CN109358001A - Fixation device, measuring system and the measurement method of flexible sample based on terahertz light spectrometer - Google Patents

Fixation device, measuring system and the measurement method of flexible sample based on terahertz light spectrometer Download PDF

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Publication number
CN109358001A
CN109358001A CN201811251434.3A CN201811251434A CN109358001A CN 109358001 A CN109358001 A CN 109358001A CN 201811251434 A CN201811251434 A CN 201811251434A CN 109358001 A CN109358001 A CN 109358001A
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China
Prior art keywords
fixing clamp
sample
tested
terahertz
clamp
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CN201811251434.3A
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CN109358001B (en
Inventor
付亚州
王长
谭智勇
曹俊诚
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Shanghai Institute of Microsystem and Information Technology of CAS
University of Chinese Academy of Sciences
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Shanghai Institute of Microsystem and Information Technology of CAS
University of Chinese Academy of Sciences
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • G01N2021/0106General arrangement of respective parts
    • G01N2021/0112Apparatus in one mechanical, optical or electronic block

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

The invention discloses a kind of fixation devices of flexible sample based on terahertz light spectrometer, the fixation device includes: the first clamp assembly and the second clamp assembly, wherein the first clamp assembly includes at least the first fixing clamp, second clamp assembly includes at least the second fixing clamp, first fixing clamp and the second fixing clamp are arranged to: clamping the first end and second end of sample to be tested respectively, first fixing clamp and the second fixing clamp move on first level direction, to be bent the sample to be tested.Furthermore, the invention also discloses a kind of measuring system and a kind of measurement method including terahertz time-domain spectroscopy instrument and above-mentioned fixed device, measurement method is measured using measuring system, comprising steps of sample to be tested is gripped using fixed device, and adjust sample to be tested curvature as needed;Terahertz signal is issued using the transmitting terminal of terahertz time-domain spectroscopy instrument, the terahertz signal for penetrating sample to be tested is received using the receiving end of terahertz time-domain spectroscopy instrument, and analyzed.

