CN208297278U - Micro-nano impression/the cut test device of two-pass combination drive - Google Patents
Micro-nano impression/the cut test device of two-pass combination drive Download PDFInfo
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- CN208297278U CN208297278U CN201820532918.4U CN201820532918U CN208297278U CN 208297278 U CN208297278 U CN 208297278U CN 201820532918 U CN201820532918 U CN 201820532918U CN 208297278 U CN208297278 U CN 208297278U
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- 238000003825 pressing Methods 0.000 claims abstract description 23
- 238000001514 detection method Methods 0.000 claims abstract description 19
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 18
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- 238000013461 design Methods 0.000 abstract description 8
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Abstract
The utility model relates to a kind of micro-nano impression/cut test devices of two-pass combination drive, belong to sophisticated sensor and precision instrument technical field.It is made of hybrid drive unit, load detection with range switch unit, displacement detecting unit, sample mobile unit, pedestal, support plate and guide rail slide block component.The utility model realizes combination drive using voice coil motor, piezoelectric stack-flexible hinge, by adjusting shielding case (frame) and force snesor assembly relation, using the detection of segmentation load and range switching mode, the precise measurement of different load strokes and loading of pressing in can be realized in conjunction with displacement detecting unit, and integrated sample mobile unit is for realizing the pushed position replacement and scratch test to sample.It is compact-sized using modularized design thinking, securely and reliably, can not only it realize to the conventional nanos such as reguline metal material, thin-film material and composite material impression/scratch test, but also big stroke load test can be carried out to soft materials such as biological tissues, practicability is stronger.
Description
Technical field
The utility model relates to sophisticated sensor and precision instrument technical field, in particular to a kind of two-pass combination drive
Micro-nano impression/cut test device.Two kinds of different trips high-precision micro nano impression/scratches can be achieved at the same time in the utility model
Test, be related to the fields such as semiconductor technology, advanced material and material science, aerospace and national defence section work have it is particularly significant
Scientific meaning and broad application prospect.
Background technique
In recent years, as new material synthesis and preparation process are continuously improved, characteristic size is smaller and smaller, is using tradition
Code test when carrying out mechanics parameter measurement to it, it is possible that a series of problems, such as clamping, centering.For this purpose, in view of biography
The macrohardness and delineation test of system, propose micro-nano impression/scratch test method.
Micro-nano impression/cut measuring technology mainly utilizes the load and displacement sensor of high resolution, and acquisition in real time is shown
Show, handle load and displacement data, i.e., accurately and reliably measures loading of pressing in-depth curve.It can by micro-nano impression test
With parameters such as the hardness, elasticity modulus, fracture toughness, the fatigue properties that obtain measured material；Then may be used by the test of micro-nano scratch
With parameters such as the critical adhesive force and the coefficient of frictions that obtain film.Since micro-nano impression/cut measuring technology has operation side
Just, the advantages that sample preparation is simple, test content is abundant, is now widely used for film and nano material, semiconductor material, gold
Belong to the mechanics characterization of a variety of materials such as material, advanced function material and biomaterial.
Nanoscale precision actuation technology and detection technique are to realize accurate impression/scratch test core technology support, benefit
Precision actuation, respective drive can be achieved with magnetostriction materials, marmem, piezoelectric material and voice coil actuator etc.
Scheme is applied in the deep extensive pass by domestic and international academia and engineering circles of design studies of micro-nano impression/cut test device
Note, and the model machine of a variety of patterns is designed, as Chinese patent (102288501 A of CN) is related to a kind of precise nanoindentation test
Device is based on rectangular coil motor linear drives mode, has simple structure and convenient processing, positioning accuracy are high, response is rapid etc.
Advantage；For another example Chinese patent (104297082 A of CN) is related to a kind of in-situ micro-nano impression/scarification tester, structure novel,
Macro position adjustment and scratch test use Servo motor drive control, and impression load is realized by piezoelectric element, and is had
The advantages of realizing in-situ observation under a scanning electron microscope can be integrated.But existing design scheme can not often combine greatly
Stroke and high-precision, protrusion are embodied in load context of detection, this limits nano impress/cut test device versatility for serious
And practicability.Therefore, there is big stroke, high-precision, compact-sized micro-nano impression/cut test device to have for design research and development
Extensive demand.
