CN108088359A - Portable contourgraph and profile scan microscope and system - Google Patents

Abstract

The invention discloses a kind of portable contourgraph and profile scan microscope and system, contourgraph includes three axis piezoelectric ceramic scanatrons, is made of X, Y and Z-direction piezoelectric ceramic actuator；Each piezoelectric ceramic actuator includes flexible amplification mechanism and piezoelectric ceramics, and flexible amplification mechanism has fixing end and tache motorice, and is provided so that the straight-line displacement that tache motorice generation is amplified the deformation of piezoelectric ceramics；X, Y, Z-direction piezoelectric ceramic actuator and capacitance differential sensor are sequentially connected in series, and X, Y, Z-direction piezoelectric ceramic actuator are set in the orientation of straight-line displacement so that corresponding tache motorice is generated along X, Y, Z-direction respectively；Capacitance differential sensor includes target part, probe and two induction pieces, probe and is connected along Z-direction and target part, and two induction pieces each form a monopole capacitance with target part.The contourgraph has the advantages that small, at low cost and high resolution.

Description

Portable contourgraph and profile scan microscope and system

Technical field

The present invention relates to contourgraph technical field, more particularly it relates to a kind of portable contourgraph, have it is portable The profile scan microscope of formula contourgraph and the wheel that sample is realized using portable contourgraph or profile scan microscope The profile scan system of exterior feature scanning.

Background technology

Contourgraph is the instrument for characterizing object surface appearance, can be divided into two major classes according to measuring principle, one kind is profit The contourgraph optically measured, another kind of is the contourgraph measured using contact method.Optical means includes White Light Interferometer, phase-shifting interferometry, focus detection method, pattern sciagraphy etc., optical means have speed is fast, reliability is higher, The advantages of lateral resolution is higher, but need to build more complicated light path system, shared volume is larger, not readily portable, and Easy affected by environment, higher price.Contact method mainly includes atomic force microscope and scanning tunneling microscope, atomic force microscopy Mirror and scanning tunneling microscope are all that the feedback of displacement and power is realized using feed rod rod principle, have high resolution, reliability Well, the advantages of having a wide range of application, but also need to build more complicated system as supporting, volume is big, not readily portable, and Higher price.

The content of the invention

It is an object of the invention to provide a kind of small volume, in order to the contourgraph of carrying.

According to the first aspect of the invention, a kind of portable contourgraph is provided, including：

Three axis piezoelectric ceramic scanatrons, including X-direction, Y-direction and Z-direction piezoelectric ceramic actuator, and the X-direction, Y Direction and Z-direction are mutually orthogonal；Each piezoelectric ceramic actuator includes flexible amplification mechanism, mounted on the flexible amplification Piezoelectric ceramics in mechanism and the driving voltage input terminal via piezoelectric ceramics extraction, the flexible amplification mechanism have Fixing end and tache motorice, the flexible amplification mechanism are provided so that the deformation that the tache motorice is generated to piezoelectric ceramics carries out The straight-line displacement of amplification；The fixing end of the X-direction piezoelectric ceramic actuator is fixedly connected with fixed bottom plate, and the X-direction Piezoelectric ceramic actuator is set in the orientation of straight-line displacement corresponding tache motorice is caused to generate in X direction；The Y-direction piezoelectricity pottery The fixing end of porcelain driver is fixedly connected with the tache motorice of the X-direction piezoelectric ceramic actuator, and the Y-direction piezoelectric ceramics Driver is set in the orientation that corresponding tache motorice is caused to generate straight-line displacement along Y-direction；The Z-direction piezoelectric ceramic actuator Fixing end be fixedly connected with the tache motorice of the Y-direction piezoelectric ceramic actuator, and the Z-direction piezoelectric ceramic actuator exists It is set so that corresponding tache motorice is generated along Z-direction in the orientation of straight-line displacement；And

Capacitance differential sensor, it is described including differential signal outputs, ground terminal, target part, probe and two induction pieces Target part is connected with the ground terminal, and the probe is fixedly connected along the Z-direction with the target part, with to the target part Transmitting forces；Described two induction pieces are correspondingly connected with the differential signal outputs, and are each formed with the target part One monopole capacitance；The capacitance differential sensor is arranged to：The pole plate spacing of two monopole capacitances is according to the active force Variation equal in magnitude, that direction is opposite is generated, with via the differential signal outputs output difference signal；Described two sensings Part is fixedly connected with the tache motorice of the Z-direction piezoelectric ceramic actuator.

Optionally, the fixing end of the Y-direction piezoelectric ceramic actuator passes through pinboard and the X-direction piezoelectric ceramics The tache motorice of driver is fixedly connected, and the pinboard is arranged to：So that the fixation of the Y-direction piezoelectric ceramic actuator The tache motorice of the relatively described X-direction piezoelectric ceramic actuator in end is turn 90 degrees partially.

Optionally, the flexible amplification mechanism is set there are two bearing plate, and one end of the piezoelectric ceramics supports and consolidates Surely be connected on a bearing plate, the other end of the piezoelectric ceramics be supported on another bearing plate and with it is described another The end face of bearing plate offsets on the deformation direction of itself.

Optionally, the fixing end of the flexible amplification mechanism and the equivalent length of tache motorice are equal, the flexible amplification Mechanism further includes four equal linking arms of equivalent length and equal two connecting pins of equivalent length, and first linking arm passes through Flexible hinge is connected to first between connecting pin and tache motorice, and second linking arm is connected to second company by flexible hinge It connecing between end and tache motorice, the 3rd linking arm is connected to second between connecting pin and fixing end by flexible hinge, and the 4th A linking arm is connected to first between connecting pin and fixing end by flexible hinge；The piezoelectric ceramics is mounted on described two On connecting pin, the structure tache motorice of the spacing between two connecting pins of flexible change by piezoelectric ceramics generates Perpendicular to the straight-line displacement of deformation direction.

Optionally, the three axis piezoelectric ceramic scanatron is mounted in lens barrel, the fixed bottom plate and the object Mirror lens barrel is fixedly connected, and at least probe portion of the capacitance differential sensor is via the lens barrel to exposing outside.

Optionally, the probe under the free state of non-stress, on the center line of the lens barrel.

Optionally, the capacitance differential sensor further includes rotating junction, and the target part is connected to the rotation On connecting portion, the limitation of the rotating junction and described two induction pieces is relatively movably fixedly connected, by the target part, The rotating junction connects to form a structure entirety with described two induction pieces；The structure is integrally provided so that institute It states target part and turns to corresponding equilbrium position around the rotating junction when receiving the active force, and the rotation makes The pole plate spacing for obtaining described two monopole capacitances generates variation equal in magnitude, direction is opposite, with defeated via the differential signal Outlet output difference signal.

Optionally, the rotating junction is elastic torsion-beam, the both ends of the elasticity torsion-beam and described two induction pieces It is relatively fixed, and the target part is connected with the interlude of the elastic torsion-beam.

Optionally, the elastic torsion-beam is integrally formed with the target part.

Optionally, the elastic torsion-beam is a wires, and the target part is provided with a row threading hole, the target The structure that part sequentially passes through each threading hole by the metal wire is connected on the rotating junction；Alternatively,

The elasticity torsion-beam is two wires, and the target part is provided with the two row threading holes arranged in same direction, The structure that the target part sequentially passes through each threading hole of respective column by every wires is connected to the company of rotation In socket part.

Optionally, the target part is supported on the rotating junction, and the rotating junction and the target Part point contact connects.

Optionally, the induction pieces include capacitive sensing body and the capacitance shield with capacitive sensing body insulation connection Body, the induction pieces form corresponding monopole capacitance by the capacitive sensing body with the target part；

The capacitance shield body is connected with the ground terminal, and the rotating junction is fixedly connected on the electricity of arbitrary induction pieces Hold on shield, the target part is connected by the rotating junction being fixed together and capacitance shield body with the ground terminal It connects.

Optionally, described two monopole capacitances are in the initial pole plate under the equilbrium position of non-stress in the target part Spacing etc., wherein, the initial pole plate spacing of the first monopole capacitance is larger, and the position of the probe is provided so that target part The direction to become smaller when receiving the active force along the pole plate spacing of the first monopole capacitance rotates.

Optionally, the capacitance differential sensor further includes at least one elastic cantilever, and described two induction pieces set up separately In the both sides of the target part, the first end of each elastic cantilever is connected with the target part, second end opposite described two A induction pieces are fixed, and the target part, the elastic cantilever and described two induction pieces are connected to form a structure entirety； The structure is integrally provided so that the target part is moved to corresponding equilbrium position when receiving the active force, and The movement causes the pole plate spacing of described two monopole capacitances to generate variation equal in magnitude, direction is opposite, with via described Differential signal outputs output difference signal.

