CN108645694B - Mechanical property in-situ test auxiliary device for gradient deformation of flexible substrate film - Google Patents

Mechanical property in-situ test auxiliary device for gradient deformation of flexible substrate film Download PDF

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Publication number
CN108645694B
CN108645694B CN201810406312.0A CN201810406312A CN108645694B CN 108645694 B CN108645694 B CN 108645694B CN 201810406312 A CN201810406312 A CN 201810406312A CN 108645694 B CN108645694 B CN 108645694B
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film
rod
gradient
deformation
frame
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CN108645694A (en
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张永炬
詹白勺
张莉
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Taizhou University
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Taizhou University
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N3/00Investigating strength properties of solid materials by application of mechanical stress
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/0058Kind of property studied
    • G01N2203/0069Fatigue, creep, strain-stress relations or elastic constants
    • G01N2203/0075Strain-stress relations or elastic constants
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/02Details not specific for a particular testing method
    • G01N2203/026Specifications of the specimen
    • G01N2203/0262Shape of the specimen
    • G01N2203/0278Thin specimens
    • G01N2203/0282Two dimensional, e.g. tapes, webs, sheets, strips, disks or membranes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/02Details not specific for a particular testing method
    • G01N2203/06Indicating or recording means; Sensing means
    • G01N2203/0641Indicating or recording means; Sensing means using optical, X-ray, ultra-violet, infrared or similar detectors

Abstract

The invention relates to a material testing technology, in particular to an auxiliary device for mechanical property in-situ test of gradient deformation of a flexible substrate film. According to the invention, linear movement of the slider is converted into loading of gradient load of the film test piece through the crank slider mechanism, stress strain of the gradient is distributed, and microstructure change of the film under different stress strains is directly observed by an atomic force microscope, so that macroscopic mechanical properties of a sample are obtained. The invention can reproduce the working condition of the film material under the gradient load, can in situ observe the binding force between different deformation and the substrate of the film and the film-substrate binding energy under the gradient load, compares different deformation under the same test environment, finds out the film-substrate binding critical state and the film shape change during failure, measures the deformation chemistry, deformation mechanism and mechanical property in the whole process, and is a powerful test tool for researching the elastic modulus, internal stress and binding energy of the novel film material under the working condition.

