CN102262016B - Cross-scale micro nanometer grade in-situ composite load mechanical property testing platform - Google Patents
Cross-scale micro nanometer grade in-situ composite load mechanical property testing platform Download PDFInfo
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Abstract
The invention relates to a cross-scale micro nanometer grade in-situ composite load mechanical property testing platform, belonging to electromechanics. The cross-scale micro nanometer grade in-situ composite load mechanical property testing platform is composed of a precision drive and transmission unit, a signal detection and control unit and a clamping, connecting and supporting unit, wherein, in the precision drive and transmission unit, a DC servo motor provides power output, and a two-stage worm and gear mechanism with large reduction ratio and a precision ball screw mechanism transmit power; the signal detection and control unit is composed of a precision displacement sensor, a precision pull pressure sensor and a coder in coaxial rigid connection with the DC servo motor; and the clamping, connecting and supporting unit comprises a clamper component for locating and mounting a standard test specimen, and the like. The cross-scale micro nanometer grade in-situ composite load mechanical property testing platform can be compatible with imaging instruments, and performs a cross-scale in-situ micro nanometer composite load test on a macroscopic test specimen through observation via the imaging instruments, so as to perform in-situ monitoring on processes of microscopic deformation, injury and fracture of materials, so that a new testing method for revealing the mechanical properties and the injury mechanism of the materials at the micro nanometer grade is provided.
Description
Technical field
The present invention relates to electrical category, particularly a kind of scale micro nanometer grade in-situ composite load mechanical property testing platform of striding.The combined load mechanical test that can under the in-situ monitoring of the microscopic imaging instruments such as Electronic Speculum (such as scanning electron microscope SEM, transmission electron microscope TEM, scanning probe microscopy SPM etc.), comprise original position stretching/compression verification, original position shearing test, original position stretching/shearing, compression/shearing test, can carry out online observation to microdeformation, the damage and fracture process of material, can realize the data acquisition and controlling to load/displacement signal, but the mechanical characteristic of test material under nanoscale and damage mechanism.
Background technology
The in-situ nano mechanical test refers under nanoscale material for test be carried out in the Mechanics Performance Testing process, by electron microscope, atomic force microscope and or the instrument such as optical microscope microdeformation damage that material under the load is occured a kind of mechanical test technology of carrying out omnidistance dynamic monitoring.The announcement that this technology is deep the Micromechanics behavior of various types of materials and goods thereof, micromechanism of damage and and load and material property between the correlativity rule.In the category of many nanometer mechanics tests, elastic modulus, hardness, break limit, the parameters such as shear modulus are the topmost tested objects in little member mechanical property testing, produced various test for these mechanical quantities, such as the stretching/compressing method, shearing method, torsional technique, bending method, Using Nanoindentation and eardrum method etc., wherein with the more comprehensive strength characteristics of reactive means of original position stretching/compression verification method, and can measure the most intuitively elasticity modulus of materials, the important mechanics parameter such as yield limit and fracture strength also can obtain the material shear modulus by shearing test simultaneously, the forces associated mathematic(al) parameters such as shear resistance.
At present, bud is still located in the test of in-situ nano stretching/compressing, be in particular in: (1) is subject to atomic force microscope, the restriction of the cavity space of scanning electron microscope and transmission electron microscope etc., present majority all concentrate on take little/receive Mechatronic Systems technique as the basis, to nanotube, on the simple in-situ nano extension test of the atomic minor structure such as nano wire and membraneous material, lack the trans-scale in-situ nanometer mechanical test to macro-size (membraneous material or three-dimensional test specimen), thereby seriously hindered academia to the Micromechanics behavior of large-size element and the new phenomenon of damage mechanism, the discovery of new rule; (2) on means of testing and method, the original position stretching test that the in-situ nano impression test that is mainly undertaken by business-like nano-hardness tester and in-situ nano tensilometer carry out, two kinds of methods all exist cost of equipment expensive, method of testing is single, the characteristics that content measurement is of inadequate achievement, to compact conformation, the small and exquisite dual-purpose in-situ testing device of tension and compression of volume rarely has to be mentioned, has greatly restricted going deep into and development of research; (3) from content measurement, the content measurement of existing instrument and equipment is relatively single, the composite test instrument of two kinds and two or more load type rarely has to be mentioned, therefore more find the original position combined load tester for the above test specimen of characteristic dimension centimetre-sized, limited under the complex working condition Micro Mechanical Properties of material and the research of damage mechanism and deeply changed.
