CN108613886A - The mechanical property in-situ test auxiliary device of flexible substrates membrane shears load - Google Patents
The mechanical property in-situ test auxiliary device of flexible substrates membrane shears load Download PDFInfo
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- CN108613886A CN108613886A CN201810406299.9A CN201810406299A CN108613886A CN 108613886 A CN108613886 A CN 108613886A CN 201810406299 A CN201810406299 A CN 201810406299A CN 108613886 A CN108613886 A CN 108613886A
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- mechanical property
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- 238000012360 testing method Methods 0.000 title claims abstract description 40
- 238000011065 in-situ storage Methods 0.000 title claims abstract description 18
- 239000000758 substrate Substances 0.000 title claims abstract description 12
- 239000012528 membrane Substances 0.000 title claims abstract description 11
- 230000005540 biological transmission Effects 0.000 claims abstract description 10
- 238000005259 measurement Methods 0.000 claims abstract description 8
- 230000033001 locomotion Effects 0.000 claims abstract description 6
- 238000006073 displacement reaction Methods 0.000 claims description 15
- 230000008878 coupling Effects 0.000 claims description 5
- 238000010168 coupling process Methods 0.000 claims description 5
- 238000005859 coupling reaction Methods 0.000 claims description 5
- 238000004891 communication Methods 0.000 claims description 2
- 230000005611 electricity Effects 0.000 claims description 2
- 238000012545 processing Methods 0.000 claims description 2
- 239000010408 film Substances 0.000 abstract description 25
- 239000000463 material Substances 0.000 abstract description 23
- 239000010409 thin film Substances 0.000 abstract description 13
- 238000000034 method Methods 0.000 abstract description 6
- 230000008569 process Effects 0.000 abstract description 6
- 238000010008 shearing Methods 0.000 abstract description 6
- 230000007246 mechanism Effects 0.000 abstract description 5
- 230000008859 change Effects 0.000 abstract description 4
- 238000012625 in-situ measurement Methods 0.000 abstract description 4
- 238000005516 engineering process Methods 0.000 abstract description 3
- 238000004154 testing of material Methods 0.000 abstract description 2
- 238000011160 research Methods 0.000 description 7
- 230000006835 compression Effects 0.000 description 3
- 238000007906 compression Methods 0.000 description 3
- 230000002929 anti-fatigue Effects 0.000 description 2
- 230000006399 behavior Effects 0.000 description 2
- 230000032798 delamination Effects 0.000 description 2
- 239000002086 nanomaterial Substances 0.000 description 2
- 240000002853 Nelumbo nucifera Species 0.000 description 1
- 235000006508 Nelumbo nucifera Nutrition 0.000 description 1
- 235000006510 Nelumbo pentapetala Nutrition 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000004630 atomic force microscopy Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000002114 nanocomposite Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000011056 performance test Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/24—Investigating strength properties of solid materials by application of mechanical stress by applying steady shearing forces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/02—Details
- G01N3/06—Special adaptations of indicating or recording means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/02—Details
- G01N3/06—Special adaptations of indicating or recording means
- G01N3/068—Special adaptations of indicating or recording means with optical indicating or recording means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/0014—Type of force applied
- G01N2203/0025—Shearing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/02—Details not specific for a particular testing method
- G01N2203/06—Indicating or recording means; Sensing means
- G01N2203/0641—Indicating or recording means; Sensing means using optical, X-ray, ultraviolet, infrared or similar detectors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/02—Details not specific for a particular testing method
- G01N2203/06—Indicating or recording means; Sensing means
- G01N2203/067—Parameter measured for estimating the property
- G01N2203/0682—Spatial dimension, e.g. length, area, angle
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
Abstract
The present invention relates to Material Testing Technology more particularly to a kind of mechanical property in-situ test auxiliary devices of flexible substrates membrane shears load, include rack, rack-mounted load maintainer and the precision measurement unit of frame structure.The present invention loads shearing force, atomic force microscope directly observes the microstructure change of film under shearing force, to obtain the macro-mechanical property of sample by the screw rod transmission component of two sets of reverse motions to film test piece.The present invention can reappear operating mode of the thin-film material by shear-type load, deformation, deformation mechanism in situ measurement whole process and mechanical property are the strong test instruments studied elasticity modulus, internal stress and film base junction of the novel film material under this operating mode and close energy, failure parameter.
