CN108088359A

CN108088359A - Portable contourgraph and profile scan microscope and system

Info

Publication number: CN108088359A
Application number: CN201611039317.1A
Authority: CN
Inventors: 林立; 孙陶陶; 叶际隆; 郑泉水
Original assignee: Tsinghua University
Current assignee: Tsinghua University
Priority date: 2016-11-21
Filing date: 2016-11-21
Publication date: 2018-05-29
Anticipated expiration: 2036-11-21
Also published as: CN108088359B

Abstract

The invention discloses a kind of portable contourgraph and profile scan microscope and system, contourgraph includes three axis piezoelectric ceramic scanatrons, is made of X, Y and Z-direction piezoelectric ceramic actuator；Each piezoelectric ceramic actuator includes flexible amplification mechanism and piezoelectric ceramics, and flexible amplification mechanism has fixing end and tache motorice, and is provided so that the straight-line displacement that tache motorice generation is amplified the deformation of piezoelectric ceramics；X, Y, Z-direction piezoelectric ceramic actuator and capacitance differential sensor are sequentially connected in series, and X, Y, Z-direction piezoelectric ceramic actuator are set in the orientation of straight-line displacement so that corresponding tache motorice is generated along X, Y, Z-direction respectively；Capacitance differential sensor includes target part, probe and two induction pieces, probe and is connected along Z-direction and target part, and two induction pieces each form a monopole capacitance with target part.The contourgraph has the advantages that small, at low cost and high resolution.

Description

Portable contourgraph and contour scanning microscope and system

Technical Field

The invention relates to the technical field of a profile gauge, in particular to a portable profile gauge, a profile scanning microscope with the portable profile gauge and a profile scanning system for realizing profile scanning of a sample to be measured by utilizing the portable profile gauge or the profile scanning microscope.

Background

Profilometers are instruments used for characterizing the surface topography of an object and can be classified into two categories according to the measurement principle, one category is profilometers that use optical methods for measurement and the other category is profilometers that use contact methods for measurement. The optical methods include a white light interferometry, a phase shift interferometry, a focusing detection method, a pattern projection method and the like, and the optical methods have the advantages of high speed, high reliability and high transverse resolution, but a complex optical path system needs to be built, so that the optical method is large in occupied volume, inconvenient to carry, easy to influence by the environment and high in price. The contact method mainly comprises an atomic force microscope and a scanning tunnel microscope, the atomic force microscope and the scanning tunnel microscope realize the feedback of displacement and force by utilizing the optical lever principle, and have the advantages of high resolution, good reliability and wide application range, but a more complex system needs to be built as a support, and the atomic force microscope and the scanning tunnel microscope are large in size, inconvenient to carry and high in price.

Disclosure of Invention

It is an object of the present invention to provide a profiler that is small in size and portable.

According to a first aspect of the present invention, there is provided a portable profiler comprising:

the three-axis piezoelectric ceramic scanning tube comprises piezoelectric ceramic drivers in the X direction, the Y direction and the Z direction, wherein the X direction, the Y direction and the Z direction are mutually orthogonal; each piezoelectric ceramic driver comprises a flexible amplifying mechanism, piezoelectric ceramics mounted on the flexible amplifying mechanism and a driving voltage input end led out through the piezoelectric ceramics, wherein the flexible amplifying mechanism is provided with a fixed end and a moving end, and the flexible amplifying mechanism is arranged to enable the moving end to generate linear displacement for amplifying deformation of the piezoelectric ceramics; the fixed end of the X-direction piezoelectric ceramic driver is fixedly connected with the fixed bottom plate, and the X-direction piezoelectric ceramic driver is arranged in a direction which enables the corresponding moving end to generate linear displacement along the X direction; the fixed end of the Y-direction piezoelectric ceramic driver is fixedly connected with the moving end of the X-direction piezoelectric ceramic driver, and the Y-direction piezoelectric ceramic driver is arranged in a direction which enables the corresponding moving end to generate linear displacement along the Y direction; the fixed end of the Z-direction piezoelectric ceramic driver is fixedly connected with the moving end of the Y-direction piezoelectric ceramic driver, and the Z-direction piezoelectric ceramic driver is arranged in a direction which enables the corresponding moving end to generate linear displacement along the Z direction; and the number of the first and second groups,

the capacitive differential sensor comprises a differential signal output end, a grounding end, a target part, a probe and two sensing parts, wherein the target part is connected with the grounding end, and the probe is fixedly connected with the target part along the Z direction so as to transmit acting force to the target part; the two induction pieces are correspondingly connected with the differential signal output end and respectively form a single-pole capacitor with the target piece; the capacitive differential sensor is arranged to: the distance between the polar plates of the two unipolar capacitors is changed in an equal and opposite direction according to the acting force so as to output a differential signal through the differential signal output end; and the two sensing pieces are fixedly connected with the moving end of the Z-direction piezoelectric ceramic driver.

Optionally, the fixed end of the Y-direction piezoelectric ceramic driver is fixedly connected to the moving end of the X-direction piezoelectric ceramic driver through an adapter plate, and the adapter plate is set as: and enabling the fixed end of the Y-direction piezoelectric ceramic driver to deflect 90 degrees relative to the moving end of the X-direction piezoelectric ceramic driver.

Optionally, the flexible amplifying mechanism is provided with two bearing plates, one end of the piezoelectric ceramic is supported and fixedly connected to one bearing plate, and the other end of the piezoelectric ceramic is supported on the other bearing plate and abuts against an end face of the other bearing plate in a deformation direction of the piezoelectric ceramic.

Optionally, the equivalent lengths of the fixed end and the moving end of the flexible amplifying mechanism are equal, the flexible amplifying mechanism further comprises four connecting arms with equal equivalent lengths and two connecting ends with equal equivalent lengths, the first connecting arm is connected between the first connecting end and the moving end through a flexible hinge, the second connecting arm is connected between the second connecting end and the moving end through a flexible hinge, the third connecting arm is connected between the second connecting end and the fixed end through a flexible hinge, and the fourth connecting arm is connected between the first connecting end and the fixed end through a flexible hinge; the piezoelectric ceramics are arranged on the two connecting ends, and the structure that the distance between the two connecting ends is changed through the extension and contraction of the piezoelectric ceramics enables the moving end to generate linear displacement perpendicular to the deformation direction.

Optionally, the three-axis piezoelectric ceramic scanning tube is mounted in the objective lens barrel, the fixing bottom plate is fixedly connected with the objective lens barrel, and at least a probe part of the capacitive differential sensor is exposed outwards through the objective lens barrel.

Optionally, the probe is located on a center line of the objective lens barrel in an unstressed free state.

Optionally, the capacitive differential sensor further includes a rotation connection portion, the target member is connected to the rotation connection portion, and the rotation connection portion is fixedly connected to the two sensing members in a manner of limiting relative movement, so that the target member, the rotation connection portion, and the two sensing members are connected to form a structural whole; the structure is integrally configured to enable the target member to rotate around the rotation connection portion to a corresponding balance position when receiving the acting force, and the rotation enables the plate spacing of the two unipolar capacitors to change in an equal and opposite direction, so as to output a differential signal through the differential signal output end.

Optionally, the rotation connecting portion are elastic torsion beams, two ends of the elastic torsion beams are fixed to the two sensing pieces, and the target piece is connected to the middle section of the elastic torsion beams.

Optionally, the resilient torsion beam is integrally formed with the target member.

Optionally, the elastic torsion beam is a metal wire, the target piece is provided with a row of threading holes, and the target piece is connected to the rotary connecting part through a structure that the metal wire sequentially penetrates through each threading hole; or,

the elastic torsion beam is composed of two metal wires, the target piece is provided with two rows of threading holes which are arranged in the same direction, and each metal wire sequentially penetrates through each threading hole in the corresponding row to be connected to the rotary connecting portion through the structure.

Optionally, the target member is supported on the rotation connecting portion, and the rotation connecting portion is in point contact with the target member.

Optionally, the sensing element includes a capacitance sensor and a capacitance shield in insulation connection with the capacitance sensor, and the sensing element forms a corresponding unipolar capacitor with the target element through the capacitance sensor;

the capacitance shield body with the earthing terminal is connected, rotate connecting portion fixed connection on the capacitance shield body of arbitrary response piece, the target piece through the rotation connecting portion and the capacitance shield body that fixed connection is in the same place with the earthing terminal is connected.