According to a second aspect of the present invention, a kind of profile scan microscope is provided, including light microscope and according to this Portable contourgraph described in invention first aspect, three axis piezoelectric ceramic scanatrons of the portable contourgraph are mounted on object lens In lens barrel, and the fixed bottom plate is fixedly connected with the lens barrel, at least probe portion of the capacitance differential sensor Via the lens barrel to exposing outside；One object lens interface of the light microscope installs the lens barrel, the light Learn microscopical other object lens interface installation standard object lens.

According to a third aspect of the present invention, a kind of profile scan system is provided, including signal processor, display, X side To driving voltage generator, Y-direction driving voltage generator, Z-direction driving voltage generator and according to a first aspect of the present invention The portable contourgraph or the profile scan microscope described according to a second aspect of the present invention；

The X-direction driving voltage generator is used to provide to the driving voltage input terminal of X-direction piezoelectric ceramic actuator Driving voltage, to carry out the scanning of X-direction to sample surface via probe；

The Y-direction driving voltage generator is used to provide to the driving voltage input terminal of Y-direction piezoelectric ceramic actuator Driving voltage, to carry out the scanning of Y-direction to sample surface via probe；

The differential signal outputs of the capacitance differential sensor and the differential signal input pair of the signal processor It should connect, the differential signal that the capacitance differential sensor generates be exported to the signal processor, the capacitance difference The ground terminal of sensor is connected with the ground wire of the signal processor；The signal processor is used to calculate the differential signal Difference between currency and setting value, and the difference is exported as feedback signal to the Z-direction driving voltage and is occurred Device；

The Z-direction driving voltage generator is used to be provided to Z-direction pressure according to feedback signal generation driving voltage The driving voltage input terminal of electroceramics driver realizes the lifting of the capacitance differential sensor；And

The display is used to show the driving voltage that the Z-direction driving voltage generator generates, and utilizes display Driving voltage characterizes the surface profile of sample.

It was found by the inventors of the present invention that in the prior art, either the contourgraph based on optical means is still based on connecing The contourgraph for the method for touching, existing causes volume larger when complicated, and then causes the problem of not readily portable.Therefore, It is that the technical assignment to be realized of the invention is either never expected the technical problem to be solved is that those skilled in the art or It is not expected that, therefore the present invention is a kind of new technical solution.

The advantageous effect of the present invention is that the portable contourgraph of the present invention is realized tested using piezoelectric ceramic scanatron The profile scan of sample, the piezoelectric ceramic scanatron are that the deformation of piezoelectric ceramics is amplified by flexible amplification mechanism, can To realize miniaturized design, and then realize the miniaturization of contourgraph；In addition, the portable contourgraph of the present invention is passed by capacitance difference Sensor substitutes optical lever reponse system, and then can largely reduce cost on the basis of high-resolution is ensured.

By referring to the drawings to the detailed description of exemplary embodiment of the present invention, other feature of the invention and its Advantage will become apparent.

Description of the drawings

It is combined in the description and the attached drawing of a part for constitution instruction shows the embodiment of the present invention, and even With its explanation together principle for explaining the present invention.

Fig. 1 is the schematic cross-sectional view according to a kind of embodiment of the portable contourgraph of the present invention；

Fig. 2 is the schematic front view of three axis piezoelectric ceramic scanatrons in Fig. 1；

Fig. 3 a are the structure diagram of the basic structure of piezoelectric ceramic actuator shown in Fig. 2；

Fig. 3 b are the equivalent rigid model of piezoelectric ceramic actuator in Fig. 3 a；

Fig. 4 a are a kind of elevational schematic view for embodiment that bottom plate is fixed in Fig. 2；

Fig. 4 b be Fig. 4 a in A-A to ladder cut open schematic diagram；

Fig. 5 is a kind of schematic top plan view of setting structure of X-direction piezoelectric ceramic actuator；

Fig. 6 is a kind of schematic top plan view of embodiment of pinboard in Fig. 2；

Fig. 7 is a kind of schematic top plan view of setting structure of Y-direction piezoelectric ceramic actuator；

Fig. 8 a are a kind of schematic front view of setting structure of Z-direction piezoelectric ceramic actuator；

Fig. 8 b are the elevational schematic view of setting structure shown in Fig. 8 a；

Fig. 9 a are the structure diagram of single parallelogram compliant mechanism；

Fig. 9 b are the structure diagram of double parallel quadrangle compliant mechanism；

Figure 10 is the structure diagram of the first embodiment of moving seesaw-type capacitance differential sensor；

Figure 11 is the structure diagram of second of embodiment of moving seesaw-type capacitance differential sensor；

Figure 12 is the structure diagram of the third embodiment of moving seesaw-type capacitance differential sensor；

Figure 13 is the structure diagram of the 4th kind of embodiment of moving seesaw-type capacitance differential sensor；

Figure 14 a are a kind of schematic top plan view of Figure 11 embodiments of induction pieces into Figure 14；

Figure 14 b are the A-A of induction pieces shown in Figure 15 a to schematic cross-sectional view；

Figure 15 is the integrally formed a kind of structure diagram of embodiment of target part and rotating junction；

Figure 16 is the structure diagram of integrally formed second of the embodiment of target part and rotating junction；

Figure 17 is a kind of structure diagram of the separately formed embodiment of target part and rotating junction；

Figure 18 is the structure diagram of separately formed second of the embodiment of target part and rotating junction；

Figure 19 is the structure diagram of separately formed the third embodiment of target part and rotating junction；

Figure 20 is the relatively-stationary a kind of decomposition diagram of fixed structure of two induction pieces and rotating junction；

Figure 21 is a kind of structure diagram of embodiment of parallel-moving type capacitance differential sensor；

Figure 22 is the frame principle figure according to a kind of embodiment of the profile scan system of the present invention.

Reference sign：

CDS- capacitance differential sensors；PCS- piezoelectric ceramic actuators；

PCSX-X directions piezoelectric ceramic actuator；PCSY-Y directions piezoelectric ceramic actuator；

PCSZ-Z directions piezoelectric ceramic actuator；SA- structures are whole；

1- target parts；101st, 102- threading holes；

2- probes；3rd, 3a, 3b- induction pieces；

302- capacitance shield bodies；303- insulating bodies；

3031- insulated rings；301a, 301b- capacitive sensing body；

4- fixtures reserve portion；5th, 5a, 5b, 5c- rotating junction；

501a- elasticity torsion-beams；502a- torsion-beam fixing pieces；

5021a- connection through holes；501b, 502b- metal wire；

6- separators；601- connection through holes；

C1- the first monopole capacitances；C2- the second monopole capacitances；

701st, 701X, 701Y, 701Z- fixing end；702nd, 702X, 702Y, 702Z- tache motorice；

703- connecting pins；704- linking arms；

705- bearing plates；706- piezoelectric ceramics；

708- lightening holes；7011st, 7022,7023- threaded holes；

7021st, 7012,7013- counterbores；707- flexible hinges；

8- fixes bottom plate；801- bottom plate bodies；

802- threaded holes；803- stage portions；

804- counterbores；9- pinboards；

901- pinboard bodies；902nd, 903- threaded holes；

10- housings；S- induction pieces；

M- target parts；A- elastic cantilevers；

T- installs casing；P1- separators；

U2- signal processors；U3- displays；

U1X-X directions driving voltage generator；U1Y-Y directions driving voltage generator；

U1Z-Z directions driving voltage generator；LG- ground terminals；

LOUT+、LOUT-：Differential signal outputs.

Specific embodiment

Carry out the various exemplary embodiments of detailed description of the present invention now with reference to attached drawing.It should be noted that：Unless in addition have Body illustrates that the unlimited system of component and the positioned opposite of step, numerical expression and the numerical value otherwise illustrated in these embodiments is originally The scope of invention.

It is illustrative to the description only actually of at least one exemplary embodiment below, is never used as to the present invention And its application or any restrictions that use.

It may be not discussed in detail for technology, method and apparatus known to person of ordinary skill in the relevant, but suitable In the case of, the technology, method and apparatus should be considered as part for specification.

In shown here and discussion all examples, any occurrence should be construed as merely illustrative, without It is as limitation.Therefore, other examples of exemplary embodiment can have different values.

It should be noted that：Similar label and letter represents similar terms in following attached drawing, therefore, once a certain Xiang Yi It is defined, then it need not be further discussed in subsequent attached drawing in a attached drawing.

The present invention in order to solve the problem of existing for existing contourgraph it is complicated, volume is larger and then not readily portable, A kind of portable contourgraph is provided, this kind of contourgraph need not set complicated optical texture, be realized by mechanical structure High-resolution profile scan, therefore can the compression of volume be realized by the miniaturized design to mechanical structure, such as compress To standard object lens size or even smaller, and then realize portability design.

Fig. 1 is a kind of schematic cross-sectional view of embodiment of portable contourgraph according to the present invention.Fig. 2 is three axis pressure in Fig. 1 The schematic front view of electroceramics flying-spot tube.