Before in position nanometer stretching/compression-shearing combined load mechanical test technology was used, stretching/compressing test and shear test generally were the tests of offing normal on Material Testing Machine.Testing machine loads sample equably according to the speed of regulation, draw load elongation chart by testing machine, and then obtain stress-strain curve under the load, therefore, initial drawing machine and shear tester are after material is broken or cut off, and draw the mechanics parameter such as the tensile yield limit, the pulling strengrth limit, shear Yield strength, the shearing limit of material.Tradition drawing machine and shear tester for all be the macro-scale test specimen, do not relate to the mechanical property of material nano yardstick category, also do not relate to the in-situ observation under the high resolving power micro imaging system.
Therefore, design little, the compact conformation of a kind of volume, measuring accuracy is high, can utilize the imaging system on-line monitoring macroscopic view microdeformation of test specimen under load such as electron microscope and the stretching/compressing of damage process-shearing combined load mechanical test platform very necessary.
Summary of the invention
The object of the present invention is to provide a kind of scale micro nanometer grade in-situ composite load mechanical property testing platform of striding, solved traditional drawing machine and shear tester for all be the macro-scale test specimen, do not relate to the mechanical property research of material nano yardstick category, also do not relate to the in-situ observation under the high resolving power micro imaging system; Lack the trans-scale in-situ nanometer mechanical test to macro-size (membraneous material or three-dimensional test specimen), cost of equipment is expensive, and method of testing is single, and content measurement is of inadequate achievement; The content measurement of existing instrument and equipment is relatively single, the composite test instrument of two kinds and two or more load type rarely has to be mentioned, more do not find the original position combined load tester for the above test specimen of characteristic dimension centimetre-sized, limited the Micro Mechanical Properties of material under the complex working condition and the research of damage mechanism and deeply changed.It is little that the present invention has a volume, compact conformation, available content measurement is abundant, measuring accuracy is high, the characteristics that rigidity is high, can pass through original position stretching/compression verification, original position shearing test and original position stretching/compression-shear load test and obtain the important mechanics parameters such as elastic modulus, shear modulus, yield limit and strength degree of material, microdeformation, damage and fracture process to material carry out in-situ monitoring, provide means of testing for disclosing mechanical characteristic and the damage mechanism of material under nanoscale.The present invention can implement to three-dimensional test specimen more than the characteristic dimension centimetre-sized platform of trans-scale in-situ combined load mechanical test, original position stretching/compression verification, original position pure shear test and original position stretching/Compression and cutting composite test can be comprised in three kinds of interior mechanical test tests, and detection and the analysis of load/displacement signal can be carried out synchronously.