Optionally, the two unipolar capacitors have different initial plate distances in an equilibrium position where the target member is not subjected to a force, wherein the initial plate distance of the first unipolar capacitor is larger, and the probe is positioned so that the target member rotates in a direction in which the plate distance of the first unipolar capacitor becomes smaller when receiving the force.

Optionally, the capacitive differential sensor further includes at least one elastic cantilever, the two sensing elements are respectively disposed at two sides of the target element, a first end of each elastic cantilever is connected to the target element, and a second end of each elastic cantilever is fixed to the two sensing elements, so that the target element, the elastic cantilever and the two sensing elements are connected to form a structural whole; the structure is integrally arranged so that the target member moves to a corresponding equilibrium position when receiving the acting force, and the movement causes the plate spacing of the two unipolar capacitors to change in an equal and opposite direction, so as to output a differential signal via the differential signal output terminal.

According to a second aspect of the present invention, there is provided a profile scanning microscope, comprising an optical microscope and the portable profiler according to the first aspect of the present invention, wherein the three-axis piezoelectric ceramic scanning tube of the portable profiler is mounted in an objective lens barrel, and the fixed bottom plate is fixedly connected with the objective lens barrel, and at least a probe part of the capacitive differential sensor is exposed outwards through the objective lens barrel; one objective lens interface of the optical microscope is provided with the objective lens barrel, and the other objective lens interface of the optical microscope is provided with a standard objective lens.

According to a third aspect of the present invention, there is provided a profile scanning system comprising a signal processor, a display, an X-direction drive voltage generator, a Y-direction drive voltage generator, a Z-direction drive voltage generator, and a portable profiler according to the first aspect of the present invention or a profile scanning microscope according to the second aspect of the present invention;

the X-direction driving voltage generator is used for providing driving voltage to a driving voltage input end of the X-direction piezoelectric ceramic driver so as to scan the surface of the tested sample in the X direction through the probe;

the Y-direction driving voltage generator is used for providing driving voltage to a driving voltage input end of the Y-direction piezoelectric ceramic driver so as to scan the surface of the tested sample in the Y direction through the probe;

a differential signal output end of the capacitive differential sensor is correspondingly connected with a differential signal input end of the signal processor so as to output a differential signal generated by the capacitive differential sensor to the signal processor, and a grounding end of the capacitive differential sensor is connected with a ground wire of the signal processor; the signal processor is used for calculating a difference value between a current value and a set value of the differential signal and outputting the difference value as a feedback signal to the Z-direction driving voltage generator;

the Z-direction driving voltage generator is used for generating driving voltage according to the feedback signal and supplying the driving voltage to a driving voltage input end of the Z-direction piezoelectric ceramic driver so as to realize the lifting of the capacitive differential sensor; and the number of the first and second groups,

the display is used for displaying the driving voltage generated by the Z-direction driving voltage generator and representing the surface profile of the tested sample by using the displayed driving voltage.

The inventor of the invention finds that in the prior art, both a contourgraph based on an optical method and a contourgraph based on a contact method have the problems of large volume and inconvenience in carrying due to complex structures. Therefore, the technical task to be achieved or the technical problems to be solved by the present invention are never thought or anticipated by those skilled in the art, and therefore the present invention is a new technical solution.

The portable contourgraph has the beneficial effects that the portable contourgraph realizes the profile scanning of a detected sample by adopting the piezoelectric ceramic scanning tube, and the piezoelectric ceramic scanning tube amplifies the deformation of the piezoelectric ceramic by the flexible amplifying mechanism, so that the miniaturized design can be realized, and the miniaturization of the contourgraph is further realized; in addition, the portable contourgraph replaces an optical lever feedback system with a capacitance differential sensor, so that the cost can be reduced to a greater extent on the basis of ensuring high resolution.

Other features of the present invention and advantages thereof will become apparent from the following detailed description of exemplary embodiments thereof, which proceeds with reference to the accompanying drawings.

Drawings

The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description, serve to explain the principles of the invention.

FIG. 1 is a schematic cross-sectional view of one embodiment of a portable profiler according to the present invention;

FIG. 2 is a schematic front view of the three-axis piezo-ceramic scanning tube of FIG. 1;

FIG. 3a is a schematic structural diagram of the basic structure of the piezoceramic actuator shown in FIG. 2;

FIG. 3b is an equivalent rigid body model of the piezoelectric ceramic actuator of FIG. 3 a;

FIG. 4a is a schematic bottom view of one embodiment of the fixed base plate of FIG. 2;

3 FIG. 3 4 3b 3 is 3a 3 schematic 3 view 3 in 3 step 3 section 3 taken 3 along 3 line 3A 3- 3A 3 of 3 FIG. 3 4 3a 3; 3

FIG. 5 is a schematic top view of an arrangement of an X-direction piezoceramic driver;

FIG. 6 is a schematic top view of one embodiment of the transfer plate of FIG. 2;

FIG. 7 is a schematic top view of an arrangement of a Y-direction piezoceramic driver;

FIG. 8a is a schematic front view of an arrangement of a Z-direction piezoceramic driver;

FIG. 8b is a schematic bottom view of the arrangement of FIG. 8 a;

FIG. 9a is a schematic diagram of a single parallelogram flexure mechanism;

FIG. 9b is a schematic structural view of a double parallelogram flexure mechanism;

FIG. 10 is a schematic diagram of a first embodiment of a see-saw capacitive differential sensor;

FIG. 11 is a schematic diagram of a second embodiment of a see-saw capacitive differential sensor;

FIG. 12 is a schematic diagram of a third embodiment of a see-saw capacitive differential sensor;

FIG. 13 is a schematic structural diagram of a fourth embodiment of a see-saw capacitive differential sensor;

FIG. 14a is a schematic top view of one embodiment of the sensing element of FIGS. 11-14;

3 FIG. 3 14 3b 3 is 3a 3 schematic 3 cross 3- 3 sectional 3 view 3 taken 3 along 3 line 3A 3- 3A 3 of 3 the 3 sensing 3 element 3 of 3 FIG. 3 15 3a 3; 3

FIG. 15 is a schematic structural view of an embodiment in which the object member and the rotation connecting portion are integrally formed;

FIG. 16 is a schematic structural view of a second embodiment in which the object member and the rotation connecting portion are integrally formed;

FIG. 17 is a schematic view of an embodiment in which the target member and the rotation joint portion are separately formed;

FIG. 18 is a schematic structural view of a second embodiment in which the target member and the rotary joint portion are separately formed;

FIG. 19 is a schematic structural view of a third embodiment in which the object member and the rotation coupling portion are separately formed;

FIG. 20 is an exploded view of a fixed structure in which two sensing elements and a rotating coupling portion are fixed relative to each other;

FIG. 21 is a schematic structural diagram of one embodiment of a translating capacitive differential sensor;

FIG. 22 is a block schematic diagram of one embodiment of a profile scanning system according to the present invention.

Description of reference numerals:

CDS-capacitive differential sensor; PCS-piezoelectric ceramic driver;

a PCCX-X direction piezoelectric ceramic driver; PCSY-Y direction piezoelectric ceramic driver;

a PCSZ-Z direction piezoelectric ceramic driver; SA-structural integrity;

1-target part; 101. 102-a threading hole;

2-a probe; 3. 3a, 3 b-a sensing member;

302-a capacitive shield; 303-an insulating body;

3031-an insulating ring; 301a, 301 b-capacitive sensor;

4-a clamp reservation part; 5. 5a, 5b, 5 c-a rotational connection;

501 a-elastic torsion beam; 502 a-twist beam mounts;

5021 a-connecting through hole; 501b, 502 b-metal lines;

6-a spacer; 601-connecting vias;

c1 — first unipolar capacitance; c2 — second unipolar capacitance;

701. 701X, 701Y and 701Z-fixed ends; 702. 702X, 702Y, 702Z-motion end;

703-a connection end; 704-a linker arm;

705-bearing plate; 706-piezoelectric ceramics;

708-lightening holes; 7011. 7022, 7023-threaded holes;

7021. 7012, 7013-counter bore; 707-a flexible hinge;

8-fixing the bottom plate; 801-a backplane body;

802-threaded hole; 803-a step portion;

804-counter bore; 9-a patch panel;

901-an adapter plate body; 902. 903-a threaded hole;

10-a housing; s-a sensing member;

m-target part; a-a resilient cantilever;

t-mounting the sleeve; p1-spacer;

u2-signal processor; u3-display;

a U1X-X direction driving voltage generator; a U1Y-Y direction driving voltage generator;

a voltage generator driven in the U1Z-Z direction; LG-ground;

LOUT +, LOUT-: and a differential signal output terminal.