According to Fig. 1 and Fig. 2, the portable contourgraph of the present invention includes capacitance differential sensor CDS and three axis piezoelectricity are made pottery Porcelain flying-spot tube, the three axis piezoelectric ceramic scanatron include three piezoelectric ceramic actuator PCS, wherein, three Piezoelectric Ceramics Device PCS drives respectively as X-direction piezoelectric ceramic actuator PCSX, Y-direction piezoelectric ceramic actuator PCSY and Z-direction piezoelectric ceramics Dynamic device PCSZ, and X-direction, Y-direction and Z-direction are mutually orthogonal.

Each piezoelectric ceramic actuator PCS include flexible amplification mechanism, the piezoelectric ceramics on flexible amplification mechanism, And the driving voltage input terminal drawn via piezoelectric ceramics, flexible amplification mechanism are the mechan-amplifier realized by flexible hinge Structure.

Flexible hinge can be the single shafts such as straight beam type, straight round, ellipse, hyperbolic-type, parabolic type, V-type, gerotor type Flexible hinge, particularly various types of mono-symmetry formula flexible hinges.

In order to improve the overall construction intensity of flexible amplification mechanism, the flexible amplification mechanism can by base material one into Type, i.e., directly processing forms the flexible hinge on base material, for example, forming the flexible hinge by carrying out electrical discharge machining to base material Chain.Since flexible hinge is come work, so the elastic recovery properties and rigidity of material will be certainly by the elastic deformation of material Determine the quality of flexible hinge, based on the considerations of aspect of performance, the base material it is whole or at least form the part of flexible hinge can be with Platinum bronze is used, and based on the considerations of cost performance, which integrally for example may be employed No. 45 steel.

The flexible amplification mechanism has fixing end and tache motorice, and flexible amplification mechanism is provided so that tache motorice generation pair The straight-line displacement that the deformation of piezoelectric ceramics is amplified.

Above three piezoelectric ceramic actuator PCS is connected in series, to realize to the surface profile of sample Scanning, specially：The fixing end of X-direction piezoelectric ceramic actuator PCSX is fixedly connected with fixed bottom plate 8, and fixes bottom plate 8 then It can be fixedly connected on the inner wall of housing 10, and X-direction piezoelectric ceramic actuator PCSX is causing corresponding tache motorice in X direction It generates and is set in the orientation of straight-line displacement；The fixing end of Y-direction piezoelectric ceramic actuator PCSY and X-direction piezoelectric ceramic actuator The tache motorice of PCSX is fixedly connected, and Y-direction piezoelectric ceramic actuator is causing corresponding tache motorice to generate straight-line displacement along Y-direction Orientation on set, with realize X-direction and Y-direction movement superposition；The fixing end and Y of Z-direction piezoelectric ceramic actuator PCSZ The tache motorice of direction piezoelectric ceramic actuator PCSY is fixedly connected, and Z-direction piezoelectric ceramic actuator is causing corresponding tache motorice It generates along Z-direction and is set in the orientation of straight-line displacement, to realize the superposition of X-direction, Y-direction and Z-direction movement.

Since capacitance differential sensor by the limitation to pole plate spacing can realize micrometer resolution, this hair Bright contourgraph replaces optical lever reponse system to realize high-resolution, low-cost design using capacitance differential sensor.

Capacitance differential sensor CDS includes differential signal outputs, ground terminal, target part, probe and two induction pieces, Target part is connected with ground terminal, and probe is fixedly connected along Z-direction with target part, to pass through the contour surface of probe and sample Contact, and the active force transmission target part generated will be contacted；Two induction pieces are correspondingly connected with differential signal outputs, and each A monopole capacitance is formed with target part；Capacitance differential sensor is arranged to：The pole plate spacing of two monopole capacitances is according to this Active force generates variation equal in magnitude, direction is opposite, with via differential signal outputs output difference signal.

The capacitance differential sensor CDS is consolidated by the tache motorice of two induction pieces and Z-direction piezoelectric ceramic actuator PCSZ Fixed connection, in this way, be carried on X in sample, on Y plane when, can probe be driven to quilt by X-direction and Y-direction movement The surface of sample is scanned, and is moved by Z-direction and to be driven capacitance differential sensor CDS, drives probe vertical It is moved on the direction of sample, and then changes the size of active force, realize the feedback of Z-direction displacement.

Now by taking constant force mode as an example, illustrate the operation principle of contourgraph of the present invention：By the output of capacitance differential sensor CDS One signal value of signal is as previously selected setting value.Sample is carried on X, on Y plane, and makes probe and detected sample Product contact, and contact point is 0 coordinate points on selected X, Y plane.Pass through the drive to X-direction, Y-direction piezoelectric ceramic actuator Dynamic voltage input end outputting drive voltage realizes scanning of the probe to the surface of sample on X, Y plane.Due to X-direction, Y-direction piezoelectric ceramics is when scanning the surface of sample on X, Y plane, because the rough surface of sample is uneven, therefore will So that the active force between probe and sample changes, and then the output signal of capacitance differential sensor CDS can be caused Signal value change.It is poor that signal value that capacitance differential sensor CDS is measured in real time is made with setting value, and using difference as Feedback signal will then realize that capacitance difference passes by the piezoelectric ceramics of signal processing driving Z-direction piezoelectric ceramic actuator PCSZ Sensor CDS with respect to sample lifting, until the signal value measured in real time is equal with setting value.In this way, it can pass through The surface profile of sample is characterized to the driving voltage of Z-direction piezoelectric ceramic actuator PCSZ offers.

Above three piezoelectric ceramic actuator PCS and capacitance differential sensor CDS can be arranged in housing 10, with logical It crosses housing 10 and protects Each part, but at least probe portion of capacitance differential sensor CDS should pass through housing at work 10 to exposing outside, to realize the scanning to sample, for this purpose, one end of the correspondence capacitance differential sensor CDS of the housing 10 It for uncovered structure, and configures one and is adapted to close the open outer cover during inoperative with housing 10, to avoid internal junction Structure is for example connected by external environmental, the housing 10 with outer cover thread fitting.

In order to enable the portable contourgraph of the present invention can easily be used in combination with light microscope, with reference to shown in Fig. 1, Lens barrel may be employed in above-mentioned housing 10, in this way, by contourgraph by its lens barrel mounted on one of light microscope On object lens interface, profile scan microscope is just directly formd.The advantage for forming profile scan microscope progress profile scan exists In can first pass through the surface of the reference substance sem observation sample of light microscope, and then determine to need through contourgraph into one The region of step research surface profile, in this way, can be by being connected to the contourgraph on object lens interface to determining that the surface in region is taken turns Exterior feature carries out subtleer observation.Here, the microscopical light microscope of the profile scan, portable contourgraph and standard object lens It can be separated from each other at least partially under non-working condition.

For using embodiment of the lens barrel as housing 10, which can be located under the free state of non-stress On the center line of lens barrel, to improve the balance of structure, symmetry.

Fig. 3 a are a kind of structure diagram of basic structure of piezoelectric ceramic actuator PCS.Fig. 3 b are piezoelectricity shown in Fig. 3 a The equivalent rigid model of ceramic driver PCS.

According to Fig. 3 a and Fig. 3 b, piezoelectric ceramic actuator PCS includes flexible amplification mechanism and piezoelectric ceramics 706, The fixing end 701 of the flexible amplification mechanism and the equivalent length (length of the corresponding part of i.e. equivalent rigid model of tache motorice 702 Degree) it is equal, flexible amplification mechanism further includes four equal linking arms 704 of equivalent length, two connections equal with equivalent length End 703.

First linking arm 704 is connected to by flexible hinge 707 between first connecting pin 703 and tache motorice 702, the Two linking arms 704 are connected to by flexible hinge 707 between second connecting pin 703 and tache motorice 702, the 3rd linking arm 704 are connected to by flexible hinge 707 between second connecting pin 703 and fixing end 701, and the 4th linking arm 704 is by soft Property hinge 707 be connected between first connecting pin 703 and fixing end 701, and then form symmetrical structure as shown in Figure 3b.Root Understand that, when two opposite connecting pins 703 move toward one another, tache motorice 702 is in fig 3b according to the structure of the flexible amplification mechanism End 701 will be relatively fixed to move to the left, when two opposite connecting pins 703 are backwards to movement, tache motorice 702 in fig 3b will End 701 is relatively fixed to move to the right.So piezoelectric ceramics 706 is mounted on two connecting pins 703, drive can be passed through Dynamic voltage control piezoelectric ceramics 706 stretches, and then the structure for changing the spacing between two connecting pins 703 causes tache motorice 702 generate the straight-line displacement perpendicular to deformation direction, realize the amplification to deflection.