Description

Mechanical property in-situ test auxiliary device for gradient deformation of flexible substrate film
Technical Field
The invention relates to the technical field of material testing, in particular to an auxiliary device for the mechanical property in-situ test of gradient deformation of a flexible substrate film, which is matched with equipment such as a scanning electron microscope, an atomic force microscope, an optical microscope and the like.
Background
At present, nano composite materials and film materials have the advantages of good mechanical properties, wear resistance, high temperature resistance and the like, and are widely applied to various fields, such as surface coatings, optical films, Low-E films, magnetic storage media, Micro Electro Mechanical Systems (MEMS) and the like. If the thin film device delaminates, cracks, bulges, etc. during use, indicating structural failure and loss of functionality of the device, this is to be avoided in practical applications. Therefore, the research on the mechanical property of the film and the test on the anti-fatigue capability are very important. However, because the difference between the mechanical properties of the micro-nano scale material and the macro material is large, the traditional macro tensile testing machine for analyzing the mechanical parameters of the material, such as yield strength, breaking strength, elastic modulus and the like, can not meet the research requirements of the micro-nano scale material, especially the film material. Moreover, the microstructure of the film material cannot be observed in real time by using the traditional tensile test, and only the section of the material can be observed and researched by using the microscopic technology. The research on the change of the microscopic morphology and the damage condition of the film material under the external force loading state has important significance for understanding the mechanical behaviors of the material, such as fracture, delamination and the like. Therefore, it is very urgent and important to realize in-situ monitoring of the thin film material under a load condition.
At present, many domestic and foreign researches are focused on the development of in-situ film stretching/compressing devices. Such as: CN102346117 discloses a little radian level precision normal position torsion material mechanical properties testing arrangement under scanning electron microscope, the motor drives the driving dental forceps through the worm gear drive and rotates a little, and driven dental forceps is equipped with torque sensor test torsion deformation and arouses stress strain data. CN102359912 discloses an in-situ tensile/compressive material mechanics test platform under a scanning electron microscope based on quasi-static loading, and the two motors are used for driving to realize microscopic observation of the tensile and compressive loaded material. In the prior art, the appearance evolution of the film in a stretching state and the generation and propagation of microcracks are researched, so that the mechanical parameters of the film, such as yield strength, breaking strength and the like, are calculated, and the anti-fatigue capability and the service life of the film are estimated. In the aspect of compressive load, the problem of wrinkle or buckling formation of an elastic film under uniaxial load on a flexible substrate is mainly researched, and mechanical parameters such as elastic modulus, internal stress and binding energy of the film are calculated through the problem. For example, the device for testing mechanical properties of a material in a pull-down compression-bending composite load mode of a microscope disclosed in CN102384875 drives an elbow to feed laterally, so that a test piece is bent and deformed.
However, the existing in-situ tester has problems: (1) the simulation working condition is too simple to simulate gradient deformation caused by gradient load and the like; (2) the data of the in-situ tester and the atomic force microscope are mutually independent, so that the whole dynamic process of deformation and even failure of the thin film material under load is difficult to reproduce, and the in-situ observation in the true sense is not realized; (3) the mechanism is complicated, so that the observation angle of the microscope is poor, such as CN102384875, and the observation of the deformation process of the test piece is inconvenient.
Disclosure of Invention
In view of the above problems, the present invention aims to provide an in-situ mechanical property testing auxiliary device capable of in-situ measuring the gradient deformation of a flexible substrate film under a gradient load of a test piece.
In order to achieve the purpose, the invention adopts the scheme that: an auxiliary device for mechanical property in-situ test of gradient deformation of a flexible substrate film comprises a clamping mechanism, a gradient load loading mechanism and a precision detection unit; the clamping mechanism consists of a frame, a left pressing sheet, a right pressing sheet, a connecting rod and a pin shaft, wherein the frame is of a hollow structure, the two sides of the test piece are both connected with the pressing sheets, the pressing sheet on one side is fixedly connected to the frame, the pressing sheet on the other side is fixed to the connecting rod, the bottom end of the connecting rod is hinged to the frame, and the head end of the connecting rod is hinged to the connecting rod of the gradient load; the gradient load loading mechanism comprises a connecting rod, a sliding block, a screw rod and a precise direct current servo motor, wherein two ends of the connecting rod are respectively hinged with the connecting rod and the sliding block, the sliding block and the screw rod are in threaded transmission, the screw rod is driven by the precise direct current servo motor provided with a speed reducer, and the precise direct current servo motor is arranged on the frame; the frame, the connecting rod and the sliding block form a crank sliding block mechanism; the precise detection unit comprises a photoelectric encoder, a displacement sensor, a collection card and a PC (personal computer), wherein the photoelectric encoder is coaxially connected with the precise direct-current servo motor, and the displacement sensor is arranged on the frame to collect the displacement of the sliding block; the photoelectric encoder and the displacement sensor acquire data through an acquisition card and transmit the data to a PC (personal computer) for processing, and the PC communicates with a microscope host.
Preferably, the displacement sensor is a grating ruler, a grating ruler reading head is installed on a frame on the outer side of the screw rod, a pointer is connected to the sliding block, and a grating ruler main ruler is installed on the pointer and used for collecting pointer movement displacement information.