Description

Fixation device, measuring system and the survey of flexible sample based on terahertz light spectrometer Amount method
Technical field
The present invention relates to Terahertz applied technical field, it is related to a kind of measuring using terahertz time-domain spectroscopic technology Device, system and method.
Background technique
Terahertz (Terahertz, abbreviation THz) spectral technique is one of most important application direction, electromagnetism in THz technology Spectroscopic technique is the important tool in the human knowledge world, extends the mankind to the observation ability in the world, can by spectral technique With properties such as the vibration and the rotations that understand material molecule, the structural information of substance can also be understood, to human knowledge's microcosmos With huge effect, therefore, THz technology is considered as changing one of the ten big technologies of future world.
Terahertz time-domain spectroscopy (THz-TDS) technology is the Typical Representative of terahertz light spectral technology, is a kind of highly effective Detecting light spectrum technology.Time-domain spectroscopic technology signal-to-noise ratio between 0.2~3THz is up to 80dB, and measurement stability is fine.It is logical Can effectively some substances be characterized by crossing THz-TDS technology, be played an important role for identifying some substances.This Outside, carrying out test by THz-TDS technology may be implemented non-destructive testing, test sample without contacting sample, do not have other because Impacting for element, will not damage sample.Test sample is carried out by THz-TDS technology, can easily obtain material The information such as the amplitude of material and phase can from which further follow that the information such as absorptivity, refractive index by Fourier transformation, these parameters The characterization and identification of sample are played an important role.In some conductors, THz radiation can reflect the information of carrier, Its transient response can be tested.In addition, THz-TDS technology also has wide bandwidth, high sensitivity, measuring speed fast and can be Under room temperature the characteristics of steady operation.
However, THz-TDS test macro in the prior art can only test the transmission spectrum or reflectance spectrum of smooth sample, for Flexible sample test is relatively difficult to achieve, especially some adjustable samples of the rate of curving, for example, some carbon fiber films, based on micro- In bending, some changes will occur the Meta Materials sample of structure for internal structure, and use THz-TDS test macro nothing Method realizes the test to this kind of sample.
Based on this, it is expected that obtaining a kind of device based on terahertz light spectrometer, can be used for carrying out flexible sample Test, obtained test result are ideal.
Summary of the invention
One of the objects of the present invention is to provide a kind of fixation devices of flexible sample based on terahertz light spectrometer, should Fixed device is fixed by the first fixing clamp and the fixed sample to be tested of the second fixing clamp by changing the first fixing clamp and second The grip force size of folder, to change the bending degree of sample to be tested.In addition, the fixation device can freely be conveniently adjusted it is to be measured Terahertz has been expanded to realize to the time domain spectroscopy measurement of sample to be tested different location in the relative position of sample in space The measurable sample type of time-domain spectroscopy instrument, improves the flexibility of measurement.
According to foregoing invention purpose, the invention proposes a kind of fixed dresses of flexible sample based on terahertz light spectrometer It sets, the fixed device includes: the first clamp assembly and the second clamp assembly, is consolidated wherein the first clamp assembly includes at least first Clamp, the second clamp assembly include at least the second fixing clamp, and first fixing clamp and the second fixing clamp are arranged to: pressing from both sides respectively The first end and second end of sample to be tested is held, first fixing clamp and the second fixing clamp can move up in first level direction It is dynamic, to be bent the sample to be tested.
When sample to be tested needs to test, the of sample to be tested is clamped by first fixing clamp of this case and the second fixing clamp One end and second end, to fix sample to be tested.Then, through the first fixing clamp and the second fixing clamp on first level direction It is mobile, to be bent sample to be tested, controlled by the change in displacement to the relative position between the first fixing clamp and the second fixing clamp The bending degree of sample to be tested.Transmitted spectrum survey is finally carried out on terahertz time-domain spectroscopy instrument to flexible sample to be tested Amount.
Further, described in the fixation device of the flexible sample of the present invention based on terahertz light spectrometer First fixing clamp and/or the second fixing clamp are arranged to: can move in the second horizontal direction, and/or can be perpendicular Histogram moves up;Second horizontal direction is perpendicular to first level direction.
In above scheme, the first fixing clamp and the second fixing clamp can first level direction, the second horizontal direction and/or It is moved on vertical direction, so that relative position variation of the sample to be tested in space on any direction is realized, to greatly increase The measurable range of sample to be tested is conducive to the limitation for breaking through test scope.
Further, described in the fixation device of the flexible sample of the present invention based on terahertz light spectrometer First clamp assembly further includes first movement platform, and the first movement platform is configured to move up in first level direction It is dynamic, to drive the first fixing clamp to move on first level direction;Second clamp assembly further includes the second mobile platform, institute It states the second mobile platform to be configured to move on first level direction, to drive the second fixing clamp in first level direction Upper movement.
Further, described in the fixation device of the flexible sample of the present invention based on terahertz light spectrometer First clamp assembly further includes third mobile platform, and the third mobile platform is configured to move up in the second horizontal direction It is dynamic, to drive the first fixing clamp to move in the second horizontal direction;Second clamp assembly further includes the 4th mobile platform, institute It states the 4th mobile platform to be configured to move in the second horizontal direction, to drive the second fixing clamp in the second horizontal direction Upper movement;And/or
First fixing end of first fixing clamp is connect with the first fixed link, and the first fixed link setting is moved first On moving platform;Second fixing end of second fixing clamp is connect with the second fixed link, and second fixed link is arranged second On mobile platform.
Further, described in the fixation device of the flexible sample of the present invention based on terahertz light spectrometer First movement platform and/or the second mobile platform are equipped with screw structure.
