CN108760548B - Double-stroke hybrid driving micro-nano indentation/scratch testing device - Google Patents
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/40—Investigating hardness or rebound hardness
- G01N3/42—Investigating hardness or rebound hardness by performing impressions under a steady load by indentors, e.g. sphere, pyramid
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
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Abstract
The invention relates to a double-stroke hybrid driving micro-nano indentation/scratch testing device, and belongs to the technical field of precision sensors and precision instruments. The device consists of a hybrid driving unit, a load detection and range switching unit, a displacement detection unit, a sample moving unit, a base, a supporting plate and a guide rail sliding block assembly. According to the invention, the voice coil motor and the piezoelectric stack-flexible hinge are utilized to realize hybrid driving, the assembly relation of the shielding cover (frame) and the force sensor is adjusted, a sectional load detection and range switching mode is adopted, the displacement detection unit is combined to realize accurate measurement of different loading strokes and pressing-in loads, and the integrated sample moving unit is used for realizing the replacement of the pressing-in position of a sample and scratch test. The modularized design thought is adopted, the structure is compact, the safety and reliability are realized, the conventional nano indentation/scratch test on massive metal materials, film materials, composite materials and the like can be realized, the large-stroke loading test on soft materials such as biological tissues and the like can be realized, and the practicability is higher.
Description
Technical Field
The invention relates to the technical field of precision sensors and precision instruments, in particular to a double-stroke hybrid driving micro-nano indentation/scratch testing device. The invention can realize two high-precision micro-nano indentation/scratch tests with different strokes at the same time, and has very important scientific significance and wide application prospect in the fields of semiconductor technology, advanced material and material science, aerospace, national defense, and the like.
Background
In recent years, as new materials are synthesized and preparation processes are continuously improved, the characteristic dimensions of the new materials are smaller and smaller, and a series of problems of clamping and centering can occur when the new materials are subjected to mechanical parameter measurement by using a traditional standard test. For this reason, in view of the conventional macro hardness and scratch test, a micro-nano indentation/scratch test method is proposed.
The micro-nano indentation/scratch test technology mainly utilizes high-resolution load and displacement sensors to acquire, display and process load and displacement data in real time, namely, an indentation load-depth curve is accurately and reliably measured. Parameters such as hardness, elastic modulus, fracture toughness and fatigue property of the tested material can be obtained through micro-nano indentation test; the critical adhesive force, friction coefficient and other parameters of the film can be obtained through the micro-nano scratch test. The micro-nano indentation/scratch test technology has the advantages of convenient operation, simple sample preparation, rich test content and the like, and is widely applied to the mechanical characterization of various materials such as films, nano materials, semiconductor materials, metal materials, advanced functional materials, biological materials and the like.
The nanometer precision driving technology and the detection technology are core technology supports for realizing accurate indentation/scratch test, can realize precision driving by utilizing magnetostrictive materials, shape memory alloys, piezoelectric materials, voice coil drivers and the like, and the corresponding driving scheme is applied to the design and research of the micro-nanometer indentation/scratch test device and is widely focused by academic circles and engineering circles at home and abroad, and designs various types of prototypes, such as China patent (CN 102288501A) relates to a precision nanometer indentation test device based on a rectangular voice coil motor linear driving mode, and has the advantages of simple structure, convenient processing, high positioning precision, quick response and the like; another example is chinese patent (CN 104297082A) which relates to an in-situ micro-nano indentation/scratch tester, which has novel structure, macroscopic position adjustment and scratch test are implemented by using servo motor driving mode, indentation loading is implemented by piezoelectric element, and the in-situ observation under scanning electron microscope can be implemented. However, the existing design scheme cannot always simultaneously consider large stroke and high precision, and is prominently reflected in the aspect of load detection, so that the universality and the practicability of the nano indentation/scratch testing device are severely limited. Therefore, there is a wide need to design and develop micro-nano indentation/scratch testing devices with large stroke, high precision and compact structure.
