CN102331370B - In-situ high-frequency fatigue material mechanical test platform under scanning electron microscope based on stretching/compressing mode - Google Patents

In-situ high-frequency fatigue material mechanical test platform under scanning electron microscope based on stretching/compressing mode Download PDF

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CN102331370B
CN102331370B CN 201110305113 CN201110305113A CN102331370B CN 102331370 B CN102331370 B CN 102331370B CN 201110305113 CN201110305113 CN 201110305113 CN 201110305113 A CN201110305113 A CN 201110305113A CN 102331370 B CN102331370 B CN 102331370B
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accurate
test
ball
test specimen
screw
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CN 201110305113
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CN102331370A (en
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赵宏伟
马志超
李秦超
王开厅
胡晓利
黄虎
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吉林大学
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Abstract

The invention relates to an in-situ high-frequency fatigue material mechanical test platform under a scanning electron microscope based on a stretching/compressing mode and belongs to the field of machinery and electronics. The test platform comprises a precise loading unit, a precise motion conversion unit, a load/displacement signal acquisition and control unit, a high-frequency driving unit and a test piece clamping and connecting unit. The test platform provided by the invention has the advantages that the structure is compact, the test precision is high, the strain rate and the test frequency are controllable, an in-situ high-frequency test based on the stretching/compressing mode can be performed on a three-dimensional test piece aiming at centimeter-scale or above in characteristic dimension under the condition of observation of various imaging instruments, the on-line monitoring can be carried out on the microcosmic deformation, damage and breaking process of a material under a fatigue stress, and a novel test method for revealing microcosmic deformation behaviors and a damage system of the material is provided.

Description

Mechanics testing platform for in-situ high frequency fatigue materials under scanning electron microscope based on stretching/compressing mode

Technical field

The present invention relates to electrical category, particularly a kind of mechanics testing platform for in-situ high frequency fatigue materials under scanning electron microscope based on stretching/compressing mode.Itself and scanning electron microscope, atomic force microscope, Raman spectrometer and optical microscope etc. have good compatibility, in conjunction with above-mentioned Image-forming instrument, under given applied stress or strain level, carry out material under the fatigue stress effect microdeformation, damage and fracture process carry out online observation, can realize collection, the record to load/displacement signal and control, for disclosing mechanical characteristic and the damage mechanism of material under micro-nano-scale, providing method of testing.

Background technology

original position micro nanometer mechanics measuring technology refers under micro-nano-scale carries out in the Mechanics Performance Testing process material for test, by electron microscope, atomic force microscope and or the Image-forming instrument such as optical microscope microdeformation that material under load is occurred, damage until the process of failure damage is carried out a kind of mechanical test technology of omnidistance dynamic monitoring.Certainly will be able to disclose the rule of material deformation damage under extraneous load by the in-situ mechanical means of testing, find more novel phenomenon and rule, the relevant test of carrying out with regard to the large-size test specimen will more be conducive to true mechanical behavior and the deformation damage mechanism under research material and goods service state thereof.

Fatigue phenomenon can be interpreted as material, part and member under CYCLIC LOADING, at certain point or some point, produces local permanent damage, and forms crackle or crackle is further expanded until the phenomenon ruptured fully after certain cycle index.The destruction that material or member cause under the alterante stress effect is fully different from the destruction character under dead weight.Bear member that alterante stress is used as in the situation that working stress also unexpected fracture may occur after far below the strength degree of material, experiencing certain working time.Under the alterante stress effect, due to the member profile and the material internal quality inhomogeneous, fault arranged, cause some regional area stress of member to reach yield limit, under the effect of alterante stress, to form gradually tiny microfissure at this regional area, and the serious stress of crack tip concentrate further cause crackle under the alterante stress effect constantly to internal extended, finally make material or member fracture destroy.