Preferably, the contact surface of the pressing sheet and the film test piece is rolled with patterns.
Preferably, the frame is provided with a threaded hole mountable into a cavity of an electron microscope.
Preferably, the precision servo direct current motor is equipped with a speed reducer.
According to the invention, linear movement of the slider is converted into loading of gradient load of the film test piece through the crank slider mechanism, stress strain of the gradient is distributed, and microstructure change of the film under different stress strains is directly observed by an atomic force microscope, so that macroscopic mechanical properties of a sample are obtained. The invention can reproduce the working condition of the film material under the gradient load, can in situ observe the binding force between different deformation and the substrate of the film and the film-substrate binding energy under the gradient load, compares different deformation under the same test environment, finds out the film-substrate binding critical state and the film shape change during failure, measures the deformation chemistry, deformation mechanism and mechanical property in the whole process, and is a powerful test tool for researching the elastic modulus, internal stress and binding energy of the novel film material under the working condition.
Drawings
FIG. 1 is a three-dimensional schematic diagram of a clamped test piece according to an embodiment of the invention;
FIG. 2 is a bottom three-dimensional schematic view of a clamped test piece according to an embodiment of the invention;
FIG. 3 is a schematic diagram of a precision detecting unit according to an embodiment of the present invention.
The notation in the figure is:
1-clamping mechanism, 11-frame, 12-left pressing sheet, 13-right pressing sheet, 14-connecting rod and 15-pin shaft.
2-gradient load loading mechanism, 21-connecting rod, 22-sliding block, 23-screw rod and 24-precision direct current servo motor.
3-precision detection unit, 31-photoelectric encoder, 32-acquisition card, 33-grating ruler, 34-microscope host, 35-PC, 36-driver.
4-thin film test piece.
Detailed Description
For a better understanding of the present invention, the technical solutions of the present invention will be further explained below with reference to the accompanying drawings and detailed description, referring to fig. 1 to 3.
The mechanical property in-situ test auxiliary device for the gradient deformation of the flexible substrate film, which is implemented by the invention, mainly comprises three parts, namely a clamping mechanism 1, a gradient load loading mechanism 2 and a precision detection unit 3.
The clamping mechanism 1 comprises a frame 11, a left pressing piece 12, a right pressing piece 13, a connecting rod 14 and a pin shaft 15, wherein the frame 11 is of a hollow structure, the thin film test piece 4 is of a shape with a narrow lower part and a wide upper part, both sides of the thin film test piece 4 are clamped and transmitted with the pressing pieces, the left pressing piece 12 is fixedly connected to the frame through bolts, and the left side of the thin film test piece 4 is pressed and fixed on the frame 11 to be kept fixed. The right pressing piece 13 is fixedly connected to the connecting rod 14 through bolts, and the right side of the film test piece 4 is clamped on the connecting rod 14. In order to firmly clamp, patterns are rolled on the contact surface of the pressing sheet and the film test piece 4. The bottom end of the connecting rod 14 is hinged on the frame 11 through a pin shaft 15, the head end is hinged with a connecting rod 21 of the gradient load loading mechanism 2, and the connecting rod 21 rotates around a hinged point at the bottom end under the transmission of the connecting rod 21. And for the cooperation observation, the frame 11 is diagonally provided with a threaded hole which can be installed in the cavity of the electron microscope.
The gradient load loading mechanism 2 comprises a connecting rod 21, a sliding block 22, a screw rod 23 and a precise direct current servo motor 24, wherein two ends of the connecting rod 21 are respectively hinged with a right pressing sheet 13 and the sliding block 22, the sliding block 22 and the screw rod 23 are in threaded transmission, in order to achieve fine feeding, the screw rod 23 is driven by the precise direct current servo motor 24 provided with a speed reducer, and the precise direct current servo motor 24 is installed on the frame 11. The frame 11, the connecting rod 14, the connecting rod 21 and the slider 22 form a crank-slider mechanism, and the connecting rod 14 rotates around the hinged point of the bottom pin shaft 15 to load gradient stress on the film test piece 4.
The precise detection unit 3 comprises a photoelectric encoder 31, an acquisition card 32, a grating ruler 33, a driver 36 and a PC 35, wherein the photoelectric encoder 31 is coaxially connected with the precise DC servo motor 24, the displacement sensor is the grating ruler 33, a reading head of the grating ruler 33 is arranged on the frame 11 at the outer side of the screw rod 23, a pointer is connected on the slide block 22, and a main ruler of the grating ruler 33 is arranged on the pointer to acquire the moving displacement information of the pointer. The photoelectric encoder 31 and the grating ruler 33 collect data through the acquisition card 34 and transmit the data to the PC 35 for processing, and the PC 35 communicates with the microscope host 34.
The photoelectric encoder 31 can provide speed and rotating speed feedback signals for pulse or direction control of the precise direct current servo motor 24, precise closed-loop control is achieved, the grating ruler 33 detects the displacement of the sliding block 22, and the displacement of the sliding block 22 can be converted into the rotating angle of the connecting rod 21 due to the fact that the connecting rod is rigid. Therefore, the synchronous data of the in-situ test auxiliary device and the atomic force microscope is realized, the different deformation and substrate binding force of the film and the film-substrate binding energy of the film under the gradient load stress are recorded, the different deformation is compared under the same test environment, the film-substrate binding critical state is found, the film appearance change during failure is found, the deformation chemistry, the deformation mechanism and the mechanical property in the whole process are measured, and the synchronous data recording device is a powerful test tool for researching the elastic modulus, the internal stress and the binding energy of the novel film under the working condition.

