CN109238848A - ESEM in-situ mechanical test platform - Google Patents
ESEM in-situ mechanical test platform Download PDFInfo
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- CN109238848A CN109238848A CN201811062015.5A CN201811062015A CN109238848A CN 109238848 A CN109238848 A CN 109238848A CN 201811062015 A CN201811062015 A CN 201811062015A CN 109238848 A CN109238848 A CN 109238848A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/08—Investigating strength properties of solid materials by application of mechanical stress by applying steady tensile or compressive forces
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Abstract
The invention discloses a kind of ESEM in-situ mechanical test platforms, including drawing stand, drawing stand is equipped with Two axle drive ball-screw, every axis driving ball-screw is respectively equipped with stepper motor, Two axle drive ball-screw is equipped with force snesor, displacement sensor and stretches pressing plate, and Two axle drive ball-screw and two stepper motors are symmetrical, rotate synchronously.The nut engaged with ball-screw reversely screws in, and displacement sensor is rod-pulling type displacement sensor.Force snesor installation, which is designed as, using Two axle drive ball-screw provides space；Nut reversely screws in the installation space for increasing fixture, reduces the size of width direction, while also increasing the effective travel of Compression and Expansion；It is symmetrical using double stepper motors, space, rod-pulling type displacement sensor are provided for displacement sensor installation, while also ensuring measured size line on standard size line and its extended line.
Description
Technical field
The present invention relates to a kind of test platform more particularly to a kind of ESEM (Environment Scanning Electron
Microscope, environmental scanning electron microscope) in-situ mechanical test platform.
Background technique
ESEM combination in-situ mechanical test platform can carry out specimen surface specific region real-time under loading
Macroscopical, thin sight even macro-mechanical property of microstructure and material of material is carried out dynamic observation and analysis, is material by observation
Expect that mechanical property research provides irreplaceable research tool.In-situ mechanical test platform is mainly controlled by drawing stand, drawing stand
Case, control software three parts composition, software and hardware combining may be implemented: the load and stretching of drawing stand, movement speed control, power with
The functions such as displacement signal is handled and image is shown.
In order to better conform to the demand of material in situ observation, there are a plurality of in-situ mechanical test platforms in the prior art, disclosure
Document relates generally to mechanical part, matched drive module and control system, and relevant paper, patent are concentrated mainly on mechanical knot
In terms of structure, including power source, sensor etc..
The power source of mechanical part is broadly divided into three categories: shape caused by motor drive, thermal expansion and memorial alloy phase transformation
Shape variation.Wherein direct current generator is most widely used as power source.Transmission process is essentially the rotation of motor, passes through deceleration
The gear deceleration, passes to double end left-right turning screw rod, and nut drives the relative motion of lead screw connector, the clamp strap on lead screw connector
Dynamic sample relative motion simultaneously loads.
The design of scheme in the prior art, the selection of sensor and mechanical structure, the efficient and rational operation of drive module,
The human oriented design of control system still have many needs of work go complete with it is perfect.
Summary of the invention
The object of the present invention is to provide a kind of ESEM in-situ mechanical test platforms.
The purpose of the present invention is what is be achieved through the following technical solutions:
ESEM in-situ mechanical test platform of the invention,
Including drawing stand, the drawing stand is equipped with Two axle drive ball-screw, and every axis driving ball-screw is respectively equipped with step
Into motor, nut is engaged on Two axle drive ball-screw, the nut is connect with lead screw connector, the lead screw connector with
Stretching pressing plate, force snesor are connected with displacement sensor, and Two axle drive ball-screw and two stepper motors are symmetrical.
As seen from the above technical solution provided by the invention, ESEM in-situ mechanical test provided in an embodiment of the present invention
Platform uses Two axle drive ball-screw and designs, prevented positioning from eliminating guide rail, while also providing for force snesor installation
Space；It is symmetrical using double stepper motors, space is provided for displacement sensor installation, while also ensuring measured size line
On standard size line and its extended line.Load in situ can be carried out to sample, and deformation length and loaded load is carried out real-time
Measurement, combining environmental scanning electron microscope can dynamically observe germinating, diffusion of material surface pattern and crackle etc..
Detailed description of the invention
Fig. 1 is drawing stand schematic top plan view in the embodiment of the present invention；
Fig. 2 is drawing stand stereoscopic schematic diagram in the embodiment of the present invention；
Fig. 3 is ESEM of embodiment of the present invention in-situ mechanical test platform information flow chart.
