed head; 15. high accuracy displacement sensor B; 16. fixture upper covers; 17. high-accuracy pulling force sensors; 18. left fixture installing plates; 19. pulling force sensor card extenders; 20. three-point bend test pressure heads; 21. pressure heads and guide rail connected unit; 22. high-accuracy pressure transducers; 23. feed screw nut Connection Block A; 24. leading screw holder A; 25. bearing seat A; 26. worm and gear assembly A; 27. lead screw guide rails assembly A; 28. motor drivers; 29. rail plate assembly A; 30. rail plate assembly B; 31. sample holder sheet groups; 32. cross-brace plates; 33. rail plate assembly C; 34. bearing seat B; 35. two-way stretch upper thrust rods; 36. DC servo motor assembly A; 37. bearing seat C; 38. feed screw nut Connection Block B; 39. worm and gear assembly B; 40. commutating tooth wheels; 41. pairs of guide rail synchronized links; 42. lead screw guide rails assembly B; 43. two-way stretch lower thrust rods; 44. U-shaped connection B; 45. DC servo motor assembly B.

Embodiment

Detailed content of the present invention and embodiment thereof is further illustrated below in conjunction with accompanying drawing.

See shown in Fig. 1 to Fig. 9, of the present invention based on adjustable stretching-the bending in-situ nano-indentation tester preloaded comprises in-situ nano impression test module, stretching preloads load-on module and bending load-on module three part that preloads forms; Wherein nano-indenter test module is made up of accurate displacement/power loading unit and load/displacement signal detecting unit; Stretching preloads load-on module and is made up of precision actuation unit, precision drive unit, load/displacement signal detection and control module and grip unit; The bending load-on module that preloads is made up of precision actuation unit, precision drive unit, load/displacement signal detection and control module.Each subelement composition modules, and finally form complete machine by three modules.

In the present invention, under said in-situ nano impression test module, accurate displacement/power loading unit comprises high precision XZ direction displacement platform 13, piezoelectric stack 10, U-shaped switching A11, high-accuracy pressure transducer 9, high accuracy displacement sensor B15, diamond penetrator supporting rod 8, L-type fixed head 14 is fixed on upper mounting plate B6 by four fastening bolts, and the motionless bottom portion of high precision XZ direction displacement platform 13 is then bolted and is fixed on L-type fixed head 14 perpendicular to installing plate B6 side.Impression general assembly plate 12 is connected and fixed on the movable slide unit of high precision XZ direction displacement platform 13 with bolt again; Press order from top to bottom, under crossbeam given prominence to by piezoelectric stack 10 top contact impression general assembly plate 12, top is given prominence in the U-shaped switching A11 both sides of contact, its underpart, U-shaped switching A11 middle conve shaped section lower contacts again high-accuracy pressure transducer 9 top, last high-accuracy pressure transducer 9 lower contacts diamond penetrator supporting rod 8, diamond penetrator supporting rod 8 one end is bolted and is fixed in impression general assembly plate 12 lower recess; The power transmission that high accuracy displacement sensor B15 then forms with high-accuracy pressure transducer 9, piezoelectric stack 10, the U-shaped A of switching 11 is in parallel with testing agency, and crossbeam given prominence to by upper-end contact impression general assembly plate 12, lower end in contact diamond penetrator supporting rod 8.High-accuracy pressure transducer 9, piezoelectric stack 10, U-shaped switching A 11, high accuracy displacement sensor B 15 are scored general assembly plate 12 like this and are clipped in the middle with diamond penetrator supporting rod 8.Nano diamond pressure head is added by bolt clip locking structure and is held in diamond penetrator supporting rod 8 other end.

So, precise 2-D displacement platform 13 manually regulates and can realize accurate pressure head two dimension macro position adjustment, accurate piezoelectric stack 10 provides accurate power to export by pulse control mode and minimum displacement exports, the output displacement of piezoelectric stack 10 and power pass to high-accuracy pressure transducer 9 by U-shaped switching A11, and be with dynamic head by diamond penetrator supporting rod 8, realize the test of nano impress press-in style.

In the present invention, under said in-situ nano impression test module, load/displacement signal detecting unit comprises high-accuracy pressure transducer 9, diamond penetrator supporting rod 8, high accuracy displacement sensor B15, high-accuracy pressure transducer 9, piezoelectric stack 10, U-shaped switching A11 are connected, again with high accuracy displacement sensor B15 in-parallel, so, pressure head pressing-in force on diamond penetrator supporting rod 8 amplifies bar through this power and amplifies, and passes to precision pressure sensor 9 to realize pressing-in force input; Diamond penetrator supporting rod 8 be out of shape while by displacement transfer to high accuracy displacement sensor B15, the compression distance of diamond penetrator can be drawn, realize micrometric displacement input.

Under in the present invention, said stretching preloads load-on module, precision actuation unit A refers to DC servo motor assembly A36 its own band scrambler and drag cup planetary reducer, speed reduction unit one end is bolted and is fixed on motor supporting base, and motor supporting base is bolted again and is fixed on below lower general assembly plate 2 upward; Motor output shaft is by shaft coupling connecting worm; Scrambler connects driver, and motor driver directly connects computing machine, by software control motor, realizes power and initially exports.So, realized the semi-static load under the tensile load pattern of test specimen by gear train, and provide the torque power with small resolution to export and angular displacement output by pulse/direction controlling mode.