Description
Technical field
The present invention relates to Material Testing Technology field, more particularly to a kind of and scanning electron microscope, atomic force microscope, optics are aobvious
The mechanical property in-situ test auxiliary device for the flexible substrates membrane shears load that the coordinative composition of equipments such as micro mirror use.
Background technology
Currently, nanocomposite, thin-film material have many advantages, such as good good mechanical property, wear-resistant, high temperature resistant,
It is widely applied in every field, such as face coat, optical thin film, Low-E films, magnetic storage medium, micro-electro-mechanical systems
System（MEMS）Etc..If delamination, cracking, bulge etc. occur in use for thin-film device, show that structure occurs in device
Failure and loss function, this needs to be avoided in practical applications.So the research to thin film mechanical performance and antifatigue energy
The test of power just seems extremely important.But the mechanical property due to micro/nano-scale material differs greatly with macroscopic material, for dividing
The cupping machine for analysing the mechanical parameters traditional macros such as yield strength, fracture strength, the elasticity modulus of material, cannot expire
The Research Requirements of sufficient micro/nano-scale material especially thin-film material.Moreover, can not be to thin-film material with traditional tension test
Microstructure is observed in real time, microtechnic can only be used to carry out observational study to material section.Study thin-film material outside
Microscopic appearance variation and damage status under power stress state have the mechanical behaviors such as the fracture, the delamination that understand material important
Meaning.It is thereby achieved that in-situ monitoring of the thin-film material under loaded-up condition, just seems very urgent and important.
Currently, lot of domestic and international research all concentrates on the development of film original position stretching/compression set.Such as：CN102346117
Torsion material mechanical performance test device, motor pass through worm and gear to microradian class precision in situ under a kind of disclosed scanning electron microscope
Transmission drives micro- turn of active dental forceps, driven dental forceps to cause stress-strain data equipped with torque sensor test torsional deflection.
CN102359912 discloses original position stretching/compression material mechanical test platform under a kind of scanning electron microscope based on semi-static load,
Dual-motors Driving realizes the microcosmic observation stretched with material after compression-loaded.Prior art research film is in a stretched state
The generation and propagation of Morphology Evolution and micro-crack calculate the mechanics parameters such as yield strength, the fracture strength of film, and estimate whereby
The anti-fatigue ability and service life of film.In terms of compressive load, elastic film is carried in single shaft in main research flexible substrate
Fold or buckling under lotus form problem, and the mechanics parameters such as the elasticity modulus of measuring and calculating film, internal stress and combination energy whereby.Such as
Combined load type material Mechanics Performance Testing device is bent in microscope drop-down disclosed in CN102384875, by driving elbow
Sideway feed makes test specimen occur bending and deformation.
However, existing in-situ test instrument there are the problem of have：（1）It is too simple to simulate operating mode, cannot simulate such as shearing
Load causes the complex deformation of dislocation, can not detect film base binding ability of the film test piece under shearing deformation, pattern variation with
And failure parameter etc.；（2）In-situ test instrument is mutual indepedent with AFM data, it is difficult to reappear thin-film material change loaded
Shape or even the entire dynamic process of failure, are not carried out in-situ observation truly；（3）Mechanism is complicated, such as
CN102384875, microscopic angle is bad, test piece deformation process observation inconvenience etc..
Invention content
In view of the above problems, the goal of the invention of the present invention be to provide one kind can be complicated under in situ measurement test specimen shear-type load
Flexible thin-film material's shear-type load mechanical property in-situ test instrument of deformation.
In order to achieve the above object, the scheme that uses of the present invention for：A kind of mechanical property of flexible substrates membrane shears load is former
Bit test auxiliary device, which is characterized in that include rack, rack-mounted load maintainer and the accurate survey of frame structure
Measure unit；Load maintainer includes two sleeve screw rod transmission components of negative direction setting, is watched including precision per sleeve screw rod transmission component
Direct current generator, lead screw, sliding block, tabletting, shaft coupling, bearing are taken, elaborate servo direct current generator is mounted in rack, and elaborate servo is straight
Galvanic electricity machine drives lead screw rotation, lead screw to be assemblied in rack by bearing, and lead screw is driven with sliding block cooperation；Pressure is connected on sliding block
Piece, tabletting is by film test piece side compressing on sliding block；Elaborate servo direct current generator drives two sliding blocks mobile to examination in the opposite direction
Part loads shear-type load；Precision measurement unit includes photoelectric encoder, displacement sensor, capture card and PC machine, photoelectric coding
Device is coaxially connected with precision DC servo motor, and displacement sensor is mounted on frame and slider bottom acquires slider displacement amount；Light
Photoelectric coder, displacement sensor are transferred to PC machine processing, PC machine and microscope host communication by capture card gathered data.
