JP2019213311A - Vibration wave motor and driving device having vibration wave motor - Google Patents

Abstract

To provide a compact vibration wave motor that achieves thinning.SOLUTION: A vibration wave motor 100 comprises: a plurality of vibrators 103A, 103B constituted of a piezoelectric element 101 and a vibration plate 102; a friction member 104A having a friction contact surface 104c that contacts the vibrator 103A; pressurizing means that pressurizes the vibrator 103A against the friction member 104A; and guiding means 112 that guides a relative movement between the vibrator 103A and the friction member 104A. The vibrator 103A and the friction member 104A relatively move due to the vibration generated by the vibrator 103A. A direction in which the pressurizing means presses each of the plurality of vibrators 103A, 103B intersects a direction of the relative movement on a vertical plane. The pressurizing means is rotatably held by a rotation shaft 107A and presses each of the plurality of vibrators 103A and 103B in different rotation directions.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a vibration wave motor and a driving device having the vibration wave motor.

  In a conventional direct acting ultrasonic motor, a vibrator to which a piezoelectric element is fixed is vibrated by applying a high frequency voltage to the piezoelectric element. The friction member pressed by the vibrator is driven with high efficiency by the vibration of the vibrator. For example, the direct acting ultrasonic motor of Patent Document 1 can generate a larger driving force by having a plurality of vibrators.

JP, 2006-101022, A

  However, in the direct acting ultrasonic motor disclosed in Patent Document 1, the pressing directions for pressing a plurality of vibrators are parallel, and further, the pressing members are stacked in the pressing direction. Therefore, there is a limit to reducing the thickness in the pressing direction.

  Therefore, an object of the present invention is to provide a compact vibration wave motor that is thin.

  In order to solve the above problems, a vibration wave motor according to the present invention includes a plurality of vibrators each including a piezoelectric element and a diaphragm, a friction member having a friction contact surface in contact with the vibrator, and the vibrator including the vibrator. Pressurizing means for pressurizing the friction member; and guide means for guiding relative movement between the vibrator and the friction member, and the vibrator and the friction member are moved relative to each other by vibration generated by the vibrator. The direction in which the pressurizing unit moves and pressurizes each of the plurality of vibrators intersects the direction of the relative movement on a vertical plane, and the pressurizing unit is rotatably held on a rotating shaft, Each of the plurality of vibrators is pressurized in different rotation directions.

  ADVANTAGE OF THE INVENTION According to this invention, the compact vibration wave motor which implement | achieved thickness reduction can be provided.

1 is a plan view of a vibration wave motor 100 of Example 1. FIG. 1 is a cross-sectional view of a vibration wave motor 100 according to a first embodiment. It is sectional drawing of the vibration wave motor 100 of Example 1 which shows the case where the position of (A)-(C) structural member has shifted | deviated. (A) It is sectional drawing of the lens apparatus which mounted the conventional linear motion type ultrasonic motor 900. FIG. (B) It is sectional drawing of the lens apparatus which mounted the vibration wave motor 100 of Example 1. FIG. It is a front view of the vibration wave motor 200 of Example 2. FIG. FIG. 6 is a cross-sectional view of a vibration wave motor 200 according to a second embodiment. 1 is a cross-sectional view of a lens barrel 20 and a camera body 10 on which a vibration wave motor 100 of Example 1 is mounted.

(Example 1)
Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings. FIG. 1 is a plan view of a direct acting vibration wave motor (hereinafter referred to as “vibration wave motor 100”) according to Embodiment 1 of the present invention. 2 is a cross-sectional view of the vibration wave motor 100 taken along a cross-sectional line II-II in FIG. With reference to FIG.1 and FIG.2, the structure of the vibration wave motor 100 in the present Example 1 is demonstrated. In the following description, a vibration wave motor 100 unitized as an actuator for driving a lens barrel 20 of a digital camera, which will be described later, will be described as an example. However, the usage of the present invention is not limited to this.

  The vibration wave motor 100 according to the first embodiment includes the first vibrator 103A and the second vibrator 103B. Since the basic configuration of the first vibrator 103A and the second vibrator 103B is the same, the second vibrator 103B and members related thereto are shown in parentheses and will be described as necessary. In the drawings, the same reference numerals indicate the same members.