Utility model content
The purpose of this utility model is to provide a kind of micro-nano impression/cut test device of two-pass combination drive, solutions
Existing micro-nano impression/cut test device of having determined not can be implemented simultaneously high-precision and big two kinds of loading modes of stroke and corresponding inspection
Two kinds of different trips high-precisions can be achieved at the same time in the defects of survey technology.The utility model uses modularized design thinking, and structure is tight
It gathers, securely and reliably, can both realize to the conventional nanos such as reguline metal material, thin-film material and composite material impression/scratch test,
Big stroke load test can be carried out to soft materials such as biological tissues again, practicability is stronger.
The above-mentioned purpose of the utility model is achieved through the following technical solutions:
Micro-nano impression/the cut test device of two-pass combination drive, including the detection of hybrid drive unit, load and range
Switch unit, displacement detecting unit, sample mobile unit, pedestal 1, support plate 16 and guide rail slide block component 19, the combined drive
Moving cell, load detection are connected by support plate 16 with guide rail slide block component 19 with range switch unit, displacement detecting unit, Gu
It is scheduled on pedestal 1, and guarantees that load axis and load detection axis are coaxial；The sample mobile unit passes through interior hexagonal cylindrical head
Screw is connected on pedestal 1, realizes precise jiggle of the sample in X, Y plane, and guarantees that its mounting surface and pressing direction are hung down
Directly.
The hybrid drive unit realizes that pressing direction mixing adds by voice coil motor and piezoelectric stack-flexible hinge
Carry, structure is: voice coil motor inner ring assembly 15 is connected with support plate 16 by output end screw thread, voice coil motor outer ring 13 with consolidate
The motor fixed rack 14 being connected in support plate 16 is connected, and realizes the displacement load of pressing direction macroscopic view；Piezoelectric stack 11 is placed in
On the flexible hinge 10 being connected with support plate 16, the output end of flexible hinge 10 is single by screw thread and load detection and range switching
Member is connected directly, and realizes pressing direction fine motion displacement load.
The described load detection and range switch unit are by adjusting sensor mask cover and shielded rack and force snesor
Assembly relation, in conjunction with adjusting nut locked position, to change pressure transfer route, to realize that different loading is pushed down into power
Precise measurement, structure are: sample carrier 6 is connected by screw thread with connecting rod, and nut II 24 compresses detachable sensor mask
Cover 4,5 both ends of large range stress sensor pass through screw thread respectively and are connected with connecting rod and sample mobile unit；Small-measuring range force transducer 8
Both ends pass through screw thread respectively and are connected with connecting shaft and flexible hinge 10, detachable N-type shielded rack 20, nut I 23 and pressure head
Connector sleeve 7 is all connected by screw thread with connecting shaft, compresses displacement measurement arm 21 by nut I 23, pressure head connector sleeve 7, detachably
Formula N-type shielded rack 20 is connected by hexagon socket cap head screw and support plate 16；Pressure head 22 is connected by screw thread and pressure head connector sleeve 7
It connects, realizes the load of loading of pressing in；When using the displacement load of voice coil motor macroscopic view, compressed and support plate 16 by nut I 23
The detachable N-type shielded rack 20 of connection, is isolated pressure head connector sleeve 7 with small-measuring range force transducer 8, while it is a large amount of to remove isolation
The detachable sensor mask cover 4 of range force sensor 5 makes sample carrier 6 and large range stress sensor 5 by two pieces of nuts II 24
It is direct-connected, the accurate measurement of load is pushed down into macroscopic view displacement load；It is loaded when using the microcosmic displacement of piezoelectric stack-flexible hinge
When, detachable N-type shielded rack 20 is removed, it is direct-connected by nut I 23 and small-measuring range force transducer 8, while being passed in wide range power
Detachable sensor mask cover 4 is installed on sensor 5, sample carrier 6 is isolated with large range stress sensor 5, and with nut II 24
It compresses, the accurate measurement of load is pushed down into microcosmic displacement load.
The displacement detecting unit is: capacitance displacement sensor 9 is connected on manual displacement platform 12, and manual displacement is flat
Platform 12 is fixed in support plate 16 by hexagon socket cap head screw, realizes the accurate survey to compression distance in microcosmic displacement load
Amount；Grating scale component 18 is separately fixed in support plate 16 and pedestal 1 by grating scale component mounting block 17, realizes range switching
When assembly relation adjustment and macroscopic view displacement load in compression distance precise measurement.
