CN108693034A - The mechanical property in-situ test auxiliary device of flexible substrates film concentrfated load - Google Patents
The mechanical property in-situ test auxiliary device of flexible substrates film concentrfated load Download PDFInfo
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- CN108693034A CN108693034A CN201810406313.5A CN201810406313A CN108693034A CN 108693034 A CN108693034 A CN 108693034A CN 201810406313 A CN201810406313 A CN 201810406313A CN 108693034 A CN108693034 A CN 108693034A
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- film
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- mechanical property
- load
- flexible substrates
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- 238000012360 testing method Methods 0.000 title claims abstract description 46
- 238000011065 in-situ storage Methods 0.000 title claims abstract description 19
- 239000000758 substrate Substances 0.000 title claims abstract description 16
- 230000007246 mechanism Effects 0.000 claims abstract description 17
- 238000005259 measurement Methods 0.000 claims abstract description 9
- 230000008878 coupling Effects 0.000 claims description 7
- 238000010168 coupling process Methods 0.000 claims description 7
- 238000005859 coupling reaction Methods 0.000 claims description 7
- 238000004891 communication Methods 0.000 claims description 2
- 238000012545 processing Methods 0.000 claims description 2
- 239000010408 film Substances 0.000 abstract description 37
- 239000000463 material Substances 0.000 abstract description 29
- 239000010409 thin film Substances 0.000 abstract description 16
- 238000000034 method Methods 0.000 abstract description 9
- 230000008569 process Effects 0.000 abstract description 7
- 238000012625 in-situ measurement Methods 0.000 abstract description 4
- 238000005516 engineering process Methods 0.000 abstract description 3
- 239000004575 stone Substances 0.000 abstract description 2
- 238000004154 testing of material Methods 0.000 abstract description 2
- 238000011160 research Methods 0.000 description 7
- 230000006399 behavior Effects 0.000 description 3
- 230000006835 compression Effects 0.000 description 3
- 238000007906 compression Methods 0.000 description 3
- 230000002929 anti-fatigue Effects 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 230000032798 delamination Effects 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000002086 nanomaterial Substances 0.000 description 2
- 240000002853 Nelumbo nucifera Species 0.000 description 1
- 235000006508 Nelumbo nucifera Nutrition 0.000 description 1
- 235000006510 Nelumbo pentapetala Nutrition 0.000 description 1
- 244000131316 Panax pseudoginseng Species 0.000 description 1
- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 description 1
- 235000003140 Panax quinquefolius Nutrition 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 235000008434 ginseng Nutrition 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000002114 nanocomposite Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000011056 performance test Methods 0.000 description 1
- 238000013001 point bending Methods 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/08—Investigating strength properties of solid materials by application of mechanical stress by applying steady tensile or compressive forces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/02—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/0058—Kind of property studied
- G01N2203/0069—Fatigue, creep, strain-stress relations or elastic constants
- G01N2203/0075—Strain-stress relations or elastic constants
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/02—Details not specific for a particular testing method
- G01N2203/06—Indicating or recording means; Sensing means
- G01N2203/0641—Indicating or recording means; Sensing means using optical, X-ray, ultraviolet, infrared or similar detectors
Abstract
The present invention relates to Material Testing Technology more particularly to a kind of mechanical property in-situ test auxiliary devices of flexible substrates film concentrfated load, include clamping device, teleblem mechanism, load maintainer and Precision measurement unit.The present invention loads concentrfated load to film test piece, and the spherical shape of substrate deformation, the complex deformations such as Curvature varying is caused to lay the first stone for parameters such as the film base binding performance of analysed film material, failure residual stress, overstrains.The present invention can reappear the operating mode that thin-film material is impacted by Hard Inclusion, the deformation, deformation mechanism in situ measurement whole process and mechanical property, be the strong test instrument studied elasticity modulus, internal stress and film base junction of the novel film material under this operating mode and close energy.
