CN102346117A - Dynamic performance testing device of microradian-level accuracy in-situ torsion material under scanning electronic microscope - Google Patents
Dynamic performance testing device of microradian-level accuracy in-situ torsion material under scanning electronic microscope Download PDFInfo
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- CN102346117A CN102346117A CN201110305111XA CN201110305111A CN102346117A CN 102346117 A CN102346117 A CN 102346117A CN 201110305111X A CN201110305111X A CN 201110305111XA CN 201110305111 A CN201110305111 A CN 201110305111A CN 102346117 A CN102346117 A CN 102346117A
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Abstract
The invention relates to a dynamic performance testing device of a microradian-level accuracy in-situ torsion material under a scanning electronic microscope, which belongs to the electromechanical field. The dynamic performance testing device consists of a precision loading unit, a precision signal detection and control unit, a clamping unit and a connecting unit. The dynamic performance testing device has the advantages of ingenious structure, controllable angular strain rate, and good structure compatibility, vacuum compatibility and electromagnetic compatibility with the scanning electronic microscope, an optical microscope, an atomic force microscope and a Raman spectrometer and the like. The cross-scale in-situ torsion test for a three-dimensional macroscopic test piece can be carried out under the observation of various imaging instruments; and by the dynamic performance testing device, the microscopic deformation and the damage process of the material under the action of the torque can be observed in situ, and the mechanical behavior and the damage mechanism of the material and products made of the material under the micro-nano scale can be revealed to a certain extent.
Description
Technical field
The present invention relates to dynamo-electric field, microradian class precision original position is reversed the material mechanical performance proving installation under particularly a kind of scanning electron microscope.The present invention and scanning electron microscope (SEM), atomic force microscope (AFM), Raman spectrometer and optical microscope etc. have favorable compatibility; In conjunction with above-mentioned Image-forming instrument; To material under torsional interaction microdeformation, damage and destructive process carry out online observation, for disclosing mechanical characteristic and the damage mechanism of material under micro-nano-scale method of testing is provided.
Background technology
In the category of many micro nanometer mechanics parameter testings; Elastic modulus; Shear modulus; Parameters such as yield limit twisting strength are the topmost research objects in the characteristic of material mechanics test; Produced various test to these mechanical quantities; Like torsional technique; Pulling method and nanometer plunging etc.; Certainly will be able to disclose the rule of material deformation damage under the extraneous loading through the in-situ mechanical means of testing; Find more novel phenomenon and rule, the relevant test of being carried out with regard to the large-size test specimen will more help true mechanical behavior and deformation damage mechanism under research material and the goods service state thereof.
One of fundamental test method of torsion test mechanical property of materials test.Twisting test can be measured the intensity and the plasticity of hard brittle material and plastic material, often need carry out twisting test for making the part such as the materials such as axle, spring that often bear moment of torsion.Twisting test is carried out on torsion testing machine, and the gauge length two ends at cylindrical sample during test apply moment of torsion
Μ, at this moment between two cross sections of sample marking distance, produce torsion angle
ф, according to
ΜWith
фVariation can be depicted as torque-corner figure; Simultaneously can obtain corresponding stress-strain diagram; The commercialization torsion testing machine is mainly used in metal or nonmetallic materials are carried out the torsional strength test; Also can carry out the test of various parts, member twisting strength, have functions such as twisting resistance value and torsion angle automatic tracing and measuring generally speaking the measuring accuracy of windup-degree be ± 0.1 °.
At present; Original position is micro-nano to be reversed test and still locates bud; Be embodied in: (1) is on means of testing and method; The test of reversing to the above macroscopic material of characteristic dimension millimeter level; The main ex situ extension test that is undertaken by business-like torsion testing machine does not relate to the in-situ test under the Image-forming instrument environment for use such as scanning electron microscope.And it is comparatively expensive to show equipment, and the characteristics that content measurement is of inadequate achievement have greatly restricted going deep into and development of research.(2) receive the restriction of the cavity space of scanning electron microscope; Present majority research all concentrates on the little/Mechatronic Systems technology of receiving and is the basis; Reverse in the test the simple original position of atomic minor structures such as nanometer and membraneous material is micro-nano; Lack trans-scale in-situ nanometer mechanical test to macro-size (membraneous material or three-dimensional test specimen); Because of the existence of size effect, the research of little member has been restricted the evaluation to the mechanical property of large-size element; (3) see on the observation method; To macroscopical test specimen; Be confined to the original position stretching test under optical microscope and the atomic force microscope more; Optical microscope exists the not enough problem of tangible enlargement ratio; Atomic force microscope then has the slow excessively shortcoming of image taking speed, and two kinds of observation procedures all are difficult to further investigate the influence rule of load change to mechanics of materials behavior and damage mechanism.