The sample mobile unit is: X passes through hexagon socket cap head screw and Z-direction essence to accurate piezoelectric drive platform 2
Close piezoelectric drive platform 3 is connected, and is finally connected with pedestal 1, realizes that the replacement of sample pushed position and scratch test load add
It carries.
The utility model has the beneficial effects that:
1, the utility model structure is simple, compact layout, realizes mixing based on voice coil motor, piezoelectric stack-flexible hinge
It drives, can not only realize to the conventional nanos such as reguline metal material, thin-film material and composite material impression/scratch test, but also can be right
The soft materials such as biological tissue carry out big stroke load test, and application range is more extensive.
2, the utility model uses modularized design, based on combination drive and load detection and range switch unit,
In conjunction with displacement detecting unit for realizing the precise measurement of different load strokes and loading of pressing in, and integrated sample mobile unit is used
The pushed position replacement of sample and scratch are tested in realizing, while modularized design is also beneficial to complete machine combination installation, changes
Into optimization and maintenance.
3, the utility model by adjusting shielding case (frame) and force snesor assembly relation method, solve wide range,
High-precision force sensor the problem of respectively advantage can not get both, has the advantages that technical difficulty is low, strong antijamming capability, while benefit
With the mode of areal survey, the shadow due to factors such as transfer route too long caused back clearance, rigging errors to measurement accuracy is reduced
It rings.
Detailed description of the invention
Attached drawing described herein is used to provide a further understanding of the present invention, and is constituted part of this application,
The illustrative example and its explanation of the utility model do not constitute the improper limit to the utility model for explaining the utility model
It is fixed.
Fig. 1 is the body structure axonometric drawing of the utility model；
Fig. 2 is the wide range load stress state top view of the utility model；
Fig. 3 is the wide range load stress state cross-sectional view of the utility model；
Fig. 4 is the small-range load stress state top view of the utility model；
Fig. 5 is the small-range load stress state cross-sectional view of the utility model.
In figure: 1, pedestal；2, X is to accurate piezoelectric drive platform；3, Z-direction precision piezoelectric drive platform；4, detachable biography
Sensor shielding case；5, large range stress sensor；6, sample carrier；7, pressure head connector sleeve；8, small-measuring range force transducer；9, capacitive displacement
Sensor；10, flexible hinge；11, piezoelectric stack；12, manual displacement platform；13, voice coil motor outer ring；14, the fixed branch of motor
Frame；15, voice coil motor inner ring assembly；16, support plate；17, grating scale component mounting block；18, grating scale component；19, guide rail is sliding
Block assembly；20, detachable N-type shielded rack；21, displacement measurement arm；22, pressure head；23, nut I；24, nut II.
Specific embodiment
The detailed content and its specific embodiment of the utility model are further illustrated with reference to the accompanying drawing.
Referring to figs. 1 to 5, the micro-nano impression/cut test device of the two-pass combination drive of the utility model, both
It can be achieved to test the conventional nanos such as reguline metal material, thin-film material and composite material impression/scratch, and can be to biological tissue
Equal soft materials carry out big stroke load test, and practicability is stronger.The utility model utilizes voice coil motor, piezoelectric stack-flexible hinge
Chain realizes combination drive, by adjusting shielding case (frame) and force snesor assembly relation, is cut using segmentation load detection with range
Mode is changed, the precise measurement of different load strokes and loading of pressing in can be realized in conjunction with displacement detecting unit, and integrated sample is mobile
Unit is for realizing the pushed position replacement and scratch test to sample.The utility model uses modularized design thinking, knot
Structure is simple, compact layout securely and reliably can both have been realized to conventional nanos such as reguline metal material, thin-film material and composite materials
Impression/scratch test, and big stroke load test can be carried out to soft materials such as biological tissues, practicability is stronger.Including combined drive
Moving cell, load detection and range switch unit, displacement detecting unit, sample mobile unit, pedestal 1, support plate 16 and guide rail
Slide block assembly 19, the hybrid drive unit, load detection with range switch unit, displacement detecting unit by support plate 16 with
Guide rail slide block component 19 is connected, and is fixed on pedestal 1, and guarantees to load axis and the requirement of load detection axis concentricity；It is described
Sample mobile unit is connected on pedestal 1 by hexagon socket cap head screw, it can be achieved that precision of the sample in X, Y plane is micro-
It is dynamic, and guarantee its mounting surface and the requirement of pressing direction vertical precision.