Fig. 3 a illustrated embodiments provide a kind of alternative mounting structure for the installation of piezoelectric ceramics 706.Specifically For the flexible amplification mechanism is set there are two bearing plate 705, and one end of piezoelectric ceramics 706 supports and is fixedly connected on one and holds On fishplate bar 705, to realize the fixation of piezoelectric ceramics relative flexibility enlarger, the other end of piezoelectric ceramics 706 is supported on another It offsets on a bearing plate 705 and with the end face of another bearing plate 705 on the deformation direction of itself, so that piezoelectric ceramics 706 In elongation, another bearing plate 705 can be promoted to move.In actual use, can also make pottery in a non-operative state for piezoelectricity The piezoelectric ceramics of porcelain driver PCS applies certain voltage, so that compliant mechanism generates predeformation.Here, this kind installation knot The flexible amplification mechanism that structure can also combine other structures uses.

In the embodiment shown in Fig. 3 a, one of bearing plate 705 is fixedly connected with first connecting pin 703, another A bearing plate 705 is fixedly connected with second connecting pin 703.

, can be on flexible amplification mechanism in addition, in order to improve the dynamic property of flexible amplification mechanism, such as linking arm 704th, connecting pin 703, fixing end 701, tache motorice 702 at least partially, set lightening hole 708.

Fig. 9 a and Fig. 9 b show other two kinds of alternative flexible amplification mechanisms, i.e., single parallelogram compliant mechanism With double parallel quadrangle compliant mechanism.Single parallelogram of the flexible amplification mechanism shown in respect to Fig. 9 a shown in Fig. 3 a and Fig. 3 b Compliant mechanism has the advantage of output displacement decoupling, has output range with respect to the double parallel quadrangle compliant mechanism shown in Fig. 9 b Big advantage.

Being fixedly connected between each component of contourgraph of the present invention can be realized by fasteners such as screws, can also It is realized by the means such as welding, being bonded.

Fig. 4 a and Fig. 4 b are a kind of structure diagram of embodiment of fixed bottom plate 8, in this embodiment, fixed bottom plate 8 It is fixedly connected by screw with housing 10 and X-direction piezoelectric ceramic actuator PCSX.

According to Fig. 4 a and Fig. 4 b, which includes bottom plate body 801 and is arranged on bottom plate body along Z-direction Threaded hole 802 on 801, in this way, by the shell wall of housing 10 set and 802 corresponding through hole of threaded hole or counterbore, Screw can be made to coordinate through the through hole on housing 10 or counterbore with corresponding threaded hole 802, and 8 company of fixation of bottom plate will be fixed It connects in the housing 10.

The bottom plate body 801 forms stage portion at the position that the fixing end with X-direction piezoelectric ceramic actuator PCSX is connected 803, it can free movement in the X direction with the tache motorice for ensureing X-direction piezoelectric ceramic actuator PCSX.The stage portion 803 It can be replaced by independent gasket.

The fixation bottom plate 8 is additionally included in the counterbore 804 for running through bottom plate body 801 at stage portion 803 along Z-direction, in this way, logical The threaded hole that corresponding counterbore 804 is set in the fixing end of X-direction piezoelectric ceramic actuator PCSX is crossed, it can be by screw by X The fixing end of direction piezoelectric ceramic actuator PCSX is fixedly connected on fixed bottom plate 8.

For the embodiment that housing 10 is lens barrel, which can be consistent with lens barrel shape Circle, and in such as four threaded holes 802 provided circumferentially about using the center of bottom plate body 801 as the center of circle, then in four screw threads The periphery in hole 802 forms stage portion 803 and two counterbores 804.

Fig. 5 shows a kind of alternative setting structure of X-direction piezoelectric ceramic actuator PCSX, this kind of setting structure It is adapted with the fixed structure of the fixation bottom plate 8 of Fig. 4 a and Fig. 4 b.

According to Fig. 5, it is provided on the fixing end 701X of X-direction piezoelectric ceramic actuator PCSX with counterbore 804 one by one Corresponding threaded hole 7011 in this way, screw is connected through counterbore 804 with corresponding threaded hole 7011, can be realized therebetween Be fixedly connected.

In the embodiment shown in fig. 5, it is provided with counterbore on the tache motorice 702X of X-direction piezoelectric ceramic actuator PCSX 7021, in order to carry out the connection between the fixing end of Y-direction piezoelectric ceramic actuator PCSY.

In order to compress size of the contourgraph on X, Y plane, a pinboard can be set to realize that X-direction piezoelectric ceramics drives Being fixedly connected between the tache motorice 702 of dynamic device PCSX and the fixing end 701 of Y-direction piezoelectric ceramic actuator PCSY.It is in this way, logical The design to pinboard is crossed, X-direction and Y-direction piezoelectric ceramic actuator can be made substantially aligned in z-direction, and then in X, Y Substantially identical bulk is occupied in plane, for example, the pinboard causes the fixing end of Y-direction piezoelectric ceramic actuator PCSY The tache motorice 702 of 701 opposite X-direction piezoelectric ceramic actuator PCSX is turn 90 degrees partially.

Fig. 6 is a kind of schematic top plan view of embodiment of pinboard 9.

According to Fig. 6, which includes pinboard body 901, which is in a quarter substantially Arc-shaped, which sets the threaded hole 902 that configuration is corresponded with counterbore 7021 on pinboard body 901, in this way, Coordinated by screw through counterbore 7021 with corresponding threaded hole 902, can realize pinboard 9 and X-direction Piezoelectric Ceramic Being fixedly connected between the tache motorice 702X of device PCSX.The pinboard 9 is also threaded hole 903 on pinboard body 901, with Being fixedly connected between pinboard 9 and the fixing end of Y-direction piezoelectric ceramic actuator PCSY is realized using threaded hole 903.The spiral shell 903 opposite thread hole 902 of pit is turn 90 degrees partially, to realize the fixing end of Y-direction piezoelectric ceramic actuator PCSY with respect to X-direction pressure The deflection of the tache motorice of electroceramics driver PCSX.

Fig. 7 shows a kind of alternative setting structure of Y-direction piezoelectric ceramic actuator PCSY, this kind of setting structure It is adapted with the fixed structure of the pinboard 9 of Fig. 6.

According to Fig. 7, it is provided on the fixing end 701Y of Y-direction piezoelectric ceramic actuator PCSY and threaded hole 903 1 Both one corresponding counterbore 7012, in this way, screw is connected through counterbore 7012 with corresponding threaded hole 903, can realize Between be fixedly connected.

In the embodiment shown in fig. 5, it is provided with threaded hole on the tache motorice 702Y of Y-direction piezoelectric ceramic actuator PCSY 7022, in order to carry out the connection between the fixing end of Z-direction piezoelectric ceramic actuator PCSZ.

Fig. 8 a and Fig. 8 b show a kind of alternative setting structure of Z-direction piezoelectric ceramic actuator PCSZ, this kind Setting structure is adapted with the fixed structure of the Y-direction piezoelectric ceramic actuator PCSY of Fig. 7.

According to Fig. 8 a and Fig. 8 b, it is provided on the fixing end 701Z of Z-direction piezoelectric ceramic actuator PCSZ and screw thread 7022 one-to-one counterbore 7013 of hole, in this way, screw is connected through counterbore 7013 with corresponding threaded hole 8022, Realize being fixedly connected therebetween.

In Fig. 8 a and Fig. 8 b illustrated embodiments, set on the tache motorice 702Z of Z-direction piezoelectric ceramic actuator PCSZ There is threaded hole 7023, in order to carry out the connection between capacitance differential sensor CDS, i.e., capacitance differential sensor CDS's Setting and 7023 one-to-one counterbore of threaded hole on induction pieces or the fixed component of relative induction part, to be passed through by screw The counterbore realizes fixation therebetween with the mating connection of corresponding threaded hole 7023.

Figure 10 is a kind of structure diagram of embodiment of capacitance differential sensor.

According to Figure 10, which is moving seesaw-type capacitance differential sensor, uses double monopole capacitances Differential configuration measures, to improve sensor ability resistant to common code interference.This pair of monopole capacitance differential configuration includes a mesh 1, two induction pieces 3 (being respectively labeled as 3a, 3b) of tender and rotating junction 5.

Target part 1 is connected on rotating junction 5, to form single wrap board structure or double wrap board structures, wherein, single wrap board It is located at the structure of 1 one end of target part for rotating junction 5, and double wrap boards are located at the knot among target part 1 for rotating junction 5 Structure.The connection function that target part 1 passes through rotating junction 5：It keeps and the gap between two induction pieces 3a, 3b is to form monopole The freedom of motion that capacitance, the equilbrium position being maintained under force-free state and limitation relatively rotate connecting portion 5 is around the company of rotation The rotation of socket part 5, so that target part 1 realizes seesaw type tectonic movement when being applied in active force.

The sensor further includes probe 2, and probe 2 is fixedly connected on along Z-direction in target part 1, in contact sample Surface when transferred to target part 1 and can generate the active force of torque, and then make target part 1 that seesaw type tectonic movement occur.