Therefore, design a kind of advantages of small volume, compact conformation, measuring accuracy is high, can utilize imaging system on-line monitorings such as electron microscope, and carrying out the Ultra-Low Speed quasistatic to macroscopical test specimen more than the characteristic dimension millimeter level, to reverse the device of test very necessary.
Summary of the invention
The object of the present invention is to provide and a kind ofly reverse the material mechanical performance proving installation, solved the problems referred to above that prior art exists based on microradian class precision original position under the scanning electron microscope of ultra extremely fast quasistatic load mode.The present invention can carry out the original position twisting test and can carry out the precision detection and the closed-loop control of moment of torsion/angular displacement signal synchronously under the dynamic monitoring of Image-forming instruments such as scanning electron microscope.Test with respect to the ex situ on traditional torsion testing machine; The present invention can realize being directed against under the high resolving power micro imaging system in-situ observation of macroscopical test specimen more than the characteristic dimension millimeter level; Having solved existing original position simultaneously reverses in the research mostly to nanotube; The limitation of line and membraneous material; Test platform can be realized the loading mode of " Ultra-Low Speed quasistatic "; The synchronous acquisition of moment of torsion/angular displacement signal and precise closed-loop control; The present invention is by accurate loading unit; Accurate input and control module; Grip unit and linkage unit are formed; Compact conformation; Advantages of small volume; Angular strain speed is controlled, can to have a good use compatible with Zeiss EVO 18 and Hitachi TM-1000 type scanning electron microscope and all kinds of Image-forming instrument with cavity and objective table structure.Can reverse mechanics parameters such as shear modulus that test obtains material, twisting strength through original position, under the situation of known materials Poisson ratio, also can also can obtain the elastic modulus of material through simple computation.Microdeformation, damage and the fracture process that can carry out material through this proving installation carry out in-situ monitoring, for disclosing mechanical characteristic and the damage mechanism of material under micro-nano-scale method of testing are provided.
Above-mentioned purpose of the present invention realizes through following technical scheme:
Microradian class precision original position is reversed the material mechanical performance proving installation under the scanning electron microscope, comprises accurate loading unit, accurate input and control module, grip unit and linkage unit;
Described accurate loading unit comprise precision DC servomotor 1, spring coupling 3 and two-stage than big retarding than twice-enveloping type worm couple, this two-stage is made up of first-stage worm gear worm screw (5,6), second-stage worm gear worm screw (7,26) than twice-enveloping type worm couple than big retarding; This precision DC servomotor 1 is fixed on the proving installation pedestal 15 through motor flange dish 2, and is connected with one-level worm screw 5 through spring coupling 3 and one-level worm shaft bearing 4; This precision DC servomotor 1 can provide high resolving power moment of torsion and angular displacement output; Two-stage than big retarding than twice-enveloping type worm couple can provide 2500:1 than the big retarding ratio; Can slow down, increase square largely to the power of precision DC servomotor 1 output, finally provide Ultra-Low Speed quasi-static load mode; Precision DC servomotor 1 can provide through given pulse drive mode has high-resolution torque power output and angular displacement output; The twice-enveloping type worm couple that is respectively 1:50 via spring coupling 3, two-stage big retarding slows down, increases the motion and the transmission of power of square, the final quasi-static load capability of Ultra-Low Speed of realizing being lower than 0.001r/min largely;
Said accurate input and control module are by accurate torque sensor 19, accurate circle grating chi 9 and count photoelectric encoder 20 with the high line that precision DC servomotor 1 is synchronized with the movement and form; This precision torque sensor 19 is connected with spill planker 18, accurate circle grating chi 9 and the socket of circle Optical grating base; Accurate input and control module can be proving installation and provide and comprise that distortion angular speed, moment of torsion loading speed, scrambler demarcate the feedback signal source of three kinds of analog or digital amounts of angular displacement speed as the pulse/direction closed loop control mode of precision DC servomotor 1, and promptly test platform can realize that permanent angular deforming velocity, permanent moment of torsion loading speed and permanent coding demarcate three kinds of load/unload modes of angular displacement speed;