Description
Technical field
The present invention relates to Material Testing Technology field, more particularly to a kind of and scanning electron microscope, atomic force microscope, optics are aobvious
The mechanical property in-situ test auxiliary device for the flexible substrates film concentrfated load that the coordinative composition of equipments such as micro mirror use.
Background technology
Currently, nanocomposite, thin-film material have many advantages, such as good good mechanical property, wear-resistant, high temperature resistant,
It is widely applied in every field, such as face coat, optical thin film, Low-E films, magnetic storage medium, micro-electro-mechanical systems
System(MEMS)Etc..If delamination, cracking, bulge etc. occur in use for thin-film device, show that structure occurs in device
Failure and loss function, this needs to be avoided in practical applications.So the research to thin film mechanical performance and antifatigue energy
The test of power just seems extremely important.But the mechanical property due to micro/nano-scale material differs greatly with macroscopic material, for dividing
The cupping machine for analysing the traditional macros of mechanical parameters such as yield strength, fracture strength, the elasticity modulus of material cannot
Meet the Research Requirements of micro/nano-scale material especially thin-film material.Moreover, can not be to thin-film material with traditional tension test
Microstructure observed in real time, can only use microtechnic to material section carry out observational study.Research thin-film material exists
Microscopic appearance variation and damage status under external force stress state have the mechanical behaviors such as the fracture, the delamination that understand material important
Meaning.It is thereby achieved that in-situ monitoring of the thin-film material under loaded-up condition, just seems very urgent and important.
Currently, lot of domestic and international research all concentrates on the development of film original position stretching/compression set.Such as:CN102346117
Torsion material mechanical performance test device, motor pass through worm and gear to microradian class precision in situ under a kind of disclosed scanning electron microscope
Transmission drives micro- turn of active dental forceps, driven dental forceps to cause stress-strain data equipped with torque sensor test torsional deflection.
CN102359912 discloses original position stretching/compression material mechanical test platform under a kind of scanning electron microscope based on semi-static load,
Dual-motors Driving realizes the microcosmic observation stretched with material after compression-loaded.Prior art research film is in a stretched state
The generation and propagation of Morphology Evolution and micro-crack calculate the mechanics parameters such as yield strength, the fracture strength of film, and estimate whereby
The anti-fatigue ability and service life of film.In terms of compressive load, elastic film is carried in single shaft in main research flexible substrate
Fold or buckling under lotus form problem, and the mechanics parameters such as the elasticity modulus of measuring and calculating film, internal stress and combination energy whereby.Such as
Combined load type material Mechanics Performance Testing device is bent in microscope drop-down disclosed in CN102384875, by driving elbow
Sideway feed makes test specimen occur bending and deformation.
CN102331376 discloses a kind of across scale micron-nano scale in-situ three-point bending mechanical property tester, passes through two
Grade Worm Wheel System sends motor power to lead screw, and band movable slider and tup move linearly.
However, existing in-situ test instrument there are the problem of have:(1)It is not comprehensive to simulate operating mode, cannot simulate such as concentrated force
Complex deformation etc. caused by the combined loads such as bending, stretching, warpage caused by load, and thin-film material is in actual use
It is often subject to shock loading;And be unable to measure thin-film material and impacted by concentrfated load, film base binding ability, failure mode
Deng;(2)In-situ test auxiliary device and AFM data are mutual indepedent, it is difficult to reappear thin-film material it is loaded deformation be
To the entire dynamic process of failure, it is not carried out in-situ observation truly;(3)Mechanism is complicated so that microscopic
Angle is bad, such as CN102384875, CN102331376 test piece deformation process observation inconvenience etc., and the examination of CN102331376
Part is pressed on two fasteners by tup(Movable end)On, the detection of thin-film material sample cannot be applicable in.
Invention content
In view of the above problems, the goal of the invention of the present invention be to provide it is a kind of can in situ measurement test specimen complex deformation flexibility
The mechanical property in-situ test auxiliary device of substrate film concentrfated load.