Disclosure of Invention
The invention aims to provide a double-stroke hybrid driving micro-nano indentation/scratch testing device, which solves the defects that the existing micro-nano indentation/scratch testing device cannot realize two loading modes of high precision and large stroke, corresponding detection technology and the like at the same time, and can realize high precision of two different strokes at the same time. The invention adopts a modularized design thought, has compact structure, is safe and reliable, can realize the conventional nano indentation/scratch test of massive metal materials, film materials, composite materials and the like, can also carry out large-stroke loading test on soft materials such as biological tissues and the like, and has stronger practicability.
The above object of the present invention is achieved by the following technical solutions:
the double-stroke hybrid driving micro-nano indentation/scratch testing device comprises a hybrid driving unit, a load detection and range switching unit, a displacement detection unit, a sample moving unit, a base 1, a supporting plate 16 and a guide rail sliding block assembly 19, wherein the hybrid driving unit, the load detection and range switching unit and the displacement detection unit are connected with the guide rail sliding block assembly 19 through the supporting plate 16, are fixed on the base 1 and ensure that a loading axis and a load detection axis are coaxial; the sample moving unit is fixedly connected to the base 1 through a hexagon socket cap screw, so that precise micro-motion of the sample in a X, Y plane is realized, and the mounting surface of the sample moving unit is vertical to the pressing-in direction.
The hybrid driving unit realizes the hybrid loading in the pressing-in direction through a voice coil motor and a piezoelectric stack-flexible hinge, and has the structure that: the voice coil motor inner ring assembly 15 is connected with the supporting plate 16 through an output end thread, and the voice coil motor outer ring 13 is connected with the motor fixing bracket 14 fixedly connected to the supporting plate 16 to realize macroscopic displacement loading in the pressing-in direction; the piezoelectric stack 11 is arranged on the flexible hinge 10 connected with the supporting plate 16, and the output end of the flexible hinge 10 is directly connected with the load detection and range switching unit through threads, so that micro displacement loading in the pressing-in direction is realized.
The load detection and range switching unit is used for changing a pressure transmission route by adjusting the assembly relation between the sensor shielding cover and the shielding frame and the force sensor and combining with the adjustment of the locking position of the nut, so as to realize accurate measurement of the pressing force under different loading modes, and the structure is as follows: the sample support 6 is connected with the connecting rod through threads, the nut II 24 presses the detachable sensor shielding cover 4, and two ends of the wide-range force sensor 5 are respectively connected with the connecting rod and the sample moving unit through threads; the two ends of the small-range force sensor 8 are respectively connected with the connecting shaft and the flexible hinge 10 through threads, the detachable N-type shielding frame 20, the nut I23 and the pressure head connecting sleeve 7 are connected with the connecting shaft through threads, the displacement measuring arm 21 is pressed by the nut I23 and the pressure head connecting sleeve 7, and the detachable N-type shielding frame 20 is fixedly connected with the supporting plate 16 through an inner hexagonal socket head cap screw; the pressure head 22 is connected with the pressure head connecting sleeve 7 through threads, so that the loading of the pressing load is realized; when the voice coil motor is used for macroscopic displacement loading, the detachable N-type shielding frame 20 connected with the supporting plate 16 is pressed through the nut I23, the pressure head connecting sleeve 7 is isolated from the small-range force sensor 8, meanwhile, the detachable sensor shielding cover 4 isolating the large-range force sensor 5 is removed, the sample support 6 is directly connected with the large-range force sensor 5 through the two nuts II 24, and the precise measurement of the pressing load under macroscopic displacement loading is performed; when the piezoelectric stack-flexible hinge micro-displacement loading is utilized, the detachable N-type shielding frame 20 is detached, the detachable N-type shielding frame is directly connected with the small-range force sensor 8 through the nut I23, meanwhile, the detachable sensor shielding cover 4 is installed on the large-range force sensor 5, the sample holder 6 is isolated from the large-range force sensor 5, the sample holder is tightly pressed by the nut II 24, and the precision measurement of the pressing load under the micro-displacement loading is realized.