In this pair of monopole capacitance differential configuration, target part and one of induction pieces 3a formed the first monopole capacitance and The second monopole capacitance is formed with another induction pieces 3b, and target part 1 is when being applied in active force and being rotated around rotating junction 5, The pole plate spacing (spacing i.e. between target part and an induction pieces) of first monopole capacitance is between the pole plate of the second monopole capacitance Away from (spacing i.e. between target part and another induction pieces) it is arranged to that opposite variation occurs, and variable quantity is identical, and then The difference for the pole plate displacement that characterization amount of force and/or corresponding active force are exported by double monopole capacitance differential configurations is believed Number.And this kind can greatly simplify the structure of sensor by the design of moving seesaw-type structure output differential signal, and then reduce and pass The manufacturing cost of sensor.

For output difference signal, above-mentioned two induction pieces 3a, 3b should be corresponding with the differential signal outputs of sensor Connection, which can be lead or stitch etc., and target part 1 should then connect with the ground terminal of sensor Connect, which equally can be lead or stitch etc., two differential signal outputs in measurement with signal processor U2 Two differential signal inputs be correspondingly connected with, and ground wire of the ground terminal directly with signal processor U2 is connected.

Here, target part 1 can be set to be electrically connected by adjacent component and ground terminal, without being configured for target part 1 Particular lead, this dynamic that can reduce the volume and weight of the target part 1 as movement parts significantly and then improve sensor Energy.Rotating junction 5 is relatively movably fixedly connected with two induction pieces 3a, 3b limitations, by target part 1, rotating junction 5 It connects to form a structure entirety SA with two induction pieces 3a, 3b." should limit relative movement " illustrates rotating junction 5 at most only Opposite two induction pieces 3a, 3b torsion can be sent when target part 1 receives active force, and then drive the target part 1 being connected Rotated around its centre of twist, and can not with respect to two induction pieces 3a, 3b translation, to limit because the translation of target part 1 brings pole plate The variation of spacing.As long as this kind limitation is implemented in the range ability of calibration, in other words, according to different limiting structures, Active force more than range ability may result in this kind limitation failure.

The effect of this kind limitation is embodied in：For applying the capacitance type sensor in microoperation field, monopole capacitance Initial pole plate spacing is very small, is usually micron order, to realize higher resolution ratio, this has just limited the range of sensor (maximum force that can accurately measure), for example, in order to obtain 0.2nN to the power resolution ratio of 1 μ N, corresponding initial pole plate Spacing is 6 μm to 500 μm, and corresponding range will be restricted to 30 μ N to 200mN.If opposite two sensings in rotating junction 5 The one-movement-freedom-degree while being applied in active force (be included in target part 1) of part 3a, 3b are not limited, then this kind movement on the one hand can be into One step causes the loss of range, so cause sensor have smaller range in addition can not normal use, on the other hand can lead A part for active force is caused to be converted into the translation of target part rather than be fully converted to the rotation of target part, and then is influenced The intensity of the differential signal of generation.

The problem of resolution ratio of above description is mutually restricted with range, by limitation high resolution sensor in wide range profile Scan the application in occasion.Therefore, in order to fundamentally solve the problems, such as that this kind mutually restricts, the present invention further improves Above-mentioned double monopole differential capacitance structures, specially：The initial pole plate spacing of the first monopole capacitance C1 is set to be more than the second monopole electricity Hold the initial pole plate spacing of C2, and the sensitivity/resolution of sensor determined by the initial pole plate spacing of second electrode capacitance C2, And the range of sensor is determined by the initial pole plate spacing of first electrode capacitance C1.This is embodied in, target part 1 be applied in it is specific During the active force in direction, by around rotating junction 5 along cause the first monopole capacitance C1 pole plate spacing reduce and the second monopole The increased direction of pole plate spacing of capacitance C2 rotates, and therefore, can set the initial pole plate spacing of the second monopole capacitance C2 It is sufficiently small, to obtain very high initial sensitivity, and since the initial pole plate spacing of the first monopole capacitance C1 is relatively large, make Relatively large range can also be had while obtaining highly sensitive by obtaining sensor.Specifically, with the first monopole capacitance C1 Initial pole plate spacing be the three times of initial pole plate spacing of the second monopole capacitance C2 exemplified by, identical double single of antipode plate spacing Pole differential capacitance structure, under equal sensitivity, the range of inventive sensor will be twice big, and under equal range, this hair The sensitivity of bright sensor will be high octuple, and advantage is clearly.

Figure 11 is a kind of structure diagram for embodiment that the initial pole plate spacing of two monopole capacitances does not wait.

According to Figure 11, the sensor include target part 1, probe 2 and two induction pieces 3, two induction pieces 3 respectively by Labeled as induction pieces 3a, 3b.Target part 1 is connected and is supported on rotating junction 5, forms double wrap board structures.Induction pieces 3a, 3b sets up separately in the both sides of rotating junction 5, and positioned at the same side of target part 1, induction pieces 3a forms the first monopole with target part 1 Capacitance C1, induction pieces 3b form the second monopole capacitance C2 with target part 1, and the initial pole plate spacing of the first monopole capacitance C1 is more than The initial pole plate spacing of second monopole capacitance C2.Rotating junction 5 is relatively fixed with two induction pieces 3, and then will rotation connection 5, two, portion induction pieces 3 and the connection of target part 1 form a structure entirety SA.

Probe 2 is arranged to receive active force, and active force is transferred in target part 1, can make target part 1 to generate The torque rotated around rotating junction 5.Therefore, probe 2 should be fixedly connected in target part 1, here, probe 2 can be with target Part 1 is integrally formed, and also can be separately formed and passed through the means such as bonding, ultrasonic bonding and is fixedly connected in target part 1.

In order to realize target part 1 around rotating junction 5 along cause the first monopole capacitance C1 pole plate spacing reduce and second The increased direction of pole plate spacing of monopole capacitance C2 rotates, which is arranged on target part 1 in the embodiment shown in fig. 11 On the one side of corresponding induction pieces 3a, so that probe 2 is when receiving repulsive force, driving target part 1 is along causing the first monopole capacitance The direction that the pole plate spacing of C1 reduces rotates, the counter clockwise direction in corresponding diagram 11.

Figure 12 is the structure diagram for second of embodiment that the initial pole plate spacing of two monopole capacitances does not wait.

According to Figure 12, target part 1 is connected and is supported on rotating junction 5, forms single wrap board structure.Induction pieces 3a, 3b set up separately in the both sides of target part 1, and induction pieces 3a forms the first monopole capacitance C1, induction pieces 3b and target part with target part 1 1 forms the second monopole capacitance C2.Rotating junction 5 is relatively fixed with two induction pieces 3, and then by the sense of rotating junction 5, two Part 3 and target part 1 is answered to connect and form a structure entirety SA.

In order to realize target part 1 around rotating junction 5 along cause the first monopole capacitance C1 pole plate spacing reduce and second The increased direction of pole plate spacing of monopole capacitance C2 rotates, which is arranged on target part 1 in the embodiment shown in fig. 12 Towards on the surface of induction pieces 3b, so that probe 2 is when receiving repulsive force, driving target part 1 is along causing the first monopole capacitance The direction that the pole plate spacing of C1 reduces rotates, the counter clockwise direction in corresponding diagram 12.

Capacitance differential sensor CDS of the present invention can further include other two induction pieces 3, other two induction pieces 3 also with Rotating junction 5 is relatively fixed, and the connection of rotating junction 5, target part 3 and other two induction pieces 3 is formed another knot Structure is whole, i.e., target part 1 also forms double monopole capacitance differential configurations as described above with other two induction pieces 3.For this purpose, target Part 1 and rotating junction 5 should use double wrap board structures as shown in Figure 10 and Figure 11 so that target part 1 be located at itself one Two induction pieces of side form a double monopole capacitance differential configurations and are formed separately with two induction pieces positioned at itself opposite side One double monopole capacitance differential configuration makes target part 1 form one with two induction pieces positioned at 5 one side of rotating junction Double monopole capacitance differential configurations and form another pair of monopole capacitance with two induction pieces positioned at 5 opposite side of rotating junction Differential configuration.In this way, inventive sensor CDS when probe 2 is applied in active force, will generate two pairs of differential signals, and by two To differential signal superposition output to signal processor, to further improve the reliability of inventive sensor and resistant to common code interference Ability.

Figure 13 is to form that two structures are whole and the structure of the embodiment of the initial pole plate spacing of two monopole capacitances not etc. Schematic diagram.