In figure:
1. 5. displacement sensor of pedestal 2. stepper motor, 3. retarder, 4. shaft coupling, 6. miniature planar thrust ball bearing
7. lead screw connector of F7-15M, one 8. lead screw 9. stretches 10. chassis of pressing plate, 11. lead screw connector, 2 12. nut, 13. power
14. 15. bottom plate of miniature planar thrust ball bearing F6-14M of sensor, 16. end cap
Specific embodiment
The embodiment of the present invention will be described in further detail below.What is be not described in detail in the embodiment of the present invention is interior
Appearance belongs to the prior art well known to professional and technical personnel in the field.
ESEM in-situ mechanical test platform of the invention, preferable specific embodiment is:
Including drawing stand, the drawing stand is equipped with Two axle drive ball-screw, and every axis driving ball-screw is respectively equipped with step
Into motor, nut is engaged on Two axle drive ball-screw, the nut is connect with lead screw connector, the lead screw connector with
Stretching pressing plate, force snesor are connected with displacement sensor, and Two axle drive ball-screw and two stepper motors are symmetrical.
The ball-screw is double thread lead screw, and the thread rotary orientation at both ends on the contrary, be engaged with respectively on the screw thread at both ends
Nut, two nuts are connected separately with lead screw connector, are respectively fixed with stretching pressing plate on two lead screw connectors.
The inside for stretching pressing plate and being fixed on the lead screw connector, the nut are mounted on the lead screw connector
Outside.
The nut is reversely installed on the ball-screw.
Institute's displacement sensors are rod-pulling type displacement sensor.
Two stepping motor synchronous rotations, synchronous driving use following any control mode:
Same signal parallel connection controls two corresponding stepper motors to two drivers；
One drive belts, two stepper motors.
The step motor control uses PC control single-chip microcontroller, and when single-chip microcontroller first powers on, configuration TMC260 is electric
Machine driving chip underlying parameter, makes it remain DIR/STEP control model, and PC control software configures NI company USB Type
Data collecting card signal output channels provide pulse signal and low and high level signal, and two electric characteristics are protected in drive circuit board
Hold consistent driving chip control bi-motor synchronous operation.
ESEM in-situ mechanical test platform of the invention, may be implemented following function and index:
(1) operation such as stretched, compressed, being sheared, is bent to test specimen；
(2) revolving speed of real-time control motor and steering, handoff procedure is steady, does not impact and idle travel；
(3) loading procedure is stablized, and can adjust loading stress in real time；
(4) it records simultaneously and monitoring loading stress and displacement, makes on material stress-strain curve any point can be with
The corresponding surface topography of the point corresponds；
(5) position precision reaches 0.1 μm, and load precision reaches 0.1N.
One, specific design route:
(1) drawing stand Design of Mechanical Structure
In general, mechanical structure it is reasonable with it is efficient, be system control basis, and high-precision operation guarantee.
Traditional original position stretching platform mechanical structure mostly uses single lead screw transmission, keeps balancing by left and right ends asymmetrical track, intermediate
Due to the blocking of lead screw, needs for fixture to be increased to above lead screw connector, increase vertical direction height, loaded in sample
Cheng Zhong, vertical direction can generate certain bending deformation, produce the error of measurement.
Present invention employs the designs of Two axle drive ball-screw, prevent positioning from eliminating guide rail, while also sensing for power
Device installation provides space；
The present invention is reversely screwed in using nut, is increased the installation space of fixture, is reduced the size of width direction, while
Increase the effective travel of Compression and Expansion." reversed to screw in " is the popular saying in this field, means that ball-screw nut by front end
The screw cap end (the big one end of outer diameter) of D type and the nut end composition of rear end, usually screwing in is that (forward direction rotation is screwed in since screw cap end
Enter), the application is screwed in from rear end nut, so being known as " reversed to screw in ", final effect is to install the nut of ball-screw
In the outside (two sides of inoperative) of lead screw connector；
It is as follows using the positive defect screwed in similar to the scheme of the application in the prior art:
1, interference being generated with drawing stand pressing plate and stretching pressing plate during the work time, (small position can be deformed by stretching pressing plate
Move), it is mutually contradicted with the nut of ball-screw；To avoid interference with, following three kinds of measures can be taken: 1), increasing width (specific increasing
Big width dimensions be a ball-screw nut diameter) 2) sacrifice effective travel make ball nut and stretch pressing plate between
Gap increases 3) and reduces the size for stretching pressing plate, can reduce the intensity for stretching pressing plate in this way, while limiting Compression and Expansion sample
Size, reduce the use scope of workbench；
2, effective travel reduces the width for increasing ball-screw nut；
3, intensity decline part of the force is emptied than more serious.
The present invention is reversely screwed in using nut and overcomes drawbacks described above.
The present invention is symmetrical using double stepper motors, provides space, rod-pulling type displacement sensing for displacement sensor installation
Device, while also ensuring measured size line on standard size line and its extended line.