The commercialization fatigue tester is for the stress or the strain that provide sample or member to bear cycle or random variation, to be determined at the indexs such as endurance limit under the particular cycle radix and fatigue lifetime.Torture test can be divided into according to experimental enviroment: room temperature/high temperature/fatigue testing at low temperature, thermal fatigue test, corrosion fatigue test and contact fatigue test etc.; Load mode according to test specimen can be divided into: repeated tension and compression test, repeated bend test, torsional fatigue test and compound profit torture test etc.; Type according to Cyclic Stress can be divided into: constant amplitude fatigue test, frequency conversion torture test and random fatigue test etc.

At present, still locate bud for the research that can be used for the original position testing fatigue pertinent instruments under scanning electron microscope, be in particular in: (1) is from means of testing and method, the main ex situ testing fatigue undertaken by business-like fatigue tester, and fatigue tester is expensive, and operating noise is larger, debugging is complicated, content measurement is single, and to compact conformation, the small and exquisite original position fatigue test device based on stretch mode of volume rarely has to be mentioned.(2) be subject to the restriction of the cavity space of scanning electron microscope, current majority all concentrate on take micro-/receive Mechatronic Systems technique as the basis, on simple in situ nanoindentation to atomic minor structures such as nanometer and membraneous materials, lack the trans-scale in-situ nanometer mechanical test to macro-size (membraneous material or three-dimensional test specimen), because of the existence of size effect, the research of micro-member has been restricted to the evaluation to the mechanical property of large-size element; (3), from test frequency, current in situ fatigue test machine generally all only can provide the following low-cycle fatigue test of 50Hz, with the actual condition of material and goods thereof, is not inconsistent, and has also limited going deep into and development of correlative study.

Therefore, design a kind of measuring accuracy high, compact conformation, test frequency is higher, and can be very necessary with the compatible mechanics testing platform for in-situ high frequency fatigue materials based on stretch mode used of the imaging system such as electron microscope.

Summary of the invention

The object of the present invention is to provide a kind of mechanics testing platform for in-situ high frequency fatigue materials under scanning electron microscope based on stretching/compressing mode, solved the problems referred to above that present technology exists.The present invention can carry out the original position high-frequency test under any given applied stress or strain level under the dynamic monitoring of the observation instruments such as scanning electron microscope, and carries out constant amplitude or frequency conversion torture test under room temperature, and test frequency is controlled.With respect to the test of offing normal of transmission fatigue tester, the present invention can carry out the in situ fatigue test under stretching/compressing mode and can synchronously carry out precision detection and the closed-loop control of load/displacement signal under the dynamic monitoring of the Image-forming instruments such as scanning electron microscope.Proving installation and Zeiss EVO 18 type scanning electron microscope have good compatibility, also can use with all kinds of imaging system compatibilities with cavity or objective table structure, as atomic force microscope, Raman spectrometer, X-ray diffractometer and optical microscope etc.Can obtain by the original position testing fatigue the important mechanics parameters such as endurance limit of material, crack initiation, expansion and material failure fracture process to material carry out in-situ monitoring, for disclosing mechanical characteristic and the damage mechanism of material under micro-nano-scale, provide method of testing.

Above-mentioned purpose of the present invention is achieved through the following technical solutions:

Mechanics testing platform for in-situ high frequency fatigue materials under scanning electron microscope based on stretching/compressing mode, comprise accurate loading unit, precise motion converting unit, load/displacement signal collection and control module, high frequency drive unit and test specimen clamping and linkage unit;

Described accurate loading unit is: DC servo motor 1 is connected with test platform pedestal 22 by motor flange frame 2 ,offer fixed angular speed and dynamic torque output by Precision Pulse/direction control mode;