Under in the present invention, said stretching preloads load-on module, precision drive unit A comprises commutating tooth wheels 40, worm and gear assembly B39, lead screw guide rails assembly B42, bidirectional propulsion bar 35, two-way stretch lower thrust rod 43, rail plate assembly C33, bearing seat B34, DC servo motor assembly A36 output shaft connects the worm shaft of commutating tooth wheels 40 by shaft coupling, the worm gear that can realize primary speed-down commutating tooth wheels 40 is fixed on the worm and gear assembly B39 worm shaft centre position of double reduction by register pin, worm and gear assembly B39 two worm gears of double reduction are separately fixed at lead screw guide rails assembly B42 two leading screw axle heads by register pin.What select in lead screw guide rails assembly B42 is support end FK series flange supporting base, and the anti-feed screw nut of tip lock jack panel comes off.Lead screw guide rails assembly B42FK supporting base is bolted and is fixed on leading screw holder, and leading screw holder is bolted to above lower general assembly plate 2 by two groups, realizes lead screw guide rails fixing at lower general assembly plate 2 like this.Lead screw guide rails assembly B42 feed screw nut is bolted feed screw nut Connection Block B38.Be connected by screw, the fixing two guide rail synchronized links 41,41 in feed screw nut Connection Block B38 upper end both sides fixed bearing block C37 above.Two little axles are connected respectively by two internal bearings, two little axle other ends distinguish tight fit connection two-way stretch lower thrust rod 43 and two-way stretch upper thrust rod 35 rear end again, and 35,43 front ends are also movably connected in the middle of bearing seat B34 double-slider by same axle, bearing arrangement.Bearing seat B34 be connected by screw be fixed on rail plate assembly C33 slide block on, rail plate assembly C33 is fixed by screws in again cross-brace plate 32 side, and the final screw of cross-brace plate 32 is fixedly connected on above lower general assembly plate 2.And bearing seat B34 is fixedly connected with the blessing unit screw above it simultaneously.

So, the output torque that DC servo motor assembly A36 can be provided realizes the deceleration of large degree through commutating tooth wheels 40 and worm and gear assembly B39, increase and turn round object, and eventually through lead screw guide rails assembly B42 and scissor two power bar pushing mechanism rail plate assembly C33, bearing seat B34, two-way stretch upper thrust rod 35, rotary motion is converted to accurate straight reciprocating motion by two-way stretch lower thrust rod 43, realize the semi-static load under the tensile load pattern of test specimen, scissors-type two-way stretch mechanism realizes the two-way stretch of material style while utilizing triangle power amplification principle to ensure tensile force, ensure that the centering of observation area in the observation visual field.

In the present invention, said stretching preloads load/displacement signal under load-on module and to detect and control module A is made up of high-accuracy pulling force sensor 17, high accuracy displacement sensor 7.Left fixture installing plate 18 is connected by screw high-accuracy pulling force sensor 17,17 other end and is fixed on again on pulling force sensor card extender 19.High accuracy displacement sensor 7 main body is connected by screw and is fixed on right fixture installing plate 5, and the probe of high accuracy displacement sensor 7 connects left fixture installing plate 18 by a little extending-board of L-type.So, accurately can record force and deformation amount when sample material stretches in real time, can provide simultaneously comprise rate of deformation, rate of loading analog or digital amount as the feedback signal source of the pulse/direction closed loop control mode of DC servo motor assembly A36, permanent rate of deformation, constant loading rate and permanent rate of displacement three kinds of load/unload modes can be realized.

Under in the present invention, said stretching preloads load-on module, grip unit A comprises fixture upper cover 16, sample holder sheet group 31, pulling force sensor card extender 19, pressure head and guide rail connected unit 21, leading screw holder A24, bearing seat C37, feed screw nut Connection Block B38.Be processed with threaded hole above bearing seat B34, right fixture installing plate 5 is fixedly connected with double-sided bearings seat B34 by screw respectively with pulling force sensor card extender 19.Right fixture installing plate 5 is fastened on two slide blocks of rail plate assembly B30 respectively by screw again with pulling force sensor card extender 19, rail plate assembly B30 is fixed by screws on upper mounting plate A4, and upper mounting plate A 4 is fixedly connected with lower general assembly plate 2 by brace table 3.Right like this fixture installing plate 5, pulling force sensor card extender 19 are just by laterally and the fixing guarantee position of the slide block of vertical two planes and rigidity, and rail plate assembly B 30, all slide block movement directions of rail plate assembly C 33 are consistent.Left fixture installing plate 18 is threaded connection high-accuracy pulling force sensor 17, and high-accuracy pulling force sensor 17 other end is fixed on again on pulling force sensor card extender 19.Sample holder sheet group 31 and fixture upper cover 16 are arranged on right fixture installing plate 5 and left fixture installing plate 18 leans on machine center line end.Test specimen two ends are installed in sample holder sheet group 31 groove, and the above is fixture upper cover 16, is fixed by bolt group, is compressed.Fixture upper cover 16 has incised groove below, can not the changing of the relative positions about ensureing test specimen after compressing.So, test specimen just compresses mode positioning clamping by specimen holder upper cover 16, holding piece group 31.