The hybrid drive unit, by flexible hinge 10, piezoelectric stack 11, voice coil motor inner ring assembly 15, voice coil electricity
Machine outer ring 13 and motor fixed rack 14 form；Pressing direction mixing is realized by voice coil motor and piezoelectric stack-flexible hinge
Load, wherein voice coil motor inner ring assembly 15 is connected with support plate 16 by output end screw thread, voice coil motor outer ring 13 with it is connected
Motor fixed rack 14 in support plate 16 is connected, and realizes pressing direction macroscopic view displacement load and contact judgement；Piezoelectric stack
11 are placed on the flexible hinge 10 being connected with support plate 16, and wherein the output end of flexible hinge 10 is detected by screw thread and load
It is connected directly with range switch unit, realizes pressing direction fine motion displacement load.
The load is detected with range switch unit: by pressure head 22, pressure head connector sleeve 7, displacement measurement arm 21, nut
I 23, detachable N-type shielded rack 20, small-measuring range force transducer 8, sample carrier 6, nut II 24, detachable sensor mask cover
4 and large range stress sensor 5 form；By adjusting the assembly relation of sensor mask cover and shielded rack and force snesor, in conjunction with
Adjusting nut locked position, to change pressure transfer route, thus realize that different loading is pushed down into power precise measurement,
Wherein sample carrier 6 is connected by screw thread with connecting rod, and nut II 24 compresses detachable sensor mask cover 4, greatly
5 both ends of range force snesor pass through screw thread respectively and are connected with connecting rod and sample mobile unit；8 both ends of small-measuring range force transducer point
Not Tong Guo screw thread be connected with connecting shaft and flexible hinge 10, detachable N-type shielded rack 20, nut I 23 and pressure head connector sleeve 7
All it is connected by screw thread with connecting shaft, wherein compressing displacement measurement arm 21, detachable N using nut I 23, pressure head connector sleeve 7
Type shielded rack 20 is connected by hexagon socket cap head screw and support plate 16；Pressure head 22 is connect by screw thread with pressure head connector sleeve 7,
Realize the load of loading of pressing in；When using the displacement load of voice coil motor macroscopic view, is compressed by nut I 23 and connect with support plate 16
Detachable N-type shielded rack 20, pressure head connector sleeve 7 is isolated with small-measuring range force transducer 8, at the same remove isolation wide range power
The detachable sensor mask cover 4 of sensor 5 keeps sample carrier 6 and large range stress sensor 5 straight by two pieces of nuts II 24
Even, for being pushed down into the accurate measurement of load to macroscopic view displacement load；It is loaded when using the microcosmic displacement of piezoelectric stack-flexible hinge
When, detachable N-type shielded rack 20 is removed, it is direct-connected by nut I 23 and small-measuring range force transducer 8, while being passed in wide range power
Detachable sensor mask cover 4 is installed on sensor 5, sample carrier 6 is isolated with large range stress sensor 5, and with nut II 24
It compresses, for being pushed down into the accurate measurement of load to microcosmic displacement load.
The displacement detecting unit is: being installed by capacitance displacement sensor 9, manual displacement platform 12, grating scale component
Frame 17 and grating scale component 18 form；Wherein capacitance displacement sensor 9 is connected on manual displacement platform 12 by mounting rack, hand
Dynamic displacement platform 12 is fixed in support plate 16 by hexagon socket cap head screw, for realizing being pressed into loading to microcosmic displacement
The precise measurement of depth；Grating scale component 18 is separately fixed in support plate 16 and pedestal 1 by grating scale component mounting block 17,
For realizing the precise measurement of compression distance in assembly relation adjustment when range switching and macroscopic view displacement load.
The sample mobile unit is made of X to accurate piezoelectric drive platform 2 and Z-direction precision piezoelectric drive platform 3；X
It is connected to accurate piezoelectric drive platform 2 by hexagon socket cap head screw with Z-direction precision piezoelectric drive platform 3, and finally and base
Seat 1 is connected, for realizing the replacement of sample pushed position and scratch test load load.
