CN111431434A - Pressing mechanism, piezoelectric driving motor and atomic force microscope - Google Patents
Pressing mechanism, piezoelectric driving motor and atomic force microscope Download PDFInfo
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- CN111431434A CN111431434A CN202010180316.9A CN202010180316A CN111431434A CN 111431434 A CN111431434 A CN 111431434A CN 202010180316 A CN202010180316 A CN 202010180316A CN 111431434 A CN111431434 A CN 111431434A
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- 230000007246 mechanism Effects 0.000 title claims abstract description 68
- 230000006835 compression Effects 0.000 claims description 17
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- 230000009471 action Effects 0.000 claims description 4
- 238000000034 method Methods 0.000 abstract description 17
- 230000008569 process Effects 0.000 abstract description 15
- 230000033001 locomotion Effects 0.000 description 23
- 239000000523 sample Substances 0.000 description 10
- 238000013459 approach Methods 0.000 description 4
- 230000036316 preload Effects 0.000 description 3
- 238000004630 atomic force microscopy Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000012512 characterization method Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
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- 230000000737 periodic effect Effects 0.000 description 2
- 238000011160 research Methods 0.000 description 2
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- 230000003044 adaptive effect Effects 0.000 description 1
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/005—Mechanical details, e.g. housings
- H02N2/0055—Supports for driving or driven bodies; Means for pressing driving body against driven body
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/001—Driving devices, e.g. vibrators
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Abstract
The invention relates to a pressing mechanism which comprises a pressing bottom plate, a pressing piece and a fixing piece. The pressing bottom plate can be fixedly connected with a base body of the piezoelectric driving motor. The pressing piece is rotatably arranged on the pressing bottom plate, the pressing piece is relatively fixed with the pressing bottom plate along the direction of the self rotating shaft, and the pressing piece is provided with a first pressing end along the direction of the self rotating shaft. The mounting has first stiff end and second stiff end along self extending direction, and the second stiff end can with piezo-stack fixed connection, first stiff end and the first end threaded connection that compresses tightly of piece. When the pressing piece rotates relative to the pressing bottom plate, the fixing piece is close to or far away from the pressing bottom plate along the extending direction of the fixing piece. The invention also provides a piezoelectric driving motor comprising the pressing mechanism and an atomic force microscope. The pressing mechanism, the piezoelectric driving motor and the atomic force microscope can guarantee that proper pretightening force is applied, can also keep the whole pressing mechanism fixed in the moving process of the central prism, and have higher stability.
Description
Technical Field
The invention relates to the technical field of micro electro mechanical systems, in particular to a pressing mechanism, a piezoelectric driving motor and an atomic force microscope.
Background
Atomic Force microscopy (Atomic Force Microscope) is an important measurement, characterization, and manipulation tool for a number of disciplines and research areas. When a general atomic force microscope works, a piezoelectric driving motor consisting of tangential piezoelectric sheets is used for driving a nanoscale probe to approach a sample and scan the nanoscale probe. The traditional piezoelectric driving motor comprises a base body, a pressing device, a tangential piezoelectric stack and a central prism, wherein the tangential piezoelectric stack clamps the central prism, and a scanning probe is arranged on the central prism. Periodic sawtooth alternating current is input into the tangential piezoelectric stack, the slope of one end of each sawtooth is higher, the deformation rate of the tangential piezoelectric stack is correspondingly higher, and the central prism keeps static due to inertia; the slope of the other end of each sawtooth is low, the deformation rate of the tangential piezoelectric stack is relatively slow, and the central prism moves along with the tangential piezoelectric stack. The central prism can be moved in one direction by reciprocating in this way. At least two springs are generally used by a traditional piezoelectric driving motor to apply pretightening force to the oppositely-oriented piezoelectric stack, and the two springs often vibrate or even shake due to uneven stress in the movement process of the piezoelectric driving motor, so that the accuracy and the reliability of the piezoelectric driving process are greatly influenced.
Disclosure of Invention
Therefore, it is necessary to provide a pressing mechanism, a piezoelectric driving motor and an atomic force microscope with high motion stability for solving the problem that a pressing member in a conventional piezoelectric driving motor is prone to vibration or even shaking.
A hold-down mechanism comprising:
the pressing bottom plate can be fixedly connected with a base body of the piezoelectric driving motor;
the pressing piece is rotatably arranged on the pressing bottom plate, the pressing piece is relatively fixed with the pressing bottom plate along the direction of a self rotating shaft, and the pressing piece is provided with a first pressing end along the direction of the self rotating shaft;
the fixing piece is provided with a first fixing end and a second fixing end along the extending direction of the fixing piece, the second fixing end can be fixedly connected with a piezoelectric stack in a piezoelectric driving motor, and the first fixing end is in threaded connection with the first pressing end of the pressing piece;
when the pressing piece rotates relative to the pressing bottom plate, the fixing piece is close to or far away from the pressing bottom plate along the extending direction of the fixing piece.