(2) Biaxial synchronous drives
The synchronous rotation of drawing stand or so lead screw is to be guaranteed by the consistency of electric part, therefore motor cannot
Phenomena such as step, stall, off line, discontinuous operation, is lost in appearance, not so can generate irreversible destruction to mechanical part.Motor driven
Quality directly influence the precision and reliability of whole system.
There are two types of control modes for two stepping motor synchronous drivings, and one is same signal parallel connections to control to two drivers
Two corresponding stepper motors are made, are exactly two stepper motors of a drive belts there are also one kind.About a driver drives
Two stepper motors, the requirement to driver also requires the consistency of stepper motor good with regard to relatively high, therefore is more biased towards in first
Kind mode.
The present invention uses PC control single-chip microcontroller, configures TMC260 motor drive ic underlying parameter, remains it
DIR/STEP control model, PC control software configure NI company USB Type data collecting card signal output channels, provide arteries and veins
Signal and low and high level signal are rushed, the driving chip control bi-motor that two electric characteristics are consistent in drive circuit board is synchronous
Operation.
(3) design in-situ mechanical testing machine controls software, including which module
In the controlling software design stage, it is designed using top-down mode.It must must divide corresponding functional areas
Domain, function is corresponding one by one with module, ensures the independence of each module, at the same be also required to the shared of information between assurance module with
Intermodule hierarchical relationship.
(4) Control panel design
Software needs and user interacts, operator directly facing be exactly control panel, therefore design must for panel
It must guarantee following principle:
1. succinct orderly illustrative words are simple, illustrated with word, be aided with the background of wire frame, different colours；Button, instruction
The layout orders such as lamp, instrument and operation order are related, proper alignment；
2. function division identity function places one piece, operator can find the position of required function key at a glance；
3. state-visibility monitors stress, strain in real time, extreme value is shown；
4. meeting human factor engineering.
Two, the advantages and positive effects of the present invention:
1. structure innovation drawing stand, which prolongs sample axial direction line, keeps symmetrical, left and right ends stress balance, nut is reversely screwed in
Lead screw provides broader installation space for fixture, reduces sample holder height, reasonable mechanical structure.Displacement sensor, power sensing
Device mounting height and operative orientation and sample holder height and loading direction are completely the same, ensure that the theoretic conjunction of measurement result
Rationality and science.
2. it is that the integrally-built sample axial direction line that prolongs keeps symmetrically providing that pair stepping motor synchronous, which drives double stepper motors,
May, the layout of part is more reasonable；Stepper motor and the complete configuration of reduction gearbox, precision is high, shortens process-cycle and processing
Cost；Double stepper motors compensate for direct current generator under comparable size to a certain extent and provide the biggish deficiency of torque, whole controlling
In the case where body size, more high-torque is provided；Reversing arrangement is not needed, operational efficiency is improved, reduces backlass, is repeated
Property precision it is high, expand the function use scope of instrument；Ensure the synchronism in mechanical output by electric synchronization, and carries out anti-
Feedback control, improves the precision of control；Using TMC260 driving chip, exports electric current and be adjusted in synchronism with load variation, prevent from losing
Step, the motor feels hot for reduction.
3. LabVIEW platform of the Visual controlling interface design based on National Instruments is write, using three
The progressive structure of layer is analyzed, respectively top layer, logical layer, driving layer, and carries out demand point to user demand and hardware system
Analysis, setting log-in interface, operation main interface, and gained knowledge according to Human Engineering, scientific design key, icon, text box are maximum
Limitation meets the requirement that interface is simple and clear, interaction is friendly.
ESEM in-situ mechanical test platform is the system of complete set, by drawing stand, drive control box, control software three
Be grouped as, can the material mechanical performances test such as complete independently original position stretching, compression, bending, can also be with ESEM ining conjunction with, in load reality
While testing, the change of material surface pattern is observed, such as: the pattern of the germinating of crackle and extension, fault interface.It simultaneously can also
To cooperate with heating device, Thermal-mechanical Coupling experiment is carried out, is with a wide range of applications in fields such as material, biologies.