  In this specification, the direction in which the first vibrator 103A (103B) and the first friction member 104A (104B) move relative to each other is defined as the X-axis direction. Angle formed by the friction contact surface 104c of the first friction member 104A to which the first vibrator 103A is pressed and the friction contact surface 104c of the second friction member 104B to which the second vibrator 103B is pressed The direction in which the bisector extends is the Z-axis direction. The direction from the first vibrator 103A to the first friction member 104A is defined as a substantially −Z axis direction, and the direction from the first friction member 104A to the first vibrator 103A is defined as a substantially + Z axis direction. A direction orthogonal to the X-axis direction and the Z-axis direction is taken as a Y-axis direction. The vibration wave motor 100 according to the first embodiment has a long axis in the X-axis direction and is configured by members described below.

  The first vibrator 103 </ b> A (103 </ b> B) includes the diaphragm 102 and the piezoelectric element 101. The piezoelectric element 101 is fixed to the diaphragm 102 with a known adhesive or the like, but the method of bonding the diaphragm 102 and the piezoelectric element 101 is not limited as long as they are bonded. The vibration plate 102 further includes a friction contact portion 102c on the surface opposite to the surface on which the piezoelectric element 101 is fixed, and the friction contact portion 102c is in contact with the friction contact surface 104c in a pressure contact state with pressing. .

  By applying a high-frequency voltage to the piezoelectric element 101, high-frequency vibration (ultrasonic vibration) having a frequency in the ultrasonic region is excited. When ultrasonic vibration is generated in the piezoelectric element 101, a resonance phenomenon occurs in the first vibrator 103 </ b> A (103 </ b> B) configured by the diaphragm 102 and the piezoelectric element 101, and elliptical motion occurs in the frictional contact portion 102 c of the diaphragm 102. Will occur. By changing the frequency and phase of the high-frequency voltage applied to the piezoelectric element 101, a desired motion can be obtained by appropriately changing the rotational direction and ellipticity ratio of the elliptical motion.

  The first vibrator 103A (103B) is fixed to the first vibrator support member 105A (105B) by a known method that does not inhibit the resonance phenomenon. The first vibrator support member 105A (105B) is known in the art so that the diaphragm 102 of the first vibrator 103A (103B) can move in the pressing direction in which the first friction member 104A (104B) is pressed. The vibrator connecting member 106 is held by the method. That is, the first vibrator 103A (103B) is held so as to be movable in a substantially vertical direction with respect to the friction contact surface 104c.

  When viewed from the X axis direction, the first friction member 104A has a friction contact surface 104c and the second friction member 104B have a friction contact surface 104c having an angle of less than 180 degrees. The member 104A and the second friction member 104B are disposed. That is, when viewed from the X-axis direction, the first friction member 104A and the second friction member 104B are arranged in a mountain shape (C shape). The first friction member 104A and the second friction member 104B are connected by a relative drive member 108.

  The pressurizing means includes a first pressurizing member 109A, a second pressurizing member 109B, a pressurizing member connecting shaft 110, and a plurality of pressurizing springs 111. 109 A of 1st pressurization members are provided with the main-body part 109h of the rectangular shape, are equipped with two pivot parts 109e in the edge part of the substantially -Y-axis direction of the main body part 109h, and are opposite to the pivot part 109e. The arm portion 109d is provided on the side. The pivot portion 109e is rotatably engaged with a first rotation shaft 107A provided at an end portion of the transducer coupling member 106 in the substantially −Y axis direction. Similarly, the second pressurizing member 109B includes a main body portion 109h having a rectangular shape, and includes two pivot portions 109e at an end portion of the main body portion 109h in a substantially + Y-axis direction, and is opposed to the pivot portion 109e. The arm portion 109d is provided on the opposite side. The pivot 109e is rotatably engaged with a second rotation shaft 107B provided at an end portion of the transducer coupling member 106 in the substantially + Y-axis direction. The first rotation shaft 107A is provided outward of the first vibrator 103A in the approximately −Y axis direction, and the second rotation shaft 107B is provided outward of the second oscillator 103B in the approximately + Y axis direction. The first rotating shaft 107A and the second rotating shaft 107B are both substantially parallel to the X-axis direction.