In one embodiment, the first pressing end of the pressing member is provided with a threaded hole, the outer surface of the first fixing end of the fixing member is provided with an external thread, and the first fixing end can be screwed into the threaded hole formed in the first pressing end.
In one embodiment, a pressing through hole is formed in the pressing bottom plate, and the pressing piece penetrates through the pressing through hole; the first pressing end of the pressing piece is provided with a retaining ring, and the retaining ring is abutted to one side face, close to the fixing piece, of the pressing bottom plate.
In one embodiment, the pressing piece is provided with a driving structure at a position far away from the first pressing end along the direction of the rotating shaft of the pressing piece, and the driving structure can drive the pressing piece to rotate around the axial direction of the pressing piece under the action of external force.
In one embodiment, the pressing piece further has a second pressing end, and the second pressing end and the first pressing end are two ends of the pressing piece along the direction of the rotation shaft of the pressing piece respectively; and the second pressing end is provided with a notch along the direction vertical to the axial direction of the pressing piece, so that the driving structure is formed.
In one embodiment, the part of the pressing piece, which is far away from the retaining ring along the axial direction of the pressing piece, is provided with an external thread; the pressing mechanism further comprises a pressing nut, the pressing nut is in threaded connection with a part of the pressing piece, which is provided with an external thread, the pressing nut is abutted against one side face, deviating from the retaining ring, of the pressing bottom plate after being screwed down, and the pressing piece is allowed to rotate relative to the pressing bottom plate around the self axial direction when the pressing nut is unscrewed.
In one embodiment, the pressing mechanism further comprises a connecting plate, the connecting plate and the pressing bottom plate are arranged at intervals along the extending direction of the fixing piece, and one side surface of the connecting plate, which is far away from the pressing bottom plate, is provided with a mounting position, and the mounting position is used for mounting the piezoelectric stack; the connecting plate is fixedly connected with the second fixed end of the fixing piece, and when the pressing piece rotates relative to the pressing bottom plate, the fixing piece is close to or far away from the pressing bottom plate along the extending direction of the fixing piece, so that the connecting plate and the piezoelectric stack are driven to be close to or far away from the pressing bottom plate.
In one embodiment, the fixing piece comprises a fixing screw, a connecting through hole is formed in the connecting plate, the fixing screw is arranged in the connecting through hole in a penetrating mode, and a nut on the fixing screw is abutted to one side face, away from the pressing bottom plate, of the connecting plate; the pressing mechanism further comprises a fixing nut, the fixing nut is sleeved on the external thread portion of the fixing screw, and the fixing nut is tightly screwed and abuts against one side face, close to the pressing bottom plate, of the connecting plate.
In one embodiment, the pressing mechanism comprises a plurality of pressing pieces and a plurality of fixing pieces, the number of the pressing pieces is the same as that of the fixing pieces, and the first fixed ends of the fixing pieces are respectively in threaded connection with the first pressing end of one pressing piece; it is a plurality of compress tightly a parallel, interval setting, it is a plurality of the mounting is parallel, the interval setting, and is a plurality of the mounting the second stiff end respectively with different fixed position is connected on the connecting plate.
In one embodiment, the pressing mechanism further includes at least two piezo stacks and an electrode lead plate, a side of the connecting plate away from the pressing base plate has at least two mounting locations, at least two piezo stacks are respectively disposed at one of the mounting locations on the connecting plate, the electrode lead plate is disposed on the connecting plate or the pressing base plate, and the electrode lead plate is electrically connected to the piezo stacks.
A piezoelectric drive motor comprising the compression mechanism of any one of the above aspects.
In one embodiment, the piezoelectric driving motor further comprises a base body, a fixed end tangential piezoelectric stack, a movable end tangential piezoelectric stack and a central prism; the pressing mechanism is fixedly arranged on the base body, and the central prism is arranged in a central cavity defined by the base body and the pressing mechanism; the fixed end tangential piezoelectric stack is arranged between the base body and the central prism, and the movable end tangential piezoelectric stack is arranged between the pressing mechanism and the central prism; the fixed end tangential piezoelectric stack and the movable end tangential piezoelectric stack jointly compress the central prism.