The displacement detection unit is as follows: the capacitive displacement sensor 9 is connected to the manual displacement platform 12, and the manual displacement platform 12 is fixed on the supporting plate 16 through hexagon socket head cap screws, so that accurate measurement of the depth of penetration in microscopic displacement loading is realized; the grating ruler assembly 18 is respectively fixed on the supporting plate 16 and the base 1 through the grating ruler assembly mounting frame 17, so that the assembly relation adjustment during range switching and the accurate measurement of the pressing depth in macroscopic displacement loading are realized.
The sample moving unit is: the X-direction precise piezoelectric driving platform 2 is connected with the Z-direction precise piezoelectric driving platform 3 through hexagon socket head cap screws and finally connected with the base 1, so that the replacement of the sample pressing-in position and the loading of scratch test load are realized.
The invention has the beneficial effects that:
1. the invention has simple structure and compact layout, realizes hybrid drive based on the voice coil motor and the piezoelectric stack-flexible hinge, can realize conventional nano indentation/scratch test on massive metal materials, film materials, composite materials and the like, can also carry out large-stroke loading test on soft materials such as biological tissues and the like, and has wider application range.
2. The invention adopts a modularized design, is based on a hybrid driving and load detection and range switching unit, combines a displacement detection unit to realize accurate measurement of different loading strokes and indentation loads, integrates a sample moving unit to realize indentation position replacement and scratch test of a sample, and is beneficial to complete machine combined installation, improvement, optimization and maintenance.
3. The invention solves the problem that the advantages of a large-range and high-precision force sensor cannot be achieved by adjusting the assembly relation between the shielding cover (frame) and the force sensor, has the advantages of low technical difficulty and strong anti-interference capability, and reduces the influence of factors such as back clearance, assembly error and the like caused by overlong transmission route on the measurement precision by utilizing a sectional measurement mode.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, illustrate and explain the invention and together with the description serve to explain the invention.
FIG. 1 is an isometric view of a body structure of the present invention;
FIG. 2 is a top view of the wide range load loading state of the present invention;
FIG. 3 is a cross-sectional view of the wide-range load loading state of the present invention;
FIG. 4 is a top view of the invention in a small range load loading state;
fig. 5 is a cross-sectional view of the invention in a small range load loading state.
In the figure: 1. a base; 2. an X-direction precise piezoelectric driving platform; 3. a Z-direction precise piezoelectric driving platform; 4. a detachable sensor shield; 5. a wide range force sensor; 6. a sample holder; 7. a pressure head connecting sleeve; 8. a small range force sensor; 9. a capacitive displacement sensor; 10. a flexible hinge; 11. a piezoelectric stack; 12. a manual displacement platform; 13. an outer ring of the voice coil motor; 14. a motor fixing bracket; 15. a voice coil motor inner ring assembly; 16. a support plate; 17. the grating ruler component mounting rack; 18. a grating ruler assembly; 19. a guide rail slide block assembly; 20. detachable N-type shielding rack; 21. a displacement measuring arm; 22. a pressure head; 23. a nut I; 24. and a nut II.
Detailed Description
The details of the present invention and its specific embodiments are further described below with reference to the accompanying drawings.
Referring to fig. 1 to 5, the double-stroke hybrid driving micro-nano indentation/scratch testing device provided by the invention can realize conventional nano indentation/scratch testing of massive metal materials, film materials, composite materials and the like, and can also perform large-stroke loading testing on soft materials such as biological tissues and the like, so that the practicability is stronger. According to the invention, the voice coil motor and the piezoelectric stack-flexible hinge are utilized to realize hybrid driving, the assembly relation of the shielding cover (frame) and the force sensor is adjusted, a sectional load detection and range switching mode is adopted, the displacement detection unit is combined to realize accurate measurement of different loading strokes and pressing-in loads, and the integrated sample moving unit is used for realizing the replacement of the pressing-in position of a sample and scratch test. The invention adopts a modularized design thought, has simple structure, compact layout, safety and reliability, can realize the conventional nano indentation/scratch test of massive metal materials, film materials, composite materials and the like, can also carry out large-stroke loading test on soft materials such as biological tissues and the like, and has stronger practicability. The device comprises a hybrid driving unit, a load detection and range switching unit, a displacement detection unit, a sample moving unit, a base 1, a supporting plate 16 and a guide rail slide block assembly 19, wherein the hybrid driving unit, the load detection and range switching unit and the displacement detection unit are connected with the guide rail slide block assembly 19 through the supporting plate 16, are fixed on the base 1 and ensure the coaxiality requirement of a loading axis and a load detection axis; the sample moving unit is fixedly connected to the base 1 through a hexagon socket cap screw, so that precise micro-motion of the sample in a X, Y plane can be realized, and the requirement of precision of the mounting surface of the sample perpendicular to the pressing-in direction is ensured.