Preferably, institute's displacement sensors are grating scale, grating ruler reading head is mounted on the frame side wall on the outside of lead screw, main
Ruler is mounted on slider bottom and acquires slider displacement amount.
Preferably, the tabletting and film test piece contact surface are with decorative pattern.
Preferably, the frame is equipped with the threaded hole that can mount in electron microscope cavity.
Preferably, the elaborate servo direct current generator is equipped with retarder.
The present invention loads shearing force, atomic force microscopy by the screw rod transmission component of two sets of reverse motions to film test piece
Mirror directly observes the microstructure change of film under shearing force, to obtain the macro-mechanical property of sample.The present invention can reappear
Thin-film material is by the operating mode of shear-type load, deformation, deformation mechanism and mechanical property in situ measurement whole process, is research
Elasticity modulus, internal stress and film base junction of the novel film material under this operating mode close the strong test instrument of energy, failure parameter.
Description of the drawings
Fig. 1 is the schematic three dimensional views that film test piece is clamped in the embodiment of the present invention；
Fig. 2 is Precision measurement unit schematic diagram in the embodiment of the present invention.
Description of symbols in figure：
1- racks.
2- load maintainers, 21- elaborate servo direct current generators, 22- lead screws, 23- sliding blocks, 24- tablettings, 25- shaft couplings, 26-
Bearing.
3- precision measurement units, 31- photoelectric encoders, 32- capture cards, 33- grating scales, 34- microscope hosts, 35-PC
Machine, 36 drivers.
4- film test pieces.
Specific implementation mode
For a better understanding of the present invention, with reference to the accompanying drawings and detailed description to technical scheme of the present invention do into
One step illustrates, referring to Fig. 1 to Fig. 2.
The mechanical property in-situ test auxiliary device of flexible substrates membrane shears load according to embodiments of the present invention, mainly by three
A constituent part respectively supports the rack 1 of entire mechanism, rack-mounted load maintainer 2 and precision measurement unit 3.
Load maintainer 2 includes two sleeve screw rod transmission components, and the convert rotational motion of motor is straight line by screw rod transmission component
Movement, two sets of component movement directions are reversed.Include elaborate servo direct current generator 21, lead screw per sleeve screw rod transmission component
22, sliding block 23, tabletting 24, shaft coupling 25, bearing 26, elaborate servo direct current generator 21 is mounted in rack 1, fine in order to reach
Mobile, motor is connect by shaft coupling 25 with 22 head end of lead screw again equipped with retarder, output shaft.Lead screw 22 passes through bearing 26
It is assemblied in rack 1, coordinates with sliding block 23 on lead screw 22 and be driven.It is connected with tabletting 24 on sliding block 23, tabletting 24 is by film test piece 4
Side compressing is on sliding block 23, for the firm of folder, with decorative pattern on the wafer surface contacted with film test piece 4.And for
Observation is closed, rack 1 is diagonally equipped with the threaded hole that can mount in electron microscope cavity.When test, elaborate servo direct current generator
It drives two sliding blocks to move in the opposite direction and loads shear-type load to test specimen.
Precision measurement unit 3 includes photoelectric encoder 31, capture card 32, grating scale 33, driver 36 and PC machine 35, light
Photoelectric coder 31 with the precision DC servo motor 21 of load maintainer 2 is coaxial is connected, 33 reading head of grating scale is mounted on rack 1
On, 33 main scale of grating scale is mounted on 23 collected downhole slider displacement amount of sliding block.PC machine 35 drives precision DC by driver 36
Servo motor 21, photoelectric encoder 31 can be directed to the pulse of precision DC servo motor 21 or direction controlling provides rate and rotating speed
Feedback signal, reach precise closed-loop control, grating scale 33 is detected the displacement of sliding block 23, due to its for rigidity, change
It is counted as the displacement of film.Photoelectric encoder 31, grating scale 33 are transferred to 35 analysis meter of PC machine by 32 gathered data of capture card
It calculates, PC machine 35 is communicated with microscope host 34, synchronous with AFM data to realize in-situ test auxiliary device,
The entire dynamic process of the deformation loaded of recording sheet material or even failure, realizes in-situ observation truly.It thus can
The macromechanics behavior of quantitative study material and the relationship of micromechanism.The present invention can reappear work of the thin-film material by shear-type load
Condition, deformation, deformation mechanism and mechanical property in situ measurement whole process are research novel film materials under this operating mode
Elasticity modulus, internal stress and combine can strong test instrument.