An atomic force microscope comprises the piezoelectric driving motor.
Above-mentioned hold-down mechanism, piezoelectricity driving motor and atomic force microscope compress tightly when the piece rotates for compressing tightly the bottom plate to screw drive's mode drive mounting is kept away from or is close to and compresses tightly the bottom plate, and then drives the piezoelectricity stack with mounting fixed connection and also is close to or keeps away from and compresses tightly the bottom plate. After the suitable angle of piece is pressed in the rotation, not only can realize exerting of pretightning force between piezoelectric stack and the central prism, owing to compress tightly the bottom plate, compress tightly the connected mode between piece and the mounting and be rigid connection, both can guarantee to apply suitable pretightning force, also can keep whole hold-down mechanism's fixed in the prismatic motion process of center to reduced greatly and removed the vibration or the rocking of taking place other directions except that removing the axle at piezoelectric drive motor removal in-process, had higher stability.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this application, illustrate embodiments of the invention and, together with the description, serve to explain the invention and not to limit the invention.
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
Fig. 1 is an enlarged schematic structural view of a pressing member according to an embodiment of the present invention;
fig. 2 is an exploded view of a pressing mechanism according to an embodiment of the present invention;
FIG. 3 is a front view of an assembly structure of a pressing mechanism according to an embodiment of the present invention;
FIG. 4 is a rear view of a mounting structure of a pressing mechanism according to an embodiment of the present invention;
fig. 5 is a schematic structural diagram of a piezoelectric driving motor according to an embodiment of the present invention.
Wherein: 10. a piezoelectric drive motor; 100. a substrate; 200. a hold-down mechanism; 210. compressing the bottom plate; 211. compressing the through hole; 212. installing a bolt; 220. a compression member; 221. a first compression end; 222. a baffle ring; 223. a second compression end; 224. opening the gap; 230. a fixing member; 231. a first fixed end; 232. a second fixed end; 240. a compression nut; 250. a connecting plate; 251. an installation position; 260. fixing a nut; 270. an electrode lead plate; 300. piezoelectric stacking; 310. the fixed end is tangential to the piezoelectric stack; 320. the movable end is tangential to the piezoelectric stack; 400. a central prism.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. The following description of the embodiments is merely exemplary in nature and is in no way intended to limit the invention, its application, or uses.
It will be understood that when an element is referred to as being "secured to" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. In contrast, when an element is referred to as being "directly on" another element, there are no intervening elements present. In contrast, when an element is referred to as being "directly connected" to another element, there are no intervening elements present. The terms "vertical," "horizontal," "left," "right," and the like as used herein are for illustrative purposes only.
In the description of the present invention, it is to be understood that the terms "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "top," "bottom," "inner," "outer," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the present invention and for simplicity in description, and are not intended to indicate or imply that the referenced devices or elements must have a particular orientation, be constructed in a particular orientation, and be operated in a particular manner and are not to be construed as limiting the present invention.
Atomic Force microscopy (Atomic Force Microscope) is an important measurement, characterization, and manipulation tool for a number of disciplines and research areas. The atomic force microscope controls a nanoscale probe installed on a micro-cantilever to be close to the surface of a sample, the interaction force of a needle tip and the surface of the sample enables the deflection of the cantilever or the change of the vibration frequency, the phase and the amplitude, and the detection part senses the changes to obtain the tiny force of the needle tip and the surface of the sample. The process of driving the probe to approach the surface of the sample and scanning is divided into a coarse motion part and a fine motion part. The fine motion is usually driven by a piezo tube and the coarse motion is usually driven by a piezo drive motor consisting of a tangential piezo stack.
The conventional piezoelectric driving motor is generally composed of a base body, a pressing mechanism, a fixed end tangential piezoelectric stack, a movable end tangential piezoelectric stack, a central prism and the like. The piezoelectric driving motor moves in an inertial mode, alternating current applied to the piezoelectric stack is in a periodic sawtooth shape, the slope of one end of each sawtooth is high, the deformation rate of the tangential piezoelectric stack is correspondingly high, and the central prism keeps static due to inertia. The slope of the other end of the single sawtooth is low, the deformation rate of the piezoelectric stack is relatively slow, and the central prism moves along with the piezoelectric stack. The central prism can be moved in one direction by reciprocating in this way. Because the piezoelectric driving motor is usually driven in an inertial mode, proper pretightening force between the piezoelectric stack and the central prism and the overall motion stability of the piezoelectric driving motor are important parameters for ensuring the normal operation of the piezoelectric driving motor. Too little or too much pretensioning force can greatly reduce the operating speed of the piezoelectric drive motor or can not move at all. The invention provides a pressing mechanism, a piezoelectric driving motor and an atomic force microscope, which can provide proper pretightening force between an electric stack and a central prism and can keep higher motion stability. It can be understood that the pressing mechanism provided by the invention can also be applied to other occasions where a set value or a set range pretightening force needs to be provided and the overall stability of the equipment needs to be maintained. The following description will mainly be given by taking an example in which the pressing mechanism is applied to a piezoelectric driving motor.