In above scheme, by the rotation to screw structure, its rotary motion is changed into the linear motion of rod piece, thus Drive the movement of first movement platform and/or the second mobile platform on first level direction.Since screw structure can be more Precisely adjust moving distance.
Further, in the fixation device of the flexible sample of the present invention based on terahertz light spectrometer, third Mobile platform and/or the 4th mobile platform are equipped with screw structure.
In above scheme, by the rotation to screw structure, its rotary motion is changed into the linear motion of rod piece, thus Drive the movement of third mobile platform and/or the 4th mobile platform in the second horizontal direction.Since screw structure can be more Precisely adjust moving distance.
Further, described in the fixation device of the flexible sample of the present invention based on terahertz light spectrometer Shift scale is respectively equipped on first clamp assembly and the second clamp assembly.
In order to obtain more accurate test result, and it is apparent to the curvature of sample to be tested, of the present invention Fixation device in, on the first clamp assembly and the second clamp assembly be equipped with shift scale, in order to understand the first fixing clamp Change with the shift length of the second fixing clamp.
Further, described in the fixation device of the flexible sample of the present invention based on terahertz light spectrometer The clamping end of first fixing clamp is equipped with U-type groove and/or second fixing clamp for accommodating the first end of sample to be tested Clamping end be equipped with U-type groove for accommodating the second end of sample to be tested.
Correspondingly, another object of the present invention is to provide a kind of measurements of flexible sample based on terahertz light spectrometer System, the measuring system can be by the fixed samples to be tested of fixed device, by changing the grip force size of fixed device, to change Become the bending degree of sample to be tested, to increase the measurement range of measuring system.In addition, the measuring system freely can be adjusted easily The relative position of sample to be tested in space is saved, to realize the time domain spectroscopy measurement to sample to be tested different location, is expanded The measurable sample type of terahertz time-domain spectroscopy instrument, improves the flexibility of measurement.
According to foregoing invention purpose, the invention proposes a kind of measurement systems of flexible sample based on terahertz light spectrometer System comprising terahertz time-domain spectroscopy instrument and above-mentioned fixation device.
In measuring system of the present invention, sample to be tested is gripped by fixed device, and be bent to it, Transmitted spectrum measurement then is carried out by terahertz time-domain spectroscopy instrument to curved sample to be tested, it is final to realize to flexible sample The implementation result measured.
In addition, another object of the present invention is to provide a kind of measurement side of flexible sample based on terahertz light spectrometer Method can be bent sample to be tested by fixed device, followed by terahertz time-domain spectroscopy instrument by the measurement method Transmitted spectrum measurement is carried out to curved sample to be tested.
According to foregoing invention purpose, the invention proposes a kind of measurement sides of flexible sample based on terahertz light spectrometer Method uses above-mentioned measuring system to measure, comprising steps of
Sample to be tested is gripped using the fixed device, and adjusts the curvature of sample to be tested as needed;
Terahertz signal is issued using the transmitting terminal of terahertz time-domain spectroscopy instrument, using the reception of terahertz time-domain spectroscopy instrument End receives the terahertz signal for penetrating sample to be tested, and is analyzed.
The fixation device of flexible sample of the present invention based on terahertz light spectrometer compared to existing technologies, It has the following advantages and beneficial effects:
(1) fixed device of the present invention overcomes the deficiencies in the prior art, can to flexible sample to be tested into Row test, and it can be freely conveniently adjusted relative position of the sample to be tested in space, so that the bending degree of sample is controlled, Substantially increase the measurable range of sample to be tested.
(2) fixed device of the present invention breaches flexible sample significantly and is difficult to survey on terahertz time-domain spectroscopy instrument The limitation of examination provides reliable measuring device and method to measure the spectrum of flexible sample, to terahertz light spectral technology Development has great importance.
In addition, the measuring system of the flexible sample of the present invention based on terahertz light spectrometer is due to by above-mentioned Clamping is fixed to sample to be tested in fixed device, thus, it equally include the above advantages and beneficial effects.
In addition, the measurement method of the flexible sample of the present invention based on terahertz light spectrometer is due to using above-mentioned Measuring system measures, thus, it similarly include above advantages and beneficial effect.
Detailed description of the invention
Fig. 1 is the measuring system of the flexible sample of the present invention based on terahertz light spectrometer in a kind of embodiment Under structural schematic diagram.
Fig. 2 schematically shows that the measuring system of the flexible sample of the present invention based on terahertz light spectrometer exists The time signal curve of sample to be tested obtained under different conditions when being tested under a kind of embodiment.
Fig. 3 schematically shows that the measuring system of the flexible sample of the present invention based on terahertz light spectrometer exists The frequency-region signal curve of sample to be tested obtained under different conditions when being tested under a kind of embodiment.
Specific embodiment
Below will according to a particular embodiment of the invention and Figure of description to it is of the present invention be based on tera-hertz spectra Fixation device, measuring system and the measurement method of the flexible sample of instrument are further described, but the explanation is not constituted Inappropriate limitation of the present invention.
Fig. 1 is the measuring system of the flexible sample of the present invention based on terahertz light spectrometer in a kind of embodiment Under structural schematic diagram.
As shown in Figure 1, in this embodiment, the measuring system 1 of the flexible sample based on terahertz light spectrometer includes Terahertz time-domain spectroscopy instrument and fixed device.Wherein, terahertz time-domain spectroscopy instrument can be using MenloSystems company TERA K15, may include femto-second laser 31, transmitting antenna 32, the first Terahertz lens 33, the second Terahertz lens 34, Third Terahertz lens 35, the 4th Terahertz lens 36, receiving antenna 37 and processor 38.It should be noted that Terahertz Time-domain spectroscopy instrument is device known in the art, and those skilled in the art know its specific structure, thus, herein no longer It repeats.
