CN108760548A - Micro-nano impression/the cut test device of two-pass combination drive - Google Patents
Micro-nano impression/the cut test device of two-pass combination drive Download PDFInfo
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- 238000001514 detection method Methods 0.000 claims abstract description 18
- 238000011068 loading method Methods 0.000 claims abstract description 16
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- 230000006835 compression Effects 0.000 claims description 9
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- 238000002955 isolation Methods 0.000 claims description 5
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- 239000000463 material Substances 0.000 abstract description 15
- 238000013461 design Methods 0.000 abstract description 10
- 241000549556 Nanos Species 0.000 abstract description 5
- 239000002131 composite material Substances 0.000 abstract description 5
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- 239000010409 thin film Substances 0.000 abstract description 5
- 239000007779 soft material Substances 0.000 abstract description 4
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- 238000002474 experimental method Methods 0.000 description 3
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- 230000009286 beneficial effect Effects 0.000 description 2
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- 238000011065 in-situ storage Methods 0.000 description 2
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/40—Investigating hardness or rebound hardness
- G01N3/42—Investigating hardness or rebound hardness by performing impressions under a steady load by indentors, e.g. sphere, pyramid
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/0058—Kind of property studied
- G01N2203/0076—Hardness, compressibility or resistance to crushing
- G01N2203/0078—Hardness, compressibility or resistance to crushing using indentation
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Abstract
The present invention relates to a kind of micro-nano impression/cut test devices of two-pass combination drive, belong to sophisticated sensor and precision instrument technical field.It is made of with range switch unit, displacement detecting unit, sample mobile unit, pedestal, support plate and guide rail slide block component hybrid drive unit, load detection.The present invention realizes combination drive using voice coil motor, piezoelectric stack-flexible hinge, by adjusting shielding case（Frame）With force snesor assembly relation, using the detection of segmentation load and range switching mode, the accurate measurement of different load strokes and loading of pressing in can be realized in conjunction with displacement detecting unit, and integrated sample mobile unit is tested for realizing to the replacement of the pushed position of sample and cut.It is compact-sized using modularized design thinking, securely and reliably, can not only it realize to the conventional nanos such as reguline metal material, thin-film material and composite material impression/cut test, but also big stroke load test can be carried out to soft materials such as biological tissues, practicability is stronger.
Description
Technical field
The present invention relates to sophisticated sensor and precision instrument technical field, more particularly to a kind of two-pass combination drive micro-nano
Rice impression/cut test device.Two kinds of different trips high-precision micro nano impressions/cut test can be achieved at the same time in the present invention,
Being related to the fields such as semiconductor technology, advanced material and material science, aerospace and national defence section work has highly important science
Meaning and it is widely applied foreground.
Background technology
In recent years, as new material synthesis and preparation process are continuously improved, characteristic size is smaller and smaller, is using tradition
Code test when carrying out mechanics parameter measurement to it, it is possible that a series of problems, such as clamping, centering.For this purpose, in view of biography
The macrohardness of system and delineation experiment, it is proposed that micro-nano impression/cut test method.
Micro-nano impression/cut measuring technology mainly utilizes the load and displacement sensor of high resolution, and acquisition in real time is shown
Show, handle load and displacement data, i.e., accurately and reliably measures loading of pressing in-depth curve.It can by micro-nano impression test
With parameters such as the hardness, elasticity modulus, fracture toughness, the fatigue properties that obtain measured material；Then may be used by the test of micro-nano cut
With parameters such as the critical adhesive force and the friction coefficient that obtain film.Since micro-nano impression/cut measuring technology has operation side
Just the advantages that, sample preparation is simple, test is abundant in content, is now widely used for film and nano material, semi-conducting material, gold
Belong to the mechanics characterization of a variety of materials such as material, advanced function material and biomaterial.
Nanoscale precision actuation technology and detection technique are to realize the core technology support of accurate impression/cut test, profit
Precision actuation, respective drive can be achieved with magnetostriction materials, marmem, piezoelectric material and voice coil actuator etc.
