CN106526241B - Loading device in situ based on scanning electron microscope - Google Patents

Loading device in situ based on scanning electron microscope Download PDF

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Publication number
CN106526241B
CN106526241B CN201611187141.4A CN201611187141A CN106526241B CN 106526241 B CN106526241 B CN 106526241B CN 201611187141 A CN201611187141 A CN 201611187141A CN 106526241 B CN106526241 B CN 106526241B
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China
Prior art keywords
servo
grip block
link block
block
cylinder
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CN106526241A (en
Inventor
李艳杰
殷亮
舒庆琏
赵国华
杨令强
韩光
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Gaoyou Sina Chemical Machinery Equipment Co., Ltd.
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Gaoyou Sina Chemical Machinery Equipment Co Ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01QSCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)

Abstract

The invention discloses a kind of loading device in situ based on scanning electron microscope, comprising: testing stand;First grip block, the second grip block;First link block, the second link block, the first link block are oppositely arranged with the first grip block, and the second link block is oppositely arranged with the second grip block;Piezoelectric ceramics group is set between the first link block and the first grip block;Pressure sensor is set between the second link block and the second grip block;Lead-screw drive mechanism is used to make the first link block and the second link block relative motion, so that the first grip block and the second grip block clamping test pieces, and the Mechanical Data that test specimen is measured with pressure sensor is combined by piezoelectric ceramics;Gearbox is connect with lead-screw drive mechanism, and for driving lead-screw drive mechanism;Actuator is used to drive gearbox.Enable the first grip block and the second grip block quickly close to test specimen by lead-screw drive mechanism and test specimen is loaded, so as to shorten the time of loading specimen.