The hybrid driving unit consists of a flexible hinge 10, a piezoelectric stack 11, a voice coil motor inner ring assembly 15, a voice coil motor outer ring 13 and a motor fixing bracket 14; the mixed loading in the pressing-in direction is realized through a voice coil motor and a piezoelectric stack-flexible hinge, wherein an inner ring assembly 15 of the voice coil motor is connected with a supporting plate 16 through an output end thread, an outer ring 13 of the voice coil motor is connected with a motor fixing bracket 14 fixedly connected to the supporting plate 16, and the macroscopic displacement loading and contact judgment in the pressing-in direction are realized; the piezoelectric stack 11 is placed on the flexible hinge 10 connected with the supporting plate 16, wherein the output end of the flexible hinge 10 is directly connected with the load detection and range switching unit through threads, and micro displacement loading in the pressing-in direction is realized.
The load detection and range switching unit is as follows: the device consists of a pressure head 22, a pressure head connecting sleeve 7, a displacement measuring arm 21, a nut I23, a detachable N-type shielding frame 20, a small-range force sensor 8, a sample holder 6, a nut II 24, a detachable sensor shielding cover 4 and a large-range force sensor 5; by adjusting the assembly relation between the sensor shielding cover and the shielding frame and the force sensor and combining the locking position of the adjusting nut, the pressure transmission route is changed, thereby realizing the accurate measurement of the pressing force under different loading modes,
the sample support 6 is connected with the connecting rod through threads, the nut II 24 presses the detachable sensor shielding cover 4, and two ends of the wide-range force sensor 5 are respectively connected with the connecting rod and the sample moving unit through threads; the two ends of the small-range force sensor 8 are respectively connected with a connecting shaft and a flexible hinge 10 through threads, a detachable N-type shielding frame 20, a nut I23 and a pressure head connecting sleeve 7 are connected with the connecting shaft through threads, wherein the displacement measuring arm 21 is pressed by the nut I23 and the pressure head connecting sleeve 7, and the detachable N-type shielding frame 20 is fixedly connected with the supporting plate 16 through an inner hexagonal socket head cap screw; the pressure head 22 is connected with the pressure head connecting sleeve 7 through threads, so that the loading of the pressing load is realized; when the voice coil motor is used for macroscopic displacement loading, the detachable N-type shielding frame 20 connected with the supporting plate 16 is pressed through the nut I23, so that the pressure head connecting sleeve 7 is isolated from the small-range force sensor 8, meanwhile, the detachable sensor shielding cover 4 isolating the large-range force sensor 5 is removed, and the sample support 6 is directly connected with the large-range force sensor 5 through the two nuts II 24 and is used for precisely measuring the pressing load under macroscopic displacement loading; when the piezoelectric stack-flexible hinge micro-displacement loading is utilized, the detachable N-type shielding frame 20 is detached, the detachable N-type shielding frame is directly connected with the small-range force sensor 8 through the nut I23, meanwhile, the detachable sensor shielding cover 4 is installed on the large-range force sensor 5, the sample holder 6 is isolated from the large-range force sensor 5, and the sample holder is pressed by the nut II 24 and is used for precisely measuring the pressing-in load under the micro-displacement loading.
The displacement detection unit is as follows: the device consists of a capacitance displacement sensor 9, a manual displacement platform 12, a grating ruler assembly mounting frame 17 and a grating ruler assembly 18; the capacitive displacement sensor 9 is connected to the manual displacement platform 12 through a mounting frame, and the manual displacement platform 12 is fixed on the support plate 16 through hexagon socket head cap screws and is used for accurately measuring the depth of press-in microscopic displacement loading; the grating ruler assembly 18 is respectively fixed on the supporting plate 16 and the base 1 through the grating ruler assembly mounting frame 17 and is used for realizing assembly relation adjustment during range switching and accurate measurement of the pressing depth in macroscopic displacement loading.