Detailed Description

Various exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that: the relative arrangement of the components and steps, the numerical expressions and numerical values set forth in these embodiments do not limit the scope of the present invention unless specifically stated otherwise.

The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way intended to limit the invention, its application, or uses.

Techniques, methods, and apparatus known to those of ordinary skill in the relevant art may not be discussed in detail but are intended to be part of the specification where appropriate.

In all examples shown and discussed herein, any particular value should be construed as merely illustrative, and not limiting. Thus, other examples of the exemplary embodiments may have different values.

It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, further discussion thereof is not required in subsequent figures.

The invention provides a portable contourgraph, aiming at solving the problems of complex structure, large volume and inconvenience in carrying existing in the conventional contourgraph, wherein the portable contourgraph is provided, does not need to be provided with a complex optical structure, realizes high-resolution contour scanning through a mechanical structure, and can realize volume compression through miniaturization design of the mechanical structure, such as compression to the size of a standard objective lens, even smaller, so as to realize portable design.

FIG. 1 is a schematic cross-sectional view of one embodiment of a portable profiler according to the present invention. Fig. 2 is a schematic front view of the three-axis piezoceramic scanning tube of fig. 1.

Referring to fig. 1 and 2, the portable profiler of the present invention includes a capacitive differential sensor CDS and a three-axis piezo ceramic scanning tube including three piezo ceramic drivers PCS, wherein the three piezo ceramic drivers PCS are respectively an X-direction piezo ceramic driver PCSX, a Y-direction piezo ceramic driver PCSY, and a Z-direction piezo ceramic driver PCSZ, and the X-direction, the Y-direction, and the Z-direction are orthogonal to each other.

Each piezoelectric ceramic driver PCS comprises a flexible amplifying mechanism, piezoelectric ceramics arranged on the flexible amplifying mechanism and a driving voltage input end led out by the piezoelectric ceramics, wherein the flexible amplifying mechanism is a mechanical amplifying structure realized by a flexible hinge.

The flexible hinge can be a uniaxial flexible hinge such as a straight beam type, a straight circle type, an elliptic type, a hyperbolic type, a parabolic type, a V type, a cycloidal type and the like, in particular to various types of uniaxial symmetric flexible hinges.

In order to improve the overall structural strength of the flexible amplifying mechanism, the flexible amplifying mechanism can be integrally formed by the base material, i.e. the flexible hinge is directly processed on the base material, for example, the flexible hinge is formed by performing electric discharge machining on the base material. Since the flexible hinge operates by elastic deformation of the material, the elastic recovery performance and rigidity of the material will determine the quality of the flexible hinge, and the whole substrate or at least the part forming the flexible hinge can be made of platinum bronze based on performance considerations, while the whole substrate can be made of 45 # steel based on cost performance considerations.

The flexible amplification mechanism has a fixed end and a moving end, and is configured such that the moving end generates a linear displacement that amplifies the deformation of the piezoelectric ceramic.

The three piezoelectric ceramic drivers PCS are connected in series to scan the surface profile of the sample to be measured, specifically: the fixed end of the X-direction piezoelectric ceramic driver PCSX is fixedly connected with the fixed baseplate 8, the fixed baseplate 8 can be fixedly connected on the inner wall of the shell 10, and the X-direction piezoelectric ceramic driver PCSX is arranged in a direction that causes the corresponding moving end to generate linear displacement along the X-direction; the fixed end of the Y-direction piezoelectric ceramic driver PCSY is fixedly connected with the moving end of the X-direction piezoelectric ceramic driver PCSY, and the Y-direction piezoelectric ceramic driver is arranged in a direction which enables the corresponding moving end to generate linear displacement along the Y direction so as to realize superposition of movement in the X direction and the Y direction; the fixed end of the Z-direction piezoelectric ceramic driver PCSZ is fixedly connected with the moving end of the Y-direction piezoelectric ceramic driver PCSY, and the Z-direction piezoelectric ceramic driver is arranged in a direction that the corresponding moving end generates linear displacement along the Z direction so as to realize superposition of movement in the X direction, the Y direction and the Z direction.

Because the capacitance differential sensor can realize micron-sized resolution by limiting the distance between the polar plates, the contourgraph adopts the capacitance differential sensor to replace an optical lever feedback system to realize high resolution and low-cost design.

The CDS comprises a differential signal output end, a grounding end, a target part, a probe and two sensing parts, wherein the target part is connected with the grounding end, the probe is fixedly connected with the target part along the Z direction so as to be in contact with the contour surface of a tested sample through the probe and transfer acting force generated by the contact to the target part; the two induction pieces are correspondingly connected with the differential signal output end and respectively form a single-pole capacitor with the target piece; the capacitive differential sensor is arranged to: the distance between the polar plates of the two unipolar capacitors is changed in an equal and opposite direction according to the acting force so as to output a differential signal through the differential signal output end.

This electric capacity differential sensor CDS passes through two response pieces and Z direction piezoceramics driver PCSZ's motion end fixed connection, like this, when the sample that is surveyed bears on the X, Y planes, alright drive the probe through X direction and Y direction motion and scan to the surface of the sample that is surveyed to through Z direction motion drive electric capacity differential sensor CDS, and then drive the probe and remove in the direction of the sample that is surveyed of perpendicular to, and then change the size of effort, realize the feedback of Z direction displacement.

The working principle of the profiler of the invention will now be described by taking the constant force mode as an example: a signal value of an output signal of the capacitance differential sensor CDS is set as a pre-selected set value. And (3) carrying the tested sample on the X, Y plane, and enabling the probe to be in contact with the tested sample, wherein the contact point is a 0 coordinate point on the selected X, Y plane. The scanning of the probe on the surface of the tested sample on the X, Y plane is realized by outputting driving voltage to the driving voltage input ends of the piezoelectric ceramic drivers in the X direction and the Y direction. When the piezoelectric ceramics in the X direction and the Y direction scan the surface of the measured sample on the X, Y plane, the surface of the measured sample is rough and uneven, so that the acting force between the probe and the measured sample is changed, and the signal value of the output signal of the CDS of the capacitive differential sensor is changed. And (3) making a difference between a signal value measured in real time by the capacitance differential sensor CDS and a set value, and driving the piezoelectric ceramic of the Z-direction piezoelectric ceramic driver PCSZ by using the difference as a feedback signal through signal processing, so that the lifting of the capacitance differential sensor CDS relative to the measured sample is realized until the signal value measured in real time is equal to the set value. In this way, the surface profile of the sample under test can be characterized by the driving voltage supplied to the Z-direction piezoceramic driver PCSZ.

The three piezoelectric ceramic drivers PCS and the capacitive differential sensor CDS may be disposed in the housing 10 to protect the structures through the housing 10, but at least the probe portion of the capacitive differential sensor CDS should be exposed to the outside through the housing 10 during operation to scan the sample to be measured, for this purpose, one end of the housing 10 corresponding to the capacitive differential sensor CDS is open, and an outer cover adapted to the housing 10 to close the opening during non-operation to prevent the internal structure from being polluted by the external environment is disposed, for example, the housing 10 is in threaded fit connection with the outer cover.

In order to facilitate the use of the portable profiler of the present invention in combination with an optical microscope, the housing 10 may be an objective lens barrel, as shown in fig. 1, so that the profiler is mounted on an objective lens interface of the optical microscope via the objective lens barrel, thereby directly forming a profile scanning microscope. The advantage of forming a scanning contour microscope for contour scanning is that the surface of the sample to be measured can be observed first through the standard objective of the optical microscope, and the area in which the surface contour needs to be further studied by the profiler can be determined, so that the surface contour of the determined area can be observed more finely by the profiler connected to the objective interface. In this case, at least parts of the optical microscope, the portable profiler and the standard objective of the scanning contour microscope can be separated from one another in the non-use state.

For embodiments employing an objective lens barrel as the housing 10, the probe may be located on the centerline of the objective lens barrel in an unstressed free state to improve the balance and symmetry of the structure.

Fig. 3a is a schematic structural diagram of a basic structure of a piezoelectric ceramic driver PCS. Fig. 3b is an equivalent rigid body model of the piezoelectric ceramic driver PCS shown in fig. 3 a.