As shown in fig. 1-3, one embodiment of the present invention provides a clamping mechanism 200 for generating a preload force between a piezo stack 300 and a central prism 400 in a piezo drive motor 10. The pressing mechanism 200 includes a pressing base plate 210, a pressing member 220, and a fixing member 230. The pressing base plate 210 can be fixedly connected to the base body 100 of the piezoelectric drive motor 10 for integrally mounting the pressing mechanism 200 on the piezoelectric drive motor 10. The pressing member 220 is rotatably disposed on the pressing base plate 210, the pressing member 220 is relatively fixed to the pressing base plate 210 along the rotation axis direction, the pressing member 220 has a first pressing end 221 along the rotation axis direction, and when the pressing member 220 rotates relative to the pressing base plate 210, the pressing member 220 does not displace relative to the pressing base plate 210 along the rotation axis direction. The fixing member 230 has a first fixing end 231 and a second fixing end 232 along its extending direction, the second fixing end 232 can be fixedly connected with the piezo stack 300 in the piezo drive motor 10, and the first fixing end 231 is screwed with the first pressing end 221 of the pressing member 220. When the pressing member 220 rotates relative to the pressing base plate 210, the fixing member 230 moves closer to or away from the pressing base plate 210 in the extending direction thereof.
When the pressing member 220 rotates relative to the pressing base plate 210, the pressing mechanism 200, the piezoelectric driving motor 10 and the atomic force microscope drive the fixing member 230 to move away from or close to the pressing base plate 210 in a threaded transmission manner, and further drive the piezoelectric stack 300 fixedly connected with the fixing member 230 to move close to or away from the pressing base plate 210. After the pressing piece 220 is rotated by a proper angle, the application of the pretightening force between the piezoelectric stack 300 and the central prism 400 can be realized, and the pressing bottom plate 210, the pressing piece 220 and the fixing piece 230 are rigidly connected, so that the application of the proper pretightening force can be ensured, and the whole pressing mechanism 200 can be kept fixed in the movement process of the central prism 400, thereby greatly reducing the vibration or shaking in other directions except for the movement axis in the movement process of the piezoelectric driving motor 10, and having higher stability.
In the above embodiment, when the pressing member 220 rotates relative to the pressing base plate 210, the rotation thereof is converted into the movement of the fixing member 230 along the extending direction thereof by means of the screw connection. It can be understood that the threaded connection between the first pressing end 221 of the pressing member 220 and the first fixing end 231 of the fixing member 230 may be a threaded connection having an external thread on the first pressing end 221 and an internal thread on the first fixing end 231, or a threaded connection having an internal thread on the first pressing end 221 and an external thread on the first fixing end 231. Because the pressing member 220 and the pressing base plate 210 are relatively fixed along the axial direction of the pressing member 220, the two manners can both realize the movement of the driving fixing member 230 along the extending direction of the driving fixing member when the pressing member 220 rotates. As an implementation manner, the following description will be made by taking "the first pressing end 221 has an internal thread and the first fixing end 231 has an external thread". It is understood that the following embodiments can be applied to the case of "having the external thread on the first compressing end 221 and the internal thread on the first fixing end 231" only by making an adaptive modification.
As shown in fig. 1 to 3, in an embodiment of the present invention, a threaded hole is formed in the first pressing end 221 of the pressing member 220, an external thread is formed on an outer surface of the first fixing end 231 of the fixing member 230, and the first fixing end 231 can be screwed into the threaded hole formed in the first pressing end 221. In the using process, the first fixing end 231 is screwed into the first pressing end 221, and then the pressing member 220 is driven to rotate relative to the pressing base plate 210 according to the actual working condition, so that the fixing member 230 is driven to move along the extending direction of the fixing member, and the pre-tightening force between the piezoelectric stack 300 and the central prism 400 is increased or decreased. It will be appreciated that the central prism 400 is now free to move under appropriate pre-load and will not move or fall out under its own weight when placed vertically. Further, the pressing mechanism 200 further includes a connecting plate 250, the connecting plate 250 and the pressing base plate 210 are disposed at an interval along the extending direction of the fixing member 230, a side surface of the connecting plate 250 away from the pressing base plate 210 has a mounting position 251, the mounting position 251 is used for mounting the piezo stack 300, and both ends of the piezo stack 300 along the direction perpendicular to the tangential direction of the piezo stack are respectively connected to the mounting position 251 on the connecting plate 250 and the central prism 400.