Scheme is applied in the deep extensive pass by domestic and international academia and engineering circles of design studies of micro-nano impression/cut test device
Note, and design the model machine of a variety of patterns, such as Chinese patent（CN 102288501 A）It is related to a kind of precise nanoindentation test
Device is based on rectangular coil motor linear drives mode, has simple in structure, easy to process, positioning accuracy is high, response is rapid etc.
Advantage；For another example Chinese patent（CN 104297082 A）It is related to a kind of in-situ micro-nano impression/scarification tester, structure novel,
Macro position adjusts and cut test uses Servo motor drive control, and impression load is realized by piezoelectric element, and is had
The advantages of realizing in-situ observation under a scanning electron microscope can be integrated.But existing design scheme can not often be taken into account greatly simultaneously
Stroke and high-precision, protrusion are embodied in load context of detection, this will seriously limit the versatility of nano impress/cut test device
And practicability.Therefore, design research and development have with big stroke, high-precision, compact-sized micro-nano impression/cut test device
Extensive demand.
Invention content
The purpose of the present invention is to provide a kind of micro-nano impression/cut test devices of two-pass combination drive, solve
Existing micro-nano impression/cut test device can not realize high-precision and big two kinds of loading modes of stroke and accordingly detect skill simultaneously
Two kinds of different trips high-precisions can be achieved at the same time in the defects of art.The present invention uses modularized design thinking, compact-sized, safety
Reliably, it can not only realize to the conventional nanos such as reguline metal material, thin-film material and composite material impression/cut test, but also can be right
The soft materials such as biological tissue carry out big stroke load test, and practicability is stronger.
The above-mentioned purpose of the present invention is achieved through the following technical solutions：
Micro-nano impression/the cut test device of two-pass combination drive, including the detection of hybrid drive unit, load switch with range
Unit, displacement detecting unit, sample mobile unit, pedestal 1, support plate 16 and guide rail slide block component 19, the combination drive list
Member, load detection are connected by support plate 16 with guide rail slide block component 19 with range switch unit, displacement detecting unit, are fixed on
On pedestal 1, and ensure that load axis and load detection axis are coaxial；The sample mobile unit passes through hexagon socket cap head screw
It is connected on pedestal 1, realizes precise jiggle of the sample in X, Y plane, and ensure that its installation surface is vertical with pressing direction.
The hybrid drive unit realizes that pressing direction mixing adds by voice coil motor and piezoelectric stack-flexible hinge
It carries, structure is：Voice coil motor inner ring assembly 15 is connected with support plate 16 by output end screw thread, voice coil motor outer ring 13 with it is solid
The motor fixed rack 14 being connected in support plate 16 is connected, and realizes pressing direction macroscopic view displacement load；Piezoelectric stack 11 is placed in
On the flexible hinge 10 being connected with support plate 16, the output end of flexible hinge 10 switches list by screw thread and load detection with range
Member is connected directly, and realizes pressing direction fine motion displacement load.
The described load detection and range switch unit are by adjusting sensor mask cover and shielded rack and force snesor
Assembly relation, in conjunction with adjusting nut locked position, to change pressure transmission route, to realize that different loading is pushed down into power
Accurate to measure, structure is：Sample carrier 6 is connected by screw thread with connecting rod, and nut II 24 compresses detachable sensor mask
Cover 4,5 both ends of large range stress sensor are connected by screw thread with connecting rod and sample mobile unit respectively；Small-measuring range force transducer 8
Both ends are connected by screw thread with connecting shaft and flexible hinge 10 respectively, detachable N-type shielded rack 20, nut I 23 and pressure head
Connector sleeve 7 is all connected by screw thread with connecting shaft, compresses displacement measurement arm 21 by nut I 23, pressure head connector sleeve 7, detachably
Formula N-type shielded rack 20 is connected by hexagon socket cap head screw and support plate 16；Pressure head 22 is connected by screw thread and pressure head connector sleeve 7
It connects, realizes the load of loading of pressing in；When being loaded using voice coil motor macroscopic view displacement, compressed and support plate 16 by nut I 23
The detachable N-type shielded rack 20 of connection, makes pressure head connector sleeve 7 be isolated with small-measuring range force transducer 8, while it is a large amount of to remove isolation
The detachable sensor mask cover 4 of range force sensor 5 makes sample carrier 6 and large range stress sensor 5 by two pieces of nuts II 24
It is direct-connected, the accurate measurement of load is pushed down into macroscopical displacement load；It is loaded when using the microcosmic displacement of piezoelectric stack-flexible hinge
When, detachable N-type shielded rack 20 is removed, it is direct-connected by nut I 23 and small-measuring range force transducer 8, while being passed in wide range power
Detachable sensor mask cover 4 is installed on sensor 5, sample carrier 6 is made to be isolated with large range stress sensor 5, nut II 24 is used in combination
It compresses, the accurate measurement of load is pushed down into microcosmic displacement load.