As shown in fig. 3a and 3b, the piezoceramic driver PCS comprises a flexible amplification mechanism and a piezoceramic 706, the equivalent lengths (i.e. the lengths of the corresponding parts of the equivalent rigid body model) of the fixed end 701 and the moving end 702 of the flexible amplification mechanism are equal, the flexible amplification mechanism further comprises four connecting arms 704 with equal equivalent lengths and two connecting ends 703 with equal equivalent lengths.

The first link arm 704 is connected between the first connection end 703 and the moving end 702 through a flexible hinge 707, the second link arm 704 is connected between the second connection end 703 and the moving end 702 through a flexible hinge 707, the third link arm 704 is connected between the second connection end 703 and the fixed end 701 through a flexible hinge 707, and the fourth link arm 704 is connected between the first connection end 703 and the fixed end 701 through a flexible hinge 707, thereby forming a symmetrical structure as shown in fig. 3 b. According to the structure of the flexible amplifying mechanism, when the two opposite connecting ends 703 move towards each other, the moving end 702 moves the relatively fixed end 701 to the left side in fig. 3b, and when the two opposite connecting ends 703 move away from each other, the moving end 702 moves the relatively fixed end 701 to the right side in fig. 3 b. Therefore, the piezoelectric ceramic 706 is mounted on the two connection ends 703, so that the piezoelectric ceramic 706 can be controlled to stretch by the driving voltage, and further, the structure of the distance between the two connection ends 703 is changed, so that the moving end 702 generates linear displacement perpendicular to the deformation direction, and the deformation is amplified.

The embodiment shown in figure 3a provides an alternative mounting structure for the mounting of piezoelectric ceramic 706. Specifically, the flexible amplification mechanism is provided with two bearing plates 705, one end of the piezoelectric ceramic 706 is supported and fixedly connected to one bearing plate 705 to fix the piezoelectric ceramic relative to the flexible amplification mechanism, and the other end of the piezoelectric ceramic 706 is supported on the other bearing plate 705 and abuts against the end face of the other bearing plate 705 in the self deformation direction, so that the piezoelectric ceramic 706 can push the other bearing plate 705 to move when being extended. In practical use, a certain voltage can be applied to the piezoelectric ceramic of the piezoelectric ceramic driver PCS in a non-working state, so that the flexible mechanism is pre-deformed. The mounting structure can also be used in conjunction with other flexible amplification mechanisms.

In the embodiment shown in fig. 3a, one of the bearing plates 705 is fixedly connected to the first connecting end 703, and the other bearing plate 705 is fixedly connected to the second connecting end 703.

In addition, to improve the dynamic performance of the flexible amplifying mechanism, lightening holes 708 may be provided on at least a portion of the flexible amplifying mechanism, such as the connecting arm 704, the connecting end 703, the fixed end 701, and the moving end 702.

Fig. 9a and 9b show two alternative flexile amplification mechanisms, namely a single parallelogram flexure mechanism and a double parallelogram flexure mechanism. The flexible amplification mechanism shown in fig. 3a and 3b has the advantage of decoupling output displacement compared with the single parallelogram flexible mechanism shown in fig. 9a, and has the advantage of large output range compared with the double parallelogram flexible mechanism shown in fig. 9 b.

The components of the contourgraph can be fixedly connected through fasteners such as screws, and can also be fixedly connected through welding, bonding and other means.

Fig. 4a and 4b are schematic structural diagrams of an embodiment of the fixed base plate 8, in which the fixed base plate 8 is fixedly connected to the housing 10 and the X-direction piezoceramic driver PCSX by screws.

As shown in fig. 4a and 4b, the fixing base plate 8 includes a base plate body 801 and a threaded hole 802 formed in the base plate body 801 along the Z direction, so that a screw can be inserted into the housing 10 through the through hole or the counter bore of the housing 10 to engage with the corresponding threaded hole 802 by providing the through hole or the counter bore corresponding to the threaded hole 802 on the wall of the housing 10, thereby fixing the fixing base plate 8 in the housing 10.

A step 803 is formed at a portion of the bottom plate body 801 connected to the fixed end of the X-direction piezoelectric ceramic driver PCSX, so as to ensure that the moving end of the X-direction piezoelectric ceramic driver PCSX can move freely in the X-direction. The step 803 may be replaced by a separate spacer.

The fixed baseplate 8 further comprises a counter bore 804 penetrating through the baseplate body 801 along the Z direction at the step 803, so that the fixed end of the X-direction piezoelectric ceramic driver PCSX can be fixedly connected to the fixed baseplate 8 through a screw by setting a threaded hole corresponding to the counter bore 804 on the fixed end of the X-direction piezoelectric ceramic driver PCSX.

For the embodiment in which the housing 10 is an objective lens barrel, the bottom plate body 801 may be a circle having a shape consistent with the objective lens barrel, and for example, four threaded holes 802 are formed on a circumference of the circle centered on the center of the bottom plate body 801, and a step 803 and two counter bores 804 are formed on the outer peripheries of the four threaded holes 802.

Fig. 5 shows an alternative arrangement of the X-direction piezoceramic actuator PCSX, which is adapted to the fastening arrangement of the fastening base 8 of fig. 4a and 4 b.

As shown in fig. 5, the fixed end 701X of the X-direction piezoceramic driver PCSX is provided with threaded holes 7011 corresponding to the counter bores 804 one by one, so that the screws pass through the counter bores 804 to be connected with the corresponding threaded holes 7011, and the fixed connection between the two can be realized.

In the embodiment shown in fig. 5, the moving end 702X of the X-direction piezoceramic driver PCSY is provided with a counter bore 7021 to facilitate connection with the fixed end of the Y-direction piezoceramic driver PCSY.

In order to reduce the dimensions of the profiler in the X, Y plane, an adapter plate may be provided for the fixed connection between the moving end 702 of the X-direction piezoceramic driver PCSX and the fixed end 701 of the Y-direction piezoceramic driver PCSY. Thus, by designing the adapter plate, the X-direction and Y-direction piezoelectric ceramic drivers can be substantially aligned in the Z-direction, and thus occupy substantially the same spatial dimension in the X, Y plane, for example, the adapter plate can deflect the fixed end 701 of the Y-direction piezoelectric ceramic driver PCSY by 90 degrees with respect to the moving end 702 of the X-direction piezoelectric ceramic driver PCSX.

Fig. 6 is a schematic top view of an embodiment of the adapter plate 9.

As shown in fig. 6, the interposer 9 includes an interposer body 901, the interposer body 901 is substantially in a quarter-arc shape, and the interposer 9 is provided with threaded holes 902 configured to correspond to the counter bores 7021 on the interposer body 901, so that the fixed connection between the interposer 9 and the moving end 702X of the X-direction piezoelectric ceramic driver PCSX can be realized by passing screws through the counter bores 7021 to match with the corresponding threaded holes 902. The adapter plate 9 is further provided with a threaded hole 903 on the adapter plate body 901, so that the adapter plate 9 is fixedly connected with the fixed end of the Y-direction piezoelectric ceramic driver PCSY by using the threaded hole 903. The threaded hole 903 is deflected by 90 degrees with respect to the threaded hole 902 to effect deflection of the fixed end of the Y-direction piezoelectric ceramic driver PCSY with respect to the moving end of the X-direction piezoelectric ceramic driver PCSX.

Fig. 7 shows an alternative arrangement of the Y-direction piezoceramic driver PCSY which is adapted to the fastening structure of the adapter plate 9 from fig. 6.

As shown in fig. 7, the fixed end 701Y of the Y-direction piezoelectric ceramic driver PCSY is provided with counter bores 7012 corresponding to the threaded holes 903 in a one-to-one manner, so that screws penetrate through the counter bores 7012 to be connected with the corresponding threaded holes 903 in a matching manner, and the fixed connection between the two can be realized.

In the embodiment shown in fig. 5, a screw hole 7022 is provided in the moving end 702Y of the Y-direction piezoelectric ceramic driver PCSY to facilitate connection with the fixed end of the Z-direction piezoelectric ceramic driver PCSZ.

Fig. 8a and 8b show an alternative arrangement of the Z-direction piezoceramic actuator PCSZ, which is adapted to the holding structure of the Y-direction piezoceramic actuator PCSY of fig. 7.

As shown in fig. 8a and 8b, the fixing end 701Z of the Z-direction piezoceramic driver PCSZ is provided with counter bores 7013 corresponding to the threaded holes 7022 one by one, so that the screws penetrate through the counter bores 7013 to be connected with the corresponding threaded holes 8022 in a matching manner, and the fixed connection between the two can be realized.