In order to achieve the above object, the scheme that uses of the present invention for:A kind of mechanical property of flexible substrates film concentrfated load is former
Bit test auxiliary device, the difference is that:Include clamping device, teleblem mechanism, load maintainer and Precision measurement list
Member;Clamping device by frame, be connected to the frame tabletting, fastening bolt forms, frame is hollow structure, and film test piece is placed in
On frame, tightens fastening bolt and film test piece is pressed between tabletting and frame;Teleblem mechanism is by heading, connecting rod, bulb
Push rod, axis pin composition, connection club shaft are hinged on frame, and connecting rod head end connection heading, heading is in frame hollow center
Position, the connection heading of connecting rod head end, connecting rod end are connect with bulb push rod, and bulb push rod coordinates with load maintainer;Load
Mechanism includes link, precision DC servo motor, shaft coupling, driving wheel, supporting plate, bearing, and supporting plate is connected to clamping device
Frame side wall, precision DC servo motor is fixedly mounted on link, precision DC servo motor equipped with retarder,
Output shaft is axially coupled with driving wheel by shaft coupling, and drive wheel circumferences side wall is equipped with spiral groove, and teleblem mechanism bulb pushes away
The end of bar and the groove of driving wheel coordinate, and driving wheel bottom is assemblied in by bearing on supporting plate;Precision measurement unit includes
Photoelectric encoder, grating scale, capture card and PC machine, the coaxial phase of precision DC servo motor of photoelectric encoder and load maintainer
Even, grating ruler reading head is mounted on frame, and grating scale main scale is mounted on connection club shaft, photoelectric encoder, grating scale warp
It crosses capture card gathered data and is transferred to PC machine processing, PC machine and microscope host communication.
Preferably, the connecting rod end is equipped with bulb, bulb is embedded in the groove of driving wheel.
Preferably, the tabletting and film test piece contact surface are with decorative pattern.
Preferably, the connecting rod is set as Z-shaped.
Preferably, the frame and link are equipped with the threaded hole that can mount in electron microscope cavity.
Preferably, the elaborate servo direct current generator is equipped with retarder.
The heading of the present invention loads concentrfated load under the driving of motor, to film test piece, causes substrate deformation spherical
Shape, the complex deformations such as Curvature varying are the ginsengs such as film base binding performance, failure residual stress, the overstrain of analysed film material
Number lays the first stone.Atomic force microscope is directly observed with the microstructure change of sample in progressive loading procedure simultaneously, is differentiated
Rate reaches nanometer scale, and obtains the macro-mechanical property of sample, thus can the macromechanics behavior of quantitative study material and micro-
The relationship of sight mechanism.The present invention can reappear the operating mode that thin-film material is impacted by Hard Inclusion, the deformation in situ measurement whole process
, deformation mechanism and mechanical property are to study elasticity modulus, internal stress and film base junction of the novel film material under this operating mode to close
The strong test instrument of energy.
Description of the drawings
Fig. 1 is the schematic three dimensional views that film test piece is clamped in the embodiment of the present invention;
Fig. 2 is the vertical view schematic three dimensional views that film test piece is not clamped in the embodiment of the present invention;
Fig. 3 be the embodiment of the present invention be not clamped film test piece look up schematic three dimensional views;
Fig. 4 is Precision measurement unit principle schematic in the embodiment of the present invention.
Description of symbols in figure:
1- clamping devices, 11- frames, 12- tablettings.
2- teleblems mechanism, 21- headings, 22- connecting rods, 23- bulb push rods, 24- axis pins.
3- load maintainers, 31- links, 32- precision DC servo motors, 33- shaft couplings, 34- driving wheels, 35- supporting plates,
36- bearings.
4- Precision measurement units, 41- photoelectric encoders, 42- capture cards, 43- grating scales, 44- microscope hosts, 45-PC
Machine, 46- drivers
5- film test pieces.