In the present invention said bending preload load-on module under precision actuation unit B refer to DC servo motor assembly B45 its own band scrambler and drag cup planetary reducer, speed reduction unit one end is bolted and is fixed on supporting seat, and motor supporting base is bolted again and is fixed on below lower general assembly plate 2 upward; Motor output shaft is by shaft coupling connecting worm; Scrambler connects driver, and motor driver directly connects computing machine, by software control motor, realizes power and initially exports.So, realized the semi-static load under the bending load pattern of test specimen by gear train, and provide the torque power with small resolution to export and angular displacement output by pulse control mode.

In the present invention said bending preload load-on module under precision drive unit B comprise bearing seat A25, worm and gear assembly A26, leading screw holder A24, lead screw guide rails assembly A27, feed screw nut Connection Block A23, high-accuracy pressure transducer 22, U-shaped connection B44, pressure head and guide rail connected unit 21, rail plate assembly A29, three-point bend test pressure head 20.DC servo motor assembly B45 output shaft connects the worm shaft of the first order worm and gear of worm and gear assembly A26 by shaft coupling, the worm gear of worm and gear assembly A26 first-stage worm gear worm screw group is fixed on the worm and gear group worm shaft of double reduction by register pin, this worm shaft is arranged on lower general assembly plate 2 by two bearing seat A25, and the worm and gear assembly worm gear of double reduction is fixed on lead screw guide rails assembly A27 leading screw axle head by register pin.What select in lead screw guide rails assembly A27 is support end end FK series flange supporting base, and the anti-feed screw nut of tip lock jack panel comes off.Lead screw guide rails assembly A27FK supporting base is bolted and is fixed on leading screw holder A24, and leading screw holder A24 is bolted to above lower general assembly plate 2 by two groups, realizes lead screw guide rails fixing at lower general assembly plate 2 like this.The feed screw nut of lead screw guide rails assembly A27 is connected with feed screw nut Connection Block A23 bolt by adaptor, feed screw nut Connection Block A23 rear portion projection just in time contacts high-accuracy pressure transducer 22 afterbody, high-accuracy pressure transducer 22 front contact U-shaped connection B44U type bottom portion of groove, the both sides of U-shaped connection B44 are by the boss both sides of screw fastening in pressure head and guide rail connected unit 21.Be fixed by screws on two slide blocks of rail plate assembly A29 bottom pressure head and guide rail connected unit 21, rail plate assembly A29 by screw fastening on lower general assembly plate 2.Three-point bend test pressure head 20 is fixed by screws in pressure head and guide rail connected unit 21 top.

So, the output speed that DC servo motor assembly B45 can be provided and moment of torsion realize two-stage by worm and gear assembly A26 and significantly slow down, increase and turn round object, and by lead screw guide rails assembly A27, rotary motion is converted to accurate straight reciprocating motion, directly masterpiece is used in high-accuracy pressure transducer 22 rear end eventually through propulsion lead screw nut Connection Block A23, high-accuracy pressure transducer 22 leading portion is fixed on U-shaped connection B44, power promotes by U-shaped connection B44 the pressure head and the guide rail connected unit 21 that are fixed wtih three-point bend test pressure head 20 again, final drive three-point bend test pressure head 20 realizes the semi-static load under the bending load pattern of test specimen.

In the present invention said bending preload load-on module under bending load/displacement signal detecting unit B be made up of with DC servo motor assembly B45 high-accuracy pressure transducer 22.The feed screw nut of lead screw guide rails assembly A27 is connected with feed screw nut Connection Block A23 bolt by adaptor, feed screw nut Connection Block A23 rear portion projection just in time contacts high-accuracy pressure transducer 22 afterbody, high-accuracy pressure transducer 22 front contact U-shaped connection B44U type bottom portion of groove, the both sides of U-shaped connection B44 are by the boss both sides of screw fastening in pressure head and guide rail connected unit 21.So, power must be conducted through high-accuracy pressure transducer 22, and that can accurately record when sample material bends in real time is stressed.By calculating driver record DC servo motor assembly B45 number of revolutions, and extrapolate material bending deflection by ratio of gear, can provide simultaneously comprise rate of deformation, the analog or digital amount of rate of loading can realize permanent rate of deformation, constant loading rate and permanent rate of displacement three kinds of load/unload modes as the feedback signal source of DC servo motor assembly B45 pulse/direction closed loop control mode.

In the present invention said based on adjustable stretching-bending in-situ nano-indentation tester preloaded under clock signal effect, DC servo motor assembly A36 exports accurate displacement continuously, is realized the semi-static load under the tensile load pattern of test specimen by the multi-stage speed-reducing of gear train commutating tooth wheels 40, worm and gear assembly B39, lead screw guide rails assembly B42, bearing seat C37, two-way stretch upper thrust rod 35, two-way stretch lower thrust rod 43, bearing seat B34, cross-brace plate 32.Scissor two power bar pushing mechanism rail plate assembly C33, bearing seat B34, two-way stretch upper thrust rod 35, U-shaped connection B 44 realize tensile load and load, when realizing two-way stretch, sample center centering is good, thus ensure that the geometric center position of test specimen is in the most central of imaging region all the time, be convenient to observation and image record, utilize triangle power amplification principle simultaneously, can also realize arriving super a high proportion of power at high proportion and amplify semi-static load.