Said grip unit is made up of the upper and lower pressing plate 12,14,23,24 of driving and driven dental forceps formula clamp body and the pressing plate trip bolt 28 of test specimen 13, dental forceps formula clamp body; This driving and driven dental forceps formula clamp body lower platen 23,24 is located through square opening and prism with circle Optical grating base 8 and torque sensor flange frame 16 respectively; And connect through clamp body attachment screw 27, the driving and driven dental forceps formula clamp body upper and lower pressing plate 12,14,23,24 of test specimen 13 through having laciniation is to compress the mode clamping;
Said linkage unit is made up of spill planker 18, proving installation pedestal 15, motor flange dish 2, read head link 11 and second-stage worm bearing 22, one-level worm bearing 25, circle Optical grating base bearing 30; Circle grating reading head 10 is fixed on the proving installation pedestal 15 through this read head link 11, and through 29 adjustment of read head adjustment screw; Second-stage worm bearing 22, one-level worm bearing 25 are connected with proving installation pedestal 15 through second-stage worm bearing seat 21, one-level worm shaft bearing 4 respectively, and circle Optical grating base bearing 30 is connected with circle Optical grating base 8.
Described dental forceps formula clamp body is by on the active dental forceps formula clamp body; Lower platen 12; 23 and initiatively on the dental forceps formula clamp body; Lower platen 24; 14 form; Active and driven dental forceps formula clamp body lower platen 23; 14 locate through square opening and prism with circle Optical grating base 8 and torque sensor flange frame 16 respectively; And connect through clamp body attachment screw 27; Test specimen 13 is the right cylinder revolving structure; Be provided with the plane of two groups of how much symmetries at clamping zone; Through having the master of laciniation; On the driven dental forceps formula clamp body; Lower platen 12; 14; 23; 24 to compress the mode clamping, to improve clamping stability and reliability.
Described spill planker 18 is slidingly mounted on the proving installation pedestal 15; Accurate torque sensor 19 is rigidly connected with spill planker 18; Through the relative position of the adjustment of the breach on the spill planker 18 with proving installation pedestal 1; And carry out through spill carriage lock screw 17 fastening so that to its clamping gauge lengths of different length test specimen 13 adjustment.
Test platform size of main body of the present invention is about 115mm * 34mm * 78mm; Have good structure compatible property, vacuum compatibility and Electro Magnetic Compatibility with Zeiss EVO 18 and Hitachi TM-1000 type scanning electron microscope, also can use with other main flow commercialization scanning electron microscope, X-ray diffractometer, atomic force microscope and optical microscope etc. are compatible.
Beneficial effect of the present invention is: compared with prior art; Advantages of small volume of the present invention; Compact conformation; Measuring accuracy is high, and angular strain speed is controlled, with various main flow electron microscope vacuum cavity couplings; Have wide range of applications; Can carry out the trans-scale in-situ twisting test to macroscopical test specimen more than the characteristic dimension millimeter meter of various materials, to material and goods thereof load under microdeformation dynamic observe, machine-processed to disclose the mechanical behavior of material under micro-nano-scale with damage.And the synchronous detection through moment of torsion/angular displacement signal, ins conjunction with related algorithm, also moment of torsion-angular displacement curve and the stress-strain curve under the match generation loading automatically.In sum, the present invention is to enriching original position micro nanometer mechanics content measurement and promoting material mechanical performance measuring technology and equipment to have important significance for theories and good application development future.
Description of drawings
Fig. 1 is an overall appearance structural representation of the present invention;
Fig. 2 looks synoptic diagram for master of the present invention;
Fig. 3 looks synoptic diagram for the right side of the present invention;
Fig. 4 is a schematic top plan view of the present invention;
Fig. 5, Fig. 6, Fig. 7 are the structural representation of clamp body of the present invention.