Described precise motion converting unit is: deceleration, increment to a certain degree carried out in the torque power with small resolution and angular displacement output that the one-level Spur Gear Driving formed by the driving and driven spur gear 25,29 in spur gear housing 3 second-stage worm gear worm drive adjutant DC servo motor 1 secondary, that consist of worm screw, worm gear 4,5 is exported; Finally by the accurate bidirectional ball guide screw nat formed by ball-screw nut support I, ball-screw nut support II, accurate bidirectional ball-screw 16,20,27, will rotatablely move and convert accurate linear reciprocating motion to; Driving and driven spur gear 25,29 is connected with DC servo motor 1 and worm screw 4 by flat key 26 respectively, this worm screw 4 is connected with test platform pedestal 22 by worm bearing 32 and worm shaft bearing 23, the accurate bidirectional ball guide screw nat consisted of ball-screw nut support I, II, accurate bidirectional ball-screw 16,20,27 is by leading screw fixed supporting seat 6 location, and the to-and-fro movement of ball-screw nut support I, II, (16,20) is by being connected to guide rail slide block I, the II(17,21 on precise guide rail track (19)) led;

Described load/displacement signal collection and control module are counted photoelectric encoder 24 by accurate pull pressure sensor 14, accurate tangent displacement sensor 18 and high line and are formed, this high line is counted photoelectric encoder 24 and is connected with DC servo motor 1, accurate tangent displacement sensor 18 is through accurate flexible hinge 7 fixing by displacement transducer trip bolt 30, and accurate pull pressure sensor 14 is fixedly connected with power sensor base 15; The feedback signal source of the pulse of DC servo motor 1/direction closed loop control mode is demarcated the rate of displacement digital quantity by rate of deformation, two kinds of analog quantitys of rate of loading and scrambler and is provided, and test platform can realize that permanent rate of deformation, constant loading rate and three kinds of load/unload modes of permanent rate of displacement provide accurate stress and strain reference quantity for high-frequency test;

Described high frequency drive unit is comprised of accurate flexible hinge 7, piezoelectric stack 8, and wherein piezoelectric stack 8 is installed in the square groove of accurate flexible hinge 7, and, axis setting coplanar with test specimen 11; Accurate flexible hinge 7) special construction can guarantee under given action of pulling stress, and piezoelectric stack 8 is all the time in pressured state, and accurate flexible hinge 7 screw 9 that is connected through the hinge is rigidly connected with ball-screw nut support II 20;

Described test specimen clamping and linkage unit are comprised of test specimen 11, piece fixture body bracing frame 13, clamp body pressing plate I, II 10,12, power sensor base 15, leading screw fixed supporting seat 6 and test platform pedestal 22, and test specimen 11 completes clamping by the clamp body pressing plate I with broached-tooth design, II 10,12, accurate flexible hinge 7, piece fixture body bracing frame 13 in the compression mode.

Described accurate flexible hinge 7 can guarantee that test specimen 11 does the used time at tension stress, be installed on piezoelectric stack 8 in the square groove of accurate flexible hinge 7 all the time in pressured state, can guarantee that stacking 8 in the horizontal lower piezoelectric of given applied stress has certain displacement and load fan-out capability, piezoelectric stack 8 is coplanar with test specimen 11, axis arranged, also can guarantee that test specimen 11 is subject to the single shaft fatigue effect of stress; Accurate flexible hinge 7 screw 9 that is connected through the hinge can guarantee, according to certain scale-up factor, the accurate shift reciprocately of piezoelectric stack 8 outputs is passed to the hinge front end for clamping the zigzag structure place of test specimen 11 with the rigidly connected mode of ball-screw nut support II 20 simultaneously.

The body portion of described tangent displacement sensor 18 is installed in the circular hole with ball-screw nut support II 20 rigidly connected accurate flexible hinges 7, and be fixed by displacement transducer screw 30, front-end probe part and piece fixture body bracing frame 13 Elastic Contact, tangent displacement sensor 18 actual detect be deformed into the relative deformation between piece fixture body bracing frame 13 and accurate flexible hinge 7 side plates; For the weight of balance tangent displacement sensor 18, the heteropleural of accurate flexible hinge 7 has been done necessary counterweight; Accurate pull pressure sensor 14 and tangent displacement sensor 18 are all in the coplanar installation of test specimen 28, and the stand under load direction is subject to loading direction identical with test specimen 11.