In the present invention said based on adjustable stretching-bending in-situ nano-indentation tester preloaded by the worm and gear assembly A26 of DC servo motor assembly B45 in conjunction with sweep, the deceleration conduction of lead screw guide rails assembly A27, power is first loaded on feed screw nut Connection Block A23, this feed screw nut Connection Block A23 is direct is again used in high-accuracy pressure transducer 22 rear end by masterpiece, high-accuracy pressure transducer 22 leading portion is fixed on U-shaped connection B44, power promotes by U-shaped connection B44 the pressure head and the guide rail connected unit 21 that are fixed wtih three-point bend test pressure head 20 again, finally realize the loading of bending load.Such pressure transducer embedding structure saves space, provides conveniently for instrument being inserted scanning electron microscope.

Said based on adjustable stretching-bending three-dimensional three layers of compact Layout of in-situ nano-indentation tester general assembly entirety employing preloaded in the present invention.All structure members, make full use of space, and lower general assembly plate 2 is installed on scanning electron microscope five axle workbench by scanning electron microscope coupling assembling 1 with mechanical connection manner, lower general assembly plate 2 bottom is ground floor, the power source assembly bearing seat A25 of sweep, worm and gear assembly A26, DC servo motor assembly B45, stretched portion power source assembly motor driver 28, DC servo motor assembly A 36, commutating tooth wheels 40 are fixed on ground floor, be the second layer between general assembly base plate 2 top and upper mounting plate A4 upper mounting plate B6, extension section component drive disk assembly cross-brace plate 32, rail plate assembly C 33, bearing seat B34, two-way stretch upper thrust rod 35, bearing seat C37, feed screw nut Connection Block B38, worm and gear assembly B 39, two guide rail synchronized links 41, lead screw guide rails assembly B42, two-way stretch lower thrust rod 43, bending loading unit component transmission component pressure head and guide rail connected unit 21, high-accuracy pressure transducer 22, feed screw nut Connection Block A23, leading screw holder A24, worm and gear assembly A26, lead screw guide rails assembly A 27 all installs concentratedly in the second layer, upper mounting plate A4 and upper mounting plate B6 top are third layer, comprise nano-indenter test mechanism all components diamond penetrator supporting rod 8, high-accuracy pressure transducer 9, piezoelectric stack 10, U-shaped switching A11, impression general assembly plate 12, high precision XZ direction displacement platform 13, L-type fixed head 14, high accuracy displacement sensor B15, tensile loads terminal-clamping device and tensile force/displacement measurement module fixture upper cover 16, high-accuracy pulling force sensor 17, left fixture installing plate 18, pulling force sensor card extender 19, rail plate assembly B30, load pressure head 20 in sample holder sheet group 31 and three-point bending and be all arranged on third layer.Three-dimensional three-decker maximizes conserve space and adds integral rigidity simultaneously.

Said based on adjustable stretching-bending in-situ nano-indentation tester nano impress module preloaded in the present invention, when carrying out in-situ nano impression test, after giving piezoelectric stack 10 electric signal, it will promote high-accuracy pressure transducer 9 and press diamond penetrator supporting rod 8 by promoting U-shaped switching A11, finally realize the test of pressure head press-in style, and power passes to high-accuracy pressure transducer 9 by lever principle amplification, pressure delta data can be obtained more accurately like this, make test result more accurate.

The combination of the said stretching based on adjustable stretching-bending in-situ nano-indentation tester preloaded/bending two test modules in the present invention, upper mounting plate A is fixed with rail plate assembly B30, extension test terminal simultaneously, right fixture installing plate 5 and left fixture installing plate 18 are also fixed on and horizontally disposed are fixed on rail plate assembly B30 slide block, glide direction is vertical with bending loading force direction, bending load has been unloaded effectively to stretching terminal, improve the precision that bending load loads, ensure that stretching and bending load load not interfere with each other, add integral rigidity simultaneously.

In the present invention, said sample accommodates device upper cover 16, sample holder sheet 31 all adopts Linear cut mode to be processed into knurling structure with the surface of contact of test specimen, can improve the reliability of specimen holder.Concrete method is processed into laciniation respectively two sides.

Said based on adjustable stretching-bending in-situ nano-indentation tester preloaded in the present invention, on loading direction, totally parallel way is adopted to arrange between high accuracy displacement sensor 7 and high-accuracy pulling force sensor 17, sample holder sheet group 31, fixture upper cover 16, fully can ensure the structure microminaturization of test platform, and effectively improve the integral rigidity of test platform.

The present invention, in concrete test process, is divided into four implementation steps: the test specimen that, is installed, install instruments; Two, stretching-bending load prestrain; Three, in-situ nano impression test; Four, scanning electron microscope home position is observed and is recorded data.Test specimen is before carrying out impression stretch bending composite test, wire-electrode cutting and processing method trial-production place need be adopted with stress weakness zone or the standard specimen predicting breach, and obtain by single-sided polishing process the better surface smoothness that can be used for the monitoring of high resolving power micro-imaging, or obtain the microstructures such as metallographic by techniques such as chemical corrosions.