Description

Loading device in situ based on scanning electron microscope
Technical field
The present invention relates to technical field of electromechanical control more particularly to a kind of loading devices in situ based on scanning electron microscope.
Background technique
Caused by the macroscopic failure of material is often accumulated as microcosmic failure, such as metal polycrystalline material, it destroys often It is that comparative maturity, presently relevant are studied for the macro-mechanical property of macroscopic material in addition since intercrystalline cracking Research vision has been increasingly turned to the micro-scale mechanics performance study of material by persons, this must be related to microdeformation measurement The problem of.Realize that the key of microdeformation measurement is to improve the spatial resolution and displacement sensitivity of measurement.High score in recent years The development of resolution microtechnic especially scanning electron microscope provides unprecedented development for micro-nano Experimental Mechanics measuring technique Opportunity, spatial resolution are up to nanometer scale.Mechanical property characterization is carried out using scanning electron microscope, needs to develop corresponding load Equipment.
However, the loading mechanism in the prior art for loading specimen is Fine Feed loading mechanism, i.e., it is close and plus It is identical to carry its feed speed of test specimen process, and speed is lower, this certainly will extend operating time (the reasonable load of load test Mechanism be during close to test specimen feed speed it is fast, for test specimen load when feed speed it is slow).
Summary of the invention
For above-mentioned technical problem present in existing technology, of the invention implementing provides one kind and is able to solve above-mentioned one A or Railway Project loading device in situ based on scanning electron microscope.
In order to solve the above technical problems, the technical solution adopted by the present invention is that:
A kind of loading device in situ based on scanning electron microscope is used for loading specimen, comprising:
Testing stand;
First grip block, the second grip block;The two is oppositely arranged on the testing stand for clamping the test specimen;
First link block, the second link block, first link block are oppositely arranged with first grip block, and described second Link block is oppositely arranged with second grip block;
Piezoelectric ceramics group is set between first link block and first grip block;
Pressure sensor is set between second link block and second grip block;
Lead-screw drive mechanism is used to make the first link block and the second link block relative motion, so that first clamping Block and second grip block clamp the test specimen, and described in being measured by piezoelectric ceramics combination and the pressure sensor The Mechanical Data of test specimen;
Gearbox is connect with the lead-screw drive mechanism, and for driving the lead-screw drive mechanism;
Actuator is used to drive the gearbox.
Preferably, further includes:
Sealing flange, is inside accommodated with data line, the data line respectively with the actuator, the piezoelectric ceramics group And the pressure sensor electrical connection;
Control cabinet is electrically connected with the data line in the sealing flange, for acquiring the actuator, the piezoelectricity The physics and Mechanical Data of ceramic group and the pressure sensor;
Computer is electrically connected with the control cabinet, for showing control cabinet physics collected and Mechanical Data, And the physics and Mechanical Data are analyzed.
It preferably, further include grating displacement meter, the grating displacement meter is set on the testing stand, and along described first The clamping direction of grip block and second grip block extends, to detect the decrement of the test specimen.
Preferably, the gearbox is connect with the lead-screw drive mechanism by shaft coupling.
Preferably, the piezoelectric ceramics group is spliced side by side by muti-piece piezoelectric ceramics block, and the two of the piezoelectric ceramics group Side is fixed by the fixed device of the first piezoelectric ceramics and the fixed device of the second piezoelectric ceramics respectively.
Compared with prior art, the beneficial effect of the loading device in situ of the invention based on scanning electron microscope is: passing through silk Thick stick transmission mechanism enables the first grip block and the second grip block quickly close to test specimen and loads to test specimen, so as to shorten Time of loading specimen.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the loading device in situ of the invention based on scanning electron microscope.
Fig. 2 is the structural schematic diagram of the hydraulic servomechanism of the loading device in situ of the invention based on scanning electron microscope.
In figure:
1- testing stand 1;2- actuator;3- grating displacement meter;4- gearbox;5- screw body;6- bearing block;7- lead screw;8- Second link block;The second link block of 9-;10- shaft coupling;11- sealing flange;12- control cabinet;13- computer;14- pressure passes Sensor;15- piezoelectric ceramics group;The first grip block of 16-;The second grip block of 17-;18- test specimen;The second servo-cylinder of 19-;20- Two servo pistons;21- second chamber;22- first chamber;23- the second servo spring;The first servo-cylinder of 24-;25- first is watched Take piston;26- rodless cavity;27- rod chamber;28- the first servo spring;29- the first servo piston bar.
Specific embodiment
Technical solution in order to enable those skilled in the art to better understand the present invention, with reference to the accompanying drawing and specific embodiment party Formula elaborates to the present invention.
Embodiment of the invention discloses a kind of, and the loading device in situ based on scanning electron microscope should for loading specimen 18 Loading device in situ include: testing stand 1, the first grip block 16, the second grip block 17, piezoelectric ceramics group 15, pressure sensor 14, 7 transmission mechanism of lead screw, gearbox 4, actuator 2, sealing flange 11, control cabinet 12, computer 13 and grating displacement meter 3. Pressure testing table is for carrying and installing above-mentioned components;First grip block 16 and the second grip block 17 are oppositely arranged on testing stand 1 On be used for clamping test pieces 18;First link block 9 is oppositely arranged with the first grip block 16, the second link block 8 and the second grip block 17 are oppositely arranged;Piezoelectric ceramics group 15 is set between the first link block 9 and the first grip block 16;Piezoelectric ceramics group 15 is set to Between first link block 9 and the first grip block 16;7 transmission mechanism of lead screw is driven by gearbox 4, to drive 9 He of the first link block Second link block, 8 relative motion, and by piezoelectric ceramics group 15 and pressure sensor 14 so that the first grip block 16 and the second folder 17 relative motion of block is held with clamping test pieces 18, the pressure of the test specimen 18 is measured by piezoelectric ceramics group 15 and pressure sensor 14;It causes Dynamic device 2 is for driving gearbox 4 to provide power and movement for load;Grating displacement meter 3 is set on testing stand 1, and along The clamping direction of one grip block 16 and the second grip block 17 extends, to detect the decrement of test specimen 18.It is received in sealing flange 11 Receiving has data line, and data line is electrically connected with actuator 2, piezoelectric ceramics group 15 and pressure sensor 14 respectively;Control cabinet 12 with Data line electrical connection in sealing flange 11, for acquiring the object of actuator 2, piezoelectric ceramics group 15 and pressure sensor 14 Reason and Mechanical Data, such as the pressure and displacement data of the revolving speed of actuator 2, test specimen 18;Computer 13 is electrically connected with control cabinet 12, It is analyzed for the physics collected of display control case 12 and Mechanical Data, and to the physics and Mechanical Data.In this way, passing through 7 transmission mechanism of lead screw enables the first grip block 16 and the second grip block 17 quickly close to test specimen 18 and adds to test specimen 18 It carries, so as to shorten the time of loading specimen 18.