As shown in fig. 1-3, piezo-stack 300 is bonded to mounting locations 251 on connection plate 250 in an achievable manner. And the connecting plate 250 is fixedly connected to the second fixed end 232 of the fixing member 230, and the fixing member 230 is connected to the piezo-stack 300 through the connecting plate 250. When the pressing member 220 rotates relative to the pressing base plate 210, the fixing member 230 approaches or leaves the pressing base plate 210 along the extending direction thereof, and further drives the connecting plate 250 and the piezo stack 300 to approach or leave the pressing base plate 210, so as to increase or decrease the pre-tightening force between the piezo stack 300 and the central prism 400. Meanwhile, the rigid connection among the pressing base plate 210, the pressing member 220, the fixing member 230 and the connecting plate 250 effectively prevents the piezoelectric driving motor 10 from vibrating or shaking in other directions except the moving axis during the moving process, and has higher stability. Furthermore, the pressing mechanism 200 further includes at least two piezo stacks 300 and an electrode lead plate 270, a side of the connecting plate 250 away from the pressing base plate 210 has at least two mounting locations 251, the at least two piezo stacks 300 are respectively disposed at one mounting location 251 on the connecting plate 250, the electrode lead plate 270 is disposed on the connecting plate 250 or the pressing base plate 210, and the electrode lead plate 270 is electrically connected to the piezo stacks 300. The use of the electrode lead plate 270 can improve the stability of connection and prevent short-circuiting, disconnection, and the like during operation. It is understood that wires may also be used directly to connect piezo-stack 300.
The relative rotation of the pressing member 220 with respect to the pressing base plate 210 and the relative fixation of the pressing member 220 and the pressing base plate along the rotation axis direction are key factors for realizing the adjustable pretightening force and maintaining the motion stability of the pressing mechanism 200 in the above embodiments. As shown in fig. 1 to 3, in an embodiment of the present invention, a pressing through hole 211 is formed on the pressing base plate 210, and the pressing member 220 is inserted into the pressing through hole 211. The first pressing end 221 of the pressing member 220 has a stopper 222, and the stopper 222 abuts against a side surface of the pressing base plate 210 close to the fixing member 230. When the pressing mechanism 200 is installed in the piezoelectric driving motor 10, the pressing member 220 tends to move in the direction of its own rotation axis relative to the pressing base plate 210 under the action of the pre-tightening force (since the pressing base plate 210 is fixed on the base body 100 of the piezoelectric driving motor 10, in this case, the pressing member 220 tends to move away from the fixing member 230). In this embodiment, the retaining ring 222 of the first pressing end 221 of the pressing member 220 can be attached to a side surface of the pressing base plate 210 close to the fixing member 230, so as to effectively prevent the pressing member 220 from moving relative to the pressing base plate 210 along its rotation axis, maintain the mutual pressing force between the pressing member 220 and the fixing member 230, and finally maintain the pressing force between the piezo-electric stack 300 and the central prism 400. In other embodiments of the present invention, the pressing member 220 and the pressing base plate 210 may be relatively fixed in the axial direction by a snap ring (corresponding to forming a snap groove on the pressing member 220), a pin shaft (corresponding to forming a pin hole on the pressing member 220), and the like.
The pressing member 220, the fixing member 230, the pressing base plate 210 and the connecting plate 250 in the above embodiments can effectively apply and adjust a pre-tightening force between the piezo stack 300 and the central prism 400, and maintain the motion stability of the piezo drive motor 10 during the operation process. As shown in fig. 2-4, in an embodiment of the present invention, the pressing member 220 is externally threaded along a portion axially away from the stop ring 222. The pressing mechanism 200 further comprises a pressing nut 240, the pressing nut 240 is in threaded connection with a part of the pressing piece 220, which is provided with an external thread, the pressing nut 240 abuts against one side of the pressing base plate 210, which is away from the retainer ring 222, after being screwed down, and the pressing piece 220 is allowed to rotate around the self-axial direction relative to the pressing base plate 210 when the pressing nut 240 is unscrewed. When a pre-tightening force between the piezo-stack 300 and the central prism 400 needs to be applied or adjusted, the pressing nut 240 is firstly kept in a loose state allowing the pressing member 220 to rotate; the pressing member 220 is driven to rotate relative to the pressing base plate 210, and thus the preload between the piezo-stack 300 and the central prism 400 is applied or adjusted by the movement of the fixing member 230 in the self-extending direction. After the pre-tightening force is applied or adjusted, the compression nut 240 is tightened, and the compression nut 240 completely fixes the compression element 220 on the compression base plate 210. In an implementation, the pressing member 220 may be a special screw, the nut of the special screw is equivalent to the retaining ring 222, and a threaded hole allowing the first fixing end 231 of the fixing member 230 to be screwed into is formed at one end of the special screw having the nut.