Above-mentioned purpose of the present invention is achieved through the following technical solutions:
Stride scale micro nanometer grade in-situ composite load mechanical property testing platform, comprise accurate driving and gear unit, input and control module, clamping, connection and support unit; Described accurate driving and gear unit are: DC servo motor 1 is connected with one-level worm screw 7 by spring coupling 5 and provides power to export, and pass through first-stage worm gear worm transmission pair and second-stage worm gear worm drive adjutant transmission of power to precision ball screw I, II 16,21 places, and further by leading screw square nut I, II 51, the accurate straight reciprocating motions of 52 outputs;
Described input and control module comprise accurate contact capacitance displacement sensor 22, pull pressure sensor 28 and photoelectric encoder 31, provide according to the pulse of DC servo motor 1/direction control model and to comprise rate of deformation control, the control of power speed, three kinds of digital-to-analog feedback signal sources in rate of displacement is controlled at, wherein, the front end elasticity probe of the accurate contact capacitance displacement sensor 22 realization deformation process that contacts with displacement transducer fixed dam 25, the main part of accurate contact capacitance displacement sensor 22 is passed through displacement transducer pedestal trip bolt 42 and displacement transducer pedestal 18 clearance fit, and is connected with standard specimen fixture support frame I 19; Pull pressure sensor 28 is rigidly connected by power sensor trip bolt I, II 27,45 with power sensor fixed dam 26 and standard specimen fixture support frame II 24 respectively, the flexible direction of displacement transducer 22 front end elasticity probes, power sensor 28 be subjected to force direction identical with the flexible direction of standard specimen 2 under load, to guarantee the accuracy of displacement/load signal detection;
Described clamping, connection and support unit comprise standard specimen anchor clamps I, II 4,30, anchor clamps pressing plate I, II 3,32 and standard specimen 2, wherein, standard specimen 2 be installed in the dovetail grooved standard specimen anchor clamps I of its consistent size, II 4,30 in, and by compressing with standard specimen anchor clamps I, II 4,30 anchor clamps pressing plate I, the II 3,32 that are fastenedly connected by pressing plate trip bolt 44, prevent moving freely at compression or shearing test process Plays test specimen 2; Simultaneously, the whole height of test platform has guaranteed the requirement for height of its complete coincidence imaging after the article carrying platform that is installed on the Image-forming instruments such as scanning electron microscope, can with the microscopic imaging instrument such as Electronic Speculum, use as scanning electron microscope SEM, transmission electron microscope TEM, scanning probe microscopy SPM etc. are compatible;
Described first-stage worm gear worm transmission pair is comprised of one-level worm screw 7 and the one-level turbine 8 that is fastened on the second-stage worm 11; The second-stage worm gear worm transmission pair is comprised of second-stage worm 11 and second-stage worm gear I, II 9,13.
Described DC servo motor 1 is fastenedly connected by motor trip bolt 48 and motor flange dish 53, and by the solid screw 33 of ring flange directly and platform base 20 fastening; One-level worm screw 7 is fixed on the platform base 20 by one-level worm bearing 54, one-level worm shaft bearing 6 and second-stage worm bearing I, II 10,15, second-stage worm bearing seat I, II 49,14 respectively with second-stage worm 11; First-stage worm gear 8 and second-stage worm gear 9,13 respectively by worm gear attachment screw I, II 34,50 and one-level worm screw 7 and precision ball screw I, II 16,21 be rigidly connected; Precision ball screw I, II 16 be used for to be installed, 21 leading screw fixed pedestal I, II, III, IV 23,36,39,46 are connected with platform base 20 by leading screw fixed pedestal trip bolt V, III, IV, I, II, VI 43,38,40,35,37,47 respectively; Second-stage worm bearing seat I, II 49,14 perpendicular type groove and platform base 20 have guaranteed the two-stage worm couple by the gluing mode that connects centre distance.
Described standard specimen anchor clamps I, II 4,30 by anchor clamps trip bolt 29 and standard specimen fixture support frame I, II 19,24 connect, standard specimen anchor clamps I, II 4, the circle center that 30 through hole center forms overlaps with the geometric center point of standard specimen 2, its structure provides four kinds of test specimen clamping patterns, to guarantee that test platform can carry out respectively original position stretching/compression verification, double mode original position draws (pressure) to cut to turn combined load test and original position pure shear test, be that test platform and standard specimen 2 stretching/compressing axis directions are mutually 0 °, 30 °, the load mode at 60 ° or 90 ° angles is by conversion standard specimen anchor clamps I, II 4, the combined load test function can be realized in 30 installation site; Standard specimen anchor clamps I, II 4,30 match, change with structure and the size of standard specimen 2.
In described leading screw fixed pedestal I by wire cutting technology processing, III, II, IV 23,39,36,46 the mounting hole respectively interference guide pole I, II 17,55 are installed, and this guide pole I, II 17,55 cooperate with leading screw square nut I, II 51,52 via clearance, can guarantee that in test process leading screw square nut 51,52 can not produce because of the difference in height of standard specimen 2 force-detecting positions and ball- screw 16,21 stress points rollover and the phenomenon of toppling.