Specific implementation mode
For a better understanding of the present invention, with reference to the accompanying drawings and detailed description to technical scheme of the present invention do into
One step illustrates, referring to Fig. 1 to Fig. 4.
The mechanical property in-situ test auxiliary device of flexible substrates film concentrfated load according to embodiments of the present invention, mainly by four
A constituent part, respectively clamping device 1, teleblem mechanism 2, load maintainer 3 and Precision measurement unit 4.Clamping device 1 includes
It is hollow structure to have frame 11, tabletting 12, frame 11, and film test piece 5 is placed on frame 11, and tabletting 12 and frame 11 are correspondingly provided with
Threaded hole tightens fastening bolt and film test piece 5 is pressed between tabletting 12 and frame 11.The main function of clamping device 1 is
Flexible substrates thin-film material 5 is clamped reliably, test specimen surrounding side remains stationary is kept in test process, so tabletting 12 is set as
Circular ring shape thin slice, for the firm of folder, with decorative pattern on 12 surface of tabletting contacted with film test piece 5.And be cooperation observation,
Frame is diagonally equipped with the threaded hole that can mount in electron microscope cavity.
In order to load concentrfated load to film test piece, it is equipped with teleblem mechanism 2, including heading 21, connecting rod 22, bulb push rod
23, axis pin 24, heading 21 and 5 point contact of film test piece, 21 bottoms of heading are connected to the head end of connecting rod 22, in connecting rod 22
Between body of rod position it is hinged on the frame 11 by axis pin 24,22 head end of connecting rod connection heading 21,22 end of connecting rod and bulb
Push rod 23 connects, and bulb push rod 23 coordinates with load maintainer 3.In order to save height space, connecting rod 22 is set as Z-shaped.Top
Ball 21 is in 11 hollow centre position of frame, loading procedure uniform force.
Load maintainer 3 include link 31, precision DC servo motor 32, shaft coupling 33, driving wheel 34, supporting plate 35,
Bearing 36, supporting plate 35 mainly support entire load maintainer, and 35 side flange of supporting plate is bolted in 11 side wall of frame, support
Driving wheel 34 is equipped with by bearing 36 on plate 35,34 circumferential side wall of driving wheel is equipped with spiral groove, and 2 bulb of teleblem mechanism pushes away
The end of bar 23 be equipped with bulb, bulb be embedded in driving wheel 34 groove in it is matched, 34 bottom of driving wheel is filled by bearing 36
It fits on supporting plate 35, bulb can roll in groove reduces clamping stagnation.22 head end of the difference in height, that is, connecting rod heading 21 of spiral groove
Lifting height.Driving wheel 34 is driven by precision DC servo motor 32, and precision DC servo motor 32 is fixedly mounted on link
On 31, in order to realize the Light deformation of test specimen load, precision DC servo motor 32 is equipped with retarder, precision DC servo motor
32 output shafts are axially coupled by shaft coupling 33 and driving wheel 34.
Precision measurement unit 4 includes photoelectric encoder 41, capture card 42, grating scale 43, PC machine 45 and driver 46,
Photoelectric encoder 41 with the precision DC servo motor 32 of load maintainer is coaxial is connected, 43 reading head of grating scale is mounted on frame 11
On, 43 main scale of grating scale is mounted on 22 body of rod of connecting rod.PC machine 45 drives precision DC servo motor 32 by driver 46,
Photoelectric encoder 41 can be directed to the pulse of precision DC servo motor 32 or the feedback signal of direction controlling offer rate and rotating speed,
Reach precise closed-loop control, grating scale 43 is detected the adjustable height difference of connecting rod 22, since it is rigidity, is converted into top
The adjustable height of ball 21 is poor.Photoelectric encoder 41, grating scale 43 are transferred to 44 analysis meter of PC machine by 42 gathered data of capture card
It calculates, PC machine 44 is communicated with microscope host 44, synchronous with AFM data to realize in-situ test auxiliary device,
The entire dynamic process of the deformation loaded of recording sheet material 5 or even failure, realizes in-situ observation truly.It thus can
The macromechanics behavior of quantitative study material and the relationship of micromechanism.The present invention can reappear what thin-film material was impacted by Hard Inclusion
Operating mode, deformation, deformation mechanism and mechanical property in situ measurement whole process are research novel film materials in this operating mode
Under elasticity modulus, internal stress and combine can strong test instrument.