In the embodiment shown in fig. 8a and 8b, a screw hole 7023 is provided on the moving end 702Z of the Z-direction piezoceramic driver PCSZ to facilitate connection with the capacitive differential sensor CDS, that is, a counter bore corresponding to the screw hole 7023 is provided on the sensing element or the component fixed relative to the sensing element of the capacitive differential sensor CDS, so that the sensing element and the component fixed relative to the sensing element are fixed by screws passing through the counter bore to be in fit connection with the corresponding screw hole 7023.

FIG. 10 is a schematic diagram of an embodiment of a capacitive differential sensor.

According to fig. 10, the capacitive differential sensor is a see-saw capacitive differential sensor, which uses a double-monopole capacitive differential structure to perform measurement, so as to improve the common-mode interference resistance of the sensor. The double unipolar capacitive differential structure comprises a target element 1, two inductive elements 3 (respectively designated 3a, 3b) and a rotary joint 5.

Target member 1 is connected on rotating connecting portion 5 to form single wane structure or two wane structures, wherein, single wane is for rotating connecting portion 5 and being located the structure of 1 one end of target member, and two wanes are for rotating connecting portion 5 and being located the structure in the middle of target member 1. The connection of the target 1 by the rotary joint 5: the gap between the two induction pieces 3a and 3b is kept to form a single-pole capacitor, the balance position in a non-stressed state is kept, the freedom degree of movement of the relative rotation connecting part 5 is limited to rotation around the rotation connecting part 5, and accordingly the target piece 1 can realize seesaw movement when acting force is applied.

The sensor further comprises a probe 2, wherein the probe 2 is fixedly connected to the target part 1 along the Z direction so as to transmit acting force capable of generating torque to the target part 1 when contacting the surface of a tested sample, and then the target part 1 generates seesaw motion.

In the double-monopole capacitor differential structure, the target part and one induction part 3a form a first monopole capacitor, and the other induction part 3b forms a second monopole capacitor, when the target part 1 rotates around the rotation connection part 5 under the action force, the plate distance of the first monopole capacitor (namely the distance between the target part and one induction part) and the plate distance of the second monopole capacitor (namely the distance between the target part and the other induction part) are set to be changed oppositely, and the change amounts are the same, so that a differential signal representing the action force and/or the plate displacement corresponding to the action force is output through the double-monopole capacitor differential structure. The design of outputting the differential signal through the wane type structure can greatly simplify the structure of the sensor, and further reduce the production and manufacturing cost of the sensor.

In order to output differential signals, the two sensing elements 3a and 3b should be connected to the differential signal output terminals of the sensor, which may be leads or pins, respectively, and the target element 1 should be connected to the ground terminal of the sensor, which may also be leads or pins, respectively, and the two differential signal output terminals are connected to the two differential signal input terminals of the signal processor U2, respectively, during measurement, and the ground terminal is directly connected to the ground line of the signal processor U2.

Here, the target member 1 may be electrically connected to the ground terminal through the adjacent member without configuring a specific wire for the target member 1, which may greatly reduce the volume and weight of the target member 1 as a moving member and thus improve the dynamic performance of the sensor. The rotation connecting part 5 is fixedly connected with the two sensing parts 3a and 3b in a relative movement limiting manner, so that the target part 1, the rotation connecting part 5 and the two sensing parts 3a and 3b are connected to form a structural whole SA. The 'relative movement restriction' means that the rotary connecting part 5 can only transmit torsion relative to the two sensing parts 3a and 3b at most when the target part 1 receives acting force, so as to drive the connected target part 1 to rotate around the torsion center, but cannot translate relative to the two sensing parts 3a and 3b, so that the change of the distance between the polar plates caused by the translation of the target part 1 is restricted. The limitation is only carried out within the calibrated range, in other words, according to different limiting structures, the limitation may be disabled by the action force exceeding the range.

The role of this limitation is reflected in: for capacitive sensors used in the field of micromanipulation, the initial plate spacing of the unipolar capacitance is very small, typically in the order of microns, to achieve higher resolution, which already limits the range of the sensor (i.e. the maximum force that can be measured accurately), for example, to achieve a force resolution of 0.2nN to 1 μ N, the corresponding initial plate spacing is 6 μm to 500 μm, and the corresponding range is limited to 30 μ N to 200 mN. If the freedom of movement of the rotary joint 5 relative to the two sensing elements 3a, 3b (including when the target 1 is acted upon by an acting force) is not limited, such movement will further cause loss of range on the one hand, which in turn will result in a sensor with a smaller range or even an improper use, and on the other hand will result in a part of the acting force being converted into translation of the target, rather than all being converted into rotation of the target, which in turn will affect the strength of the differential signal generated.

The problem of the mutual restriction between the resolution and the range, which is described above, will limit the application of the high resolution sensor in the case of wide-range profile scanning. Therefore, in order to fundamentally solve the problem of mutual restriction, the invention further improves the structure of the double-monopole differential capacitor, specifically: the initial plate spacing of the first unipolar capacitor C1 is set to be greater than the initial plate spacing of the second unipolar capacitor C2, and the sensitivity/resolution of the sensor is determined by the initial plate spacing of the second electrode capacitor C2, and the span of the sensor is determined by the initial plate spacing of the first electrode capacitor C1. This is embodied in that the object 1, when a force in a specific direction is applied, will rotate around the rotation connection 5 in such a direction that the plate pitch of the first unipolar capacitor C1 decreases and the plate pitch of the second unipolar capacitor C2 increases, and therefore the initial plate pitch of the second unipolar capacitor C2 can be set small enough to obtain a very high initial sensitivity, while the sensor can have a relatively large range while obtaining a high sensitivity due to the relatively large initial plate pitch of the first unipolar capacitor C1. Specifically, taking the example that the initial plate distance of the first unipolar capacitor C1 is three times that of the second unipolar capacitor C2, compared with the structure of the double unipolar differential capacitor with the same plate distance, the range of the sensor of the present invention is twice as large under the same sensitivity, and the sensitivity of the sensor of the present invention is eight times higher under the same range, so that the advantage is very obvious.

Fig. 11 is a schematic diagram of an embodiment of two unipolar capacitors with unequal initial plate spacings.

According to fig. 11, the sensor comprises a target member 1, a probe 2 and two sensing members 3, the two sensing members 3 being respectively designated as sensing members 3a, 3 b. The target member 1 is connected to and supported by the rotary connecting portion 5 to form a double-seesaw structure. The inductors 3a and 3b are respectively arranged on two sides of the rotary connecting part 5 and located on the same side of the target element 1, the inductor 3a and the target element 1 form a first single-pole capacitor C1, the inductor 3b and the target element 1 form a second single-pole capacitor C2, and the initial plate spacing of the first single-pole capacitor C1 is greater than that of the second single-pole capacitor C2. The rotating connecting part 5 and the two sensing parts 3 are relatively fixed, and then the rotating connecting part 5, the two sensing parts 3 and the target part 1 are connected to form a structural whole SA.

The probe 2 is arranged to receive a force and transmit the force to the target member 1 to generate a torque capable of rotating the target member 1 about the rotation connection 5. Therefore, the probe 2 should be fixedly connected to the target 1, and here, the probe 2 may be integrally formed with the target 1, or may be separately formed and fixedly connected to the target 1 by means of bonding, ultrasonic welding, or the like.

In order to achieve a rotation of the target object 1 about the rotation connection 5 in a direction such that the plate spacing of the first unipolar capacitor C1 decreases and the plate spacing of the second unipolar capacitor C2 increases, the probe 2 is arranged in the embodiment shown in fig. 11 on the side of the target object 1 corresponding to the inductor 3a, such that the probe 2, upon receiving a repulsive force, drives the target object 1 in a direction such that the plate spacing of the first unipolar capacitor C1 decreases, corresponding to the counterclockwise direction in fig. 11.

Fig. 12 is a schematic diagram of a second embodiment of two unipolar capacitors with unequal initial plate spacings.

According to fig. 12, the object 1 is connected to and supported by the rotation connection part 5, forming a single seesaw structure. The sensing pieces 3a and 3b are respectively arranged at two sides of the target piece 1, the sensing piece 3a and the target piece 1 form a first single-pole capacitor C1, and the sensing piece 3b and the target piece 1 form a second single-pole capacitor C2. The rotating connecting part 5 and the two sensing parts 3 are relatively fixed, and then the rotating connecting part 5, the two sensing parts 3 and the target part 1 are connected to form a structural whole SA.