Test platform can be installed on the combined load mechanical test that comprises original position stretching/compression verification, original position shearing test, original position stretching/shearing, compression/shearing test under the in-situ monitoring of microscopic imaging instrument (such as scanning electron microscope SEM, transmission electron microscope TEM, scanning probe microscopy SPM etc.), can carry out online observation to microdeformation, the damage and fracture process of material, can realize the data acquisition and controlling to load/displacement signal, but the mechanical characteristic of test material under nanoscale and damage mechanism.
Beneficial effect of the present invention is: compared with prior art, volume of the present invention is small and exquisite, compact conformation, measuring accuracy is high, available content measurement is abundant, distortion/displacement/rate of loading is controlled, can be installed on the article carrying platform of various main flow electron microscope vacuum cavities, also can use with the imaging devices such as atomic force microscope, Raman spectrometer, X-ray diffractometer, optical microscope are compatible, have wide range of applications.Can carry out the trans-scale in-situ mechanical test to macroscopical test specimen of various materials, and can realize continuously, intermittence etc. multiple load mode, to material and goods thereof load under microdeformation dynamically observe, to disclose the mechanical behavior of material under nanoscale and damage mechanism.And the synchronous detection by load/displacement signal, in conjunction with related algorithm, but also automatic Fitting generates stress-strain diagram under the load.In sum, the present invention is to enriching in-situ nano mechanical test content and promoting material mechanical performance measuring technology and equipment to have important theory significance and good application and development future.
Description of drawings
Fig. 1 is three-dimensional appearance structural representation of the present invention;
Fig. 2 is that master of the present invention looks synoptic diagram;
Fig. 3 is schematic top plan view of the present invention;
Fig. 4 is that synoptic diagram is looked on a left side of the present invention;
Fig. 5 to Fig. 9 is combined load test philosophy synoptic diagram of the present invention; Wherein Fig. 6 is pure extension/test pattern compression; Fig. 7 is the pure shear test pattern; Fig. 8 and Fig. 9 are stretching/compressing-shear load test pattern.
Among the figure: 1, DC servo motor 2, standard specimen 3, anchor clamps pressing plate I 4, standard specimen anchor clamps I 5, elastic coupling 6, one-level worm shaft bearing 7, one-level worm screw 8, first-stage worm gear 9, second-stage worm gear I 10, second-stage worm bearing I 11, second-stage worm 12, first-stage worm gear attachment screw 13, two-stage turbine II 14, second-stage worm bearing seat II 15, second-stage worm bearing 16, precision ball screw I 17, guide pole I 18, displacement transducer pedestal 19, standard specimen fixture support frame I 20, platform base 21, precision ball screw II 22, accurate contact capacitance displacement sensor 23, leading screw fixed pedestal I 24, standard specimen fixture support frame II 25, displacement transducer fixed dam 26, power sensor fixed dam 27, power sensor trip bolt I 28, pull pressure sensor 29, anchor clamps trip bolt 30, standard specimen anchor clamps II 31, photoelectric encoder 32, anchor clamps pressing plate II 33, ring flange trip bolt 34, second-stage worm gear attachment screw I 35, leading screw fixed pedestal trip bolt I 36, leading screw fixed pedestal II 37, leading screw fixed pedestal trip bolt II 38, leading screw fixed pedestal trip bolt III 39, leading screw fixed pedestal III 40, leading screw fixed pedestal trip bolt IV 41, bracing frame trip bolt 42, displacement transducer pedestal trip bolt 43, leading screw fixed pedestal trip bolt V 44, pressing plate trip bolt 45, power sensor trip bolt II 46, leading screw fixed pedestal IV 47, leading screw fixed pedestal trip bolt VI 48, motor trip bolt 49, second-stage worm bearing seat I 50, second-stage worm gear attachment screw II 51, leading screw square nut I 52, leading screw square nut II 53, motor flange dish 54, one-level worm bearing 55, the guide pole II.
Embodiment
Further specify detailed content of the present invention and embodiment thereof below in conjunction with accompanying drawing.