The displacement detecting unit is：Capacitance displacement sensor 9 is connected on manual displacement platform 12, and manual displacement is flat
Platform 12 is fixed on by hexagon socket cap head screw in support plate 16, realizes the accurate survey of compression distance in being loaded to microcosmic displacement
Amount；Grating scale component 18 is separately fixed at by grating scale component mounting block 17 in support plate 16 and pedestal 1, realizes range switching
When assembly relation adjustment and macroscopical displacement load in compression distance accurate measurement.
The sample mobile unit is：X passes through hexagon socket cap head screw and Z-direction essence to accurate piezoelectric drive platform 2
Close piezoelectric drive platform 3 is connected, and is finally connected with pedestal 1, realizes that sample pushed position is replaced and cut test load adds
It carries.
The beneficial effects of the present invention are：
1, the configuration of the present invention is simple, compact in design realize combination drive based on voice coil motor, piezoelectric stack-flexible hinge, both may be used
It realizes and the conventional nanos such as reguline metal material, thin-film material and composite material impression/cut is tested, and can be to biological tissue etc.
Soft material carries out big stroke load test, and application range is more extensive.
2, the present invention uses modularized design, based on combination drive and load detection and range switch unit, in conjunction with
Displacement detecting unit is for realizing the different accurate measurements for loading strokes and loading of pressing in, and integrated sample mobile unit is for real
Now to the pushed position of sample replace and cut test, while modularized design be also beneficial to complete machine combination installation, improve it is excellent
Change and maintaining.
3, the present invention is by adjusting shielding case（Frame）With the method for force snesor assembly relation, solves wide range, high-precision
Force snesor the problem of respectively advantage can not get both is spent, has the advantages that technical difficulty is low, strong antijamming capability, while using dividing
The mode that section measures is reduced due to influence of the factors to measurement accuracy such as transfer route long caused back clearance, rigging errors.
Description of the drawings
Attached drawing described herein is used to provide further understanding of the present invention, and is constituted part of this application, this hair
Bright illustrative example and its explanation is not constituted improper limitations of the present invention for explaining the present invention.
Fig. 1 is the body structure axonometric drawing of the present invention；
Fig. 2 is the wide range load stress state vertical view of the present invention；
Fig. 3 is the wide range load stress state sectional view of the present invention；
Fig. 4 is the small-range load stress state vertical view of the present invention；
Fig. 5 is the small-range load stress state sectional view of the present invention.
In figure：1, pedestal；2, X is to accurate piezoelectric drive platform；3, Z-direction precision piezoelectric drive platform；4, detachable biography
Sensor shielding case；5, large range stress sensor；6, sample carrier；7, pressure head connector sleeve；8, small-measuring range force transducer；9, capacitive displacement
Sensor；10, flexible hinge；11, piezoelectric stack；12, manual displacement platform；13, voice coil motor outer ring；14, motor fixes branch
Frame；15, voice coil motor inner ring assembly；16, support plate；17, grating scale component mounting block；18, grating scale component；19, guide rail is slided
Block assembly；20, detachable N-type shielded rack；21, displacement measurement arm；22, pressure head；23, nut I；24, nut II.