Among the figure: 1, precision DC servomotor; 2, motor flange dish; 3, spring coupling; 4, one-level worm shaft bearing; 5, one-level worm screw; 6, first-stage worm gear; 7, two-stage turbine; 8, justify Optical grating base; 9, justify the grating chi; 10, justify grating reading head; 11, read head link; 12, active dental forceps formula clamp body top board; 13, test specimen; 14, driven dental forceps formula clamp body lower platen; 15, proving installation pedestal; 16, torque sensor flange frame; 17, spill supporting plate lock-screw; 18, spill planker; 19, accurate torque sensor; 20, high line is counted photoelectric encoder; 21, second-stage worm bearing seat; 22, second-stage worm bearing; 23, active dental forceps formula clamp body lower platen; 24, driven dental forceps formula clamp body top board; 25, one-level worm bearing; 26, second-stage worm; 27, clamp body attachment screw; 28, pressing plate trip bolt; 29, read head adjustment screw; 30, justify the Optical grating base bearing.
Embodiment:
Further specify detailed content of the present invention and embodiment thereof below in conjunction with accompanying drawing.
Referring to Fig. 1 to Fig. 7, microradian class precision original position is reversed the material mechanical performance proving installation under the scanning electron microscope of the present invention, comprises accurate loading unit, accurate input and control module, grip unit and linkage unit;
Described accurate loading unit comprise precision DC servomotor 1, spring coupling 3 and two-stage than big retarding than twice-enveloping type worm couple, this two-stage is made up of first-stage worm gear worm screw (5,6), second-stage worm gear worm screw (7,26) than twice-enveloping type worm couple than big retarding; This precision DC servomotor 1 is fixed on the proving installation pedestal 15 through motor flange dish 2, and is connected with one-level worm screw 5 through spring coupling 3 and one-level worm shaft bearing 4; This precision DC servomotor 1 can provide high resolving power moment of torsion and angular displacement output; Two-stage than big retarding than twice-enveloping type worm couple can provide 2500:1 than the big retarding ratio; Can slow down, increase square largely to the power of precision DC servomotor 1 output, finally provide Ultra-Low Speed quasi-static load mode; Precision DC servomotor 1 can provide through given pulse drive mode has high-resolution torque power output and angular displacement output; The twice-enveloping type worm couple that is respectively 1:50 via spring coupling 3, two-stage big retarding slows down, increases the motion and the transmission of power of square, the final quasi-static load capability of Ultra-Low Speed of realizing being lower than 0.001r/min largely;
Said accurate input and control module are by accurate torque sensor 19, accurate circle grating chi 9 and count photoelectric encoder 20 with the high line that precision DC servomotor 1 is synchronized with the movement and form; This precision torque sensor 19 is connected with spill planker 18, accurate circle grating chi 9 and the socket of circle Optical grating base; Accurate input and control module can be proving installation and provide and comprise that distortion angular speed, moment of torsion loading speed, scrambler demarcate the feedback signal source of three kinds of analog or digital amounts of angular displacement speed as the pulse/direction closed loop control mode of precision DC servomotor 1, and promptly test platform can realize that permanent angular deforming velocity, permanent moment of torsion loading speed and permanent coding demarcate three kinds of load/unload modes of angular displacement speed;
Said grip unit is made up of the upper and lower pressing plate 12,14,23,24 of driving and driven dental forceps formula clamp body and the pressing plate trip bolt 28 of test specimen 13, dental forceps formula clamp body; This driving and driven dental forceps formula clamp body lower platen 23,24 is located through square opening and prism with circle Optical grating base 8 and torque sensor flange frame 16 respectively; And connect through clamp body attachment screw 27, the driving and driven dental forceps formula clamp body upper and lower pressing plate 12,14,23,24 of test specimen 13 through having laciniation is to compress the mode clamping;
Said linkage unit is made up of spill planker 18, proving installation pedestal 15, motor flange dish 2, read head link 11 and second-stage worm bearing 22, one-level worm bearing 25, circle Optical grating base bearing 30; Circle grating reading head 10 is fixed on the proving installation pedestal 15 through this read head link 11, and through 29 adjustment of read head adjustment screw; Second-stage worm bearing 22, one-level worm bearing 25 are connected with proving installation pedestal 15 through second-stage worm bearing seat 21, one-level worm shaft bearing 4 respectively, and circle Optical grating base bearing 30 is connected with circle Optical grating base 8.