In order to achieve a rotation of the target object 1 about the rotation connection 5 in a direction such that the plate spacing of the first unipolar capacitor C1 decreases and the plate spacing of the second unipolar capacitor C2 increases, the probe 2 is arranged in the embodiment shown in fig. 12 on the surface of the target object 1 facing the inductor 3b, such that the probe 2, upon receiving a repulsive force, drives the target object 1 in a direction such that the plate spacing of the first unipolar capacitor C1 decreases, corresponding to the counterclockwise direction in fig. 12.

The capacitive differential sensor CDS of the present invention may further include two other sensing elements 3, and the two other sensing elements 3 are also fixed relative to the rotation connecting portion 5, so as to connect the rotation connecting portion 5, the target element 3 and the two other sensing elements 3 to form another structural whole, i.e. the target element 1 and the two other sensing elements 3 also form the dual unipolar capacitive differential structure as described above. For this purpose, the target member 1 and the rotation connection portion 5 should adopt a double-see-saw structure as shown in fig. 10 and 11, so that the target member 1 forms a double-monopole capacitance differential structure with two sensing members located at one side of the target member and another double-monopole capacitance differential structure with two sensing members located at the other side of the target member, or the target member 1 forms a double-monopole capacitance differential structure with two sensing members located at one side of the rotation connection portion 5 and another double-monopole capacitance differential structure with two sensing members located at the other side of the rotation connection portion 5. Thus, when the probe 2 is applied with a force, the CDS of the sensor of the present invention generates two pairs of differential signals, and outputs the two pairs of differential signals to the signal processor in a superimposed manner, so as to further improve the reliability and the common-mode interference resistance of the sensor of the present invention.

Fig. 13 is a schematic structural diagram of an embodiment in which two structural entities are formed and the initial plate pitches of two unipolar capacitors are different.

According to fig. 13, the capacitive differential sensor is based on the embodiment shown in fig. 10 and 11 and comprises two further sensing elements, which are still designated 3a, 3b, i.e. in this embodiment the sensor has two sensing elements 3a and two sensing elements 3b, wherein one sensing element 3a and one sensing element 3b are arranged on both sides of the rotation connection portion 5 on one side of the target 2, and the other sensing element 3a and the other sensing element 3b are arranged on both sides of the rotation connection portion 5 on the other side of the target 2, and the two sensing elements 3a are located on different sides of the rotation connection portion 5 and the two sensing elements 3b are located on different sides of the rotation connection portion 5.

On the basis, each of the sensing elements 3a forms a first unipolar capacitor C1 with the target device 2, each of the sensing elements 3b forms a second unipolar capacitor C2 with the target device 2, and each of the first unipolar capacitors C1 may form a dual unipolar capacitor differential structure with any one of the second unipolar capacitors C2, thereby outputting a differential signal. In order to achieve the superposition of the differential signals, the two further inductive elements 3a, 3b should also be connected to the differential signal output, i.e. the two inductive elements 3a corresponding to the first unipolar capacitor C1 are connected to the positive output of the differential signal output, and the two inductive elements 3b corresponding to the second unipolar capacitor C2 are connected to the negative output of the differential signal output.

In order to achieve a rotation of the target object 1 about the rotation connection 5 in a direction such that the plate spacing of the first unipolar capacitor C1 decreases and the plate spacing of the second unipolar capacitor C2 increases, the probe 2 is arranged in the embodiment shown in fig. 13 on the surface of the target object 1 facing the inductor 3b, such that the probe 2, upon receiving a repulsive force, drives the target object 1 in a direction such that the plate spacing of the first unipolar capacitor C1 decreases, corresponding to the counterclockwise direction in fig. 13.

In addition, for a sensor having four sensing elements 3 like the embodiment shown in fig. 13, the first unipolar capacitor and the second unipolar capacitor can be formed by two sensing elements with the target element 2, and an electrostatic driver can be formed by two other sensing elements each with the target element 2, that is, the other two sensing elements are used as electrostatic driving electrodes, which requires connecting the other two sensing elements with the bias voltage input terminals of the sensor. Thus, when the acting force disappears (when the corresponding object to be measured is removed), the two electrostatic drivers will generate electrostatic force by applying bias voltage to the other two sensing elements relative to the target 2, and the electrostatic force generated by the two electrostatic drivers will generate torques with opposite directions and same magnitude for the target 2, so that the target 2 can be rapidly reset to the balance position without force under the action of the electrostatic force. This shows that this structure can effectively increase the response speed of the target member 1 so that the response characteristics thereof do not depend on the mechanical characteristics of the member itself.

With reference to the embodiments shown in fig. 11 to 13, by providing the first unipolar capacitor C1 and the second unipolar capacitor C2 with the same initial plate pitch, other embodiments of the capacitive differential sensor CDS of the present invention can be directly obtained, and for each embodiment with the same initial plate pitch, there will be no need to limit the installation position of the probe 2 according to the direction of the applied force.

In order to improve the anti-interference capability of the sensor, the sensing element 3 may include a capacitive shield and a capacitive inductor used as an electrode plate, so as to form the single-pole capacitor with the target element 2 through the capacitive inductor, and connect the capacitive shield with the ground terminal, thereby achieving the shielding effect. On this basis, can be with rotating connecting portion 5 fixed connection on the electric capacity shield of arbitrary response piece 3, like this, target 1 just can conveniently be connected with the ground terminal through interconnect's rotation connecting portion 5 and electric capacity shield.

This electric capacity shield can integrated into one piece with the electric capacity inductor, also can the shaping alone combine again, lies in the electric capacity shield that can share of two response pieces 3a, 3b of target 2 with one side moreover.

Taking the capacitive shield and the capacitive sensor of the sensor 3 as an example, the main material of the sensor 3 may be a conductor or an insulator, and if the main material is a conductor, such as copper or aluminum, the surfaces of the capacitive shield and the capacitive sensor need to be insulated to prevent the capacitive sensor and the capacitive shield from directly contacting each other. The surface insulation treatment may be performed by, for example, adhering a plastic film, an insulating rubber, or a resin to the surface of the conductor, magnetron sputtering, thermal evaporation, or atomic deposition of an oxide layer. If the main body material is an insulator, such as ceramic, glass, printed circuit board and the like, partial surface of the main body needs to be subjected to conductor processing to form a corresponding capacitive shield and a corresponding capacitive inductor. Examples of the method of surface conduction treatment include vacuum metal evaporation plating, surface metal layer pasting, and plastic electronic conductor printing.

Fig. 14a and 14b are schematic structural diagrams of an embodiment in which the two inductive elements 3a and 3b share a shield and the main material is an insulator.

As shown in fig. 14a and 14b, the capacitive sensing body 301a of sensing element 3a and the capacitive sensing body 301b of sensing element 3b are disposed on an insulating main body 303, and the sensing elements 3a, 3b share a capacitive shield 302, the capacitive shield 302 being separated from the capacitive sensing bodies 301a, 301b by the insulating main body 303.

The two capacitive sensors 301a, 301b, and the capacitive shield 302 may be formed on the insulating body 303 by metal evaporation plating or printed circuit fabrication methods. Taking a printed circuit manufacturing method as an example, the forming method can include the following steps:

step S1: a metal conductor layer is provided on the entire surface of the insulating body.

Step S2: at the outer peripheries of the positions corresponding to the two capacitance sensors 301a and 301b, the metal material is removed by the printed circuit board manufacturing method to expose the insulating body, and an insulating ring 3031 surrounding the capacitance sensors 301a and 301b is formed, and the remaining metal conductor layer except the capacitance sensors 301a and 301b becomes a capacitance shield 302.

Compared with a machining method, the method is simple to manufacture, easy for mass production and low in cost, and a more complex sensing surface shape can be manufactured.

In the embodiment shown in fig. 14a and 14b, the two capacitive sensors 301a, 301b are substantially rectangular, and the two capacitive sensors 301a, 301b may also be shaped as squares, circles, ellipses, etc.

The target member 1 and the rotation connecting portion 5 may be formed integrally or may be formed separately and assembled together. The probe 2 may be integrally formed as well as the target 1, or may be separately formed and then fixedly connected together by means of bonding, welding, or the like, wherein in the field of precision measurement where the requirement for the radius of the tip of the probe 2 is high, the separately formed structure is preferably used, so that the probe meeting the precision requirement can be separately processed by means of electrochemical corrosion or the like.

Fig. 15 is a schematic structural view of an embodiment in which the target member 1, the rotation connecting portion 5, and the probe 2 are integrally formed.