As shown in fig. 1 to 3, in an embodiment of the present invention, a driving structure is provided at a position of the pressing member 220 away from the first pressing end 221 along a rotation axis direction of the pressing member, and the driving structure can drive the pressing member 220 to rotate around an axial direction of the pressing member under an external force, so that an operator can drive the pressing member 220 to rotate relative to the pressing base plate 210. Alternatively, the driving structure on the pressing member 220 may be a pin hole allowing a pin to be inserted, a flat surface allowing a wrench to be driven, or a knife slot allowing a screwdriver to be driven, and may even be a structure allowing an operator to manually operate. In an implementation manner, the pressing member 220 further has a second pressing end 223, and the second pressing end 223 and the first pressing end 221 are two ends of the pressing member 220 along the rotation axis direction thereof, respectively. The second pressing end 223 is provided with a notch 224 along a direction perpendicular to the axial direction of the pressing member 220, thereby forming a driving structure. Compress tightly the opening 224 that the second held down the end 223 and seted up on 220 and can allow the operator to use the screwdriver drive to compress down piece 220 and rotate, reduced operator drive clamp 220 pivoted degree of difficulty, reached laborsaving driven effect simultaneously. The pressing member 220 in this embodiment can be implemented by forming a straight screwdriver slot at the screw end of the special screw.
As shown in fig. 2-4, in an embodiment of the present invention, the fixing element 230 includes a fixing screw, a connecting through hole is formed on the connecting plate 250, the fixing screw is inserted into the connecting through hole, and a nut of the fixing screw abuts against a side of the connecting plate 250 away from the pressing base plate 210. The pressing mechanism 200 further includes a fixing nut 260, the fixing nut 260 is sleeved on the external thread portion of the fixing screw, and the fixing nut 260 is tightened to abut against a side surface of the connecting plate 250 close to the pressing base plate 210. In other embodiments of the present invention, the fixing between the fixing member 230 and the connecting plate 250 along the extending direction of the fixing member 230 may also be achieved by welding, clamping, or the like. In the process of installing the pressing mechanism 200 provided in this embodiment, the piezo-stack 300 is first installed on the fixing position of the connecting plate 250, and meanwhile, the fixing member 230 (fixing screw) is inserted into the connecting through hole on the connecting plate 250, and then the fixing member 230 (fixing screw) is fixedly connected to the connecting plate 250 by using the fixing nut 260. Meanwhile, the pressing member 220 (a special screw) is inserted into the pressing through hole 211 of the pressing base plate 210, and the first fixing end 231 provided with the external thread on the fixing member 230 (a fixing screw) is screwed into the first pressing end 221 provided with the threaded hole of the pressing member 220 (a special screw). Finally, the entire pressing mechanism 200 is mounted on the base 100 of the piezoelectric driving motor 10 via the pressing base plate 210, and after a suitable pre-tightening force is applied between the piezoelectric stack 300 and the central prism 400 by rotating the pressing element 220 (a special screw), the pressing element 220 (a special screw) is completely fixed on the pressing base plate 210 by using the pressing nut 240.
As shown in fig. 2 to 4, in an embodiment of the present invention, the pressing mechanism 200 includes a plurality of pressing members 220 and a plurality of fixing members 230, the number of the pressing members 220 and the number of the fixing members 230 are the same, and the first fixing ends 231 of the plurality of fixing members 230 are respectively screwed with the first pressing end 221 of one pressing member 220. The plurality of pressing members 220 are arranged in parallel and at intervals, the plurality of fixing members 230 are arranged in parallel and at intervals, and the second fixing ends 232 of the plurality of fixing members 230 are fixedly connected with different positions on the connecting plate 250 respectively. A plurality of 220 and a plurality of fixing pieces 230 that compress tightly not only can strengthen the holistic stability of hold-down mechanism 200, and a plurality of fixing pieces 230 and connecting plate 250 are fixed connection respectively, can also effectively avoid compressing tightly and driving fixing piece 230 when 220 rotate and rotate, and then fixing piece 230 drives the connecting plate 250 pivoted condition. As a practical way, the number of the pressing members 220 and the fixing members 230 is four, the four pressing through holes 211 formed on the pressing base plate 210 form four corners of a rectangle, and correspondingly, the four connecting through holes formed on the connecting plate 250 also form four corners of a rectangle.