Described accurate bidirectional ball-screw 27 is provided with two sections little helical pitch raceways that rotation direction is different, can guarantee in the extension test process of given applied stress level, ball-screw nut support I, II 16, 20 can realize synchronous counter motion, thereby the geometric center position that guarantees test specimen 11 is the most central in imaging region all the time, be convenient to observation and the recording image of Image-forming instrument, simultaneously, guide rail slide block I, II 17, 21 are close on precise guide rail track 19 by dovetail grooved mechanism respectively, and respectively with ball-screw nut support I, II 16, 20 are rigidly connected, accurate guide effect is played in the to-and-fro movement that the accurate bidirectional ball guide screw nat is exported.

Described piece fixture body bracing frame 13 and accurate flexible hinge 7 all adopt the line cutting mode to be processed as laciniation with the surface of contact of test specimen 11, clamp body pressing plate I, II (10,12) also adopt the cross hatch cutting mode to process rolling structure with the surface of contact of test specimen (11), can improve the reliability and stability of test specimen clamping in high-frequency test.

Described piece fixture body supports 13 and all processes with semicircular groove by the line cutting mode with ball-screw nut support I 16, and be provided with steel ball in this groove, reduce by the steel ball be embedded in groove the detection error of bringing because of friction factor in the load signal gatherer process.

Test platform size of main body of the present invention is about 140mm * 44mm * 80mm, with Zeiss EVO 18 type scanning electron microscope, has good structure compatible, vacuum compatibility and Electro Magnetic Compatibility.

Beneficial effect of the present invention is: compared with prior art, compact conformation of the present invention, measuring accuracy is high, available content measurement enriches, with Zeiss EVO 18 type scanning electron microscope, has good compatibility, also can use with all kinds of imaging system compatibilities with cavity or objective table structure, have wide range of applications.Can carry out to the three-dimensional test specimen more than various characteristic dimension centimetre-sized the test of trans-scale in-situ fatigue mechanics, to material and goods thereof in load the crack initiation under lower fatigue stress effect, expansion dynamically observe, to disclose the mechanical behavior of material under micro-nano-scale and damage mechanism.And, by the synchronous detection of load/displacement signal, in conjunction with related algorithm, but also automatic Fitting generates stress-strain diagram and the curve of fatigue under load.In sum, the present invention is to enriching original position and promoting material mechanical performance measuring technology and equipment to have important theory significance and good application and development future.

The accompanying drawing explanation

Fig. 1 is overall appearance structural representation of the present invention;

Fig. 2 is that master of the present invention looks schematic diagram;

Fig. 3 is schematic rear view of the present invention;

Fig. 4 is schematic top plan view of the present invention;

Fig. 5, Fig. 6 are flexible hinge structural representation of the present invention;

Fig. 7, Fig. 8 are clamp body bracing frame schematic diagram of the present invention.

In figure: 1, DC servo motor 2, motor flange frame 3, spur gear housing 4, worm screw 5, worm gear 6, leading screw fixed mounting base 7, accurate flexible hinge 8, piezoelectric stack 9, chain connection screw 10, clamp body pressing plate I 11, test specimen 12, clamp body pressing plate II 13, piece fixture body bracing frame 14, accurate pull pressure sensor 15, power sensor base 16, ball-screw nut support I 17, guide rail slide block I 18, tangent displacement sensor 19, precise guide rail track 20, ball-screw nut support II 21, guide rail slide block II 22, test platform pedestal 23, worm shaft bearing 24, high line is counted photoelectric encoder 25, active spur gear 26, flat key 27, accurate bidirectional ball-screw 28, power sensor trip bolt 29, driven spur gear 30, displacement transducer trip bolt 31, motor flange dish gib screw 32, worm bearing 33, the clamp body trip bolt.

Embodiment

Further illustrate detailed content of the present invention and embodiment thereof below in conjunction with accompanying drawing.