In the embodiment shown in fig. 15, the rotation connection portion 5 is denoted by 5a, and is in the form of an elastic torsion beam, the torsion beam fixing members 502a are provided at two ends of the elastic torsion beam 5a, the elastic torsion beam 5a is fixed to the two sensing members 3 through the torsion beam fixing members 502a, and the target member 1 is connected to the middle section 501a of the elastic torsion beam 5a (i.e. the portion located between the two torsion beam fixing members 502 a) to form a double-tilted plate structure, so that the target member 1 can rotate by using the torsion action of the elastic torsion beam 5a when the target member 1 is stressed.

The above-mentioned make the fixed structure in elasticity twist beam 5a both ends realize the restriction of restriction relative movement more easily than the cantilever structure of single-end fixed, because to the twist beam of the same material, under the same circumstances of effort, the deflection of cantilever structure will be 64 times of the deflection of both ends fixed knot structure, therefore, adopt the fixed structure in both ends to change easily and realize this kind of restriction in the range through the selection to elasticity twist beam material.

As shown in fig. 15, the target member 1, the rotation connecting portion (or, referred to as an elastic torsion beam) 5a and the probe 2 are integrally formed metal thin plates, which can be processed by wire cutting. After the probe 2 is subjected to the wire cutting process, the probe can be perpendicular to the target 1 (perpendicular to the paper surface and outward) through a special fixture, so that a force capable of generating torque is transmitted to the target through contact with a measured object. For the stepped target part in the embodiment shown in fig. 11, 11 and 13, this is done by stamping after wire cutting.

Here, on the premise of satisfying the connection action of the elastic torsion beam 5a to the target member 1, the connection length between the target member 1 and the elastic torsion beam 5a can be reduced as much as possible to improve the dynamic performance of the target member 1. In addition, the dynamic performance of the target 1 can also be improved by reducing the size of the target 1 and thus reducing the weight of the target 1.

Fig. 16 is a schematic structural view of the second embodiment in which the target member 1, the rotation connecting portion 5, and the probe are integrally formed.

According to fig. 16, one of the main differences between this embodiment and the embodiment of fig. 15 is that this embodiment is a target corresponding to a single rocker structure, i.e. the target 1 is located on one side of the spring torsion beam 5 a.

Another major difference between this embodiment and the embodiment shown in fig. 15 is that the sensor of the present invention further includes a jig reserve 4 integrally formed with the target member 1, the jig reserve 4 extending outwardly in parallel through the edge of the target member 1, and the probe 2 formed at the edge of the jig reserve 4 and bent to be perpendicular to the jig reserve 4.

The function of setting up anchor clamps reservation 4 does: since the wire-cut sheet metal is typically warped, this limits the minimum gap that can be formed between the target part 1 and the sensing part 3, thereby affecting the sensitivity of the sensor; and set up anchor clamps reservation 4 at target 1 periphery, then can make the blade act on the part of the corresponding anchor clamps reservation 4 of substrate, and then can add the part of the corresponding target 1 of processing through special fixture through the line cutting to make target 1 level and smooth, so that form littleer clearance between target 1 and response piece 3, improve the sensitivity of sensor.

The structure in which the jig prepared section 4 is provided is also applicable to a sensor which is a double-rocker structure as shown in fig. 15, for example.

Fig. 17 is a schematic structural view of an embodiment in which the target member 1 and the rotation connecting portion 5 are formed separately.

In this embodiment, the rotation connecting portion 5 is denoted by 5b, and is also in the form of an elastic torsion beam, as shown in fig. 17, the elastic torsion beam 5b is a metal wire, and the target member 1 is provided with a row of threading holes 101, that is, all the threading holes 101 are arranged in a straight line, so that the whole SA can connect the target member 1 to the middle position of the elastic torsion beam 5b by a structure that the metal wire sequentially passes through each threading hole 101, so that the target member 1 can rotate by the twisting action of the metal wire when the target member 1 is subjected to a force.

The wire can be pressed at both ends in a straightened state by means of spacers and fixed by means of screws and nuts relative to the inductive element 3, for example on an insulating body of the inductive element 3.

Here, since the wire can be thinner than the elastic torsion beam 5a in the embodiment shown in fig. 15 and 16 and the cross section of the wire is circular, the wire has a smaller torsional rigidity and the sensitivity can be further improved.

Fig. 18 is a schematic structural view of another embodiment in which the target member 1 and the rotation connecting portion 5 are separately formed.

As shown in fig. 18, the main difference between this embodiment and the embodiment shown in fig. 17 is that the elastic torsion beam 5b is two wires, and correspondingly, the target member 1 is provided with two rows of threading holes 101, 102 arranged in the same direction, so that the above-described overall structure SA connects the target member 1 to the elastic torsion beam 5b by a structure in which one wire is sequentially passed through each threading hole 101 and the other wire is sequentially passed through each threading hole 102.

Fig. 19 is a schematic structural view of a third embodiment in which the object 1 is formed separately from the rotation connecting portion 5.

In this embodiment, the rotation connecting portion 5 is denoted by 5c, and as shown in fig. 19, the rotation connecting portion 5c is supported between the sensing member 3 and the target member 1, and is in point contact with the target member 1, and the connection is, for example, bonding, ultrasonic welding, or the like, so that the target member 1 is turned around the rotation connecting portion 5c when receiving a force to achieve rotation of the target member 1, which can achieve higher sensitivity than the above-described structure in which rotation of the target member 1 is achieved by the twisting action of the elastic torsion beams 5a, 5 b.

In the embodiment shown in fig. 19, the rotary connection 5c is designed as a cone or pyramid to achieve a point contact connection with the target part 1.

Fig. 20 is an exploded view of an embodiment of fixing the rotation connecting portion 5a and the sensing member 3 with respect to each other, corresponding to the embodiment shown in fig. 15 and 16.

As shown in fig. 20, a spacer 6 is provided between the torsion beam fixing member 502a of the rotation connecting portion/elastic torsion beam 5a and the sensing member 3 to ensure the distance setting between the sensing member 3 and the target member 1.

This twist beam mounting 502a is provided with connect through-hole 5021a, and isolator 6 is provided with connect through-hole 601 with connect through-hole 5021a aligns, and inductor 3 is provided with the intercommunication through-hole (not shown in the figure) with connect through-hole 5021a aligns in the position of capacitive shield 302 for example, like this, when rotating the reciprocal anchorage between connecting portion 5a and inductor 3, accessible bolt passes connect through-hole 5021a, connect through-hole 601 and the connecting structure that the connect through-hole on inductor 3 and the nut cooperation was locked in proper order, realizes rotating the reciprocal anchorage between connecting portion 5a and inductor 3.

To the structure that the induction pieces 3 are arranged on both sides of the target piece 1, the bolts can sequentially penetrate through the connecting through holes on one induction piece 3, the connecting through hole 601 on one isolation piece 6, the connecting through hole 5021a, the connecting through hole 601 on the other isolation piece 6 and the connecting structure that the connecting through hole on the other induction piece 3 is matched and locked with the nuts, so that the mutual fixation between the rotary connecting part 5a and all the induction pieces 3 is realized.

The above describes an embodiment in which the structural integrity SA is formed by macro-machining, and here, the structural integrity SA may also be formed by micro-machining, including, for example:

step S201: and (3) carrying out first photoetching and KOH etching on the monocrystalline silicon, forming a shallow groove of a few microns on the silicon surface, and defining a bonding region.

And S202, performing second photoetching and KOH etching on the monocrystalline silicon to form another shallow groove on the silicon surface, thereby forming the target part with the step-type structure.

And step S203, diffusing and doping phosphorus or boron on the front surface of the silicon to form a contact region.

Step S204, photoetching and sputtering Ti/Pt/Au metal on the glass to form an electrode serving as a sensing piece.

And S205, in the bonding area, carrying out anodic bonding on the silicon and the glass at 360-380 ℃ and 1000V.

And step S206, chemically thinning the silicon wafer to be dozens of microns thick by using a KOH solution so as to ensure that the torsional rigidity of the structure is small enough.

And step S207, utilizing the inductively coupled plasma for etching, releasing the structural splinters and obtaining the structural integral SA.

The sensor formed by micromachining can realize a smaller inter-plate distance, and thus can form a sensor with extremely high sensitivity.

Fig. 21 is a schematic structural diagram of another embodiment of a capacitive differential sensor of the present invention.