  The first pressure member 109A (109B) includes a pressure contact portion 109c at a substantially central portion of the main body portion 109h, and the pressure contact portion 109c contacts the first vibrator support member 105A (105B). doing. As described above, the pivot portion 109e is rotatably engaged, whereby the entire first pressure member 109A (109B) can be rotated like an arm around the pivot portion 109e. The first pressure member 109A and the second pressure member 109B rotate in different rotation directions, and the pressure contact portions 109c are respectively supported by the first vibrator support member 105A and the second vibrator support. The member 105B is pressurized in different rotational directions. That is, the direction in which the first pressure member 109A and the second pressure member 109B pressurize the first vibrator 103A and the second vibrator 103B intersects the direction of relative movement on a vertical plane, The first vibrator 103A and the second vibrator 103B are pressurized in different rotational directions.

  The pressure member connecting shaft 110 is disposed between the first vibrator 103A and the second vibrator 103B, and couples the first pressure member 109A and the second pressure member 109B with two pressure members. The pressing force from the spring 111 is applied to the first pressure member 109A and the second pressure member 109B. The arm portion 109 d of the first pressure member 109 </ b> A (109 </ b> B) has a substantially U shape, engages with the pressure member connecting shaft 110, and the arm portion 109 d is engaged with the pressure member connecting shaft 110. It can swing in the pressurizing direction.

  One of the two pressure springs 111 has a central portion 111c of the pressure spring 111 engaged with an end portion of the pressure member connecting shaft 110 in the -X-axis direction, and similarly, the other one of the two pressure springs 111 to the X of the pressure spring 111 The central portion 111c is separated in the axial direction, and engages with the + X-axis direction end of the pressing member connecting shaft 110. Furthermore, the end portions 111 d in the substantially Y-axis direction of the two pressure springs 111 are hooked on the claw portions 106 c of the transducer coupling member 106, and the two pressure springs 111 are center portions 111 c of the two pressure springs 111. A pressing force in the −Z-axis direction is applied to the pressure member connecting shaft 110 penetrating through the pressure member.

  As described above, the arm portion 109d of the first pressure member 109A (109B) is engaged with the pressure member connecting shaft 110. Then, due to the pressure applied by the two pressure springs 111, the arm portion 109d of the first pressure member 109A (109B) is swung in the Z-axis direction, and the first pressure member is centered on the pivot portion 109e. The entire 109A (109B) rotates like an arm. The first pressure member 109A (109B) is pressurized in different rotational directions, and the first vibrator 103A and the second vibrator 103B are pressurized. In addition, although the pressurization spring 111 in the present Example 1 is a torsion coil spring, if the pressurization force can be obtained, it will not be restricted to this.

  The vibration wave motor 100 includes guide means 112, and the guide means 112 includes a V groove formed in the bottom portion 106 d of the vibrator coupling member 106, a V groove formed in the relative drive member 108, and a rolling member 113. . The rolling member 113 is sandwiched between the V grooves formed in the relative drive member 108 so as to face the V grooves formed in the bottom portion 106 d of the vibrator coupling member 106. Then, as the rolling member 113 rolls, the relative driving member 108 is driven with respect to the vibrator coupling member 106 without a frictional load, and is linearly guided in the X-axis direction. A driving force extraction member 114 is fixed to the relative driving member 108 with a screw (not shown), and is pivotally supported by a guide bar 115, and receives a driving force from the relative driving member 108 and slides in the X-axis direction.

  Next, the force which acts on the structural member of the vibration wave motor 100 will be described. When the load F1 is urged to the pressure member connecting shaft 110 by the two pressure springs 111, the load F1 causes the first pressure member 109A to generate a moment M1 about the first rotation shaft 107A. Similarly, a moment M1 about the second rotation shaft 107B is generated in the second pressure member 109B. The pressure contact portion 109c of the first pressure member 109A (109B) contacts the first vibrator support member 105A (105B) on the rotation path of the first pressure member 109A (109B), and The vibrator support member 105A (105B) is pressurized with a load F2. This load F2 is a pressure that pressurizes the first vibrator 103A (103B) against the first friction member 104A (104B).