The sample moving unit consists of an X-direction precise piezoelectric driving platform 2 and a Z-direction precise piezoelectric driving platform 3; the X-direction precise piezoelectric driving platform 2 is connected with the Z-direction precise piezoelectric driving platform 3 through hexagon socket head cap screws and is finally connected with the base 1, and the X-direction precise piezoelectric driving platform is used for realizing sample press-in position replacement and scratch test load loading.
Referring to fig. 2 and 3, in the process of the large-stroke loading test, the detachable sensor shielding cover 4 on the outer layer of the large-range force sensor 5 is detached firstly, then two nuts ii 24 are pressed against the large-range force sensor 5, and the top surface of the nut ii 24 is contacted with the sample holder 6, so that the purpose of preventing looseness is achieved. And simultaneously, the positions of two rows of strip holes on the detachable N-type shielding frame 20 are adjusted, and the two rows of strip holes are fixed on the supporting plate 16 by using four hexagon socket head cap screws, so that the two rows of strip holes are not contacted with the end part of the small-range force sensor 8.
After the operation, the working state is entered, the load transmission route is led out from the output end of the voice coil motor inner ring assembly 15, and then is transmitted to the pressure head connecting sleeve 7 through the supporting plate 16 and the detachable N-type shielding frame 20, and the pressure head 22 is utilized to apply Y-direction pressing load to the sample adhered on the sample support 6 directly connected with the wide-range force sensor 5. At this time, the wide-range force sensor 5 is in a working state to measure the press-in load, the small-range force sensor 8 is in a shielding state, and the press-in depth is measured through the grating ruler assembly 18, so that a large-stroke micron indentation/scratch test experiment is realized.
Referring to fig. 4 and 5, in the small stroke loading test process, the detachable N-type shielding frame 20 at the end of the small range force sensor 8 is detached first, and then one nut i 23 is pressed against the small range force sensor 8, and the other nut i is pressed against the displacement measuring arm 21. Meanwhile, the detachable sensor shielding cover 4 is arranged on the outer layer of the wide-range force sensor 5, is tightly pressed by the nut II 24, and ensures that the top surface of the nut II 24 is kept in contact with the sample holder 6.
After the operation, the working state is entered, the load transmission route is that the piezoelectric stack 11 fixed on the supporting plate 16 is amplified and led out through the flexible hinge 10, then the load is transmitted to the pressure head connecting sleeve 7 through the threaded connecting rod, and the pressure head 22 is used for applying Y-direction pressing load to the sample adhered on the sample support 6 arranged outside the detachable sensor shielding cover 4. At this time, the wide-range force sensor 5 is in a shielding state, the small-range force sensor 8 is in a working state to measure the pressing-in load, and the pressing-in depth is measured by the capacitance displacement sensor 9 arranged on the manual displacement platform 12, so that a small-stroke nano indentation/scratch test is realized.
The above description is only a preferred example of the present invention and is not intended to limit the present invention, but various modifications and variations can be made to the present invention by those skilled in the art. Any modification, equivalent replacement, improvement, etc. of the present invention should be included in the protection scope of the present invention.