As shown in fig. 2 to 4, in a specific embodiment of the present invention, the pressing mechanism 200 includes a pressing base plate 210, a pressing member 220 in the form of a special screw, a pressing nut 240, a fixing member 230 in the form of a fixing screw, a fixing nut 260, a connecting plate 250, a piezo-stack 300, and an electrode lead plate 270. Electrode lead plate 270 is fixedly mounted on pressing base plate 210 and electrically connected to piezo-stack 300, and piezo-stack 300 is adhered to mounting portion 251 of connecting plate 250. The nominal diameter of the threads of the fixing nut 260 and the fixing screw is 1.6mm, one end of the screw cap of the special screw is provided with an M1.6 screw hole, the screw end of the special screw is an M2 external thread, and the nominal diameter of the compression nut 240 is 2 mm. The fixing screw is fixed to the connecting plate 250 by the fixing nut 260, the connecting plate 250 is connected to the pressing base plate 210 by rotating the special screw, and the entire pressing mechanism 200 is mounted on the base body 100 of the piezoelectric driving motor 10 by the mounting bolt 212. And then the position of the connecting piece is adjusted by rotating the special screw until proper pretightening force is obtained, and at the moment, the central prism 400 can freely move under the action of proper external force under the proper pretightening force and cannot move or fall off due to self gravity when being vertically placed. Finally, the special screw is kept fixed, and the compression nut 240 is screwed. By applying the pretightening force by the method, the application of proper pretightening force can be ensured, and the whole pressing mechanism 200 can be kept fixed in the movement process of the central prism 400, so that the vibration or shaking in other directions except the movement shaft in the movement process of the piezoelectric driving motor 10 is greatly reduced.
As shown in fig. 5, an embodiment of the present invention further provides a piezoelectric driving motor 10, which includes the pressing mechanism 200 according to any one of the above embodiments. Specifically, piezoelectric drive motor 10 further includes a base 100, a fixed end tangential piezo stack 310, a movable end tangential piezo stack 320, and a central prism 400. The pressing mechanism 200 is fixedly arranged on the base body 100, and the central prism 400 is arranged in a central cavity formed by the base body 100 and the pressing mechanism 200. Fixed end tangential piezo stack 310 is disposed between base 100 and central prism 400, and movable end tangential piezo stack 320 is disposed between hold-down mechanism 200 and central prism 400. The fixed end tangential piezo stack 310 and the movable end tangential piezo stack 320 together compress the central prism 400. An embodiment of the present invention further provides an atomic force microscope, including the piezoelectric driving motor 10.
According to the piezoelectric driving motor 10 and the atomic force microscope, when the pressing member 220 rotates relative to the pressing base plate 210, the fixing member 230 is driven to be away from or close to the pressing base plate 210 in a threaded transmission manner, and further the piezoelectric stack 300 fixedly connected with the fixing member 230 is driven to be also close to or away from the pressing base plate 210. After the pressing piece 220 is rotated by a proper angle, the application of the pretightening force between the piezoelectric stack 300 and the central prism 400 can be realized, and the pressing bottom plate 210, the pressing piece 220 and the fixing piece 230 are rigidly connected, so that the application of the proper pretightening force can be ensured, and the whole pressing mechanism 200 can be kept fixed in the movement process of the central prism 400, thereby greatly reducing the vibration or shaking in other directions except for the movement axis in the movement process of the piezoelectric driving motor 10, and having higher stability.
The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.
Claims (13)
1. A hold-down mechanism, comprising:
the pressing bottom plate can be fixedly connected with a base body of the piezoelectric driving motor;
the pressing piece is rotatably arranged on the pressing bottom plate, the pressing piece is relatively fixed with the pressing bottom plate along the direction of a self rotating shaft, and the pressing piece is provided with a first pressing end along the direction of the self rotating shaft;
the fixing piece is provided with a first fixing end and a second fixing end along the extending direction of the fixing piece, the second fixing end can be fixedly connected with a piezoelectric stack in a piezoelectric driving motor, and the first fixing end is in threaded connection with the first pressing end of the pressing piece;
when the pressing piece rotates relative to the pressing bottom plate, the fixing piece is close to or far away from the pressing bottom plate along the extending direction of the fixing piece.