Described dental forceps formula clamp body is by on the active dental forceps formula clamp body; Lower platen 12; 23 and initiatively on the dental forceps formula clamp body; Lower platen 24; 14 form; Active and driven dental forceps formula clamp body lower platen 23; 14 locate through square opening and prism with circle Optical grating base 8 and torque sensor flange frame 16 respectively; And connect through clamp body attachment screw 27; Test specimen 13 is the right cylinder revolving structure; Be provided with the plane of two groups of how much symmetries at clamping zone; Through having the master of laciniation; On the driven dental forceps formula clamp body; Lower platen 12; 14; 23; 24 to compress the mode clamping, to improve clamping stability and reliability.
Described spill planker 18 is slidingly mounted on the proving installation pedestal 15; Accurate torque sensor 19 is rigidly connected with spill planker 18; Through the relative position of the adjustment of the breach on the spill planker 18 with proving installation pedestal 1; And carry out through spill carriage lock screw 17 fastening so that to its clamping gauge lengths of different length test specimen 13 adjustment.
Test platform size of main body of the present invention is about 115mm * 34mm * 78mm; Have good structure compatible property, vacuum compatibility and Electro Magnetic Compatibility with Zeiss EVO 18 and Hitachi TM-1000 type scanning electron microscope, also can use with other main flow commercialization scanning electron microscope, X-ray diffractometer, atomic force microscope and optical microscope etc. are compatible.
Referring to Fig. 1 to Fig. 7; Microradian class precision original position is reversed the material mechanical performance proving installation under a kind of scanning electron microscope involved in the present invention; The overall dimensions of this apparatus main body part is 115mm * 34mm * 78m; Be that vacuum cavity size and image-forming condition according to Zeiss EVO 18 and Hitachi TM-1000 type scanning electron microscope designs; Can use simultaneously, can be installed in the cavity of various main flow scanning electron microscope and other Image-forming instruments or on the objective table with the compatibility of main flow Image-forming instrument.Concrete components and parts with concrete model are in the proving installation: the precision DC servo motor model number is Maxon EC-MAX22, and 25W, accurate torque tester 19 models are that D-2452-0.2NM, accurate circle grating chi 9 models are Heidenhain RCN727), to count photoelectric encoder 20 models be HEDL9140-1000 to high line.
The present invention is in concrete test process; At first; Test specimen 13 is before reversing test; Need to adopt method for turning to manufacture experimently out shaped specimens; Retained part is manufactured experimently out the symmetrical plane that is used for clamping through the line cutting mode again; And utilize small-sized cylindrical buffing machine that test specimen is carried out polishing to obtain can be used for the better surface smoothness of high resolving power micro-imaging monitoring; Or obtain microstructures such as metallographic through technologies such as chemical corrosions; Then test specimen 13 clampings are being led; On the driven dental forceps formula clamp body; Lower platen 12; 14; 23; In 24, tighten the clamping process that pressing plate trip bolt 28 is accomplished test specimen 13 afterwards.Further, through the relative position of adjustment read head adjustment screw 28 with definite accurate circle grating chi 9 and circle grating reading head 10.Accurate torque sensor 19 two ends are rigidly connected with torque sensor flange frame 16 and spill planker 18 respectively; Then, the accurate position of closing the airtight baffle plate of scanning electron microscope vacuum chamber and in XOY plane, drafting test point through the article carrying platform of scanning electron microscope self.Then; Given permanent angular deformation or the moment of torsion control mode of reversing test; Mode with pulse output drives the beginning test process; Promptly through testing algorithm program setting test condition and parameter; The accurate angular displacement of precision DC servomotor 1 output under the effect of time sequential pulse control signal; Than final realization of deceleration, the increment of twice-enveloping type worm couple the Ultra-Low Speed quasistatic of test specimen 13 is loaded the moment of torsion of 19 pairs of test specimens 13 of accurate torque sensor in the test process than big retarding through two-stage
MDetect; The torsional deflection amount of while test specimen
hPicked up synchronously by precision circle grating chi 9, two paths of signals is through analog to digital conversion and carry out sending into computing machine behind the necessary signal condition.In the whole process of test; Test specimen 13 distortion of materials degree of impairment under loading carries out dynamic monitoring by the scanning electron microscope imaging system of high enlargement ratio; And document image simultaneously, also can obtain the important mechanics parameters such as moment of torsion-angular displacement curve, stress-strain curve, shear modulus and twisting strength of exosyndrome material mechanical property in real time in conjunction with the host computer debugging software.