Preferably, gearbox 4 is connect with 7 transmission mechanism of lead screw by shaft coupling 10.
Preferably, piezoelectric ceramics group 15 is spliced side by side by muti-piece piezoelectric ceramics block, the two sides point of piezoelectric ceramics group 15 It is not fixed by the fixed device of the first piezoelectric ceramics and the fixed device of the second piezoelectric ceramics.
Actuator 2 can be the motor of adjustable revolving speed, when motor passes through gearbox 4 and 7 transmission mechanism of lead screw driving first Link block 9 and the second link block 8, to drive the first grip block 16 and the second grip block 17 quickly close and pass through pressure sensor After 14 perception contact test specimens 18, pressure sensor 14 controls motor speed by control cabinet 12 and reduces the feeding speed so that test specimen 18 Degree reduces, to realize Slow loading.
Although however, sensor can accurately measure the pressure of test specimen 18, and control cabinet 12 can be fed back in real time, The control of control cabinet 12 is not accurately when controlling the revolving speed of motor, that is to say, that the pressure measured by the pressure sensor 14 Power increases suddenly, and when illustrating that motor speed is excessively high, for the pressure feedback to control cabinet 12, control cabinet 12 can only control motor speed drop It is low, but the revolving speed that can not predict and calculate motor is reduced to much speed just and can make 18 uniform load of test specimen, and often exist Under the control of control cabinet 12, the revolving speed of motor declines, and the on-load pressure of test specimen 18 is lower than required for uniform load Pressure, so that on-load pressure be made to generate constantly fluctuation.
To solve the above problems, actuator 2 is preferably the hydraulic motor of variable displacement, specifically, 7 transmission mechanism packet of lead screw Include lead screw 7 and the screw body 5 for forming worm drive with lead screw 7;Hydraulic motor and the first link block 9 and the second link block Hydraulic servomechanism is provided between 8;One end of lead screw 7 is mounted on the output shaft of gearbox 4, and the other end is mounted on bearing block On 6;Hydraulic servomechanism includes the first servo-cylinder 24 and the second servo-cylinder 19, is provided with first in the first servo-cylinder 24 Servo piston 25 is provided with the first servo piston bar 29 on first servo piston 25, which stretches out first Servo-cylinder 24 is connect to adjust the tilt angle of swash plate with the swash plate of hydraulic motor, in the rod chamber 27 of the first servo-cylinder 24 It is provided with the first servo spring 28;Screw body 5 is set in the second servo-cylinder 19, and the both ends of screw body 5 stretch out second respectively Servo-cylinder 19, the middle part periphery of screw body 5 form the second servo piston 20 so that the second servo-cylinder 19 is divided into the first chamber Room 22 and second chamber 21 are provided with the second servo spring 23 in first chamber 22, and wire hole use is offered in the axial direction of screw body 5 It is worn in for lead screw 7, lead screw 7 wears the wire hole to form worm drive with screw body 5;First link block 9 and the second link block 8 It is separately positioned on the cylinder body of two the second servo-cylinders 19;The first chamber 22 and the first servo-cylinder of second servo-cylinder 19 24 rodless cavity 26 is connected to, and the second chamber 21 of the second servo-cylinder 19 is connected to the rod chamber 27 of the first servo-cylinder 24, and The tilt angle of the swash plate of the expanding-contracting action and hydraulic motor of first servo piston bar 29 is arranged to: when the first servo piston bar 29 When overhang increases, the tilt angle of swash plate reduces, and the discharge capacity of hydraulic motor reduces, and the discharge capacity of hydraulic motor reduces so that motor Revolving speed reduce and output torque remains unchanged, when 29 overhang of the first servo piston bar reduces, the tilt angle of swash plate increases Greatly, the discharge capacity of hydraulic motor increases, the discharge capacity of hydraulic motor increases so that the revolving speed of motor increases and output torque remains unchanged. In this way, first grip block 16 and the second grip block 17 are right after the first grip block 16 and the second grip block 17 are contacted with test specimen 18 Test specimen 18 pressurizes, and test specimen 18 passes through the first grip block 16 and the second folder to the reaction force of the first grip block 16 and the second clamping It holds block 17, the first link block 9 and the second link block 8 and passes to the second servo-cylinder 19, the first chamber in the second servo-cylinder 19 Hydraulic fluid pressure in room 22 increases so that the hydraulic oil in the rodless cavity 26 of the first servo-cylinder 24 increases, in it is hydraulic Oil the first servo piston 25 of pushing and pressing increases the overhang of the first servo piston bar 29, to make inclining for the slope of hydraulic motor Rake angle is smaller, so that the discharge capacity of hydraulic motor be made to reduce, revolving speed is reduced, by 7 transmission mechanism of speed changer and lead screw, so that The first link block 9 and the second link block 8 and the first folder in the case where pressure the torque of hydraulic motor (because constant) are not changed The movement speed for holding block 16 and the second grip block 17 reduces, thus make the first grip block 16 and the second grip block 17 to test specimen 18 into The slow uniform pressurization of row, when hydraulic motor makes the movement speed of the first grip block 16 and the second grip block 17 too small and pressure has When declined, the pressure in first chamber 22 and rodless cavity 26 becomes smaller, and the overhang of the first servo piston bar 29 becomes smaller, hydraulic horse The discharge capacity reached starts to increase, to make the movement speed of the first grip block 16 and the second grip block 17 increase, to meet slow The condition of uniform pressurization.
In this embodiment, the first grip block 16 is adjusted using the feedback of hydraulic fluid pressure in hydraulic system in the present invention Speed with the second grip block 17 is to realize slow uniform pressurization, so as to obtain the accurate true Mechanical Data of test specimen 18, And the time of load test will not be extended.
Above embodiments are only exemplary embodiment of the present invention, are not used in the limitation present invention, protection scope of the present invention It is defined by the claims.Those skilled in the art can within the spirit and scope of the present invention make respectively the present invention Kind modification or equivalent replacement, this modification or equivalent replacement also should be regarded as being within the scope of the present invention.