2. The clamping mechanism as claimed in claim 1, wherein the first clamping end of the clamping member has a threaded hole, the first fixing end of the fixing member has an external thread on an outer surface thereof, and the first fixing end can be screwed into the threaded hole formed in the first clamping end.
3. The pressing mechanism as claimed in claim 1, wherein the pressing bottom plate is provided with a pressing through hole, and the pressing member is inserted into the pressing through hole; the first pressing end of the pressing piece is provided with a retaining ring, and the retaining ring is abutted to one side face, close to the fixing piece, of the pressing bottom plate.
4. The pressing mechanism as claimed in claim 3, wherein the pressing member has a driving structure at a position far from the first pressing end along the rotation axis direction, and the driving structure can drive the pressing member to rotate around the axial direction of the pressing member under the action of external force.
5. The pressing mechanism of claim 4, wherein the pressing member further has a second pressing end, and the second pressing end and the first pressing end are two ends of the pressing member along the rotation axis direction of the pressing member; and the second pressing end is provided with a notch along the direction vertical to the axial direction of the pressing piece, so that the driving structure is formed.
6. The pressing mechanism as claimed in claim 3, wherein the pressing member is externally threaded along a portion thereof axially away from the stopper ring; the pressing mechanism further comprises a pressing nut, the pressing nut is in threaded connection with a part of the pressing piece, which is provided with an external thread, the pressing nut is abutted against one side face, deviating from the retaining ring, of the pressing bottom plate after being screwed down, and the pressing piece is allowed to rotate relative to the pressing bottom plate around the self axial direction when the pressing nut is unscrewed.
7. The pressing mechanism of any one of claims 1 to 6, further comprising a connecting plate, wherein the connecting plate and the pressing base plate are arranged at a distance along the extending direction of the fixing member, and a side surface of the connecting plate away from the pressing base plate is provided with a mounting position for mounting the piezoelectric stack; the connecting plate is fixedly connected with the second fixed end of the fixing piece, and when the pressing piece rotates relative to the pressing bottom plate, the fixing piece is close to or far away from the pressing bottom plate along the extending direction of the fixing piece, so that the connecting plate and the piezoelectric stack are driven to be close to or far away from the pressing bottom plate.
8. The pressing mechanism as claimed in claim 7, wherein the fixing member includes a fixing screw, the connecting plate is provided with a connecting through hole, the fixing screw is inserted into the connecting through hole, and a nut of the fixing screw abuts against a side surface of the connecting plate away from the pressing base plate; the pressing mechanism further comprises a fixing nut, the fixing nut is sleeved on the external thread portion of the fixing screw, and the fixing nut is tightly screwed and abuts against one side face, close to the pressing bottom plate, of the connecting plate.
9. The compression mechanism as claimed in claim 7, wherein the compression mechanism comprises a plurality of compression members and a plurality of fixing members, the number of the compression members and the number of the fixing members are the same, and the first fixing ends of the plurality of fixing members are respectively in threaded connection with the first compression end of one compression member; it is a plurality of compress tightly a parallel, interval setting, it is a plurality of the mounting is parallel, the interval setting, and is a plurality of the mounting the second stiff end respectively with different fixed position is connected on the connecting plate.
10. The clamping mechanism of claim 7, further comprising at least two piezo-stacks and an electrode lead plate, wherein a side of the connecting plate facing away from the clamping base plate has at least two mounting locations, at least two piezo-stacks are respectively disposed at one of the mounting locations on the connecting plate, the electrode lead plate is disposed on the connecting plate or the clamping base plate, and the electrode lead plate is electrically connected to the piezo-stacks.
11. A piezoelectric drive motor comprising a hold-down mechanism as claimed in any one of claims 1 to 10.
12. The piezoelectric drive motor of claim 11, further comprising a base, a fixed end tangential piezo-stack, a movable end tangential piezo-stack, and a central prism; the pressing mechanism is fixedly arranged on the base body, and the central prism is arranged in a central cavity defined by the base body and the pressing mechanism; the fixed end tangential piezoelectric stack is arranged between the base body and the central prism, and the movable end tangential piezoelectric stack is arranged between the pressing mechanism and the central prism; the fixed end tangential piezoelectric stack and the movable end tangential piezoelectric stack jointly compress the central prism.
13. An atomic force microscope comprising the piezoelectric drive motor of claim 11 or 12.
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| CN202010180316.9A CN111431434B (en) | 2020-03-16 | 2020-03-16 | Pressing mechanism, piezoelectric driving motor and atomic force microscope |
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