Three, specific embodiment:
As shown in Figure 1 to Figure 3, the drawing stand of ESEM in-situ mechanical test platform is placed on environmental scanning electron microscope
On the lifting platform of sample room, sample is fixed on drawing stand, by relative motion, making sample, deformation occurs, the visual angle of scanning electron microscope
It is constant, it is viewed as one and determines region, therefore load also known as in situ.It is illustrated with stretched operation:
Open battery main switch, pre-heating system；
Sample is placed in power support plate, position is adjusted, one end clamp plate of force snesor is screwed, the free shape of the other end
State clicks control software " relative load " right side " zero setting " key, by relative load zero setting；
Another end clamp plate is screwed, small pulling force is applied to sample by manually controlling.It clicks on the right side of " relative displacement "
" zero setting " key, by relative displacement zero setting；
In software control main interface, the control model needed is selected！Such as: setting " movement speed " click " manually controlling "
" stretching " key on column, data collecting card is according to " movement speed " pulse frequency corresponding with the transmitting of " stretching " signal and height electricity
Frequency signal, is transferred to drive circuit board, driving motor operating, and machine driving generates relative motion, stretches sample；
Force snesor voltage signal corresponding with displacement sensor output, force sensor signals by 495 times amplification and
Filter circuit, inputs a signal into data collecting card, and displacement transducer signal passes through filter circuit, input data capture card, finally
In the displacement and load value of software interface display response.
In specific implementation, sample is placed in power support plate, compression, bending, shearing test need replacing fixture, fixture
It is clamped by stretching pressing plate, can be used universal fixturing can also designed, designed.
The foregoing is only a preferred embodiment of the present invention, but scope of protection of the present invention is not limited thereto,
Within the technical scope of the present disclosure, any changes or substitutions that can be easily thought of by anyone skilled in the art,
It should be covered by the protection scope of the present invention.Therefore, protection scope of the present invention should be with the protection model of claims
Subject to enclosing.
Claims (7)
1. a kind of ESEM in-situ mechanical test platform, which is characterized in that including drawing stand, the drawing stand is rolled equipped with Two axle drive
Ballscrew, every axis driving ball-screw are respectively equipped with stepper motor, nut, the nut are engaged on Two axle drive ball-screw
It is connect with lead screw connector, the lead screw connector is connect with pressing plate, force snesor and displacement sensor is stretched, Two axle drive rolling
Ballscrew and two stepper motors are symmetrical.
2. ESEM in-situ mechanical test platform according to claim 1, which is characterized in that the ball-screw is double end spiral shell
Line lead screw, for the thread rotary orientation at both ends on the contrary, being engaged with nut on the screw thread at both ends respectively, two nuts are connected separately with lead screw company
Fitting is respectively fixed with stretching pressing plate on two lead screw connectors.
3. ESEM in-situ mechanical test platform according to claim 2, which is characterized in that the stretching pressing plate is fixed on institute
The inside of lead screw connector is stated, the nut is mounted on the outside of the lead screw connector.
4. ESEM in-situ mechanical test platform according to claim 3, which is characterized in that the nut is in the ball wire
It is reversely installed on thick stick.
5. ESEM in-situ mechanical test platform according to claim 1, which is characterized in that institute's displacement sensors are pull rod
Formula displacement sensor.
6. ESEM in-situ mechanical test platform according to claim 1, which is characterized in that two stepping motor synchronous turn
Dynamic, synchronous driving uses following any control mode:
Same signal parallel connection controls two corresponding stepper motors to two drivers；
One drive belts, two stepper motors.
7. ESEM in-situ mechanical test platform according to any one of claims 1 to 6, which is characterized in that the stepping electricity
Machine control uses PC control single-chip microcontroller, when single-chip microcontroller first powers on, configures TMC260 motor drive ic underlying parameter,
It is set to remain DIR/STEP control model, PC control software configures the output of NI company USB Type data collecting card signal
Channel provides pulse signal and low and high level signal, the driving chip control that two electric characteristics are consistent in drive circuit board
Bi-motor synchronous operation processed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811062015.5A CN109238848B (en) | 2018-09-12 | 2018-09-12 | ESEM (electronic stability and electromagnetic Engineers) in-situ mechanical test platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811062015.5A CN109238848B (en) | 2018-09-12 | 2018-09-12 | ESEM (electronic stability and electromagnetic Engineers) in-situ mechanical test platform |
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| CN109238848B CN109238848B (en) | 2020-05-15 |
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Cited By (2)
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| CN109826916A (en) * | 2019-01-21 | 2019-05-31 | 陕西科技大学 | A kind of single axle helical feed mechanism based on differential principle |
| CN113514319A (en) * | 2021-05-10 | 2021-10-19 | 吉林大学 | In-situ static-dynamic fatigue mechanical property testing instrument in scanning electron microscope |
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| CN108331409A (en) * | 2018-04-09 | 2018-07-27 | 北京航天汇信科技有限公司 | Quadrant drive clamping carrier |
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| JP2003163256A (en) * | 2001-11-26 | 2003-06-06 | Kyocera Corp | Stage device available in vacuum |
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| Publication number | Publication date |
|---|---|
| CN109238848B (en) | 2020-05-15 |
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