Composition graphs 1, Fig. 4, Fig. 5, the first step: the test specimen that is installed, to install instruments.Be mounted on scanning electron microscope five axle workbench on by wedge shape scanning electron microscope coupling assembling 1 with mechanical connection manner based on general assembly plate 2 under adjustable stretching-bending in-situ nano-indentation tester preloaded in test, instrument at this time keeps the elevation angle of 39 ° with surface level, facilitate scanning electron microscope to patterned surface imaging.Afterwards, channel-shaped structure place test specimen being placed in sample holder sheet group 31 realizes the location of style vertical axis, adding a cover fixture upper cover 16 afterwards and fixing with screw-driving, utilizes the incised groove of fixture upper cover 16 bottom to realize axially clamping and location.Level meter or clock gauge is utilized to adjust clamping device accurate to ensure the position of test specimen.By adjustment impression test module and the bending Two-axes Position Mechanism preloading load-on module, the diamond penetrator on diamond penetrator supporting rod 8 and three-point bend test pressure head 20 is made to be in directly over test specimen or dead ahead keep roughly reasonable distance.On this basis, trickle adjustment high precision XZ direction displacement platform 13 makes diamond penetrator be positioned at suitable position, keeps the optimum distance before press-in.Pose finally by Electronic Speculum system call interception five axle workbench obtains best observation angle, namely calibrate test specimen draft the position of test point after, close scanning electron microscope vacuum chamber sealing hatch door.Open scanning electron microscope power supply, by the adjustment operating distance of scanning electron microscope and the Z-direction position of diamond penetrator or bending pressure head, complete the adjustment of imaging multiplying power to test specimen and observation area.

Composition graphs 2, Fig. 6, Fig. 7, second step: bending load prestrain.Physical construction aspect: control motor driver by computing machine, under the clock signal effect that motor driver exports, DC servo motor assembly B45 power output and displacement, pass to sweep worm and gear assembly A26 and lead screw guide rails assembly A27, realizes double reduction power and amplify conduction.Rotational displacement is converted into straight-line displacement again by lead screw guide rails assembly A27, power passes to feed screw nut Connection Block A23, feed screw nut Connection Block A23 is direct is again used in high-accuracy pressure transducer 22 rear end by masterpiece, high-accuracy pressure transducer 22 leading portion is fixed on U-shaped connection B44, power promotes by U-shaped connection B44 the pressure head and the guide rail connected unit 21 that are fixed wtih three-point bend test pressure head 20 so again, three-point bend test pressure head 20 is perpendicular to piece lengths direction loading force, big retarding is than semi-static load bending force, finally realize the loading of the bending load of three-point bending pressure head 20 pairs of samples.

Detection control aspect: high-accuracy pressure transducer 22 and DC servo motor assembly B45 forms to bend and preload bending load/displacement signal detecting unit under load-on module, it is stressed that high-accuracy pressure transducer 22 can accurately record when sample material bends in real time.By calculating driver record DC servo motor assembly B45 number of revolutions, and extrapolate material bending deflection by ratio of gear, can provide simultaneously comprise rate of deformation, the analog or digital amount of rate of loading can realize permanent rate of deformation, constant loading rate and permanent rate of displacement three kinds of load/unload modes as the feedback signal source of DC servo motor assembly B45 pulse/direction closed loop control mode;

Composition graphs 2, Fig. 3, Fig. 8, second step: tensile load prestrain.Physical construction aspect: control motor driver by computing machine, under the clock signal effect that motor driver exports, DC servo motor assembly A36 exports accurate displacement continuously, is realized the semi-static load under the tensile load pattern of test specimen by the multi-stage speed-reducing of tensile load preloaded components underdrive unit commutating tooth wheels 40, worm and gear assembly B39, lead screw guide rails assembly B42, bidirectional propulsion bar 35, two-way stretch lower thrust rod 43, rail plate assembly C33, bearing seat B 34.In this process, the planet cup speed reduction unit that precision DC servomotor 36 carries carries out first order deceleration, power and angular displacement are delivered to worm and gear group 39 and lead screw guide rails assembly B42 and carry out the second level and slow down and angular displacement is converted into straight-line displacement simultaneously, and Novel scissors blade type bidirectional propulsion bar two-way stretch upper thrust rod 35, to stretching lower thrust rod 43 by triangle power amplification principle, longitudinal thrust is converted into horizontal two-way tension, ensure that the centering of observation area in the observation visual field.Also amplify power while achieving two-way stretch, three grades of decelerations really ensure that the two-way semi-static load of tensile force;

Detection control aspect: high-accuracy pulling force sensor 17, high accuracy displacement sensor 7 form stretching and preload load/displacement signal under load-on module and detect and control module, accurately can record force and deformation amount when sample material stretches in real time, can provide simultaneously comprise rate of deformation, rate of loading analog or digital amount as the feedback signal source of the pulse/direction closed loop control mode of DC servo motor assembly A36, permanent rate of deformation, constant loading rate and permanent rate of displacement three kinds of load/unload modes can be realized;

Composition graphs 3, Fig. 9, the 3rd step, in-situ nano impression test.When carrying out in-situ nano impression test, trickle adjustment high precision XZ direction displacement platform 13 makes diamond penetrator be positioned at suitable position, keeps the optimum distance before press-in.The parameters such as the loading force tested by program interface setting in-situ mechanical or displacement, send instruction by PC to hyperchannel servo drive controller and Piezoelectric Driving power supply.After giving piezoelectric stack 10 electric signal, power and displacement will be passed to high-accuracy pressure transducer 9 by promoting U-shaped switching A11 by piezoelectric stack 10, promote precision pressure sensor 9 and press diamond penetrator supporting rod 8, be installed one end of bar 8 of diamond penetrator is Linear cut flexible hinge, be fixed on impression general assembly plate 12, after diamond penetrator supporting rod 8 is subject to the downforce of high-accuracy pressure transducer 9, the diamond penetrator of front end presses down, and finally realizes the test of pressure head press-in style.The pressing-in force of nano-indenter test is amplified by lever principle passes to high-accuracy pressure transducer 9, can obtain pressure delta data more accurately.Diamond penetrator supporting rod 8 be out of shape while by displacement transfer to high accuracy displacement sensor B15, the compression distance of diamond penetrator can be drawn, realize micrometric displacement input.