  Next, in the vibration wave motor 100 of the present invention, the behavior of each member when the position of the first friction member 104A and the first vibrator support member 105A in the Z-axis direction is changed will be described. 3A to 3C show the first vibrator 103A and the members related to the first vibrator 103A in the cross-sectional view of the vibration wave motor 100 shown in FIG. Since the second vibrator 103B has a symmetric configuration with the first vibrator 103A, the description thereof is omitted in FIGS.

  FIG. 3A shows a case where the intersection point P between the friction contact surface 104c of the first friction member 104A and the friction contact portion 102c of the diaphragm 102 is located at the alternate long and short dash line H1, and is the same as the case shown in FIG. It is. FIG. 3B shows a case where the intersection point P is deviated in the −Z-axis direction from the position shown in FIG. 3A, and the first vibrator 103A pressed against the first friction member 104A. The first vibrator support member 105A is displaced in the direction D1. On the other hand, in the first pressure member 109A, the pivot portion 109e is rotatably engaged with the first rotation shaft 107A located on the alternate long and short dash line H2, and the first vibrator is supported by the pressure contact portion 109c. The member 105A is pressurized. Due to this configuration, the first pressure member 109A rotates in the direction R1 on the first rotation shaft 107A in accordance with the positional deviation of the first vibrator support member 105A, and the position of the pressure member connecting shaft 110 is It changes in the −Z-axis direction from the position indicated by the alternate long and short dash line H3.

  FIG. 3C shows a case where the intersection point P is deviated in the + Z-axis direction from the position shown in FIG. 3A, and the first vibrator 103A pressed against the first friction member 104A and The position of the first vibrator support member 105A is shifted in the direction D2. On the other hand, in the first pressure member 109A, the pivot portion 109e is rotatably engaged with the first rotation shaft 107A located on the alternate long and short dash line H2, and the first vibrator is supported by the pressure contact portion 109c. The member 105A is pressurized. Due to this configuration, the first pressure member 109A rotates in the direction R2 on the first rotation shaft 107A in accordance with the displacement of the first vibrator support member 105A, and the position of the pressure member coupling shaft 110 is It changes in the + Z-axis direction from the position indicated by the alternate long and short dash line H3.

  Since the pressure contact portion 109c of the first pressure member 109A has a hemispherical shape, even if the relative angle between the first pressure member 109A and the first vibrator support member 105A changes, the pressure contact portion 109c. The pressure distribution of the air hardly changes. As a result, even if the position is shifted, the state in which the first vibrator 103A is in stable pressure contact with the first friction member 104A is maintained.

  Next, the excellent effect of the present invention when the vibration wave motor 100 of the present invention and the direct acting ultrasonic motor 900 of the conventional example are mounted on a lens apparatus will be described. FIG. 4A is a cross-sectional view when a conventional direct acting ultrasonic motor 900 is mounted. In the direct acting ultrasonic motor 900, a first friction member 904A and a second friction member 904B are provided. They are arranged in parallel on the same plane (on the XY plane). For this reason, when the direct acting ultrasonic motor 900 is arranged so that the members do not interfere with a cylindrical lens device or the like, it is necessary to increase the diameter of the fixed cylinder 21, and the fixed cylinder 21 and the direct acting super motor A dead space S is formed between the sonic motor 900 and the sonic motor 900. Furthermore, in order to mount the direct acting ultrasonic motor 900, it is necessary to cut out a part 25a of the focus lens holding frame 25 in accordance with the bottom portion 906d of the vibrator coupling member 906.