Referring to Fig. 1 to Fig. 8, mechanics testing platform for in-situ high frequency fatigue materials under scanning electron microscope based on stretching/compressing mode of the present invention, comprise accurate loading unit, precise motion converting unit, load/displacement signal collection and control module, high frequency drive unit and test specimen clamping and linkage unit;

Described accurate loading unit is: DC servo motor 1 is connected with test platform pedestal 22 by motor flange frame 2 ,offer fixed angular speed and dynamic torque output by Precision Pulse/direction control mode; DC servo motor 1 is fixed on test platform pedestal 22 by motor flange dish gib screw 31;

Described precise motion converting unit is: deceleration, increment to a certain degree carried out in the torque power with small resolution and angular displacement output that the one-level Spur Gear Driving formed by the driving and driven spur gear 25,29 in spur gear housing 3 second-stage worm gear worm drive adjutant DC servo motor 1 secondary, that consist of worm screw, worm gear 4,5 is exported; Finally by the accurate bidirectional ball guide screw nat formed by ball-screw nut support I, ball-screw nut support II, accurate bidirectional ball-screw 16,20,27, will rotatablely move and convert accurate linear reciprocating motion to; Driving and driven spur gear 25,29 is connected with DC servo motor 1 and worm screw 4 by flat key 26 respectively, this worm screw 4 is connected with test platform pedestal 22 by worm bearing 32 and worm shaft bearing 23, the accurate bidirectional ball guide screw nat consisted of ball-screw nut support I, II, accurate bidirectional ball-screw 16,20,27 is by leading screw fixed supporting seat 6 location, and the to-and-fro movement of ball-screw nut support I, II, (16,20) is by being connected to guide rail slide block I, the II(17,21 on precise guide rail track (19)) led;

Described load/displacement signal collection and control module are counted photoelectric encoder 24 by accurate pull pressure sensor 14, accurate tangent displacement sensor 18 and high line and are formed, this high line is counted photoelectric encoder 24 and is connected with DC servo motor 1, accurate tangent displacement sensor 18 is through accurate flexible hinge 7 fixing by displacement transducer trip bolt 30, and accurate pull pressure sensor 14 is fixedly connected with power sensor base 15; The feedback signal source of the pulse of DC servo motor 1/direction closed loop control mode is demarcated the rate of displacement digital quantity by rate of deformation, two kinds of analog quantitys of rate of loading and scrambler and is provided, and test platform can realize that permanent rate of deformation, constant loading rate and three kinds of load/unload modes of permanent rate of displacement provide accurate stress and strain reference quantity for high-frequency test;

Described high frequency drive unit is comprised of accurate flexible hinge 7, piezoelectric stack 8, and wherein piezoelectric stack 8 is installed in the square groove of accurate flexible hinge 7, and, axis setting coplanar with test specimen 11; Accurate flexible hinge 7) special construction can guarantee under given action of pulling stress, and piezoelectric stack 8 is all the time in pressured state, and accurate flexible hinge 7 screw 9 that is connected through the hinge is rigidly connected with ball-screw nut support II 20;

Described test specimen clamping and linkage unit are comprised of test specimen 11, piece fixture body bracing frame 13, clamp body pressing plate I, II 10,12, power sensor base 15, leading screw fixed supporting seat 6 and test platform pedestal 22, and test specimen 11 completes clamping by the clamp body pressing plate I with broached-tooth design, II 10,12, accurate flexible hinge 7, piece fixture body bracing frame 13 in the compression mode.

Described accurate flexible hinge 7 can guarantee that test specimen 11 does the used time at tension stress, be installed on piezoelectric stack 8 in the square groove of accurate flexible hinge 7 all the time in pressured state, can guarantee that stacking 8 in the horizontal lower piezoelectric of given applied stress has certain displacement and load fan-out capability, piezoelectric stack 8 is coplanar with test specimen 11, axis arranged, also can guarantee that test specimen 11 is subject to the single shaft fatigue effect of stress; Accurate flexible hinge 7 screw 9 that is connected through the hinge can guarantee, according to certain scale-up factor, the accurate shift reciprocately of piezoelectric stack 8 outputs is passed to the hinge front end for clamping the zigzag structure place of test specimen 11 with the rigidly connected mode of ball-screw nut support II 20 simultaneously.