Referring to figs. 2 and 3 shown in, during big stroke load test, first by 5 outer layer of large range stress sensor can
Detachable sensor mask cover 4 disassembles, then two pieces of nuts II 24 is compressed large range stress sensor 5, and make nut II
24 top surfaces and sample carrier 6 are in contact, and play locking purpose.Simultaneously by adjusting two column on detachable N-type shielded rack 20
The position of strip hole, and be fixed in support plate 16 using four hexagon socket cap head screws, and guarantee to sense with small-range power
8 end of device does not contact.
Enter working condition after the operations described above, the transfer route of load is by 15 output end of voice coil motor inner ring assembly
Then export is transmitted to pressure head connector sleeve 7 by support plate 16 and detachable N-type shielded rack 20 again, using pressure head 22 to
The sample pasted on the direct-connected sample carrier 6 of large range stress sensor 5 applies Y-direction loading of pressing in.At this point, large range stress sensor 5
In running order measurement loading of pressing in, and small-measuring range force transducer 8 is in masked state, and is measured by grating scale component 18
Compression distance realizes big stroke micron impression/scratch testing experiment.
Referring to fig. 4 and shown in Fig. 5, during small stroke load test, first by 8 end of small-measuring range force transducer can
Detachable N-type shielded rack 20 disassembles, then one piece of nut I 23 is compressed small-measuring range force transducer 8, another piece of compression displacement
Measure arm 21.Attachable sensor shielding case 4 is installed in 5 outer layer of large range stress sensor simultaneously, is compressed using nut II 24,
And guarantee that II 24 top surface of nut and sample carrier 6 are kept in contact.
Enter working condition after the operations described above, the transfer route of load is the piezo stack by being fixed in support plate 16
Heap 11 amplifies through flexible hinge 10 to be exported, and is then connected through a screw thread bar and is transmitted to pressure head connector sleeve 7, is installed using 22 Duis of pressure head
The sample pasted on the sample carrier 6 outside attachable sensor shielding case 4 applies Y-direction loading of pressing in.At this point, wide range power senses
Device 5 is in masked state, and the in running order measurement loading of pressing in of small-measuring range force transducer 8, and by being mounted on manual position
The capacitance displacement sensor 9 moved on platform 12 measures compression distance, realizes small stroke nanometer impression/scratch testing experiment.
The foregoing is merely the preferred embodiments of the utility model, are not intended to limit the utility model, for ability
For the technical staff in domain, various modifications and changes may be made to the present invention.It is all to made by the utility model it is any modification,
Equivalent replacement, improvement etc., should be included within the scope of protection of this utility model.
Claims (5)
1. a kind of micro-nano impression/cut test device of two-pass combination drive, including the detection of hybrid drive unit, load and amount
Journey switch unit, displacement detecting unit, sample mobile unit, pedestal (1), support plate (16) and guide rail slide block component (19),
Be characterized in that: the hybrid drive unit, load detection with range switch unit, displacement detecting unit by support plate (16) with
Guide rail slide block component (19) is connected, and is fixed on pedestal (1), and guarantees that load axis and load detection axis are coaxial；The sample
Product mobile unit is connected on pedestal (1) by hexagon socket cap head screw, realizes precise jiggle of the sample in X, Y plane,
And guarantee that its mounting surface is vertical with pressing direction.
2. the micro-nano impression/cut test device of two-pass combination drive according to claim 1, it is characterised in that: institute
The hybrid drive unit stated realizes pressing direction mix-loaded by voice coil motor and piezoelectric stack-flexible hinge, and structure is:
Voice coil motor inner ring assembly (15) is connected with support plate (16) by output end screw thread, voice coil motor outer ring (13) and is connected in branch
Motor fixed rack (14) on fagging (16) is connected, and realizes the displacement load of pressing direction macroscopic view；Piezoelectric stack (11) is placed in
On the flexible hinge (10) being connected with support plate (16), the output end of flexible hinge (10) passes through screw thread and load detection and range
Switch unit is connected directly, and realizes pressing direction fine motion displacement load.