Specific implementation mode
The detailed content and its specific implementation mode further illustrated the present invention below in conjunction with the accompanying drawings.
Shown in Fig. 1 to Fig. 5, the micro-nano impression/cut test device of two-pass combination drive of the invention both can be real
Now the conventional nanos such as reguline metal material, thin-film material and composite material impression/cut is tested, and can be soft to biological tissue etc.
Material carries out big stroke load test, and practicability is stronger.The present invention is realized mixed using voice coil motor, piezoelectric stack-flexible hinge
Driving is closed, by adjusting shielding case（Frame）It is tied using the detection of segmentation load and range switching mode with force snesor assembly relation
Resultant displacement detection unit can realize the accurate measurement of different load strokes and loading of pressing in, and integrated sample mobile unit is for real
Now the pushed position of sample is replaced and cut is tested.The present invention uses modularized design thinking, and simple in structure, layout is tightly
It gathers, securely and reliably, can both realize to the conventional nanos such as reguline metal material, thin-film material and composite material impression/cut test,
Big stroke load test can be carried out to soft materials such as biological tissues again, practicability is stronger.It is detected including hybrid drive unit, load
It is described with range switch unit, displacement detecting unit, sample mobile unit, pedestal 1, support plate 16 and guide rail slide block component 19
Hybrid drive unit, load detection pass through support plate 16 and guide rail slide block component 19 with range switch unit, displacement detecting unit
It is connected, is fixed on pedestal 1, and ensures to load axis and the requirement of load detection axis concentricity；The sample mobile unit is logical
It crosses hexagon socket cap head screw to be connected on pedestal 1, it can be achieved that precise jiggle of the sample in X, Y plane, and ensures its installation
Surface and the requirement of pressing direction vertical precision.
The hybrid drive unit, by flexible hinge 10, piezoelectric stack 11, voice coil motor inner ring assembly 15, voice coil electricity
Machine outer ring 13 and motor fixed rack 14 form；Pressing direction mixing is realized by voice coil motor and piezoelectric stack-flexible hinge
Load, wherein voice coil motor inner ring assembly 15 is connected with support plate 16 by output end screw thread, voice coil motor outer ring 13 and connected
Motor fixed rack 14 in support plate 16 is connected, and realizes that pressing direction macroscopic view displacement load and contact judge；Piezoelectric stack
11 are placed on the flexible hinge 10 being connected with support plate 16, and wherein the output end of flexible hinge 10 is detected by screw thread and load
It is connected directly with range switch unit, realizes pressing direction fine motion displacement load.
The load is detected with range switch unit：By pressure head 22, pressure head connector sleeve 7, displacement measurement arm 21, nut
I 23, detachable N-type shielded rack 20, small-measuring range force transducer 8, sample carrier 6, nut II 24, detachable sensor mask cover
4 and large range stress sensor 5 form；By adjusting the assembly relation of sensor mask cover and shielded rack and force snesor, in conjunction with
Adjusting nut locked position is accurately measured with changing pressure transmission route to realize that different loading is pushed down into power,
Wherein sample carrier 6 is connected by screw thread with connecting rod, and nut II 24 compresses detachable sensor mask cover 4, wide range
5 both ends of force snesor are connected by screw thread with connecting rod and sample mobile unit respectively；8 both ends of small-measuring range force transducer lead to respectively
It crosses screw thread with connecting shaft and flexible hinge 10 to be connected, detachable N-type shielded rack 20, nut I 23 and pressure head connector sleeve 7 are all logical
It crosses screw thread with connecting shaft to be connected, wherein compressing displacement measurement arm 21, detachable N-type screen using nut I 23, pressure head connector sleeve 7
Frame 20 is covered to be connected by hexagon socket cap head screw and support plate 16；Pressure head 22 is connect by screw thread with pressure head connector sleeve 7, is realized
The load of loading of pressing in；When using voice coil motor macroscopic view displacement load when, by nut I 23 compress connect with support plate 16 can
Detachable N-type shielded rack 20, makes pressure head connector sleeve 7 be isolated with small-measuring range force transducer 8, while removing isolation wide range power sensing
The detachable sensor mask cover 4 of device 5 keeps sample carrier 6 and large range stress sensor 5 direct-connected by two pieces of nuts II 24, uses
In the accurate measurement for being pushed down into load to macroscopical displacement load；When being loaded using the microcosmic displacement of piezoelectric stack-flexible hinge, tear open
It is direct-connected by nut I 23 and small-measuring range force transducer 8 except detachable N-type shielded rack 20, while in large range stress sensor 5
The upper detachable sensor mask cover 4 of installation, makes sample carrier 6 be isolated with large range stress sensor 5, nut II 24 is used in combination to compress,
Accurate measurement for being pushed down into load to microcosmic displacement load.