Referring to Fig. 1 to Fig. 9, the scale micro nanometer grade in-situ composite load mechanical property testing platform of striding of the present invention comprises accurate driving and gear unit, input and control module, clamping, connection and support unit; Described accurate driving and gear unit are: DC servo motor 1 is connected with one-level worm screw 7 by spring coupling 5 and provides power to export, and pass through first-stage worm gear worm transmission pair and second-stage worm gear worm drive adjutant transmission of power to precision ball screw I, II 16,21 places, and further by leading screw square nut I, II 51, the accurate straight reciprocating motions of 52 outputs;
Described input and control module comprise accurate contact capacitance displacement sensor 22, pull pressure sensor 28 and photoelectric encoder 31, provide according to the pulse of DC servo motor 1/direction control model and to comprise rate of deformation control, the control of power speed, three kinds of digital-to-analog feedback signal sources in rate of displacement is controlled at, wherein, the front end elasticity probe of the accurate contact capacitance displacement sensor 22 realization deformation process that contacts with displacement transducer fixed dam 25, the main part of accurate contact capacitance displacement sensor 22 is passed through displacement transducer pedestal trip bolt 42 and displacement transducer pedestal 18 clearance fit, and is connected with standard specimen fixture support frame I 19; Pull pressure sensor 28 is rigidly connected by power sensor trip bolt I, II 27,45 with power sensor fixed dam 26 and standard specimen fixture support frame II 24 respectively, the flexible direction of displacement transducer 22 front end elasticity probes, power sensor 28 be subjected to force direction identical with the flexible direction of standard specimen 2 under load, to guarantee the accuracy of displacement/load signal detection;
Described clamping, connection and support unit comprise standard specimen anchor clamps I, II 4,30, anchor clamps pressing plate I, II 3,32 and standard specimen 2, wherein, standard specimen 2 be installed in the dovetail grooved standard specimen anchor clamps I of its consistent size, II 4,30 in, and by compressing with standard specimen anchor clamps I, II 4,30 anchor clamps pressing plate I, the II 3,32 that are fastenedly connected by pressing plate trip bolt 44, prevent moving freely at compression or shearing test process Plays test specimen 2; Simultaneously, the whole height of test platform has guaranteed the requirement for height of its complete coincidence imaging after the article carrying platform that is installed on the Image-forming instruments such as scanning electron microscope, can with the microscopic imaging instrument such as Electronic Speculum, use as scanning electron microscope SEM, transmission electron microscope TEM, scanning probe microscopy SPM etc. are compatible;
Described first-stage worm gear worm transmission pair is comprised of one-level worm screw 7 and the one-level turbine 8 that is fastened on the second-stage worm 11; The second-stage worm gear worm transmission pair is comprised of second-stage worm 11 and second-stage worm gear I, II 9,13.
Described DC servo motor 1 is fastenedly connected by motor trip bolt 48 and motor flange dish 53, and by the solid screw 33 of ring flange directly and platform base 20 fastening; One-level worm screw 7 is fixed on the platform base 20 by one-level worm bearing 54, one-level worm shaft bearing 6 and second-stage worm bearing I, II 10,15, second-stage worm bearing seat I, II 49,14 respectively with second-stage worm 11; First-stage worm gear 8 and second-stage worm gear 9,13 respectively by worm gear attachment screw I, II 34,50 and one-level worm screw 7 and precision ball screw I, II 16,21 be rigidly connected; Precision ball screw I, II 16 be used for to be installed, 21 leading screw fixed pedestal I, II, III, IV 23,36,39,46 are connected with platform base 20 by leading screw fixed pedestal trip bolt V, III, IV, I, II, VI 43,38,40,35,37,47 respectively; Second-stage worm bearing seat I, II 49,14 perpendicular type groove and platform base 20 have guaranteed the two-stage worm couple by the gluing mode that connects centre distance.