According to fig. 21, the capacitive differential sensor is a translational capacitive differential sensor, which includes a target member M, two sensing members S and at least one elastic cantilever a, a probe is fixedly connected to the target member M, for example, a mounting sleeve T may be disposed on the target member M, wherein the mounting sleeve T has a threaded hole, and a threaded rod is formed at the bottom of the probe, so that the probe and the mounting sleeve T can be reliably and fixedly connected together through a threaded fit connection therebetween.

The two sensing parts S are respectively arranged on two sides of the target part M and respectively form a single-pole capacitor with the target part M, the first end of each elastic cantilever A is connected with the target part M, and the second end of each elastic cantilever A is fixed relative to the two sensing parts S, so that the two sensing parts S, the target part M and all the elastic cantilevers A are connected into a structural whole. This response piece S can be including the capacitance shield body and the capacitance sensor who uses as the polar plate equally, and the capacitance sensor body can be through thin wall hollow connecting piece and capacitance shield body fixed connection for example, but also can set up the storage tank that is used for holding the capacitance sensor body on the capacitance shield body, and then reduces unchangeable electric capacity through reducing the area of contact between capacitance sensor body and the capacitance shield body, improves signal sampling rate and measuring sensitivity. When the second end of the elastic cantilever a is fixedly connected to the two sensing elements S, an alternative connection structure will be described by taking the example of fixedly connecting the second end of the elastic cantilever a to the capacitive shielding body, specifically: the second end of the elastic cantilever A and the capacitor shields of the two sensing pieces S are respectively provided with a spacer P1 to ensure the distance between the capacitor sensor and the target piece M, and the spacer P1, the second end of the elastic cantilever A, the other spacer P1 and the connecting structure of the capacitor shield of the other sensing piece S and the nut are matched and locked by a bolt to sequentially pass through the capacitor shield of the sensing piece S, so that the second end of the elastic cantilever A is fixed relative to the two sensing pieces S. Based on the above structure, the sensor will generate a differential signal when the target member M moves relative to the two sensing members S, specifically: when the target member M moves, the distances between the target member M and the two sensing members S are increased, decreased, and the increased distances are equivalent to the decreased distances, so as to generate a differential signal capable of reflecting the displacement of the target member M and the acting force exerted on the target member M.

FIG. 22 is a block schematic diagram of one implementation of a profile scanning system in accordance with the present invention.

As shown in fig. 22, the contour scanning system includes a signal processor U2, a display U3, an X-direction driving voltage generator U1X, a Y-direction driving voltage generator U1Y, a Z-direction driving voltage generator U1Z, and a portable profiler or a contour scanning microscope according to the present invention.

The X-direction drive voltage generator U1X is configured to supply a drive voltage to a drive voltage input terminal of the X-direction piezoelectric ceramic driver PCSX to scan the surface of the sample to be measured in the X direction via the probe.

The Y-direction drive voltage generator U1Y is configured to supply a drive voltage to a drive voltage input terminal of the Y-direction piezoelectric ceramic driver PCSY to perform Y-direction scanning of the surface of the sample to be measured via the probe.

A differential signal output end of the capacitive differential sensor CDS is correspondingly connected with a differential signal input end of the signal processor U2 so as to output a differential signal generated by the capacitive differential sensor CDS to the signal processor U2, and a ground end of the capacitive differential sensor CDS is connected with a ground wire of the signal processor U2; the signal processor U2 is configured to calculate a difference between a current value and a set value of the differential signal, and output the difference as a feedback signal to the Z-direction drive voltage generator U1Z.

The Z-direction driving voltage generator U1Z is configured to generate a driving voltage according to the feedback signal and provide the driving voltage to the driving voltage input terminal of the Z-direction piezoceramic driver U1Z, so as to realize the lifting of the capacitive differential sensor CDS in the Z direction.

The display U3 is used for displaying the driving voltage generated by the Z-direction driving voltage generator U1Z, and characterizing the surface profile of the sample to be measured by using the displayed driving voltage.

For a see-saw capacitive differential sensor with two electrostatic drivers, the bias voltage input of the sensor may be connected to the bias voltage output of the signal processor U2 to provide a fast reset bias voltage for the sensor U1 via the signal processor U2, or a separate bias voltage generator may be provided to provide the bias voltage and the output of the bias voltage generator controlled by the signal processor U2.

The embodiments in the present description are described in a progressive manner, and the same and similar parts among the embodiments can be referred to each other, each embodiment focuses on the differences from other embodiments, and the embodiments can be used alone or in combination with each other as needed.

Although some specific embodiments of the present invention have been described in detail by way of examples, it should be understood by those skilled in the art that the above examples are for illustrative purposes only and are not intended to limit the scope of the present invention. It will be appreciated by those skilled in the art that modifications may be made to the above embodiments without departing from the scope and spirit of the invention. The scope of the invention is defined by the appended claims.

Claims

1. A portable profiler, comprising:

2. The portable profiler as set forth in claim 1, wherein the three-axis piezo ceramic scanning tube is mounted in an objective lens barrel, the fixed base plate is fixedly connected with the objective lens barrel, and at least a probe portion of the capacitive differential sensor is exposed outward through the objective lens barrel.

3. The portable profiler as set forth in claim 1 or 2, wherein said capacitive differential sensor further comprises a rotating connecting portion, said target member being connected to said rotating connecting portion, said rotating connecting portion being fixedly connected to said two sensing members in a manner restricting relative movement, so as to connect said target member, said rotating connecting portion and said two sensing members to form a structural unit; the structure is integrally configured to enable the target member to rotate around the rotation connection portion to a corresponding balance position when receiving the acting force, and the rotation enables the plate spacing of the two unipolar capacitors to change in an equal and opposite direction, so as to output a differential signal through the differential signal output end.

4. The portable profiler as set forth in claim 3, wherein the rotation connection part is an elastic torsion beam, both ends of the elastic torsion beam are relatively fixed with the two sensing members, and the target member is connected with the middle section of the elastic torsion beam;

the elastic torsion beam is further integrally formed with the target piece; or,

the elastic torsion beam is further provided with a metal wire, the target piece is provided with a row of threading holes, and the target piece is connected to the rotary connecting part through a structure that the metal wire sequentially penetrates through each threading hole; or,

the elastic torsion beam is further provided with two metal wires, the target piece is provided with two rows of threading holes which are arranged along the same direction, and the target piece is connected to the rotary connecting part through a structure which enables each metal wire to sequentially penetrate through each threading hole in the corresponding row.

5. The portable profiler as set forth in claim 3, wherein said target member is supported on said rotational connection, and wherein said rotational connection is in point contact with said target member.

6. The portable profiler as set forth in claim 3, wherein said induction element comprises a capacitive inductor and a capacitive shield in insulated connection with said capacitive inductor, said induction element forming a corresponding unipolar capacitance with said target element through said capacitive inductor;

7. The portable profiler as set forth in claim 3, wherein the two unipolar capacitors have different initial plate spacings in an equilibrium position of the target member in which the target member is not subjected to the force, wherein the initial plate spacing of the first unipolar capacitor is greater, and wherein the probe is positioned such that the target member rotates in a direction in which the plate spacing of the first unipolar capacitor decreases upon receiving the force.

8. The portable profiler as set forth in claim 1 or 2, wherein said capacitive differential sensor further comprises at least one elastic cantilever, said two sensing members are respectively disposed on both sides of said target member, a first end of each of said elastic cantilevers is connected to said target member, and a second end of each of said elastic cantilevers is fixed relative to said two sensing members, so as to connect said target member, said elastic cantilevers and said two sensing members to form a structural whole; the structure is integrally arranged so that the target member moves to a corresponding equilibrium position when receiving the acting force, and the movement causes the plate spacing of the two unipolar capacitors to change in an equal and opposite direction, so as to output a differential signal via the differential signal output terminal.

9. A scanning contour microscope comprising an optical microscope and the portable profiler as claimed in any one of claims 1 to 8, wherein the three-axis piezo ceramic scanning tube of the portable profiler is mounted in an objective lens barrel, and the fixed base plate is fixedly connected to the objective lens barrel, and at least a probe portion of the capacitive differential sensor is exposed to the outside through the objective lens barrel; one objective lens interface of the optical microscope is provided with the objective lens barrel, and the other objective lens interface of the optical microscope is provided with a standard objective lens.

10. A contour scanning system comprising a signal processor, a display, an X-direction drive voltage generator, a Y-direction drive voltage generator, a Z-direction drive voltage generator, and the portable profiler of any one of claims 1 to 8 or the contour scanning microscope of claim 9;