The displacement detecting unit is：By capacitance displacement sensor 9, manual displacement platform 12, the installation of grating scale component
Frame 17 and grating scale component 18 form；Wherein capacitance displacement sensor 9 is connected to by mounting bracket on manual displacement platform 12, hand
Dynamic displacement platform 12 is fixed on by hexagon socket cap head screw in support plate 16, for realizing to being pressed into microcosmic displacement load
The accurate measurement of depth；Grating scale component 18 is separately fixed at by grating scale component mounting block 17 in support plate 16 and pedestal 1,
The accurate measurement of compression distance during assembly relation adjustment and macroscopical displacement load when switching for realizing range.
The sample mobile unit is made of X to accurate piezoelectric drive platform 2 and Z-direction precision piezoelectric drive platform 3；X
It is connected to accurate piezoelectric drive platform 2 with Z-direction precision piezoelectric drive platform 3 by hexagon socket cap head screw, and finally and base
Seat 1 is connected, and is replaced for realizing sample pushed position and cut test load loads.
Shown in Fig. 2 and Fig. 3, during big stroke load test, first by 5 outer layer of large range stress sensor can
Detachable sensor mask cover 4 disassembles, then two pieces of nuts II 24 are compressed large range stress sensor 5, and makes nut II
24 top surfaces and sample carrier 6 are in contact, and play locking purpose.Simultaneously by adjusting two row on detachable N-type shielded rack 20
The position of strip hole, and be fixed in support plate 16 using four hexagon socket cap head screws, and ensure to sense with small-range power
8 end of device does not contact.
Enter working condition after the operations described above, the transfer route of load is by 15 output end of voice coil motor inner ring assembly
Export, is then transmitted to pressure head connector sleeve 7 by support plate 16 and detachable N-type shielded rack 20 again, using 22 pairs of pressure head with
The sample pasted on the direct-connected sample carrier 6 of large range stress sensor 5 applies Y-direction loading of pressing in.At this point, large range stress sensor 5
In running order measurement loading of pressing in, and small-measuring range force transducer 8 is in masked state, and measured by grating scale component 18
Compression distance realizes big stroke micron impression/cut testing experiment.
Shown in Fig. 4 and Fig. 5, during small stroke load test, first by 8 end of small-measuring range force transducer can
Detachable N-type shielded rack 20 disassembles, then one piece of nut I 23 is compressed small-measuring range force transducer 8, another piece of compression displacement
Measuring arm 21.Simultaneously in 5 outer layer of large range stress sensor installation attachable sensor shielding case 4, compressed using nut II 24,
And ensure that II 24 top surface of nut and sample carrier 6 are kept in contact.
Enter working condition after the operations described above, the transfer route of load is the piezo stack by being fixed in support plate 16
Heap 11 amplifies through flexible hinge 10 to be exported, and is then connected through a screw thread bar and is transmitted to pressure head connector sleeve 7, using pressure head 22 to installation
The sample pasted on sample carrier 6 outside attachable sensor shielding case 4 applies Y-direction loading of pressing in.At this point, wide range power senses
Device 5 is in masked state, and 8 in running order measurement loading of pressing in of small-measuring range force transducer, and by being mounted on manual position
The capacitance displacement sensor 9 moved on platform 12 measures compression distance, realizes small stroke nanometer impression/cut testing experiment.