According to Figure 13, which further includes another on the basis of Figure 10 and embodiment illustrated in fig. 11 Outer two induction pieces, this other two induction pieces are still marked as 3a, 3b, i.e., in this embodiment, there are two senses for sensor tool Part 3a and two induction pieces 3b are answered, wherein, an induction pieces 3a and an induction pieces 3b set up separately in the one side of target part 2 to be rotated The both sides of connecting portion 5, another induction pieces 3a and another induction pieces 3b also set up separately in the opposite side of target part 2 to be rotatablely connected The both sides in portion 5, and two induction pieces 3a are located at the not homonymy of rotating junction 5, two induction pieces 3b also are located at rotating junction 5 Not homonymy.

On this basis, each induction pieces 3a each forms a first monopole capacitance C1, each induction pieces with target part 2 3b each forms a second monopole capacitance C2 with target part 2, and each first monopole capacitance C1 can be with any one the second list Electrode capacitance C2 forms double monopole capacitance differential configurations, and then output difference signal.In order to realize that differential signal is superimposed, this other two A induction pieces 3a, 3b should be also correspondingly connected with differential signal outputs, i.e., two induction pieces of corresponding first monopole capacitance C1 3a is connected with the positive output end in differential signal outputs, and two induction pieces 3b of corresponding second monopole capacitance C2 believe with difference Negative output terminal connection in number output terminal.

In order to realize target part 1 around rotating junction 5 along cause the first monopole capacitance C1 pole plate spacing reduce and second The increased direction of pole plate spacing of monopole capacitance C2 rotates, which is arranged on target part 1 in the embodiment shown in fig. 13 Towards on the surface of induction pieces 3b, so that probe 2 is when receiving repulsive force, driving target part 1 is along causing the first monopole capacitance The direction that the pole plate spacing of C1 reduces rotates, the counter clockwise direction in corresponding diagram 13.

In addition, two sensings can be passed through there are four the sensor of induction pieces 3 for the tool similar to embodiment illustrated in fig. 13 Part and target part 2 form above-mentioned first monopole capacitance and the second monopole capacitance, and by other two induction pieces each and target Part 2 forms an electrostatic actuator, i.e., is used using other two induction pieces as electrostatic drive electrodes, this is needed other two The bias voltage input of induction pieces and sensor connects.In this way, lead to when active force disappears (when corresponding measured object is removed) It crosses and applies the bias voltage of relative target part 2 to other two induction pieces two electrostatic actuators will be made to generate electrostatic force, and by The torque that direction is opposite, size is identical can be generated for target part 2 in the electrostatic force that two electrostatic actuators generate, therefore Enable to target part 2 under the action of electrostatic force Rapid reset to the equilbrium position of non-stress.This explanation, this kind of structure can The response speed of target part 1 is effectively improved, makes the mechanical property of its response characteristic independent of component in itself.

With reference to the embodiment shown in above-mentioned Figure 11 to Figure 13, by setting the first monopole capacitance C1 and the second monopole capacitance C2 With equal initial pole plate spacing, you can directly obtain the other embodiment of capacitance differential sensor CDS of the present invention, and for The equal each embodiment of initial pole plate spacing, by the installation site without limiting probe 2 according to force direction.

In order to improve the antijamming capability of sensor, above-mentioned induction pieces 3 can include capacitance shield body and make as pole plate Capacitive sensing body, to form above-mentioned monopole capacitance by capacitive sensing body and target part 2, and by capacitance shield body with being grounded End connection, and then play shield effectiveness.On this basis, rotating junction 5 can be fixedly connected on to the capacitance of arbitrary induction pieces 3 On shield, in this way, target part 1 just can be conveniently by the rotating junction 5 of interconnection and capacitance shield body and ground connection End connection.

The capacitance shield body can be integrally formed with capacitive sensing body, separately formed can also be again combined, Er Qiewei Two induction pieces 3a, 3b in 2 the same side of target part can share capacitance shield body.

By taking the capacitance shield body of induction pieces 3 and capacitive sensing body by integral forming as an example, the material of main parts of the induction pieces 3 can be with It is conductor or insulator, if material of main part is conductor, such as copper or aluminium, then capacitance shield body and capacitive sensing Body surface face is required for carrying out insulating processing, to prevent capacitive sensing body and capacitance shield body from contacting directly.The surface insulation The method of processing is, for example, to sink in conductive surface adhering plastic film, electro-insulating rubber, resin, magnetron sputtering, hot evaporation or atom Product oxide layer etc..If material of main part is insulator, such as ceramics, glass and printed circuit board (PCB) material, main body local surfaces It needs, into column conductorization processing, to form corresponding capacitance shield body and capacitive sensing body.The method of surface conductorization processing is for example For metal vacuum evaporation coating, surface metal-layer stickup or plastic electronic conductor printing etc..

Figure 14 a and Figure 14 b are that two induction pieces 3a, 3b share shield, and a kind of implementation that material of main part is insulator The structure diagram of example.

According to Figure 14 a and Figure 14 b, the capacitive sensing body of the capacitive sensing body 301a and induction pieces 3b of induction pieces 3a 301b is arranged on insulating body 303, and induction pieces 3a, 3b share capacitance shield body 302, capacitance shield body 302 and capacitance sense Body 301a, 301b is answered to be separated by insulating body 303.

Two capacitive sensing body 301a, 301b and capacitance shield body 302 can pass through metal on insulating body 303 Evaporation coating or printed circuit production method are formed.By taking printed circuit production method as an example, which may include as follows Step：

Step S1：One layer of metal conductor layer is set in the whole surface of insulating body.

Step S2：In the periphery of the forming position of corresponding two capacitive sensing bodies 301a, 301b, pass through printed circuit board (PCB) Production method weeds out metal material so as to expose insulating body, is formed and is looped around capacitive sensing body 301a, 301b periphery Insulated ring 3031, and the residual metallic conductor layer in addition to capacitive sensing body 301a, 301b will become capacitance shield body 302.

This kind of method makes simple, easy mass production compared with machining process, at low cost, and can make Make more complicated sensing surface shape.

In the embodiment shown in Figure 14 a and Figure 14 b, two capacitive sensing bodies 301a, 301b are essentially rectangle, this two A capacitive sensing body 301a, 301b can also be configured to square, circle, ellipse etc..

Integrated formed structure may be employed in above-mentioned target part 1 and rotating junction 5, can also again be assembled using separately formed Structure together.Above-mentioned probe 2 and target part 1 are equally that integrated formed structure may be employed, and can also be used separately formed The structure being fixed together again by the means such as being bonded, welding, wherein, it is more demanding in the tip radius to probe 2 Field of precision measurement, preferably using separately formed structure, in this way, the methods of electrochemical corrosion can be passed through individually process it is full The probe of sufficient required precision.

Figure 15 is target part 1, rotating junction 5 and a kind of integrally formed structure diagram of embodiment of probe 2.

In the embodiment shown in fig. 15, rotating junction 5 is marked as 5a, and for elastic torsion-beam form, which turns round The both ends of beam 5a have torsion-beam fixing piece 502a, and the elasticity torsion-beam 5a is opposite by torsion-beam fixing piece 502a and two induction pieces 3 It is fixed, and target part 1 is then connected to the interlude 501a (portions i.e. between two torsion-beam fixing piece 502a of elastic torsion-beam 5a Point) on form double wrap board structures so that target part 1 realizes target part 1 in stress using the twisting action of elastic torsion-beam 5a It rotates.

Above-mentioned causes the relatively single-ended fixed cantilever design of the fixed structure in elasticity torsion-beam 5a both ends to be easier to realize limit The limitation of relative movement is made, because for the torsion-beam of phase same material, in the case where active force is identical, the deflection of cantilever design It will be 64 times of deflection of both ends fixed structure, therefore, be easier to using the fixed structure in both ends by elastic torsion-beam material The selection of matter realizes that this kind limits in range ability.

According to Figure 15, target part 1, rotating junction (or claiming elastic torsion-beam) 5a and probe 2 are integrally formed Sheet metal can be formed by linear cutter.After the completion of probe 2 is through linear cutter, it can be allowed to by special fixture and mesh Tender 1 is mutually perpendicular to (outside perpendicular to paper), so as to generate torque by being contacted with measured object to target part transmission Active force.For the stairstepping target part in Figure 11, Figure 11 and embodiment illustrated in fig. 13, and it is real by punching press after cutting on line It is existing.

Here, can meet elasticity torsion-beam 5a to the connection function of target part 1 on the premise of, as far as possible reduce target part 1 and Connection length between elastic torsion-beam 5a, to improve the dynamic property of target part 1.Alternatively, it is also possible to by reducing target part 1 Size, and then the mode for mitigating the weight of target part 1 improves the dynamic property of target part 1.

Figure 16 is the structure diagram of target part 1, rotating junction 5 and integrally formed second of the embodiment of probe.

According to Figure 16, a main distinction of the embodiment and embodiment illustrated in fig. 15 is that the embodiment is pair The target part of single wrap board structure is answered, i.e. target part 1 is located at the one side of elastic torsion-beam 5a.