4th step, is observed by scanning electron microscope home position and records data.The pickup to pressure head loading of pressing in and compression distance signal is realized by high-resolution force snesor and displacement transducer, by acquisition software by data acquisition and process obtain loading of pressing in-depth curve, calculate the mechanics parameter such as hardness, elastic modulus of material in different stretch stage or bending stage according to Elastic Contact Theory, achieve the real-time mechanics properties testing of material surface and specimen surface mechanical property distribution in material extending or crooked test and detect.In conjunction with Precision measurement, initial contact detection, control module and algorithm routine, also can ensure that the loading sequential of stretching/compressing load prestrain test module, bending load prestrain test module and nano-indenter test module is selected arbitrarily.

In position in observation, first under the lower enlargement ratio of scanning electron microscope, test piece deformation region is scanned, after finding test piece deformation to damage weakness zone, improve enlargement ratio and in-situ observation is carried out to the deformation damage of material in test.In in-situ test, sensor detects in real time to stretch mode external load F, and test piece deformation amount picks up the inter-agency relative displacement of two specimen holder by precise displacement sensor by synchronous.On this basis, multiple signals by analog to digital conversion and through necessary signals conditioning after send into computing machine.Can the mechanics parameter such as the stress-strain curve of Real-time Obtaining exosyndrome material mechanical property, elastic modulus, hardness and yield strength by algorithm routine.

The present invention relates to based on adjustable stretching-bending in-situ nano-indentation tester preloaded, belong to electromechanical integration quasi-instrument category.Test platform in conjunction with traditional for three-dimensional macro test specimen more than characteristic dimension centimetre-sized, stretching to material-bending can be realized and preload lower in-situ nano impression test, and can realize with Hitachi TM-1000 type scanning electron microscope and all kinds of Image-forming instrument with cavity and carrier structure is compatible uses.Preload while charger realizes MATERIALS ' DYNAMIC stretch bending by the compact tensile of high integration-bending, piezoelectric principle is utilized to drive diamond penetrator to realize nanoscale impression test, the pickup to pressure head loading of pressing in and compression distance signal is realized by high-resolution force snesor and displacement transducer, by acquisition software by data acquisition and process obtain loading of pressing in-depth curve, the hardness of material in different stretch stage or bending stage is calculated according to Elastic Contact Theory, the mechanics parameters such as elastic modulus, achieve the real-time mechanics properties testing of material surface and specimen surface mechanical property distribution in material extending or crooked test to detect.In conjunction with Precision measurement, initial contact detection, control module and algorithm routine, also can ensure that the loading sequential of stretching/compressing load prestrain test module, bending load prestrain test module and nano-indenter test module is selected arbitrarily.Compact of the present invention, compact conformation, strain rate is controlled, has good structural compatibility, vacuum compatibility and Electro Magnetic Compatibility with Image-forming instruments such as all kinds of main flow scanning electron microscope, atomic force microscope, Raman spectrometer, X-ray diffractometer and optical microscopes.Can carry out under the observation of all kinds of Image-forming instrument for more than characteristic dimension centimetre-sized three-dimensional test specimen across sized materials stretch-bending preload lower in-situ nano impression test, in compound, the-curved microdeformation preloaded under effect is drawn to material, Damage and fracture process carries out on-line monitoring, for disclosing material microdeformation behavior and damage mechanisms provides brand-new method of testing.

The foregoing is only preferred embodiment of the present invention, be not limited to the present invention, for a person skilled in the art, the present invention can have various modifications and variations.All any amendments made for the present invention, equivalent replacement, improvement etc., all should be included within protection scope of the present invention.

Claims (9)

1. one kind based on adjustable stretching-bending in-situ nano-indentation tester preloaded, it is characterized in that: comprise in-situ nano impression test module, stretching to preload load-on module and bend preloads load-on module, described in-situ nano impression test module is made up of accurate displacement/power loading unit and load/displacement signal detecting unit; Stretching preloads load-on module and is made up of precision actuation unit A, precision drive unit A, load/displacement signal detection and control module A and grip unit A; The bending load-on module that preloads is made up of precision actuation unit B, precision drive unit B, load/displacement signal detection and control module B;