The body portion of described tangent displacement sensor 18 is installed in the circular hole with ball-screw nut support II 20 rigidly connected accurate flexible hinges 7, and be fixed by displacement transducer screw 30, front-end probe part and piece fixture body bracing frame 13 Elastic Contact, tangent displacement sensor 18 actual detect be deformed into the relative deformation between piece fixture body bracing frame 13 and accurate flexible hinge 7 side plates; For the weight of balance tangent displacement sensor 18, the heteropleural of accurate flexible hinge 7 has been done necessary counterweight; Accurate pull pressure sensor 14 and tangent displacement sensor 18 are all in the coplanar installation of test specimen 28, and the stand under load direction is subject to loading direction identical with test specimen 11.

Described accurate bidirectional ball-screw 27 is provided with two sections little helical pitch raceways that rotation direction is different, can guarantee in the extension test process of given applied stress level, ball-screw nut support I, II 16, 20 can realize synchronous counter motion, thereby the geometric center position that guarantees test specimen 11 is the most central in imaging region all the time, be convenient to observation and the recording image of Image-forming instrument, simultaneously, guide rail slide block I, II 17, 21 are close on precise guide rail track 19 by dovetail grooved mechanism respectively, and respectively with ball-screw nut support I, II 16, 20 are rigidly connected, accurate guide effect is played in the to-and-fro movement that the accurate bidirectional ball guide screw nat is exported.

Described piece fixture body bracing frame 13 and accurate flexible hinge 7 all adopt the line cutting mode to be processed as laciniation with the surface of contact of test specimen 11, clamp body pressing plate I, II (10,12) also adopt the cross hatch cutting mode to process rolling structure with the surface of contact of test specimen (11), can improve the reliability and stability of test specimen clamping in high-frequency test.

Described piece fixture body supports 13 and all processes with semicircular groove by the line cutting mode with ball-screw nut support I 16, and be provided with steel ball in this groove, reduce by the steel ball be embedded in groove the detection error of bringing because of friction factor in the load signal gatherer process.

Test platform size of main body of the present invention is about 140mm * 44mm * 80mm, with Zeiss EVO 18 type scanning electron microscope, has good structure compatible, vacuum compatibility and Electro Magnetic Compatibility.

Referring to Fig. 1 to Fig. 8, mechanics testing platform for in-situ high frequency fatigue materials under scanning electron microscope based on stretch mode involved in the present invention, the overall dimensions of this test platform is about 140mm * 44mm * 80mm, be designed according to vacuum cavity and the image-forming condition of Zeiss EVO 18 type scanning electron microscope, can use with the compatibility of the main flow Image-forming instruments such as X-ray diffractometer, Raman spectrometer, atomic force microscope and optical microscope simultaneously.The components and parts that wherein relate to and concrete model are: piezoelectric stack 8(model is NEC-AE0505D08F), DC servo motor 1(model is Maxon RE-MAX22 25W), tangent displacement sensor 18(model is the WYM-1 type) and accurate pull pressure sensor 14(model be the TEST-304 type), to count photoelectric encoder 24(model be HEDL9140-1000 to high line), for the pulse of DC servo motor 1/direction, control, test platform can provide that rate of deformation is controlled, power speed is controlled two-way analog quantity feedback sources and rate of displacement control figure amount feedback.Test specimen 11 length ranges are 4-26mm, minimum widith is 1mm, the high line that DC servo motor 1 and matching is used is counted photoelectric encoder 24 can watch in conjunction with the Accelnet type that position control unit carries out accurate angular displacement to DC servo motor 1 and moment of torsion output is controlled, thereby guarantees that the strain rate of test specimen 11 in test process can control.In conjunction with the Piezoelectric Driving module, also can realize the precise motion of piezoelectric stack 8 is controlled.