  On the other hand, FIG. 4B is a cross-sectional view when the vibration wave motor 100 of the present invention is mounted, and the vibration wave motor 100 of the present invention can be arranged according to the cylindrical shape of the lens device. Interference between the bottom portion 106d of the vibrator coupling member 106 of the vibration wave motor 100 and the focus lens holding frame 25 by changing the arrangement angle of the first friction member 104A and the second friction member 104B arranged in the letter C. Can be avoided. Furthermore, the space efficiency is improved by providing the pressure member connecting shaft 110 and the pressure spring 111 in the space between the first vibrator 103A and the second vibrator 103B generated by arranging in a square shape. ing. The vibration wave motor 100 according to the present invention can shorten the dimension in the radial direction of the fixed cylinder 21 by the length δ as compared with the conventional example, and is excellent in reducing the thickness and securing the space for the focus lens holding frame 25. Have

(Example 2)
FIG. 5 is a plan view of a direct-acting vibration wave motor (hereinafter referred to as “vibration wave motor 200”) according to Embodiment 2 of the present invention. 6 is a cross-sectional view of the vibration wave motor 200 taken along a cross-sectional line VI-VI in FIG. With reference to FIGS. 5 and 6, the configuration of the vibration wave motor 200 in the second embodiment will be described. In the second embodiment, members having the same reference numerals as those in the first embodiment are the same members, and thus the description thereof is omitted. The vibration wave motor 200 according to the second embodiment has a long axis in the X-axis direction, and is configured by members described below.

  In the vibration wave motor 200 of the second embodiment, as in the first embodiment, the first friction member 104A and the second friction member 104B are connected by a relative drive member 108. Then, when viewed from the X-axis direction, the first friction member 104A and the second friction member 104B are arranged in a mountain shape (C-shape).

  The pressurizing means includes a first pressurizing member 209A, a second pressurizing member 209B, a pressurizing member connecting shaft 210, and a plurality of pressurizing springs 211. The first pressure member 209A includes a main body 209h having a rectangular shape, and includes two arms 209d at an end portion of the main body 209h in a substantially −Y-axis direction, and the two arms 209d further include an X axis. A claw portion 209f extending in the direction is provided. Further, a pivoting portion 209e is provided on the opposite side facing the claw portion 209f. The pivot portion 209e is rotatably engaged with the pressure member connecting shaft 210 supported by the vibrator connecting member 206. Similarly, the second pressure member 209B includes a main body portion 209h having a rectangular shape, and includes two arm portions 209d at an end portion of the main body portion 209h in a substantially + Y-axis direction, and the two arm portions 209d are further provided. A claw portion 209f extending in the X-axis direction is provided. Further, a pivoting portion 209e is provided on the opposite side facing the claw portion 209f. The pivot portion 209e is rotatably engaged with the pressure member connecting shaft 210 supported by the vibrator connecting member 206.

  The first pressure member 209A (209B) includes a pressure contact portion 209c at a substantially central portion of the main body portion 209h, and the pressure contact portion 209c contacts the first vibrator support member 105A (105B). doing. As described above, the pivot portion 209e is pivotably engaged, whereby the entire first pressure member 209A (209B) can be rotated like an arm around the pivot portion 209e. Then, the first pressure member 209A and the second pressure member 209B rotate in different rotation directions, and each pressure contact portion 209c is supported by the first vibrator support member 105A and the second vibrator support. The member 105B is pressurized in different rotational directions. That is, the direction in which the first pressure member 209A and the second pressure member 209B pressurize the first vibrator 103A and the second vibrator 103B intersects the direction of relative movement on a vertical plane, The first vibrator 103A and the second vibrator 103B are pressurized in different rotational directions.

  The pressure member connecting shaft 210 is disposed between the first vibrator 103A and the second vibrator 103B, and connects the first pressure member 209A and the second pressure member 209B to provide two pressures. The pressing force from the spring 211 is applied to the first pressure member 209A and the second pressure member 209B. The claw portion 209f of the first pressure member 209A (209B) is swingable in the pressure direction.

  One of the two pressure springs 211 has a central portion 211c of the pressure spring 211 engaged with an end portion of the pressure member connecting shaft 210 in the −X-axis direction, and similarly, the other one of the two pressure springs 211 to the X of the pressure spring 211 The central portion 211c is separated from the axial direction and engages with the end portion of the pressing member connecting shaft 210 in the X-axis direction. Further, end portions 211d in the substantially Y-axis direction of the two pressure springs 211 are hooked on the claw portions 209f of the first pressure member 209A (209B), and the two pressure springs 211 are two pressure springs. 211 is supported by a pressure member connecting shaft 210 penetrating through the central portion 211c of 211. A pressure spring 211 is provided between the end face of the first vibrator 103A (103B) and the end face of the vibrator connecting member 206 in the direction of relative movement, and the first pressure member 209A ( 209B) is given a pressing force.