Claims (4)

1. The utility model provides a mechanical properties normal position test auxiliary device of flexible base film gradient deformation which characterized in that: the device comprises a clamping mechanism, a gradient load loading mechanism and a precision detection unit;
the clamping mechanism consists of a frame, a left pressing sheet, a right pressing sheet, a connecting rod and a pin shaft, wherein the frame is of a hollow structure, the two sides of a test piece are respectively connected with the left pressing sheet and the right pressing sheet, the left pressing sheet is fixedly connected to the frame, the right pressing sheet is fixed on the connecting rod, the bottom end of the connecting rod is hinged to the frame, and the head end of the connecting rod is hinged to the connecting rod of the gradient load loading mechanism;
the gradient load loading mechanism comprises a connecting rod, a sliding block, a screw rod and a precise direct current servo motor, wherein two ends of the connecting rod are respectively hinged with the connecting rod and the sliding block, the sliding block and the screw rod are in threaded transmission, the screw rod is driven by the precise direct current servo motor provided with a speed reducer, and the precise direct current servo motor is arranged on the frame; the frame, the connecting rod and the sliding block form a crank sliding block mechanism;
the precise detection unit comprises a photoelectric encoder, a displacement sensor, a collection card and a PC (personal computer), wherein the photoelectric encoder is coaxially connected with the precise direct-current servo motor, and the displacement sensor collects the displacement of the sliding block; the photoelectric encoder and the displacement sensor acquire data through an acquisition card and transmit the data to a PC (personal computer) for processing, and the PC communicates with a microscope host.
2. The mechanical property in-situ test auxiliary device for the gradient deformation of the flexible substrate film as claimed in claim 1, wherein: the displacement sensor is a grating ruler, a grating ruler reading head is installed on a frame on the outer side of the screw rod, a pointer is connected to the sliding block, and a grating ruler main ruler is installed on the pointer and used for collecting pointer movement displacement information.
3. The mechanical property in-situ test auxiliary device for the gradient deformation of the flexible substrate film as claimed in claim 1, wherein: the surfaces of the left side pressing sheet and the right side pressing sheet, which are in contact with the film test piece, are rolled with patterns.
4. The mechanical property in-situ test auxiliary device for the gradient deformation of the flexible substrate film as claimed in claim 1, wherein: the frame is provided with a threaded hole that can be mounted into the cavity of the electron microscope.
CN201810406312.0A 2018-04-30 2018-04-30 Mechanical property in-situ test auxiliary device for gradient deformation of flexible substrate film Active CN108645694B (en)

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