Claims (5)

1. a kind of loading device in situ based on scanning electron microscope is used for loading specimen characterized by comprising
Testing stand;
First grip block, the second grip block;The two is oppositely arranged on the testing stand for clamping the test specimen;
First link block, the second link block, first link block are oppositely arranged with first grip block, second connection Block is oppositely arranged with second grip block;
Piezoelectric ceramics group is set between first link block and first grip block;
Pressure sensor is set between second link block and second grip block;
Lead-screw drive mechanism is used to make the first link block and the second link block relative motion so that first grip block and Second grip block clamps the test specimen, and measures the test specimen by piezoelectric ceramics combination and the pressure sensor Mechanical Data;
Gearbox is connect with the lead-screw drive mechanism, and for driving the lead-screw drive mechanism;
Actuator is used to drive the gearbox;
The actuator is the hydraulic motor of variable displacement, and lead-screw drive mechanism includes lead screw and screw body;Hydraulic motor with Hydraulic servomechanism is provided between first link block and the second link block;Hydraulic servomechanism includes the first servo-cylinder and the Two servo-cylinders are provided with the first servo piston in the first servo-cylinder, the first servo piston are provided on the first servo piston Bar, the first servo piston bar stretches out the first servo-cylinder and the swash plate of hydraulic motor is connected to adjust the tilt angle of swash plate, the The first servo spring is provided in the rod chamber of one servo-cylinder;Screw body is set in the second servo-cylinder, the axis of screw body Wire hole is offered upwards, and the middle part periphery of screw body forms the second servo piston so that the second servo-cylinder is divided into first chamber And second chamber, the second servo spring is provided in first chamber, lead screw wears the wire hole to form worm drive with screw body; First link block and the second link block are separately positioned on the cylinder body of two the second servo-cylinders;First chamber of the second servo-cylinder Room is connected to the rodless cavity of the first servo-cylinder, and the rod chamber of the second chamber of the second servo-cylinder and the first servo-cylinder connects It is logical, and the tilt angle of the swash plate of the expanding-contracting action and hydraulic motor of the first servo piston bar is arranged to: when the first servo piston When bar overhang increases, the tilt angle of swash plate reduces, and the discharge capacity of hydraulic motor reduces, and the discharge capacity of hydraulic motor reduces so that horse The revolving speed reached reduces and output torque remains unchanged, and when the first servo piston bar overhang reduces, the tilt angle of swash plate increases Greatly, the discharge capacity of hydraulic motor increases, the discharge capacity of hydraulic motor increases so that the revolving speed of motor increases and output torque remains unchanged.
2. the loading device in situ according to claim 1 based on scanning electron microscope, which is characterized in that further include:
Sealing flange, is inside accommodated with data line, the data line respectively with the actuator, the piezoelectric ceramics group and The pressure sensor electrical connection;
Control cabinet is electrically connected with the data line in the sealing flange, for acquiring the actuator, the piezoelectric ceramics The physics and Mechanical Data of group and the pressure sensor;
Computer is electrically connected with the control cabinet, for showing control cabinet physics collected and Mechanical Data, and it is right The physics and Mechanical Data are analyzed.
3. the loading device in situ according to claim 1 based on scanning electron microscope, which is characterized in that further include pattern displacement Meter, the grating displacement meter are set on the testing stand, and along the clamping of first grip block and second grip block Direction extends, to detect the decrement of the test specimen.
4. the loading device in situ according to claim 1 based on scanning electron microscope, which is characterized in that the gearbox and institute Lead-screw drive mechanism is stated to connect by shaft coupling.
5. the loading device in situ according to claim 1 based on scanning electron microscope, which is characterized in that the piezoelectric ceramics group Be spliced side by side by muti-piece piezoelectric ceramics block, the two sides of the piezoelectric ceramics group respectively by the fixed device of the first piezoelectric ceramics and The fixed device of second piezoelectric ceramics is fixed.
CN201611187141.4A 2016-12-20 2016-12-20 Loading device in situ based on scanning electron microscope Active CN106526241B (en)