Described standard specimen anchor clamps I, II 4,30 by anchor clamps trip bolt 29 and standard specimen fixture support frame I, II 19,24 connect, standard specimen anchor clamps I, II 4, the circle center that 30 through hole center forms overlaps with the geometric center point of standard specimen 2, its structure provides four kinds of test specimen clamping patterns, to guarantee that test platform can carry out respectively original position stretching/compression verification, double mode original position draws (pressure) to cut to turn combined load test and original position pure shear test, be that test platform and standard specimen 2 stretching/compressing axis directions are mutually 0 °, 30 °, the load mode at 60 ° or 90 ° angles is by conversion standard specimen anchor clamps I, II 4, the combined load test function can be realized in 30 installation site; Standard specimen anchor clamps I, II 4,30 match, change with structure and the size of standard specimen 2.
In described leading screw fixed pedestal I by wire cutting technology processing, III, II, IV 23,39,36,46 the mounting hole respectively interference guide pole I, II 17,55 are installed, and this guide pole I, II 17,55 cooperate with leading screw square nut I, II 51,52 via clearance, can guarantee that in test process leading screw square nut 51,52 can not produce because of the difference in height of standard specimen 2 force-detecting positions and ball- screw 16,21 stress points rollover and the phenomenon of toppling.
Test platform can be installed on the combined load mechanical test that comprises original position stretching/compression verification, original position shearing test, original position stretching/shearing, compression/shearing test under the in-situ monitoring of microscopic imaging instrument (such as scanning electron microscope SEM, transmission electron microscope TEM, scanning probe microscopy SPM etc.), can carry out online observation to microdeformation, the damage and fracture process of material, can realize the data acquisition and controlling to load/displacement signal, but the mechanical characteristic of test material under nanoscale and damage mechanism.
The scale micro nanometer grade in-situ composite load mechanical property testing platform of striding of the present invention mainly is comprised of precision driving and gear unit, input and control module, clamping, connection and support unit.Accurate driver element wherein is comprised of DC servo motor 1, spring coupling 5, first-stage worm gear worm gear pair, second-stage worm gear worm gear pair, precision ball screw I, II 16,21 etc., the two-stage worm couple all can provide the very big reduction gear ratio of 1:50, namely the accurate driving torque of DC servo motor 1 output can be realized slowing down largely increase square by above-mentioned transmission link, the ultralow strain rate of final output, the test request that loads to satisfy the Ultra-Low Speed quasistatic.Input wherein and control module mainly are made of accurate contact capacitance displacement sensor 22, pull pressure sensor 28 and photoelectric encoder 31, can provide for the pulse of DC servo motor 1/direction control model to comprise rate of deformation control, the control of power speed, rate of displacement three kinds of digital-to-analog feedback signal sources in being controlled at.The exquisite structure of test platform can make on its article carrying platform that is installed on various main flow electron microscope vacuum cavities, also can with atomic force microscope, Raman spectrometer, X-ray diffractometer, the imaging devices such as optical microscope are compatible to be used, and meet above-mentioned instrument and equipment fully to the specific requirement of imaging, wherein relate to by DC servo motor 1, accurate contact capacitance displacement sensor 22, pull pressure sensor 28 can be placed on outside the cavity of instrument by the closed guard of above-mentioned instrument and equipment with relevant power supply and signal lead with photoelectric encoder 31, in order to artificially test process is rationally controlled in the imaging device outside.
Consult accompanying drawing 1 to Fig. 9, a kind of scale micro nanometer grade in-situ composite load mechanical property testing platform of striding that can be used for the in-situ nano mechanical test involved in the present invention, design according to Hitachi TM-1000 type scanning electron microscope, the overall dimensions of this apparatus main body part is 93mm * 34mm * 99mm, can be installed in the inside cavity of various main flow scanning electron microscope and other micro imaging systems simultaneously.The model of DC servo motor 1 is maxon RE-MAX type, tested standard specimen 2 is the cu-based amorphous alloys material, its total length is 16mm, minimum widith is 1mm, photoelectric encoder 31 is the high-performance optical photoelectric coder of HEDL9140-500 line, cooperating the EPOS type to watch position control unit can accurately control DC servo motor 1, and then guarantees that the strain rate of test process is adjustable.Accurate contact capacitance displacement sensor 22(model is the WYM-1 type) and high precision pull pressure sensor 28(model be the UNCLB-5000 type) in order to the displacement/load signal in the synchronous detection stretching/compressing process, can provide and comprise that rate of deformation control, the control of power speed, rate of displacement are controlled at three kinds of interior digital-to-analog feedback signal sources for the pulse of DC servo motor 1/direction control model.