With further reference to Fig. 1 as can be seen that fixed device includes the first clamp assembly 21 and the second clamp assembly 22.
Wherein, the first clamp assembly 21 includes the first fixing clamp 211, can be equipped in the clamping end of the first fixing clamp 211 For accommodating the first U-type groove 2110 of the first end of sample to be tested 4, and the other end in the first fixing clamp 211 at non-clamping end It is connect with the first fixed link 212, the first fixed link 212 is arranged on first movement platform 213, and third mobile platform 214 is arranged In the lower section of first movement platform 213 in the vertical direction.
In the present embodiment, the first fixing clamp 211 can by the first fixed link 212 vertical direction mobile adjusting The relative space position of first fixing clamp 211 in the vertical direction, and first by being set on third mobile platform 214 Locking nut 215 fixes the position after its adjusting.
It certainly, in some other embodiments, can also be mobile by adjusting first movement platform 213 and third The distance of platform 214 in the vertical direction so as to adjust the first fixing clamp 211 vertical direction relative space position.
In addition, the first fixing clamp 211 passes through the first screw rod 2130 and third movement on first movement platform 213 respectively Third screw rod 2140 on platform 214 adjusts its movement on first level direction and the second horizontal direction.It needs to illustrate , the second horizontal direction is perpendicular to first level direction.
Correspondingly, the second clamp assembly 22 includes the second fixing clamp 221, can be set in the clamping end of the second fixing clamp 221 There is the second U-type groove 2210 of the second end for accommodating sample to be tested 4, and in the second fixing clamp 221 in the another of non-clamping end End is connect with the second fixed link 222, and the second fixed link 222 is arranged on the second mobile platform 223, and the 4th mobile platform 224 is set Set the lower section in the vertical direction in the second mobile platform 223.
In the present embodiment, the second fixing clamp 221 can by the second fixed link 222 vertical direction mobile adjusting The relative space position of second fixing clamp 221 in the vertical direction, and second by being set on the 4th mobile platform 224 Locking nut 225 fixes the position after its adjusting.
It certainly, in some other embodiments, can also be mobile by adjusting the second mobile platform 223 and the 4th The distance of platform 224 in the vertical direction so as to adjust the second fixing clamp 221 vertical direction relative space position.
In addition, the second fixing clamp 221 is mobile by the second screw rod 2230 and the 4th on the second mobile platform 223 respectively The 4th screw rod 2240 on platform 224 adjusts its movement on first level direction and the second horizontal direction.
It should be noted that in order to be easier to understand the moving distance of the first fixing clamp 211 and the second fixing clamp 221, To obtain the curvature of sample to be tested 4, displacement can be respectively set on the first fixing clamp 211 and the second fixing clamp 221 Scale.
In present embodiment, sample to be tested 4 uses the Meta Materials based on micro-structure, and shape is the pros of 2cm × 2cm Shape, with a thickness of 200 μm, metamaterial structure is the metal micro structure with a thickness of 200nm.Certainly, those skilled in the art can To select sample to be tested according to the concrete condition of embodiment, herein and it is not specially limited.
When test, sample to be tested 4 is gripped by the fixation device of measuring system 1, and adjusts as needed to be measured The curvature of sample 4, curvature can be between 50~60 degree.The bending of adjustment sample to be tested 4 can pass through the first fixed link 212 and second fixed link 222 adjust the spatial position in the vertical direction of sample to be tested 4.In addition, in certain embodiments In, sample to be tested 4 can also be adjusted on first level direction by first movement platform 213 and the second mobile platform 223 Spatial position, and/or sample to be tested 4 can be adjusted by third mobile platform 214 and the 4th mobile platform 224 and existed Spatial position in second horizontal direction.
Terahertz signal is issued using the transmitting antenna 32 of terahertz time-domain spectroscopy instrument, using terahertz time-domain spectroscopy instrument Receiving antenna 37 receives the terahertz signal for penetrating sample to be tested 4, and is analyzed.
It is as shown in Figures 2 and 3 to analyze result.
Fig. 2 schematically shows that the measuring system of the flexible sample of the present invention based on terahertz light spectrometer exists The time signal curve of sample to be tested obtained under different conditions when being tested under a kind of embodiment.
As shown in Fig. 2, curve I indicates Terahertz time signal of the sample to be tested 4 under unbent condition, curve II is indicated The Terahertz time signal of sample to be tested in the bent state.
Fig. 3 schematically shows that the measuring system of the flexible sample of the present invention based on terahertz light spectrometer exists The frequency-region signal curve of sample to be tested obtained under different conditions when being tested under a kind of embodiment.
As shown in figure 3, curve III indicates Terahertz frequency-region signal of the sample to be tested 4 under unbent condition, curve IV table Show the Terahertz frequency-region signal of sample to be tested in the bent state.
It can be seen that sample to be tested 4 in conjunction with Fig. 2 and Fig. 3 to have occurred under unbent condition and bending state significantly Change, illustrate that its internal molecular structure is changed, and hair can be measured by the measuring system 1 in present embodiment The Terahertz spectrum signal of raw curved sample to be tested 4, and the sample to be tested of differently curved rate can be measured, thus greatly Terahertz time-domain spectroscopic technology is increased to the measurement range of measurement of species greatly.
It should be noted that prior art part is not limited to given by present specification in protection scope of the present invention Embodiment, all prior arts not contradicted with the solution of the present invention, including but not limited to first patent document, formerly Public publication, formerly openly use etc., it can all be included in protection scope of the present invention.
In addition, in this case in the combination of each technical characteristic and unlimited this case claim documented combination or It is combination documented by specific embodiment, all technical characteristics that this case is recorded can be freely combined in any way Or combine, unless generating contradiction between each other.
It is also to be noted that embodiment enumerated above is only specific embodiments of the present invention.The obvious present invention is not Above embodiments are confined to, the similar variation or deformation made therewith are that those skilled in the art can be from present disclosure It immediately arrives at or is easy to just to associate, be within the scope of protection of the invention.