Claims (5)
1. a kind of mechanical property in-situ test auxiliary device of flexible substrates film concentrfated load, it is characterised in that:It include folder
Hold mechanism, teleblem mechanism, load maintainer and Precision measurement unit;
Clamping device by frame, be connected to the frame tabletting, fastening bolt forms, frame is hollow structure, and film test piece is set
Film test piece is pressed between tabletting and frame on frame, tightening fastening bolt;
Teleblem mechanism is made of heading, connecting rod, bulb push rod, axis pin, and connection club shaft is hinged on frame, connecting rod head end
Connection heading, heading are in frame hollow center, and the connection heading of connecting rod head end, connecting rod end connects with bulb push rod
It connects, bulb push rod coordinates with load maintainer;
Load maintainer includes link, precision DC servo motor, shaft coupling, driving wheel, supporting plate, bearing, and supporting plate is connected to
The frame side wall of clamping device, precision DC servo motor are fixedly mounted on link, precision DC servo motor equipped with
Retarder, output shaft is axially coupled with driving wheel by shaft coupling, and drive wheel circumferences side wall is equipped with spiral groove, teleblem machine
The end of structure bulb push rod and the groove of driving wheel coordinate, and driving wheel bottom is assemblied in by bearing on supporting plate;
Precision measurement unit includes photoelectric encoder, grating scale, capture card and PC machine, the essence of photoelectric encoder and load maintainer
Close DC servo motor is coaxially connected, and grating ruler reading head is mounted on frame, and grating scale main scale is mounted on connection club shaft,
Photoelectric encoder, grating scale are transferred to PC machine processing, PC machine and microscope host communication by capture card gathered data.
2. the mechanical property in-situ test auxiliary device of flexible substrates film concentrfated load according to claim 1, special
Sign is:The connecting rod end is equipped with bulb, and bulb is embedded in the groove of driving wheel.
3. the mechanical property in-situ test auxiliary device of flexible substrates film concentrfated load according to claim 1, special
Sign is:The tabletting is with film test piece contact surface with decorative pattern.
4. the mechanical property in-situ test auxiliary device according to claim 1 based on flexible substrates film concentrfated load,
It is characterized in that:The connecting rod is set as Z-shaped.
5. the mechanical property in-situ test auxiliary device of flexible substrates film concentrfated load according to claim 1, special
Sign is:The frame and link are equipped with the threaded hole that can mount in electron microscope cavity.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810406313.5A CN108693034B (en) | 2018-04-30 | 2018-04-30 | Mechanical property in-situ test auxiliary device for concentrated load of flexible substrate film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810406313.5A CN108693034B (en) | 2018-04-30 | 2018-04-30 | Mechanical property in-situ test auxiliary device for concentrated load of flexible substrate film |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108693034A true CN108693034A (en) | 2018-10-23 |
| CN108693034B CN108693034B (en) | 2021-06-04 |
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| CN201810406313.5A Expired - Fee Related CN108693034B (en) | 2018-04-30 | 2018-04-30 | Mechanical property in-situ test auxiliary device for concentrated load of flexible substrate film |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110749516A (en) * | 2019-10-09 | 2020-02-04 | 清华大学 | Soft film fatigue tester device |
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| 杨芳: "气密性涂层织物的撕裂和顶破性能探讨", 《中国个体防护装备》 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110749516A (en) * | 2019-10-09 | 2020-02-04 | 清华大学 | Soft film fatigue tester device |
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| Publication number | Publication date |
|---|---|
| CN108693034B (en) | 2021-06-04 |
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