Claims (4)
1. The utility model provides a two stroke hybrid drive micro-nano indentation/scratch testing arrangement, includes hybrid drive unit, load detection and range switching unit, displacement detection unit, sample mobile unit, base (1), backup pad (16) and guide rail slider subassembly (19), its characterized in that: the hybrid driving unit, the load detection and range switching unit and the displacement detection unit are connected with the guide rail sliding block assembly (19) through the supporting plate (16), are fixed on the base (1) and ensure that the loading axis and the load detection axis are coaxial; the sample moving unit is fixedly connected to the base (1) through a hexagon socket cap screw, so that precise micro-motion of the sample in a X, Y plane is realized, and the mounting surface of the sample moving unit is vertical to the pressing-in direction;
the load detection and range switching unit is used for changing a pressure transmission route by adjusting the assembly relation between the sensor shielding cover and the shielding frame and the force sensor and combining with the adjustment of the locking position of the nut, so as to realize accurate measurement of the pressing force under different loading modes, and the structure is as follows: the sample support (6) is connected with the connecting rod through threads, the nut II (24) compresses the detachable sensor shielding cover (4), and two ends of the wide-range force sensor (5) are respectively connected with the connecting rod and the sample moving unit through threads; the two ends of the small-range force sensor (8) are respectively connected with the connecting shaft and the flexible hinge (10) through threads, the detachable N-type shielding frame (20), the nut I (23) and the pressure head connecting sleeve (7) are connected with the connecting shaft through threads, the displacement measuring arm (21) is pressed by the nut I (23) and the pressure head connecting sleeve (7), and the detachable N-type shielding frame (20) is fixedly connected with the supporting plate (16) through an inner hexagonal cylindrical head screw; the pressure head (22) is connected with the pressure head connecting sleeve (7) through threads, so that the loading of the pressing-in load is realized; when the voice coil motor is used for macroscopic displacement loading, a detachable N-type shielding frame (20) connected with a supporting plate (16) is pressed through a nut I (23), a pressure head connecting sleeve (7) is isolated from a small-range force sensor (8), a detachable sensor shielding cover (4) isolating a large-range force sensor (5) is removed, a sample support (6) is directly connected with the large-range force sensor (5) through two nuts II (24), and the precise measurement of the pressing load under macroscopic displacement loading is performed; when the piezoelectric stack-flexible hinge micro-displacement loading is utilized, the detachable N-type shielding frame (20) is detached, the detachable N-type shielding frame is directly connected with the small-range force sensor (8) through the nut I (23), meanwhile, the detachable sensor shielding cover (4) is installed on the large-range force sensor (5), the sample support (6) is isolated from the large-range force sensor (5), the nut II (24) is used for pressing, and the precision measurement of the pressing load under the micro-displacement loading is realized.
2. The dual-stroke hybrid drive micro-nano indentation/scratch testing device as recited in claim 1 wherein: the hybrid driving unit realizes the hybrid loading in the pressing-in direction through a voice coil motor and a piezoelectric stack-flexible hinge, and has the structure that: the voice coil motor inner ring assembly (15) is connected with the supporting plate (16) through an output end thread, and the voice coil motor outer ring (13) is connected with the motor fixing bracket (14) fixedly connected to the supporting plate (16) to realize macroscopic displacement loading in the pressing-in direction; the piezoelectric stack (11) is arranged on a flexible hinge (10) connected with the supporting plate (16), and the output end of the flexible hinge (10) is directly connected with the load detection and range switching unit through threads, so that micro displacement loading in the pressing-in direction is realized.
3. The dual-stroke hybrid drive micro-nano indentation/scratch testing device as recited in claim 1 wherein: the displacement detection unit is as follows: the capacitive displacement sensor (9) is connected to the manual displacement platform (12), and the manual displacement platform (12) is fixed on the supporting plate (16) through a hexagon socket head cap screw, so that accurate measurement of the depth of the pressed micro-displacement is realized; the grating ruler assembly (18) is respectively fixed on the supporting plate (16) and the base (1) through the grating ruler assembly mounting frame (17), so that the adjustment of assembly relation during range switching and the accurate measurement of the pressing depth in macroscopic displacement loading are realized.
4. The dual-stroke hybrid drive micro-nano indentation/scratch testing device as recited in claim 1 wherein: the sample moving unit is: the X-direction precise piezoelectric driving platform (2) is connected with the Z-direction precise piezoelectric driving platform (3) through hexagon socket head cap screws and is finally connected with the base (1), so that the replacement of the sample pressing-in position and the scratch test load loading are realized.
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| CN113790988A (en) * | 2021-10-20 | 2021-12-14 | 天津大学 | Macro-micro coupling trochoid micro-nano scratch experiment machine based on flexible mechanism |
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