  As described above, the end portions 211d of the two pressure springs 211 in the substantially Y-axis direction are hooked on the claw portions 209f of the first pressure member 209A (209B). The first pressurizing member 209A (209B) is pressed in the pressurizing direction by the pressure applied by the two pressurizing springs 211, and the first pressurizing member 209A (209B) is centered on the pivot 209e. ) Rotates like an arm. The first pressure member 209A (209B) is pressurized in different rotational directions, and the first vibrator 103A and the second vibrator 103B are pressurized. In addition, although the pressurization spring 211 in the present Example 2 is a torsion coil spring, if the pressurization force can be obtained, it will not be restricted to this.

  The vibration wave motor 200 includes guide means 212, and the guide means 212 includes a V groove formed in the bottom portion 206 d of the vibrator coupling member 206, a V groove formed in the relative drive member 108, and a rolling member 113. . The rolling member 113 is sandwiched between the V grooves formed in the relative drive member 108 so as to face the V grooves formed in the bottom 206 d of the vibrator coupling member 206. Then, as the rolling member 113 rolls, the relative drive member 108 is driven without a frictional load with respect to the vibrator coupling member 206, and is linearly guided in the X-axis direction.

  Next, the force which acts on the structural member of the vibration wave motor 200 will be described. When the load F3 is urged to the claw portions 209f of the first pressure member 209A and the second pressure member 209B by the two pressure springs 211, the load F3 is equal to the first pressure member 209A and the second pressure member 209A. A moment M2 about the pressure member connecting shaft 210 is generated in the pressure member 209B. The pressure contact portion 209c of the first pressure member 209A (209B) contacts the first vibrator support member 105A (105B) on the rotation path of the first pressure member 209A (209B), and The vibrator support member 105A (105B) is pressurized with a load F4. The load F4 is a pressure that pressurizes the first vibrator 103A (103B) to the first friction member 104A (104B).

  The vibration wave motor 200 according to the second embodiment can be arranged according to a cylindrical shape such as a lens device as in the first embodiment. Interference between the bottom portion 206d of the vibrator coupling member 206 of the vibration wave motor 200 and the focus lens holding frame 25 by changing the arrangement angle of the first friction member 104A and the second friction member 104B arranged in the letter C. Can be avoided. Furthermore, the space efficiency is improved by providing the pressure member connecting shaft 210 and the pressure spring 211 in the space between the first vibrator 103A and the second vibrator 103B generated by arranging in the letter C. ing. The vibration wave motor 200 of the present invention has excellent effects in reducing the thickness of the fixed cylinder 21 in the radial direction and securing the space for the focus lens holding frame 25.

(Application example)
Next, with reference to FIG. 7, a lens apparatus which is an application example as a driving apparatus having the vibration wave motor 100 of the present invention will be described. In this application example, the vibration wave motor 100 can be easily arranged by adapting the bottom 106d of the vibrator coupling member 106 of the vibration wave motor 100 to a circular arc portion having a cylindrical shape or a convex shape such as a lens device. It is possible. Further, the vibration wave motor 200 of the present invention may be applied, and a device to which the vibration wave motor 100 or 200 is further applied is not limited to a lens device. FIG. 7 shows, as an example, a lens barrel 20 of a lens apparatus in which the vibration wave motor 100 of the present invention is incorporated. Since the lens barrel 20 is substantially rotationally symmetric, only the upper half is shown.