The foregoing is merely the preferred embodiments of the present invention, are not intended to restrict the invention, for the technology of this field
For personnel, the invention may be variously modified and varied.All any modification, equivalent substitution, improvement and etc. made for the present invention,
It should all be included in the protection scope of the present invention.
Claims (5)
1. a kind of micro-nano impression/cut test device of two-pass combination drive, including the detection of hybrid drive unit, load and amount
Journey switch unit, displacement detecting unit, sample mobile unit, pedestal（1）, support plate（16）With guide rail slide block component（19）,
It is characterized in that：The hybrid drive unit, load detection pass through support plate with range switch unit, displacement detecting unit（16）With
Guide rail slide block component（19）It is connected, is fixed on pedestal（1）On, and ensure that load axis and load detection axis are coaxial；The sample
Product mobile unit is connected in pedestal by hexagon socket cap head screw（1）On, realize precise jiggle of the sample in X, Y plane,
And ensure that its installation surface is vertical with pressing direction.
2. the micro-nano impression/cut test device of two-pass combination drive according to claim 1, it is characterised in that：Institute
The hybrid drive unit stated realizes that pressing direction mix-loaded, structure are by voice coil motor and piezoelectric stack-flexible hinge：
Voice coil motor inner ring assembly（15）With support plate（16）It is connected by output end screw thread, voice coil motor outer ring（13）It is propped up with being connected in
Fagging（16）On motor fixed rack（14）It is connected, realizes pressing direction macroscopic view displacement load；Piezoelectric stack（11）It is placed in
With support plate（16）Connected flexible hinge（10）On, flexible hinge（10）Output end pass through screw thread and load and detect and range
Switch unit is connected directly, and realizes pressing direction fine motion displacement load.
3. the micro-nano impression/cut test device of two-pass combination drive according to claim 1, it is characterised in that：Institute
Assembly relation of the load detection stated with range switch unit by adjusting sensor mask cover and shielded rack and force snesor, knot
Adjusting nut locked position is closed accurately to measure to realize that different loading is pushed down into power to change pressure transmission route,
Structure is：Sample carrier（6）It is connected with connecting rod by screw thread, nut II（24）Compress detachable sensor mask cover（4）, greatly
Range force snesor（5）Both ends are connected by screw thread with connecting rod and sample mobile unit respectively；Small-measuring range force transducer（8）Two
End passes through screw thread and connecting shaft and flexible hinge respectively（10）It is connected, detachable N-type shielded rack（20）, nut I（23）And
Pressure head connector sleeve（7）All it is connected with connecting shaft by screw thread, passes through nut I（23）, pressure head connector sleeve（7）Compress displacement measurement arm
（21）, detachable N-type shielded rack（20）Pass through hexagon socket cap head screw and support plate（16）It is connected；Pressure head（22）Pass through spiral shell
Line and pressure head connector sleeve（7）Connection, realizes the load of loading of pressing in；When being loaded using voice coil motor macroscopic view displacement, pass through spiral shell
Mother I（23）Compression and support plate（16）The detachable N-type shielded rack of connection（20）, make pressure head connector sleeve（7）With small-range power
Sensor（8）Isolation, while removing isolation large range stress sensor（5）Detachable sensor mask cover（4）, pass through two pieces
Nut II（24）Make sample carrier（6）With large range stress sensor（5）It is direct-connected, the accurate of load is pushed down into macroscopical displacement load and is surveyed
Amount；When being loaded using the microcosmic displacement of piezoelectric stack-flexible hinge, detachable N-type shielded rack is removed（20）, pass through nut I
（23）With small-measuring range force transducer（8）It is direct-connected, while in large range stress sensor（5）The upper detachable sensor mask cover of installation
（4）, make sample carrier（6）With large range stress sensor（5）Isolation, is used in combination nut II（24）It compresses, microcosmic displacement is loaded and is pushed
Enter the accurate measurement of load.