3. the micro-nano impression/cut test device of two-pass combination drive according to claim 1, it is characterised in that: institute
Assembly relation of the load detection stated with range switch unit by adjusting sensor mask cover and shielded rack and force snesor, knot
Adjusting nut locked position is closed, to change pressure transfer route, thus realize that different loading is pushed down into power precise measurement,
Structure is: sample carrier (6) is connected by screw thread with connecting rod, and nut II (24) compresses detachable sensor mask cover (4), greatly
Range force snesor (5) both ends pass through screw thread respectively and are connected with connecting rod and sample mobile unit；Small-measuring range force transducer (8) two
End is connected with connecting shaft and flexible hinge (10) by screw thread respectively, detachable N-type shielded rack (20), nut I (23) and
Pressure head connector sleeve (7) is all connected by screw thread with connecting shaft, compresses displacement measurement arm by nut I (23), pressure head connector sleeve (7)
(21), detachable N-type shielded rack (20) is connected by hexagon socket cap head screw and support plate (16)；Pressure head (22) passes through spiral shell
Line is connect with pressure head connector sleeve (7), realizes the load of loading of pressing in；When using the displacement load of voice coil motor macroscopic view, pass through spiral shell
Female I (23) compress the detachable N-type shielded rack (20) connecting with support plate (16), make pressure head connector sleeve (7) and small-range power
Sensor (8) isolation, while the detachable sensor mask cover (4) of isolation large range stress sensor (5) is removed, pass through two pieces
Nut II (24) keeps sample carrier (6) and large range stress sensor (5) direct-connected, is pushed down into the accurate of load to macroscopic view displacement load and surveys
Amount；When being loaded using the microcosmic displacement of piezoelectric stack-flexible hinge, detachable N-type shielded rack (20) is removed, nut I is passed through
(23) direct-connected with small-measuring range force transducer (8), while detachable sensor mask cover being installed on large range stress sensor (5)
(4), sample carrier (6) is isolated with large range stress sensor (5), and is compressed with nut II (24), microcosmic displacement is loaded and is pushed
Enter the accurate measurement of load.
4. the micro-nano impression/cut test device of two-pass combination drive according to claim 1, it is characterised in that: institute
The displacement detecting unit stated is: capacitance displacement sensor (9) is connected on manual displacement platform (12), manual displacement platform (12)
It is fixed on support plate (16) by hexagon socket cap head screw, realizes the accurate survey to compression distance in microcosmic displacement load
Amount；Grating scale component (18) is separately fixed in support plate (16) and pedestal (1) by grating scale component mounting block (17), is realized
Assembly relation adjustment and macroscopic view are displaced the precise measurement of compression distance in load when range switches.
5. the micro-nano impression/cut test device of two-pass combination drive according to claim 1, it is characterised in that: institute
The sample mobile unit stated is: X is driven to accurate piezoelectric drive platform (2) by hexagon socket cap head screw and Z-direction precision piezoelectricity
Moving platform (3) is connected, and is finally connected with pedestal (1), realizes the replacement of sample pushed position and scratch test load load.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820532918.4U CN208297278U (en) | 2018-04-16 | 2018-04-16 | Micro-nano impression/the cut test device of two-pass combination drive |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820532918.4U CN208297278U (en) | 2018-04-16 | 2018-04-16 | Micro-nano impression/the cut test device of two-pass combination drive |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208297278U true CN208297278U (en) | 2018-12-28 |
Family
ID=64725331
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820532918.4U Withdrawn - After Issue CN208297278U (en) | 2018-04-16 | 2018-04-16 | Micro-nano impression/the cut test device of two-pass combination drive |
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| CN (1) | CN208297278U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108760548A (en) * | 2018-04-16 | 2018-11-06 | 吉林大学 | Micro-nano impression/the cut test device of two-pass combination drive |
| CN110182755A (en) * | 2019-05-17 | 2019-08-30 | 东南大学 | A kind of nanometer of press fit instrument Cryo Equipment |
-
2018
- 2018-04-16 CN CN201820532918.4U patent/CN208297278U/en not_active Withdrawn - After Issue
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108760548A (en) * | 2018-04-16 | 2018-11-06 | 吉林大学 | Micro-nano impression/the cut test device of two-pass combination drive |
| CN108760548B (en) * | 2018-04-16 | 2024-02-20 | 吉林大学 | Double-stroke hybrid driving micro-nano indentation/scratch testing device |
| CN110182755A (en) * | 2019-05-17 | 2019-08-30 | 东南大学 | A kind of nanometer of press fit instrument Cryo Equipment |
| CN110182755B (en) * | 2019-05-17 | 2021-10-29 | 东南大学 | Low temperature device for nanometer pressing-in instrument |
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