  A lens barrel 20 is detachably attached to a camera body 10 as an imaging device, and an imaging element 1 a is provided in the camera body 10. The mount 11 of the camera body 10 is provided with a bayonet portion for attaching the lens barrel 20 to the camera body 10. The lens barrel 20 has a fixed cylinder 21, and the fixed cylinder 21 is in contact with the flange portion of the mount 11. The fixed cylinder 21 and the mount 11 are fixed to screws (not shown). Further, a front barrel 22 holding the lens G1 and a rear barrel 23 holding the lens G3 are fixed to the fixed barrel 21. The lens barrel 20 further includes a focus lens holding frame 25 and holds the focus lens G2. The focus lens holding frame 25 is further fixed to the driving force extraction member 114 of the vibration wave motor 100 by screws or the like, and is held by a guide bar 115 held by the front lens barrel 22 and the rear lens barrel 23 so as to be linearly movable. Yes. A fixed portion (not shown) is formed on the vibrator coupling member 106 of the vibration wave motor 100 and is fixed to the rear lens barrel 23 with a screw or the like.

  When the movable portion including the driving force extraction member 114 of the vibration wave motor 100 is driven with the above configuration, the driving force of the vibration wave motor 100 is applied to the focus lens holding frame 25 via the driving force extraction member 114. Communicated. The focus lens holding frame 25 is guided by the guide bar 115 and moves straight.

  According to the present invention, it is possible to obtain small vibration wave motors 100 and 200 that have been reduced in thickness in the pressurizing direction, and it is possible to obtain a drive device on which the vibration wave motors 100 and 200 that are reduced in thickness are mounted. The present invention is not limited to the first and second embodiments and application examples, and can take any form as long as it is within the scope of the claims.

DESCRIPTION OF SYMBOLS 101 Piezoelectric element 102 Diaphragm 103A 1st vibrator | oscillator 103B 2nd vibrator | oscillator 104A 1st friction member 104B 2nd friction member 104c Friction contact surface 106,206 Vibrator connection member (connection member)
107A First rotating shaft 107B Second rotating shaft 109A, 209A First pressurizing member (pressurizing means)
109B, 209B Second pressure member (pressure means)
110, 210 Pressure member coupling shafts 111, 211 Pressure springs 112, 212 Guide means

Claims (8)

A plurality of vibrators composed of piezoelectric elements and diaphragms;
A friction member having a friction contact surface in contact with the vibrator;
Pressurizing means for pressurizing the vibrator to the friction member;
A guide means for guiding relative movement between the vibrator and the friction member,
The vibrator and the friction member move relative to each other due to vibration generated by the vibrator,
The direction in which the pressurizing unit pressurizes each of the plurality of vibrators intersects the direction of the relative movement on a vertical plane,
The pressurizing means is rotatably held on a rotating shaft, and pressurizes each of the plurality of vibrators in different rotational directions.   2. The vibration wave motor according to claim 1, further comprising a connecting shaft between the plurality of vibrators, wherein the pressurizing unit pressurizes the plurality of vibrators by engaging with the connecting shaft.   The vibration wave motor according to claim 1, further comprising a plurality of pressure springs provided apart from each other in the direction of relative movement, and pressurizing the plurality of vibrators.   The rotation shaft is provided outside each of the plurality of vibrators, and the pressurizing unit presses the plurality of vibrators by engaging with the rotation shaft. The vibration wave motor according to any one of the above.   4. A connecting member for connecting a plurality of the vibrators, wherein the pressure spring is provided between an end face of the vibrator and an end face of the connecting member in the relative movement direction. The vibration wave motor described in 1. The plurality of vibrators are composed of a first vibrator and a second vibrator,
The first vibrator and the second vibrator are held so as to be movable in a substantially vertical direction with respect to the friction contact surface with which the first vibrator and the second vibrator are in contact,
The pressurizing means includes at least a first pressurizing member that pressurizes the first vibrator and a second pressurizing member that pressurizes the second vibrator,
The rotating shaft is composed of a first rotating shaft and a second rotating shaft,
An end of the first pressure member is rotatably held by the first rotating shaft,
An end of the second pressure member is rotatably held by the second rotation shaft,
6. The vibration wave motor according to claim 1, wherein the first rotation shaft and the second rotation shaft are substantially parallel to the direction of the relative movement. 7.   The vibration wave motor according to any one of claims 1 to 6, wherein the vibration is high-frequency vibration having a frequency in an ultrasonic region, and the vibration wave motor is an ultrasonic motor.   A drive device comprising the vibration wave motor according to claim 1.

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