The present invention is in concrete test process, at first, test specimen 11 is before carrying out testing fatigue, need to adopt the standard specimen of wire-electrode cutting and processing method trial-production place with stress weakness zone or precognition breach, and process and obtain can be used for the better surface smoothness that the high resolving power micro-imaging is monitored by single-sided polishing, or obtain the microstructures such as metallographic by techniques such as chemical corrosions, then test specimen 11 is placed in to accurate flexible hinge 7 and the clamp body bracing frame 13 front ends bare terminal end with broached-tooth design, rear by clamp body pressing plate I, II 10, 12 and clamp body trip bolt 33 complete the clamping process of test specimen 11, further, position by adjusting fixture and utilize level meter and the detection of clock gauge guarantees coplanarity and the accurate location of test specimen 11 in test process.The body portion of tangent displacement sensor 18 is installed in the circular hole with ball-screw nut support II 20 rigidly connected accurate flexible hinges 7, and be fixed by displacement transducer screw 30, front-end probe part and piece fixture body bracing frame 13 Elastic Contact, tangent displacement sensor 18 actual detect be deformed into the relative deformation between piece fixture body bracing frame 13 and accurate flexible hinge 7 side plates.For the weight of balance tangent displacement sensor 18, the heteropleural of accurate flexible hinge 7 has been done necessary counterweight.Accurate pull pressure sensor 14 and tangent displacement sensor 18 are all in the coplanar installation of test specimen 28, and the stand under load direction is subject to loading direction identical with test specimen 11.Then, close the airtight baffle plate of scanning electron microscope vacuum chamber and draft the accurate location of test point by the article carrying platform of scanning electron microscope self in XOY plane.

Then, the drawing stress or the strain value that before given testing fatigue, load, mode with given pulse output drives DC servo motor 1 to start test process, by testing algorithm program setting test condition and parameter, under the effect of time sequential pulse control signal, the accurate angular displacement of DC servo motor 1 output, convert DC servo motor 1 rotatablely moving of output in the linear reciprocating motion test process 14 pairs of axial load of Compression and Expansion of accurate pull pressure sensor by one-level Spur Gear Driving pair, second-stage worm gear worm transmission pair and accurate bidirectional ball guide screw nat fdetected; The deflection of while test specimen hby accurate tangent displacement sensor 18, synchronously picked up.Given stress level can be Tensile strength arbitrary value once.Now, piezoelectric stack 8 is in pressured state, after this, by the given specific frequency signal of random waveform/pulse producer, sinusoidal and the square-wave signal of take is example, pass through power amplifier, the voltage signal of output is acted on two electrodes of piezoelectric stack 8, the precision completed piezoelectric stack 8 drives, given signal can be fixed frequency signal, also swept-frequency signal, the frequency range of signal can reach 200Hz, the shift reciprocately of piezoelectric stack 8 outputs is amplified according to certain ratio by accurate flexible hinge 7, finally act on test specimen 11, load/displacement two paths of signals is by analog to digital conversion and carry out sending into computing machine after necessary signal condition.In the whole process of test, crack initiation, expansion and the deformation damage situation of test specimen material under tensile load and alternate load effect are carried out dynamic monitoring by the scanning electron microscope imaging system of high magnification, and document image simultaneously, but in conjunction with the also important mechanics parameters such as endurance limit, elastic modulus of Real-time Obtaining exosyndrome material mechanical property of host computer debugging software.

Claims (6)