The present invention is in concrete test process, at first, tested standard specimen 2 clampings are being used for original position stretching (compression) and are shearing the standard specimen anchor clamps I of combined load test, II 4,30 dovetail grooved anchor clamps, and the position by the adjustment anchor clamps and utilize level meter and the detection of clock gauge guarantees coplanarity and accurate location in the test specimen test process.Standard specimen anchor clamps I, II 4,30 special construction can provide four kinds of test specimen clamping patterns, to guarantee that test platform can carry out respectively original position stretching/compression verification, double mode original position draws (pressure) to cut to turn combined load test and original position pure shear test, see accompanying drawing 5 to 9 explanations for details, be the load mode that test platform can realize respectively being mutually with standard specimen 2 stretching/compressing axis directions 0 °, 30 °, 60 ° and 90 °, can realize the combined load test function by the installation site of changing clamp.Accurate pull pressure sensor 28 and accurate contact capacitance displacement sensor 22 are arranged in parallel with the stand under load direction of standard specimen 2.Then, close the airtight baffle plate of scanning electron microscope vacuum chamber and by X, the accurate motion that drives worktable of Y-direction, in XOY plane, draft the accurate location of test point.Then, distortion or the load control mode of given combined load test, mode with pulse output drives the beginning test process, namely by testing algorithm program setting test condition and parameter, the accurate angular displacement of precision DC servomotor 1 output under the effect of time sequential pulse control signal, the final realization loads the Ultra-Low Speed quasistatic of standard specimen 2, and 28 couples of axial load F of Compression and Expansion of accurate pull pressure sensor detect in the test process, and make necessary correcting process by algorithm routine; Simultaneously the deflection h of test specimen is picked up synchronously by accurate contact capacitance displacement sensor 22, and two paths of signals is by analog to digital conversion and carry out sending into computing machine behind the necessary signal condition.In the whole process of test, the deformation damage situation of tested standard specimen 2 material under load is carried out dynamic monitoring by the scanning electron microscope imaging system of high magnification, and preserve simultaneously captured images or video recording, but by the also important mechanics parameters such as stress-strain curve, elastic modulus, yield strength, shear modulus and breakdown strength of Real-time Obtaining exosyndrome material mechanical property of host computer debugging software.In addition, by the control of time sequential pulse signal, also can realize that stepping loads, and draw (pressure) to cut the multi-mode method of testings such as testing fatigue, and then deformation damage mechanism and the mechanics military service behavior under load is furtherd investigate to material.
Claims (2)
1. stride scale micro nanometer grade in-situ composite load mechanical property testing platform for one kind, it is characterized in that: comprise accurate driving and gear unit, input and control module, clamping, connection and support unit;
Described accurate driving and gear unit are: DC servo motor (1) is connected with one-level worm screw (7) by spring coupling (5) and provides power to export, and locate by first-stage worm gear worm transmission pair and second-stage worm gear worm drive adjutant transmission of power to precision ball screw I, II (16,21), and further by leading screw square nut I, the accurate straight reciprocating motion of II (51,52) output; Described first-stage worm gear worm transmission pair is by one-level worm screw (7) and one-level turbine (8) mix proportion that is fastened on the second-stage worm (11); The second-stage worm gear worm transmission pair is by second-stage worm (11) and second-stage worm gear I, II (9,13) mix proportion; Described DC servo motor (1) is fastenedly connected by motor trip bolt (48) and motor flange dish (53), and by ring flange trip bolt (33) directly and platform base (20) fastening; One-level worm screw (7) is fixed on the platform base (20) by one-level worm bearing (54), one-level worm shaft bearing (6) and second-stage worm bearing I, II (10,15), second-stage worm bearing seat I, II (49,14) respectively with second-stage worm (11); First-stage worm gear (8) and second-stage worm gear (9,13) are rigidly connected by worm gear attachment screw I, II (34,50) and one-level worm screw (7) and precision ball screw I, II (16,21) respectively; Be connected with platform base (20) by leading screw fixed pedestal trip bolt V, III, IV, I, II, VI (43,38,40,35,37,47) respectively for installation precision ball screw I, the leading screw fixed pedestal I of II (16,21), II, III, IV (23,36,39,46); The perpendicular type groove of second-stage worm bearing seat I, II (49,14) and platform base (20) have guaranteed the centre distance of two-stage worm couple by the gluing mode that connects;