Claims (5)
1. a kind of mechanical property in-situ test auxiliary device of flexible substrates membrane shears load, which is characterized in that including framed
The rack of frame structure, rack-mounted load maintainer and precision measurement unit；
Load maintainer includes two sleeve screw rod transmission components of negative direction setting, includes that elaborate servo is straight per sleeve screw rod transmission component
Galvanic electricity machine, lead screw, sliding block, tabletting, shaft coupling, bearing, elaborate servo direct current generator are mounted in rack, elaborate servo direct current
Machine drives lead screw rotation, lead screw to be assemblied in rack by bearing, and lead screw is driven with sliding block cooperation；Tabletting is connected on sliding block,
Tabletting is by film test piece side compressing on sliding block；Elaborate servo direct current generator drives two sliding blocks, and movement adds to test specimen in the opposite direction
Carry shear-type load；
Precision measurement unit includes photoelectric encoder, displacement sensor, capture card and PC machine, photoelectric encoder and precision DC
Servo motor is coaxially connected, and displacement sensor is mounted on frame side wall and slider bottom acquires slider displacement amount；Photoelectric encoder,
Displacement sensor is transferred to PC machine processing, PC machine and microscope host communication by capture card gathered data.
2. the mechanical property in-situ test auxiliary device of flexible substrates membrane shears load according to claim 1, special
Sign is：Institute's displacement sensors are grating scale, and grating ruler reading head is mounted on the frame side wall on the outside of lead screw, and main scale is mounted on
Slider bottom acquires slider displacement amount.
3. the mechanical property in-situ test auxiliary device of flexible substrates membrane shears load according to claim 1, special
Sign is：The tabletting is with film test piece contact surface with decorative pattern.
4. the mechanical property in-situ test auxiliary device of flexible substrates membrane shears load according to claim 1, special
Sign is：The frame is equipped with the threaded hole that can mount in electron microscope cavity.
5. the mechanical property in-situ test auxiliary device of flexible substrates membrane shears load according to claim 1, special
Sign is：The elaborate servo direct current generator is equipped with retarder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810406299.9A CN108613886A (en) | 2018-04-30 | 2018-04-30 | The mechanical property in-situ test auxiliary device of flexible substrates membrane shears load |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810406299.9A CN108613886A (en) | 2018-04-30 | 2018-04-30 | The mechanical property in-situ test auxiliary device of flexible substrates membrane shears load |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108613886A true CN108613886A (en) | 2018-10-02 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810406299.9A Pending CN108613886A (en) | 2018-04-30 | 2018-04-30 | The mechanical property in-situ test auxiliary device of flexible substrates membrane shears load |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109297813A (en) * | 2018-11-08 | 2019-02-01 | 清华大学 | The elasticity modulus test method of nano thin-film in a kind of flexible substrates |
| CN110208113A (en) * | 2019-05-31 | 2019-09-06 | 南京理工大学 | It is a kind of to consider to draw the flexible membrane material shearing performance test method for cutting coupling effect |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102262016A (en) * | 2011-04-29 | 2011-11-30 | 吉林大学 | Cross-scale micro nanometer grade in-situ composite load mechanical property testing platform |
| CN106226155A (en) * | 2016-07-06 | 2016-12-14 | 上海交通大学 | A kind of composite thin plate inplane shear test fixture and test method |
-
2018
- 2018-04-30 CN CN201810406299.9A patent/CN108613886A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102262016A (en) * | 2011-04-29 | 2011-11-30 | 吉林大学 | Cross-scale micro nanometer grade in-situ composite load mechanical property testing platform |
| CN106226155A (en) * | 2016-07-06 | 2016-12-14 | 上海交通大学 | A kind of composite thin plate inplane shear test fixture and test method |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109297813A (en) * | 2018-11-08 | 2019-02-01 | 清华大学 | The elasticity modulus test method of nano thin-film in a kind of flexible substrates |
| CN110208113A (en) * | 2019-05-31 | 2019-09-06 | 南京理工大学 | It is a kind of to consider to draw the flexible membrane material shearing performance test method for cutting coupling effect |
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Application publication date: 20181002 |