Claims (10)

1. a kind of fixation device of the flexible sample based on terahertz light spectrometer, which is characterized in that the fixed device includes: First clamp assembly and the second clamp assembly, wherein the first clamp assembly includes at least the first fixing clamp, the second clamp assembly is extremely Less include the second fixing clamp, first fixing clamp and the second fixing clamp are arranged to: clamping the first end of sample to be tested respectively And second end, first fixing clamp and the second fixing clamp can move on first level direction, it is described to test sample to be bent Product.
2. the fixation device of the flexible sample based on terahertz light spectrometer as described in claim 1, which is characterized in that described First fixing clamp and/or the second fixing clamp are arranged to: can move in the second horizontal direction, and/or can be perpendicular Histogram moves up;Second horizontal direction is perpendicular to first level direction.
3. the fixation device of the flexible sample based on terahertz light spectrometer as described in claim 1, it is characterised in that: described First clamp assembly further includes first movement platform, and the first movement platform is configured to move up in first level direction It is dynamic, to drive the first fixing clamp to move on first level direction;Second clamp assembly further includes the second mobile platform, institute It states the second mobile platform to be configured to move on first level direction, to drive the second fixing clamp in first level direction Upper movement.
4. the fixation device of the flexible sample based on terahertz light spectrometer as claimed in claim 2, it is characterised in that:
First clamp assembly further includes third mobile platform, and the third mobile platform is configured in the second level It is moved on direction, to drive the first fixing clamp to move in the second horizontal direction;Second clamp assembly further includes the 4th shifting Moving platform, the 4th mobile platform are configured to move in the second horizontal direction, to drive the second fixing clamp the It is moved in two horizontal directions;And/or
First fixing end of first fixing clamp is connect with the first fixed link, and the first fixed link setting is flat in first movement On platform;Second fixing end of second fixing clamp is connect with the second fixed link, and the second fixed link setting is mobile second On platform.
5. the fixation device of the flexible sample based on terahertz light spectrometer as claimed in claim 3, which is characterized in that described First movement platform and/or the second mobile platform are equipped with screw structure.
6. the fixation device of the flexible sample based on terahertz light spectrometer as claimed in claim 4, which is characterized in that third Mobile platform and/or the 4th mobile platform are equipped with screw structure.
7. the fixation device of the flexible sample based on terahertz light spectrometer as described in claim 1, which is characterized in that described Shift scale is respectively equipped on first clamp assembly and the second clamp assembly.
8. the fixation device of the flexible sample based on terahertz light spectrometer as described in claim 1, which is characterized in that described The clamping end of first fixing clamp is equipped with U-type groove and/or second fixing clamp for accommodating the first end of sample to be tested Clamping end be equipped with U-type groove for accommodating the second end of sample to be tested.
9. a kind of measuring system of the flexible sample based on terahertz light spectrometer comprising terahertz time-domain spectroscopy instrument and such as power Benefit requires fixation device described in any one of 1-8.
10. a kind of measurement method of the flexible sample based on terahertz light spectrometer, uses measurement as claimed in claim 9 System measures, comprising steps of
Sample to be tested is gripped using the fixed device, and adjusts the curvature of sample to be tested as needed;
Terahertz signal is issued using the transmitting terminal of terahertz time-domain spectroscopy instrument, is terminated using the reception of terahertz time-domain spectroscopy instrument The terahertz signal for penetrating sample to be tested is received, and is analyzed.
CN201811251434.3A 2018-10-25 2018-10-25 Fixing device, measuring system and measuring method for bendable sample Active CN109358001B (en)

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