Described input and control module comprise accurate contact capacitance displacement sensor (22), pull pressure sensor (28) and photoelectric encoder (31), provide according to the pulse of DC servo motor (1)/direction control model to comprise rate of deformation control, the control of power speed, rate of displacement three kinds of digital-to-analog feedback signal sources in being controlled at; The front end elasticity of this precision contact capacitance displacement sensor (22) the probe realization deformation process that contacts with displacement transducer fixed dam (25), the main part of accurate contact capacitance displacement sensor (22) is passed through displacement transducer pedestal trip bolt (42) and displacement transducer pedestal (18) clearance fit, and is connected with standard specimen fixture support frame I (19); Pull pressure sensor (28) is rigidly connected by power sensor trip bolt I, II (27,45) with power sensor fixed dam (26) and standard specimen fixture support frame II (24) respectively, the flexible direction of displacement transducer (22) front end elasticity probe, power sensor (28) be subjected to force direction identical with the flexible direction of standard specimen (2) under load;
Described clamping, connection and support unit comprise standard specimen anchor clamps I, II (4,30), anchor clamps pressing plate I, II (3,32) and standard specimen (2), this standard specimen (2) be installed in the dovetail grooved standard specimen anchor clamps I of its consistent size, II (4,30) in, and compressed by the anchor clamps pressing plate I, the II (3,32) that are fastenedly connected by pressing plate trip bolt (44) with standard specimen anchor clamps I, II (4,30); Described standard specimen anchor clamps I, II (4,30) are connected with standard specimen fixture support frame I, II (19,24) by anchor clamps trip bolt (29), and standard specimen fixture support frame II (24) is arranged on the leading screw fixed pedestal I (23) of accurate driving and gear unit; The circle center that the through hole center of described standard specimen anchor clamps I, II (4,30) forms overlaps with the geometric center point of standard specimen (2); Test platform and standard specimen (2) stretching/compressing axis direction is mutually the load mode at 0 °, 30 °, 60 ° or 90 ° angle, can realize the combined load test function by the installation site of conversion standard specimen anchor clamps I, II (4,30); Standard specimen anchor clamps I, II (4,30) match with structure and the size of standard specimen (2).
2. that states according to claim 1 strides scale micro nanometer grade in-situ composite load mechanical property testing platform, it is characterized in that: in the mounting hole of described leading screw fixed pedestal I, III, II, IV (23,39,36,46) respectively interference guide pole I, II (17,55) are installed, and this guide pole I, II (17,55) cooperate with the via clearance of leading screw square nut I, II (51,52).
3The scale micro nanometer grade in-situ composite load mechanical property testing platform of striding according to claim 1 and 2 is characterized in that: stride scale micro nanometer grade in-situ composite load mechanical property testing platform and be installed in the microscopic imaging instrument.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110109253 CN102262016B (en) | 2011-04-29 | 2011-04-29 | Cross-scale micro nanometer grade in-situ composite load mechanical property testing platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110109253 CN102262016B (en) | 2011-04-29 | 2011-04-29 | Cross-scale micro nanometer grade in-situ composite load mechanical property testing platform |
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| Publication Number | Publication Date |
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| JP2002062229A (en) * | 2000-08-22 | 2002-02-28 | Rohm Co Ltd | Testing device for micro-component |
| CN2890890Y (en) * | 2006-04-14 | 2007-04-18 | 哈尔滨工业大学 | Micro-nanometer scale mechanical property tester |
| CN202057549U (en) * | 2011-04-29 | 2011-11-30 | 吉林大学 | Mechanics performance testing platform for cross-scale micro nano-scale in-situ combined loads |
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