Another main distinction of the embodiment and embodiment illustrated in fig. 15 is that inventive sensor further includes and target 1 integrally formed fixture of part reserves portion 4, which reserves portion 4 and outwards extended in parallel via the edge of target part 1, and probe 2 is then It takes shape in fixture and reserves the edge in portion 4, and be bent to reserve portion 4 perpendicular to fixture.

Fixture is set to reserve acting as portion 4：Since the sheet metal that linear cutter forms usually has warpage, this meeting The minimum clearance that can be formed between target part 1 and induction pieces 3 is limited in, so as to influence the sensitivity of sensor；And in target 1 periphery of part sets fixture to reserve portion 4, then the correspondence fixture that blade acts on base material can be made to reserve on the part in portion 4, and then can be with By the part of the correspondence target part 1 of special fixture fixing substrate when cutting on line is processed, so that target part 1 is smooth, with Convenient for forming more small―gap suture between target part 1 and induction pieces 3, the sensitivity of sensor is improved.

The structure that fixture reserves portion 4 is set to be equally applicable to the sensors of double wrap board structures e.g. shown in Figure 15.

Figure 17 is the structure diagram of target part 1 and a kind of separately formed embodiment in rotating junction 5.

In this embodiment, rotating junction 5 is marked as 5b, is similarly elastic torsion-beam form, should according to Figure 17 Elastic torsion-beam 5b is a wires, which is provided with a row threading hole 101, i.e., all threading holes 101 are in straight line Upper arrangement, in this way, said structure entirety SA can by metal wire sequentially through each threading hole 101 structure by target Part 1 is connected on the centre position of elastic torsion-beam 5b, so that target part 1 is real by the twisting action of metal wire when stress is acted on The rotation of existing target part 1.

The metal wire can be compressed in the state of exceptionally straight at both ends by gasket, and pass through screw-nut relative induction part 3 It is fixed, such as be fixed on the insulating body of induction pieces 3.

Here, since metal wire can be thinner than the elastic torsion-beam 5a in Figure 15 and embodiment illustrated in fig. 16, and metal wire Cross section for circle, therefore, metal wire have smaller torsion stiffness, sensitivity can be further improved.

Figure 18 is the structure diagram of target part 1 and the separately formed another embodiment in rotating junction 5.

According to 18, the main distinction of the embodiment and embodiment illustrated in fig. 17 is, elastic torsion-beam 5b is two Metal wire, accordingly, target part 1 are provided with the two row threading holes 101,102 arranged in same direction, in this way, said structure is whole Body SA is that each threading hole 101 is sequentially passed through by a wires and causes another wires sequentially through each Target part 1 is connected on elastic torsion-beam 5b by the structure of threading hole 102.

Figure 19 is the structure diagram of target part 1 and the third separately formed embodiment of rotating junction 5.

In this embodiment, which is marked as 5c, according to Figure 19, rotating junction 5c supports It is connected between induction pieces 3 and target part 1, and with 1 point contact of target part, the connection e.g. bonding, ultrasonic bonding etc., with Make target part 1 in stress around rotating junction 5c overturn realize target part 1 rotation, this kind of structure it is relatively above-mentioned pass through bullet Property torsion-beam 5a, 5b twisting action realize that the structure of the rotation of target part 1 can obtain higher sensitivity.

In the embodiment shown in Figure 19, rotating junction 5c be designed to cone or pyramid, with realize with Point contact connection between target part 1.

Figure 20 is corresponding diagram 15 and embodiment illustrated in fig. 16, realizes that rotating junction 5a and induction pieces 3 are relatively-stationary A kind of decomposition texture schematic diagram of embodiment.

According to Figure 20, in rotating junction/set between the torsion-beam fixing piece 502a of elasticity torsion-beam 5a and induction pieces 3 Separator 6, to ensure that the spacing between induction pieces 3 and target part 1 is set.

Torsion-beam fixing piece 502a is provided with connection through hole 5021a, and separator 6 is provided with to align with being connected through hole 5021a Connection through hole 601, induction pieces 3 are for example provided with the connection alignd with being connected through hole 5021a in the position of capacitance shield body 302 Through hole (not shown), in this way, carry out between rotating junction 5a and induction pieces 3 when interfixing, bolt can be passed through Sequentially pass through the connection knot that the connection through hole on connection through hole 5021a, connection through hole 601 and induction pieces 3 is locked with nut Structure realizes interfixing between rotating junction 5a and induction pieces 3.

The structure of induction pieces 3 is both provided with for 1 both sides of target part, it can be by one induction pieces 3 of screw bolt passes Connect through hole, the connection through hole 601 on a separator 6, connection through hole 5021a, the connection through hole 601 on another separator 6 and The connection structure that connection through hole on another induction pieces 3 is locked with nut, realizes rotating junction 5a and all induction pieces 3 Between interfix.

The embodiment that structure entirety SA is formed by macroscopic view processing is explained above, here, structure entirety SA can also Formed by micro Process, specific steps for example including：

Step S201：Monocrystalline silicon is etched through first time photoetching and KOH, and several microns of shallow slots, and definition key are formed in silicon face Close region.

Step S202, monocrystalline silicon are etched through second of photoetching and KOH, are formed another shallow slot in silicon face, and then are formed The target part of forge piece of step type structure.

Step S203, silicon front diffusing, doping phosphorus or boron form contact zone.

Step S204, photoetching, sputtering Ti/Pt/Au metals, form the electrode as induction pieces on glass.

Step S205 in bond area, makes silicon and glass carry out anode linkage under 360 DEG C -380 DEG C, 1000V.

Step S206, using KOH solution chemical reduction silicon chip to tens microns of thickness, to ensure the torsion stiffness of structure foot It is enough small.

Step S207 using sense coupling, discharges structure sliver, obtains structure entirety SA.

The sensor formed by micro Process can realize smaller pole plate spacing, and then it is high to form sensitivity Sensor.

Figure 21 is the structure diagram of another embodiment of capacitance differential sensor of the present invention.

According to Figure 21, which is a kind of parallel-moving type capacitance differential sensor, including a mesh Tender M, two induction pieces S and at least one elastic cantilever A, probe are fixedly connected with target part M, such as can be on target part M Installation casing T is set, wherein, installation casing T has threaded hole, and forms screw rod in probe base, in this way, passing through probe and peace The two can be securely fixed by the thread fitting connection between tubing T to link together.

Two induction pieces S set up separately forms a monopole capacitance, each bullet in the both sides of target part M and each with target part M The opposite two induction pieces S of the first end of property cantilever A and target part M connections, second end are fixed, by two induction pieces S, target parts M and all elastic cantilever A are connected to become a structure entirety.Induction pieces S can equally include capacitance shield body and as pole The capacitive sensing body that plate uses, capacitive sensing body can be for example fixedly connected by thin-walled hollow connector with capacitance shield body, But also can set to house the storage tank of capacitive sensing body on capacitance shield body, and then by reducing capacitive sensing body Contact area between capacitance shield body reduces constant capacitance, improves signal sampling rate and measurement sensitivity.Carrying out elasticity The second end of elastic cantilever A when being fixedly connected, is fixedly connected on capacitance by the second end of cantilever A with respect to two induction pieces S Illustrate a kind of alternative connection structure exemplified by shield, be specially：In the second end and two induction pieces of elastic cantilever A One separator P1 is respectively set between the capacitance shield body of S, to ensure that the spacing between capacitive sensing body and target part M is set, And this can by the capacitance shield body of one induction pieces S of screw bolt passes, a separator P1, elastic cantilever A The connection structure that the capacitance shield body at two ends, another separator P1 and another induction pieces S is locked with nut is realized The second end of elastic cantilever A is with respect to the fixation of two induction pieces S.It is set based on said structure, the sensor is opposite in target part M Differential signal will be generated during two induction pieces S movements, is specially：When target part M is moved, between target part M and two induction pieces S Distance by an increase, a reduction, and increase suitable with the amount reduced, and then generation can reflect the displacement of target part M Measure and be applied to the differential signal of the active force on target part M.

Figure 22 is a kind of frame principle figure of implementation structure of profile scan system according to the present invention.

According to Figure 22, which includes signal processor U2, display U3, X-direction driving voltage hair Raw device U1X, Y-direction driving voltage generator U1Y, Z-direction driving voltage generator U1Z and Portable wheel according to the present invention Wide instrument or profile scan microscope.

X-direction driving voltage generator U1X is used for the driving voltage input terminal to X-direction piezoelectric ceramic actuator PCSX Driving voltage is provided, to carry out the scanning of X-direction to sample surface via probe.

Y-direction driving voltage generator U1Y is used for the driving voltage input terminal to Y-direction piezoelectric ceramic actuator PCSY Driving voltage is provided, to carry out the scanning of Y-direction to sample surface via probe.