Under described in-situ nano impression test module, accurate displacement/power loading unit comprises high precision XZ direction displacement platform (13), piezoelectric stack (10), U-shaped switching A(11), high-accuracy pressure transducer (9), high accuracy displacement sensor B(15) and diamond penetrator supporting rod (8), L-type fixed head (14) bolt is fixed on upper mounting plate B(6), displacement platform (13) motionless bottom, high precision XZ direction portion connects L-type fixed head (14) vertical side; Impression general assembly plate (12) is connected to the movable slide unit in high precision XZ direction displacement platform (13) with bolt; From top to bottom, under the outstanding crossbeam of piezoelectric stack (10) top contact impression general assembly plate (12), the U-shaped switching A(11 of its underpart contact) both sides give prominence to top, U-shaped switching A(11) epirelief section lower contacts again high-accuracy pressure transducer (9) top, last high-accuracy pressure transducer (9) lower contacts diamond penetrator supporting rod (8), diamond penetrator supporting rod (8) terminal bolt is fixedly connected in impression general assembly plate (12) lower recess; High accuracy displacement sensor B(15) the outstanding crossbeam of upper-end contact impression general assembly plate (12), lower end in contact diamond penetrator supporting rod (8);

Under described in-situ nano impression test module, load/displacement signal detecting unit comprises high-accuracy pressure transducer (9), diamond penetrator supporting rod (8) and high accuracy displacement sensor B(15), described high-accuracy pressure transducer (9), piezoelectric stack (10), U-shaped switching A(11) series connection, again with high accuracy displacement sensor B(15) in parallel, high-accuracy pressure transducer (9), piezoelectric stack (10), U-shaped switching A(11) and high accuracy displacement sensor B(15) be scored general assembly plate (12) and diamond penetrator supporting rod (8) and be clipped in the middle; So, the pressure head pressing-in force on diamond penetrator supporting rod (8) amplifies through diamond penetrator supporting rod (8), passes to precision pressure sensor (9) and realizes pressing-in force input; While diamond penetrator supporting rod (8) is out of shape by displacement transfer to high accuracy displacement sensor B(15), draw the compression distance of diamond penetrator, realize micrometric displacement input.

2. according to claim 1 based on adjustable stretching-bending in-situ nano-indentation tester preloaded, it is characterized in that: under described stretching preloads load-on module, precision actuation unit A refers to DC servo motor assembly A(36) be connected with lower general assembly plate (2) by supporting seat, motor output shaft is by shaft coupling connecting worm; Scrambler connects driver, motor driver directly connects computing machine, by software control motor, realizes power and initially exports; So, realized the semi-static load under the tensile load pattern of test specimen by gear train, and provide the torque power with small resolution to export and angular displacement output by pulse/direction controlling mode.

3. according to claim 1 based on adjustable stretching-bending in-situ nano-indentation tester preloaded, it is characterized in that: under described stretching preloads load-on module, precision drive unit A comprises commutating tooth wheels (40), worm and gear assembly B(39), lead screw guide rails assembly B(42), two-way stretch upper thrust rod (35), two-way stretch lower thrust rod (43), rail plate assembly C(33), bearing seat B (34), DC servo motor assembly A(36) output shaft connect commutating tooth wheels (40) worm shaft, commutating tooth wheels (40) worm gear is fixed on worm and gear assembly B(39) in the middle of worm shaft, worm and gear assembly B(39) two worm gears are fixed on lead screw guide rails assembly B(42) leading screw axle head, lead screw guide rails assembly B(42) be fixed on lower general assembly plate (2) by leading screw cage bolt, its feed screw nut connects feed screw nut Connection Block B(38), feed screw nut Connection Block B(38) the fixing two guide rail synchronized links (41) in upper end, two guide rail synchronized links (41) is both sides fixed bearing block C(37 above), two internal bearings connect little axle respectively, the little axle other end connects two-way stretch lower thrust rod (43) and two-way stretch upper thrust rod (35) rear end, and two-way stretch upper thrust rod (35), two-way stretch lower thrust rod (43) front end are by shafting structure coupling shaft bearing B(34) double-slider, bearing seat B(34) be connected by screw be fixed on rail plate assembly C(33) slide block on, and bearing seat B(34) be fixedly connected with the blessing unit screw above it simultaneously.

4. according to claim 1 based on adjustable stretching-bending in-situ nano-indentation tester preloaded, it is characterized in that: described stretching preloads load/displacement signal under load-on module and to detect and control module A is made up of high-accuracy pulling force sensor (17), high accuracy displacement sensor (7), left fixture installing plate (18) screw connects high-accuracy pulling force sensor (17), and high-accuracy pulling force sensor (17) other end is fixed on again on pulling force sensor card extender (19); High accuracy displacement sensor (7) main body is fixed on right fixture installing plate (5), and the probe of high accuracy displacement sensor (7) is connected with left fixture installing plate (18); So, accurately can record force and deformation amount when sample material stretches in real time, can provide simultaneously comprise rate of deformation, rate of loading analog or digital amount as DC servo motor assembly A(36) the feedback signal source of pulse/direction closed loop control mode, permanent rate of deformation, constant loading rate and permanent rate of displacement three kinds of load/unload modes can be realized.