1. the mechanics testing platform for in-situ high frequency fatigue materials under scanning electron microscope based on stretching/compressing mode, is characterized in that: comprise accurate loading unit, precise motion converting unit, load/displacement signal collection and control module, high frequency drive unit and test specimen clamping and linkage unit;
Described accurate loading unit is: DC servo motor (1) is connected with test platform pedestal (22) by motor flange frame (2) ;
Described precise motion converting unit is: main, driven spur gear (25, 29) by flat key (26), with DC servo motor (1) and worm screw (4), be connected respectively, this worm screw (4) is connected with test platform pedestal (22) by worm bearing (32) and worm shaft bearing (23), by ball-screw nut support I, II, accurate bidirectional ball-screw (16, 20, 27) the accurate bidirectional ball guide screw nat formed is by leading screw fixed supporting seat (6) location, ball-screw nut support I, II (16, 20) to-and-fro movement is by being connected to the guide rail slide block I on precise guide rail track (19), II(17, 21) led,
Described load/displacement signal collection and control module are counted photoelectric encoder (24) by accurate pull pressure sensor (14), accurate tangent displacement sensor (18) and high line and are formed, this high line is counted photoelectric encoder (24) and is connected with DC servo motor (1), accurate tangent displacement sensor (18) is through accurate flexible hinge (7) fixing by displacement transducer trip bolt (30), and accurate pull pressure sensor (14) is fixedly connected with power sensor base (15);
Described high frequency drive unit is comprised of accurate flexible hinge (7), piezoelectric stack (8), and wherein piezoelectric stack (8) is installed in the square groove of accurate flexible hinge (7), and, axis setting coplanar with test specimen (11); Accurate flexible hinge (7) screw (9) that is connected through the hinge is rigidly connected with ball-screw nut support II (20);
Described test specimen clamping and linkage unit are comprised of test specimen (11), piece fixture body bracing frame (13), clamp body pressing plate I, II (10,12), power sensor base (15), leading screw fixed supporting seat (6) and test platform pedestal (22), and test specimen (11) completes clamping by the clamp body pressing plate I with laciniation, II (10,12), accurate flexible hinge (7), piece fixture body bracing frame (13) in the compression mode.
2. the mechanics testing platform for in-situ high frequency fatigue materials under scanning electron microscope based on stretching/compressing mode according to claim 1, it is characterized in that: the body portion of described accurate tangent displacement sensor (18) is installed in the circular hole with the rigidly connected accurate flexible hinge of ball-screw nut support II (20) (7), and be fixed by displacement transducer trip bolt (30), front-end probe part and piece fixture body bracing frame (13) Elastic Contact, be accurate tangent displacement sensor (18) actual detect be deformed into the relative deformation between piece fixture body bracing frame (13) and accurate flexible hinge (7) side plate, accurate pull pressure sensor (14) and accurate tangent displacement sensor (18) all with the coplanar installation of test specimen (11), and the stand under load direction is subject to loading direction identical with test specimen (11).
3. the mechanics testing platform for in-situ high frequency fatigue materials under scanning electron microscope based on stretching/compressing mode according to claim 1, it is characterized in that: described accurate bidirectional ball-screw (27) is provided with two sections little helical pitch raceways that rotation direction is different, it is upper that guide rail slide block I, II (17,21) are close to precise guide rail track (19) by dovetail grooved mechanism respectively, and with ball-screw nut support I, II (16,20), be rigidly connected respectively.
4. the mechanics testing platform for in-situ high frequency fatigue materials under scanning electron microscope based on stretching/compressing mode according to claim 1, it is characterized in that: described piece fixture body bracing frame (13) and accurate flexible hinge (7) are laciniation with the surface of contact of test specimen (11), and clamp body pressing plate I, II (10,12) also adopt the cross hatch cutting mode to process rolling structure with the surface of contact of test specimen (11).
5. the mechanics testing platform for in-situ high frequency fatigue materials under scanning electron microscope based on stretching/compressing mode according to claim 1, it is characterized in that: described piece fixture body bracing frame (13) is respectively equipped with semicircular groove with ball-screw nut support I (16), and is provided with steel ball in this groove.
6. according to the described mechanics testing platform for in-situ high frequency fatigue materials under scanning electron microscope based on stretching/compressing mode of any one in claim 1 to 5, it is characterized in that: described test platform size of main body is 140mm * 44mm * 80mm.
CN 201110305113 2011-10-11 2011-10-11 In-situ high-frequency fatigue material mechanical test platform under scanning electron microscope based on stretching/compressing mode CN102331370B (en)

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