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CN103278386A (en) * 2013-05-22 2013-09-04 天津大学 Measurement system for thin-film material tension-compression fatigue dynamic loading
CN103335898A (en) * 2013-06-03 2013-10-02 吉林大学 In-situ testing device for micro-mechanical properties of materials under tension-shear combined loading mode
CN103512803A (en) * 2013-09-26 2014-01-15 吉林大学 Multi-load and multi-physics coupling material micromechanical performance in-situ testing instrument
CN105223079A (en) * 2015-11-12 2016-01-06 中国科学院金属研究所 Material structure performance in-situ test device under motor and hydraulic pressure composite flooding mode
CN105358355A (en) * 2013-05-31 2016-02-24 技术推进公司 Method and device for controlling/commanding a differential hydraulic module for a hybrid vehicle
CN105973624A (en) * 2016-05-03 2016-09-28 清华大学 High-frequency loading device with loading force adjusted and measured in real time

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CN105508318B (en) * 2015-02-28 2018-07-17 北京航空航天大学 A kind of constant speed increasing apparatus based on motor swashplate compensation control
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Publication number Priority date Publication date Assignee Title
JPH0972839A (en) * 1995-09-07 1997-03-18 Ishikawajima Harima Heavy Ind Co Ltd Fatigue testing apparatus
CN202049999U (en) * 2011-04-22 2011-11-23 中国工程物理研究院应用电子学研究所 Piezoelectric ceramic-based driver device
CN102331370A (en) * 2011-10-11 2012-01-25 吉林大学 In-situ high-frequency fatigue material mechanical test platform under scanning electron microscope based on stretching/compressing mode
CN103278386A (en) * 2013-05-22 2013-09-04 天津大学 Measurement system for thin-film material tension-compression fatigue dynamic loading
CN105358355A (en) * 2013-05-31 2016-02-24 技术推进公司 Method and device for controlling/commanding a differential hydraulic module for a hybrid vehicle
CN103335898A (en) * 2013-06-03 2013-10-02 吉林大学 In-situ testing device for micro-mechanical properties of materials under tension-shear combined loading mode
CN103512803A (en) * 2013-09-26 2014-01-15 吉林大学 Multi-load and multi-physics coupling material micromechanical performance in-situ testing instrument
CN105223079A (en) * 2015-11-12 2016-01-06 中国科学院金属研究所 Material structure performance in-situ test device under motor and hydraulic pressure composite flooding mode
CN105973624A (en) * 2016-05-03 2016-09-28 清华大学 High-frequency loading device with loading force adjusted and measured in real time

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