4. the micro-nano impression/cut test device of two-pass combination drive according to claim 1, it is characterised in that：Institute
The displacement detecting unit stated is：Capacitance displacement sensor（9）It is connected to manual displacement platform（12）On, manual displacement platform（12）
It is fixed on support plate by hexagon socket cap head screw（16）On, realize the accurate survey of compression distance in being loaded to microcosmic displacement
Amount；Grating scale component（18）Pass through grating scale component mounting block（17）It is separately fixed at support plate（16）And pedestal（1）On, it realizes
The accurate measurement of compression distance during assembly relation adjustment and macroscopical displacement load when range switches.
5. the micro-nano impression/cut test device of two-pass combination drive according to claim 1, it is characterised in that：Institute
The sample mobile unit stated is：X is to accurate piezoelectric drive platform（2）It is driven by hexagon socket cap head screw and Z-direction precision piezoelectricity
Moving platform（3）It is connected, and finally and pedestal（1）It is connected, realizes that sample pushed position is replaced and cut test load loads.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810336309.6A CN108760548B (en) | 2018-04-16 | 2018-04-16 | Double-stroke hybrid driving micro-nano indentation/scratch testing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810336309.6A CN108760548B (en) | 2018-04-16 | 2018-04-16 | Double-stroke hybrid driving micro-nano indentation/scratch testing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108760548A true CN108760548A (en) | 2018-11-06 |
| CN108760548B CN108760548B (en) | 2024-02-20 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810336309.6A Active CN108760548B (en) | 2018-04-16 | 2018-04-16 | Double-stroke hybrid driving micro-nano indentation/scratch testing device |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110044916A (en) * | 2019-04-11 | 2019-07-23 | 长春工程学院 | A kind of surface minute scratch marks detector |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110044916A (en) * | 2019-04-11 | 2019-07-23 | 长春工程学院 | A kind of surface minute scratch marks detector |
| CN110320120A (en) * | 2019-07-17 | 2019-10-11 | 长春因赛图精密仪器设备有限公司 | A kind of nanometer measurement loading unit and its measurement method for nano-hardness tester |
| CN110320120B (en) * | 2019-07-17 | 2022-02-08 | 长春因赛图精密仪器设备有限公司 | Nanoscale measurement loading unit for nanoindenter and measurement method thereof |
| CN110967253A (en) * | 2019-12-09 | 2020-04-07 | 中国工程物理研究院总体工程研究所 | Micro-motion loading test device |
| CN111791079A (en) * | 2020-05-22 | 2020-10-20 | 浙江大学 | Electromagnetic driving type quick cutter servo system based on flexible hinge combined mechanism |
| CN112945776A (en) * | 2021-02-04 | 2021-06-11 | 惠州检微科技有限公司 | Gun type measuring head of real-time indentation analyzer |
| CN113790988A (en) * | 2021-10-20 | 2021-12-14 | 天津大学 | Macro-micro coupling trochoid micro-nano scratch experiment machine based on flexible mechanism |
| CN114057158A (en) * | 2021-11-18 | 2022-02-18 | 吉林大学 | Method for realizing surface composite micro-nano structure processing by using stick-slip driving rollback phenomenon |
| CN114057158B (en) * | 2021-11-18 | 2024-04-09 | 吉林大学 | Method for processing surface composite micro-nano structure by using stick-slip driving rollback phenomenon |
| CN114323920A (en) * | 2021-12-31 | 2022-04-12 | 华侨大学 | High-temperature scratch instrument |
| CN116359053A (en) * | 2023-03-09 | 2023-06-30 | 中国人民解放军国防科技大学 | Soft material indentation device, system and test method for multipoint measurement |
| CN116359053B (en) * | 2023-03-09 | 2024-05-31 | 中国人民解放军国防科技大学 | Soft material indentation device, system and test method for multipoint measurement |
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