The differential signal outputs of capacitance differential sensor CDS are corresponding with the differential signal input of signal processor U2 to be connected It connects, the capacitance differential sensor CDS differential signals generated is exported to signal processor U2, capacitance differential sensor CDS's Ground terminal is connected with the ground wire of signal processor U2；Signal processor U2 be used to calculating the currency of differential signal and setting value it Between difference, and exported difference as feedback signal to Z-direction driving voltage generator U1Z.

Z-direction driving voltage generator U1Z is used to be provided to Z-direction piezoelectric ceramics according to feedback signal generation driving voltage The driving voltage input terminal of driver U1Z realizes the liftings of capacitance differential sensor CDS in z-direction.

Display U3 is used to show the driving voltage that Z-direction driving voltage generator U1Z is generated, and utilizes the driving of display Voltage characterizes the surface profile of sample.

For having the moving seesaw-type capacitance differential sensor there are two electrostatic actuator, the bias voltage input of sensor can It is connected with the bias voltage output of signal processor U2, to provide Rapid reset as sensor U1 via signal processor U2 Bias voltage can also be separately provided a bias voltage generator and provide the bias voltage, and by signal processor U2 Control the output of bias voltage generator.

Each embodiment in this specification is described by the way of progressive, identical similar portion between each embodiment Point cross-reference, the highlights of each of the examples are difference from other examples, and each embodiment It can be used alone or be combined with each other as needed.

Although some specific embodiments of the present invention are described in detail by example, the skill of this field Art personnel it should be understood that example above merely to illustrating, the scope being not intended to be limiting of the invention.The skill of this field Art personnel are it should be understood that can without departing from the scope and spirit of the present invention modify to above example.This hair Bright scope is defined by the following claims.

Claims (10)

1. a kind of portable contourgraph, which is characterized in that including：

Three axis piezoelectric ceramic scanatrons, including X-direction, Y-direction and Z-direction piezoelectric ceramic actuator, and the X-direction, Y-direction It is mutually orthogonal with Z-direction；Each piezoelectric ceramic actuator includes flexible amplification mechanism, mounted on the flexible amplification mechanism On piezoelectric ceramics and via the piezoelectric ceramics draw driving voltage input terminal, the flexible amplification mechanism have fix End and tache motorice, the flexible amplification mechanism are provided so that the tache motorice generation is amplified the deformation of piezoelectric ceramics Straight-line displacement；The fixing end of the X-direction piezoelectric ceramic actuator is fixedly connected with fixed bottom plate, and the X-direction piezoelectricity Ceramic driver is set in the orientation of straight-line displacement corresponding tache motorice is caused to generate in X direction；The Y-direction piezoelectric ceramics drives The fixing end of dynamic device is fixedly connected with the tache motorice of the X-direction piezoelectric ceramic actuator, and the Y-direction Piezoelectric Ceramic Device is set in the orientation that corresponding tache motorice is caused to generate straight-line displacement along Y-direction；The Z-direction piezoelectric ceramic actuator is consolidated Fixed end is fixedly connected with the tache motorice of the Y-direction piezoelectric ceramic actuator, and the Z-direction piezoelectric ceramic actuator is causing Corresponding tache motorice is generated along Z-direction and set in the orientation of straight-line displacement；And

Capacitance differential sensor, including differential signal outputs, ground terminal, target part, probe and two induction pieces, the target Part is connected with the ground terminal, and the probe is fixedly connected along the Z-direction with the target part, to be transferred to the target part Active force；Described two induction pieces are correspondingly connected with the differential signal outputs, and each form one with the target part Monopole capacitance；The capacitance differential sensor is arranged to：The pole plate spacing of two monopole capacitances is generated according to the active force Variation equal in magnitude, direction is opposite, with via the differential signal outputs output difference signal；Described two induction pieces with The tache motorice of the Z-direction piezoelectric ceramic actuator is fixedly connected.

2. portable contourgraph according to claim 1, which is characterized in that the three axis piezoelectric ceramic scanatron is mounted on In lens barrel, the fixed bottom plate is fixedly connected with the lens barrel, at least probe portion of the capacitance differential sensor Lease making is from the lens barrel to exposing outside.

3. portable contourgraph according to claim 1 or 2, which is characterized in that the capacitance differential sensor further includes Rotating junction, the target part are connected on the rotating junction, and the rotating junction is limited with described two induction pieces System is relatively movably fixedly connected, and the target part, the rotating junction are connected to form one with described two induction pieces A structure is whole；The structure is integrally provided so that the target part when receiving the active force around the company of rotation Socket part turns to corresponding equilbrium position, and described rotate causes the pole plate spacing of described two monopole capacitances to generate size phase Deng the opposite variation in, direction, with via the differential signal outputs output difference signal.

4. portable contourgraph according to claim 3, which is characterized in that the rotating junction is elastic torsion-beam, institute The both ends and described two induction pieces for stating elastic torsion-beam are relatively fixed, and the target part and the interlude of the elastic torsion-beam connect It connects；

The elasticity torsion-beam is further integrally formed with the target part；Alternatively,

The elasticity torsion-beam is further a wires, and the target part is provided with a row threading hole, and the target part passes through So that the structure that the metal wire sequentially passes through each threading hole is connected on the rotating junction；Alternatively,

The elasticity torsion-beam is further two wires, and the target part is provided with the two row threading arranged in same direction Hole, the structure that the target part sequentially passes through each threading hole of respective column by every wires are connected to the rotation On connecting portion.

5. portable contourgraph according to claim 3, which is characterized in that the target part is supported on the rotation connection In portion, and the rotating junction is connected with the target part point contact.

6. portable contourgraph according to claim 3, which is characterized in that the induction pieces include capacitive sensing body and with The capacitance shield body of the capacitive sensing body insulation connection, the induction pieces pass through the capacitive sensing body and the target part shape Into corresponding monopole capacitance；

The capacitance shield body is connected with the ground terminal, and the rotating junction is fixedly connected on the capacitance plate of arbitrary induction pieces It covers on body, the target part is connected by the rotating junction being fixed together and capacitance shield body with the ground terminal.

7. portable contourgraph according to claim 3, which is characterized in that described two monopole capacitances are in the target part Initial pole plate spacing under equilbrium position in non-stress differs, wherein, the initial pole plate spacing of the first monopole capacitance is larger, The position of the probe is provided so that target part when receiving the active force along the pole plate spacing of the first monopole capacitance The direction to become smaller rotates.

8. portable contourgraph according to claim 1 or 2, which is characterized in that the capacitance differential sensor further includes At least one elastic cantilever, described two induction pieces set up separately in the both sides of the target part, and the first of each elastic cantilever End is connected with the target part, the opposite described two induction pieces of second end are fixed, by the target part, the elastic cantilever and Described two induction pieces connect to form a structure entirety；The structure is integrally provided so that the target part is receiving Corresponding equilbrium position is moved to during the active force, and the movement causes the pole plate spacing of described two monopole capacitances to generate Variation equal in magnitude, direction is opposite, with via the differential signal outputs output difference signal.

9. a kind of profile scan microscope, which is characterized in that including any one of light microscope and claim 1 to 8 Portable contourgraph, three axis piezoelectric ceramic scanatrons of the portable contourgraph are mounted in lens barrel, and described solid Determine bottom plate to be fixedly connected with the lens barrel, at least probe portion of the capacitance differential sensor is via the lens barrel To exposing outside；One object lens interface of the light microscope installs the lens barrel, the light microscope it is other Object lens interface installs standard object lens.

10. a kind of profile scan system, which is characterized in that including signal processor, display, X-direction driving voltage generator, Y-direction driving voltage generator, Z-direction driving voltage generator and Portable wheel described in any item of the claim 1 to 8 Profile scan microscope described in wide instrument or claim 9；

The X-direction driving voltage generator is used to provide driving to the driving voltage input terminal of X-direction piezoelectric ceramic actuator Voltage, to carry out the scanning of X-direction to sample surface via probe；

The Y-direction driving voltage generator is used to provide driving to the driving voltage input terminal of Y-direction piezoelectric ceramic actuator Voltage, to carry out the scanning of Y-direction to sample surface via probe；

The differential signal outputs of the capacitance differential sensor are corresponding with the differential signal input of the signal processor to be connected It connects, the differential signal that the capacitance differential sensor generates is exported to the signal processor, the capacitance differential sense The ground terminal of device is connected with the ground wire of the signal processor；The signal processor is used to calculate the current of the differential signal Difference between value and setting value, and exported the difference as feedback signal to the Z-direction driving voltage generator；

The Z-direction driving voltage generator is used to be provided to Z-direction piezoelectricity pottery according to feedback signal generation driving voltage The driving voltage input terminal of porcelain driver realizes the lifting of the capacitance differential sensor；And

The display is used to show the driving voltage that the Z-direction driving voltage generator generates, and utilizes the driving of display Voltage characterizes the surface profile of sample.