5. according to claim 1 based on adjustable stretching-bending in-situ nano-indentation tester preloaded, it is characterized in that: under described stretching preloads load-on module, grip unit A comprises fixture upper cover (16), sample holder sheet group (31), pulling force sensor card extender (19), pressure head and guide rail connected unit (21), leading screw holder A(24), bearing seat C(37), feed screw nut Connection Block B(38), right fixture installing plate (5) and pulling force sensor card extender (19) respectively with double-sided bearings seat B(34) fixing, right fixture installing plate (5) and pulling force sensor card extender (19) are separately fixed at rail plate assembly B(30) on two slide blocks, rail plate assembly B(30) guide rail is fixed on upper mounting plate A(4) on, rail plate assembly B(30), rail plate assembly C(33) slide block movement direction is consistent, left fixture installing plate (18) is connected by screw high-accuracy pulling force sensor (17), and high-accuracy pulling force sensor (17) other end is fixed on pulling force sensor card extender (19), sample holder sheet group (31) and fixture upper cover (16) are arranged on right fixture installing plate (5) and left fixture installing plate (18) by machine center line one end, fixture upper cover (16) has incised groove below, so, test specimen just compresses mode positioning clamping by fixture upper cover (16), holding piece group (31).

6. according to claim 1 based on adjustable stretching-bending in-situ nano-indentation tester preloaded, it is characterized in that: described bending preload load-on module under precision actuation unit B refer to DC servo motor assembly B(45) be bolted to lower general assembly plate (2) upward by supporting seat under; Motor output shaft is by shaft coupling connecting worm; Scrambler connects driver, and motor driver directly connects computing machine, by software control motor, realizes power and initially exports; So, realized the semi-static load under the bending load pattern of test specimen by gear train, and provide the torque power with small resolution to export and angular displacement output by pulse control mode;

Described bending preload load-on module under precision drive unit B comprise bearing seat A(25), worm and gear assembly A(26), leading screw holder A(24), lead screw guide rails assembly A(27), feed screw nut Connection Block A(23), high-accuracy pressure transducer (22), U-shaped connection B(44), pressure head and guide rail connected unit (21), rail plate assembly A(29), three-point bend test pressure head (20), DC servo motor assembly B(45) output shaft by shaft coupling connect change worm and gear assembly A(26), worm and gear assembly A(26) second-stage worm gear is fixed on lead screw guide rails assembly A(27) leading screw axle head, lead screw guide rails assembly A(27) by leading screw holder A(24) be fixed on lower general assembly plate (2), its feed screw nut connects feed screw nut Connection Block A(23 by adaptor), feed screw nut Connection Block A(23) the high-accuracy pressure transducer of rear portion projection contacts (22) afterbody, high-accuracy pressure transducer (22) front contact U-shaped connection B(44) U-shaped bottom portion of groove, U-shaped connection B(44) both sides are solid in pressure head and guide rail connected unit (21) boss both sides, pressure head is connected rail plate assembly A(29 with guide rail connected unit (21) bottom) slide block, three-point bend test pressure head (20) is fixed by screws in pressure head and the upper plane of guide rail connected unit (21),

Described bending preload load-on module under bending load/displacement signal detecting unit B by high-accuracy pressure transducer (22) and DC servo motor assembly B(45) form, lead screw guide rails assembly A(27) feed screw nut by adaptor and feed screw nut Connection Block A(23) bolt is connected, feed screw nut Connection Block A(23) the high-accuracy pressure transducer of rear portion projection contacts (22) afterbody, high-accuracy pressure transducer (22) front contact U-shaped connection B(44) U-shaped bottom portion of groove, U-shaped connection B(44) both sides by the boss both sides of screw fastening in pressure head and guide rail connected unit (21).

7. according to claim 2 based on adjustable stretching-bending in-situ nano-indentation tester preloaded, it is characterized in that: described DC servo motor assembly A(36) under clock signal effect, export accurate displacement continuously, realized the semi-static load under the tensile load pattern of test specimen by the multi-stage speed-reducing of gear train, gear train is by commutating tooth wheels (40), worm and gear assembly B(39), lead screw guide rails assembly B(42), bearing seat C(37), two-way stretch upper thrust rod (35), two-way stretch lower thrust rod (43), bearing seat B(34), cross-brace plate (32) is formed, scissor two power bar pushing mechanism rail plate assembly C(33), bearing seat B(34), two-way stretch upper thrust rod (35), two-way stretch lower thrust rod (43) realize tensile load load, when realizing two-way stretch, sample center centering is good, thus ensure that the geometric center position of test specimen is in the most central of imaging region all the time, be convenient to observation and image record, utilize triangle power amplification principle simultaneously, can also realize arriving super a high proportion of power at high proportion and amplify semi-static load.

8. according to claim 6 based on adjustable stretching-bending in-situ nano-indentation tester preloaded, it is characterized in that: described DC servo motor assembly B(45) in conjunction with the worm and gear assembly A(26 of sweep), lead screw guide rails assembly A(27) deceleration conduction, power is first loaded into feed screw nut Connection Block A(23) on, this feed screw nut Connection Block A(23) directly again masterpiece is used in high-accuracy pressure transducer (22) rear end, high-accuracy pressure transducer (22) leading portion is fixed on U-shaped connection B(44) on, power is again by U-shaped connection B(44) promote the pressure head and the guide rail connected unit (21) that are fixed wtih three-point bend test pressure head (20), finally realize the loading of bending load.

9. according to claim 4 based on adjustable stretching-bending in-situ nano-indentation tester preloaded, it is characterized in that: between described high accuracy displacement sensor (7) and high-accuracy pulling force sensor (17), sample holder sheet group (31), fixture upper cover (16), on loading direction, totally adopt parallel way to arrange.