Claims (4)
1. microradian class precision original position is reversed the material mechanical performance proving installation under the scanning electron microscope, it is characterized in that: comprise accurate loading unit, accurate input and control module, grip unit and linkage unit;
Said accurate loading unit comprise precision DC servomotor (1), spring coupling (3) and two-stage than big retarding than twice-enveloping type worm couple, this two-stage is made up of first-stage worm gear worm screw (5,6), second-stage worm gear worm screw (7,26) than twice-enveloping type worm couple than big retarding; This precision DC servomotor (1) is fixed on the proving installation pedestal (15) through motor flange dish (2), and is connected with one-level worm screw (5) through spring coupling (3);
Said accurate input and control module are justified grating chi (9) by accurate torque sensor (19), precision and are counted photoelectric encoder (20) with the high line that precision DC servomotor (1) is synchronized with the movement and form; This precision torque sensor (19) is connected with spill planker (18), accurate circle grating chi (9) and the socket of circle Optical grating base;
Said grip unit is made up of the upper and lower pressing plate of driving and driven dental forceps formula clamp body (12,14,23,24) and the pressing plate trip bolt (28) of test specimen (13), dental forceps formula clamp body; This driving and driven dental forceps formula clamp body lower platen (23,24) is located through square opening and prism with circle Optical grating base (8) and torque sensor flange frame (16) respectively; And connect through clamp body attachment screw (27), the driving and driven dental forceps formula clamp body upper and lower pressing plate (12,14,23,24) of test specimen (13) through having laciniation is to compress the mode clamping;
Said linkage unit is by spill planker (18); Proving installation pedestal (15); Motor flange dish (2); Read head link (11) and second-stage worm bearing (22); One-level worm bearing (25); Circle Optical grating base bearing (30) is formed; Circle grating reading head (10) is fixed on the proving installation pedestal (15) through this read head link (11); Second-stage worm bearing (22); One-level worm bearing (25) is respectively through second-stage worm bearing seat (21); One-level worm shaft bearing (4) is connected with proving installation pedestal (15), and circle Optical grating base bearing (30) is connected with circle Optical grating base (8).
2. microradian class precision original position is reversed the material mechanical performance proving installation under the scanning electron microscope according to claim 1; It is characterized in that: described dental forceps formula clamp body is by on the active dental forceps formula clamp body; Lower platen (12; 23) and initiatively on the dental forceps formula clamp body; Lower platen (24; 14) form; Active and driven dental forceps formula clamp body lower platen (23; 14) locate through square opening and prism with circle Optical grating base (8) and torque sensor flange frame (16) respectively; And connect through clamp body attachment screw (27); Test specimen (13) is the right cylinder revolving structure; Be provided with two groups of how much symmetrical planes at clamping zone, through having the master of laciniation; On the driven dental forceps formula clamp body; Lower platen (12; 14; 23; 24) to compress the mode clamping.
3. microradian class precision original position is reversed the material mechanical performance proving installation under the scanning electron microscope according to claim 1; It is characterized in that: described spill planker (18) is slidingly mounted on the proving installation pedestal (15); Accurate torque sensor (19) is rigidly connected with spill planker (18); Through the relative position of the adjustment of the breach on the spill planker (18), and carry out fastening through spill carriage lock screw (17) with proving installation pedestal (1).
4. reverse the material mechanical performance proving installation according to microradian class precision original position under any described scanning electron microscope in the claim 1 to 3, it is characterized in that: described test platform size of main body is 115mm * 34mm * 78mm.
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